Exhaust gas filtering device

Abstract

This utility model provides an exhaust gas filtration device, including a rotary drive and a filtration unit. The filtration unit includes a cylindrical filter element, a rotating element, and a rotary transmission element. The rotating element and the rotary transmission element are disposed within a receiving cavity formed by the cylindrical filter element, with the rotating element extending axially along the cylindrical filter element. The two ends of the rotary transmission element are respectively connected to the rotating element and the cylindrical filter element. The rotary drive element is connected to the rotating element to drive the rotating element to rotate the rotary transmission element and the cylindrical filter element, thereby using centrifugal force to shake off the dust adhering to the cylindrical filter element. This application helps to reduce or avoid the adsorption of large particulate impurities such as dust on the surface of the filtration unit, which would cause clogging of the filtration unit.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to an exhaust gas filtration device. Background Technology

[0002] Semiconductor device manufacturing equipment utilizes a gas reaction source to epitaxially grow a solid thin film material layer on a substrate surface, and is widely used in the field of semiconductor device fabrication. During the semiconductor material growth reaction, a reaction source gas is introduced into a reaction chamber. These substances react within the chamber to generate the desired thin film material layer. Simultaneously, exhaust gas is produced, which contains impurities such as dust composed of unreacted raw materials and byproducts.

[0003] In existing technologies, exhaust gas is generally sent to an exhaust filter for filtration. However, during use, the existing exhaust filter may become clogged due to dust and other impurities not being cleaned in time. To prevent clogging, the exhaust filter needs to be manually disassembled and cleaned or replaced regularly, which greatly increases maintenance costs and reduces production capacity. Utility Model Content

[0004] The purpose of this invention is to provide an exhaust gas filtration device that helps reduce or avoid large particulate impurities such as dust adsorbing onto the surface of the filter unit and causing blockage.

[0005] To achieve the above objectives, the exhaust gas filtration device of this utility model is used to communicate with a semiconductor processing cavity through an exhaust gas emission pipeline. The exhaust gas filtration device includes a rotary drive and a filtration unit. The filtration unit includes a cylindrical filter, a rotary component, and a rotary transmission component. The rotary component and the rotary transmission component are disposed within a receiving cavity formed by the cylindrical filter, and the rotary component extends along the axial direction of the cylindrical filter. The two ends of the rotary transmission component are respectively connected to the rotary component and the cylindrical filter. The rotary drive is rotatably connected to the rotary component to drive the rotary component to rotate the rotary transmission component and the cylindrical filter, thereby using centrifugal force to shake off the dust adhering to the cylindrical filter.

[0006] Preferably, the rotary drive component includes a drive device, a transmission wheel, a transmission connector, and at least one driven wheel. The transmission wheel is disposed on the drive rotation shaft of the drive device, and the transmission wheel is connected to the driven wheel via the transmission connector. The driven wheel is sleeved on the outside of the rotary component to drive the rotary component to rotate.

[0007] Preferably, the exhaust gas filtration device further includes an air intake assembly, which includes an air intake pipe connected to the air supply end. The rotating part is provided with an air guide channel communicating with the air intake pipe, and the air guide channel extends from the first end of the rotating part to the second end of the rotating part along the extension direction of the rotating part. The outer wall of the rotating part is provided with a plurality of air guide structures communicating with the air guide channel.

[0008] Preferably, the exhaust gas filtration device further includes a control module; the intake pipe is provided with a first switching valve, the exhaust gas discharge pipe is provided with a second switching valve, the control module is connected to the first switching valve and the second switching valve respectively, the control module is used to control the opening of the first switching valve when the second switching valve is closed, so as to introduce purge gas through the intake pipe to remove dust on the cylindrical filter element when the exhaust gas supply to the filtration unit is stopped; and / or the control module is connected to the rotary drive to control the rotary drive to drive the cylindrical filter element to rotate at different speeds.

[0009] Preferably, the intake assembly further includes a mounting component and a sealing component. The mounting component is fixedly connected to the rotating component, and at least a portion of the mounting component is sleeved inside the driven wheel so as to drive the rotating component to rotate with the driven wheel. The mounting component has a receiving cavity, one end of the intake pipe passes through the receiving cavity and is gapped inside the rotating component, and the other end of the intake pipe passes through the driven wheel and is gapped between the driven wheel and the driven wheel. The sealing component is fixedly disposed in the receiving cavity and dynamically seals against the rotating component and the intake pipe.

[0010] Preferably, the intake assembly further includes a fixing member, which is movably disposed within the receiving cavity and fixedly sleeved on the outer wall of the intake pipe; the fixing member includes a fixing member body, which has a plurality of first mounting portions extending axially, the lubricating ball being slidably disposed on the first mounting portions and protruding from the first mounting portions; and / or the fixing member body has a second mounting portion circumferentially disposed on the outer side wall of the mounting member, the lubricating ball being slidably disposed between the second mounting portion and the inner wall of the mounting member.

[0011] Preferably, the exhaust gas filtration device further includes a device housing, the exhaust gas inlet end of the device housing being connected to the exhaust gas discharge pipe; the filtration unit is provided in a plurality of columns, which are arranged in the device housing and spaced apart along the direction away from the exhaust gas inlet end, each column of the filtration unit group includes a plurality of spaced-apart filtration units, and adjacent filtration units in adjacent columns of the filtration unit group are staggered.

[0012] Preferably, the exhaust gas filtration device further includes a device housing and a dust collection component. The filtration unit is disposed within the device housing, and the dust collection component is disposed at the bottom of the device housing. A separator is provided between the device housing and the dust collection component. The separator includes a fixed frame and a plurality of movable blades arranged sequentially along the length or width direction of the fixed frame. The movable blades are rotatably connected to the fixed frame via a rotating component. The rotating component is used to drive the movable blades to rotate so that there is a gap between adjacent movable blades and they extend toward the bottom of the dust collection component. Alternatively, the movable blades are movably disposed on the fixed frame, with a gap between adjacent movable blades to allow dust to pass through and extend toward the bottom of the dust collection component.

[0013] Preferably, the rotary transmission component is provided in several groups, and the several rotary transmission components are arranged at intervals along the extension direction of the rotary component on the outer wall of the rotary component. Each group includes at least two rotary transmission components, and at least two rotary transmission components are arranged on the outer wall of the rotary component along the circumference of the rotary component.

[0014] Preferably, the cylindrical filter element includes several layers of filter screens, with the filter holes in adjacent layers of filter screens arranged alternately. The channels of the filter holes are inclined to the axis of the cylindrical filter element, and the virtual extension of the channels of the filter holes at the far end of the top plate of the cylindrical filter element extends toward the region away from the axis of the cylindrical filter element.

[0015] The beneficial effects of the exhaust gas filtration device of this utility model are as follows:

[0016] (1) This application connects the rotary drive component to the rotary component to drive the rotary transmission component and the cylindrical filter component to rotate, so that the dust on the cylindrical filter component will fall off the cylindrical filter component due to centrifugal force. Therefore, the filter unit can automatically remove dust without disassembling the filter unit, which helps to reduce the adhesion and accumulation of dust and other impurities on the cylindrical filter component, thereby improving the filtration effect and being more environmentally friendly.

[0017] (2) This application can drive the cylindrical filter element to rotate so that each of the working surfaces of the cylindrical filter element in the circumference will face the exhaust gas inlet end one by one, so that the exhaust gas passes through each of the working surfaces of the cylindrical filter element in the circumference, instead of the same working surface of the cylindrical filter element always filtering the exhaust gas. This avoids the partial or complete blockage of the working surface of the cylindrical filter element facing the exhaust gas inlet end due to excessive amount of dust and other impurities. Moreover, the working surfaces of the cylindrical filter element in the circumference are intermittently facing the exhaust gas inlet end, that is, the working surfaces of the cylindrical filter element in the circumference are intermittently performing the main filtering function of the exhaust gas. This allows the working surface of the cylindrical filter element with dust and other impurities to have enough time (i.e., the time period when the working surface rotates to not face the exhaust gas inlet end) to shake off the dust adhering to the working surface through centrifugal force. This is beneficial to improving the filtering effect of the cylindrical filter element and avoids the exhaust gas entering from the same area of ​​the cylindrical filter element, which can easily cause local blockage of the cylindrical filter element.

[0018] (3) It helps to reduce or avoid large particulate impurities such as dust adsorbing on the surface of the cylindrical filter element and causing large-area blockage of the cylindrical filter element, which helps to extend the service life of the filter device, reduce the number of filter element replacements in the filter device, reduce the time consumed by the filter device after disassembly and installation and leak detection, and improve the operating efficiency and production capacity of the equipment. Attached Figure Description

[0019] Figure 1 This is a schematic diagram showing the structural connection between the filter unit and the driven wheel in some embodiments of the exhaust gas filtration device of this utility model;

[0020] Figure 2 This is a schematic diagram of the installation structure of the drive component mounting part, the device housing, and the dust collection component in the exhaust gas filtration device according to an embodiment of the present utility model.

[0021] Figure 3 This is a schematic diagram of the structure of the separator in the exhaust gas filtration device according to an embodiment of the present utility model;

[0022] Figure 4 This is a schematic diagram of the arrangement of several filter units in the exhaust gas filtration device according to an embodiment of the present utility model.

[0023] Figure 5 This is a schematic diagram showing the structural connection between the filter unit and the driven wheel in some other embodiments of the exhaust gas filtration device of this utility model;

[0024] Figure 6 This is a schematic diagram of the air intake component in the exhaust gas filtration device according to an embodiment of the present utility model;

[0025] Figure 7 for Figure 6 A cross-sectional view of the intake assembly along line EE;

[0026] Figure 8 This is a schematic diagram of the structure of the fixing component and the lubricating ball in the exhaust gas filtration device of this utility model embodiment;

[0027] Figures 1 to 8 The reference numerals in the attached figures are as follows:

[0028] 100. Filter unit; 110. Cylindrical filter element; 111. Top plate; 112. Bottom plate; 120. Rotating component; 121. Air guiding structure; 122. First end; 123. Second end; 130. Rotary transmission component; 101. First filter unit; 102. Second filter unit; 103. Third filter unit; 200. Device housing; 201. Exhaust gas inlet; 300. Dust collection component; 310. Separator; 311. Fixed frame; 312. Movable blade; 400. Driven wheel; 410. Drive component mounting part; 500. Air intake assembly; 510. Air intake pipe; 520. Mounting component; 530. Sealing component; 540. Fixing component; 541. First mounting part; 542. Second mounting part; 543. Fixing component body; 544. Mounting through hole; 550. Lubricating ball. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0030] To overcome the problems existing in the prior art, this utility model provides an exhaust gas filtration device, which helps to reduce or avoid large particulate impurities such as dust adsorbing on the surface of the filtration unit and causing clogging of the filtration unit.

[0031] In some embodiments of this invention, the exhaust gas filtration device is used to communicate with a semiconductor processing cavity via an exhaust gas emission pipe, and the exhaust gas filtration device includes a rotary drive component and a filtration unit. (Reference) Figure 1 and Figure 5The filter unit 100 includes a cylindrical filter element 110, a rotating element 120, and a rotating transmission element 130. The rotating element 120 and the rotating transmission element 130 are disposed within a receiving cavity (not shown in the figure) formed by the cylindrical filter element 110. The rotating element 120 extends along the axial direction of the cylindrical filter element 110. The two ends of the rotating transmission element 130 are respectively connected to the rotating element 120 and the cylindrical filter element 110. The rotating drive element is rotatably connected to the rotating element 120 to drive the rotating element 120 to drive the rotating transmission element 130 and the cylindrical filter element 110 to rotate, thereby using centrifugal force to shake off the dust adhering to the cylindrical filter element 110. When the rotating component 120 drives the cylindrical filter element 110 to rotate via the rotating transmission component 130, the dust on the cylindrical filter element 110 will be detached from the cylindrical filter element 110 due to centrifugal force. Therefore, the filter unit 100 can automatically remove dust without disassembling it, which helps reduce the adhesion and accumulation of dust and other impurities on the cylindrical filter element 110, thus improving the filtration effect and being more environmentally friendly. Furthermore, it helps reduce or avoid the adsorption of large particles such as dust on the surface of the cylindrical filter element 110, preventing large-area clogging. This extends the service life of the filtration device, reduces the frequency of filter element replacement, and reduces the time spent on leak testing and installation after disassembly, thereby improving equipment operating efficiency and productivity.

[0032] In existing technologies, the position of the filter screen in the filter unit is fixed. Dust and other impurities continuously adhere to the surface of the filter screen. With increased usage time, the filter screen facing the exhaust gas inlet may become partially or completely clogged due to excessive amounts of adhering dust and other impurities. In this application, however, the installation method of each cylindrical filter element 110 within the device housing 200 directs the exhaust gas flow direction towards the sidewall of each cylindrical filter element 110. For example, using... Figure 4Taking the structure shown as an example, the exhaust gas enters from the left side of the device housing 200 and exits from the right side. By driving the cylindrical filter element 110 to rotate, each of the circumferential working surfaces of the cylindrical filter element 110 will face the exhaust gas inlet end 201 one by one. This allows the exhaust gas to pass through each of the circumferential working surfaces of the cylindrical filter element 110, instead of the same working surface of the cylindrical filter element 110 always filtering the exhaust gas. This avoids the partial or complete blockage of the cylindrical filter element 110 facing the exhaust gas inlet end 201 due to excessive adhering dust and other impurities. Moreover, the circumferential working surfaces of the cylindrical filter element 110 are intermittently facing the exhaust gas inlet end 201. The various working surfaces of the cylindrical filter element 110, which are located at the exhaust gas inlet 201, intermittently perform the main filtration function on the exhaust gas. This allows sufficient time (i.e., the time during which the working surface rotates away from the exhaust gas inlet) for the working surfaces of the cylindrical filter element 110 to be flung off by centrifugal force when dust and other impurities adhere to them. This improves the filtration effect of the cylindrical filter element 110, prevents exhaust gas from entering from the same area of ​​the cylindrical filter element 110, which can easily cause local blockage of the cylindrical filter element 110, and helps to extend the service life of the filter device and reduce the number of times the filter element needs to be replaced.

[0033] In some embodiments of this utility model, reference is made to Figure 2 and Figure 4 The exhaust gas filtration device also includes a device housing 200, the exhaust gas inlet 201 of the device housing 200 is connected to the exhaust gas discharge pipeline, and the filtration unit 100 is disposed inside the device housing 200.

[0034] In some embodiments of this utility model, reference is made to Figure 2 The exhaust gas filtration device also includes a dust collection component 300, which is disposed at the bottom of the device housing 200. The filter unit 100 inside the device housing 200 filters the exhaust gas and throws off the dust generated during filtration. The dust collection component 300 is used to collect and remove the dust that falls from the device housing 200.

[0035] In some embodiments of this utility model, the dust collection component 300 includes a dust collection box and a dust suction device connected together, so as to remove the dust in the dust collection box in a timely manner and prevent the dust in the dust collection box from splashing back into the device housing 200.

[0036] In other embodiments of this utility model, reference is made to Figure 2 and Figure 3A separator 310 is provided between the device housing 200 and the dust collection component 300. The separator 310 includes a fixed frame 311 and a plurality of movable blades 312 arranged sequentially along the length or width direction of the fixed frame 311. The movable blades 312 are rotatably connected to the fixed frame 311 via a rotating component (not shown in the figure, such as a hinge-type rotating connection). The rotating component (not shown in the figure) is used to drive the movable blades 312 to rotate so that adjacent movable blades 312 are connected or spaced apart, so that the device housing 200 and the dust collection component 300 are separated by the adjacent movable blades 312 being connected, thereby preventing the exhaust gas from entering the dust collection box and the dust suction device when the filter unit 100 filters the exhaust gas; the spaced apart arrangement of the adjacent movable blades 312, such as Figure 3 As shown, the rotating member drives the movable blades 312 to rotate so that there is a gap between adjacent movable blades 312 and they extend towards the bottom of the dust collector 300 to connect the dust collector 300 and the device housing 200, so that the dust collector 300 can collect dust falling from the device housing 200. In some embodiments, the movable blades 312 may not have a rotating member, but instead extend obliquely towards the direction of the dust collector 300, so that there is a gap between adjacent movable blades 312 that allows dust to pass through. In some embodiments, the movable blades 312 may be movably mounted on the fixed frame 311 (e.g., a hinge-type rotating connection). There is a gap between adjacent movable blades 312 to allow dust to pass through and extend obliquely in the direction of the dust collector 300. When the amount of dust accumulated on the surface of the movable blades 312 increases to a certain extent, gravity can act on the movable blades 312 to increase the gap between adjacent movable blades 312 and the gap between them and the fixed frame 311, so that the dust will automatically fall into the dust collection box.

[0037] In this application, the length direction of the fixed frame 311 is... Figure 3 The direction indicated by 'a' is the width direction of the fixed frame 311. Figure 3 The direction indicated by b in the middle.

[0038] In some specific embodiments of this utility model, the rotating component (not shown in the figure) is used to drive the movable blade 312 to rotate toward the dust collection box, so that the dust and other impurities that fall onto the movable blade 312 during filtration by the filter unit 100 will fall into the dust collection box as the movable blade 312 rotates toward the dust collection box. Moreover, the dust suction device also helps to adsorb the dust deposited on the movable blade 312 during filtration and drop it into the dust collection box.

[0039] In some embodiments of this utility model, the exhaust gas filtration device further includes a control module connected to the rotating component. The control module controls the movable blades 312 to rotate towards the bottom of the dust collection box when exhaust gas stops entering the device housing 200, so that adjacent movable blades 312 are spaced apart, allowing communication between the dust collection box and the device housing 200, facilitating the collection of dust falling from the device housing 200. The control module also controls the movable blades 312 to rotate towards the horizontal plane of the fixed frame 311 when exhaust gas enters the device housing 200, so that adjacent movable blades 312 are connected, i.e., there is no gap between adjacent movable blades 312, separating the dust collection box and the device housing 200, preventing exhaust gas from entering the dust collection box when the filtration unit 100 filters the exhaust gas. The control module can automatically control the rotating component to drive the movable blade 312 to rotate based on the real-time emission status of the exhaust gas (i.e. whether the exhaust gas is being emitted into the device housing 200), so as to automatically control the separation or connection between the dust collection box and the device housing 200 in a timely manner.

[0040] In other embodiments of this utility model, the rotating component is connected to an operating rod disposed outside the device housing 200 and the dust collection box. The rotating component is controlled to rotate by manually rotating the operating rod, thereby controlling the separation or connection between the dust collection box and the device housing 200.

[0041] In some embodiments of this utility model, reference is made to Figure 4 The filter unit 100 comprises several units, which are arranged within the device housing 200 and spaced apart in several rows along a direction away from the exhaust gas inlet 201. These rows of filter units can filter the exhaust gas entering from the exhaust gas inlet 201 multiple times, improving the filtration effect. Each row of filter units includes several spaced-apart filter units 100, with adjacent filter units 100 in adjacent rows staggered (e.g., one filter unit 100 in one row is located between two adjacent filter units 100 in its adjacent row). This ensures that all exhaust gas entering from the exhaust gas inlet 201 can pass through the filter units 100 for filtration, comprehensively capturing and adsorbing dust and other impurities in the exhaust gas entering from the exhaust gas inlet 201. It also ensures that exhaust gas passing through the gaps between the spaced-apart filter units 100 can be filtered, guaranteeing the filtration effect of the exhaust gas.

[0042] In this application, the number of filter units 100 can be set to one or more, depending on the size of the filter unit 100, the installation space of the device housing 200, the exhaust gas emission, and the filtration effect.

[0043] In some embodiments of this utility model, a plurality of filter units 100 are arranged in a plurality of columns and a plurality of rows within the device housing 200, wherein the number of filter units 100 in two adjacent columns differs by 1, and the number of filter units 100 in two adjacent rows is the same or differs by 1, thereby reducing the installation space of the filter units 100. In some specific embodiments of this utility model, refer to... Figure 4 Ten filter unit groups are arranged within the device housing 200. The even-numbered columns of the filter unit groups contain 5 filter units 100, and the odd-numbered columns contain 6 filter units 100. Here, X indicates the row direction, Y indicates the column direction, and X also indicates the exhaust gas flow direction. Each filter unit 100 includes a first filter unit 101 arranged in the first row of the first column, a second filter unit 102 arranged in the second row of the first column, and a third filter unit 103 arranged in the first row of the second column. The third filter unit 103 is staggered with the first filter unit 101 and the second filter unit 102, forming a triangular arrangement.

[0044] In some embodiments of this utility model, the third filter unit 103 forms a projected structure at the exhaust gas inlet 201, which is partially overlapped with the projected structures of the first filter unit 101 and the second filter unit 102 at the exhaust gas inlet 201. This ensures that the third filter unit 103 can filter exhaust gas passing through the gap between the first filter unit 101 and the second filter unit 102, and also filters exhaust gas passing through the gap between adjacent filter units 100 spaced apart, thus ensuring the filtration effect on the exhaust gas.

[0045] In some embodiments of this utility model, the rotary driving component includes a driving device, a transmission wheel, a transmission connector, and at least one driven wheel. The transmission wheel is disposed on the driving rotation shaft of the driving device, and the transmission wheel is drivingly connected to the driven wheel through the transmission connector. (Reference) Figure 1The driven wheel 400 is sleeved on the outside of the rotating member 120 to drive the rotating member 120 to rotate. That is, the driving device drives the transmission wheel to rotate and drives the driven wheel 400 to rotate through the transmission connector, so that the rotating member 120 rotates with the driven wheel 400, thereby driving the rotating transmission member 130 and the cylindrical filter member 110 to rotate, so as to achieve the centrifugal force to shake off the dust adhering to the cylindrical filter member 110.

[0046] In some specific embodiments of this utility model, reference is made to Figure 1 and Figure 4 The filter unit 100 is provided in several units, and the rotary drive component includes several driven wheels 400, which are respectively connected to the rotary components 120 in several filter units 100. This rotary drive component has a simple structure, is easy to install, and is suitable for driving multiple driven wheels 400.

[0047] In this application, the transmission connecting component is a transmission belt made of other materials such as a belt or wire rope, and the transmission wheel and driven wheel 400 are flat belt pulleys or synchronous belt pulleys adapted to the transmission belt. The specific structure of the rotary drive component and other adapting structures are common knowledge in the art and will not be described in detail here.

[0048] In some embodiments of this utility model, reference is made to Figure 1 and Figure 5 The rotary transmission component 130 is provided in several groups and is arranged at intervals along the extension direction of the rotary component 120 on the outer wall of the rotary component 120. Each group includes at least two rotary transmission components 130, and at least two rotary transmission components 130 are arranged along the circumference of the rotary component 120 on the outer wall of the rotary component 120, so that the connection between the cylindrical filter component 110 and the rotary component 120 is more firm and stable, which helps to ensure that the cylindrical filter component 110 remains stable and does not tilt or deflect when rotating with the rotary component 120.

[0049] In some specific embodiments of this utility model, reference is made to Figure 1 and Figure 5 The rotary transmission component 130 is a connecting rod, and the rotary transmission component 130 is arranged radially along the cylindrical filter component 110, which helps to improve the firmness and stability of the connection between the cylindrical filter component 110 and the rotating component 120, and ensures that the cylindrical filter component 110 remains stable and does not tilt or deflect when rotating with the rotating component 120.

[0050] In some embodiments of this utility model, reference is made to Figure 1 and Figure 5The cylindrical filter element 110 includes a top plate 111, on which a through portion is provided for the rotating component 120 to pass through. A dynamic sealing element is provided between the inner wall of the through portion and the rotating component 120 to seal the top of the cylindrical filter element 110, thereby preventing some of the exhaust gas from passing through the top of the cylindrical filter element 110 when it passes through the cylindrical filter element 110, which would cause dust and other impurities to adhere to the rotating drive component and other structures located on the top of the cylindrical filter element 110.

[0051] In other embodiments of this utility model, reference is made to Figure 1 , Figure 2 and Figure 5 The exhaust gas filtration device further includes a drive component mounting part 410 for mounting the rotary drive component. The drive component mounting part 410 is disposed on the top of the device housing 200. A partition plate is provided between the drive component mounting part 410 and the device housing 200. The partition plate has a through-hole for the rotary component 120 to pass through. A dynamic seal is provided between the inner wall of the through-hole and the rotary component 120 to separate the drive component mounting part 410 and the exhaust gas filtration chamber in the device housing 200, so as to prevent some of the exhaust gas from entering the drive component mounting part 410 when the exhaust gas passes through the device housing 200, which would cause dust and other impurities to adhere to the rotary drive component and other structures.

[0052] In this application, the dynamic seal includes radial seals, labyrinth seals, mechanical seals, and packing seals, etc. The specific sealing elements, adapting structures, and installation methods for implementing the dynamic seal are common knowledge in the field and will not be described in detail here.

[0053] In some embodiments of this utility model, reference is made to Figure 1 and Figure 5 The cylindrical filter element 110 may further include a base plate 112, and the rotating element 120 is fixedly connected to the base plate 112, making the connection between the rotating element 120 and the cylindrical filter element 110 more secure and facilitating more stable rotation of the cylindrical filter element 110. In some other embodiments of this utility model, the cylindrical filter element 110 may not have a base plate, allowing dust and other impurities within the containment cavity formed by the cylindrical filter element 110 to fall directly into the dust collection element 300 below.

[0054] In some embodiments of this utility model, the cylindrical filter element 110 includes several layers of filter screens, with the filter holes in adjacent layers of filter screens arranged in an alternating manner to improve the filtration effect of the cylindrical filter element 110. The several layers of filter screens are fixedly disposed on the top plate 111 and / or the bottom plate 112.

[0055] In some embodiments of this utility model, the channels of the filter holes on the filter screen are inclined to the axis of the cylindrical filter element 110, and the virtual extension of the channels of the filter holes away from the far end of the top plate 111 of the cylindrical filter element 110 extends toward the area away from the axis of the cylindrical filter element 110, so as to avoid or reduce the dust and other impurities from being thrown onto the adjacent filter unit 100 due to centrifugal force.

[0056] In some embodiments of this utility model, reference is made to Figures 5 to 8 The exhaust gas filtration device further includes an air intake assembly 500, which includes an air intake pipe 510 connected to the air supply end. The rotating part 120 is provided with an air guide channel communicating with the air intake pipe 510. The outer wall of the rotating part 120 is provided with a plurality of air guide structures 121 communicating with the air guide channel. Purging gas is introduced into the air guide channel of the rotating part 120 through the air intake pipe 510, and then the air guide structure 121 sprays purging gas from the inside to the outside of the cylindrical filter element 110, thereby improving the removal efficiency of dust and other impurities adhering to the cylindrical filter element 110 and improving the removal effect of dust and other impurities adhering to the cylindrical filter element 110.

[0057] In some embodiments of this utility model, reference is made to Figure 5 The first end 122 of the rotating member 120 is connected to the air inlet pipe 510. The second end 123 of the rotating member 120, which is symmetrical to the first end 122, is closed or connected to the bottom plate 112 of the cylindrical filter element 110 to prevent the purge gas from blowing towards the dust collection box and causing the dust in the dust collection box to splash back into the device housing 200. The air guide channel extends from the first end 122 to the second end 123 along the extension direction of the rotating member 120, so that the entire rotating member 120 can exhaust gas from the first end 122 to the second end 123. That is, purge gas can be sprayed to all areas of the cylindrical filter element 110 along the axial direction, which helps to remove dust from all areas of the cylindrical filter element 110.

[0058] In some embodiments of this utility model, the air guiding structure 121 includes, for example: Figure 5 The illustrated air guide hole structure, the arc-shaped air guide structure arranged circumferentially along the rotating member 120, and / or the air guide slit structure extending axially along the rotating member 120, etc.

[0059] In some embodiments of this utility model, the intake pipe 510 is provided with a first switching valve, and the exhaust pipe is provided with a second switching valve. A control module is connected to both the first and second switching valves. The control module controls the opening of the first switching valve when the second switching valve is closed, so that when exhaust gas is stopped being supplied to the filter unit 100, purge gas is introduced through the intake pipe 510 to remove impurities from the cylindrical filter element 110. That is, the removal of dust and other impurities adhering to the cylindrical filter element 110 using purge gas needs to be performed when the device housing 200 stops supplying exhaust gas, to avoid affecting the passage of exhaust gas through the cylindrical filter element 110 and thus the filtration effect.

[0060] In some embodiments of this utility model, the first switching valve and the second switching valve are solenoid valves, etc.

[0061] In some embodiments of this invention, the control module is connected to the rotary drive component to control the rotary drive component to rotate the cylindrical filter element 110 at different speeds. This allows the rotational speed of the rotary drive component to be adjusted in real time based on the amount of dust and other impurities adhering to the cylindrical filter element 110 and the exhaust gas flow rate, thereby adjusting the rotational speed of the cylindrical filter element 110 to avoid affecting the filtration effect while ensuring the removal efficiency and cleaning effect of the dust adhering to the cylindrical filter element 110.

[0062] In this application, when the control module controls the opening of the second switching valve, it controls the closing of the first switching valve. The control module also controls the rotary drive to rotate at a first rotational speed, the specific value of which is set to not affect the passage of exhaust gas through the cylindrical filter element 110 and to help improve the filtration effect. When the control module controls the closing of the second switching valve, it controls the opening of the first switching valve. The control module also controls the rotary drive to rotate at a second rotational speed, the specific value of which is set to help improve the filtration effect. In some specific embodiments of this utility model, when the second rotational speed is 0, and the removal efficiency and cleaning effect of dust adhering to the cylindrical filter element 110 can be ensured by spraying purge gas onto the cylindrical filter element 110, the cylindrical filter element 110 can be controlled to stop rotating to save energy and avoid or reduce dust and other impurities falling onto adjacent filter units 100 due to centrifugal force and purge gas. In some other specific embodiments of this utility model, the second rotational speed is greater than the first rotational speed. At this time, the exhaust gas is stopped from being input. There is no need to consider whether it will affect the exhaust gas passing through the cylindrical filter element 110. The second rotational speed can be set to a larger value. This is beneficial for the rapid and efficient removal of dust adhering to the cylindrical filter element 110 through the dual action of centrifugal force and purge gas. That is, the purge gas is sprayed onto the cylindrical filter element 110, and the rotation of the cylindrical filter element 110 helps to improve the removal efficiency and cleaning effect of dust adhering to the cylindrical filter element 110.

[0063] In some embodiments of this utility model, reference is made to Figure 5 , Figure 6 and Figure 7 The intake assembly 500 further includes a mounting member 520 and a sealing member 530. The mounting member 520 is fixedly connected to the rotating member 120. At least a portion of the mounting member 520 is sleeved within the driven wheel 400 so that it rotates with the driven wheel 400 and drives the rotating member 120 to rotate. The mounting member 520 has a receiving cavity. One end of the intake pipe 510 passes through the receiving cavity and is loosely sleeved within the rotating member 120. The other end of the intake pipe 510 passes through the driven wheel 400 and is sealed with the rotating member 120. The driven wheel 400 is provided with a clearance; the sealing member 530 is fixedly disposed in the receiving cavity and dynamically seals with the rotating member 120 and the air intake pipe 510. While ensuring that the mounting member 520 rotates with the rotating member 120, it achieves dynamic sealing of the rotating member 120 and the air intake pipe 510 to avoid air leakage at the connection between the rotating member 120 and the air intake pipe 510, and also to prevent the air intake pipe 510 from twisting and affecting air intake due to the rotation of the rotating member 120.

[0064] In some specific embodiments of this utility model, the driven wheel 400 has a hollow structure to allow the air intake pipe 510 to pass through, and the inner diameter of the driven wheel 400 is larger than the outer diameter of the air intake pipe 510, so that the air intake pipe 510 and the driven wheel 400 are spaced apart to avoid the air intake pipe 510 interfering with the driven wheel 400 when the driven wheel 400 rotates.

[0065] In some embodiments of this utility model, the mounting member 520 and the driven wheel 400 can be fixedly connected or detachably connected. In some specific embodiments of this utility model, the inner wall of the driven wheel 400 is provided with an internal thread, and the outer wall of the mounting member 520 is provided with an external thread adapted to the internal thread. The driven wheel 400 and the mounting member 520 are detachably connected by threads, which is simple and convenient for disassembly, maintenance, and installation.

[0066] In some embodiments of this utility model, the other end of the intake pipe 510 passes through the driven wheel 400 and is connected to the air supply pump. The air supply pump is used to provide clean gas, which can be clean air or other inert gases that do not react with the exhaust gas.

[0067] In some embodiments of this utility model, reference is made to Figures 5 to 8 The air intake assembly 500 also includes a fixing member 540, which is movably disposed in the receiving cavity and is fixedly sleeved on the outer wall of the air intake pipe 510 to prevent the air intake pipe 510 from falling out of the receiving cavity and the rotating member 120.

[0068] In some embodiments of this utility model, reference is made to Figures 5 to 8 A plurality of lubricating balls 550 are provided between the fixing member 540 and the mounting member 520, and between the fixing member 540 and the sealing member 530. Because the mounting member 520 drives the rotating member 120 to rotate, while the air intake pipe 510 does not rotate with the rotating member 120, there will be contact friction between the fixing member 540 and the mounting member 520, and between the fixing member 540 and the sealing member 530. The lubricating balls 550 can greatly reduce the friction between the fixing member 540 and the mounting member 520, and between the fixing member 540 and the sealing member 530, thereby reducing force loss.

[0069] In some embodiments of this utility model, reference is made to Figure 7 The fixing member 540 is disposed in the upper receiving cavity away from the rotating member 120, and the sealing member 530 is disposed in the lower receiving cavity close to the rotating member 120, that is, the fixing member 540 is disposed above the sealing member 530.

[0070] In some embodiments of this utility model, reference is made to Figure 7 and Figure 8 The fixing member 540 includes a fixing member body 543. The fixing member body 543 is provided with a plurality of first mounting portions 541 extending axially. The lubricating ball 550 is slidably disposed on the first mounting portion 541, and the lubricating ball 550 is provided to protrude from the first mounting portion 541. That is, the lubricating ball 550 is provided to protrude from two symmetrical working surfaces axially of the fixing member body 543, so that the friction between the inner top of the fixing member 540 and the mounting member 520, and between the fixing member 540 and the sealing member 530 can be greatly reduced by the lubricating ball 550, thereby reducing force loss.

[0071] In some specific embodiments of this utility model, reference is made to Figure 7 and Figure 8 The first mounting part 541 is provided in a plurality of portions, and the plurality of first mounting parts 541 are arranged circumferentially and at intervals on the fastener body 543.

[0072] In some embodiments of this utility model, reference is made to Figure 7 and Figure 8 The fixing body 543 is provided with a second mounting portion 542 circumferentially facing the outer side wall of the mounting member 520. The lubricating ball 550 is slidably disposed between the second mounting portion 542 and the inner wall of the mounting member 520, so that the friction between the fixing member 540 and the inner side wall of the mounting member 520 can be greatly reduced by the lubricating ball 550, thereby reducing the loss of force.

[0073] In some specific embodiments of this utility model, the second mounting part 542 is an annular guide groove.

[0074] In some other specific embodiments of this utility model, the second mounting part 542 includes a plurality of grooves, which are circumferentially and spaced apart on the outer side wall of the fixing body 543.

[0075] In some embodiments of this utility model, the fixing body 543 is provided with a mounting through hole 544 for mounting the air intake pipe 510. The inner diameter of the mounting through hole 544 is adapted to the outer diameter of the air intake pipe 510, and the fixing body 543 can be fixedly connected to the air intake pipe 510 by means of threads, etc.

[0076] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A tail gas filtration device, characterized in that, The exhaust gas filtration device, used for communication with a semiconductor processing chamber via an exhaust gas emission pipe, includes: Rotary drive component; A filtration unit includes a cylindrical filter element, a rotating element, and a rotating transmission element. The rotating element and the rotating transmission element are disposed within a receiving cavity formed by the cylindrical filter element, and the rotating element extends along the axial direction of the cylindrical filter element. The two ends of the rotating transmission element are respectively connected to the rotating element and the cylindrical filter element. The rotating drive element is rotatably connected to the rotating element to drive the rotating element to rotate the rotating transmission element and the cylindrical filter element, thereby using centrifugal force to shake off the dust adhering to the cylindrical filter element.

2. The exhaust gas filtration device according to claim 1, characterized in that, The rotary drive component includes a drive device, a transmission wheel, a transmission connector, and at least one driven wheel. The transmission wheel is disposed on the drive rotation shaft of the drive device. The transmission wheel is connected to the driven wheel via the transmission connector. The driven wheel is sleeved on the outside of the rotary component to drive the rotary component to rotate.

3. The exhaust gas filtration device according to claim 2, characterized in that, It also includes an air intake assembly, which includes an air intake pipe connected to the air supply end. The rotating part is provided with an air guide channel communicating with the air intake pipe, and the air guide channel extends from the first end of the rotating part to the second end of the rotating part along the extension direction of the rotating part. The outer wall of the rotating part is provided with a plurality of air guide structures communicating with the air guide channel.

4. The exhaust gas filtration device according to claim 3, characterized in that... It also includes a control module; The intake pipe is equipped with a first switching valve, and the exhaust pipe is equipped with a second switching valve. The control module is connected to the first switching valve and the second switching valve respectively. The control module is used to control the opening of the first switching valve when the second switching valve is closed, so that when the exhaust gas is stopped being supplied to the filter unit, purge gas is introduced through the intake pipe to remove dust on the cylindrical filter element. And / or the control module is connected to the rotary drive to control the rotary drive to drive the cylindrical filter element to rotate at different speeds.

5. The exhaust gas filtration device according to claim 3, characterized in that, The air intake assembly further includes a mounting component and a sealing component. The mounting component is fixedly connected to the rotating component, and at least a portion of the mounting component is sleeved inside the driven wheel so that it rotates with the driven wheel and drives the rotating component to rotate. The mounting component has a receiving cavity, one end of the air intake pipe passes through the receiving cavity and is fitted with a gap inside the rotating component, and the other end of the air intake pipe passes through the driven wheel and is spaced apart from the driven wheel; The sealing element is fixedly disposed in the receiving cavity and dynamically seals with the rotating element and the air intake pipe.

6. The exhaust gas filtration device according to claim 5, characterized in that, The air intake assembly also includes a fixing member and several lubricating balls. The fixing member is movably disposed in the receiving cavity and is fixedly sleeved on the outer wall of the air intake pipe. The fastener includes a fastener body, the fastener body is provided with a plurality of first mounting portions that extend through the axial direction, the lubricating ball is slidably disposed on the first mounting portion, and the lubricating ball protrudes from the first mounting portion; And / or the fastener body is provided with a second mounting portion circumferentially facing the outer side wall of the mounting member, and the lubricating ball is slidably disposed between the second mounting portion and the inner wall of the mounting member.

7. The exhaust gas filtration device according to claim 1, characterized in that, It also includes a device housing, the exhaust gas inlet of the device housing being connected to the exhaust gas discharge pipe; the filter unit is provided in a plurality of them, the plurality of filter units are disposed in the device housing and arranged in a plurality of columns of filter unit groups along a direction away from the exhaust gas inlet, each column of filter unit group includes a plurality of filter units arranged at intervals, and adjacent filter units in two adjacent columns of filter unit groups are staggered.

8. The exhaust gas filtration device according to claim 1, characterized in that, It also includes a device housing and a dust collection component. The filter unit is disposed inside the device housing, the dust collection component is disposed at the bottom of the device housing, and a separator is provided between the device housing and the dust collection component. The separator includes a fixed frame and a number of movable blades arranged sequentially along the length or width of the fixed frame. The movable blades are rotatably connected to the fixed frame via a rotating member. The rotating member is used to drive the movable blades to rotate so that there is a gap between adjacent movable blades and they extend toward the bottom of the dust collector. Alternatively, the movable blades are movably mounted on the fixed frame, with a gap between adjacent movable blades to allow dust to pass through and extend toward the bottom of the dust collector.

9. The exhaust gas filtration device according to claim 1, characterized in that, The rotary transmission component is provided in several groups, and the rotary transmission components are arranged at intervals along the extension direction of the rotary component on the outer wall of the rotary component. Each group includes at least two rotary transmission components, and at least two rotary transmission components are arranged on the outer wall of the rotary component along the circumference of the rotary component.

10. The exhaust gas filtration device according to claim 1, characterized in that, The cylindrical filter element includes several layers of filter screens, with the filter holes in adjacent layers of filter screens arranged alternately. The channels of the filter holes are inclined to the axis of the cylindrical filter element, and the virtual extension of the channels of the filter holes at the far end of the top plate of the cylindrical filter element extends toward the region away from the axis of the cylindrical filter element.

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