Capacitor heat dissipation mechanism and vacuum capacitor

Abstract

This utility model relates to the field of capacitor technology, specifically disclosing a capacitor heat dissipation mechanism and a vacuum capacitor. The heat dissipation mechanism includes a spiral coil and a fixed base. The spiral coil is disposed inside the capacitor body and sleeved on the outside of a bellows. The fixed base has an inlet hole and an outlet hole. The inlet end of the spiral coil is connected to the inlet hole, and the outlet end of the spiral coil is connected to the outlet hole. The fixed base is mounted on the outer shell of the capacitor body. This heat dissipation mechanism combines the advantages of efficient heat dissipation and compact structure to reduce the temperature of the bellows and maintain the stable performance of the capacitor body.

Description

Technical Field

[0001] This utility model relates to the field of capacitor technology, and in particular to capacitor heat dissipation mechanisms and vacuum capacitors. Background Technology

[0002] Vacuum capacitors, as capacitors using vacuum as their dielectric, are widely used in high-frequency, high-voltage equipment fields such as broadcasting, medical MRI, high-frequency heating, semiconductor etching, and plasma cleaning due to their advantages including high voltage withstand, large current carrying capacity, low loss, and self-healing ability after instantaneous overload. In these devices, vacuum capacitors and high-frequency inductors form a resonant circuit to achieve high-frequency impedance matching and ensure stable transmission of radio frequency power.

[0003] A variable vacuum capacitor mainly consists of two sets of coaxial oxygen-free copper electrodes sealed in a vacuum and a ceramic insulating shell. It uses a metal bellows, a moving electrode guiding system, and a threaded drive system to convert the rotational motion of the motor into the linear motion of the moving electrodes, adjusting the capacitance by changing the electrode coupling area. However, due to limitations imposed by thread specifications, the material of rotating parts, and their surface condition, variable vacuum capacitors have certain limitations in terms of the torque required for screw rotation during capacitance adjustment, the accuracy of capacitance change, the speed of capacitance adjustment, and mechanical life. Furthermore, they typically carry a current of approximately 94A.

[0004] In recent years, as semiconductor manufacturing equipment has increasingly demanded higher matching speeds and output power from impedance matching devices, users have raised the bar for the operating voltage and current of variable vacuum capacitors. However, existing variable vacuum capacitors generate significant heat when subjected to high voltage and high current, especially in the bellows section. Excessive temperature can affect their performance and lifespan, thereby impacting the high-frequency impedance matching accuracy of the entire capacitor. Utility Model Content

[0005] The purpose of this invention is to provide a capacitor heat dissipation mechanism and a vacuum capacitor, which combines the advantages of efficient heat dissipation and compact structure, so as to reduce the temperature of the bellows and maintain the stable performance of the capacitor body.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A capacitor heat dissipation mechanism is used to reduce the temperature of the bellows inside the capacitor body. The capacitor heat dissipation mechanism includes a spiral coil and a fixed base. The spiral coil is disposed inside the capacitor body and is sleeved on the outside of the bellows. The fixed base is provided with an inlet hole and an outlet hole. The inlet end of the spiral coil is connected to the inlet hole, and the outlet end of the spiral coil is connected to the outlet hole. The fixed base is disposed on the outer shell of the capacitor body.

[0008] As an optional technical solution for the capacitor heat dissipation mechanism, the spiral coil is connected to the fixed base by brazing.

[0009] As an optional technical solution for the capacitor heat dissipation mechanism, the spiral coil is made of oxygen-free copper.

[0010] As an optional technical solution for the capacitor heat dissipation mechanism, the fixed base has a downward-opening receiving groove, the liquid inlet end and the liquid outlet end are located in the receiving groove, and the liquid inlet hole and the liquid outlet hole both penetrate the side wall of the receiving groove.

[0011] As an optional technical solution for the capacitor heat dissipation mechanism, the liquid inlet end and the liquid outlet end face opposite directions.

[0012] As an optional technical solution for the capacitor heat dissipation mechanism, the spiral coil is at least partially placed in the receiving groove, and the axis of the receiving groove is parallel to the depth direction of the receiving groove.

[0013] As an optional technical solution for the capacitor heat dissipation mechanism, the capacitor heat dissipation mechanism further includes two locking pins, one of which passes through the fixed base and is fixed to the liquid inlet end, and the other of which passes through the fixed base and is fixed to the liquid outlet end.

[0014] As an optional technical solution for the capacitor heat dissipation mechanism, the fixed base has two threaded holes, and the outer walls of the liquid inlet end and the liquid outlet end are both recessed with threaded blind holes; the locking pin includes a locking bolt, which is threadedly engaged with the threaded hole and screwed into the threaded blind hole.

[0015] As an optional technical solution for the capacitor heat dissipation mechanism, the coolant flowing inside the spiral coil is water.

[0016] A vacuum capacitor includes a capacitor body and the aforementioned capacitor heat dissipation mechanism. The capacitor body has a bellows and a shell. The fixed base and the shell form a receiving cavity. The bellows and the spiral coil are both disposed within the receiving cavity.

[0017] The beneficial effects of this utility model are:

[0018] This capacitor cooling mechanism, by sleeved with a spiral coil around the outside of a bellows, allows the coolant flowing within the spiral coil to directly absorb the heat generated by the bellows. This effectively reduces the temperature of the bellows inside the capacitor body, preventing excessive temperature from affecting its performance and lifespan. The mounting base has inlet and outlet ports that connect to the inlet and outlet ends of the spiral coil, forming a coolant circulation channel within the capacitor body. This allows the coolant to circulate within the spiral coil, continuously carrying away heat and ensuring the continuity and stability of the cooling process. The spiral structure of the spiral coil increases the heat exchange area, enabling more efficient heat transfer from the bellows to the coolant, which is then discharged through the inlet and outlet ports of the mounting base. This helps maintain the stability of the capacitor body and extends its service life. Furthermore, the mounting base is located on the outer shell of the capacitor body, organically integrating the cooling mechanism with the capacitor body, resulting in a compact and well-integrated design that facilitates installation and maintenance.

[0019] This vacuum capacitor, by integrating a heat dissipation mechanism with the capacitor body, effectively reduces the temperature of the bellows inside the capacitor body, thereby lowering the overall temperature of the capacitor body and improving its heat dissipation performance. This ensures the stability and reliability of the vacuum capacitor during operation. Simultaneously, the bellows and spiral coil are both housed within the storage cavity, making the overall structure of the vacuum capacitor more compact, saving space, and facilitating overall installation and maintenance. Furthermore, the heat dissipation mechanism reduces the impact of excessive temperature on the capacitor body's performance, improving the capacitance adjustment accuracy and lifespan of the vacuum capacitor. Attached Figure Description

[0020] Figure 1 This is a cross-sectional view of the vacuum capacitor provided in an embodiment of the present invention.

[0021] In the picture:

[0022] 1. Static electrode assembly; 2. Moving electrode assembly; 3. Housing; 4. Bellows; 5. Pull rod; 6. Guide sleeve; 7. Adjusting nut; 8. Rotating screw; 9. Spiral coil. Detailed Implementation

[0023] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0024] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0027] like Figure 1 As shown, this embodiment provides a capacitor heat dissipation mechanism to reduce the temperature of the bellows 4 inside the capacitor body. The capacitor heat dissipation mechanism includes a spiral coil 9 and a fixed base. The spiral coil 9 is disposed inside the capacitor body and is sleeved on the outside of the bellows 4. The fixed base is provided with an inlet hole and an outlet hole. The inlet end of the spiral coil 9 is connected to the inlet hole, and the outlet end of the spiral coil 9 is connected to the outlet hole. The fixed base is disposed on the outer shell 3 of the capacitor body.

[0028] This capacitor cooling mechanism, by sleeved with a spiral coil 9 on the outside of a bellows 4, allows the coolant flowing within the spiral coil 9 to directly absorb the heat generated by the bellows 4. This effectively reduces the temperature of the bellows 4 within the capacitor body, preventing excessive temperature from affecting its performance and lifespan. The fixed base has inlet and outlet ports that connect to the inlet and outlet ends of the spiral coil 9, forming a coolant circulation channel within the capacitor body. This allows the coolant to circulate within the spiral coil 9, continuously carrying away heat and ensuring the continuity and stability of the cooling process. The spiral structure of the spiral coil 9 increases the heat exchange area, enabling more efficient heat transfer from the bellows 4 to the coolant. The heat is then discharged through the inlet and outlet ports of the fixed base, helping to maintain the stability of the capacitor body and extend its lifespan. Simultaneously, the fixed base is located on the outer shell 3 of the capacitor body, organically integrating the capacitor cooling mechanism with the capacitor body, resulting in a compact and well-integrated structure that facilitates installation and maintenance.

[0029] In this embodiment, the spiral coil 9 is connected to the fixed base by brazing.

[0030] Brazing enables a strong and secure connection between the spiral coil 9 and the fixed base, ensuring that the spiral coil 9 will not loosen or fall off during use. This connection method creates a good heat conduction path between the spiral coil 9 and the fixed base, ensuring excellent heat conduction performance. This allows heat to be transferred more smoothly from the spiral coil 9 to the fixed base, guaranteeing the tightness and firmness of the connection between the two. It also improves the sealing of the liquid circulation, reduces the risk of coolant leakage, ensures normal circulation of coolant within the spiral coil 9, improves the stability and reliability of the capacitor heat dissipation mechanism, and further enhances heat dissipation efficiency.

[0031] For example, the spiral coil 9 is made of oxygen-free copper (TU1).

[0032] Oxygen-free copper has excellent thermal conductivity and corrosion resistance. Its excellent thermal conductivity allows for rapid transfer of heat generated by the bellows 4 to the coolant, improving heat dissipation efficiency. Its corrosion resistance ensures the chemical stability of the spiral coil 9, making it less susceptible to corrosion. This prevents damage from coolant erosion during long-term use, extending the lifespan of the spiral coil 9 and ensuring stable heat dissipation performance.

[0033] In this embodiment, the fixed base has a downward-facing accommodating groove, with the liquid inlet and liquid outlet located inside the accommodating groove, and the liquid inlet and liquid outlet both penetrating the side wall of the accommodating groove.

[0034] The structural improvements to the fixed base help to increase heat exchange efficiency. At the same time, the structure of the receiving tank also helps to protect the inlet and outlet ends from external impacts and damage.

[0035] The design of the receiving tank allows the inlet and outlet ends to be rationally arranged within the fixed base. This creates a stable flow path for the coolant within the tank, ensuring easy entry and exit of the spiral coil 9. This reduces flow resistance, facilitates full contact between the coolant and the spiral coil 9, and makes the entire capacitor cooling mechanism more compact, improving coolant circulation efficiency and saving space. Furthermore, the receiving tank provides some protection for the inlet and outlet ends, preventing external impacts and damage, thus extending the lifespan of the capacitor cooling mechanism. Simultaneously, the inlet and outlet holes extend through the sidewall of the receiving tank, facilitating connection to an external coolant supply system and simplifying the installation process.

[0036] Furthermore, the inlet and outlet are oriented in opposite directions.

[0037] The above design enables the coolant to form a more uniform flow path within the spiral coil 9, increasing the contact time and area between the coolant and the bellows 4. This improves the heat exchange efficiency between the coolant and the spiral coil 9, preventing uneven local heat exchange and thus more effectively reducing the temperature of the bellows 4, thereby enhancing heat dissipation. During flow, the coolant can more fully contact the spiral coil 9, carrying away more heat and improving heat dissipation uniformity and effectiveness.

[0038] In this embodiment, the spiral coil 9 is at least partially placed in the receiving groove, and the axis of the receiving groove is parallel to the depth direction of the receiving groove.

[0039] This design allows for a more rational spatial arrangement between the spiral coil 9 and the receiving groove, making full use of the internal space of the fixed base. This results in a more compact structure for the capacitor heat dissipation mechanism, increases the contact area and contact time between the coolant and the spiral coil 9, and facilitates the flow and heat exchange of the coolant within the spiral coil 9, further improving heat exchange efficiency and helping to reduce the temperature of the bellows 4. Simultaneously, the receiving groove provides some protection for the spiral coil 9, preventing it from being impacted or damaged by external forces.

[0040] For example, the capacitor heat dissipation mechanism also includes two locking pins, one of which passes through the fixed base and is fixed to the liquid inlet end, and the other of which passes through the fixed base and is fixed to the liquid outlet end.

[0041] By fixing the inlet and outlet ends to the fixed base with two locking pins respectively, the connection stability between the spiral coil 9 and the inlet and outlet ends can be further enhanced, preventing the spiral coil 9 from shaking or shifting during the circulation of coolant, ensuring the normal circulation of coolant and the stable operation of the capacitor heat dissipation mechanism, and ensuring the stability and reliability of operation.

[0042] Furthermore, the fixed base has two threaded holes, and the outer walls of both the inlet and outlet ends are recessed with threaded blind holes; the locking pin includes a locking bolt, which is threaded into the threaded hole and screwed into the threaded blind hole.

[0043] The locking bolt engages with the threaded hole and is screwed into the threaded blind hole. This threaded connection facilitates the installation and disassembly of the spiral coil 9, and makes it easy to maintain and replace the capacitor heat dissipation mechanism. At the same time, the thread engagement of the locking bolt provides sufficient tightening force to ensure a firm and reliable connection between the spiral coil 9 and the fixed base.

[0044] In this embodiment, the coolant flowing inside the spiral coil 9 is water. Specifically, the liquid circulation rate of the water is 1 L / min, thereby achieving turbulent heat transfer.

[0045] Water is a common coolant with excellent thermal conductivity. Water has a high specific heat capacity, allowing it to absorb a large amount of heat while its own temperature rises only slightly, thus effectively removing heat from the bellows 4. Furthermore, water is inexpensive, readily available, and reduces the operating costs of the capacitor's heat dissipation mechanism; its wide availability also facilitates its use and replenishment in practical applications; water is environmentally friendly, posing no harm to humans or vacuum capacitors, meeting environmental protection requirements, and is an ideal heat dissipation medium.

[0046] This embodiment also provides a vacuum capacitor, including a capacitor body and the above-mentioned capacitor heat dissipation mechanism. The capacitor body has a bellows 4 and a shell 3. The fixed base and the shell 3 form a storage cavity. The bellows 4 and the spiral coil 9 are both located in the storage cavity.

[0047] This vacuum capacitor, by integrating the heat dissipation mechanism with the capacitor body, effectively reduces the temperature of the bellows 4 inside the capacitor body, thereby lowering the overall temperature of the capacitor body and improving its heat dissipation performance. This ensures the stability and reliability of the vacuum capacitor during operation. Simultaneously, both the bellows 4 and the spiral coil 9 are housed within the storage cavity, making the overall structure of the vacuum capacitor more compact, saving space, and facilitating overall installation and maintenance. Furthermore, the heat dissipation mechanism reduces the impact of excessive temperature on the capacitor body's performance, improving the capacitance adjustment accuracy and lifespan of the vacuum capacitor.

[0048] In practical engineering tests, taking the operation of a vacuum capacitor under 10kV conditions as an example, the temperature rise is reduced by 20% compared to a traditional vacuum capacitor, and the vacuum level is maintained at less than or equal to 5×10⁻⁻⁻⁶. 4 Within the range of Pa.

[0049] In this embodiment, a variable vacuum capacitor is used as an example. The variable vacuum capacitor includes a static electrode group 1, a moving electrode group 2, a housing 3, a bellows 4, a pull rod 5, a guide sleeve 6, an adjusting nut 7, a rotating screw 8, and a drive motor. The static electrode group 1 and the moving electrode group 2 are coaxially sealed in a vacuum. The static electrode group 1 and the moving electrode group 2 are made of oxygen-free copper, and the housing 3 is made of insulating ceramic. The moving electrode group 2 is connected to the guide sleeve 6 through the bellows 4 made of metal. One end of the pull rod 5 is fixedly connected to the moving electrode group 2. The other end of the pull rod 5 has a recessed blind hole, into which the adjusting nut 7 is inserted. The adjusting nut 7 engages with the lead screw nut of the rotating screw 8. The outer casing 3 is fixed to the static electrode group 1 and sleeved on the outside of the other components; the bellows 4 is tubular and sleeved on the outside of the pull rod 5, one end of the bellows 4 is connected to the end of the moving electrode group 2 away from the static electrode group 1, and the other end of the bellows 4 is connected to the guide sleeve 6; the pull rod 5 passes through the guide sleeve 6 and is rotatably engaged with the guide sleeve 6, and the rotating screw 8 is rotatably engaged with the guide sleeve 6 through a bearing, and the guide sleeve 6 passes through the fixed base. The output end of the drive motor is coaxially connected to the rotating screw 8. Through the rotation of the drive motor, the relative rotation of the adjusting nut 7 and the rotating screw 8 is realized, thereby driving the pull rod 5 to move. The pull rod 5 allows the moving electrode group 2 to move closer to or away from the static electrode group 1, which causes the coupling length between the moving electrode group 2 and the static electrode group 1 to change. The capacitance of the variable vacuum capacitor will change with the change of the coupling area between the moving electrode group 2 and the static electrode group 1, thereby realizing the adjustment of the capacitance of the variable vacuum capacitor.

[0050] Thanks to the aforementioned capacitor heat dissipation mechanism, the heat of the variable vacuum capacitor is reduced. Furthermore, the increased heat dissipation allows for the selection of higher-power drive motors, increasing the range of options available to users. This meets the need for rapid and accurate high-frequency impedance matching, achieving rapid heat dissipation of the variable vacuum capacitor and reducing manufacturing costs. It also satisfies the requirements for adjusting the high voltage and high power capacitance of the variable vacuum capacitor.

[0051] It is worth noting that the variable vacuum capacitor is a conventional setup in the field, and its specific structure and working principle are common knowledge in the field. Moreover, the assembly between the static electrode group 1, the moving electrode group 2, the outer shell 3, the bellows 4, the pull rod 5, the guide sleeve 6, the adjusting nut 7, the rotating screw 8 and the drive motor can be set up with reference to the prior art. This is not the focus of this utility model and will not be described in detail here.

[0052] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A capacitor heat dissipation mechanism for reducing the temperature of the bellows (4) inside the capacitor body, characterized in that, The capacitor heat dissipation mechanism includes: A spiral coil (9) is disposed inside the capacitor body, and the spiral coil (9) is sleeved on the outside of the bellows (4); The fixed base is provided with an inlet hole and an outlet hole. The inlet end of the spiral coil (9) is connected to the inlet hole, and the outlet end of the spiral coil (9) is connected to the outlet hole. The fixed base is located on the outer shell (3) of the capacitor body.

2. The capacitor heat dissipation mechanism according to claim 1, characterized in that, The spiral coil (9) is connected to the fixed base by brazing.

3. The capacitor heat dissipation mechanism according to claim 1, characterized in that, The spiral coil (9) is made of oxygen-free copper.

4. The capacitor heat dissipation mechanism according to claim 1, characterized in that, The fixed base has a downward-facing receiving groove, the liquid inlet end and the liquid outlet end are located in the receiving groove, and the liquid inlet hole and the liquid outlet hole both penetrate the side wall of the receiving groove.

5. The capacitor heat dissipation mechanism according to claim 4, characterized in that, The inlet end and the outlet end face opposite directions.

6. The capacitor heat dissipation mechanism according to claim 4, characterized in that, The spiral coil (9) is at least partially placed in the receiving groove, the axis of which is parallel to the depth direction of the receiving groove.

7. The capacitor heat dissipation mechanism according to claim 1, characterized in that, The capacitor heat dissipation mechanism also includes two locking pins, one of which passes through the fixed base and is fixed to the liquid inlet end, and the other of which passes through the fixed base and is fixed to the liquid outlet end.

8. The capacitor heat dissipation mechanism according to claim 7, characterized in that, The fixed base has two threaded holes, and the outer walls of the liquid inlet and the liquid outlet are both recessed with threaded blind holes; the locking pin includes a locking bolt, which is threadedly engaged with the threaded hole and screwed into the threaded blind hole.

9. The capacitor heat dissipation mechanism according to any one of claims 1-8, characterized in that, The coolant flowing inside the spiral coil (9) is water.

10. A vacuum capacitor, characterized in that, The capacitor includes a capacitor body and a capacitor heat dissipation mechanism as described in any one of claims 1-8. The capacitor body has a bellows (4) and a shell (3). The fixed base and the shell (3) form a receiving cavity. The bellows (4) and the spiral coil (9) are both located in the receiving cavity.

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