A crystal growing furnace electromagnetic interference resistant cable support
By using a stainless steel or galvanized steel frame with a gradient honeycomb shielding layer and separation grooves in the crystal growth furnace, the electromagnetic interference problem of strong cables to weak cables is solved, and the electrical performance and safety are improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LINGLI TECHNOLOGY (WUXI) CO LTD
- Filing Date
- 2025-08-25
- Publication Date
- 2026-06-16
AI Technical Summary
In existing crystal growth furnaces, the electromagnetic interference problem between high-voltage cables and low-voltage cables has not been effectively solved, leading to a decrease in the temperature control accuracy of crystal growth and an increase in the defect rate.
It adopts a stainless steel or galvanized steel plate frame, with an internal gradient honeycomb shielding layer and separation slots. Electromagnetic interference is eliminated through a grounding system, including a strong current slot, a weak current slot and a gradient honeycomb shielding layer. Electromagnetic shielding is achieved using multi-layer metal honeycomb panels and wave-absorbing materials.
It effectively eliminates electromagnetic interference, improves electrical performance and safety, reduces interference from weak electrical signals, enhances the temperature control accuracy of crystal growth, and reduces the defect rate.
Smart Images

Figure CN224368208U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of crystal growth furnace technology, and in particular relates to a crystal growth furnace anti-electromagnetic interference cable bracket. Background Technology
[0002] In the operation of crystal growth furnaces, high-current cables need to be laid out inside. Typical examples include cables that provide power to the heaters and cables that transmit low-voltage signals at the microvolt level. For instance, the signals output by thermocouples for temperature monitoring are transmitted through such low-voltage cables. Current support structures have some measures to address electromagnetic interference. One approach is to use simple metal troughs to separate the high-current and low-voltage cables, attempting to reduce interference through physical isolation. Another approach is to wrap the cables with a shielding layer, hoping to block external interference from affecting the cable signals. However, actual operation shows that neither of these existing methods can effectively suppress the interference caused by high-current cables to low-voltage cables. Neither simple separation with metal troughs nor complete shielding can fundamentally solve the key problem of electromagnetic interference, and the mutual interference between high-current and low-voltage signals during transmission within the crystal growth furnace still exists.
[0003] The problem with existing technologies is that weak electrical signals are susceptible to strong electromagnetic interference, which leads to a decrease in the temperature control accuracy of crystal growth and an increase in the crystal defect rate. Utility Model Content
[0004] To solve the above-mentioned technical problems, this utility model provides: an electromagnetic interference protection cable bracket for a crystal growth furnace, including a frame;
[0005] The frame is made of stainless steel or galvanized steel plate, and four symmetrically arranged terminals are fixedly connected to the bottom of the frame.
[0006] The frame is equipped with shielding components.
[0007] As a preferred embodiment of the present invention, the shielding assembly includes a gradient honeycomb shielding layer composed of multiple stacked metal honeycomb panels;
[0008] The gradient cellular shielding layer is located in the middle of the frame, and the aperture of the multiple cellular panels in the gradient cellular shielding layer decreases sequentially from left to right.
[0009] Each edge of the honeycomb panel in the gradient honeycomb shielding layer is connected to the frame by argon arc welding.
[0010] As a preferred embodiment of the present invention, a high-voltage groove is provided on the left side of the gradient honeycomb shielding layer;
[0011] The high-voltage trough is fixedly connected to the frame, and the high-voltage trough is a metal trough.
[0012] As a preferred embodiment of the present invention, a weak current groove is provided on the right side of the gradient honeycomb shielding layer;
[0013] The low-voltage channel is fixedly connected to the frame;
[0014] The inner wall of the low-voltage tank is lined with a 2mm thick ferrite rubber sheet, and the low-voltage tank is a metal tank.
[0015] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0016] Four terminals are installed at the bottom of the frame for grounding, ensuring the electrical connection between the frame and the ground. The current transmitted by the high-voltage cable passes through the shielding component in sequence. The shielding component eliminates the electromagnetic interference generated by the current. The current after shielding is conducted to the ground through the grounding system, eliminating interference current, preventing electromagnetic interference problems, and improving electrical performance and safety. Attached Figure Description
[0017] Figure 1 This is a first-view perspective three-dimensional structural diagram of the anti-electromagnetic interference cable bracket for crystal growth furnace provided in this embodiment of the utility model;
[0018] Figure 2 This is a second-view perspective three-dimensional structural diagram of the anti-electromagnetic interference cable bracket for crystal growth furnace provided in this embodiment of the utility model;
[0019] Figure 3 This is a three-dimensional structural diagram of the gradient honeycomb shielding layer of the anti-electromagnetic interference cable bracket for crystal growth furnace provided in this embodiment of the utility model;
[0020] Figure 4 This is a schematic diagram of the front view of the electromagnetic interference protection cable bracket for crystal growth furnace provided in this embodiment of the utility model;
[0021] Figure 5 This utility model provides an electromagnetic interference protection cable bracket for crystal growth furnaces. Figure 4 Schematic diagram of the cross-sectional planar structure of A in the middle;
[0022] Figure 6 This utility model provides an electromagnetic interference protection cable bracket for crystal growth furnaces. Figure 4 A schematic diagram of the cross-sectional planar structure of section B;
[0023] Figure 7 This utility model provides an electromagnetic interference protection cable bracket for crystal growth furnaces. Figure 4 Schematic diagram of the cross-sectional planar structure of C;
[0024] Figure 8 This utility model provides an electromagnetic interference protection cable bracket for crystal growth furnaces. Figure 4 A schematic diagram of the cross-sectional planar structure of D.
[0025] In the diagram: 1. Frame; 2. Terminal; 3. Gradient honeycomb shielding layer; 4. High-voltage channel; 5. Low-voltage channel. Detailed Implementation
[0026] To further understand the invention content, features and effects of this utility model, the following embodiments are provided, and detailed descriptions are given in conjunction with the accompanying drawings.
[0027] The structure of this utility model will now be described in detail with reference to the accompanying drawings.
[0028] Please see Figures 1 to 8 The present invention provides an electromagnetic interference protection cable bracket for a crystal growth furnace, comprising a frame 1; the frame 1 is made of stainless steel or galvanized steel plate, and four symmetrically arranged terminals 2 are fixedly connected to the bottom of the frame 1; a shielding component is installed inside the frame 1.
[0029] The above solution is adopted: by setting four terminals 2 at the bottom of the frame 1 to achieve grounding, the electrical connection between the frame 1 and the ground is ensured. During the transmission process, the current in the power cable will flow through the shielding component in sequence. The shielding component shields the electromagnetic interference generated by the current. The shielded current is finally guided to the ground through the grounding system, thereby dissipating the interference current and avoiding potential electromagnetic interference problems, thus improving the overall electrical performance and safety.
[0030] Furthermore, the shielding assembly includes a gradient honeycomb shielding layer 3 composed of multiple stacked metal honeycomb panels;
[0031] The gradient honeycomb shielding layer 3 is located in the middle of the frame 1, and the aperture of the multiple honeycomb panels in the gradient honeycomb shielding layer 3 decreases from left to right; the edges of each layer of the honeycomb panels in the gradient honeycomb shielding layer 3 are connected to the frame 1 by argon arc welding.
[0032] Furthermore, a high-voltage groove 4 is provided on the left side of the gradient honeycomb shielding layer 3; the high-voltage groove 4 is fixedly connected to the frame 1, and the high-voltage groove 4 is a metal groove.
[0033] Furthermore, a weak current groove 5 is provided on the right side of the gradient honeycomb shielding layer 3; the weak current groove 5 is fixedly connected to the frame 1; the inner wall of the weak current groove 5 is provided with a 2mm thick ferrite rubber sheet, and the weak current groove 5 is a metal groove.
[0034] Using the above scheme: When in use, frame 1 adopts a layered structure, arranged in three layers: left, center, and right. Examples of the functions of each layer are as follows:
[0035] First, the left layer of the high-voltage trough 4: used to lay high-current power cables such as heater power supplies;
[0036] Second, the intermediate layer of the gradient honeycomb shielding layer 3: multi-layer stacked metal honeycomb panels, with the aperture decreasing gradually from the strong electric slot 4 side to the weak electric slot 5 side, specifically 10mm→7mm→3mm→1mm, to isolate the electromagnetic interference of the strong electric layer to the weak electric layer.
[0037] Third, the right layer of the weak current tank 5: used to lay microvolt-level weak current cables; the inner layer is lined with ferrite / carbon-based composite material for absorbing the weak electromagnetic waves that remain after penetrating the honeycomb wall, preventing secondary interference caused by reflection in the weak current tank 5; the weak current tank 5 is equipped with multiple signal partitions to separate different types of weak current signals such as: thermocouple area, pressure sensor area, control signal area, and communication line area.
[0038] The shielding process is as follows:
[0039] The high-voltage cable is initially shielded by the metal shell of the high-voltage trough 4. When the residual interference penetrates the gradient honeycomb shielding layer 3, it is reflected multiple times in the holes due to the change in aperture gradient and converted into eddy current loss. Low frequency is guided by the large aperture, and high frequency is cut off by the small aperture. The wave-absorbing material in the weak current trough 5 absorbs the penetrating interference and the reflected waves in the trough. Finally, the interference current is discharged through the grounding system. In this process, the gradient honeycomb layer achieves a wideband shielding efficiency of 30dB–80dB, completely eliminating weak signal interference. The wave-absorbing material and the partition design reduce crosstalk in the trough by ≥15dB.
[0040] The working principle of this utility model:
[0041] By setting four terminals 2 at the bottom of the frame 1 to achieve grounding, the electrical connection between the frame 1 and the ground is ensured. During the transmission of the current in the high-voltage cable, the high-voltage cable is initially shielded by the metal shell of the high-voltage trough 4. When the residual interference penetrates the gradient honeycomb shielding layer 3, it is reflected multiple times in the hole due to the change of aperture gradient and converted into eddy current loss. Low frequency is guided by the large aperture, and high frequency is cut off by the small aperture. The wave-absorbing material in the weak current trough 5 absorbs the penetrating interference and the reflected waves in the trough, and finally the interference current is discharged through the grounding system.
[0042] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0043] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A long crystal furnace anti-electromagnetic interference cable support, characterized in that: it comprises a frame (1); the material of the frame (1) is stainless steel or galvanized steel plate, and four symmetrical terminals (2) are fixedly connected to the bottom of the frame (1); and a shielding assembly is installed in the frame (1). The shielding assembly comprises a gradient honeycomb shielding layer (3) composed of multiple layers of stacked metal honeycomb plates. The gradient honeycomb shielding layer (3) is located at the middle position of the frame (1), and the aperture of the multiple honeycomb plates in the gradient honeycomb shielding layer (3) gradually decreases from left to right. The edges of each layer of the honeycomb plates in the gradient honeycomb shielding layer (3) are connected to the frame (1) by argon arc welding.
2. The EMI shielding cable support for a crystal growing furnace as claimed in claim 1, wherein: A strong current tank (4) is arranged on the left side of the gradient honeycomb shielding layer (3). The strong current tank (4) is fixedly connected to the frame (1), and the strong current tank (4) is a metal tank body. A weak current tank (5) is arranged on the right side of the gradient honeycomb shielding layer (3).
3. The EMI shielded cable support for a crystal growing furnace as defined in claim 2 wherein: The weak current tank (5) is fixedly connected to the frame (1). The inner wall of the weak current tank (5) is provided with a 2mm thick ferrite rubber sheet, and the weak current tank (5) is a metal tank body.
4. The EMI resistant cable support for a crystal growing furnace as defined in claim 3 wherein: