Double-path water-cooled screen

Abstract

The utility model discloses a kind of double-path flow-guiding water cooling screen, more specifically in the technical field of water cooling screen, including first cooling plate and second cooling plate, the first cooling plate and second cooling plate are oppositely arranged, cavity is formed between the first cooling plate and second cooling plate, and several crystal pulling plates are arranged in cavity.This utility model is by the arc flow guide pipe of the inboard of first cooling plate and second cooling plate respectively setting, can synchronous delivery cooling water, form double-path parallel water supply;And the vertical section of flow guide pipe is arc, adhere to cooling plate inner wall, reduce water flow resistance, compared with the existing cavity structure, improve cooling efficiency, the butt joint of every flow guide pipe outside is every two as a group, corresponding one layer of crystal pulling plate, cooling water is directly delivered to the both sides of crystal pulling cavity, avoid cooling water diffusion loss in cavity, ensure that crystallization interface is quickly heat dissipation.

Description

Technical Field

[0001] This utility model relates to the field of water-cooled screen technology, and more specifically, to a dual-channel water-cooled screen. Background Technology

[0002] Water-cooled screens for silicon crystals are an important cooling component in Czochralski silicon crystal growth furnaces. They are mainly used to help dissipate heat from the crystal during the growth of single-crystal silicon, thereby increasing the axial temperature gradient of the crystal near the crystallization interface and thus accelerating the growth rate of silicon crystals.

[0003] Currently, all existing water-cooled screens use hollow metal cavities with cooling water flowing inside. However, this makes it difficult for the cooling water to be quickly channeled, and it is also difficult to pull crystals in layers, resulting in low crystallization efficiency. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the present invention provides a dual-channel water-cooled screen, which aims to solve the problems mentioned in the background art.

[0005] This utility model provides the following technical solution: a dual-channel water-cooled screen, including a first cooling plate and a second cooling plate, the first cooling plate and the second cooling plate are arranged opposite to each other, a cavity is formed between the first cooling plate and the second cooling plate, and a plurality of crystal pulling plates are arranged in the cavity.

[0006] The first cooling plate and the second cooling plate are respectively provided with guide pipes on opposite sides, and each guide pipe is provided with a number of connectors on its outer side.

[0007] Optionally, in one possible implementation, multiple crystal pulling plates are stacked, and a crystal pulling cavity is formed between each pair of adjacent crystal pulling plates. The vertical cross-sectional shape of the guide tube is set to arc shape, and each pair of connectors is located on one side of the corresponding crystal pulling plate and connected to the crystal pulling plate. Valves are respectively provided at the bottom ends of the two guide tubes to allow cooling water to be delivered into the guide tubes. Extension rods are respectively provided at the bottom of the first cooling plate and the second cooling plate, and a support rod is provided at the bottom end of each extension rod. The two support rods are staggered. Protective frames are respectively fitted on the outer sides of the first cooling plate and the second cooling plate, and each of the protective frames is a rectangular frame structure.

[0008] The technical effects and advantages of this utility model are as follows:

[0009] By setting arc-shaped guide pipes on the inner sides of the first and second cooling plates respectively, cooling water can be delivered simultaneously, forming a dual-path parallel water supply; and the vertical cross-section of the guide pipe is arc-shaped, which fits the inner wall of the cooling plate, reducing water flow resistance and improving cooling efficiency compared with the existing cavity structure.

[0010] The connectors on the outside of each guide tube are arranged in pairs to correspond to one layer of crystal pulling plate, directly delivering cooling water to both sides of the crystal pulling cavity, avoiding the diffusion and loss of cooling water in the cavity, and ensuring rapid heat dissipation at the crystallization interface.

[0011] Each crystal pulling cavity is physically separated by a crystal pulling plate and has a corresponding independent water supply to the connector. The cooling intensity can be adjusted for different crystal growth stages of the crystal pulling cavity to avoid abnormal growth of a single layer of crystal affecting the overall operation. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in this disclosure, the accompanying drawings used in some embodiments will be briefly described below. Obviously, the drawings described below are only drawings of some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams and are not intended to limit the actual size of the product, the actual flow of the method, the actual timing of the signals, etc. involved in the embodiments of this disclosure.

[0013] Figure 1 This is a front view of the overall structure of this utility model.

[0014] Figure 2 This is a side view of the overall structure of this utility model.

[0015] Figure 3 This is a schematic diagram of the second cooling plate, connector, guide tube, crystal pulling plate, and support rod of this utility model.

[0016] The attached figures are labeled as follows: 1. First cooling plate; 2. Second cooling plate; 3. Cavity; 4. Guide pipe; 5. Connector; 6. Crystal pulling plate; 7. Crystal pulling cavity; 8. Valve; 9. Support rod; 10. Extension rod; 11. Protective frame. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] The dual-flow water-cooled screen disclosed in this embodiment is mainly used in Czochralski silicon crystal growth furnaces as a core cooling component in the single crystal silicon growth process. It is used to solve the technical problems of existing water-cooled screens, such as "low cooling water conduction efficiency due to hollow metal cavity structure, inability to achieve crystal layering and low crystallization efficiency".

[0019] The dual-flow water-cooled screen in this embodiment is sized to fit mainstream Czochralski silicon crystal growth furnaces. The materials, dimensions, and connections of each component are as follows; for details, please refer to the attached diagram. Figure 1 Appendix Figure 2 and appendix Figure 3 :

[0020] As attached Figure 1 As shown, the first cooling plate 1 and the second cooling plate 2 are symmetrical rectangular plates; they are arranged in parallel opposite directions, and a cavity 3 is formed between the first cooling plate 1 and the second cooling plate 2. The cavity 3 provides space for the installation of the crystal pulling plate 6 and crystal growth.

[0021] Meanwhile, as attached Figure 1 Appendix Figure 2 As shown, both the first cooling plate 1 and the second cooling plate 2 are fitted with rectangular protective frames 11 on their outer sides, which can prevent the cooling plates from deforming due to collisions during installation or use, and also enhance the overall resistance of the cooling plates to high-temperature warping.

[0022] As attached Figure 1 Appendix Figure 3 As shown, several crystal pulling plates 6 are stacked vertically inside the cavity 3. The size of each plate is adapted to the width of the cooling plate and the thickness of the cavity 3. Each crystal pulling plate 6 is fixed to the inner wall of the first cooling plate 1 and the second cooling plate 2 by laser welding. The spacing between two adjacent crystal pulling plates 6 is uniform and forms a crystal pulling cavity 7, realizing layered synchronous crystal pulling and solving the problems of existing water-cooled screens being unable to perform layered crystal pulling and having a small amount of crystallization per run.

[0023] As attached Figure 1 Appendix Figure 3 As shown, an arc-shaped guide pipe 4 is welded to each side of the first cooling plate 1 and the second cooling plate 2; and the top end of the guide pipe 4 extends to the top of the cooling plate and the bottom end extends to the bottom of the cooling plate, ensuring that the cooling water covers the entire height range of the crystal pulling cavity 7.

[0024] As attached Figure 3 As shown, each guide tube 4 has several connectors 5 integrally formed on its outer side, and each pair is installed on both sides of the crystal pulling plate 6. The connector 5 has a micro-channel inside, one end of which is connected to the guide tube 4, and the other end passes through the crystal pulling plate 6 and extends to the inner wall of the crystal pulling cavity 7. Through this structure, cooling water can be directly delivered from the guide tube 4 to both sides of each crystal pulling cavity 7 to achieve precise cooling and avoid the problem of existing water-cooled screens where the cooling water is concentrated in the middle of the cavity and the edge is not sufficiently cooled.

[0025] As attached Figure 1As shown, valves 8 are installed at the bottom of both guide pipes 4; the two valves 8 are independently controlled and can adjust the cooling water flow rate of the guide pipes 4 on the first cooling plate 1 side and the second cooling plate 2 side respectively. For example, when the temperature of a certain layer of crystal pulling cavity 7 is too high, the flow rate of the guide pipe 4 on that side can be increased by the valve 8 on the corresponding side to quickly reduce the temperature of the crystal pulling cavity 7 and ensure the consistency of the temperature gradient for crystal growth of each layer.

[0026] As attached Figure 2 Appendix Figure 3 As shown, an extension rod 10 is vertically welded to the bottom center of the first cooling plate 1 and the second cooling plate 2; the extension rod 10 is a stainless steel round rod with a support rod 9 welded to its bottom end; and the two support rods 9 are staggered.

[0027] The function of this support structure is to: mount the water-cooled screen as a whole on the base of the growth furnace, avoiding heat conduction loss caused by direct contact between the bottom of the cooling plate and the furnace body; at the same time, the staggered support rods 9 can enhance the stability of the support and prevent the water-cooled screen from tilting due to its own weight in high-temperature environments.

[0028] The specific working principle is as follows: the dual-flow water-cooled screen of this embodiment is fixed on the base of the Czochralski silicon crystal growth furnace by the support rod 9 to ensure that the crystal pulling cavity 7 is aligned with the seed crystal mechanism of the growth furnace;

[0029] Cooling water connection: Connect the external cooling water pipes to the valves 8 at the bottom of the two guide pipes 4 respectively;

[0030] Open the two valves 8 to adjust the cooling water flow rate. The cooling water enters the guide pipe 4 through the valves 8 and is then transported to both sides of each crystal pulling cavity 7 through the micro-channel of the connector 5.

[0031] The seed crystal mechanism places the seed crystal into each layer of the crystal pulling cavity 7. The single crystal silicon grows in the crystal pulling cavity 7. Cooling water carries away heat through the inner wall of the crystal pulling cavity 7, increasing the axial temperature gradient at the crystallization interface.

[0032] Furthermore, the temperature of each layer of the crystal pulling cavity 7 is monitored in real time by the temperature sensor of the growth furnace. If the temperature of a certain layer is too high, the cooling water flow can be increased through the valve 8 on the corresponding side to ensure that the crystals of each layer grow synchronously.

[0033] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A dual-flow water-cooled screen, characterized in that: It includes a first cooling plate (1) and a second cooling plate (2), the first cooling plate (1) and the second cooling plate (2) are arranged opposite to each other, a cavity (3) is formed between the first cooling plate (1) and the second cooling plate (2), and a plurality of crystal pulling plates (6) are arranged in the cavity (3); The first cooling plate (1) and the second cooling plate (2) are respectively provided with guide pipes (4) on opposite sides, and each guide pipe (4) is provided with a number of connectors (5) on its outer side.

2. The dual-flow water-cooled screen according to claim 1, characterized in that: Multiple crystal pulling plates (6) are stacked, and a crystal pulling cavity (7) is formed between each two adjacent crystal pulling plates (6).

3. The dual-flow water-cooled screen according to claim 1, characterized in that: The vertical cross-sectional shape of the guide tube (4) is set to arc shape, and each pair of connectors (5) is located on one side of the corresponding crystal pulling plate (6) and connected to the crystal pulling plate (6).

4. The dual-flow water-cooled screen according to claim 1, characterized in that: Valves (8) are provided at the bottom ends of the two guide pipes (4) respectively, so that cooling water is delivered into the guide pipes (4).

5. A dual-flow water-cooled screen according to claim 1, characterized in that: The bottom of the first cooling plate (1) and the second cooling plate (2) are respectively provided with extension rods (10), and each extension rod (10) is provided with a support rod (9) at its bottom end, and the two support rods (9) are staggered.

6. A dual-flow water-cooled screen according to claim 1, characterized in that: The outer sides of the first cooling plate (1) and the second cooling plate (2) are respectively fitted with protective frames (11), and each of the protective frames (11) is a rectangular frame structure.

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