Conveying device and conveying equipment

Abstract

The utility model provides a conveying device and conveying equipment, relates to the field of processing of semiconductors or photovoltaic materials, and solves the technical problem that powder of a belt falls off or even is broken due to the fact that the carrier is driven to move based on hard friction force between the belt and the carrier. The conveying device comprises a fixing assembly; the driving wheel assembly is rotationally connected with the first end of the fixing assembly around a first axis; the driven wheel assembly is rotationally connected with the second end of the fixing assembly around a second axis; the driving assembly is in transmission connection with the driving wheel assembly; the conveying belt sleeves the driving wheel assembly and the driven wheel assembly; the at least one first positioning structure is connected with the conveying belt, and the first positioning structure can be connected with the second positioning structure of the carrier; the rolling parts are arranged in the first direction and rotationally connected with the fixing assembly. The carrier is only in contact with the first positioning structure and the rolling piece and is not in contact with the conveying belt, so that powder falling and even breakage of the conveying belt caused by hard friction between the carrier and the conveying belt are avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and in particular to a conveying device and a conveying equipment. BACKGROUND

[0002] The photovoltaic industry is a rapidly developing industry. With the continuous progress of technology, the efficiency of solar panels is getting higher and higher, and the price is also declining. In the photovoltaic industry, the conveying line is an important transportation tool for graphite boats and quartz boats, and has been widely used.

[0003] In the photovoltaic coating industry, the conveying line is mainly used to transport graphite boats, quartz boats and flower baskets. The carrier conveying line of the new type of photovoltaic equipment is suitable for various photovoltaic equipment production, assembly and testing processes. For example, solar cell production line, photovoltaic inverter production line, photovoltaic energy storage battery production line, etc. As a link connecting various production processes, the conveying line can significantly improve production efficiency, reduce manual intervention and reduce production cost. At the same time, the stable operation of the conveying line can also guarantee the quality of the solar panels and reduce the rate of defective products caused by damage or error in the transmission process. With the continuous development and expansion of the photovoltaic industry, the application prospect of the new type of carrier conveying line will be more and more broad. The equipment used in the photovoltaic coating equipment is mainly plasma enhanced chemical vapor deposition (PECVD), low pressure chemical vapor deposition (LPCVD), boron diffusion, annealing, etc.

[0004] In the related art, the carrier conveying line used in the photovoltaic industry is mostly placed directly on the belt, and the carrier is driven to move by the hard friction between the belt and the carrier. However, through this way, after long-term use, the phenomenon of belt powdering and even breaking may occur, thereby affecting the production capacity of the entire machine. Practical new type content

[0005] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a conveying device and a conveying equipment.

[0006] In a first aspect, an embodiment of the present application provides a conveying device for transporting a carrier loaded with a sheet in a photovoltaic processing apparatus, comprising: a fixed assembly extending along a first direction, the fixed assembly having a first end and a second end in the first direction; a driving wheel assembly rotatably connected to the first end of the fixed assembly about a first axis; a driven wheel assembly rotatably connected to the second end of the fixed assembly about a second axis parallel to the first axis; a driving assembly in transmission connection with the driving wheel assembly and configured to drive the driving wheel assembly to rotate; a conveying belt sleeved on the driving wheel assembly and the driven wheel assembly and moving under the driving of the driving wheel assembly; at least one first positioning structure connected with the conveying belt and capable of moving with the conveying belt, the first positioning structure being capable of connecting with a second positioning structure of the carrier to drive the carrier to move along the first direction; and a plurality of rolling members arranged along the first direction and rotatably connected with the fixed assembly and configured to carry the carrier, the rolling members being capable of rolling under the driving of the carrier when the carrier moves along the first direction.

[0007] In some embodiments, the second positioning structure has a first clamping groove, and the first positioning structure comprises: a first clamping block connected with the conveying belt and capable of moving with the conveying belt, the first clamping block being capable of clamping with the first clamping groove to drive the carrier to move along the first direction; or the first positioning structure has a third clamping groove, and the second positioning structure comprises: a second clamping block capable of clamping with the third clamping groove to enable the first positioning structure to drive the carrier to move along the first direction.

[0008] In some embodiments, the number of the first positioning structures is at least two, and the number of the second positioning structures is at least two; wherein at least one first positioning structure is configured to connect with at least one second positioning structure when the conveying device transports the carrier in a direction from the first end of the fixed assembly to the second end of the fixed assembly, and at least another first positioning structure is configured to connect with at least another second positioning structure when the conveying device transports the carrier in a direction from the second end of the fixed assembly to the first end of the fixed assembly.

[0009] In some embodiments, the first positioning structure has a first threaded portion; wherein the conveying belt comprises: a bearing portion having a through hole; a synchronization tooth connected with the bearing portion, the synchronization tooth having a second threaded portion, the synchronization tooth being capable of engaging with the driving wheel assembly and the driven wheel assembly, the first positioning structure being located on a side of the bearing portion away from the synchronization tooth; and a first threaded member in threaded connection with the first threaded portion and passing through the through hole and being in threaded connection with the second threaded portion.

[0010] In some embodiments, the fixed assembly comprises: at least one fixed member extending along the first direction; a mandrel connected with the fixed member; and a rolling member bearing, an inner ring of the rolling member bearing being sleeved on the mandrel, and a rolling member being connected with an outer ring of the rolling member bearing.

[0011] In some embodiments, the fixing assembly further comprises: at least two pressing blocks, sleeved on the mandrel and located on both sides of the rolling member.

[0012] In some embodiments, the driven wheel assembly comprises: a driven shaft, the driven shaft having a third threaded portion extending in the first direction; a driven wheel, the driven wheel sleeved on the driven shaft, the conveyor belt sleeved on the driven wheel; wherein the fixing assembly further comprises: a driven support plate connected with the fixing member, the driven support plate having a waist-shaped hole extending in the first direction and a fourth threaded portion extending in the first direction, the driven shaft passing through the waist-shaped hole; and a second screwing member screwing with the third threaded portion and the fourth threaded portion.

[0013] In some embodiments, the number of the fixing members is two, and the two fixing members are oppositely arranged; wherein the fixing assembly further comprises: two side plates respectively connected with the two fixing members, the side plates extending in the first direction, the side plates having a first end and a second end in the first direction, the carrier being capable of moving between the two side plates when the carrier is transported by the conveying device, the two side plates being configured to guide the carrier; two driving support plates respectively connected with the two fixing members, the driving wheel assembly being rotationally connected with the driving support plates about the first axis; and two guide blocks respectively located on the side of the first end of the two side plates away from the second end, and the two guide blocks being respectively connected with the two driving support plates, the distance between the opposite surfaces of the two guide blocks gradually decreasing from the direction in which the first end of the side plate points to the second end of the side plate.

[0014] In some embodiments, the conveying device further comprises: a sensor arranged at one end of the fixing assembly and configured to detect whether the conveying device carries the carrier; and a controller communicatively connected with the sensor and the driving assembly, the sensor being capable of sending a material signal to the controller when the sensor detects that the conveying device carries the carrier, the controller being capable of sending a start signal to the driving assembly after receiving the material signal, and the driving assembly being capable of driving the driving wheel assembly to rotate after receiving the start signal.

[0015] In the second aspect, an embodiment of the present application provides a conveying device, comprising: a carrier, the carrier having at least one second positioning structure, the carrier being configured to carry a sheet; and the conveying device of any one of the above first aspect, the first positioning structure of the conveying device being capable of being connected with the second positioning structure, and the conveying device being configured to convey the carrier.

[0016] The conveying device and conveying equipment provided in this application embodiment can drive the drive wheel assembly to rotate, thereby driving the conveyor belt to move. The movement of the conveyor belt can drive the first positioning structure to move, and the movement of the first positioning structure can drive the carrier carried by the rolling elements to move. Since the carrier only contacts the first positioning structure and the rolling elements, and not the conveyor belt, the phenomenon of conveyor belt dusting or even breakage caused by hard friction between the carrier and the conveyor belt will not occur, thereby reducing the replacement frequency of the conveyor belt. Furthermore, since the friction between the rolling elements and the carrier is rolling friction, the wear degree of the rolling elements and the carrier is reduced. In addition, in related technologies, the carrier is usually transported by two belts, while in the above embodiment, only a single conveyor belt is used to transport the carrier, saving installation space, and is convenient to maintain, inexpensive, and easy to assemble. Attached Figure Description

[0017] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The image shown is a front view of a conveying device provided in an exemplary embodiment of this application.

[0019] Figure 2 The image shown is a top view of a conveying device provided in an exemplary embodiment of this application.

[0020] Figure 3 The image shown is an exemplary embodiment of this application. Figure 1 The conveying device shown is a cross-sectional view along the DD direction.

[0021] Figure 4 The image shown is an exemplary embodiment of this application. Figure 1 The conveying device shown is a cross-sectional view along the AA direction.

[0022] Figure 5 The image shown is an exemplary embodiment of this application. Figure 2 The diagram shows a partial enlarged view of the conveyor device in region E.

[0023] Figure 6 The image shown is an exemplary embodiment of this application. Figure 5 The diagram shows a partial enlarged view of the conveying device in region F.

[0024] Figure 7 The image shown is an exemplary embodiment of this application. Figure 2A sectional view of the conveying device along the BB direction is shown.

[0025] Figure 8 A sectional view of the conveying device along the CC direction is shown. Figure 7 A sectional view of the conveying device along the CC direction is shown.

[0026] Figure 9 A sectional view of the conveying device along the CC direction is shown. Figure 1 A sectional view of the conveying device along the CC direction is shown.

[0027] Figure 10 A sectional view of the conveying device along the CC direction is shown. Figure 2 A sectional view of the conveying device along the CC direction is shown.

[0028] Figure 11 A sectional view of the conveying device along the CC direction is shown. Figure 1 A sectional view of the conveying device along the CC direction is shown.

[0029] Reference signs:

[0030] 10, first axis; 20, second axis; 30, third axis; 100, conveying device; 101, fixed assembly; 1011, first end of the fixed assembly; 1012, second end of the fixed assembly; 1013, fixed piece; 1014, driving support plate; 1015, mandrel; 1016, rolling piece bearing; 1017, pressing block; 1018, driven support plate; 10181, waist-shaped hole; 1019, second screw piece; 10191, side plate; 10192, guide block; 102, driving wheel assembly; 1021, driving shaft; 1022, driving wheel; 1023, driving side spacer sleeve; 103, driven wheel assembly; 1031, driven shaft; 1032, driven wheel; 1033, driven side spacer sleeve; 104, driving assembly; 1041, motor; 1042, speed reducer; 1043, shaft coupling; 1044, motor mounting seat; 105, conveying belt; 1051, bearing part; 1052, first screw piece; 106, first positioning structure; 107, rolling piece; 108, sensor; 109, first support piece; 110, second support piece; 200, carrier; 210, boat structure; 220, boat support; 221, first clamping groove; 300, conveying equipment. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0032] Figure 1 The image shown is a front view of a conveying device provided in an exemplary embodiment of this application. Figure 2 The image shown is a top view of a conveying device provided in an exemplary embodiment of this application. Figure 3 The image shown is an exemplary embodiment of this application. Figure 1 The diagram shows a cross-sectional view of the conveying device along the DD direction. Figure 4 The image shown is an exemplary embodiment of this application. Figure 1 The cross-sectional view of the conveying device shown is along the AA direction. Figure 5 The image shown is an exemplary embodiment of this application. Figure 2 The diagram shows a partial enlarged view of the conveyor device in region E. Figure 6 The image shown is an exemplary embodiment of this application. Figure 5 The diagram shows a partial enlarged view of the conveying device in region F. Figure 7 The image shown is an exemplary embodiment of this application. Figure 2 The cross-sectional view of the conveying device shown is along the BB direction. Figure 8 The image shown is an exemplary embodiment of this application. Figure 7 The diagram shows a partial enlarged view of the conveyor device in region G. Figure 9 The image shown is an exemplary embodiment of this application. Figure 1 The conveying device shown is a cross-sectional view along the CC direction.

[0033] like Figures 1-9 As shown, this application embodiment provides a conveying device 100 for transporting a carrier 200 loaded with sheet materials in a photovoltaic processing equipment. The conveying device 100 includes: a fixing component 101, a driving wheel assembly 102, a driven wheel assembly 103, a drive assembly 104, a conveyor belt 105, at least one first positioning structure 106, and a plurality of rolling elements 107. The fixing component 101 is along a first direction (e.g., Figure 1 and Figure 2The fixed assembly 101 extends along the first direction (X direction shown in the figure), and has a first end 1011 and a second end 1012 in the first direction. The driving wheel assembly 102 is rotationally connected to the first end 1011 of the fixed assembly 101 about the first axis 10. The driven wheel assembly 103 is rotationally connected to the second end 1012 of the fixed assembly 101 about the second axis 20, which is parallel to the first axis 10. The driving assembly 104 is drivingly connected to the driving wheel assembly 102 and configured to drive the driving wheel assembly 102 to rotate. The conveying belt 105 is sleeved on the driving wheel assembly 102 and the driven wheel assembly 103 and moves under the driving of the driving wheel assembly 102. At least one first positioning structure 106 is connected to the conveying belt 105 and can move with the conveying belt 105. The first positioning structure 106 can be connected to a second positioning structure of the carrier 200 to drive the carrier 200 to move along the first direction. A plurality of rolling members 107 are arranged along the first direction and rotationally connected to the fixed assembly 101 and configured to carry the carrier 200. The rolling members 107 can roll under the driving of the carrier 200 when the carrier 200 moves along the first direction.

[0034] As shown in Figure 2 , Figure 3 , Figure 5 and Figure 6 exemplarily, the fixed assembly 101 includes two fixed members 1013 (such as profiles), two driving support plates 1014 and two driving side bearings. The fixed members 1013 extend along the first direction, and the two fixed members 1013 are oppositely arranged. Each driving support plate 1014 is connected (such as by screws) to one fixed member 1013 and has a driving side mounting hole. The two driving side bearings are arranged in the driving side mounting holes of the two driving support plates 1014, respectively. The driving wheel assembly 102 includes a driving shaft 1021, a driving wheel 1022 and two driving side spacers 1023. The two ends of the driving shaft 1021 are connected to the inner rings of the two driving side bearings, respectively. The conveying belt 105 is sleeved on the driving wheel 1022. The driving wheel 1022 and the two driving side spacers 1023 are sleeved on the driving shaft 1021, and each driving side spacer 1023 is located between the driving wheel 1022 and one driving side bearing.

[0035] As shown in Figure 3 exemplarily, the driving assembly 104 includes a motor 1041, a speed reducer 1042, a coupling 1043 and a motor mounting seat 1044. The motor mounting seat 1044 is connected to the driving support plate 1014. The speed reducer 1042 is mounted on the motor mounting seat 1044. The motor 1041 is drivingly connected to the speed reducer 1042. The speed reducer 1042 is drivingly connected to the driving shaft 1021 through the coupling 1043.

[0036] As shown in the figure, the rolling members 107 can be rollers, wheels or bearings, and the driving wheel 1022 is a synchronous pulley.

[0037] Exemplarily, the rolling member 107 is rotationally connected with the fixing assembly 101 around a third axis 30 which is parallel to the first axis 10.

[0038] In the above embodiment, the driving assembly 104 can drive the driving wheel assembly 102 to rotate, so as to drive the conveying belt 105 to move, and the movement of the conveying belt 105 can drive the first positioning structure 106 to move, and the movement of the first positioning structure 106 can drive the carrier 200 carried by the rolling member 107 to move. Since the carrier 200 only contacts with the first positioning structure 106 and the rolling member 107, and does not contact with the conveying belt 105, the phenomenon of the conveying belt 105 being broken due to the hard friction between the carrier 200 and the conveying belt 105 does not occur, so that the replacement frequency of the conveying belt 105 can be reduced. Moreover, the friction between the rolling member 107 and the carrier 200 is rolling friction, so that the wear degree of the rolling member 107 and the carrier 200 is reduced. In addition, in the related art, the carrier 200 is usually transported by two belts, while in the above embodiment, the carrier 200 can be transported by only one conveying belt 105, so that the installation space is saved, and the maintenance is convenient, the cost is cheap, and the assembly is simple.

[0039] In some embodiments, as shown in Figure 8 The second positioning structure has a first clamping groove 221, and the first positioning structure 106 comprises a first clamping block. The first clamping block is connected with the conveying belt 105 and can move with the conveying belt 105, and the first clamping block can be clamped with the first clamping groove 221 to drive the carrier 200 to move in the first direction.

[0040] In the above embodiment, the first clamping block can be clamped with the first clamping groove 221, so that the conveying belt 105 can drive the carrier 200 to move in the first direction, and the structure is simple and easy to produce.

[0041] In some embodiments, the first positioning structure 106 has a third clamping groove, and the second positioning structure comprises a second clamping block. The second clamping block can be clamped with the third clamping groove to enable the first positioning structure 106 to drive the carrier 200 to move in the first direction.

[0042] In the above embodiment, the second clamping block can be clamped with the third clamping groove, so that the conveying belt 105 can drive the carrier 200 to move in the first direction, and the structure is simple and easy to produce.

[0043] In some embodiments, as shown in Figure 2 and Figure 7As shown, the number of the first positioning structures 106 is at least two, and the number of the second positioning structures is at least two. At least one of the first positioning structures 106 is configured to be connected with at least one of the second positioning structures when the conveying device 100 transports the carrier 200 in a direction from the first end 1011 of the fixing assembly 101 to the second end 1012 of the fixing assembly 101. At least another of the first positioning structures 106 is configured to be connected with at least another of the second positioning structures when the conveying device 100 transports the carrier 200 in a direction from the second end 1012 of the fixing assembly 101 to the first end 1011 of the fixing assembly 101.

[0044] In the above embodiment, by providing at least two first positioning structures 106 and making the carrier 200 have at least two second positioning structures, the conveying device 100 can flexibly convey the carrier 200 in two directions.

[0045] Figure 10 As shown in an exemplary embodiment of the present application Figure 2 A local enlarged view of the H region in the conveying device.

[0046] In some embodiments, as Figure 10 As shown, the first positioning structure 106 has a first threaded portion. The conveying belt 105 includes a bearing portion 1051, a synchronization tooth, and a first screwing piece 1052. The bearing portion 1051 has a through hole. The synchronization tooth is connected with the bearing portion 1051, and has a second threaded portion. The synchronization tooth can be engaged with the driving wheel assembly 102 and the driven wheel assembly 103. The first positioning structure 106 is located on a side of the bearing portion 1051 away from the synchronization tooth. The first screwing piece 1052 is screwed with the first threaded portion and passes through the through hole to be screwed with the second threaded portion.

[0047] Exemplarily, the first positioning structure 106 has a first threaded hole, the first threaded portion is a thread in the first threaded hole, the synchronization tooth has a second threaded hole, the second threaded portion is a thread in the second threaded hole, and the first screwing piece 1052 is a screw or a bolt.

[0048] In the above embodiment, by such a structure, the first positioning structure 106 can be stably fixed, and the structure is simple and easy to maintain.

[0049] In some embodiments, as Figure 3 and Figure 5 As shown, the fixing assembly 101 includes at least one fixing piece 1013, a mandrel 1015, and a rolling piece bearing 1016. The at least one fixing piece 1013 extends in the first direction. The mandrel 1015 is connected with the fixing piece 1013. The inner ring of the rolling piece bearing 1016 is sleeved on the mandrel 1015, and the rolling piece 107 is connected with the outer ring of the rolling piece bearing 1016.

[0050] For example, the fastener 1013 has a second slot, and the spindle 1015 engages with the second slot.

[0051] For example, the fastener 1013 has two rows of opposing second slots, with a plurality of second slots in each row arranged along a first direction. One end of the spindle 1015 engages with one of the second slots in one row, and the other end of the spindle 1015 engages with one of the second slots in the other row.

[0052] In the above embodiments, this structure enables the rolling element 107 to rotate, and the structure is simple and easy to maintain.

[0053] In some embodiments, such as Figure 3 and Figure 5 As shown, the fixing assembly 101 further includes at least two pressure blocks 1017. The at least two pressure blocks 1017 are sleeved on the spindle 1015 and located on both sides of the rolling element 107.

[0054] In the above embodiments, by setting the pressure block 1017, the position of the rolling element 107 on the spindle 1015 can be limited to prevent the rolling element 107 from displacing along the extension direction of the spindle 1015.

[0055] Figure 11 The image shown is an exemplary embodiment of this application. Figure 1 A magnified view of a portion of the conveying device in region I.

[0056] In some embodiments, such as Figure 9 and Figure 11 As shown, the driven wheel assembly 103 includes a driven shaft 1031 and a driven wheel 1032. The driven shaft 1031 has a third threaded portion extending in a first direction. The driven wheel 1032 is sleeved on the driven shaft 1031, and the conveyor belt 105 is sleeved on the driven wheel 1032. The fixing assembly 101 further includes a driven support plate 1018 and a second threaded member 1019. The driven support plate 1018 is connected to the fixing member 1013 (e.g., by screws), and has a slotted hole 10181 extending in the first direction and a fourth threaded portion extending in the first direction. The driven shaft 1031 passes through the slotted hole 10181. The second threaded member 1019 is screwed to the third and fourth threaded portions.

[0057] For example, the driven shaft 1031 has a third threaded hole extending in a first direction, and the third threaded portion is the thread within the third threaded hole. The driven support plate 1018 has a fourth threaded hole extending in the first direction, and the fourth threaded portion is the thread within the fourth threaded hole. The second screw 1019 is a screw or bolt.

[0058] For example, the driven pulley 1032 is a synchronous belt pulley.

[0059] Exemplarily, the driven wheel assembly 103 further comprises two driven side spacers 1033. The two driven side spacers 1033 are sleeved on the driven shaft 1031 and are arranged on both sides of the driven wheel 1032.

[0060] In the above embodiment, by adjusting the screwing position of the second screwing member 1019 and the fourth threaded portion, the position of the driven shaft 1031 in the first direction can be adjusted, so as to tension the conveying belt 105.

[0061] In some embodiments, as shown in Figure 1 and Figure 5 The number of the fixing members 1013 is two, and the two fixing members 1013 are oppositely arranged. The fixing assembly comprises two side plates 10191, two driving support plates 1014 and two guide blocks 10192. The two side plates 10191 are respectively connected with the two fixing members 1013, the side plates 10191 extend along the first direction, the side plates 10191 have a first end 101911 and a second end 101912 in the first direction, the carrier 200 can move between the two side plates 10191 when the conveying device transports the carrier 200, and the two side plates 10191 are configured to guide the carrier 200. The two driving support plates 1014 are respectively connected with the two fixing members 1013, and the driving wheel assembly 102 is rotationally connected with the driving support plates 1014 about the first axis. The two guide blocks 10192 are respectively located on the side of the first end of the two side plates 10191 away from the second end, and the two guide blocks 10192 are respectively connected with the two driving support plates 1014. The distance between the opposite surfaces of the two guide blocks 10192 gradually decreases in the direction from the first end of the side plates 10191 to the second end of the side plates 10191.

[0062] In the above embodiment, by arranging the two side plates 10191, the carrier 200 can be guided, so as to avoid deviation of the carrier 200 during transportation. By arranging the guide blocks 10192, the carrier 200 can be conveniently guided from the previous process into between the two side plates 10191 of the conveying device 100.

[0063] In some embodiments, as shown in Figure 2 The plurality of rolling members 107 are arranged in two rows, and the plurality of rolling members 107 in each row are sequentially arranged along the first direction. The two rows of rolling members 107 are respectively configured to support the two sides of the carrier 200.

[0064] In the above embodiment, by arranging the two rows of rolling members 107, the two sides of the carrier 200 can be stably supported, so as to avoid overturning of the carrier 200.

[0065] In some embodiments, as shown in Figure 4As shown, the conveying device 100 further comprises a sensor 108 and a controller. The sensor 108 is arranged at one end (which can be the first end 1011 and / or the second end 1012) of the fixed assembly 101 and is configured to detect whether the conveying device 100 carries the carrier 200. The controller is in communication connection with the sensor 108 and the driving assembly 104. In the case where the sensor 108 detects that the conveying device 100 carries the carrier 200, the sensor 108 can send a signal to the controller, and the controller can send a start signal to the driving assembly 104 after receiving the signal, and the driving assembly 104 can drive the driving wheel assembly 102 to rotate after receiving the start signal.

[0066] Exemplarily, the sensor 108 is a travel switch.

[0067] Exemplarily, the number of sensors 108 is two, and the two sensors 108 are arranged at the two ends of the fixed assembly 101, respectively.

[0068] In the above embodiment, by arranging the sensor 108 and the controller, the conveying device 100 can automatically realize the conveying of the carrier 200.

[0069] In some embodiments, as Figure 1 As shown, the conveying device 100 further comprises at least one set of support assembly. Each set of support assembly comprises at least two first support members 109 and at least one second support member 110. For each set of support assembly, the two first support members 109 are connected to the bottom of the fixed member 1013, and the second support member 110 is connected to the two first support members 109 through screws.

[0070] Exemplarily, the first support member 109 comprises a vertical part and a horizontal part connected to each other, the vertical part extends in the vertical direction, and the horizontal part extends in the horizontal direction.

[0071] In summary, in actual application, when the carrier 200 is conveyed to one end of the conveying device 100 by the inserting piece machine, the carrier 200 is carried by the rolling member 107, the carrier 200 triggers the sensor 108, the driving assembly 104 drives the driving wheel assembly 102 to move, drives the conveying belt 105 to move, and then drives the first positioning structure 106 to move, so that the first positioning structure 106 is connected with the second positioning structure, thereby driving the carrier 200 to move.

[0072] Based on the same concept, as Figure 1 and Figure 2As shown, the embodiment of the present application further provides a conveying device 300, which comprises the carrier 200 and the conveying device 100 in the above embodiment. The carrier 200 has at least one second positioning structure, and the carrier 200 is configured to carry the sheet. The first positioning structure 106 of the conveying device 100 is capable of connecting with the second positioning structure, and the conveying device 100 is configured to convey the carrier 200.

[0073] Exemplarily, the conveying device 300 can be applied to a plasma enhanced chemical vapor deposition (PECVD) device, a low pressure chemical vapor deposition (LPCVD) device, a boron diffusion device, an annealing device, etc.

[0074] Exemplarily, as shown in Figure 4 and Figure 7 The carrier 200 comprises a boat structure 210 and a boat holder 220. The boat structure 210 is placed on the boat holder 220, and the bottom of the boat holder 220 has a first clamping groove 221. The first positioning structure 106 comprises a first clamping block, and the first clamping block is clamped with the first clamping groove 221.

[0075] Exemplarily, the bottom of the boat holder 220 has one first clamping groove 221 at each end, and the conveying device 100 comprises two first clamping blocks. Each first clamping groove 221 is capable of being clamped with one first clamping block.

[0076] Exemplarily, the material of the boat structure 210 is graphite or quartz.

[0077] Exemplarily, the carrier 200 is a boat.

[0078] Exemplarily, the sheet is a silicon wafer, a wafer, a glass substrate, etc.

[0079] The above describes the basic principles of the present application in combination with specific embodiments. However, it should be pointed out that the advantages, advantages, effects, etc. mentioned in the present application are only examples and are not limited. These advantages, advantages, effects, etc. cannot be considered as the must-haves of each embodiment of the present application. In addition, the above specific details are only for the purpose of example and understanding, and are not limited to the above specific details. The present application can be realized without the above specific details.

[0080] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0081] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0082] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0083] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A conveying device for transporting a carrier loaded with a sheet in a photovoltaic processing plant, characterized in that, The device comprises: a fixed assembly extending along a first direction, the fixed assembly having a first end and a second end in the first direction; a driving wheel assembly rotatably connected to the first end of the fixed assembly about a first axis; a driven wheel assembly rotatably connected to the second end of the fixed assembly about a second axis parallel to the first axis; a driving assembly drivingly connected to the driving wheel assembly and configured to drive the driving wheel assembly to rotate; a conveyor belt sleeved on the driving wheel assembly and the driven wheel assembly and moving under the driving of the driving wheel assembly; at least one first positioning structure connected to the conveyor belt and capable of moving with the conveyor belt, the first positioning structure being connectable to a second positioning structure of a carrier to drive the carrier to move along the first direction; a plurality of rolling members arranged along the first direction and rotatably connected to the fixed assembly and configured to carry the carrier, the rolling members being capable of rolling under the driving of the carrier when the carrier moves along the first direction.

2. The conveying device according to claim 1, wherein the second positioning structure has a first clamping groove, and the first positioning structure comprises: a first clamping block connected to the conveyor belt and capable of moving with the conveyor belt, the first clamping block being clamped with the first clamping groove to drive the carrier to move along the first direction; or the first positioning structure has a third clamping groove, and the second positioning structure comprises: a second clamping block capable of being clamped with the third clamping groove to enable the first positioning structure to drive the carrier to move along the first direction. The number of the first positioning structures is at least two, and the number of the second positioning structures is at least two; 3. The delivery device of claim 1 or 2, wherein, at least one of the first positioning structures is configured to be connected to at least one of the second positioning structures when the conveying device transports the carrier in a direction from the first end of the fixed assembly to the second end of the fixed assembly; at least another of the first positioning structures is configured to be connected to at least another of the second positioning structures when the conveying device transports the carrier in a direction from the second end of the fixed assembly to the first end of the fixed assembly. The first positioning structure has a first threaded portion; 4. The delivery device of claim 1 or 2, wherein, The conveyor belt comprises: a bearing portion having a through hole; a synchronization tooth connected to the bearing portion, the synchronization tooth having a second threaded portion, the synchronization tooth being capable of engaging with the driving wheel assembly and the driven wheel assembly, the first positioning structure being located on a side of the bearing portion away from the synchronization tooth; a first threaded member being screwed with the first threaded portion and passing through the through hole and being screwed with the second threaded portion. The fixed assembly comprises:

5. The delivery device of claim 1 or 2, wherein, at least one fixed member extending along the first direction; a mandrel connected to the fixed member; a rolling member bearing, an inner ring of the rolling member bearing being sleeved on the mandrel, and an outer ring of the rolling member bearing being connected to the rolling member. The fixed assembly further comprises:

6. The delivery device of claim 5, wherein, at least two pressing blocks sleeved on the mandrel and located on both sides of the rolling member. The driven wheel assembly comprises:

7. The delivery device of claim 5, wherein, ​ a driven shaft having a third threaded portion extending along the first direction; a driven wheel sleeved on the driven shaft, the conveyor belt being sleeved on the driven wheel; wherein the fixing assembly further comprises: a driven support plate connected with the fixing member, the driven support plate having a waist-shaped hole extending along the first direction and a fourth threaded portion extending along the first direction, the driven shaft being threaded through the waist-shaped hole; a second screwing member screwing with the third threaded portion and the fourth threaded portion.

8. The delivery device of claim 5, wherein, the number of the fixing members is two, the two fixing members being oppositely arranged; wherein the fixing assembly further comprises: two side plates respectively connected with the two fixing members, the side plates extending along the first direction, the side plates having a first end and a second end in the first direction, the carrier being capable of moving between the two side plates when the carrier is transported by the conveying device, the two side plates being configured to guide the carrier; two driving support plates respectively connected with the two fixing members, the driving wheel assembly being rotationally connected with the driving support plates about the first axis; two guide blocks respectively located on the side of the first end of the two side plates away from the second end, and the two guide blocks being respectively connected with the two driving support plates, the distance between the opposite faces of the two guide blocks gradually decreasing in the direction from the first end of the side plates to the second end of the side plates.

9. The delivery device of claim 1 or 2, wherein, further comprising: a sensor arranged at one end of the fixing assembly and configured to detect whether the conveying device carries the carrier; a controller communicatively connected with the sensor and the driving assembly, the sensor being capable of sending a material signal to the controller when the sensor detects that the conveying device carries the carrier, the controller being capable of sending a starting signal to the driving assembly after receiving the material signal, and the driving assembly being capable of driving the driving wheel assembly to rotate after receiving the starting signal.

10. A delivery apparatus characterized by, comprising: a carrier having at least one second positioning structure, the carrier being configured to carry a sheet; the conveying device of any one of claims 1-9, the first positioning structure of the conveying device being capable of being connected with the second positioning structure, and the conveying device being configured to convey the carrier.

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