A clamping device for ion source grid drilling

Abstract

The utility model discloses a kind of clamping devices of ion source grid net drilling, it is related to ion source grid net processing technical field, including clamping table, the bottom end four around of clamping table is uniformly fixed and installed with support leg, the top four around of clamping table is uniformly fixed and installed with limit convex strip, the top middle position of clamping table is rotatably installed with carousel, the top of clamping table is provided with clamping unit, the four around of carousel is provided with spacing adjustment unit, the clamping unit includes the rotating groove being opened on the top middle position of clamping table, the spacing adjustment unit includes the adjustment hole being opened on the four around of carousel. The utility model is driven by motor and drives lever to promote carousel rotation, promote movable vertical rod to move inside adjustment hole when carousel rotates, so that four groups of bearing plate drive four groups of clamping block can be relatively moved, and then the adjustment of clamping spacing is realized, clamping fixed is facilitated according to the size of ion source grid net, promote use convenience.

Description

Technical Field

[0001] This utility model relates to the field of ion source grid processing technology, specifically to a clamping device for drilling holes in ion source grids. Background Technology

[0002] An ion source grid is a device used for beam extraction and shaping in an ion source. It is usually a mesh electrode made of graphite or molybdenum and is located at the front end of the ion source outlet. By changing the geometric characteristics and relative position of the grid and controlling the potential distribution on the grid, the ion beam can be extracted from the ion source discharge chamber and given a certain spatial concentration and spatial distribution shape. In optically assisted coating ion sources, the grid plate is usually made into a convex curved surface shape to obtain an ion beam that diffuses in a certain spatial angle, so that the energy distribution of the ion beam cross-section is as uniform as possible, thereby achieving as consistent bombardment energy as possible on the surface of the irradiated workpiece. Drilling is required when processing the ion source grid.

[0003] In order to ensure stability, existing ion source grids mostly require clamping devices to hold and fix them during drilling. However, the clamping distance of existing clamping devices is fixed and inconvenient to adjust, which limits their use and reduces the ease of use. To address this, we provide a clamping device for drilling ion source grids. Utility Model Content

[0004] The purpose of this invention is to provide a clamping device for drilling holes in an ion source grid, so as to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0006] A clamping device for drilling holes in an ion source grid includes a clamping platform. Support legs are fixedly installed around the bottom of the clamping platform, and limit protrusions are fixedly installed around the top of the clamping platform. A turntable is rotatably installed at the center of the top of the clamping platform.

[0007] The clamping platform is equipped with a clamping unit on its top, and the turntable is equipped with a spacing adjustment unit around its perimeter.

[0008] The clamping unit includes a rotating groove located at the center of the top of the clamping table.

[0009] The spacing adjustment unit includes adjustment holes formed around the turntable.

[0010] A further improvement of this utility model is that a support bracket is fixedly installed on the bottom end of the clamping platform, and a motor is fixedly installed on the top of the support bracket, so that the support bracket can support the motor.

[0011] A further improvement of this utility model is that a drive rod is fixedly installed on the output end of the motor, and the other end of the drive rod is fixedly installed at the middle position of the bottom end of the turntable.

[0012] A further improvement of this utility model is that an anti-detachment disc is fixedly connected to the top periphery of the turntable, and a movable vertical rod is movably installed inside the adjustment hole. The anti-detachment disc ensures that the turntable will not detach from the rotating groove when rotating.

[0013] A further improvement of this utility model is that: a bearing plate is fixedly sleeved on the top of the movable vertical rod, and a slider is fixedly installed on the other end of the bearing plate. The slider is slidably sleeved on the outer surface of the limiting protrusion. The slider sliding on the outer surface of the limiting protrusion can limit the position when the bearing plate drives the clamping block to move.

[0014] A further improvement of this utility model is that a clamping block is fixedly installed on the top of the bearing plate, and a through groove is opened on the top of the bearing plate in front of the clamping block. The clamping block can clamp and fix the ion source grid to be processed, promote drilling stability, further improve drilling accuracy, and reduce scrap rate.

[0015] A further improvement of this utility model is that: a fixed crossbar is fixedly installed on both sides of the inside of the through groove, and a roller is rotatably sleeved on the outer surface of the fixed crossbar. The roller rotates on the outer surface of the fixed crossbar, which can reduce the friction between the bearing plate and the grid and promote smooth movement.

[0016] Due to the adoption of the above technical solution, the technological progress achieved by this utility model compared to the prior art is as follows:

[0017] 1. This utility model provides a clamping device for drilling ion source grids. By setting four sets of clamping blocks, the ion source grid to be processed can be clamped and fixed, which promotes drilling stability and improves drilling accuracy.

[0018] 2. This utility model provides a clamping device for drilling holes in an ion source grid. By setting a motor to drive the drive rod to make the turntable rotate, the rotating turntable causes the moving vertical rod to move inside the adjustment hole, thereby enabling the four sets of bearing plates to drive the four sets of clamping blocks to move relative to each other, thereby realizing the adjustment of the clamping distance. This facilitates clamping and fixing according to the size of the ion source grid, thereby improving the ease of use.

[0019] 3. This utility model provides a clamping device for drilling holes in an ion source grid. By setting rollers, when the support plate drives the clamping block to approach the grid, the grid will rub against the support plate when it is above the support plate. At this time, the rollers will rotate on the outer surface of the fixed crossbar due to the friction, thereby promoting smooth movement and reducing resistance. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the motor structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the clamping platform structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the turntable structure of this utility model;

[0024] Figure 5 For the present utility model Figure 4 Enlarged structural diagram at point A.

[0025] In the diagram: 1. Clamping platform; 11. Support bracket; 12. Motor; 13. Drive rod; 14. Rotating groove; 2. Support leg; 3. Limiting protrusion; 4. Turntable; 41. Adjustment hole; 42. Anti-detachment disc; 43. Moving vertical rod; 44. Bearing plate; 45. Clamping block; 46. Slider; 47. Through groove; 48. Fixed crossbar; 49. Roller. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Example 1

[0028] like Figure 1-5As shown, this utility model provides a clamping device for drilling holes in an ion source grid, including a clamping platform 1. Support legs 2 are fixedly installed on all four sides of the bottom end of the clamping platform 1. Limiting protrusions 3 are fixedly installed on all four sides of the top of the clamping platform 1. A turntable 4 is rotatably installed at the middle position of the top of the clamping platform 1. A clamping unit is provided on the top of the clamping platform 1. A spacing adjustment unit is provided around the turntable 4. The clamping unit includes a rotating groove 14 opened at the middle position of the top of the clamping platform 1. A bearing plate 44 is fixedly sleeved on the top of the moving vertical rod 43. A slider 46 is fixedly installed on the other end of the bearing plate 44. The slider 46 is slidably sleeved on the outer surface of the limiting protrusions 3.

[0029] Furthermore, the ion source grid to be processed is placed on top of the clamping stage 1 between four sets of clamping blocks 45, and clamped and fixed by the clamping blocks 45.

[0030] Example 2

[0031] like Figure 1-5 As shown, based on Embodiment 1, this utility model provides a technical solution: Preferably, the spacing adjustment unit includes adjustment holes 41 opened around the turntable 4, a support bracket 11 is fixedly installed on the bottom end of the clamping platform 1, a motor 12 is fixedly installed on the top of the support bracket 11, a drive rod 13 is fixedly installed on the output end of the motor 12, the other end of the drive rod 13 is fixedly installed at the middle position of the bottom end of the turntable 4, an anti-detachment disc 42 is fixedly connected around the top of the turntable 4, and a movable vertical rod 43 is movably installed inside the adjustment hole 41.

[0032] Furthermore, the output of the motor 12 drives the drive rod 13 to rotate the turntable 4. When the turntable 4 rotates, it causes the moving vertical rod 43 to move inside the adjustment hole 41, thereby enabling the four sets of bearing plates 44 to drive the four sets of clamping blocks 45 to move relative to each other, thus realizing the adjustment of the clamping distance.

[0033] Example 3

[0034] like Figure 1-5 As shown, based on embodiments 1-2, this utility model provides a technical solution: preferably, a clamping block 45 is fixedly installed on the top of the bearing plate 44, and a through groove 47 is opened on the top of the bearing plate 44 in front of the clamping block 45. A fixed crossbar 48 is fixedly installed on both sides inside the through groove 47, and a roller 49 is rotatably sleeved on the outer surface of the fixed crossbar 48.

[0035] Furthermore, when the support plate 44 moves the clamping block 45 closer to the grid, the grid, located above the support plate 44, will rub against it. At this time, the roller 49 will rotate on its own on the outer surface of the fixed crossbar 48 due to the friction, thereby promoting smooth movement and reducing resistance.

[0036] The working principle of the clamping device for drilling holes in the ion source grid will be explained in detail below.

[0037] like Figure 1-5 As shown, in use, the ion source grid to be processed is placed on top of the clamping stage 1 between four sets of clamping blocks 45, and clamped and fixed by the clamping blocks 45. The output end of the motor 12 drives the drive rod 13 to make the turntable 4 rotate. When the turntable 4 rotates, it causes the moving vertical rod 43 to move inside the adjustment hole 41, thereby enabling the four sets of bearing plates 44 to move relative to the four sets of clamping blocks 45, thereby realizing the adjustment of the clamping distance. When the bearing plate 44 moves the clamping blocks 45 closer to the grid, the grid is above the bearing plate 44 and will rub against it. At this time, the roller 49 will rotate on the outer surface of the fixed crossbar 48 due to friction, thereby promoting smooth movement and reducing resistance.

[0038] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the protection scope of the present invention.

Claims

1. A clamping device for drilling holes in an ion source grid, comprising a clamping stage (1), characterized in that: Support legs (2) are fixedly installed around the bottom of the clamping platform (1), and limit protrusions (3) are fixedly installed around the top of the clamping platform (1). A turntable (4) is rotatably installed at the middle of the top of the clamping platform (1). The clamping platform (1) is provided with a clamping unit on its top, and the turntable (4) is provided with a spacing adjustment unit around its perimeter. The clamping unit includes a rotating groove (14) located at the middle of the top of the clamping table (1). The spacing adjustment unit includes adjustment holes (41) opened around the turntable (4). An anti-detachment disc (42) is fixedly connected to the top periphery of the turntable (4), and a movable vertical rod (43) is movably installed inside the adjustment hole (41). The top of the movable vertical rod (43) is fixedly sleeved with a bearing plate (44), and a slider (46) is fixedly installed on the other end of the bearing plate (44). The slider (46) is slidably sleeved on the outer surface of the limiting protrusion (3). A clamping block (45) is fixedly installed on the top of the bearing plate (44), and a through groove (47) is opened on the top of the bearing plate (44) in front of the clamping block (45). A fixed crossbar (48) is fixedly installed on both sides of the inside of the through groove (47), and a roller (49) is rotatably sleeved on the outer surface of the fixed crossbar (48).

2. The clamping device for drilling holes in an ion source grid according to claim 1, characterized in that: A support bracket (11) is fixedly installed on the bottom end of the clamping platform (1), and a motor (12) is fixedly installed on the top of the support bracket (11).

3. The clamping device for drilling holes in an ion source grid according to claim 2, characterized in that: A drive rod (13) is fixedly installed on the output end of the motor (12), and the other end of the drive rod (13) is fixedly installed at the middle position of the bottom end of the turntable (4).

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