Sheet caching device and sheet caching system

Abstract

The present disclosure relates to the technical field of semiconductor and photovoltaic, and particularly relates to a sheet material buffering device and a sheet material buffering system, which solve the problem that a sheet material buffering device cannot bear sheet materials with different thicknesses and has good heat dissipation. The sheet material buffering device comprises at least two buffering assemblies arranged oppositely and a plate-shaped assembly located below the buffering assemblies, a bearing assembly of the buffering assembly is used for bearing the sheet material, and an elastic assembly of the buffering assembly is used for supporting the bearing assembly. When the overall thickness of the sheet material is small, the pressure exerted by the sheet material on the bearing assembly is small, the distance of the bearing assembly moving downward is small, and the gap between the bearing assembly and the plate-shaped assembly is large, which is beneficial to heat dissipation of the sheet material. With the increase of the overall thickness of the sheet material, the pressure exerted by the sheet material on the bearing assembly also increases, the distance of the bearing assembly moving downward becomes larger, and the height of the space above the bearing assembly increases to bear thicker sheet materials.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a sheet buffer device and a sheet buffer system. Background Technology

[0002] Semiconductor or photovoltaic equipment typically processes wafers in a high-temperature environment. After the process is completed, the wafers are usually at a high temperature when they leave the equipment. Therefore, the wafers are usually placed on a wafer buffer device and transferred to the next process after they have cooled down.

[0003] In related technologies, sheet material buffer devices are mostly arranged vertically at intervals. These devices typically include a buffer assembly and a plate-shaped assembly. The buffer assembly, used to buffer the sheet material, is usually fixed. The plate-shaped assembly, located below the buffer assembly, is used to catch broken sheets. To save space, the spacing between two adjacent sheet material buffer devices in the vertical direction is not large. The limited space above the buffer devices means that when cell production capacity increases, the number of sheets increases, or the standard size changes from 182*182mm to 210*210mm, the sheet material buffer device cannot support larger or more sheets. To enable the sheet material buffer device to support larger or more sheets, the supporting assembly within the buffer assembly can be moved downwards, thereby increasing the vertical space between the supporting assembly and the plate-shaped assembly of the sheet material buffer device above. However, this reduces the vertical gap between the supporting assembly and the plate-shaped assembly within the same sheet material buffer device, resulting in a smaller gap between the sheet material supported by the supporting assembly and the plate-shaped assembly, which is detrimental to sheet material heat dissipation. Utility Model Content

[0004] In view of this, the present disclosure provides a sheet buffer device and a sheet buffer system, which solves the problem that the sheet buffer device cannot simultaneously support sheets of different thicknesses and have good heat dissipation.

[0005] In a first aspect, one embodiment of this disclosure provides a sheet buffer device, comprising: at least two buffer components disposed opposite to each other along a first direction and respectively used to support both ends of a sheet carrier, the sheet carrier being configured to support a sheet; a plate-shaped component connected to the buffer components and disposed below the buffer components; wherein the buffer components include: a support component having a receiving space and an opening communicating the receiving space with the outside; a bearing component including a bearing portion and a connecting portion connected to each other, the bearing portion being configured to support the sheet carrier, the connecting portion extending into the receiving space through the opening; and an elastic component disposed between the connecting portion and the bottom wall of the receiving space.

[0006] In some embodiments, the bottom wall of the receiving space has a first blind hole extending in a vertical direction, the bottom surface of the connecting portion has a second blind hole extending in a vertical direction, and both ends of the elastic component extend into the first blind hole and the second blind hole, respectively; and / or; the bottom wall of the receiving space has a third blind hole extending in a vertical direction, the connecting portion has a guide through hole extending in a vertical direction, and the buffer component further includes: a guide shaft, the first end of the guide shaft extending into the third blind hole, the second end of the guide shaft passing through the guide through hole and connected to the top wall of the receiving space.

[0007] In some embodiments, the support assembly includes: a support body having the receiving space and the opening; wherein, when the bottom wall of the receiving space has the first blind hole, the support body has a first through hole extending in a vertical direction, the first through hole communicating with the bottom wall of the receiving space and the outside; the support assembly further includes: a first sealing member connected to the bottom of the support body and sealing the end of the first through hole away from the receiving space to form the first blind hole; wherein, when the bottom wall of the receiving space has the third blind hole, the support body has a second through hole extending in a vertical direction, the second through hole communicating with the bottom wall of the receiving space and the outside; the support assembly further includes: a second sealing member connected to the bottom of the support body and sealing the end of the second through hole away from the receiving space to form the third blind hole.

[0008] In some embodiments, when the buffer assembly includes the guide shaft, the buffer assembly further includes a linear bearing, fitted onto the guide shaft and disposed between the guide shaft and the guide through hole.

[0009] In some embodiments, the support portion includes: a support shaft connected to the connecting portion; and a support wheel rotatably connected to the support shaft, wherein the axis of the support wheel is parallel to the first direction, and the upper surface of the support wheel is configured to contact the sheet carrier to buffer the sheet carrier and the sheet carried by the sheet carrier.

[0010] In some embodiments, the buffer assembly further includes a positioning roller rotatably connected to the support assembly, wherein the axis of the positioning roller is perpendicular to the first direction and perpendicular to the vertical direction, and the vertical height of the top of the positioning roller is greater than the vertical height of the top of the support roller.

[0011] In some embodiments, the buffer assembly further includes: a mounting assembly rotatably connected to the support assembly about a horizontal axis extending along the first direction, the mounting assembly having a first abutment surface facing the support assembly, the support assembly having a second abutment surface and a third abutment surface angled together; when the sheet buffer is in operation, the support assembly is rotatable about the horizontal axis such that the first abutment surface is parallel to the second abutment surface; when the sheet buffer is in maintenance operation, the support assembly is rotatable about the horizontal axis such that the first abutment surface is parallel to the third abutment surface. Both the second and third abutment surfaces are parallel to the horizontal axis, and the first abutment surface is also parallel to the vertical direction. A locking assembly, when the sheet buffer device is in the working state, can extend between the first and second abutment surfaces and abut against both surfaces to lock the support assembly and the mounting assembly. When the sheet buffer device is in the maintenance state, the locking assembly can extend between the first and third abutment surfaces and abut against both surfaces to lock the support assembly and the mounting assembly.

[0012] In some embodiments, the mounting assembly includes: two first vertical mounting plates disposed opposite each other, the support assembly being rotatably connected to the first vertical mounting plates about a horizontal axis; a second vertical mounting plate connecting the two first vertical mounting plates and having the first abutting surface; wherein the support assembly includes a plate-shaped rotating portion having a second abutting surface and a third abutting surface, the rotating portion extending between the two first vertical mounting plates; and / or, the locking assembly includes a locking portion and a limiting portion connected to each other, the locking portion extending between the first abutting surface and the second abutting surface or between the first abutting surface and the third abutting surface, the limiting portion abutting against the upper surface of the first vertical mounting plate or the second vertical mounting plate.

[0013] In some embodiments, the sheet buffer device further includes: a heat insulation component connected to the buffer component and configured to isolate the buffer component from the process furnace.

[0014] Secondly, one embodiment of this disclosure provides a sheet buffer system, including: a frame; at least two sheet buffer devices as described in the first aspect, connected to the frame; wherein, when the sheet buffer system includes multiple sheet buffer devices, the multiple sheet buffer devices are arranged at intervals in a vertical direction, and / or, the multiple sheet buffer devices are arranged sequentially in a horizontal direction.

[0015] The sheet buffer device provided in this embodiment utilizes a support component to support the sheet carrier and the sheet, and an elastic component is disposed below the support component. When the overall thickness of the sheet supported by the support component is small, the pressure exerted by the sheet on the support component and the elastic component is small, the downward distance of the support component is small, and the vertical gap between the sheet and the plate-shaped component of the sheet buffer device is large, which is beneficial for heat dissipation of the sheet, shortens the sheet residence time, and increases production capacity.

[0016] In addition, as the overall thickness of the sheet increases, the weight of the sheet also increases, and the pressure exerted by the sheet on the bearing component and the elastic component also increases. The elastic component is compressed downward, and the distance that the bearing component moves downward increases. This increases the height of the space above the bearing part of the bearing component for caching the sheet carrier and the sheet, enabling the sheet caching device to support thicker sheets. Attached Figure Description

[0017] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The diagram shown is a structural schematic of a sheet buffer device provided in an embodiment of this disclosure.

[0019] Figure 2 The diagram shown is an exploded view of a cache component provided in an embodiment of this disclosure.

[0020] Figure 3 The image shown is a side view of a caching component in its working state according to an embodiment of this disclosure.

[0021] Figure 4 The image shown is a top view of a caching component in its working state according to an embodiment of this disclosure.

[0022] Figure 5 As shown Figure 4 The caching component in its working state is shown in a cross-sectional view along the AA direction.

[0023] Figure 6 As shown Figure 5 The image shows a magnified view of the cache component in its working state within region B.

[0024] Figure 7 The diagram shown is a structural schematic of a cache component for maintaining state provided in an embodiment of this disclosure.

[0025] Figure 8The image shown is a side view of a cache component in maintenance state provided in an embodiment of this disclosure.

[0026] Figure 9 As shown Figure 8 The caching component in maintenance status is shown in a cross-sectional view along the CC direction.

[0027] Figure 10 The diagram shown is a structural schematic of a sheet buffer system provided in an embodiment of this disclosure.

[0028] Figure 11 As shown Figure 10 The image shows a magnified view of the sheet buffer system in region D.

[0029] Figure 12 The diagram shown is a structural schematic of a sheet buffer system provided in another embodiment of this disclosure.

[0030] Figure label:

[0031] 1. Sheet buffer system; 10. Sheet buffer device; 100. Buffer assembly; 110. Support assembly; 1110. Support body; 1101. Accommodation space; 1102. Opening; 1103. First blind hole; 1104. Third blind hole; 1105. First through hole; 1106. Second through hole; 1107. Second abutment surface; 1108. Third abutment surface; 1120. First sealing element; 1130. Second sealing element; 1140. Rotating part; 1150. Support part; 120. Bearing assembly; 1210. Bearing part; 1211. Support shaft; 1212. Support wheel; 1220. Connecting part; 12 21. Second blind hole; 1222. Guide through hole; 130. Elastic component; 140. Guide shaft; 150. Linear bearing; 160. Positioning roller; 170. Mounting component; 1710. First vertical mounting plate; 1720. Second vertical mounting plate; 1701. First abutment surface; 180. Locking component; 1810. Locking part; 1820. Limiting part; 190. Rotating shaft; 191. First washer; 192. Second washer; 193. Mounting bracket; 194. Detection piece; 200. Plate-shaped component; 300. Heat insulation component; X1. First direction; L1. Horizontal axis; 20. Frame; 30. Protective plate. Detailed Implementation

[0032] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0033] Figure 1 The diagram shown is a structural schematic of a sheet buffer device provided in an embodiment of this disclosure. Figure 2 The diagram shown is an exploded view of a cache component provided in an embodiment of this disclosure. Figure 3 The image shown is a side view of a caching component in its working state according to an embodiment of this disclosure. Figure 4 The image shown is a top view of a caching component in its working state according to an embodiment of this disclosure. Figure 5 As shown Figure 4 The caching component in its working state is shown in a cross-sectional view along the AA direction. Figure 10 The diagram shown is a structural schematic of a sheet buffer system provided in an embodiment of this disclosure. Figure 11 As shown Figure 10 The image shows a magnified view of a portion of the sheet buffer system in region D. (See attached image.) Figures 1 to 5 ,as well as Figure 10 and Figure 11 As shown, the sheet buffer device 10 includes at least two buffer components 100 and a plate-shaped component 200. The at least two buffer components 100 are arranged opposite each other along a first direction X1 and are respectively used to support the two ends of a sheet carrier, which is configured to support a sheet. The plate-shaped component 200 is connected to the buffer components 100 and is disposed below the buffer components 100.

[0034] The buffer assembly 100 includes a support assembly 110, a carrier assembly 120, and an elastic assembly 130. The support assembly 110 has a receiving space 1101 and an opening 1102 connecting the receiving space 1101 to the outside. The carrier assembly 120 includes a carrier portion 1210 and a connecting portion 1220 connected to each other. The carrier portion 1210 is configured to carry a sheet material carrier, and the connecting portion 1220 extends into the receiving space 1101 through the opening 1102. The elastic assembly 130 is disposed between the connecting portion 1220 and the bottom wall of the receiving space 1101.

[0035] The sheet buffer device 10 provided in this embodiment utilizes a support component 120 to support the sheet, and an elastic component 130 is disposed below the support component 120. When the overall thickness of the sheet supported by the support component 120 is small, the pressure exerted by the sheet on the support component 120 and the elastic component 130 is small, the downward distance of the support component 120 is small, and the vertical gap between the support component 120 and the plate-shaped component 200 of the sheet buffer device 10 is large, which is beneficial for heat dissipation of the sheet.

[0036] Furthermore, as the overall thickness of the sheet increases, its weight also increases, leading to increased pressure on the supporting component 120 and the elastic component 130. The elastic component 130 is compressed downwards, and the downward movement of the supporting component 120 increases. This increases the height of the space above the supporting portion 1210 of the supporting component 120 for caching the sheet carrier and the sheet, enabling the sheet caching device 10 to support thicker sheets. Simultaneously, because the elastic component 130 provides upward support to the supporting component 120, the supporting portion 1210 of the supporting component 120 and the lower plate-shaped component 200 maintain a certain vertical distance, which is beneficial for sheet heat dissipation. Therefore, the sheet caching device provided in this embodiment can accommodate sheets of different specifications or quantities, under the current demand for large-scale battery cell processing.

[0037] For example, the elastic component 130 may include elements with elastic functions such as springs and rubber pads. Figure 2 and Figure 5 As shown, the elastic component 130 is a spring.

[0038] For example, such as Figure 1 As shown, the sheet buffer device 10 includes two buffer components 100, which respectively support the two ends of the sheet carrier. This ensures that the sheet buffer device 10 can stably support the sheet carrier, and also minimizes the contact area between the sheet buffer device 10 and the sheet carrier, thereby minimizing the contamination caused by the sheet buffer device 10 to the sheet carrier.

[0039] For example, such as Figures 2 to 4 As shown, the number of bearing parts 1210 in the bearing assembly 120 is two. The two bearing parts 1210 jointly support the same end of the sheet carrier, which further improves the bearing stability of the bearing assembly 120 on the end of the sheet carrier.

[0040] Exemplarily, the first end of the elastic component 130 is connected to the bottom wall of the receiving space 1101, and the second end of the elastic component 130 is connected to the bottom surface of the connecting portion 1220. Exemplarily, the first end of the elastic component 130 abuts against the bottom wall of the receiving space 1101, and the second end of the elastic component 130 abuts against the bottom surface of the connecting portion 1220. Exemplarily, the first end of the elastic component 130 abuts against the bottom wall of the receiving space 1101, and the second end of the elastic component 130 abuts against the bottom surface of the connecting portion 1220. Exemplarily, the first end of the elastic component 130 abuts against the bottom wall of the receiving space 1101, and the second end of the elastic component 130 abuts against the bottom surface of the connecting portion 1220.

[0041] For example, the plate-shaped assembly 200 extends along the first direction X1, and its two ends are respectively connected to the support components 110 of the two buffer components 100. When the support components 110 rotate, they drive the plate-shaped assembly 200 to rotate simultaneously.

[0042] For example, the plate assembly 200 can be a water-cooled structure. The plate assembly 200 can receive and carry the broken sheet in the event of breakage of the sheet carried by the buffer assembly 100, and can also cool the sheet carrier and sheet carried by the buffer assembly 100 to improve the cooling rate of the sheet carrier and sheet.

[0043] In some embodiments, such as Figure 2 , Figure 5 and Figure 6 As shown, the bottom wall of the accommodating space 1101 has a first blind hole 1103 extending in the vertical direction, the bottom surface of the connecting part 1220 has a second blind hole 1221 extending in the vertical direction, and the two ends of the elastic component 130 extend into the first blind hole 1103 and the second blind hole 1221 respectively.

[0044] The elastic component 130 is limited in the vertical direction by using the first blind hole 1103 and the second blind hole 1221. The installation method of the elastic component 130 is simple, reliable and has good stability.

[0045] The number of elastic components 130, the first blind hole 1103, and the second blind hole 1221 can be set according to actual needs. For example, as shown... Figure 6 As shown, there are two elastic components 130, two first blind holes 1103, and two blind holes 1221, and they are arranged in a one-to-one correspondence. By using two elastic components 130 to support the connecting part 1220, the support stability of the connecting part 1220 by the elastic components 130 is further improved.

[0046] In some embodiments, such as Figure 2 , Figure 5 and Figure 6 As shown, the bottom wall of the receiving space 1101 has a third blind hole 1104 extending vertically, and the connecting portion 1220 has a guide through hole 1222 extending vertically. The buffer assembly 100 also includes a guide shaft 140, the first end of which extends into the third blind hole 1104, and the second end of which passes through the guide through hole 1222 and is connected to the top wall of the receiving space 1101.

[0047] The guide shaft 140 guides the vertical movement of the connecting part 1220 to prevent the bearing assembly 120 from jamming during vertical movement.

[0048] The number of guide shafts 140, third blind holes 1104, and guide through holes 1222 can be set according to actual needs. For example, such as... Figure 6 As shown, there are two guide shafts 140, two third blind holes 1104, and two guide through holes 1222, and they are arranged in a one-to-one correspondence. By using two guide shafts 140 to guide the vertical movement of the connecting part 1220, the guiding accuracy of the bearing assembly 120 is further improved, thereby further preventing the bearing assembly 120 from jamming during vertical movement.

[0049] In some embodiments, such as Figure 2 and Figure 6 As shown, the support assembly 110 includes a support body 1110, which has a receiving space 1101 and an opening 1102. When the bottom wall of the receiving space 1101 has a first blind hole 1103, the support body 1110 has a first through hole 1105 extending vertically, which connects the bottom wall of the receiving space 1101 to the outside. The support assembly 110 also includes a first sealing member 1120, which is connected to the bottom of the support body 1110 and seals the end of the first through hole 1105 away from the receiving space 1101, thus forming the first blind hole 1103. When the bottom wall of the receiving space 1101 has a third blind hole 1104, the support body 1110 has a second through hole 1106 extending vertically, which connects the bottom wall of the receiving space 1101 to the outside. The support assembly 110 also includes a second sealing member 1130, which is connected to the bottom of the support body 1110 and blocks the end of the second through hole 1106 away from the receiving space 1101 to form a third blind hole 1104.

[0050] The above-described configuration facilitates the processing and assembly of the support component 110. Furthermore, removing the first sealing member 1120 allows the elastic component 130 to easily enter and exit the first blind hole 1103 and the second blind hole 1221 through the first through hole 1105, thus facilitating the installation and removal of the elastic component 130. Similarly, removing the second sealing member 1130 allows the guide shaft 140 to easily enter and exit the third blind hole 1104 and the guide through hole 1222 through the second through hole 1106, thus facilitating the installation and removal of the guide shaft 140.

[0051] The number of the first sealing element 1120 and the first through hole 1105 is the same as the number of the first blind hole 1103, the second blind hole 1221 and the elastic component 130. The number of the second sealing element 1130 and the second through hole 1106 is the same as the number of the third blind hole 1104, the guide through hole 1222 and the guide shaft 140.

[0052] In some embodiments, such as Figure 2 , Figure 5 and Figure 6 As shown, when the buffer assembly 100 includes a guide shaft 140, the buffer assembly 100 also includes a linear bearing 150, which is fitted onto the guide shaft 140 and disposed between the guide shaft 140 and the guide through hole 1222.

[0053] By using the linear bearing 150 to reduce the friction between the guide shaft 140 and the inner wall of the guide hole 1222, the movement of the connecting part 1220 in the vertical direction becomes smoother, further preventing the bearing assembly 120 from jamming during the movement in the vertical direction.

[0054] In some embodiments, such as Figure 2 As shown, the support portion 1210 includes a support shaft 1211 and a support wheel 1212. The support shaft 1211 is connected to the connecting portion 1220, and the support wheel 1212 is rotatably connected to the support shaft 1211. The axis of the support wheel 1212 is parallel to the first direction X1, and the upper surface of the support wheel 1212 is configured to contact the sheet carrier to buffer the sheet carrier and the sheet carried by the sheet carrier.

[0055] By making contact with the sheet carrier through the support wheel 1212, line contact between the support wheel 1212 and the sheet carrier is achieved, reducing the contact area between the bearing part 1210 and the sheet carrier, thereby reducing the contamination of the end of the sheet carrier caused by the buffer assembly 100.

[0056] In some embodiments, such as Figures 3 to 6 As shown, the buffer assembly 100 also includes a positioning roller 160, which is rotatably connected to the support assembly 110. The axis of the positioning roller 160 is perpendicular to the first direction X1 and also perpendicular to the vertical direction. The vertical height of the top of the positioning roller 160 is greater than the vertical height of the top of the support wheel 1212.

[0057] The sheet carrier typically falls from above the buffer assembly 100 onto the support roller 1212, and the positioning roller 160 can appropriately adjust the positional error of the sheet carrier before it is placed on the support roller 1212.

[0058] For example, such as Figure 6 As shown, the positioning roller 160 is located above the top wall of the accommodating space 1101 and is rotatably connected to the support body 1110 of the support assembly 110.

[0059] In some embodiments, such as Figure 2 , Figure 4 , Figure 5 as well as Figures 7 to 9As shown, the buffer assembly 100 also includes a mounting assembly 170 and a locking assembly 180. The mounting assembly 170 is rotatably connected to the support assembly 110 about a horizontal axis L1 extending along a first direction X1. The mounting assembly 170 has a first abutment surface 1701 facing the support assembly 110, and the support assembly 110 has a second abutment surface 1107 and a third abutment surface 1108 set at an angle. When the sheet buffer device 10 is in the working state, the support assembly 110 can rotate about the horizontal axis L1 so that the first abutment surface 1701 is parallel to the second abutment surface 1107. When the sheet buffer device 10 is in the maintenance state, the support assembly 110 can rotate about the horizontal axis L1 so that the first abutment surface 1701 is parallel to the third abutment surface 1108. The first abutment surface 1701, the second abutment surface 1107, and the third abutment surface 1108 are all parallel to the horizontal axis L1, and the first abutment surface 1701 is also parallel to the vertical direction.

[0060] like Figure 5 As shown, when the sheet buffer device 10 is in operation, the locking component 180 can extend between the first abutment surface 1701 and the second abutment surface 1107, and abut against the first abutment surface 1701 and the second abutment surface 1107 respectively, to lock the support component 110 and the mounting component 170. Figure 7 and Figure 9 As shown, when the sheet buffer device 10 is in maintenance mode, the locking component 180 can extend between the first abutment surface 1701 and the third abutment surface 1108, and abut against the first abutment surface 1701 and the third abutment surface 1108 respectively, to lock the support component 110 and the mounting component 170.

[0061] The sheet buffer device 10's buffer component 100 has a flipping function. When the sheet buffer device 10 is in the working state, the support component 110 and the load-bearing component 120 are in a horizontal state, and the elastic component 130 is in a vertical state. The working state is the state in which the sheet buffer device 10 can support a horizontally placed sheet carrier. When the sheet buffer device 10 is in the maintenance state, the support component 110 rotates 90 degrees around the horizontal axis L1, and the support component 110 and the load-bearing component 120 are in a vertical state, while the elastic component 130 is in a horizontal state. The maintenance state is the state in which the sheet buffer device 10 cannot support a horizontally placed sheet carrier, and other equipment adjacent to the sheet buffer device 10 is in a state requiring maintenance. When the sheet buffer device 10 is in the maintenance state, the support component 110 flips upward to obtain a larger maintenance space, facilitating the maintenance of other equipment adjacent to the sheet buffer device 10.

[0062] For example, such as Figures 2 to 4As shown, the buffer assembly 100 also includes a rotating shaft 190, the axis of which is parallel to the horizontal axis L1. The rotating shaft 190 passes through the support assembly 110 and the mounting assembly 170, and the end of the rotating shaft 190 is connected to the mounting assembly 170, so that the support assembly 110 and the mounting assembly 170 are rotatably connected around the horizontal axis L1.

[0063] For example, such as Figure 2 and Figure 3 As shown, the buffer assembly 100 also includes a first washer 191, which is fitted onto the end of the rotating shaft 190 and connected to the mounting assembly 170 to achieve the connection between the end of the rotating shaft 190 and the mounting assembly 170.

[0064] For example, such as Figure 2 and Figure 6 As shown, the buffer assembly 100 also includes a second washer 192, which is disposed on the top of the guide through hole 1222 and connected to the connecting part 1220, for limiting the linear bearing 150 and preventing the linear bearing 150 from coming out of the guide through hole 1222.

[0065] In some embodiments, such as Figure 2 , Figure 4 and Figure 5 As shown, the mounting assembly 170 includes two first vertical mounting plates 1710 and a second vertical mounting plate 1720 disposed opposite to each other. The support assembly 110 is rotatably connected to the first vertical mounting plates 1710 about a horizontal axis L1. The second vertical mounting plate 1720 connects the two first vertical mounting plates 1710 and has a first abutment surface 1701. The support assembly 110 includes a plate-shaped rotating portion 1140, which has a second abutment surface 1107 and a third abutment surface 1108, and extends between the two first vertical mounting plates 1710. The mounting assembly 170 has a simple structure, and the rotatable connection between the mounting assembly 170 and the support assembly 110 is simple and stable.

[0066] For example, such as Figure 4 As shown, the rotating shaft 190 passes through two first vertical mounting plates 1710 and the rotating part 1140 to enable the support assembly 110 to be rotatably connected to the mounting assembly 170 about the horizontal axis L1.

[0067] In some embodiments, such as Figure 2 , Figure 5 , Figure 7 and Figure 9As shown, the locking assembly 180 includes a locking portion 1810 and a limiting portion 1820 connected to each other. The locking portion 1810 extends between the first abutment surface 1701 and the second abutment surface 1107 or between the first abutment surface 1701 and the third abutment surface 1108. The limiting portion 1820 abuts against the upper surface of the first vertical mounting plate 1710 or the second vertical mounting plate 1720.

[0068] The locking assembly 180 has a simple structure and a simple and stable locking method.

[0069] For example, such as Figure 1 and Figure 11 As shown, the support assembly 110 also includes a support portion 1150, which is connected to the bottom of the support body 1110. The end of the plate-shaped assembly 200 is connected to the support portion 1150 to achieve the connection between the end of the plate-shaped assembly 200 and the support assembly 110.

[0070] For example, such as Figure 5 and Figure 6 As shown, the cache component 100 also includes a detection element 194, which is connected to the connection portion 1220 of the carrier component 120 and is configured to detect whether a sheet carrier is placed on the cache component 100.

[0071] For example, the detection element 194 may be a photoelectric sensor, a proximity sensor, etc.

[0072] like Figure 10 and Figure 11 As shown, the sheet buffer device 10 also includes a heat insulation component 300, which is connected to the buffer component 100 and configured to isolate the buffer component 100 from the process furnace.

[0073] The heat insulation component 300 isolates the buffer component 100 from the process furnace, reducing the heat transfer from the process furnace to the sheet carrier carried by the buffer component 100 and the sheet on the sheet carrier. In addition, it can also prevent impurities in the process furnace from falling onto the buffer component 100, the sheet carrier carried by the buffer component 100, and the sheet carried by the sheet carrier.

[0074] Figure 12 The diagram shown is a structural schematic of a sheet buffer system provided in another embodiment of this disclosure. Figures 10 to 12 As shown, the sheet buffer system 1 includes at least two sheet buffer devices 10 mentioned in the above embodiments and a frame 20, with the sheet buffer devices 10 connected to the frame 20. When the sheet buffer system 1 includes multiple sheet buffer devices 10, the multiple sheet buffer devices 10 are arranged at intervals in the vertical direction, or the multiple sheet buffer devices 10 are arranged sequentially in the horizontal direction, or the multiple sheet buffer devices 10 are arranged at intervals in the vertical direction and sequentially in the horizontal direction.

[0075] When multiple sheet buffer devices 10 are arranged at intervals along the vertical direction, the space between the support portion 1210 of the lower sheet buffer device 10 and the bottom of the upper sheet buffer device 10 is used to buffer the sheet carrier and the sheet.

[0076] For example, the mounting component 170 of the buffer assembly 100 is connected to the frame 20 to connect the sheet buffer device 10 to the frame 20. For example, the buffer assembly 100 also includes a mounting bracket 193, which is connected to the side of the second vertical mounting plate 1720 of the mounting assembly 170 away from the first vertical mounting plate 1710, and is also connected to the frame 20 to connect the sheet buffer device 10 to the frame 20.

[0077] For example, the heat insulation component 300 is vertically disposed on one side of the sheet buffer device 10 and connected to the frame 20 to achieve indirect connection between the heat insulation component 300 and the buffer component 100.

[0078] For example, the space between the support portion 1210 of the lower sheet buffer device 10 and the bottom of the plate-shaped assembly 200 of the upper sheet buffer device 10 is used to buffer the sheet carrier and the sheet.

[0079] For example, such as Figure 10 and Figure 11 As shown, a protective plate 30 is provided on the top of the sheet buffer system 1. The protective plate 30 is connected to the frame 20. The space between the support part 1210 of the uppermost sheet buffer device 10 and the bottom of the protective plate 30 forms the space of the uppermost sheet buffer device 10 for buffering sheet carriers and sheets.

[0080] Since the sheet buffer system 1 includes the sheet buffer device 10, all the technical features and effects of the sheet buffer system 1 and the sheet buffer device 10 will not be described in detail here.

[0081] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where the form of detachable engagement is not explicitly limited, a non-detachable connection can be achieved using welding, bonding, etc.

[0082] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0083] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0084] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0085] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0086] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A sheet buffer device, characterized by, include: At least two buffer components are arranged opposite each other along a first direction and are respectively used to carry two ends of a sheet carrier, the sheet carrier being configured to carry a sheet; A plate-shaped component, connected to the cache component, is disposed below the cache component; The caching component includes: A support component having a receiving space and an opening connecting the receiving space to the outside; A support assembly includes an interconnected support portion and a connecting portion, the support portion being configured to support the sheet carrier, and the connecting portion extending into the receiving space through the opening; An elastic component is disposed between the connecting portion and the bottom wall of the receiving space.

2. The sheet buffer device according to claim 1, characterized in that, The bottom wall of the accommodating space has a first blind hole extending in a vertical direction, the bottom surface of the connecting part has a second blind hole extending in a vertical direction, and the two ends of the elastic component extend into the first blind hole and the second blind hole respectively; and / or; The bottom wall of the accommodating space has a third blind hole extending in the vertical direction, the connecting part has a guide through hole extending in the vertical direction, and the buffer assembly further includes: a guide shaft, the first end of the guide shaft extending into the third blind hole, the second end of the guide shaft passing through the guide through hole and connected to the top wall of the accommodating space.

3. The sheet buffer device according to claim 2, wherein The support components include: The supporting body has the accommodating space and the opening; Wherein, when the bottom wall of the accommodating space has the first blind hole, the supporting body has a first through hole extending in the vertical direction, the first through hole connecting the bottom wall of the accommodating space to the outside, and the supporting assembly further includes: a first sealing member connected to the bottom of the supporting body and sealing the end of the first through hole away from the accommodating space to form the first blind hole; Wherein, in the case that the bottom wall of the accommodating space has the third blind hole, the supporting body has a second through hole extending in the vertical direction, the second through hole connecting the bottom wall of the accommodating space to the outside, and the supporting assembly further includes: a second sealing member connected to the bottom of the supporting body and sealing the end of the second through hole away from the accommodating space to form the third blind hole.

4. The sheet buffer apparatus according to claim 3, wherein In the case where the cache component includes the guide axis, the cache component further includes: A linear bearing is fitted onto the guide shaft and positioned between the guide shaft and the guide through hole.

5. The sheet buffer device according to any one of claims 1 to 4, wherein The bearing portion includes: The support shaft is connected to the connecting part; A support wheel is rotatably connected to the support shaft. The axis of the support wheel is parallel to the first direction. The upper surface of the support wheel is configured to contact the sheet carrier to buffer the sheet carrier and the sheet carried by the sheet carrier.

6. The sheet buffer device according to claim 5, characterized in that, The caching component also includes: A positioning roller is rotatably connected to the support assembly. The axis of the positioning roller is perpendicular to the first direction and also perpendicular to the vertical direction. The vertical height of the top of the positioning roller is greater than the vertical height of the top of the support wheel.

7. The sheet buffer device according to any one of claims 1 to 4, characterized in that, The caching component also includes: The mounting assembly is rotatably connected to the support assembly about a horizontal axis extending along the first direction. The mounting assembly has a first abutment surface facing the support assembly, and the support assembly has a second abutment surface and a third abutment surface set at an angle. When the sheet buffer device is in operation, the support assembly can rotate about the horizontal axis so that the first abutment surface is parallel to the second abutment surface. When the sheet buffer device is in maintenance mode, the support assembly can rotate about the horizontal axis so that the first abutment surface is parallel to the third abutment surface. The first, second, and third abutment surfaces are all parallel to the horizontal axis, and the first abutment surface is also parallel to the vertical direction. The locking assembly, when the sheet buffer device is in the working state, can extend between the first abutment surface and the second abutment surface, and abut against the first abutment surface and the second abutment surface respectively, to lock the support assembly and the mounting assembly; when the sheet buffer device is in the maintenance state, the locking assembly can extend between the first abutment surface and the third abutment surface, and abut against the first abutment surface and the third abutment surface respectively, to lock the support assembly and the mounting assembly.

8. The sheet buffer device according to claim 7, characterized in that, The installation components include: Two first vertical mounting plates are arranged opposite each other, and the support assembly is rotatably connected to the first vertical mounting plates about the horizontal axis; The second vertical mounting plate connects the two first vertical mounting plates and has the first abutting surface; The supporting assembly includes a plate-shaped rotating part having a second abutment surface and a third abutment surface, the rotating part extending between two first vertical mounting plates; and / or, the locking assembly includes a locking part and a limiting part connected to each other, the locking part extending between the first abutment surface and the second abutment surface or between the first abutment surface and the third abutment surface, the limiting part abutting against the upper surface of the first vertical mounting plate or the second vertical mounting plate.

9. The sheet buffer device according to any one of claims 1 to 4, characterized in that, Also includes: A heat insulation component, connected to the buffer component, is configured to isolate the buffer component from the process furnace.

10. A sheet material buffering system, characterized in that, include: Frame; At least two sheet buffer devices as described in any one of claims 1 to 9 are connected to the frame; Wherein, when the sheet buffer system includes multiple sheet buffer devices, the multiple sheet buffer devices are arranged at intervals in the vertical direction, and / or, the multiple sheet buffer devices are arranged sequentially in the horizontal direction.

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