A plasma device test aid

Abstract

The utility model relates to a kind of plasma equipment test auxiliary tools, it includes first test plate and second test plate, first test plate has first test surface, first test surface is provided with several different diameter first semicylindrical groove, second test plate has second test surface, corresponding several different diameter second semicylindrical groove is provided on second test surface;First test plate and second test plate are detachably fixed connection to form combined test plate, first test surface and second test surface are pasted, form the cylindrical hole that passes through the upper and lower surface of combined test plate, cylindrical hole wall is coated with organic coating;When using, the tool is placed into Plasma machine and is etched by plasma, after taking out, first test plate is detached, the residual condition of organic coating in each first semicylindrical groove is directly measured by measuring tool, data analysis is obtained, and the deep etching capacity of Plasma machine is obtained;This tool can be reused, save cost, do not need to pass through repeated pressing, drilling and section analysis, improve test efficiency.

Description

Technical Field

[0001] This utility model relates to the field of plasma equipment testing, and in particular to an auxiliary tool for plasma equipment testing. Background Technology

[0002] Plasma is the fourth state of matter, composed of ionized gas and containing free electrons, ions, and neutral particles. A plasma machine is an industrial device that uses plasma technology for surface treatment, cleaning, etching, or material modification. It is widely used in the semiconductor and circuit board industries. For example, in the production of circuit boards, adhesive residue remains in the holes after drilling. This residue can affect subsequent processes, so it is necessary to use a plasma machine to remove the adhesive residue from the circuit board and etch it away. The larger the aspect ratio (the smallest hole diameter in the board thickness ratio), the more difficult it is to remove the adhesive residue from the holes. A very important performance characteristic of a plasma machine is its deep etching capability, which means it can completely etch away the maximum aspect ratio of the adhesive residue in the holes. Typically, before a Plasma machine leaves the factory, in order to test its extreme deep etching capability, a circuit board that has undergone normal lamination and drilling processes is used as a test sample. This circuit board is placed in the corresponding Plasma machine for plasma desmearing. After plasma desmearing, each hole is cross-sectioned for analysis, and finally the deep etching capability of the Plasma machine (the maximum thickness-to-diameter ratio that can be achieved) is determined. The circuit boards used in this process are disposable and discarded after use. Moreover, each circuit board has to be laminated and drilled, which is time-consuming, very costly to test, and very inefficient because each hole has to be cross-sectioned for analysis. Utility Model Content

[0003] To overcome the above problems, this utility model provides an auxiliary tool for testing plasma equipment. The technical solution adopted by this utility model to solve its technical problems is as follows:

[0004] A plasma equipment testing auxiliary tool includes a first test plate and a second test plate of the same thickness and length. The first test plate has a first test surface with several first semi-cylindrical grooves of different diameters. The second test plate has a second test surface with several second semi-cylindrical grooves of different diameters. The first and second test plates are detachably and fixedly connected to form a combined test plate. The first and second test surfaces are fitted together, and the first and second semi-cylindrical grooves are combined in a one-to-one correspondence to form a cylindrical hole penetrating the upper and lower parts of the combined test plate. An organic coating is applied to the wall of the cylindrical hole.

[0005] Furthermore, the surface roughness Ra of the first and second test surfaces is ≤0.8, and the wall roughness Ra of the cylindrical hole is ≤0.8.

[0006] Furthermore, the width of the first test board is smaller than the width of the second test board.

[0007] Furthermore, the second test plate has fixing holes at both ends, which are perpendicular to the second test surface. The first test plate has connecting holes at both ends, which are perpendicular to the first test surface and penetrate the first test plate. Fastening screws pass through the connecting holes and into the fixing holes to connect the first test plate and the second test plate.

[0008] Furthermore, the first test plate has a first alignment hole at both ends that is perpendicular to the first test surface, and the second test plate has a second alignment hole at both ends that is perpendicular to the second test surface. An alignment post passes through the second alignment hole. The first test plate is sleeved on the alignment post through the first alignment hole to align with the second test plate.

[0009] Furthermore, the combined test board is made of a plasma-resistant etching material.

[0010] Furthermore, the cylindrical hole vertically penetrates the top and bottom surfaces of the combined test plate, the thickness of the combined test plate is greater than or equal to 2 mm and less than or equal to 10 mm, and the diameter of the cylindrical hole is greater than or equal to 0.15 mm and less than or equal to 5 mm.

[0011] The beneficial effects of this utility model are as follows:

[0012] This tool comprises a first test plate and a second test plate of equal thickness and length. The first test plate has a first test surface with several first semi-cylindrical grooves of different diameters. The second test plate has a second test surface with several corresponding second semi-cylindrical grooves of different diameters. The first and second test plates are detachably and fixedly connected to form a combined test plate. The first and second test surfaces are fitted together, and the first and second semi-cylindrical grooves are combined in a one-to-one correspondence to form a cylindrical hole penetrating the upper and lower parts of the combined test plate. An organic coating is applied to the wall of the cylindrical hole. In use, the tool is placed in a Plasma etching machine for plasma etching. Afterward, it is removed, the first test plate is taken off, and the residual organic coating in the first semi-cylindrical groove is analyzed directly using metallographic microscopes, 100x microscopes, 10x microscopes, and other measurement and analysis tools. Data analysis is used to determine the deep etching capability of the Plasma etching machine. This tool is reusable, saving costs and eliminating the need for repeated pressing, drilling, and slicing analysis, thus improving testing efficiency. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, wherein:

[0014] Figure 1 These are 3D views and magnified details of the testing aids;

[0015] Figure 2This is an exploded view of the testing aid tool;

[0016] Figure 3 This is an exploded view of the second test board;

[0017] Figure 4 This is an exploded view of the first test board.

[0018] Figure number marking:

[0019] 1. Combined test board; 2. Cylindrical holes;

[0020] 100. First test plate; 101. First test surface; 102. First semi-cylindrical groove; 103. Connecting hole; 104. Fastening screw; 105. First alignment hole;

[0021] 200. Second test plate; 201. Second test surface; 202. Second semi-cylindrical groove; 203. Fixing hole; 204. Second alignment hole; 205. Alignment post. Detailed Implementation

[0022] To better understand the purpose, structure, and function of this utility model, the following detailed description of specific embodiments of the "A Plasma Equipment Testing Auxiliary Tool" of this utility model is provided in conjunction with the accompanying drawings.

[0023] See Figures 1-4In this embodiment, the testing auxiliary tool includes a first test plate 100 and a second test plate 200 with the same thickness and length. The first test plate 100 has a first test surface 101, on which several first semi-cylindrical grooves 102 of different diameters are vertically arranged. The second test plate 200 has a second test surface 201, on which several second semi-cylindrical grooves 202 of different diameters are vertically arranged. The first test plate 100 and the second test plate 200 are detachably fixedly connected to form a combined test plate 1. When the first test plate 100 and the second test plate 200 are fixedly connected, the first test surface 101 and the second test surface 201 fit tightly together. The first semi-cylindrical grooves 102 and the second semi-cylindrical grooves 202 are combined together in a one-to-one correspondence to form a cylindrical hole 2 penetrating the upper and lower surfaces of the combined test plate 1. An organic coating is coated on the hole wall of the cylindrical hole 2. The organic coating can be plasma etched, and the dyne value of the organic coating is between 20 and 45 to simulate the residual adhesive in the circuit board hole. In use, this auxiliary tool is placed into the Plasma machine for etching, then removed. The first test plate 100 and the second test plate 200 are separated. The residual organic coating within the first semi-cylindrical groove 102 and / or the second semi-cylindrical groove 202 is then directly measured using metallographic microscopes, 100x microscopes, and 10x microscopes. The obtained data is analyzed to determine the deep etching capability of the Plasma machine. This auxiliary tool is reusable, greatly saving testing costs. Furthermore, using this tool eliminates the need for repeated pressing, drilling, and slicing operations, significantly improving testing efficiency.

[0024] More specifically, in this embodiment, the surface roughness Ra of the first test surface 101 and the second test surface 201 is ≤0.8, and the wall roughness Ra of the cylindrical hole 2 is ≤0.8. In this way, when the first test plate 100 and the second test plate 200 are combined, the first test surface 101 and the second test surface 201 can be seamlessly fitted, ensuring that the first semi-cylindrical groove 102 and the second semi-cylindrical groove 202 are tightly combined to form the cylindrical hole 2, so as to more accurately simulate the residual adhesive of the circuit board.

[0025] See further Figure 1 In this embodiment, the width of the first test plate 100 is smaller than the width of the second test plate 200. It is preferable to measure the first test plate 100 to facilitate direct measurement under measurement and analysis tools such as metallurgical microscopes, 100x microscopes, and 10x microscopes.

[0026] See further Figures 2-4In this embodiment, the second test plate 200 has fixing holes 203 at both ends, which are perpendicular to the second test surface 201. The first test plate 100 has connecting holes 103 at both ends, which are perpendicular to the first test surface 101 and pass through the first test plate 100. The fastening screw 104 passes through the connecting hole 103 and into the fixing hole 203 to connect the first test plate 100 and the second test plate 200, thereby realizing a detachable fixed connection between the first test plate 100 and the second test plate 200, which facilitates quick disassembly of the first test plate 100 and the second test plate 200.

[0027] See further Figure 2 In this embodiment, the first test plate 100 has first alignment holes 105 perpendicular to the first test surface 101 at both ends, and the second test plate 200 has second alignment holes 204 perpendicular to the second test surface 201 at both ends. Alignment posts 205 are inserted into the second alignment holes 204. The first test plate 100 is sleeved on the alignment posts 205 through the first alignment holes 105 so that it can slide along the alignment posts 205 to align with the second test plate 200. This facilitates quick and accurate alignment of the first test plate 100 and the second test plate 200 when assembling the test plate 1.

[0028] More specifically, in this embodiment, the combined test plate 1 is made of a plasma-resistant etching material, preferably SU316 stainless steel, ceramic, quartz or glass.

[0029] Furthermore, in this embodiment, in order to better simulate the actual thickness-to-diameter ratio of the circuit board, the cylindrical hole 2 vertically penetrates the top and bottom surfaces of the combined test board 1. The thickness of the combined test board 1 is greater than or equal to 2 mm and less than or equal to 10 mm, and the diameter of the cylindrical hole 2 is greater than or equal to 0.15 mm and less than or equal to 5 mm.

[0030] It is understood that this utility model has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of this utility model. Furthermore, under the teachings of this utility model, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of this utility model.

[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this utility model. In the description of this application, "multiple" is understood as "at least two." "And / or" describes the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can represent: A alone, A and B simultaneously, and B alone. A connected to B can represent: A and B directly connected and A and B connected through C. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

Claims

1. A plasma equipment testing auxiliary tool, characterized in that, The test includes a first test plate (100) and a second test plate (200) of the same thickness and length. The first test plate (100) has a first test surface (101) with a plurality of first semi-cylindrical grooves (102) of different diameters. The second test plate (200) has a second test surface (201) with a plurality of second semi-cylindrical grooves (202) of different diameters. The first test plate (100) and the second test plate (200) are detachably fixedly connected to form a combined test plate (1). The first test surface (101) and the second test surface (201) are fitted together. The first semi-cylindrical grooves (102) and the second semi-cylindrical grooves (202) are combined in a one-to-one correspondence to form a cylindrical hole (2) penetrating the upper and lower surfaces of the combined test plate (1). The wall of the cylindrical hole (2) is coated with an organic coating.

2. The plasma equipment testing auxiliary tool according to claim 1, characterized in that, The surface roughness Ra of the first test surface (101) and the second test surface (201) is ≤0.8, and the wall roughness Ra of the cylindrical hole (2) is ≤0.

8.

3. The plasma equipment testing auxiliary tool according to claim 1, characterized in that, The width of the first test board (100) is smaller than the width of the second test board (200).

4. The plasma equipment testing auxiliary tool according to claim 3, characterized in that, The second test plate (200) has fixing holes (203) at both ends, the fixing holes (203) being perpendicular to the second test surface (201). The first test plate (100) has connecting holes (103) at both ends, the connecting holes (103) being perpendicular to the first test surface (101) and penetrating the first test plate (100). Fastening screws (104) pass through the connecting holes (103) and into the fixing holes (203) to connect the first test plate (100) and the second test plate (200).

5. The plasma equipment testing auxiliary tool according to claim 4, characterized in that, The first test plate (100) has a first alignment hole (105) perpendicular to the first test surface (101) at both ends, and the second test plate (200) has a second alignment hole (204) perpendicular to the second test surface (201) at both ends. An alignment post (205) passes through the second alignment hole (204). The first test plate (100) is sleeved on the alignment post (205) through the first alignment hole (105) to align with the second test plate (200).

6. A plasma equipment testing auxiliary tool according to any one of claims 1-5, characterized in that, The combined test board (1) is made of a plasma-resistant etching material.

7. The plasma equipment testing auxiliary tool according to claim 6, characterized in that, The cylindrical hole (2) penetrates vertically through the top and bottom surfaces of the combined test plate (1). The thickness of the combined test plate (1) is greater than or equal to 2 mm and less than or equal to 10 mm. The diameter of the cylindrical hole (2) is greater than or equal to 0.15 mm and less than or equal to 5 mm.

Images