Galvanometer scanning system

Abstract

The utility model provides a galvanometer scanning system. The galvanometer scanning system comprises a first scanning galvanometer set and a second scanning galvanometer set, the first scanning galvanometer set comprises a first galvanometer and a second galvanometer, and the rotation center of the first galvanometer and the rotation center of the second galvanometer are arranged in parallel in the first direction. The second scanning galvanometer group comprises a third galvanometer and a fourth galvanometer, the rotation center of the third galvanometer and the rotation center of the fourth galvanometer are arranged in parallel in the second direction, and the second direction intersects with the first direction; incident light is reflected by the first scanning galvanometer group and the second scanning galvanometer group in sequence. The galvanometer scanning system is used for achieving the effect of improving the scanning speed.

Description

Technical Field

[0001] This application relates to the field of laser scanning technology, and more particularly to a galvanometer scanning system. Background Technology

[0002] Galvanometer scanning can achieve rapid scanning of various shapes within a small area. It features small size, fast scanning speed, high scanning accuracy, and high repeatability, and is widely used in laser marking, laser engraving, laser cutting, laser welding, laser drilling, laser quenching, laser cleaning, and other fields.

[0003] With the continuous development of laser applications, laser scanning applications are becoming increasingly complex and efficient, making the efficiency of galvanometer scanning increasingly important. However, the scanning speed of existing galvanometer scanning systems is difficult to improve further. Utility Model Content

[0004] This application provides a galvanometer scanning system to improve scanning speed.

[0005] This application provides a galvanometer scanning system, including:

[0006] The first scanning galvanometer group includes a first galvanometer and a second galvanometer, and the rotation centers of the first galvanometer and the second galvanometer are arranged in parallel along a first direction.

[0007] The second scanning galvanometer group includes a third galvanometer and a fourth galvanometer. The rotation centers of the third galvanometer and the fourth galvanometer are arranged parallel to each other along a second direction, which intersects the first direction.

[0008] The incident light is reflected sequentially by the first scanning mirror group and the second scanning mirror group.

[0009] In some possible implementations, the second direction is perpendicular to the first direction, and the rotation centers of the first, second, third, and fourth galvanometers are all perpendicular to the incident direction of the incident light.

[0010] In some possible implementations, both the first and second galvanometers are reflectors, with their reflecting surfaces facing each other.

[0011] In some possible implementations, the first galvanometer and the second galvanometer rotate synchronously and in opposite directions.

[0012] In some possible implementations, both the third and fourth galvanometers are reflectors, with their reflecting surfaces facing each other.

[0013] In some possible implementations, the third and fourth galvanometers rotate synchronously and in opposite directions.

[0014] In some possible implementations, the first scanning galvanometer group further includes:

[0015] A first drive mechanism is connected to the first galvanometer and drives the first galvanometer to rotate.

[0016] The second drive mechanism is connected to the second galvanometer and drives the second galvanometer to rotate.

[0017] In some possible implementations, the second scanning galvanometer assembly further includes:

[0018] The third drive mechanism is connected to the third galvanometer and drives the third galvanometer to rotate;

[0019] The fourth drive mechanism is connected to the fourth galvanometer and drives the fourth galvanometer to rotate.

[0020] In some possible implementations, the galvanometer scanning system further includes:

[0021] A light source used to produce light beams;

[0022] An optical fiber, connected to the light source, is used to transmit the light beam;

[0023] A coupler, connected to the optical fiber, is used for beam expansion;

[0024] A collimating lens, positioned opposite the coupler, is used to shape the light beam into parallel light, forming the incident light.

[0025] In some possible implementations, the galvanometer scanning system further includes:

[0026] The focusing device focuses the light beam emitted from the second scanning galvanometer group.

[0027] In some possible implementations, the galvanometer scanning system further includes:

[0028] The compensation mechanism is connected to both the second scanning galvanometer group and the first scanning galvanometer group, and is used to drive the second scanning galvanometer group to translate along the first direction according to the deflection angle of the first galvanometer and the second galvanometer.

[0029] The galvanometer scanning system provided in this application includes a first scanning galvanometer group and a second scanning galvanometer group. The first scanning galvanometer group includes a first galvanometer and a second galvanometer, whose rotation centers are arranged parallel to each other along a first direction. The second scanning galvanometer group includes a third galvanometer and a fourth galvanometer, whose rotation centers are arranged parallel to each other along a second direction, which intersects the first direction. Incident light is reflected sequentially through the first and second scanning galvanometer groups. The first and second galvanometers can be used to adjust the deflection angle of the light beam along the first direction, and the third and fourth galvanometers can be used to adjust the deflection angle of the light beam along the second direction. Furthermore, the first, second, and third galvanometers can all deflect the light beam, resulting in a larger deflection angle for the light beam passing through the first and second scanning galvanometer groups, thereby improving the scanning range and scanning speed of the galvanometer scanning system. Attached Figure Description

[0030] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0031] Figure 1 A schematic diagram of the galvanometer scanning system provided in this application;

[0032] Figure 2 A schematic diagram of the first scanning galvanometer assembly provided for this application in its initial state;

[0033] Figure 3 The working principle diagram of the first scanning galvanometer group provided in this application;

[0034] Figure 4 A schematic diagram of the second scanning galvanometer assembly provided in this application in its initial state;

[0035] Figure 5 The working principle diagram of the second scanning galvanometer group provided in this application;

[0036] Figure 6 A schematic diagram illustrating the working principle of the galvanometer scanning system provided in this application.

[0037] Explanation of reference numerals in the attached figures:

[0038] 10-First scanning galvanometer group; 11-First galvanometer; 12-Second galvanometer; 13-First drive mechanism; 14-Second drive mechanism;

[0039] 20 - Second scanning galvanometer group; 21 - Third galvanometer; 22 - Fourth galvanometer; 23 - Third drive mechanism; 24 - Fourth drive mechanism;

[0040] 31-Fiber optic cable; 32-Coupler; 33-Collimating lens; 34-Focusing device.

[0041] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concepts of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0042] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0043] In existing technology, a galvanometer scanning system includes a reflector positioned along the X-axis and a reflector positioned along the Y-axis. These two reflectors are driven by motors to guide the incident light beam at a specific angle into a focusing lens, thereby focusing it on a specific plane. The scanning speed of this galvanometer scanning system depends on the performance of the motor and the rotational inertia of the reflectors. When both of these reach their limits, it is difficult to further increase the scanning speed of the galvanometer scanning system.

[0044] The galvanometer scanning system provided in this application includes a first scanning galvanometer group and a second scanning galvanometer group arranged sequentially along the optical path. The first scanning galvanometer group includes a first galvanometer and a second galvanometer arranged along a first direction, and the second scanning galvanometer group includes a third galvanometer and a fourth galvanometer arranged along a second direction, so as to achieve deflection of the light beam in two directions. Furthermore, the first galvanometer, the second galvanometer, the third galvanometer, and the fourth galvanometer can all apply deflection to the light beam, so that the light beam passing through the first scanning galvanometer group and the second scanning galvanometer group has a larger deflection angle, thereby improving the scanning range and scanning speed of the galvanometer scanning system.

[0045] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will now be described with reference to the accompanying drawings.

[0046] See Figures 1 to 6This application provides a galvanometer scanning system, which includes a first scanning galvanometer group 10 and a second scanning galvanometer group 20. The first scanning galvanometer group 10 includes a first galvanometer 11 and a second galvanometer 12, whose rotation centers are arranged parallel to each other along a first direction. The second scanning galvanometer group 20 includes a third galvanometer 21 and a fourth galvanometer 22, whose rotation centers are arranged parallel to each other along a second direction, which intersects the first direction. Incident light is reflected sequentially by the first scanning galvanometer group 10 and the second scanning galvanometer group 20.

[0047] The galvanometer scanning system includes a first scanning galvanometer group 10 and a second scanning galvanometer group 20, which are arranged sequentially along the optical path. Incident light can be deflected by the first scanning galvanometer group 10 and then propagated (e.g., reflected) to the second scanning galvanometer group 20, where its deflection angle is altered again (e.g., reflected). By utilizing the optical leverage effect of the first and second scanning galvanometer groups 10, the scanning speed and scanning range of the galvanometer scanning system can be increased.

[0048] The first scanning galvanometer group 10 includes a first galvanometer 11 and a second galvanometer 12, such as... Figure 1 and Figure 2 As shown, the rotation center O1 of the first galvanometer 11 and the rotation center O2 of the second galvanometer 12 are arranged parallel to each other along a first direction. The aforementioned rotation center refers to the rotation axis of the corresponding galvanometer, that is, the galvanometer rotates along its rotation axis. The first direction is as follows: Figure 1 The Y direction shown, for example, the first direction, is perpendicular to the rotation center O1 of the first galvanometer 11 and the rotation center O2 of the second galvanometer 12, and the rotation center O1 of the first galvanometer 11 and the rotation center O2 of the second galvanometer 12 are parallel.

[0049] In some possible examples, the rotation center of the first galvanometer 11 and the rotation center of the second galvanometer 12 are both perpendicular to the incident direction of the incident light, such that the incident direction of the incident light is as follows: Figure 1 The Z direction is shown. The rotation center O1 of the first galvanometer 11 and the rotation center O2 of the second galvanometer 12 are both aligned with... Figure 1 The X direction shown is parallel and along Figure 1 The Y-direction arrangement is shown.

[0050] In this system, both the first galvanometer 11 and the second galvanometer 12 are reflectors, with their reflective surfaces facing each other to reflect the incident light. The optical lever formed by the first galvanometer 11 and the second galvanometer 12 increases the deflection angle of the beam after passing through the first scanning galvanometer group 10. The reflective surface of the first galvanometer 11 is parallel to its rotation center, and the reflective surface of the second galvanometer 12 is parallel to its rotation center.

[0051] In the initial state, the reflecting surfaces of the first galvanometer 11 and the second galvanometer 12 are arranged in parallel. For example... Figure 2 As shown, in the initial state, the reflecting surfaces of the first galvanometer 11 and the second galvanometer 12 are both set at 45° relative to the incident direction of the incident light. Both the first galvanometer 11 and the second galvanometer 12 can be thin lenses. The initial state refers to the state when neither the first scanning galvanometer group 10 nor the second scanning galvanometer group 20 has rotated.

[0052] In some possible implementations, the first galvanometer 11 and the second galvanometer 12 rotate synchronously and in opposite directions to achieve scanning along a first direction. Synchronous rotation of the first galvanometer 11 and the second galvanometer 12 means that they rotate simultaneously and at the same speed, i.e., at the same angle. Opposite rotation of the first galvanometer 11 and the second galvanometer 12 means that they rotate in opposite directions; for example, the first galvanometer 11 rotates clockwise, and the second galvanometer 12 rotates counterclockwise.

[0053] like Figure 2 and Figure 3 As shown, the incident light is reflected by the first galvanometer 11 and then propagates to the second galvanometer 12, where it is reflected again. When the first galvanometer 11 rotates clockwise by an angle of θ1, the light is deflected clockwise by 2θ1 after reflection by the second galvanometer 12. Simultaneously, the second galvanometer 12 also rotates counterclockwise by an angle of θ1, applying an additional deflection angle of 2θ1. This results in a final deflection angle of 4θ1 for the light beam reflected by both the first and second galvanometers 11, thereby increasing the scanning range along the first direction within the working plane. All deflection angles refer to the angle difference from the initial state.

[0054] To enable the rotation of the first galvanometer 11 and the second galvanometer 12, the first scanning galvanometer assembly 10 further includes a first driving mechanism 13 and a second driving mechanism 14. The first driving mechanism 13 is connected to the first galvanometer 11 and drives it to rotate; the second driving mechanism 14 is connected to the second galvanometer 12 and drives it to rotate. The first driving mechanism 13 drives the first galvanometer 11 to rotate, thereby changing the angle between the reflecting surface of the first galvanometer 11 and the reflecting surface of the second galvanometer 12. The second driving mechanism 14 drives the second galvanometer 12 to rotate, thereby changing the angle between the reflecting surface of the second galvanometer 12 and the reflecting surface of the first galvanometer 11.

[0055] Thus, the first galvanometer 11 and the second galvanometer 12 can be driven independently by the first drive mechanism 13 and the second drive mechanism 14, respectively. The first drive mechanism 13 and the second drive mechanism 14 can be drive motors, whose output shafts can be fixedly connected to the corresponding first galvanometer 11 / second galvanometer 12. By coaxially arranging the two drive motors and allowing them to rotate simultaneously, at the same speed, and in opposite directions, the first galvanometer 11 and the second galvanometer 12 can be directly driven to rotate synchronously and in opposite directions. Coaxial arrangement of the two drive motors means that the output shafts of the two drive motors extend in the same direction. For example, the output shafts of the two drive motors connected to the first galvanometer 11 and the second galvanometer 12 extend along the X-axis.

[0056] See Figure 1 and Figure 4 The second scanning galvanometer group 20 includes a third galvanometer 21 and a fourth galvanometer 22. The rotation centers O3 of the third galvanometer 21 and O4 of the fourth galvanometer 22 are arranged parallel to each other along a second direction. This second direction also intersects the first direction, for example, it is perpendicular to it. The second direction is as follows: Figure 1 and Figure 4 The X direction shown, for example, the second direction, is perpendicular to the rotation center O3 of the third galvanometer 21 and the rotation center O4 of the fourth galvanometer 22, and the rotation center O3 of the third galvanometer 21 and the rotation center O4 of the fourth galvanometer 22 are parallel.

[0057] In some possible examples, the third galvanometer 21 and the fourth galvanometer 22 are spaced apart along the second direction and aligned along the first direction. Further, the first galvanometer 11 and the second galvanometer 12 are spaced apart along the first direction and aligned along the second direction.

[0058] In some possible examples, the rotation center O3 of the third galvanometer 21 and the rotation center O4 of the fourth galvanometer 22 are both perpendicular to the incident direction of the incident light, as shown in the example. Figure 1 The Z direction is shown. The rotation center O3 of the third galvanometer 21 and the rotation center O4 of the fourth galvanometer 22 are both in the Z direction. Figure 1 The Y-direction shown is parallel and along Figure 1 The arrangement in the X direction is shown.

[0059] In this design, both the third galvanometer mirror 21 and the fourth galvanometer mirror 22 are reflectors, with their reflective surfaces facing each other to reflect the light beam emitted from the first scanning galvanometer mirror group 10. The optical lever formed by the third galvanometer mirror 21 and the fourth galvanometer mirror 22 increases the deflection angle of the light beam after passing through the second scanning galvanometer mirror group 20. The reflective surface of the third galvanometer mirror 21 is parallel to its rotation center, and the reflective surface of the fourth galvanometer mirror 22 is parallel to its rotation center.

[0060] In the initial state, the reflecting surfaces of the third galvanometer 21 and the fourth galvanometer 22 are arranged in parallel. For example... Figure 3 As shown, in the initial state, the reflecting surfaces of the third galvanometer 21 and the fourth galvanometer 22 are both set at 45° relative to the incident direction of the incident light. Both the third galvanometer 21 and the fourth galvanometer 22 can be thin lenses.

[0061] In some possible implementations, the third galvanometer 21 and the fourth galvanometer 22 rotate synchronously and in opposite directions to achieve scanning along the second direction. Synchronous rotation of the third galvanometer 21 and the fourth galvanometer 22 means that they rotate simultaneously and at the same speed, i.e., the rotation angles are the same. Opposite rotation of the third galvanometer 21 and the fourth galvanometer 22 means that they rotate in opposite directions; for example, the third galvanometer 21 rotates clockwise, and the fourth galvanometer 22 rotates counterclockwise.

[0062] like Figure 4 and Figure 5 As shown, the incident light propagates through the first scanning mirror group 10 to the third mirror 21, and after being reflected by the third mirror 21, it propagates to the fourth mirror 22. When the third mirror 21 rotates clockwise by an angle of magnitude θ2, the light is deflected clockwise by 2θ2 after reflection by the third mirror 21. At the same time, the fourth mirror 22 also rotates counterclockwise by an angle of magnitude θ2, which applies an additional deflection angle of 2θ2, so that the final deflection angle of the beam after reflection by the third mirror 21 and the fourth mirror 22 is 4θ2, thereby improving the scanning range along the second direction in the working plane.

[0063] Understandably, when the mirrors in the first scanning mirror group 10 are not in their initial state, the light beam after passing through the first scanning mirror group 10 is incident on the second scanning mirror group 20 in a non-horizontal direction, resulting in a wider incident angle for each mirror in the second scanning mirror group 20. Thus, after each reflection by a scanning mirror group, the required receiving area for the next scanning mirror group is larger, requiring more reflective surface area. This results in the mirrors in the later scanning mirror groups along the optical path having larger areas, greater masses, and correspondingly greater moments of inertia.

[0064] In some possible examples, the galvanometer scanning system may also include a compensation mechanism connected to both the second scanning galvanometer group 20 and the first scanning galvanometer group 10. The compensation mechanism adjusts the position of the second scanning galvanometer group 20 according to the deflection angle of the first galvanometer 11 and the second galvanometer 12 in the first scanning galvanometer group 10. For example, it drives the second scanning galvanometer group 20 to move parallel along a first direction so that the second scanning galvanometer group 20 automatically follows the receiving area of ​​the first scanning galvanometer group 10, thereby reducing the rotational inertia of a single galvanometer and increasing the speed.

[0065] To enable the rotation of the third galvanometer mirror 21 and the fourth galvanometer mirror 22, the second scanning galvanometer assembly 20 further includes a third drive mechanism 23 and a fourth drive mechanism 24. The third drive mechanism 23 is connected to the third galvanometer mirror 21 and drives it to rotate; the fourth drive mechanism 24 is connected to the fourth galvanometer mirror 22 and drives it to rotate. The third drive mechanism 23 drives the third galvanometer mirror 21 to rotate, thereby changing the angle between the reflecting surface of the third galvanometer mirror 21 and the reflecting surface of the fourth galvanometer mirror 22. The fourth drive mechanism 24 drives the fourth galvanometer mirror 22 to rotate, thereby changing the angle between the reflecting surface of the fourth galvanometer mirror 22 and the reflecting surface of the third galvanometer mirror 21.

[0066] In this way, the third galvanometer 21 and the fourth galvanometer 22 can be driven independently by the third drive mechanism 23 and the fourth drive mechanism 24, respectively. The third drive mechanism 23 and the fourth drive mechanism 24 can be drive motors, whose output shafts can be fixedly connected to the corresponding third galvanometer 21 / fourth galvanometer 22. By setting the two drive motors coaxially and rotating simultaneously at the same speed in opposite directions, the third galvanometer 21 and the fourth galvanometer 22 can be directly driven to rotate synchronously and in opposite directions. Here, "coaxial setting of the two drive motors" means that the output shafts of the two drive motors extend in the same direction. For example, the output shafts of the two drive motors connected to the third galvanometer 21 and the fourth galvanometer 22 extend along the Y-axis.

[0067] Continue reading Figure 1 The galvanometer scanning system also includes a light source, an optical fiber 31, a coupler 32, and a collimating lens 33. The light source is used to generate a light beam; the optical fiber 31 is connected to the light source and is used to transmit the light beam; the coupler 32 is connected to the optical fiber 31 and is used to expand the beam; the collimating lens 33 is positioned opposite to the coupler 32 and is used to shape the light beam into parallel light to form incident light.

[0068] The light source can be a laser, and the emitted beam is a laser beam. An optical fiber 31 connects the light source and the coupler 32. The optical fiber 31, for example, is a waveguide fiber 31, which can homogenize the laser beam, causing it to diverge in a conical shape. The optical fiber 31 can be integrated with the laser, for example, using a laser with a pigtail output. The laser beam is transmitted through the optical fiber 31 and enters the coupler 32, where it expands the beam to proportionally increase its diameter. A collimating lens 33 shapes the diverging beam into parallel light, forming the incident light. This results in a low-energy-density, parallel, wide beam. One or more collimating lenses 33 can be used as needed.

[0069] Continue reading Figure 1The galvanometer scanning system also includes a focusing device 34. The emitted light from the second scanning galvanometer group 20 is focused by the focusing device 34 before being emitted, making the energy of the beam more concentrated and improving the accuracy and efficiency of the galvanometer scanning system. After passing through the focusing device 34, the beam is focused onto the focal point of the working plane, forming a light spot. This working plane is the focal plane. The focusing device 34 can be, for example, a field lens.

[0070] The following combination Figure 1 and Figure 6 Taking two scanning galvanometer groups as an example, the working principle and process of the galvanometer scanning system are described in detail. The galvanometer scanning system can also be set with more scanning galvanometer groups as needed to further increase the scanning speed and scanning range of the galvanometer scanning system.

[0071] The incident light is emitted sequentially through the first galvanometer 11, the second galvanometer 12, the third galvanometer 21, and the fourth galvanometer 22, and then focused onto the working plane. The maximum angular velocity of the first drive mechanism 13 and the second drive mechanism 14 is ωy, and the maximum angular velocity of the third drive mechanism 23 and the fourth drive mechanism 24 is ωx. Along the incident direction, the distance from the first galvanometer 11 / second galvanometer 12 to the third galvanometer 21 / fourth galvanometer 22 is e, the distance from the third galvanometer 21 / fourth galvanometer 22 to the working plane is d, and the distance between the third galvanometer 21 and the fourth galvanometer 22 along the second direction is b.

[0072] It can be seen that the linear scanning speed of the emitted beam along the second direction (X direction) on the working plane is:

[0073] Vx = 4×d×ωx;

[0074] The line scan speed along the first direction (Y direction) is:

[0075] Vy = 4×(d+b+e)×ωy;

[0076] Assume the coordinates of the light spot on the working plane are (x, y);

[0077] x = d×tanθx;

[0078] y = [(x² + d²) + b + e]tanθy;

[0079] If the time required for the light spot to move from the origin (0, 0) to (x, y) is t, then:

[0080] θx = 4×ωx×t;

[0081] θy = 4×ωy×t;

[0082] Compared to a galvanometer scanning system formed by two reflectors and corresponding drive motors, the galvanometer scanning system provided in this embodiment can double the scanning speed while maintaining the performance and rotational inertia of the drive motors and keeping the scanning range unchanged (i.e., the maximum values ​​of θx and θy remain unchanged). In other words, under the same beam deflection angle, the galvanometers in the first scanning galvanometer group 10 and the second scanning galvanometer group 20 only need to rotate by half an angle, thereby increasing the scanning speed.

[0083] Similarly, with the same drive motor performance, i.e., ωx and ωy being the same, the scanning range (θx, θy) can be increased by two times. That is, with the same galvanometer deflection angle, the beam after the first scanning galvanometer group 10 and the second scanning galvanometer group 20 has a larger deflection angle, thereby increasing the scanning range in the working plane.

[0084] The galvanometer scanning system provided in this application includes a first scanning galvanometer group 10 and a second scanning galvanometer group 20. The first scanning galvanometer group 10 includes a first galvanometer 11 and a second galvanometer 12, whose rotation centers are arranged along a first direction. The second scanning galvanometer group 20 includes a third galvanometer 21 and a fourth galvanometer 22, whose rotation centers are arranged along a second direction, which intersects the first direction. Incident light passes sequentially through the first scanning galvanometer group 10 and the second scanning galvanometer group 20. The first galvanometer 11 and the second galvanometer 12 can be used to adjust the deflection angle of the light beam along the first direction, and the third galvanometer 21 and the fourth galvanometer 22 can be used to adjust the deflection angle of the light beam along the second direction. Furthermore, the first galvanometer 11, the second galvanometer 12, the third galvanometer 21 and the third galvanometer 22 can all deflect the beam, so that the beam passing through the first scanning galvanometer group 10 and the second scanning galvanometer group 20 has a larger deflection angle, thereby improving the scanning range and scanning speed of the galvanometer scanning system.

[0085] The embodiments or implementation methods described in this specification are presented in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. In this specification, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with an embodiment or example that are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples.

[0086] Finally, it should be noted that other embodiments of this utility model will readily occur to those skilled in the art upon consideration of the specification and practice of the utility model disclosed herein. This utility model is intended to cover any variations, uses, or adaptations of this utility model that follow the general principles of this utility model and include common knowledge or customary techniques in the art not disclosed herein, and is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this utility model is limited only by the appended claims.

Claims

1. A galvanometer scanning system, characterized in that, include: The first scanning galvanometer group (10) includes a first galvanometer (11) and a second galvanometer (12), and the rotation centers of the first galvanometer (11) and the second galvanometer (12) are arranged in parallel along a first direction. The second scanning galvanometer group (20) includes a third galvanometer (21) and a fourth galvanometer (22). The rotation centers of the third galvanometer (21) and the fourth galvanometer (22) are arranged in parallel along a second direction, which intersects the first direction. The incident light is reflected sequentially by the first scanning mirror group (10) and the second scanning mirror group (20).

2. The galvanometer scanning system according to claim 1, characterized in that, The second direction is perpendicular to the first direction, and the rotation centers of the first galvanometer (11), the second galvanometer (12), the third galvanometer (21), and the fourth galvanometer (22) are all perpendicular to the incident direction of the incident light.

3. The galvanometer scanning system according to claim 1, characterized in that, The first galvanometer (11) and the second galvanometer (12) are both reflectors, and the reflecting surfaces of the first galvanometer (11) and the second galvanometer (12) are opposite to each other.

4. The galvanometer scanning system according to claim 1, characterized in that, The first galvanometer (11) and the second galvanometer (12) rotate synchronously and in opposite directions.

5. The galvanometer scanning system according to claim 1, characterized in that, Both the third galvanometer (21) and the fourth galvanometer (22) are reflecting mirrors, and their reflecting surfaces face each other.

6. The galvanometer scanning system according to claim 1, characterized in that, The third galvanometer (21) and the fourth galvanometer (22) rotate synchronously and in opposite directions.

7. The galvanometer scanning system according to any one of claims 1-6, characterized in that, The first scanning galvanometer group (10) further includes: The first drive mechanism (13) is connected to the first galvanometer (11) and drives the first galvanometer (11) to rotate; The second drive mechanism (14) is connected to the second galvanometer (12) and drives the second galvanometer (12) to rotate.

8. The galvanometer scanning system according to any one of claims 1-6, characterized in that, The second scanning galvanometer assembly (20) also includes: The third drive mechanism (23) is connected to the third galvanometer (21) and drives the third galvanometer (21) to rotate; The fourth drive mechanism (24) is connected to the fourth galvanometer (22) and drives the fourth galvanometer (22) to rotate.

9. The galvanometer scanning system according to any one of claims 1-6, characterized in that, The galvanometer scanning system also includes: A light source used to produce light beams; An optical fiber (31) is connected to the light source for transmitting the light beam; A coupler (32) is connected to the optical fiber (31) for beam expansion; A collimating lens (33) is disposed opposite to the coupler (32) and is used to shape the beam into parallel light to form the incident light.

10. The galvanometer scanning system according to any one of claims 1-6, characterized in that, The galvanometer scanning system also includes: The focusing device (34) focuses the light beam emitted from the second scanning galvanometer group (20).

11. The galvanometer scanning system according to any one of claims 1-6, characterized in that, The galvanometer scanning system also includes: The compensation mechanism is connected to both the second scanning galvanometer group (20) and the first scanning galvanometer group (10), and is used to drive the second scanning galvanometer group (20) to translate along the first direction according to the deflection angle of the first galvanometer (11) and the second galvanometer (12).

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