Stage and laser repair apparatus
By using a metal stage in the laser repair equipment and designing a self-absorption cavity structure with interconnected micropores and pores, the problem of poor adsorption effect of ceramic stages was solved, achieving stable adsorption and clear imaging of products, reducing costs and extending service life.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN HANS SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO LTD
- Filing Date
- 2025-05-14
- Publication Date
- 2026-06-12
AI Technical Summary
Existing ceramic stages have poor adsorption effects in laser processing and are easily clogged by dust, leading to product warping and adsorption marks, which affects the imaging and clarity of the repair equipment.
A metal stage is used, with micropores designed to have a diameter of 0.3mm-0.5mm. The pores and micropores are connected to form a self-adsorption chamber. The self-adsorption structure is used to achieve product adsorption, avoiding the micropores from being blocked by dust and improving the adsorption effect.
It achieves stable adsorption of products, avoids adsorption marks, improves the imaging clarity of repair equipment and the accuracy of product quality inspection, reduces manufacturing costs and extends service life.
Smart Images

Figure CN224347148U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of laser processing technology, and in particular to a platform and laser repair equipment. Background Technology
[0002] In laser processing technology-based repair equipment, the products to be processed (such as flexible panels; small-sized flexible panels are typically laptop displays and handscreens) must be completely flush against the platform without any warping, otherwise the repair inspection camera will be unable to capture an image. Simultaneously, the product must not deform while flush against the platform, such as showing suction marks caused by pores; any unevenness in the product can affect the clarity of the image taken by the camera. Previously, ceramic platforms were generally used in repair equipment, with extremely small pores on the ceramic surface, approximately 5-20µm in size. However, in practical applications, these pores on ceramic platforms can become clogged with dust, which is difficult to remove, resulting in poor adsorption and, in severe cases, rendering the platform unusable by the repair equipment, requiring the ceramic surface to be remade. Summary of the Invention
[0003] This invention provides a platform and laser repair equipment to solve the problem of poor adsorption effect of existing platforms on products.
[0004] A platform for mounting on a self-priming platform, the self-priming platform having a plurality of self-priming holes, each of the self-priming holes having a self-priming structure, the first surface of the platform having a plurality of micropores having a diameter of 0.3mm-0.5mm, the first surface of the platform being used to place products.
[0005] The second surface of the stage is provided with a plurality of air holes, each air hole communicating with at least one micropore, and each air hole corresponding concentrically with a self-absorption hole, the two working together to form a self-absorption cavity, so that the self-absorption structure in the self-absorption cavity works with at least one micropore to adsorb the product.
[0006] Preferably, the stage is a metal stage.
[0007] Preferably, the metal platform is made of aluminum.
[0008] Preferably, the distance between two adjacent pores is greater than or equal to 11.5 mm.
[0009] Preferably, the platform is further provided with a plurality of flatness adjustment holes;
[0010] The plurality of flatness adjustment holes are arranged in a ring and located outside the plurality of micropores. The flatness adjustment holes are used to adjust the flatness of the stage.
[0011] Preferably, the platform is further provided with a detection hole; the detection hole is located near the side of the platform and is surrounded by at least four micropores, and the detection hole is used to detect whether a product is placed there.
[0012] Preferably, the second surface of the stage is provided with a plurality of blind holes, and the self-suction stage is also provided with a plurality of connecting holes, each of the connecting holes being concentrically corresponding to one of the blind holes;
[0013] Connectors are inserted into the connecting hole and the blind hole to assemble the platform onto the self-priming platform.
[0014] Preferably, the side of the platform is also provided with a grounding hole, which is used to assemble a ground wire.
[0015] A laser repair device includes a self-suction stage, a base, and a platform, wherein the platform is assembled on the self-suction stage and the self-suction stage is mounted on the base.
[0016] Preferably, the platform is further provided with a plurality of first fixing holes, which are arranged in a ring and located outside the plurality of micropores; the self-suction platform is further provided with a plurality of second fixing holes, and the base is provided with a plurality of third fixing holes, each of the third fixing holes being concentrically corresponding to a second fixing hole and a first fixing hole; fixing members are inserted into the first fixing holes, the second fixing holes and the third fixing holes to fix the platform and the self-suction platform on the base.
[0017] The platform provided in this embodiment of the utility model is assembled on a self-absorption platform. The product is placed on the first surface of the platform. The self-absorption platform has multiple self-absorption holes, each containing a self-absorption structure. Each pore corresponds concentrically to a self-absorption hole, and the two work together to form a self-absorption cavity. This allows the self-absorption structure within the cavity to engage with at least one micropore, enabling product adsorption. In this example, the diameter of the micropore is 0.3mm-0.5mm. This design allows for a smooth airflow path between the micropore and the self-absorption cavity, facilitating product adsorption on the platform. Testing showed that when the pore diameter is 0.4mm, adsorption of products (e.g., flexible panels) does not produce suction marks, thus avoiding interference with subsequent product image acquisition and quality inspection. Compared to existing ceramic platforms, the diameter of the micropore can be set larger, effectively preventing dust blockage of the micropore in practical applications, thereby improving the adsorption effect. Attached Figure Description
[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments of this application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is a rear view of the platform in one embodiment of the present invention;
[0020] Figure 2 yes Figure 1 Sectional view at point AA;
[0021] Figure 3 yes Figure 1 Side view;
[0022] Figure 4 yes Figure 1 Enlarged view of point B in the middle;
[0023] Figure 5 This is an isometric view of a laser repair device according to one embodiment of the present invention.
[0024] Among them, 1. Stage; 11. Microhole; 12. Air hole; 13. Flatness adjustment hole; 14. Detection hole; 15. Blind hole; 16. Grounding hole; 17. First fixing hole; 18. Marking point; 2. Self-priming stage; 3. Base; 4. Support frame; 5. Camera; 6. Objective lens. Detailed Implementation
[0025] To make the technical problems, technical solutions, and beneficial effects solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.
[0026] In the description of this application, it should be understood that the terms "longitudinal," "radial," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. In the description of this application, unless otherwise stated, "a plurality of" means two or more.
[0027] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0028] This utility model embodiment provides a platform 1, as shown in the following figure. Figure 1 , Figure 2 , Figure 4 and Figure 5 The platform 1 is used to assemble on the self-suction platform 2. The self-suction platform 2 is provided with multiple self-suction holes, and each self-suction hole is provided with a self-suction structure. The first surface of the platform 1 is provided with multiple micropores 11, and the diameter of the micropores 11 is 0.3mm-0.5mm. The first surface of the platform 1 is used to place the product. The second surface of the platform 1 is provided with multiple air holes 12. Each air hole 12 is connected to at least one micropore 11, and each air hole 12 is concentrically corresponding to a self-suction hole. The two cooperate to form a self-suction cavity, so that the self-suction structure in the self-suction cavity cooperates with at least one micropore 11 to adsorb the product.
[0029] As an example, the stage 1 is used in a laser repair device to place products to be repaired (such as flexible panels). In its design, a plurality of micropores 11 are provided on the first surface of the stage 1, and a plurality of air holes 12 are provided on the second surface of the stage 1. Each air hole 12 communicates with at least one micropore 11; specifically, one air hole 12 communicates with five micropores 11. One of the five micropores 11 is concentrically arranged with an air hole 12, and the other four are arranged in a ring around this one micropore 11 at uniform intervals. With this configuration, the stage 1 is assembled onto a self-absorption stage 2, and the product is placed on the first surface of the stage 1. The self-absorption stage 2 has a plurality of self-absorption holes, each containing a self-absorption structure. Each air hole 12 corresponds concentrically to a self-absorption hole, and the two work together to form a self-absorption cavity for accommodating the self-absorption structure. This allows the self-absorption structure within the self-absorption cavity to cooperate with at least one micropore 11, enabling the adsorption of the product.
[0030] In this example, the diameter of the micropore 11 is 0.3mm-0.5mm. This setting allows for a smooth airflow path between the micropore 11 and the self-adsorption chamber, facilitating product adsorption onto the stage 1. Testing showed that when the pore diameter is 0.4mm, adsorption of products (such as flexible panels) does not produce suction marks, thus avoiding interference with subsequent product image acquisition and quality inspection. Compared to existing ceramic stages, the diameter of the micropore 11 can be set larger, effectively preventing dust blockage of the micropore 11 in practical applications, thereby improving the adsorption effect.
[0031] In addition, the stage 1 in this example is an improvement on the self-adsorption stage 2, which can meet the adsorption requirements of the product. The principle of self-adsorption is that when a vacuum is established inside, the local air above the vent 12 is removed and the vent 12 is closed. When there is an object on the vent 12, the product will be pressed onto the stage 1 due to the principle of atmospheric pressure. This design utilizes the principle of self-adsorption platform to adsorb the product through the vent 12 and micropores 11, which can effectively reduce the waste of air source and can accommodate all products smaller than the adsorption surface size. The thickness of the stage 1 is 12-13mm, with an optimal thickness of 12.5mm. The pores 12 in the stage 1 form a smooth negative pressure airway, which enables the stage 1 to maintain its shape and not deform under negative pressure. The product to be adsorbed is a flexible panel with a thickness of 0.1-1mm. The adsorption force of the stage 1 must be able to correspond to a warping capacity of 7mm. After the product is adsorbed on the stage 1, it must be ensured that the entire product is tightly attached to the stage 1. The external dimensions of the stage 1 are 500mm*500mm*12.5mm. The adsorption area of the stage 1 is required to be 480mm*480mm. The multiple micropores 11 can cover products from 1 inch to 20 inches, i.e., products from 10mm*10mm to 470mm*470mm.
[0032] In one embodiment, the stage 1 is a metal stage.
[0033] As an example, the stage 1 is a metal stage. Compared with the existing ceramic stage, the diameter of the micropores 11 can be set to be larger than that of the micropores 11 on the existing ceramic stage. In practical applications, this can effectively prevent the micropores 11 from being blocked by dust, thereby improving the adsorption effect. Moreover, the metal stage has a lower manufacturing cost and a longer service life, and can avoid the need to remake the stage surface.
[0034] In one embodiment, the metal stage is made of aluminum.
[0035] As an example, the metal stage is made of aluminum. Compared with stages made of other metals, the aluminum stage 1 has a relatively low cost, is easy to process, has good plasticity, can achieve lightweight design, and has a good service life and flatness.
[0036] In one embodiment, reference is made to Figure 1 and Figure 4 The distance between two adjacent pores 12 is greater than or equal to 11.5 mm.
[0037] As an example, the distance between two adjacent air holes 12 is greater than or equal to 11.5 mm. Since each air hole 12 has a corresponding self-adsorption structure inside, the distance between two adjacent air holes 12 will be relatively large. Currently, the minimum spacing is 11.5 mm, which can ensure the adsorption effect on the product and avoid wasting air source. Among them, the distance from the center of the outermost air hole 12 to the outermost edge of the stage 1 is 14.25 mm.
[0038] In one embodiment, reference is made to Figure 1 and Figure 4 The stage 1 is also provided with multiple flatness adjustment holes 13; the multiple flatness adjustment holes 13 are arranged in a ring and are located outside the multiple micro-holes 11. The flatness adjustment holes 13 are used to adjust the flatness of the stage 1.
[0039] As an example, the stage 1 is also provided with multiple flatness adjustment holes 13. These holes 13 are arranged in a ring and located outside the multiple micro-holes 11. Adjusting components are installed within the flatness adjustment holes 13 to adjust the flatness of the stage 1, thereby ensuring the precision and quality of product bonding and welding. They also help the stage 1 evenly distribute the weight of the product, reducing warping caused by localized stress and maintaining the flatness of the target object. Specifically, the surface flatness of the stage 1 is ≤±30um, ensuring a smooth surface and preventing damage to the flexible sheet material during handling. The surface of the stage 1 is black hard anodized, and its surface impedance is 10⁶ to 10⁹ Ω, improving the safety of handling the flexible sheet material.
[0040] In one embodiment, reference is made to Figure 1 and Figure 4 The stage 1 is also provided with a detection hole 14; the detection hole 14 is located near the side of the stage 1 and is surrounded by at least four micro holes 11. The detection hole 14 is used to detect whether a product is placed there.
[0041] As an example, the stage 1 is also provided with a detection hole 14; the detection hole 14 is located near the side of the stage 1 and is surrounded by at least four micropores 11; with this arrangement, the detection hole 14 can detect whether a product is placed on the stage 1. The distance from the center of the detection hole 14 to the outermost edge of the stage 1 is 31.5mm. According to requirements, the surface of the stage 1 can be divided into six adsorption zones, thereby realizing the adsorption of products of different sizes; when the product is repaired, the self-adsorption stage 2 stops working, and the air holes 12 and micropores 11 are vented, which can realize the breaking adsorption and meet the integrated adsorption and breaking function. In addition, a marking point 18 is made on each of the four sides of the first surface of the stage 1, thereby marking the position of the stage 1 to facilitate the precise installation of the stage 1.
[0042] In one embodiment, reference is made to Figure 1 and Figure 5 The second surface of the stage 1 is provided with a plurality of blind holes 15, and the self-suction stage 2 is also provided with a plurality of connecting holes, each connecting hole corresponding concentrically to a blind hole 15; connecting parts are inserted into the connecting holes and blind holes 15 so that the stage 1 is assembled on the self-suction stage 2.
[0043] As an example, a plurality of blind holes 15 are provided on the second surface of the platform 1. Specifically, there is one or five air holes 12 between two adjacent blind holes 15. A plurality of connecting holes are also provided on the self-suction platform 2. During installation, the platform 1 is assembled on the self-suction platform 2. Each connecting hole corresponds concentrically to a blind hole 15. Connectors are inserted into the connecting holes and blind holes 15 to facilitate fixing the platform 1 and the self-suction platform 2 together.
[0044] In one embodiment, reference is made to Figure 3 The side of the platform 1 is also provided with a grounding hole 16, which is used to assemble the ground wire.
[0045] As an example, the side of the platform 1 is also provided with a grounding hole 16. A ground wire is installed in the grounding hole 16 to prevent static electricity accumulation, prevent leakage, and improve electromagnetic compatibility.
[0046] This utility model embodiment provides a laser repair device, referring to... Figure 5 It includes a self-priming platform 2, a base 3, and a platform 1. The platform 1 is assembled on the self-priming platform 2, and the self-priming platform 2 is mounted on the base 3.
[0047] As an example, the laser repair equipment includes a self-absorption stage 2, a base 3, and a platform 1. The platform 1 is used in the laser repair equipment to place the product to be repaired (e.g., a flexible panel). In the design, a plurality of micropores 11 are provided on the first surface of the platform 1, and a plurality of air holes 12 are provided on the second surface of the platform 1. Each air hole 12 communicates with at least one micropore 11; specifically, one air hole 12 communicates with five micropores 11. One of the five micropores 11 is concentrically arranged with the air hole 12, and the other four are arranged in a ring around this micropore 11 at uniform intervals. With this configuration, the platform 1 is assembled on the self-absorption stage 2, and the product is placed on the first surface of the platform 1. The self-absorption stage 2 has a plurality of self-absorption holes, each containing a self-absorption structure. Each air hole 12 corresponds concentrically to a self-absorption hole, and the two work together to form a self-absorption cavity for accommodating the self-absorption structure. This allows the self-absorption structure within the self-absorption cavity to cooperate with at least one micropore 11, enabling the adsorption of the product.
[0048] In this example, the diameter of the micropore 11 is 0.3mm-0.5mm. This setting allows for a smooth airflow path between the micropore 11 and the self-adsorption chamber, facilitating product adsorption onto the stage 1. Testing showed that when the pore diameter is 0.4mm, adsorption of products (such as flexible panels) does not produce suction marks, thus avoiding interference with subsequent product image acquisition and quality inspection. Compared to existing ceramic stages, the diameter of the micropore 11 can be set larger, effectively preventing dust blockage of the micropore 11 in practical applications, thereby improving the adsorption effect.
[0049] In addition, the stage 1 in this example is an improvement on the self-adsorption stage 2, which can meet the adsorption requirements of the product. The principle of self-adsorption is that when a vacuum is established inside, the local air above the vent 12 is removed and the vent 12 is closed. When there is an object on the vent 12, the product will be pressed onto the stage 1 due to the principle of atmospheric pressure. This design utilizes the principle of self-adsorption platform to adsorb the product through the vent 12 and micropores 11, which can effectively reduce the waste of air source and can accommodate all products smaller than the adsorption surface size.
[0050] The self-priming stage 2 is mounted on the base 3, which is movably mounted on the support frame 4. In use, the product is placed on the stage 1, and the product is photographed and repaired using the camera 5 and objective lens 6 mounted on the support frame 4. The magnification requirement for the objective lens 6 varies depending on the specific requirements; generally, 20X or 50X is selected for product repair. The depth of field of these objectives is very small, typically 1.7µm for 20X and 1.6µm for 50X.
[0051] In one embodiment, reference is made to Figure 1 , Figure 4 and Figure 5The platform 1 is also provided with a plurality of first fixing holes 17, which are arranged in a ring and located outside the plurality of micropores 11; the self-suction platform 2 is also provided with a plurality of second fixing holes, and the base 3 is provided with a plurality of third fixing holes, each third fixing hole being concentrically corresponding to a second fixing hole and a first fixing hole 17; fixing members are inserted into the first fixing holes 17, the second fixing holes and the third fixing holes to fix the platform 1 and the self-suction platform 2 on the base 3.
[0052] As an example, the platform 1 is also provided with a plurality of first fixing holes 17. In the design, the plurality of first fixing holes 17 are arranged in a ring and are located outside the plurality of micro-holes 11, and are arranged at intervals with the flatness adjustment holes 13. The self-suction platform 2 is also provided with a plurality of second fixing holes, and the base 3 is provided with a plurality of third fixing holes. With this arrangement, when the self-suction platform 2 is installed on the base 3 and the platform 1 is installed on the self-suction platform 2, each third fixing hole is concentrically corresponding to a second fixing hole and a first fixing hole 17. The fasteners are inserted into the first fixing holes 17, the second fixing holes and the third fixing holes, which can facilitate the fixing of the platform 1 and the self-suction platform 2 to the base 3.
[0053] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.
Claims
1. A platform for mounting on a self-priming platform, wherein the self-priming platform is provided with a plurality of self-priming holes, and each of the self-priming holes is provided with a self-priming structure, characterized in that, The first surface of the stage is provided with a plurality of microholes, the diameter of which is 0.3mm-0.5mm, and the first surface of the stage is used to place the product. The second surface of the stage is provided with a plurality of air holes, each air hole communicating with at least one micropore, and each air hole corresponding concentrically with a self-absorption hole, the two working together to form a self-absorption cavity, so that the self-absorption structure in the self-absorption cavity works with at least one micropore to adsorb the product.
2. The platform according to claim 1, characterized in that, The platform is a metal platform.
3. The platform according to claim 2, characterized in that, The metal platform is made of aluminum.
4. The platform according to claim 1, characterized in that, The distance between two adjacent pores is greater than or equal to 11.5 mm.
5. The platform according to claim 1, characterized in that, The platform is also provided with multiple flatness adjustment holes; The plurality of flatness adjustment holes are arranged in a ring and located outside the plurality of micropores. The flatness adjustment holes are used to adjust the flatness of the stage.
6. The platform according to claim 1, characterized in that, The platform is also provided with a detection hole; the detection hole is located near the side of the platform and is surrounded by at least four micropores, and the detection hole is used to detect whether a product is placed there.
7. The platform according to claim 1, characterized in that, The second surface of the stage is provided with a plurality of blind holes, and the self-suction stage is also provided with a plurality of connecting holes, each of the connecting holes being concentrically corresponding to a blind hole; Connectors are inserted into the connecting hole and the blind hole to assemble the platform onto the self-priming platform.
8. The platform according to claim 1, characterized in that, The platform is also provided with a grounding hole on its side, which is used to assemble a ground wire.
9. A laser repair device, characterized in that, It includes a self-priming platform, a base, and a platform as described in any one of claims 1-8, wherein the platform is assembled on the self-priming platform and the self-priming platform is mounted on the base.
10. The laser repair device according to claim 9, characterized in that, The platform is also provided with a plurality of first fixing holes, which are arranged in a ring and located outside the plurality of micropores; the self-suction platform is also provided with a plurality of second fixing holes, and the base is provided with a plurality of third fixing holes, each of the third fixing holes being concentrically corresponding to a second fixing hole and a first fixing hole; fixing members are inserted into the first fixing holes, the second fixing holes and the third fixing holes to fix the platform and the self-suction platform on the base.