A destaticized ultrasonic dust removing device
By integrating an ion bar, an ultrasonic generator, and a negative pressure chamber, the destatic ultrasonic dust removal device solves the problems of material damage and electrostatic adsorption caused by traditional dust removal methods, achieving a highly efficient and integrated dust removal effect, suitable for high cleanliness and non-contact dust removal needs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- NALU (XIAMEN) ENVIRONMENTAL PROTECTION TECH CO LTD
- Filing Date
- 2025-05-07
- Publication Date
- 2026-06-12
AI Technical Summary
Existing dust removal technologies have limitations in terms of high cleanliness and non-contact dust removal. In particular, traditional negative pressure adsorption may cause material deformation or scratches, electrostatic adsorption is difficult to completely remove micron-sized dust, and existing ultrasonic devices lack electrostatic elimination functions, resulting in unsatisfactory dust removal effects.
Design an antistatic ultrasonic dust removal device that integrates an ion bar, an ultrasonic generator, and a negative pressure chamber into the same dust removal head. The ion bar neutralizes static electricity, the ultrasonic waves oscillate to remove dust, and the negative pressure chamber captures the dust, forming a dust removal chain of static neutralization-ultrasonic stripping-negative pressure collection.
It achieves non-contact, high-efficiency dust removal for flexible materials and high-cleanliness workpieces, increasing the dust removal rate to 98.7%. The equipment has a high degree of integration and is suitable for scenarios such as lithium battery die-cutting and optical lenses.
Smart Images
Figure CN224346570U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of dust removal equipment technology, and in particular to an antistatic ultrasonic dust removal device. Background Technology
[0002] Dust removal technology plays a crucial role in industrial production, especially in fields requiring high surface cleanliness, such as semiconductor manufacturing, optical lens processing, and lithium battery production. Traditional dust removal methods primarily rely on negative pressure adsorption, which uses a fan to generate negative pressure to draw dust into a dust collector for filtration. While this method can meet general dust removal needs, it has significant limitations under certain special conditions. For example, for flexible materials or workpieces with easily damaged surfaces, negative pressure adsorption may lead to material deformation or surface scratches; and for scenarios with high cleanliness requirements, such as semiconductor chips or optical lenses, traditional dust removal methods struggle to completely remove micron-sized dust and cannot effectively address electrostatic adsorption issues.
[0003] In existing technologies, some solutions employ non-contact dust removal methods, such as airflow purging or electrostatic elimination, to address the aforementioned problems. Airflow purging uses high-speed airflow to blow dust off the surface, but this can easily lead to secondary dust adsorption. Electrostatic elimination technology uses ionizers to neutralize surface static electricity, reducing dust adhesion, but its effectiveness is limited when used alone and it cannot completely remove already adhered dust. Furthermore, ultrasonic dust removal technology has also been introduced, which uses high-frequency vibration to detach dust from the surface; however, existing ultrasonic dust removal devices often lack electrostatic elimination capabilities, resulting in unsatisfactory dust removal performance.
[0004] Further analysis of existing technologies reveals the following problems: First, the technology integration is low; electrostatic elimination and ultrasonic dust removal are usually separate modules, resulting in large equipment size and complex operation. Second, the dust removal efficiency is insufficient; a single technology cannot simultaneously solve the problems of electrostatic adsorption and dust removal. Third, the applicable scenarios are limited; existing devices cannot meet the requirements of high cleanliness or non-contact working conditions. For example, in the lithium battery die-cutting station, dust is easily statically charged and adheres tightly, making it impossible to efficiently remove without contact with the material using traditional methods. In optical lens dust removal, even slight scratches on the surface can affect optical performance, making non-contact dust removal a necessity. Therefore, it is necessary to design an electrostatic elimination ultrasonic dust removal device. Utility Model Content
[0005] To overcome the shortcomings of the existing technology, an antistatic ultrasonic dust removal device is provided.
[0006] This utility model is achieved through the following solution:
[0007] An antistatic ultrasonic dust removal device includes a frame, on which a material conveying line and an explosion-proof high-pressure fan are correspondingly mounted, and an ultrasonic dust removal head is correspondingly mounted above the material conveying line.
[0008] The ultrasonic dust removal head includes an ultrasonic generator, an ion bar, and a negative pressure chamber. The ion bar is located upstream of the material conveying line, and the ultrasonic generator is located downstream of the material conveying line. One end of the ultrasonic generator is connected to a positive pressure connecting pipe, and the outlet of the ultrasonic generator is opposite to the material conveying line. The inlet of the negative pressure chamber is located on both sides of the outlet of the ultrasonic generator. The outlet of the negative pressure chamber is connected to a first connecting pipe, the other end of which is connected to a filter box. The outlet of the filter box is connected to a second connecting pipe, and the second connecting pipe is connected to an explosion-proof high-pressure blower.
[0009] A filter element is correspondingly installed inside the filter box.
[0010] A dust removal cover is provided on the outer wall of the filter box, and a waste bin is provided on the outer side of the dust removal cover.
[0011] An electrical control box is also provided inside the equipment frame, and the electrical control box is electrically connected to the ion bar and the explosion-proof high-pressure blower.
[0012] Multiple adjustable support legs are provided at the bottom of the equipment frame.
[0013] The material conveying line is connected to the conveying line support, and the conveying line support is connected to the equipment frame.
[0014] The material conveying line is connected to a pair of connecting legs, and the connecting legs are connected to a mirror connecting plate and a connecting plate respectively. The other end of the mirror connecting plate and the connecting plate is connected to an ultrasonic dust removal head.
[0015] The beneficial effects of this utility model are as follows:
[0016] 1. This utility model discloses an anti-static ultrasonic dust removal device that can meet the dust removal requirements of flexible material surfaces. Without contacting the material, it uses ultrasonic vibration to bounce up dust adhering to the material surface, and achieves dust removal process requirements under the negative pressure of the ultrasonic dust removal head. For example, it can be used for dust removal in lithium battery die-cutting stations.
[0017] 2. The present invention provides an antistatic ultrasonic dust removal device that can meet the dust removal process requirements of high surface cleanliness and non-contact workpieces, such as dust removal of optical lenses and semiconductor chips.
[0018] 3. In this utility model, the material in the antistatic ultrasonic dust removal device first passes through an ion bar during the conveying process. This component releases positive and negative ions to neutralize the static electricity on the material surface, breaking the electrostatic adsorption force between the dust and the substrate. Since the static elimination is located upstream of the ultrasonic treatment, the adhesion of the dust is significantly reduced after losing its charge, creating favorable conditions for subsequent ultrasonic treatment. The ultrasonic generator forms a high-frequency oscillating airflow field through positive pressure airflow. When this high-frequency vibration acts on the material surface, it produces a micron-level vibration effect, causing the dust particles that have broken free from electrostatic binding to bounce off the material surface. Negative pressure chambers are symmetrically arranged on both sides of the ultrasonic action area, using the principle of pressure difference to form a directional airflow, promptly capturing suspended dust particles and preventing secondary settling.
[0019] 4. The dust removal device employs a three-stage collaborative working mechanism, forming a complete dust removal chain of electrostatic neutralization, ultrasonic stripping, and negative pressure collection. This combined technology effectively solves the limitations of single dust removal methods. For example, simple ion wind dust removal cannot remove already attached particles, while ultrasonic treatment alone is insufficient to address the problem of electrostatically adsorbed dust. In semiconductor wafer cleaning tests, this device increased the removal rate of 0.5-micron particles to 98.7%, approximately 40% higher than traditional purging methods.
[0020] 5. The equipment's structural design emphasizes functional integration and process optimization, integrating the ion-electrode, ultrasonic generator module, and negative pressure collection system into a single dust collection head. This compact design not only reduces the equipment's footprint but, more importantly, ensures the collaborative working distance of each functional module. Experimental data shows that when the distance between the ion treatment zone and the ultrasonic action zone is controlled at 15-20cm, it ensures sufficient electrostatic neutralization while avoiding interference from ion wind with the ultrasonic field distribution. The modular connection design allows for adjustment of the number of dust collection head groups according to the material width. In lithium battery electrode dust removal applications, multiple dust collection heads arranged side-by-side can extend the processing width to 1.2 meters. Attached Figure Description
[0021] Figure 1 This is a three-dimensional structural diagram of an antistatic ultrasonic dust removal device according to the present invention;
[0022] Figure 2 This is a schematic diagram of the main structure of an antistatic ultrasonic dust removal device according to the present invention;
[0023] Figure 3 This is a top view of the structure of an antistatic ultrasonic dust removal device according to the present invention.
[0024] Figure 4 This is a schematic diagram of the ultrasonic dust removal head of an antistatic ultrasonic dust removal device according to the present invention.
[0025] Figure 5 yes Figure 4A cross-sectional view along the AA direction.
[0026] In the diagram: 1 is the material conveying line, 2 is the explosion-proof high-pressure blower, 3 is the equipment frame, 4 is the ultrasonic dust removal head, 41 is the ultrasonic generator, 42 is the ion bar, 43 is the negative pressure chamber, 5 is the connecting plate, 6 is the connecting leg, 7 is the mirror connecting plate, 8 is the conveying line support, 9 is the filter element, 10 is the filter box, 11 is the electrical box, 12 is the waste bin, 13 is the adjustable leg, 14 is the dust removal cover, 15 is the second connecting pipe, 16 is the first connecting pipe, and 17 is the positive pressure connecting pipe. Detailed Implementation
[0027] The present invention will be further described below with reference to the accompanying drawings and specific embodiments:
[0028] like Figure 1-3 As shown, an antistatic ultrasonic dust removal device includes a frame 3, on which a material conveying line 1 and an explosion-proof high-pressure blower 2 are correspondingly arranged, and an ultrasonic dust removal head 4 is correspondingly arranged above the material conveying line 1.
[0029] like Figure 4 , 5 As shown, the ultrasonic dust removal head 4 includes an ultrasonic generator 41, an ion bar 42, and a negative pressure chamber 43. The ion bar 42 is located upstream of the material conveying line 1, and the ultrasonic generator 41 is located downstream of the material conveying line 1. One end of the ultrasonic generator 41 is connected to a positive pressure connecting pipe 17, and the outlet of the ultrasonic generator 41 is opposite to the material conveying line 1. The inlet of the negative pressure chamber 43 is located on both sides of the outlet of the ultrasonic generator 41. The outlet of the negative pressure chamber 43 is connected to a first connecting pipe 16, and the other end of the first connecting pipe 16 is connected to a filter box 10. The outlet of the filter box 10 is connected to a second connecting pipe 15, and the second connecting pipe 15 is connected to an explosion-proof high-pressure blower 2. The explosion-proof high-pressure blower generates negative pressure in the negative pressure chamber through the first and second connecting pipes.
[0030] When the explosion-proof high-pressure blower 2 starts, a negative pressure area (negative pressure chamber 43) is formed on both sides of the ultrasonic dust removal head 4. This area, together with the ultrasonic wave (ultrasonic generator 41) area formed by the high-frequency oscillating airflow, constitutes the core device of the ultrasonic dust removal system. When a product covered with dust is transported through the material conveyor line 1, it first passes through the ion bar 42 at the front end of the ultrasonic dust removal head. The ion bar 42 releases ions to neutralize the static electricity on the dust, making the dust uncharged and reducing its adhesion. The ion wind generated by the static eliminator neutralizes the static electricity on the surface of the object being dusted, preventing static electricity from attracting dust and improving the dust removal effect.
[0031] Compressed air enters the dust removal head and is rectified multiple times by the triangular groove of the ultrasonic generator 41 to form a high-oscillation airflow. When the high-frequency oscillating airflow acts on the dust on the product, it causes the dust to bounce up. The bounced dust is captured by the negative pressure of the negative pressure chambers 43 on both sides of the oscillation chamber and goes to the filter box 10 through the first negative pressure connecting pipe 16. After solid-gas separation in the filter box 10, the clean air is discharged through the explosion-proof high-pressure fan 2, thereby realizing the ultrasonic dust removal process.
[0032] This invention integrates an ultrasonic generator, an electrostatic eliminator, and an airflow control device, achieving a combination of non-contact electrostatic removal and ultrasonic dust removal, thus solving the dust removal process requirements under special working conditions.
[0033] A filter element 9 is installed inside the filter housing 10. A dust removal cover 14 is installed on the outer wall of the filter housing 10, and a waste bin 12 is installed on the outer side of the dust removal cover 14. An electrical control box 11 is also installed inside the equipment frame 3. The electrical control box 11 is electrically connected to the ion bar 42 and the explosion-proof high-pressure blower 2. The electrical control box 11 controls the explosion-proof high-pressure blower 2 and other equipment to generate a stable airflow, which carries away dust particles that have detached from the surface of the object, preventing dust from being re-adsorbed onto the surface. The specific connection method, control process, and principle of the electrical control box 11 are known technologies and will not be described in detail here.
[0034] Multiple adjustable legs 13 are provided at the bottom of the equipment frame 3. This application combines the vibration of ultrasonic waves with electrostatic elimination technology to more effectively remove dust particles from the surface of objects, especially for fine particles and dust with strong electrostatic adsorption, resulting in better dust removal performance.
[0035] The material conveying line 1 is connected to the conveying line support 8, and the conveying line support 8 is connected to the equipment frame 3. The material conveying line 1 is connected to a pair of connecting legs 6, and the connecting legs 6 are connected to the mirror connecting plate 7 and the connecting plate 5 respectively. The other end of the mirror connecting plate 7 and the connecting plate 5 is connected to the ultrasonic dust removal head 4.
[0036] This application adopts a non-contact dust removal method, which avoids the damage to the surface of objects that may be caused by traditional dust removal methods. It is suitable for dust removal of objects with high surface quality requirements and can be widely used in industries with high cleanliness requirements such as electronics, optics, semiconductors, and precision machinery, meeting the dust removal needs of different industries.
[0037] The ultrasonic dust removal head mainly consists of two parts: an ultrasonic generator and an ion bar. The specific results, working principle, and process of the ion bar are well-known technologies and will not be elaborated here. The ultrasonic generator includes two triangular grooves (two staggered triangular rectifier grooves). After the positive pressure airflow passes through the two triangular grooves for rectification, it forms a high-pressure vibrating gas jet (e.g., Figure 5 The downward arrow in the middle represents positive pressure oscillating gas, which acts on the product to cause dust to vibrate and detach from the product surface.
[0038] An ultrasonic generator produces ultrasonic waves of specific frequency and intensity, causing dust particles to vibrate and detach from the surface of the object being cleaned. The specific structural dimensions, working process, and principle of the ultrasonic generator are well-known technologies and will not be elaborated upon here. A positive pressure connecting pipe supplies positive pressure airflow to the ultrasonic generator. In this embodiment, the other end of the positive pressure connecting pipe is connected to an explosion-proof high-pressure blower. That is, the positive pressure output of the explosion-proof high-pressure blower is sent to the ultrasonic generator, while the negative pressure draws the filter housing. The positive pressure connecting pipe only needs to provide the corresponding positive pressure airflow to the ultrasonic generator. In practical applications, the positive pressure connecting pipe can also be connected to an independent air source system, which will not be elaborated upon here. The operating frequency range of the ultrasonic generator and the voltage parameters of the ion bar can be adjusted according to actual conditions, and will not be elaborated upon here.
[0039] This application integrates an ultrasonic generator, an electrostatic eliminator, and an airflow control device, achieving a unified function of static electricity removal and ultrasonic dust removal, thus improving the equipment's integration and ease of use. Employing a non-contact dust removal method avoids potential damage to object surfaces caused by traditional dust removal methods, making it suitable for dust removal of objects requiring high surface quality.
[0040] Although the technical solutions of this utility model have been described and enumerated in detail, it should be understood that modifications to the above embodiments or the adoption of equivalent alternatives are obvious to those skilled in the art. Such modifications or improvements made without departing from the spirit of this utility model are all within the scope of protection claimed by this utility model.
Claims
1. An antistatic ultrasonic dust removal device, comprising a frame (3), on which a material conveying line (1) and an explosion-proof high-pressure blower (2) are correspondingly mounted, characterized in that: An ultrasonic dust removal head (4) is provided above the material conveying line (1); The ultrasonic dust removal head (4) includes an ultrasonic generator (41), an ion bar (42), and a negative pressure chamber (43). The ion bar (42) is located upstream of the material conveying line (1), and the ultrasonic generator (41) is located downstream of the material conveying line (1). One end of the ultrasonic generator (41) is connected to the positive pressure connecting pipe (17), and the outlet of the ultrasonic generator (41) is opposite to the material conveying line (1). The inlet of the negative pressure chamber (43) is located on both sides of the outlet of the ultrasonic generator (41). The outlet of the negative pressure chamber (43) is connected to the first connecting pipe (16), and the other end of the first connecting pipe (16) is connected to the filter box (10). The outlet of the filter box (10) is connected to the second connecting pipe (15), and the second connecting pipe (15) is connected to the explosion-proof high-pressure blower (2).
2. The antistatic ultrasonic dust removal device according to claim 1, characterized in that: A filter element (9) is provided inside the filter housing (10).
3. The antistatic ultrasonic dust removal device according to claim 1, characterized in that: A dust removal cover (14) is provided on the outer wall of the filter box (10), and a waste bin (12) is provided on the outer side of the dust removal cover (14).
4. The antistatic ultrasonic dust removal device according to claim 1, characterized in that: An electrical control box (11) is also provided in the equipment frame (3), and the electrical control box (11) is electrically connected to the ion bar (42) and the explosion-proof high-pressure blower (2).
5. The antistatic ultrasonic dust removal device according to claim 1, characterized in that: Multiple adjustable legs (13) are provided at the bottom of the equipment frame (3).
6. The antistatic ultrasonic dust removal device according to claim 1, characterized in that: The material conveying line (1) is connected to the conveying line bracket (8), and the conveying line bracket (8) is connected to the equipment frame (3).
7. The antistatic ultrasonic dust removal device according to claim 1, characterized in that: The material conveying line (1) is connected to a pair of connecting legs (6), the connecting legs (6) are connected to the mirror connecting plate (7) and the connecting plate (5) respectively, and the other end of the mirror connecting plate (7) and the connecting plate (5) is connected to the ultrasonic dust removal head (4).