Manual test bench X-axis correction device and light sensing chip test equipment

Abstract

The utility model provides a manual test bench X-axis correction device and light sensing chip test equipment, and relates to the semiconductor test equipment technology field, the manual test bench X-axis correction device comprises a lower loading bench, an upper loading bench, a bearing assembly and an elastic floating assembly; the bearing assembly is connected with the downloading table through the elastic floating assembly, the bearing assembly has floating allowance relative to the elastic floating assembly along the X axis, and the bearing assembly is provided with a chip mounting cavity and a first positioning hole; the upper carrying table and the lower carrying table are movably connected along the Z axis, the upper carrying table is provided with a probe arranged opposite to the chip mounting cavity along the Z axis, and the upper carrying table is provided with a first positioning piece used for being inserted into the first positioning hole. The X-axis correcting device for the manual test bench can reduce combined structure tolerance caused by separation of structural parts, is more flexible and controllable in adjustment, and can quickly correct when positioning in the X-axis direction is inaccurate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing equipment technology, and in particular to a hand-held testing stage X-axis calibration device and a photosensitive chip testing device. Background Technology

[0002] In the testing of photosensitive chips (such as TOF sensors and photoelectric conversion chips), inaccurate positioning is a core issue restricting testing efficiency and accuracy. Traditional testing platforms, over long-term use, often suffer from insufficient alignment accuracy between the chip and test components (such as light sources and probes). This is especially problematic in multi-parameter, high-frequency tests, where mechanical vibrations and manual operation errors can easily cause positional shifts, resulting in damage to the exposed area of ​​the optical path and signal acquisition distortion. Furthermore, poor coordination between packaging processes and test structures (such as mechanical stress during chip assembly and disassembly) further exacerbates positioning deviations, leading to low repeatability and insufficient reliability of test results.

[0003] For example, existing technologies may develop positioning deviations in the X-axis direction after long-term use, leading to inaccurate positioning of test results and optical tubes or probes. To address this issue, wedge blocks or spring plungers are typically used for separate pre-positioning. However, because the precise positioning is not on the same structural component, these methods are prone to deviations due to combined tolerances. Furthermore, they lack adjustment flexibility and cannot be quickly adjusted when positioning is inaccurate. Utility Model Content

[0004] The purpose of this invention is to provide a hand-held X-axis calibration device and a photosensitive chip testing equipment, which can reduce the assembly tolerance caused by the separation of structural components, and the adjustment is more flexible and controllable. It can also quickly correct inaccurate positioning in the X-axis direction.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] In the first aspect, this utility model provides a manual measuring platform X-axis correction device, including a download platform, an loading platform, a bearing component, and an elastic floating component;

[0007] The carrier component is connected to the download stage via an elastic floating component. The carrier component has a floating margin relative to the elastic floating component along the X-axis. The carrier component is provided with a chip mounting cavity and a first positioning hole.

[0008] The loading stage and the downloading stage are movably connected along the Z-axis. The loading stage is equipped with a probe that is disposed opposite to the chip mounting cavity along the Z-axis. The loading stage is provided with a first positioning element for insertion into the first positioning hole.

[0009] In an optional implementation, the first positioning element is configured as a plurality of the first positioning elements, which are arranged around the probe, and the first positioning hole is configured as a plurality of the first positioning elements corresponding one-to-one.

[0010] In an optional embodiment, the elastic floating component includes a connector and an elastic element. The connector passes through the support component and connects to the download platform. The support component slides with the connector along the Z-axis, and the support component has a floating margin relative to the connector along the X-axis. The elastic element is disposed between the support component and the download platform.

[0011] In an optional embodiment, the upper stage includes a stage body and a probe mounting base connected to the stage body;

[0012] The platform body is provided with a second positioning member, which extends along the Z-axis in a direction away from the download platform.

[0013] The probe mounting base is equipped with the probe and the first positioning element.

[0014] In an optional embodiment, the supporting component includes a bracket, a carrier frame, and a limiting member;

[0015] The wafer frame is connected to the support, and the wafer frame is provided with the chip mounting cavity;

[0016] The bracket has a floating margin relative to the elastic floating component along the X-axis;

[0017] The limiting member is connected to the side wall of the bracket, and the limiting member is used to engage with the limiting plate assembly to limit the position of the bracket relative to the limiting plate assembly along the X-axis.

[0018] In an optional embodiment, the limiting member is configured to be at least one, one end of the limiting member is connected to the side wall of the bracket, the other end protrudes from the side wall of the bracket, and the outer surface of the portion protruding from the side wall is an arc surface.

[0019] Secondly, this utility model provides a photosensitive chip testing device, including the X-axis calibration device of the hand test stage as described in any of the foregoing embodiments.

[0020] In an optional embodiment, the system further includes a support platform, a slide rail, and a limiting plate assembly. The slide rail and the limiting plate assembly are both connected to the support platform. The limiting plate assembly is used to abut against the top surface of the bearing component. The download platform slides along the X-axis in cooperation with the slide rail.

[0021] In an optional embodiment, the limiting plate assembly includes a support plate, a base plate, and a limiting beam;

[0022] The base plate is connected to the support platform via the support plate, and the base plate has a through hole for insertion into the second positioning component in the upper platform;

[0023] The limiting beam is connected to the base plate, and the bottom end of the limiting beam is recessed with a groove that engages with the limiting member in the bearing assembly, so as to limit the position of the bearing assembly relative to the limiting beam along the X-axis.

[0024] In an optional embodiment, the limiting beam extends along the X-axis, and the end of the limiting beam has a guide surface for guiding the limiting member to below the limiting beam.

[0025] The X-axis calibration device for the hand-held measuring platform provided by this utility model can produce the following beneficial effects:

[0026] Compared to existing technologies, the X-axis calibration device for a hand-held testing stage provided by this utility model, through the setting of a first positioning component and a first positioning hole, enables coarse positioning of the bearing component and the upper stage in a combined manner, reducing the structural tolerances caused by the separation of structural components. When performing multi-station tests, the adjustment is more flexible and controllable, solving the problem of inaccurate positioning of wedge blocks or spring plungers in the X-axis direction. Because the bearing component has a floating margin relative to the elastic floating component along the X-axis, precise positioning can be achieved through the floating space for X-axis positioning correction, thus meeting the requirements for accurate positioning.

[0027] The photosensitive chip testing equipment provided in the second aspect of this utility model includes the hand-held X-axis calibration device provided in the first aspect of this utility model, thereby possessing all the beneficial effects of the hand-held X-axis calibration device provided in the first aspect of this utility model. Attached Figure Description

[0028] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 An exploded view of a portion of the structure of a Z-axis adjustment device for a hand-held measuring platform provided in an embodiment of this utility model;

[0030] Figure 2 A top view of a photosensitive chip testing device provided in an embodiment of this utility model;

[0031] Figure 3 for Figure 2 A-A cross-sectional view;

[0032] Figure 4 for Figure 2 B-B cross-sectional view;

[0033] Figure 5 A top view of a Z-axis adjustment device for a hand measuring platform provided in an embodiment of this utility model;

[0034] Figure 6 for Figure 6 C-C partial cross-sectional view;

[0035] Figure 7 This is a three-dimensional structural diagram of a photosensitive chip testing device provided in an embodiment of the present invention.

[0036] Icons: 1 - Download platform; 11 - Guide frame; 111 - Guide hole; 12 - First locking hole; 2 - Upper platform; 21 - Probe; 22 - Platform body; 221 - Second positioning component; 222 - Guide column; 23 - Probe mounting base; 231 - First positioning component; 24 - Second locking hole; 3 - Lifting mechanism; 31 - Elbow clamp; 4 - Bearing assembly; 41 - Bracket; 411 - Mounting hole; 412 - Receiving hole; 42 - Chip frame; 421 - Chip mounting cavity; 422 - First positioning hole; 43 - Gasket; 44 - Limiting component; 5 - Elastic floating assembly; 51 - Connector; 52 - Spring; 6 - Locking component; 7 - Support platform; 8 - Slide rail; 9 - Limiting plate assembly; 91 - Support plate; 92 - Base plate; 921 - Through hole; 93 - Limiting beam; 931 - Slot; 932 - Guide surface. Detailed Implementation

[0037] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0038] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0039] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0040] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0041] The first aspect of this utility model is to provide a hand-held measuring platform X-axis calibration device, such as... Figures 1 to 7 As shown, it includes a download platform 1, an upload platform 2, a support component 4, and a flexible floating component 5;

[0042] The carrier component 4 is connected to the download stage 1 via the elastic floating component 5. The carrier component 4 has a floating margin relative to the elastic floating component 5 along the X-axis. The carrier component 4 is provided with a chip mounting cavity 421 and a first positioning hole 422.

[0043] The loading stage 2 and the download stage 1 are movably connected along the Z-axis. The loading stage 2 is equipped with a probe 21 that is positioned opposite to the chip mounting cavity 421 along the Z-axis. The loading stage 2 is provided with a first positioning member 231 for insertion into the first positioning hole 422.

[0044] When the X-axis calibration device of the hand measuring stage provided in the first aspect of this utility model is used, the upper platform 2 moves upward relative to the lower platform 1 along the Z-axis. During this process, the first positioning member 231 on the upper platform 2 can be inserted into the first positioning hole 422 of the bearing component 4, reducing the combined structural tolerance caused by the separate setting of the bearing component 4 and the upper platform 2. At the same time, since the bearing component 4 has a floating margin relative to the elastic floating component 5 along the X-axis, the X-axis positioning calibration can be performed through the floating space, thereby achieving the requirement of accurate positioning.

[0045] Compared to existing technologies, the X-axis calibration device for the hand-held testing stage provided in the first aspect of this utility model, through the arrangement of the first positioning member 231 and the first positioning hole 422, enables coarse positioning of the bearing assembly 4 and the upper platform 2 in a combined manner, reducing the structural tolerance caused by the separation of structural components. When performing multi-station tests, the adjustment is more flexible and controllable, solving the problem of inaccurate positioning of the wedge block or spring plunger in the X-axis direction. Because the bearing assembly 4 has a floating margin relative to the elastic floating assembly 5 along the X-axis, precise positioning can be achieved through the floating space for X-axis positioning correction, thus meeting the requirements for accurate positioning.

[0046] Specifically, the first positioning element 231 can be configured as one or multiple.

[0047] In an optional embodiment, a plurality of first positioning elements 231 are configured, and the plurality of first positioning elements 231 are arranged around the probe 21, and a plurality of first positioning holes 422 are configured to correspond one-to-one with the first positioning elements 231.

[0048] The top end of the first positioning member 231 may include a variable diameter section. Along the Z-axis upward direction, the outer diameter of the variable diameter section gradually decreases. The above arrangement facilitates the first positioning member 231 to enter the first positioning hole 422.

[0049] In alternative implementations, such as Figure 6 As shown, the elastic floating component 5 includes a connector 51 and an elastic element. The connector 51 passes through the bearing component 4 and connects to the download platform 1. The bearing component 4 slides with the connector 51 along the Z-axis, and the bearing component 4 has a floating margin relative to the connector 51 along the X-axis. The elastic element is disposed between the bearing component 4 and the download platform 1.

[0050] In use, if there is a tolerance in the Z-axis between the bearing assembly 4 and the upper platform 2 and the limiting plate group 9, the Z-axis position of the bearing assembly 4 can be adjusted by the elastic force of the elastic element, thereby absorbing the tolerance in the Z direction. The adjustment is flexible and highly operable. If there is a tolerance in the X-axis between the bearing assembly 4 and the upper platform 2 and the limiting plate group 9, the above-mentioned floating allowance can be used to absorb the tolerance in the X direction.

[0051] The connector 51 can be a bolt, screw, or pin, etc.

[0052] In alternative implementations, such as Figure 6 As shown, the elastic element includes a spring 52, which is sleeved on the outside of the connector 51. One end of the spring 52 abuts against the download platform 1, and the other end of the spring 52 extends into the bearing assembly 4 and abuts against the bearing assembly 4.

[0053] When the load-bearing component 4 needs to float downwards, the spring 52 can be compressed; conversely, the spring 52 can release its elastic force to make the load-bearing component 4 float upwards.

[0054] In the above embodiment, pre-positioning via spring 52 and connector 51 allows for quantifiable detection of wear. When wear is present, it facilitates monitoring and replacement to ensure positioning accuracy. Furthermore, the replacement parts are smaller, resulting in a more cost-effective solution.

[0055] In alternative implementations, such as Figure 1 As shown, the upper stage 2 includes a stage body 22 and a probe mounting base 23 connected to the stage body 22; the stage body 22 is provided with a second positioning member 221, which extends along the Z-axis in a direction away from the download stage 1; the probe mounting base 23 is equipped with a probe 21 and a first positioning member 231.

[0056] When the upper platform 2 rises, the second positioning member 221 can extend into the through hole 921 in the limiting plate group 9, thereby limiting the position of the upper platform 2 relative to the limiting plate group 9 along the X-axis and Y-axis. At the same time, the first positioning member 231 can extend into the first positioning hole 422 of the bearing assembly 4, thereby correcting the position of the bearing assembly 4 relative to the upper platform 2 along the X-axis and Y-axis.

[0057] It is understandable that the X-axis, Y-axis and Z-axis mentioned above are perpendicular to each other.

[0058] In an optional implementation, the probe 21 is floatable relative to the probe mount 23 along the Z-axis direction. The structure for achieving this floatability is a known existing technology, such as using a spring.

[0059] In alternative implementations, such as Figure 1 As shown, the support component 4 includes a bracket 41, a chip carrier frame 42, and a limiting member 44; the chip carrier frame 42 is connected to the bracket 41, and the chip carrier frame 42 is provided with a chip mounting cavity 421 and a first positioning hole 422; the bracket 41 has a floating margin relative to the elastic floating component 5 along the X-axis; the limiting member 44 is connected to the side wall of the bracket 41, and the limiting member 44 is used to engage with the limiting plate group 9 to limit the position of the bracket 41 relative to the limiting plate group 9 along the X-axis.

[0060] In the above embodiments, the bearing component 4 is provided with a limiting member 44, which can be engaged with the limiting plate group 9 to limit the position of the bracket 41 relative to the limiting plate group 9 along the X-axis, thereby realizing the limiting of the bearing component 4 along the X-axis.

[0061] The limiting component 44 can be a bolt or a pin, etc.

[0062] In an optional embodiment, at least one limiting member 44 is configured, one end of the limiting member 44 is connected to the side wall of the bracket 41, and the other end protrudes from the side wall of the bracket 41, and the outer surface of the portion protruding from the side wall is an arc surface.

[0063] To facilitate the connection of the limiting member 44, the limiting member can be a bolt. One end of the bolt is threaded to the side wall of the bracket 41, and the other end protrudes from the side wall of the bracket 41 and has the aforementioned arc surface.

[0064] like Figure 6 As shown, the bracket 41 has a mounting hole 411 at the end away from the download platform 1. A gasket 43 is detachably connected in the mounting hole 411. The gasket 43 is sleeved on the outside of the connector 51, and the gasket 43 is located between the bottom of the mounting hole 411 and the end of the connector 51 away from the download platform 1.

[0065] By adding shims 43, changing the thickness of shims 43, and replacing springs 52 with different strokes, the floating stroke of the bearing assembly 4 along the Z-axis can be adjusted, which satisfies both efficiency requirements and the problem of large errors in multiple stations.

[0066] like Figure 6 As shown, the end of the bracket 41 near the download platform 1 is provided with a receiving hole 412, and the end of the spring 52 away from the download platform 1 extends into the receiving hole 412 and abuts against the bracket 41.

[0067] In an optional implementation, the loading platform 2 is movably connected to the downloading platform 1 via a lifting mechanism 3, which is configured to drive the loading platform 2 to move up and down along the Z-axis.

[0068] It should be noted that any structure capable of lifting the upper platform 2 can be the aforementioned lifting mechanism 3. The lifting mechanism 3 can be a pneumatic cylinder, hydraulic cylinder, linear motor, etc.

[0069] In alternative implementations, such as Figure 3 As shown, the download platform 1 is equipped with a guide frame 11, and the upper platform 2 slides along the Z-axis with the guide frame 11; the lifting mechanism 3 includes an elbow clamp 31, which is rotatably connected between the guide frame 11 and the upper platform 2 to drive the upper platform 2 to slide relative to the guide frame 11 along the Z-axis.

[0070] When in use, rotating the elbow clamp 31 downwards causes the upper platform 2 to slide downwards relative to the guide frame 11 along the Z-axis. Rotating the elbow clamp 31 upwards causes the upper platform 2 to slide upwards relative to the guide frame 11 along the Z-axis, thereby raising and lowering the upper platform 2. This allows the probe 21 to contact the chip or cancel the contact between the probe 21 and the chip.

[0071] The elbow clamp 31 described above can adopt the elbow clamp structure in the prior art, so the specific structure of the elbow clamp 31 will not be described in detail.

[0072] Specifically, such as Figure 3 As shown, the guide frame 11 is provided with a guide hole 111, and the platform body 22 of the upper platform 2 has a guide post 222 that extends into the guide hole and slides in cooperation with the guide hole.

[0073] In alternative implementations, such as Figure 3 As shown, the download platform 1 is provided with a first locking hole 12, and the loading platform 2 is provided with a second locking hole 24.

[0074] When in use, when the lifting mechanism 3 moves the upper platform 2 to the position, the first locking hole 12 and the second locking hole 24 are set opposite each other in the horizontal direction. The user can insert the locking piece 6 into the first locking hole 12 and the second locking hole 24 to limit the position of the upper platform 2 relative to the lower platform 1 along the Z-axis.

[0075] In an optional implementation, the download platform 1, the loading platform 2, the bearing component 4, and the elastic floating component 5 are all made of metal, and the outer surface is provided with a black anti-static coating to improve hardness while ensuring that the leakage of the light path is not increased.

[0076] In the above embodiments, the carrier component 4 may also be made of antistatic material only for the surface that contacts the chip.

[0077] The second aspect of this utility model provides a photosensitive chip testing device, which includes the aforementioned hand-held testing platform X-axis calibration device.

[0078] The photosensitive chip testing equipment provided in the second aspect of this utility model includes the hand-held X-axis calibration device provided in the first aspect of this utility model, thereby possessing all the beneficial effects of the hand-held X-axis calibration device provided in the first aspect of this utility model.

[0079] In alternative implementations, such as Figure 7 As shown, the photosensitive chip testing equipment also includes a support platform 7, a slide rail 8, and a limiting plate group 9. The slide rail 8 and the limiting plate group 9 are both connected to the support platform 7. The limiting plate group 9 is used to abut against the top surface of the bearing component 4. The download stage 1 slides along the X-axis in cooperation with the slide rail 8.

[0080] In use, the download platform 1 can slide along the X-axis relative to the slide rail 8. After sliding into position, the lifting mechanism 3 drives the upper loading platform 2 to rise and fall.

[0081] In alternative implementations, such as Figure 1 and Figure 7 As shown, the limiting plate assembly 9 includes a support plate 91, a base plate 92, and a limiting beam 93; the base plate 92 is connected to the support platform 7 through the support plate 91, and the base plate 92 has a through hole 921 for insertion into the second positioning member 221 in the upper platform 2; the limiting beam 93 is connected to the base plate 92, and the bottom end of the limiting beam 93 is recessed with a slot 931 for engaging with the limiting member 44 in the bearing assembly 4, so as to limit the position of the bearing assembly 4 relative to the limiting beam 93 along the X-axis.

[0082] In use, the download platform 1 slides relative to the slide rail 8 along the X-axis. When it slides into position, the limiting member 44 engages with the slot 931. Then, the lifting mechanism 3 drives the upper platform 2 to move upward relative to the download platform 1 along the Z-axis. After the download platform 1 moves upward into position, the carrier frame 42 abuts against the base plate 92. During the upward movement of the download platform 1, the first positioning member 231 on the upper platform 2 can be inserted into the first positioning hole 422. At the same time, the first positioning member 231 can be inserted into the first positioning hole 422. The bearing component 4 absorbs the tolerance in the Z-direction through the elastic floating component 5. The bearing component 4 is positioned and corrected by floating relative to the connecting member 51 along the X-axis, thereby achieving the requirement of accurate positioning.

[0083] In alternative implementations, such as Figure 1 As shown, the limiting beam 93 extends along the X-axis, and the end of the limiting beam 93 has a guide surface 932, which is used to guide the limiting member 44 to the underside of the limiting beam 93.

[0084] In the above embodiment, when the download platform 1 slides relative to the slide rail 8 along the X-axis, the arc surface of the end of the limiting member 44 contacts the guide surface 932. Under the guidance of the guide surface 932, the limiting member 44 drives the bracket 41 to move downward to compress the spring 52. The limiting member 44 moves to below the limiting beam 93 until the end of the limiting member 44 is aligned with the slot 931. Then the spring 52 releases its elastic force, and the limiting member 44 engages with the slot 931.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A hand-held X-axis calibration device, characterized in that, It includes a download station (1), an upload station (2), a support component (4), and a flexible floating component (5); The carrier component (4) is connected to the download stage (1) through the elastic floating component (5). The carrier component (4) has a floating margin relative to the elastic floating component (5) along the X-axis. The carrier component (4) is provided with a chip mounting cavity (421) and a first positioning hole (422). The loading stage (2) is movably connected to the download stage (1) along the Z-axis. The loading stage (2) is equipped with a probe (21) that is disposed opposite to the chip mounting cavity (421) along the Z-axis. The loading stage (2) is provided with a first positioning element (231) for insertion into the first positioning hole (422).

2. The hand-held X-axis calibration device according to claim 1, characterized in that, The first positioning element (231) is configured in multiple ways, and the multiple first positioning elements (231) are arranged around the probe (21). The first positioning hole (422) is configured in multiple ways, each corresponding to one of the first positioning elements (231).

3. The hand-held X-axis calibration device according to claim 1, characterized in that, The elastic floating component (5) includes a connector (51) and an elastic element. The connector (51) passes through the bearing component (4) and is connected to the download platform (1). The bearing component (4) slides along the Z-axis with the connector (51), and the bearing component (4) has a floating margin relative to the connector (51) along the X-axis. The elastic element is disposed between the bearing component (4) and the download platform (1).

4. The hand-held X-axis calibration device according to claim 1, characterized in that, The upper stage (2) includes a stage body (22) and a probe mounting base (23) connected to the stage body (22); The platform body (22) is provided with a second positioning member (221), which extends along the Z-axis in a direction away from the download platform (1); The probe mounting base (23) is equipped with the probe (21) and the first positioning element (231).

5. The hand-held measuring stage X-axis calibration device according to claim 1, characterized in that, The bearing assembly (4) includes a bracket (41), a carrier frame (42), and a limiting member (44); The wafer frame (42) is connected to the support (41), and the wafer frame (42) is provided with the chip mounting cavity (421); The bracket (41) has a floating margin relative to the elastic floating component (5) along the X-axis; The limiting member (44) is connected to the side wall of the bracket (41), and the limiting member (44) is used to engage with the limiting plate group (9) to limit the position of the bracket (41) relative to the limiting plate group (9) along the X-axis.

6. The hand-held X-axis calibration device according to claim 5, characterized in that, The limiting member (44) is configured to be at least one, one end of the limiting member (44) is connected to the side wall of the bracket (41), the other end protrudes from the side wall of the bracket (41), and the outer surface of the part protruding from the side wall is an arc surface.

7. A photosensitive chip testing device, characterized in that, Includes the hand-held measuring platform X-axis calibration device as described in any one of claims 1-6.

8. The photosensitive chip testing device according to claim 7, characterized in that, It also includes a support platform (7), a slide rail (8) and a limiting plate group (9). The slide rail (8) and the limiting plate group (9) are both connected to the support platform (7). The limiting plate group (9) is used to abut against the top surface of the bearing component (4). The download platform (1) slides along the X-axis with the slide rail (8).

9. The photosensitive chip testing equipment according to claim 8, characterized in that, The limiting plate assembly (9) includes a support plate (91), a base plate (92), and a limiting beam (93); The base plate (92) is connected to the support platform (7) through the support plate (91), and the base plate (92) has a through hole (921) for insertion into the second positioning member (221) in the upper platform (2); The limiting beam (93) is connected to the base plate (92). The bottom end of the limiting beam (93) is recessed with a slot (931) that engages with the limiting member (44) in the bearing assembly (4) to limit the position of the bearing assembly (4) relative to the limiting beam (93) along the X-axis.

10. The photosensitive chip testing device according to claim 9, characterized in that, The limiting beam (93) extends along the X-axis, and the end of the limiting beam (93) has a guide surface (932) for guiding the limiting member (44) to the underside of the limiting beam (93).

Images