Parallel adjustment mechanism and semiconductor bonding apparatus

Abstract

The utility model relates to parallel adjustment technical field discloses a kind of parallel adjustment mechanism and semiconductor bonding equipment. Wherein parallel adjustment mechanism includes bearing, parallel monitoring subassembly and four parallel adjustment subassemblies. Parallel monitoring subassembly is set on fixed part, and the monitoring end of parallel monitoring subassembly is towards the piece to be adjusted, and parallel monitoring subassembly is used to monitor the distance between the piece to be adjusted and fixed part, and the fixed end of four parallel adjustment subassemblies is connected with bearing, and the output end of four parallel adjustment subassemblies is connected with the piece to be adjusted. Four adjustment subassemblies can realize more accurate adjustment. When carrying out parallel adjustment, four parallel adjustment subassemblies can form more uniform stress distribution on the piece to be adjusted, and four parallel adjustment subassemblies can also be more accurate correction to the slight inclination or deviation of the piece to be adjusted by different combination mode and adjustment amount, to reach ideal parallelism state.

Description

Technical Field

[0001] This utility model relates to the field of parallel adjustment technology, and in particular to a parallel adjustment mechanism and a semiconductor bonding device. Background Technology

[0002] Semiconductor bonding equipment is a key piece of equipment in the semiconductor manufacturing process. It is primarily used for high-precision bonding of semiconductor chips, wafers, and other components with other parts to achieve electrical connections and mechanical fixation of semiconductor devices, ensuring their performance and reliability. The loading and unloading stage is a crucial component of the semiconductor bonding equipment, mainly used to hold the wafers, substrates, and other materials to be bonded. During the bonding process, the loading and unloading stage needs to accurately position the materials to the designated locations for precise bonding. Semiconductor bonding typically requires extremely high precision. If the loading and unloading stages are not parallel, the wafer or substrate will tilt or shift when placed in the bonding position, preventing the bonding head from accurately placing the chip in the predetermined position, resulting in bonding deviations that affect product performance and yield.

[0003] Currently, some parallel adjustment mechanisms use a level to measure the current parallelism of the upper and lower platforms, determine the areas and amounts requiring adjustment, analyze the specific locations of non-parallelism, insert silicon steel sheets into the designated positions, and then measure the parallelism again using measuring tools. This process is repeated until the platforms are aligned. However, when using silicon steel sheets for adjustment, due to the limited thickness specifications of the sheets, it is difficult to accurately estimate the thickness and quantity of sheets needed each time. This usually relies on the operator's experience, making it difficult to achieve the desired alignment in one attempt. Often, multiple attempts with different thickness combinations of silicon steel sheets are needed, involving repeated installation, measurement, and parallelism adjustment, consuming significant time and effort. Furthermore, silicon steel sheets are generally manufactured to specific thickness specifications, making continuous, arbitrarily small thickness adjustments impossible. In situations requiring high-precision parallelism adjustment, this discrete thickness selection may not meet the requirements, only allowing for approximate adjustments and failing to achieve the ideal parallelism state.

[0004] Therefore, there is an urgent need for a parallel adjustment mechanism that can solve the problem of not being able to adjust the upper and lower platforms to the ideal parallelism state, and achieve fine adjustment of the parallelism between the upper and lower platforms. Utility Model Content

[0005] The purpose of this invention is to provide a parallel adjustment mechanism that can solve the problem of not being able to adjust the upper and lower platforms to the ideal parallelism state, and achieve fine adjustment of the parallelism of the upper and lower platforms.

[0006] Based on the above concept, the technical solution adopted by this utility model is as follows:

[0007] A parallel adjustment mechanism is used to adjust an upper member to be adjusted so that it is parallel to a lower fixed member. The member to be adjusted and the fixed member are spaced apart in a vertical direction. The parallel adjustment mechanism includes:

[0008] Load-bearing components;

[0009] A parallel monitoring component is disposed on the side of the fixing member facing the member to be adjusted, with the monitoring end of the parallel monitoring component facing the member to be adjusted. The parallel monitoring component is used to monitor the distance between the member to be adjusted and the fixing member.

[0010] Four parallel adjustment components are provided, with the fixed ends of each component connected to the support member and the output ends of each component connected to the member to be adjusted.

[0011] As an alternative to the parallel adjustment mechanism, four parallel adjustment components are spaced apart, and the shape formed by connecting the positions of the four parallel adjustment components in sequence is a rectangle.

[0012] As an optional solution to this parallel adjustment mechanism, the parallel adjustment assembly includes:

[0013] An adjustment drive component, the fixed end of which is connected to the carrier component;

[0014] An adjusting transmission component is provided, wherein the output end of the adjusting drive component is connected to the fixed end of the adjusting transmission component, and the adjusting drive component is used to drive the adjusting transmission component to move.

[0015] An adjusting connector is provided, one end of which is connected to the output transmission end of the adjusting transmission member, and the other end of which is connected to the member to be adjusted. The adjusting transmission member is used to convert the motion output of the adjusting drive member into linear motion in the vertical direction.

[0016] As an alternative to the parallel adjustment mechanism, the adjustment drive includes a servo motor and a coupling connected together. The servo motor is connected to the carrier, and the coupling is connected to the adjustment transmission component.

[0017] As an alternative to the parallel adjustment mechanism, the adjustment transmission component is a ball screw structure, which includes a matching screw and a nut, and the output end of the adjustment drive component is fixedly connected to the screw.

[0018] As an optional solution for the parallel adjustment mechanism, the adjustment connector is a spherical bearing, which includes an inner ring with an outer spherical surface and an outer ring with an inner spherical surface. The outer ring is connected to the component to be adjusted, and the inner ring is connected to the output transmission end of the adjustment transmission component.

[0019] As an optional solution for the parallel adjustment mechanism, the parallel monitoring assembly includes multiple parallel monitoring elements, the fixed ends of which are connected to the fixing element, and the monitoring ends of which are all facing the element to be adjusted.

[0020] As an alternative to the parallel adjustment mechanism, the parallel monitoring assembly includes four parallel monitoring elements, which are connected sequentially to form a rectangle.

[0021] As an alternative to this parallel adjustment mechanism, the parallel monitoring component is a distance sensor.

[0022] A semiconductor bonding apparatus, characterized in that it includes a bonding apparatus body and a parallel adjustment mechanism.

[0023] The beneficial effects of this utility model are as follows:

[0024] This invention proposes a parallel adjustment mechanism. Parallel monitoring components are mounted on a fixed component, with their monitoring ends facing the component to be adjusted. These components monitor the distance between the component and the fixed component. The fixed ends of all four parallel adjustment components are connected to a support component, and their output ends are connected to the component to be adjusted. The four adjustment components enable finer adjustments. During parallel adjustment, the four components can create a more uniform force distribution on the component to be adjusted. Furthermore, different combinations and adjustment amounts of the four components can more accurately correct minor tilts or offsets of the component. Attached Figure Description

[0025] Figure 1 This is a first structural schematic diagram of the parallel adjustment mechanism provided in an embodiment of the present invention;

[0026] Figure 2 This is a schematic diagram of the second structure of the parallel adjustment mechanism provided in an embodiment of the present invention.

[0027] In the picture:

[0028] 1. Components to be adjusted;

[0029] 2. Fasteners;

[0030] 3. Parallel monitoring components;

[0031] 4. Parallel adjustment assembly; 41. Adjustment drive component; 411. Servo motor; 413. Coupling; 42. Adjustment transmission component; 43. Adjustment connecting component. Detailed Implementation

[0032] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining this utility model and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts related to this utility model are shown in the accompanying drawings, not all of them.

[0033] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0036] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0037] This embodiment provides a semiconductor bonding device for high-precision bonding of semiconductor chips, wafers, etc., to substrates, packaging materials, etc. The semiconductor bonding device includes a main body and a parallel adjustment mechanism. The main body includes an adjustable component 1 (i.e., an upper stage) at the top and a fixed component 2 (i.e., a lower stage) at the bottom. The adjustable component 1 and the fixed component 2 are spaced apart vertically. The parallel adjustment mechanism is connected to the adjustable component 1 and is used to adjust the movable component to be parallel to the fixed component 2.

[0038] To ensure that the component to be adjusted 1 and the fixing component 2 are adjusted to an ideal balance state, and to achieve fine adjustment of the parallelism between the component to be adjusted 1 and the fixing component 2, such as... Figures 1-2 As shown, in this embodiment, the parallel adjustment mechanism includes a support member, a parallel monitoring component 3, and four parallel adjustment components 4. The parallel monitoring component 3 is positioned on the fixed member 2 facing the member to be adjusted 1. The parallel monitoring component 3 is used to monitor the distance between the member to be adjusted 1 and the fixed member 2. The fixed ends of the four parallel adjustment components 4 are all connected to the support member, and the output ends of the four parallel adjustment components 4 are all connected to the member to be adjusted 1. The four adjustment components enable more precise adjustment. During parallel adjustment, the four parallel adjustment components 4 can form a more uniform force distribution on the member to be adjusted 1. The four parallel adjustment components 4 can also, through different combinations and adjustment amounts, more accurately correct the slight tilt or offset of the member to be adjusted 1 to achieve an ideal parallelism state.

[0039] Preferably, in this embodiment, four parallel adjustment components 4 are spaced apart, and the four parallel adjustment components 4 are connected sequentially to form a rectangle. The rectangular structure allows the four parallel adjustment components 4 to correspond to the four corners or four sides of the part 1 to be adjusted, and this layout allows for independent and precise adjustment of each position. When the part 1 to be adjusted tilts or shifts slightly, the posture of the part 1 to be adjusted can be accurately controlled by fine-tuning the adjustment components at different positions, achieving high-precision positioning and angle adjustment. When working, the four parallel adjustment components 4, spaced apart and forming a rectangle, can form a uniform force distribution on the part 1 to be adjusted. Due to the symmetry of the rectangle, the force borne by each adjustment component is relatively balanced, which helps to avoid adjustment errors caused by excessive or insufficient local force. The uniform force distribution allows the part 1 to remain stable during the adjustment process, without additional deformation or displacement due to uneven force, thereby improving the accuracy and reliability of the adjustment. In other embodiments, the shape formed by the four parallel adjustment groups can also be a parallelogram or a triangle, as long as it can achieve precise adjustment of the part 1 to be adjusted.

[0040] Specifically, such as Figure 1As shown, in this embodiment, the parallel adjustment assembly 4 includes an adjustment drive 41, an adjustment transmission 42, and an adjustment connector 43. The fixed end of the adjustment drive 41 is connected to the support member, and the output end of the adjustment drive 41 is connected to the fixed end of the adjustment transmission 42. The adjustment drive 41 drives the adjustment transmission 42. One end of the adjustment connector 43 is connected to the output transmission end of the adjustment transmission 42, and the other end of the adjustment connector 43 is connected to the member to be adjusted 1. The adjustment transmission 42 converts the motion output by the adjustment drive 41 into linear motion in the vertical direction. The fixed end of the adjustment drive 41 is connected to the support member, and the output end is connected to the adjustment transmission 42. This design allows the drive source to be stably mounted on the support member, providing reliable power for the adjustment process. By accurately converting the motion of the adjustment drive 41 into linear motion of the member to be adjusted 1 in the vertical direction, high-precision control of the position of the member to be adjusted 1 can be achieved. Whether it is a small height adjustment or a large position change, it can be accurately realized, reducing adjustment errors and improving the adjustment accuracy of the entire parallel adjustment mechanism. The connections between the various components are tight and the transmission method is reliable, which can maintain stable motion transmission during the adjustment process and reduce vibration and impact caused by unstable motion.

[0041] Optionally, such as Figure 1 As shown, in this embodiment, the adjustment drive 41 includes a servo motor 411 and a coupling 413 connected together. The servo motor 411 is connected to the carrier, and the coupling 413 is connected to the adjustment transmission 42. The servo motor 411 can precisely control the speed and angle, thereby providing precise power input to the adjustment transmission 42, and thus achieving precise control of the position of the part to be adjusted 1. Whether it is a small height adjustment or a large position change, it can be accurately achieved. The rotation of the servo motor 411 is transmitted to the adjustment transmission 42 through the coupling 413, realizing the effective transmission of power from the motor to the adjustment transmission 42. It can also convert the motion output of the adjustment drive 41 into linear motion in the vertical direction to meet the parallelism adjustment requirements of the part to be adjusted 1. The high-precision control characteristics of the servo motor 411 greatly reduce the adjustment error and improve the adjustment accuracy of the entire parallel adjustment mechanism, enabling the part to be adjusted 1 to more accurately reach the ideal parallelism state. In other embodiments, the adjustment drive 41 can also be a stepper motor or a DC motor, as long as it can drive the adjustment transmission 42 to move.

[0042] Optionally, in this embodiment, the adjusting transmission component 42 is a ball screw structure, which includes a mating screw and a nut. The output end of the adjusting drive component 41 is fixedly connected to the screw. The ball screw structure has high-precision transmission characteristics, which can accurately convert the rotational motion of the adjusting drive component 41 into the linear motion of the nut along the screw, thereby achieving precise control of the position of the component 1 to be adjusted. Whether it is a small height adjustment or a large position change, it can be accurately achieved, effectively reducing adjustment errors and improving the adjustment accuracy of the parallel adjusting mechanism. During the transmission process, the balls and the screw and nut experience rolling friction. Compared with sliding friction, rolling friction has less frictional force, less energy loss, and higher transmission efficiency, which can more effectively transmit the power of the adjusting drive component 41 to the component 1 to be adjusted, reducing energy waste. In other embodiments, the adjusting transmission component 42 can also be a gear and rack structure or a chain and sprocket structure, as long as it can convert the motion output by the adjusting drive component 41 into linear motion in the vertical direction.

[0043] Optionally, such as Figure 1 As shown, in this embodiment, the adjusting connector 43 is a spherical bearing. The spherical bearing includes an inner ring with an outer spherical surface and an outer ring with an inner spherical surface. The outer ring is connected to the part to be adjusted 1, and the inner ring is connected to the output transmission end of the adjusting transmission component 42. The inner and outer rings of the spherical bearing can rotate relative to each other, which can adapt to different angles between the output transmission end of the adjusting transmission component 42 and the part to be adjusted 1 due to position changes, slight tilts, or offsets. This makes the adjustment process more flexible and ensures that motion and force can be effectively transmitted under various complex conditions, achieving precise position adjustment of the part to be adjusted 1. When the adjusting transmission component 42 pushes or pulls the part to be adjusted 1, if the connection is rigid, stress concentration may occur due to angular deviation, leading to component damage or affecting adjustment accuracy. The spherical fit of the spherical bearing can disperse stress, making the force evenly distributed on the contact surface, extending the service life of the component, and improving the reliability of the entire mechanism. In other embodiments, the adjusting connector 43 can also be a self-aligning ball bearing or a sliding bearing, as long as it can connect the adjusting transmission component 42 to the part to be adjusted 1.

[0044] In other embodiments, the parallel adjustment component 4 can also be a servo electric cylinder. The fixed end of the servo electric cylinder is connected to the carrier, and its output end is connected to the component 1 to be adjusted, realizing precise movement and positioning of the component 1 in space. The extension and retraction of the electric cylinder is precisely controlled by the servo system, thereby accurately changing the position of the component 1 to achieve an ideal parallel state with the fixed component 2. The servo electric cylinder has high positioning accuracy and repeatability, which can meet the high precision requirements of the parallelism of the component 1 to be adjusted, ensuring that the parallelism after adjustment reaches a high level. The servo electric cylinder can precisely control the magnitude of the output force. When adjusting the component 1, it can apply appropriate force according to actual needs, ensuring that the component 1 to be adjusted is subjected to uniform force and avoiding damage or deformation caused by improper force.

[0045] Specifically, in this embodiment, the parallel monitoring component 3 includes multiple parallel monitoring elements. The fixed ends of each of the multiple parallel monitoring elements are connected to the fixing element 2, and the monitoring ends of each of the multiple parallel monitoring elements face the element to be adjusted 1, monitoring the distance between the element to be adjusted 1 and the fixing element 2. By setting multiple parallel monitoring elements, the distance between the element to be adjusted 1 and the fixing element 2 can be accurately monitored from different positions, obtaining more comprehensive and accurate distance information, providing data support for subsequent adjustments. The setting of multiple parallel monitoring elements can accurately measure distance and parallelism, enabling the parallel adjustment mechanism to adjust the element to be adjusted 1 more precisely, ensuring that it achieves a high degree of parallelism with the fixing element 2.

[0046] Optionally, in this embodiment, the parallel monitoring component 3 includes four parallel monitoring elements. The four parallel monitoring elements are connected sequentially to form a rectangle. By arranging the four parallel monitoring elements into a rectangle, the distance between the component to be adjusted 1 and the fixed component 2 can be monitored from four different positions. Since the four vertices of the rectangle can comprehensively reflect the state of the plane, the difference in the distances measured by the four monitoring elements can accurately determine whether the component to be adjusted 1 is parallel to the fixed component 2. If the four distance values ​​are equal or equal within a certain error range, it indicates that the component to be adjusted 1 is parallel to the fixed component 2. If there is a large difference in the distance values, the tilt direction and degree of the component to be adjusted 1 can be analyzed according to the specific situation. The four monitoring elements form a rectangular distribution, which can obtain distance information from multiple angles, and can more comprehensively and accurately reflect the parallel state between the component to be adjusted 1 and the fixed component 2, reducing misjudgments or inaccurate judgments caused by a single monitoring point or unreasonable distribution. In other embodiments, the number of parallel monitoring elements can be three, five, or six, as long as it can achieve more accurate monitoring of the distance between the component to be adjusted 1 and the fixed component 2.

[0047] Optionally, in this embodiment, the parallel monitoring component is a distance sensor. The distance sensor can accurately measure the distance between the component to be adjusted 1 and the fixed component 2, providing accurate data to support subsequent adjustments. During the adjustment process, if the position of the component to be adjusted 1 changes, the distance sensor can immediately detect and provide feedback, allowing the operator to understand the adjustment effect in a timely manner for further adjustments. In other embodiments, the parallel monitoring component can also be a laser rangefinder or a photographic distance measuring device, as long as it can measure the distance between the component to be adjusted 1 and the fixed component 2.

[0048] Specifically, in this embodiment, the parallel adjustment mechanism further includes a control component, which is electrically connected to the parallel monitoring component 3 and the parallel adjustment component 4. The parallel monitoring component 3 monitors the distance between the member to be adjusted 1 and the fixed member 2, and transmits electrical signals with different distances to the control component. The control component then analyzes the signals and transmits them to the parallel adjustment component 4. Upon receiving the electrical signals, the parallel adjustment component 4 adjusts the member to be adjusted 1. The parallel monitoring component 3 then monitors the distance between the member to be adjusted 1 and the fixed member 2 again. This process is repeated multiple times until the parallel monitoring component 3 detects that the distances between all positions are the same, thus completing the parallel adjustment.

[0049] It should be noted that the control component is an existing structure, and setting a control component in the parallel adjustment mechanism is a conventional practice in the field. In this embodiment, any control component in the prior art can be used, and any connection method in the prior art can be used to connect it to the parallel monitoring component 3 and the parallel adjustment component 4 respectively. As long as the control component has the function of monitoring the distance between the adjustable part 1 and the fixed part 2 and has the function of controlling the parallel adjustment component 4, it is sufficient. No further details will be provided.

[0050] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A parallel adjustment mechanism for adjusting an upper member (1) to be adjusted parallel to a lower fixing member (2), wherein the member (1) to be adjusted and the fixing member (2) are spaced apart in a vertical direction, characterized in that, The parallel adjustment mechanism includes: Load-bearing components; A parallel monitoring component (3) is disposed on the side of the fixing member (2) facing the member to be adjusted (1), and the monitoring end of the parallel monitoring component (3) faces the member to be adjusted (1). The parallel monitoring component (3) is used to monitor the distance between the member to be adjusted (1) and the fixing member (2). Four parallel adjustment components (4) are provided. The fixed ends of the four parallel adjustment components (4) are all connected to the carrier, and the output ends of the four parallel adjustment components (4) are all connected to the component to be adjusted (1).

2. The parallel adjustment mechanism according to claim 1, characterized in that, The four parallel adjustment components (4) are spaced apart, and the shape formed by connecting the positions of the four parallel adjustment components (4) in sequence is a rectangle.

3. The parallel adjustment mechanism according to claim 1, characterized in that, The parallel adjustment component (4) includes: Adjustment drive (41), the fixed end of which is connected to the bearing member; Adjusting transmission component (42), the output end of the adjusting drive component (41) is connected to the fixed end of the adjusting transmission component (42), and the adjusting drive component (41) is used to drive the adjusting transmission component (42) to transmit; Adjusting connector (43), one end of which is connected to the output transmission end of the adjusting transmission member (42), and the other end of which is connected to the member to be adjusted (1). The adjusting transmission member (42) is used to convert the motion output of the adjusting drive member (41) into linear motion in the vertical direction.

4. The parallel adjustment mechanism according to claim 3, characterized in that, The adjustment drive (41) includes a servo motor (411) and a coupling (413) connected to each other. The servo motor (411) is connected to the carrier, and the coupling (413) is connected to the adjustment transmission (42).

5. The parallel adjustment mechanism according to claim 3, characterized in that, The adjusting transmission component (42) is a ball screw structure, which includes a matching screw and nut. The output end of the adjusting drive component (41) is fixedly connected to the screw.

6. The parallel adjustment mechanism according to claim 5, characterized in that, The adjusting connector (43) is a spherical bearing, which includes an inner ring with an outer spherical surface and an outer ring with an inner spherical surface. The outer ring is connected to the member to be adjusted (1), and the inner ring is connected to the output transmission end of the adjusting transmission member (42).

7. The parallel adjustment mechanism according to any one of claims 1-6, characterized in that, The parallel monitoring component (3) includes multiple parallel monitoring elements, the fixed ends of the multiple parallel monitoring elements are all connected to the fixed element (2), and the monitoring ends of the multiple parallel monitoring elements are all facing the element to be adjusted (1).

8. The parallel adjustment mechanism according to claim 7, characterized in that, The parallel monitoring component (3) includes four parallel monitoring elements, and the four parallel monitoring elements are connected in sequence to form a rectangle.

9. The parallel adjustment mechanism according to claim 7, characterized in that, The parallel monitoring component is a distance sensor.

10. A semiconductor bonding apparatus, characterized in that, It includes the bonding device body and the parallel adjustment mechanism as described in any one of claims 1-9.

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