Coated substrate tray

Abstract

This utility model discloses a coated substrate tray, relating to the field of coated substrate technology. It includes a tray body, a placement frame, and a micro vacuum pump. The tray body has mounting grooves on both sides, with spring damping rods installed inside the grooves. The placement frame is attached to the front end of each spring damping rod. Limiting sliders are added to both ends of the placement frame, each with a limiting through hole connected to a limiting crossbar. A micro vacuum pump is installed at the bottom of the placement frame, with a delivery pipe connected to its exterior. A suction nozzle is located at the front end of the delivery pipe. A docking groove is formed at the upper part of the tray body, and a docking block is added to the lower part. Heat dissipation fins are also provided at the lower part of the tray body. This coated substrate tray can quickly and easily fix substrates of different sizes, improving the overall flexibility and efficiency of the tray.

Description

Technical Field

[0001] This utility model relates to the field of coated substrate technology, specifically a coated substrate tray. Background Technology

[0002] A coated substrate refers to a material or structure on a substrate surface that has a specific functional layer formed through a coating process. Its core lies in using coating technology to form one or more thin films on the substrate surface to achieve specific physical, chemical, or optical properties. In a coating machine, the component used to place the item to be coated is commonly referred to by professionals as a "tray" or "substrate tray." This component plays a crucial role in the coating process. It must not only stably support the item to be coated but also ensure the stability and uniformity of the item during the coating process. The primary function of the tray is to support and fix the item to be coated. During the coating process, the item needs to be securely placed on the tray to prevent it from moving or tilting, thereby ensuring the uniformity and quality of the coating. To improve the processing efficiency of coated substrates, a new type of tray is needed; however, existing trays still have the following shortcomings:

[0003] When using existing pallets, the use of pallets is limited because most pallets are not easy to adapt to different specifications of base plates for positioning and fixation. At the same time, the use of pallets requires customization to adapt to the base plates, which increases the overall processing cost and causes problems such as reduced pallet practicality and reduced use efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide a coated substrate tray to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a coated substrate tray, comprising a tray body, a placement frame, and a micro vacuum pump. The tray body has mounting grooves on both sides, and a spring damping rod is installed inside the mounting groove. The placement frame is installed at the front end of the spring damping rod. Limiting sliders are added to both ends of the placement frame. Limiting through holes are opened inside the limiting sliders, and limiting crossbars are connected inside the limiting through holes. A micro vacuum pump is installed at the bottom of the placement frame, and a delivery pipe is connected to the outside of the micro vacuum pump. A suction nozzle body is provided at the front end of the delivery pipe. A docking groove is opened at the upper end of the tray body, and a docking block is added to the lower end of the tray body. Heat dissipation fins are provided at the lower end of the tray body, and a heat dissipation horizontal groove is opened at the lower end of the tray body. Heat dissipation through holes are opened on both sides of the tray body.

[0006] Furthermore, the spring damping rod is embedded in the mounting groove, and the spring damping rod is fixedly connected to the mounting groove by bolts.

[0007] Furthermore, the spring damping rods are distributed perpendicularly to the placement frame, and the placement frame is elastically connected to the tray body through the spring damping rods.

[0008] Furthermore, there are two placement racks, and the two placement racks are symmetrically arranged on both sides of the inside of the pallet body with respect to the central axis of the front of the pallet body.

[0009] Furthermore, the internal dimensions of the limiting through hole are adapted to the external dimensions of the limiting crossbar, and the limiting crossbar is embeddedly connected to the limiting slider through the limiting through hole.

[0010] Furthermore, the outer side of the micro vacuum pump is horizontally distributed with the outer side of the placement frame, and the micro vacuum pump and the placement frame are fixedly connected by bolts.

[0011] Furthermore, the number of the micro vacuum pumps is set to four, and two micro vacuum pumps are grouped together, with each group of micro vacuum pumps symmetrically arranged on both sides of the inside of the tray body with respect to the central axis of the front of the tray body.

[0012] Furthermore, the heat dissipation fins are distributed perpendicularly to the tray body, and the heat dissipation fins are equidistantly distributed at the lower end of the tray body.

[0013] This utility model provides a coated substrate tray, which has the following beneficial effects:

[0014] 1. This utility model, through the setting of the placement rack, enables the placement rack to be elastically connected to the tray body when the coated substrate tray is used. This allows it to adapt to substrates of different specifications for limiting and fixing. The limiting slider is fixedly installed on both ends of the outside of the placement rack. The limiting through hole and the limiting crossbar enable the limiting slider to move stably, thereby enabling the placement rack to move elastically and stably. The operation of the micro vacuum pump and the delivery pipe enable the suction body of the suction nozzle to generate suction force, thereby stably adsorbing the substrate placed on the placement rack, thus preventing the substrate from falling off after placement, and improving the overall practicality and efficiency of the tray.

[0015] This invention, through the design of heat dissipation fins, enables the mating blocks to be fixedly installed at the four corners of the bottom of the tray body using adhesive when the coated substrate tray is in use. The mating grooves and mating blocks allow the tray bodies to be stacked layer by layer, thereby increasing placement and transportation efficiency. The heat dissipation fins quickly dissipate heat from the substrate, and the heat dissipation grooves and heat dissipation through holes allow for rapid air circulation inside the tray body, increasing the heat dissipation efficiency during substrate processing and improving the overall practicality of the tray. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of a coating substrate tray according to the present invention;

[0017] Figure 2 This is a three-dimensional sectional view of the unfolded structure of a tray for placing coated substrates according to the present invention.

[0018] Figure 3 This is a three-dimensional bottom view of the micro vacuum pump structure of a coating substrate tray according to the present invention.

[0019] In the diagram: 1. Tray body; 2. Mounting groove; 3. Spring damping rod; 4. Placement rack; 5. Limiting slider; 6. Limiting through hole; 7. Limiting crossbar; 8. Miniature vacuum pump; 9. Delivery pipe; 10. Nozzle body; 11. Docking groove; 12. Docking block; 13. Heat dissipation fins; 14. Heat dissipation horizontal groove; 15. Heat dissipation through hole. Detailed Implementation

[0020] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0021] like Figures 1 to 3As shown, a coated substrate tray includes a tray body 1, a placement frame 4, and a miniature vacuum pump 8. The tray body 1 has mounting grooves 2 on both sides inside, and a spring damping rod 3 is installed inside the mounting groove 2. The placement frame 4 is installed at the front end of the spring damping rod 3. Limiting sliders 5 are added to both ends of the placement frame 4. Limiting through holes 6 are formed inside the limiting sliders 5, and limiting crossbars 7 are connected inside the limiting through holes 6. The miniature vacuum pump 8 is installed at the bottom of the placement frame 4, and a delivery pipe 9 is connected to the outside of the miniature vacuum pump 8. A suction nozzle body 10 is provided at the front end of the delivery pipe 9. The spring damping rod... 3 is embedded in the mounting groove 2, and the spring damping rod 3 is fixedly connected to the mounting groove 2 by bolts. The spring damping rod 3 and the placement frame 4 are distributed vertically, and the placement frame 4 is elastically connected to the tray body 1 through the spring damping rod 3. There are two placement frames 4, and the two placement frames 4 are symmetrically arranged on both sides of the inside of the tray body 1 with respect to the central axis of the front of the tray body 1. The internal size of the limiting through hole 6 is adapted to the external size of the limiting crossbar 7, and the limiting crossbar 7 is embedded in the limiting slider 5 through the limiting through hole 6. The outer side of the micro vacuum pump 8 is horizontally positioned with the outer side of the placement frame 4. The tray body 1 is constructed with a fabric-like structure, and the miniature vacuum pump 8 is fixedly connected to the placement frame 4 by bolts. Four miniature vacuum pumps 8 are provided, arranged in groups of two. Each group of miniature vacuum pumps 8 is symmetrically arranged on both sides of the tray body 1's interior, oriented around the central axis of the front. A spring damping rod 3 is fixedly installed in the mounting groove 2 inside the tray body 1 using fastening bolts. The placement frame 4 is then fixedly installed at the front end of the spring damping rod 3 using the fastening bolts. The spring damping rod 3 provides an elastic connection between the placement frame 4 and the tray body 1, allowing for the adaptation and positioning of substrates of different specifications. The limiting slider 5 is fixedly installed on both ends of the outside of the placement rack 4. The internal size of the limiting through hole 6 opened inside the limiting slider 5 is adapted to the external size of the limiting crossbar 7. Thus, the limiting slider 5 can move stably through the limiting through hole 6 and the limiting crossbar 7, thereby enabling the placement rack 4 to move stably and elastically. The micro vacuum pump 8 is fixedly installed at the lower end of the placement rack 4. The operation of the micro vacuum pump 8, together with the delivery pipe 9, enables the suction head 10 to generate suction, thereby stably adsorbing the substrate placed on the placement rack 4, thus preventing the substrate from falling off after placement, and improving the overall practicality and efficiency of the tray.

[0022] like Figures 1 to 3As shown, a mating groove 11 is provided at the upper end of the interior of the tray body 1, and a mating block 12 is added at the lower end of the tray body 1. Heat dissipation fins 13 are provided at the lower end of the interior of the tray body 1, and a heat dissipation horizontal groove 14 is also provided at the lower end of the interior of the tray body 1. Heat dissipation through holes 15 are provided on both sides of the interior of the tray body 1. The heat dissipation fins 13 are distributed perpendicularly to the tray body 1 and are equidistantly distributed at the lower end of the interior of the tray body 1. The mating block 12 is fixedly installed at the four corners of the bottom of the tray body 1 using adhesive. The external dimensions of the mating block 12 are consistent with the internal dimensions of the mating groove 11 provided at the upper end of the interior of the tray body 1. The tray bodies 1 are sized and matched, allowing for stacking of tray bodies 1 through the mating groove 11 and mating block 12, thereby increasing placement and transportation efficiency. The heat dissipation fins 13 are fixedly installed inside the lower end of the tray body 1, with the upper surface of the heat dissipation fins 13 and the lower end of the placement rack 4 on the same horizontal line. After the substrate is placed, the bottom of the substrate is in close contact with the upper surface of the heat dissipation fins 13, which enables rapid heat dissipation of the substrate. In conjunction with the heat dissipation grooves 14 and heat dissipation through holes 15, the air inside the tray body 1 can circulate rapidly, increasing the heat dissipation efficiency during substrate processing and improving the overall practicality of the tray.

[0023] In summary, when using this coated substrate tray, the placement frame 4 is first elastically connected to the tray body 1 via the spring damping rod 3, thus adapting to and fixing substrates of different specifications. The limiting slider 5 is fixedly installed at both ends of the placement frame 4. The limiting through-hole 6, in conjunction with the limiting crossbar 7, allows the limiting slider 5 to move stably, thereby causing stable elastic displacement of the placement frame 4. The micro vacuum pump 8 is fixedly installed at the lower end of the placement frame 4. The micro vacuum pump 8, in conjunction with the delivery pipe 9, generates suction force in the nozzle body 10, thereby stably adsorbing the substrate placed on the placement frame 4, thus preventing the substrate from falling off after placement. Then, an adhesive is used... The docking blocks 12 are fixedly installed at the four corners of the bottom of the tray body 1. The docking slots 11 and docking blocks 12 are used to allow the tray bodies 1 to be stacked layer by layer, thereby increasing the placement and transportation efficiency. The heat dissipation fins 13 are fixedly installed inside the lower end of the tray body 1. The upper surface of the heat dissipation fins 13 is on the same horizontal line as the lower end of the placement rack 4. After the substrate is placed, the bottom of the substrate is in close contact with the upper surface of the heat dissipation fins 13, thereby enabling rapid heat dissipation of the substrate. In conjunction with the heat dissipation grooves 14 and heat dissipation through holes 15, the air inside the tray body 1 can circulate rapidly, increasing the heat dissipation efficiency during substrate processing and improving the overall practicality of the tray.

[0024] The embodiments of this utility model are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the utility model to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical applications of this utility model, and to enable those skilled in the art to understand this utility model and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A coated substrate tray, comprising a tray body (1), a placement rack (4), and a miniature vacuum pump (8), characterized in that, The tray body (1) has mounting grooves (2) on both sides inside, and a spring damping rod (3) is installed inside the mounting groove (2). A placement frame (4) is installed at the front end of the spring damping rod (3). At the same time, a limiting slider (5) is added to both ends of the placement frame (4). A limiting through hole (6) is opened inside the limiting slider (5), and a limiting crossbar (7) is connected inside the limiting through hole (6). A micro vacuum pump (8) is installed at the bottom of the placement frame (4), and a delivery pipe (9) is connected to the outside of the micro vacuum pump (8). A suction nozzle body (10) is set at the front end of the delivery pipe (9). A docking groove (11) is opened at the upper end inside the tray body (1), and a docking block (12) is added at the lower end of the tray body (1). A heat dissipation fin (13) is set at the lower end inside the tray body (1). A heat dissipation horizontal groove (14) is opened at the lower end inside the tray body (1). Heat dissipation through holes (15) are opened on both sides inside the tray body (1).

2. The coated substrate tray according to claim 1, characterized in that, The spring damping rod (3) is embedded in the mounting groove (2), and the spring damping rod (3) is fixedly connected to the mounting groove (2) by bolts.

3. The coated substrate tray according to claim 1, characterized in that, The spring damping rod (3) is perpendicular to the placement frame (4), and the placement frame (4) is elastically connected to the tray body (1) through the spring damping rod (3).

4. The coated substrate tray according to claim 1, characterized in that, The number of the placement racks (4) is two, and the two placement racks (4) are symmetrically arranged on both sides of the inside of the tray body (1) with the front central axis of the tray body (1).

5. A coated substrate tray according to claim 1, characterized in that, The internal dimensions of the limiting through hole (6) are adapted to the external dimensions of the limiting crossbar (7), and the limiting crossbar (7) is embeddedly connected to the limiting slider (5) through the limiting through hole (6).

6. A coated substrate tray according to claim 1, characterized in that, The micro vacuum pump (8) is horizontally distributed on the outside of the placement frame (4), and the micro vacuum pump (8) and the placement frame (4) are fixedly connected by bolts.

7. A coated substrate tray according to claim 1, characterized in that, The number of the micro vacuum pumps (8) is set to four, and two micro vacuum pumps (8) are grouped together, and each group of micro vacuum pumps (8) is symmetrically arranged on both sides of the inside of the tray body (1) with the front central axis of the tray body (1).

8. A coated substrate tray according to claim 1, characterized in that, The heat dissipation fins (13) are distributed perpendicularly to the tray body (1), and the heat dissipation fins (13) are equidistantly distributed at the lower end of the tray body (1).

Images