Transport equipment and process system

Abstract

The utility model relates to the technical field of semiconductors or photovoltaics, in particular to transportation equipment and a process system, and aims to solve the problems that the transportation equipment is large in occupied area and low in productivity. The transportation equipment comprises a rotating device, a sheet taking and placing device, a bearing structure, a temporary storage device, a sheet carrying structure carrying device and a bearing structure conveying device, the temporary storage device comprises a processed placing position and a sheet changing temporary storage position, and the processed placing position can be specially used for temporarily storing the bearing structure loaded with processed sheets; the chip changing cache position can mainly cache the first chip carrying structure for chip changing, the bearing structure can be moved to the chip changing cache position from the processed placing position, working procedure mixing can be avoided, and the idling time of transportation equipment is shortened; and the processed placing position can simultaneously receive a newly-discharged bearing structure for bearing processed sheets, so that discharging and sheet changing are synchronously carried out, and the transportation efficiency and the throughput capacity are improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and more particularly to a transportation device and process system. Background Technology

[0002] With the rapid development of photovoltaic and semiconductor technologies, the application of automation technology has become an important direction for production line upgrades in today's pursuit of high-efficiency production, and transportation equipment is the key to achieving large-scale, high-efficiency production.

[0003] However, existing transportation equipment is inefficient in loading and unloading and occupies a large area. Utility Model Content

[0004] In view of this, embodiments of this application provide a transportation equipment and process system to solve the problems of low loading efficiency and large footprint of transportation equipment.

[0005] In a first aspect, one embodiment of this application provides a transport device for conveying sheets to be processed to one or more process devices and outputting processed sheets. The process device has a process chamber capable of accommodating multiple first sheet carrier structures in an upright state. The first sheet carrier structures are used to carry multiple sheets to be processed, and the sheets to be processed are processed to form processed sheets. The transport device includes: one or more rotating devices for carrying and rotating the first sheet carrier structures to position them in an upright or horizontal state; and a sheet picking and placing device, disposed adjacent to the rotating devices, which, when the rotating devices drive the first sheet carrier structures to a horizontal state, places multiple sheets to be processed into and / or removes sheets from the first sheet carrier structures. Multiple processed sheets; one or more support structures for supporting multiple first sheet carrier structures in an upright state; a buffer device including a processed placement position and a sheet-changing buffer position, wherein the processed placement position is used to place the support structure carrying the first sheet carrier structure containing the processed sheets, and the support structure can be moved from the processed placement position to the sheet-changing buffer position; a sheet carrier structure transport device for transporting the first sheet carrier structure in an upright state between the sheet-changing buffer position and a rotating device; a support structure conveying device, arranged adjacent to the buffer device, for conveying the support structure buffered by the buffer device and carrying the first sheet carrier structure containing the sheets to be processed to the process equipment, and outputting the support structure carrying the first sheet carrier structure containing the processed sheets from the process equipment.

[0006] Secondly, one embodiment of this application provides a process system, including: one or more process devices, each process device having a process chamber capable of accommodating a plurality of first sheet carrier structures in an upright state; and a transport device mentioned in any of the first aspects, disposed adjacent to one or more process devices, for transporting the sheet to be processed to the process devices.

[0007] The transport equipment provided in this embodiment features a first sheet carrier structure that is supported by a rotating device and kept horizontal during loading. This allows the first sheet carrier structure to support more sheets more stably, enabling it to be designed to be larger and accommodate more sheets, thus improving loading efficiency. Furthermore, the first sheet carrier structure is transported vertically except during loading, reducing the footprint of the transport equipment. In addition, the support structure allows multiple first sheet carrier structures to simultaneously load the process equipment, further improving loading efficiency.

[0008] Furthermore, the buffer device includes a pre-processed sheet placement position and a sheet-changing buffer position. The pre-processed sheet placement position can be used to temporarily store the carrier structure carrying the pre-processed sheet, while the sheet-changing buffer position mainly buffers the first carrier structure during sheet changing. The carrier structure can be moved from the pre-processed sheet placement position to the sheet-changing buffer position, which can avoid process mixing and reduce the idle time of the transport equipment. Moreover, when the first carrier structure in the sheet-changing buffer position is changing sheets, the pre-processed sheet placement position can simultaneously receive the carrier structure carrying the newly unloaded pre-processed sheet, realizing synchronous unloading and sheet changing, improving transport efficiency and throughput.

[0009] Meanwhile, transportation equipment and process equipment can form a process system. Since the process equipment can process multiple sheets to be processed carried by the first carrier structure in an upright state, the footprint of the process equipment is reduced and the process efficiency of the process equipment is improved. This reduces the footprint of the process system and improves the production efficiency and unit area capacity of the process system. Attached Figure Description

[0010] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0011] Figure 1 The diagram shown is a structural schematic of a transportation device and a process device provided in an embodiment of this application.

[0012] Figure 2 The image shown is a top view of a transportation device and a process device provided in an embodiment of this application.

[0013] Figure 3 The diagram shown is a structural schematic of a transportation device provided in an embodiment of this application.

[0014] Figure 4 The diagram shown is a schematic diagram of the first substrate structure provided in an embodiment of this application.

[0015] Figure 5 The diagram shown is a structural schematic of a load-bearing structure conveying device provided in an embodiment of this application.

[0016] Figure 6 The diagram shown is a structural schematic of a load-bearing structure provided in an embodiment of this application.

[0017] Figure 7 The diagram shown is a schematic diagram of the cache device and the lifting component of the supporting structure provided in an embodiment of this application.

[0018] Figure 8 The image shown is a top view of a buffer device and a supporting structure lifting assembly provided in an embodiment of this application.

[0019] Figure 9 The diagram shown is a schematic representation of the cache device, carrier structure, and first carrier structure provided in an embodiment of this application.

[0020] Figure 10 The diagram shown is a structural schematic of a transportation device and a process device provided in another embodiment of this application.

[0021] Figure 11 The diagram shown is a schematic diagram of the rotating device and the first carrier structure provided in an embodiment of this application.

[0022] Figure label:

[0023] 1. Process system; 10. Transportation equipment; 100. Process placement position; 101. Sheet changing buffer position; 102. Sheet insertion working area; 103. Rotating working area; 104. Sheet lifting assembly; 105. Sheet straightening assembly; 106. Feeding conveyor line; 107. Unloading conveyor line; 108. Feeding position; 109. Unloading position; 11. Rotating device; 110. Positioning and clamping assembly; 111. Rotating assembly; 112. Moving assembly; 12. Sheet picking and placing device; 13. Bearing structure; 14. Buffer device; 140. Buffer bracket; 141. Bearing block; 142. Bearing assembly; 15. Sheet structure handling device; 150. Support frame; 1500. First component; 1501. Second component; 1502, Third component; 151, Transport assembly; 16, Bearing structure conveying device; 160, Insertion assembly; 1600, Telescopic arm; 161, Moving conveying assembly; 1610, Ground rail; 1611, Conveying drive assembly; 162, First side of the bearing structure conveying device; 163, Second side of the bearing structure conveying device; 17, Bearing structure lifting assembly; 170, Lifting drive assembly; 171, Lifting platform; 18, Lifting conveying assembly; 19, Buffer platform; 20, Process equipment; 30, Sheet to be processed; 40, First sheet carrier structure; 41, Top plate; 410, Clamped part; 42, Base plate; 43, Connecting column; X1, First direction; X2, Second direction. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] Existing transport equipment uses small, horizontal boat structures as carriers to transport sheet materials, resulting in low loading efficiency and a large footprint. Therefore, this application provides a transport device to improve loading efficiency and reduce footprint.

[0026] Figure 1 The diagram shown is a structural schematic of a transportation device and a process device provided in an embodiment of this application. Figure 2 The image shown is a top view of a transportation device and a process device provided in an embodiment of this application. Figure 3 The diagram shown is a structural schematic of a transportation device provided in an embodiment of this application. Figure 4 The diagram shown is a schematic diagram of the first substrate structure provided in an embodiment of this application.

[0027] like Figures 1 to 4As shown, the transport device 10 is used to transport sheets 30 to be processed to one or more process devices 20. The process device 20 has a process chamber. The process chamber is capable of accommodating multiple first sheet carrier structures 40 in an upright position. The first sheet carrier structures 40 are used to support multiple sheets 30 to be processed. After processing, the sheets 30 are formed into processed sheets.

[0028] Specifically, the process equipment 20 includes any equipment capable of processing the sheet 30 to be processed. Exemplarily, the process equipment 20 may include a chemical vapor deposition (CVD) device or a physical vapor deposition (PVD) device. For example, the process equipment 20 may include a boron diffusion device, a phosphorus diffusion device, or a passivation device. The sheet 30 to be processed can be any sheet material that needs to be processed. Exemplarily, the sheet 30 to be processed may include at least one of a silicon wafer, a solar cell, a wafer, and a glass plate.

[0029] Specifically, the first wafer carrier structure 40 can enter the process chamber together with the sheet to be processed 30 for processing. Exemplarily, the first wafer carrier structure 40 can also be referred to as a large boat structure. Exemplarily, the material of the first wafer carrier structure 40 may include silicon carbide or quartz. Exemplarily, a single first wafer carrier structure 40 can carry 350 to 500 sheets.

[0030] The transport equipment 10 includes: one or more rotating devices 11, sheet picking and placing devices 12, one or more load-bearing structures 13, one or more buffer devices 14, sheet structure handling devices 15, and load-bearing structure conveying devices 16.

[0031] The rotating device 11 is used to support and rotate the first sheet carrier structure 40 so that the first sheet carrier structure 40 is in an upright or horizontal state. The sheet handling device 12 is arranged adjacent to the rotating device 11. When the rotating device 11 drives the first sheet carrier structure 40 to a horizontal state, the sheet handling device 12 can place multiple sheets 30 to be processed into the first sheet carrier structure 40, and can also remove multiple processed sheets. The supporting structure 13 is used to support multiple first sheet carrier structures 40 in an upright state.

[0032] The buffer device 14 includes a pre-processed placement position 100 and a wafer change buffer position 101. The pre-processed placement position 100 is used to place a carrier structure 13 that carries a first wafer carrier structure 40 containing pre-processed wafers. The carrier structure 13 can be moved from the pre-processed placement position 100 to the wafer change buffer position 101.

[0033] The wafer carrier structure transport device 15 is used to transport the first wafer carrier structure 40 in an upright state between the wafer changing buffer position 101 and the rotating device 11. The support structure conveying device 16 is arranged adjacent to the buffer device 14 and is used to transport the support structure 13 of the first wafer carrier structure 40, which is buffered by the buffer device 14 and carries the wafer to be processed 30, to the process equipment 20, and to output the support structure 13 of the first wafer carrier structure 40, which carries the wafer that has been processed, from the process equipment 20.

[0034] Exemplarily, the carrier structure 13 can be moved from the carrier component 142 corresponding to the process placement position 100 to the carrier component 142 corresponding to the wafer change buffer position 101 via the carrier structure lifting component 17 and lifting conveying component 18 (described below). Alternatively, it can be moved from the carrier component 142 corresponding to the process placement position 100 to the carrier component 142 corresponding to the wafer change buffer position 101 via the carrier structure conveying device 16. Exemplarily, the carrier structure 13 can be moved from the carrier component 142 corresponding to the process placement position 100 to the carrier component 142 corresponding to the wafer change buffer position 101 via the buffer device 14. The structure for moving the carrier structure 13 from the process placement position 100 to the wafer change buffer position 101 can be configured according to actual needs, and this embodiment does not impose specific limitations.

[0035] For example, the rotating device 11 is used to carry the first sheet carrier structure 40. The rotating device 11 is also used to rotate the first sheet carrier structure 40 so that the first sheet carrier structure 40 is in an upright state or a horizontal state. The sheet picking and placing device 12 is arranged adjacent to the rotating device 11 and is used to place a plurality of sheets 30 to be processed into the first sheet carrier structure 40 carried by the rotating device 11 and in a horizontal state.

[0036] The support structure 13 is used to support multiple first carrier structures 40 in an upright state. The buffer device 14 is used to buffer one or more support structures 13.

[0037] The wafer transport device 15 is arranged adjacent to the buffer device 14 and the rotating device 11, and is used to sequentially transport multiple first wafer structures 40 carried by the carrier structure 13 buffered in the buffer device 14 to the rotating device 11. The wafer transport device 15 is also used to transport the first wafer structures 40 carrying the sheet material 30 to be processed and in an upright state in the rotating device 11 to the carrier structure 13 buffered in the buffer device 14.

[0038] The carrier structure conveying device 16 is arranged adjacent to the buffer device 14 and is used to convey the carrier structure 13 buffered by the buffer device 14 to the process equipment 20. The carrier structure 13 carries the first sheet carrier structure 40 carrying the sheet 30 to be processed, so that the process equipment 20 can process the sheet 30 to be processed.

[0039] In some application scenarios, the operating steps of the transport equipment 10 are as follows: The buffer device 14 buffers the carrier structure 13, which carries multiple first sheet carrier structures 40 that are not loaded with sheets 30 to be processed and are in an upright state. The sheet carrier structure transport device 15 transports one of the first sheet carrier structures 40 to the rotating device 11. The rotating device 11 rotates the first sheet carrier structure 40 to a horizontal state. The sheet picking and placing device 12 places multiple sheets 30 to be processed into the first sheet carrier structure 40 in the horizontal state. After the first sheet carrier structure 40 is loaded, the rotating device 11 rotates the first sheet carrier structure 40 to an upright state. Then, the sheet carrier structure transport device 15 transports the first sheet carrier structure 40 to the carrier structure 13 buffered by the buffer device 14. After that, the sheet carrier structure transport device 15 transports the next first sheet carrier structure 40 that is not loaded with sheets 30 to be processed to the rotating device 11 for loading, until all the multiple first sheet carrier structures 40 carried by the carrier structure 13 are loaded with sheets 30 to be processed. The supporting structure conveying device 16 then conveys the supporting structure 13 to the process equipment 20 so that the process equipment 20 can process the sheet material 30 to be processed.

[0040] For example, there can be multiple rotating devices 11. Each rotating device 11 can carry a first carrier structure 40.

[0041] The sheet handling device 12 may include any structure capable of picking up and placing sheets. For example, the sheet handling device 12 may include a robotic arm and an adsorption assembly disposed at the end of the robotic arm. The adsorption assembly can adsorb multiple sheets simultaneously.

[0042] Specifically, the wafer transport device 15 is used to transport the first wafer structure 40 between the wafer exchange buffer position 101 of the buffer device 14 and the rotating device 11. Exemplarily, the rotating device 11 is adjacent to the wafer exchange buffer position 101. Exemplarily, there can be multiple buffer devices 14 and multiple rotating devices 11. The wafer transport device 15 can transport the first wafer structure 40 between multiple buffer devices 14 and multiple rotating devices 11.

[0043] like Figure 4 As shown, the first sheet carrier structure 40 includes a top plate 41, a bottom plate 42, and a plurality of connecting posts 43 connecting the top plate 41 and the bottom plate 42. Each connecting post 43 has a plurality of toothed grooves. The toothed grooves of the plurality of connecting posts 43, located on the same plane, jointly support the sheet material. Exemplarily, the top of the top plate 41 may have a clamping portion 410. The sheet carrier structure transport device 15 can clamp the clamping portion 410 to transport the first sheet carrier structure 40. Exemplarily, the dimension of the first sheet carrier structure 40 along the extending direction of the connecting posts 43 may be greater than or equal to 4m and less than or equal to 6m.

[0044] Exemplarily, the support structure 13 may include a support member and a lifting hole provided on the support member. The buffer device 14 has a buffer platform. The buffer platform is used to place the support member. The support structure conveying device 16 lifts the support structure 13 through the lifting hole to realize the conveying of the support structure 13.

[0045] Specifically, the process chamber can also accommodate one or more support structures 13. The support structure conveying device 16 is also used to send the support structure 13 carrying the first sheet carrier structure 40 containing the sheet to be processed 30 into the process chamber.

[0046] In the conveying equipment 10 provided in this embodiment, the first sheet carrier structure 40 is supported by the rotating device 11 and is in a horizontal state during feeding. This allows the first sheet carrier structure 40 to support more sheets more stably, enabling it to be designed to be larger and accommodate more sheets, thus improving the sheet feeding efficiency. Furthermore, except during feeding, the first sheet carrier structure 40 is transported in an upright state, reducing the footprint of the conveying equipment 10. In addition, by supporting multiple first sheet carrier structures 40 with the bearing structure 13, multiple first sheet carrier structures 40 can simultaneously feed the process equipment 20, further improving feeding efficiency.

[0047] Furthermore, the buffer device 14 includes a processed sheet placement position 100 and a sheet-changing buffer position 101. The processed sheet placement position 100 can be used to temporarily store the carrier structure 13 carrying the processed sheet, while the sheet-changing buffer position 101 can mainly buffer the first sheet-carrying structure 40 during sheet changing. The carrier structure 13 can be moved from the processed sheet placement position 100 to the sheet-changing buffer position 101, which can avoid process mixing and reduce the idle time of the transport equipment. Moreover, when the first sheet-carrying structure 40 of the sheet-changing buffer position 101 is changing sheets, the processed sheet placement position 100 can simultaneously receive the newly unloaded carrier structure 13 carrying the processed sheet, realizing the synchronous operation of unloading and sheet changing, improving transport efficiency and throughput.

[0048] The transport equipment 10 and the process equipment 20 can form the process system 1. Since the process equipment 20 can process multiple sheets to be processed carried by the first carrier structure 40 in an upright state, the footprint of the process equipment 20 is reduced and the process efficiency of the process equipment 20 is improved, thereby reducing the footprint of the process system 1 and improving the production efficiency and unit area capacity of the process system 1.

[0049] In some embodiments, the carrier structure conveying device 16 is further configured to convey the carrier structure 13 carrying the first sheet carrier structure 40 containing the processed sheet to one or more buffer devices 14. The sheet handling device 12 is further configured to remove the processed sheet from the first sheet carrier structure 40, which is carried by the rotating device 11 and is in a horizontal position and contains the processed sheet.

[0050] For example, the carrier structure conveying device 16 is also used to remove the carrier structure 13 carrying the first carrier structure 40 containing the processed sheet from the process chamber and convey it to the buffer device 14. The buffer device 14 can be used not only to buffer the first carrier structure 40 carrying the sheet 30 to be processed, but also to buffer the first carrier structure 40 carrying the processed sheet.

[0051] In some application scenarios, the operating steps of the transport equipment 10 are as follows: The supporting structure conveying device 16 transports the supporting structure 13 to the buffer device 14. The supporting structure 13 carries multiple first sheet carrier structures 40 carrying processed sheets. The sheet carrier structure handling device 15 transports one of the first sheet carrier structures 40 carrying processed sheets from the buffer device 14 to the rotating device 11. The rotating device 11 rotates the first sheet carrier structure 40 to a horizontal position. The sheet picking and placing device 12 removes multiple processed sheets from the first sheet carrier structure 40 and places multiple sheets 30 to be processed into the first sheet carrier structure 40. After the first sheet carrier structure 40 has been replaced, the rotating device 11 rotates the first sheet carrier structure 40 to an upright position. Then, the sheet carrier structure handling device 15 transports the first sheet carrier structure 40 back to the supporting structure 13 buffered in the buffer device 14.

[0052] Subsequently, the carrier structure transport device 15 transports the next first carrier structure 40 loaded with the processed sheet to the rotating device 11 to replace the processed sheet with the sheet 30 to be processed, until all the first carrier structures 40 carried by the carrier structure 13 are loaded with the sheet 30 to be processed. The carrier structure conveying device 16 then conveys the carrier structure 13 to the process equipment 20 so that the process equipment 20 can process the sheet 30 to be processed.

[0053] The conveying equipment 10 provided in this embodiment, the bearing structure conveying device 16 can also convey the bearing structure 13 carrying the first sheet carrier structure 40 containing the processed sheet to the buffer device 14. The sheet picking and placing device 12 can also remove the processed sheet from the first sheet carrier structure 40, which is carried by the rotating device 11 and is in a horizontal state, so that the conveying equipment 10 can also be used for unloading the processed sheet in the process equipment 20. Through the automated unloading process, the idle time of the equipment is reduced, the production cycle is optimized, and the overall production efficiency is improved.

[0054] In some embodiments, such as Figure 1 As shown, there are multiple buffer devices 14. Multiple buffer devices 14 are disposed on one side of the supporting structure conveying device 16 and arranged sequentially along the first direction X1. One or more pre-processed placement positions 100 and one wafer replacement buffer position 101 are arranged sequentially along the first direction X1, with each buffer device 14 corresponding to either a pre-processed placement position 100 or a wafer replacement buffer position 101.

[0055] In some embodiments, the carrier structure conveying device 16 can convey the carrier structure 13 carrying the first carrier structure 40 containing the processed sheet to the processed placement position 100. Furthermore, the carrier structure conveying device 16 can also convey the carrier structure 13 corresponding to the changing buffer position 101 to the process equipment 20 when all the processed sheets in the first carrier structure 40 carried by the carrier structure 13 corresponding to the changing buffer position 101 have been replaced with the sheet 30 to be processed.

[0056] For example, such as Figure 1 As shown, three buffer devices 14 can be disposed on one side of the supporting structure conveying device 16 and arranged sequentially along the first direction X1. (Reference) Figure 2 Two buffer devices 14 can be set on one side of the carrier structure conveying device 16 and arranged sequentially along the first direction X1.

[0057] Specifically, there can be one or more process-placed bits 100. The wafer swapping buffer bit 101 is located on one side of one or more process-placed bits 100 along the first direction X1.

[0058] Exemplarily, the carrier structure conveying device 16 is further configured to remove the carrier structure 13 carrying the first sheet carrier structure 40 containing the processed sheet from the process chamber and convey it to the processed placement position 100. Exemplarily, the carrier structure conveying device 16 is further configured to convey the carrier structure 13 carrying the first sheet carrier structure 40 containing the processed sheet, located at the processed placement position 100, to the sheet changing buffer position 101 when the carrier structure 13 located at the sheet changing buffer position 101 is removed.

[0059] In some application scenarios, after the sheet material 30 to be processed in the process chamber is processed into a processed sheet, the carrier structure conveying device 16 takes out the carrier structure 13 carrying the first sheet carrier structure 40 of the processed sheet and conveys it to the processed placement position 100. The carrier structure 13, which is buffered by the buffer device 14 corresponding to the sheet replacement buffer position 101, carries multiple first sheet carrier structures 40 carrying processed sheets. The sheet carrier structure handling device 15 sequentially transports these first sheet carrier structures 40 to the rotating device 11 to replace the processed sheet with the sheet material 30 to be processed, until all the multiple first sheet carrier structures 40 carried by the carrier structure 13 are loaded with the sheet material 30 to be processed. After all the processed sheets in the first sheet carrier structures 40 carried by the carrier structure 13 located in the sheet replacement buffer position 101 have been replaced with the sheet material 30 to be processed, the carrier structure conveying device 16 conveys the carrier structure 13 and the multiple first sheet carrier structures 40 it carries to the process equipment 20.

[0060] The conveying device 10 provided in this embodiment, due to the large size of the first wafer carrier structure 40, has one wafer changing buffer position 101 along the first direction X1. Furthermore, the wafer changing buffer position 101 is located on one side of one or more pre-processed placement positions 100 along the first direction X1, which avoids interference from other structures (such as the first wafer carrier structure 40 located in the pre-processed placement position 100) on the handling of the first wafer carrier structure 40 located in the wafer changing buffer position 101. The wafer changing buffer position 101 is arranged adjacent to the rotating device 11, ensuring that the first supporting structure 40 requiring wafer replacement can be prioritized and shortening the movement path of the wafer carrier structure handling device 15.

[0061] Figure 5 The diagram shown is a structural schematic of a load-bearing structure conveying device provided in an embodiment of this application. Figure 6 The diagram shown is a structural schematic of a load-bearing structure provided in an embodiment of this application. Figure 7 The diagram shown is a schematic diagram of the cache device and the lifting component of the supporting structure provided in an embodiment of this application. Figure 8 The image shown is a top view of a buffer device and a supporting structure lifting assembly provided in an embodiment of this application. Figure 9 The diagram shown is a schematic representation of the cache device, carrier structure, and first carrier structure provided in an embodiment of this application.

[0062] In some embodiments, such as Figures 1 to 3 as well as Figures 5 to 9 As shown, the carrier structure conveying device 16 includes an insertion assembly 160 and a moving conveying assembly 161. The insertion assembly 160 is used to place the carrier structure 13 in the already-processed placement position 100. The insertion assembly 160 is also used to insert the carrier structure 13 in the wafer change buffer position 101. The moving conveying assembly 161 is connected to the insertion assembly 160 and drives the insertion assembly 160 to move, so that the insertion assembly 160 places the carrier structure 13 in the already-processed placement position 100, or places it in the wafer change buffer position 101 and inserts the carrier structure 13.

[0063] Because the first carrier structure 40 is large in size and carries a lot of sheets, this arrangement allows the first carrier structure 40 to be inserted and transported more stably and reliably by the carrier structure conveying device 16, thereby improving the reliability of the transport equipment 10.

[0064] For example, a plurality of buffer devices 14 are provided on one side of the moving transport assembly 161. The moving transport assembly 161 is connected to the insertion assembly 160 and is used to transport the insertion assembly 160 along the first direction X1 or the opposite direction of the first direction X1, so that the insertion assembly 160 places the carrier structure 13 in the already processed placement position 100, or inserts the carrier structure 13 in the wafer change buffer position 101.

[0065] In some embodiments, the buffer device 14 further includes one or more support structure lifting components 17. The support structure lifting components 17 are disposed at the process placement position 100 or the wafer replacement buffer position 101. The support structure lifting components 17 are used to lift the support structure 13 carried by the buffer device 14, so that the support structure 13 is detached from the buffer device 14 and inserted by the insertion component 160. The support structure lifting components 17 are also used to receive the support structure 13 placed by the insertion component 160 and lower the support structure 13 so that the support structure 13 is received by the buffer device. The support structure lifting components 17 enable the transfer of multiple first wafer structures 40 between the buffer device 14 and the insertion component 160. Since the first wafer structures 40 are relatively large and carry a large number of wafers, this arrangement allows for more stable, reliable, and efficient transportation and transfer of multiple first support structures 40, improving the reliability of the transport equipment 10.

[0066] For example, each process placement bit 100 or wafer replacement buffer bit 101 is provided with a support structure lifting assembly 17 to facilitate the placement and insertion of the support structure 13.

[0067] In some applications, the insertion assembly 160 inserts the carrier structure 13 carrying the processed sheet into the process chamber. The moving conveyor assembly 161 then transports the insertion assembly 160 along the first direction X1, so that the insertion assembly 160 places the carrier structure 13 onto the carrier structure lifting assembly 17 located at the processed placement position 100. The carrier structure lifting assembly 17 lowers the carrier structure 13, and the buffer device 14 located at the processed placement position 100 receives the carrier structure 13.

[0068] In some application scenarios, the lifting assembly 17 of the carrier structure located at the wafer replacement buffer position 101 lifts the carrier structure 13 carrying the first wafer carrier structure 40 that has been replaced, which is carried by the buffer device 14 located at the wafer replacement buffer position 101, so that the carrier structure 13 is detached from the buffer device 14. The moving transport assembly 161 transports the insertion assembly 160 along the first direction X1 so that the insertion assembly 160 inserts the carrier structure 13. Then, the moving transport assembly 161 transports the insertion assembly 160 in the opposite direction of the first direction X1 so that the insertion assembly 160 puts the carrier structure 13 into the process chamber.

[0069] For example, such as Figure 5As shown, the moving conveying assembly 161 may include a ground rail 1610 and a conveying drive assembly 1611 disposed on the ground rail 1610. The ground rail 1610 extends along a first direction X1. The insertion assembly 160 is disposed on the ground rail 1610 and slidably connected to the ground rail 1610. The conveying drive assembly 1611 is connected to the insertion assembly 160 and is used to drive the insertion assembly 160 to reciprocate on the ground rail 1610. Since the first sheet carrier structure 40 is relatively large and carries a large number of sheets, the conveying of the insertion assembly 160 is achieved through the ground rail 1610 and the conveying drive assembly 1611, making the transportation of the first sheet carrier structure 40 more stable and reliable.

[0070] For example, the conveyor drive assembly 1611 may include one or more combinations of the following drive structures: gear set, sprocket and chain, lead screw and guide rail, power cylinder, motor, and crank-slider. For instance, the conveyor drive assembly 1611 may include a linear motor.

[0071] For example, such as Figure 5 As shown, the insertion assembly 160 may include one or more telescopic arms 1600. Each telescopic arm 1600 includes at least two levels of arm segments. The arm segments are slidably connected, and the telescopic arm 1600 slides out sequentially as it extends. When the telescopic arm 1600 retracts, each arm segment is retracted into the innermost arm segment. Exemplarily, the outermost arm segment of the telescopic arm 1600 has a bearing plane for supporting the bearing structure 13. Exemplarily, one or more telescopic arms 1600 may be provided to support the bearing structure 13. For example, as... Figure 5 As shown, the two telescopic arms 1600 move together to support the load-bearing structure 13.

[0072] The transport equipment 10 provided in this embodiment has a mobile conveying component 161 connected to an insertion component 160. The insertion component 160 can be conveyed along the first direction X1 or the opposite direction of the first direction X1, so that the insertion component 160 can place the carrier structure 13 in the already processed placement position 100 or insert the carrier structure 13 in the replacement buffer position 101. The carrier structure lifting component 17 realizes the transfer of multiple first carrier structures 40 between the buffer device 14 and the insertion component 160. Since the first carrier structure 40 is large in size and carries a lot of sheets, this arrangement can make multiple first carrier structures 40 more stable, reliable and efficient to transport and transfer, thereby improving the reliability of the transport equipment 10.

[0073] In some embodiments, the buffer device 14 may include two or more pre-processed placement positions 100 and one wafer replacement buffer position 101. The pre-processed placement positions 100 and the wafer replacement buffer position 101 are arranged sequentially along a first direction X1, and the carrier structure 13 corresponding to each pre-processed placement position 100 can be moved to the wafer replacement buffer position 101. Exemplarily, the first direction X1 is parallel to the direction of the carrier structure conveying device 16 for conveying the carrier structure 13. In practical applications, the number of buffer devices 14 and the number of pre-processed placement positions 100 and / or wafer buffer positions 101 included in the buffer device 14 can be flexibly adjusted according to actual needs.

[0074] In some embodiments, the buffer device 14 includes a buffer support 140 and two or more carrier components 142. The buffer support 140 includes a pre-processed placement position 100 and a wafer replacement buffer position 101. The two or more carrier components 142 are mounted to the buffer support 140 and configured to support a carrier structure 13. Each pre-processed placement position 100 and wafer replacement buffer position 101 is provided with a carrier component 142. The carrier structure 13 can be moved from the carrier component 142 corresponding to the pre-processed placement position 100 to the carrier component 142 corresponding to the wafer replacement buffer position 101.

[0075] Exemplarily, each support assembly 142 includes two or more support blocks 141, which are mounted on both sides of the buffer bracket 140 for supporting the support structure 13. A support structure lifting assembly 17 can extend between two support blocks 141 to drive the support structure 13 to detach from or be placed onto the support assembly 142. Exemplarily, the number of support blocks 141 is multiple. For example, such as... Figure 8 As shown, there are four support blocks 141. These support blocks 141 are spaced apart. There is a accommodating space between the support blocks 141. This accommodating space accommodates the lifting assembly 17 of the supporting structure.

[0076] For example, such as Figure 7 and Figure 8 As shown, the support structure lifting assembly 17 includes a lifting drive assembly 170 and a lifting platform 171 disposed on the lifting drive assembly 170. The lifting drive assembly 170 is used to drive the lifting platform 171 to rise and fall. Exemplarily, the accommodating space between the support blocks 141 is used to accommodate the liftable lifting platform 171. Exemplarily, the lifting platform 171 has an insertion space. An insertion assembly 160, such as the telescopic arm 1600 of the insertion assembly 160, can extend into the insertion space to place or insert the support structure 13. Exemplarily, the lifting drive assembly 170 may include one or more combinations of the following drive structures: gear set, sprocket chain, lead screw guide, power cylinder, motor, and crank slider. For example, the lifting drive assembly 170 may include a hydraulic cylinder.

[0077] For example, such as Figure 6 and Figure 9 As shown, the shape of the support structure 13 may include a plate shape. For example, the support structure 13 may support four first carrier structures 40. For example, the support structure 13 has multiple positioning portions to achieve positioning of the support structure 13 on the buffer device 14, the support structure lifting assembly 17, or the insertion assembly 160.

[0078] The transport equipment 10 provided in this embodiment has a mobile conveying component 161 connected to an insertion component 160. The insertion component 160 can be conveyed along the first direction X1 or the opposite direction of the first direction X1, so that the insertion component 160 can place the carrier structure 13 in the already processed placement position 100 or insert the carrier structure 13 in the replacement buffer position 101. The carrier structure lifting component 17 realizes the transfer of multiple first carrier structures 40 between the buffer device 14 and the insertion component 160. Since the first carrier structure 40 is large in size and carries a lot of sheets, this arrangement can make multiple first carrier structures 40 more stable, reliable and efficient to transport and transfer, thereby improving the reliability of the transport equipment 10.

[0079] In some embodiments, such as Figure 7 and Figure 8 As shown, the buffer device 14 further includes one or more support structure lifting assemblies 17 and lifting conveying assemblies 18. The support structure lifting assembly 17 is movable to the processed placement position 100 or the wafer replacement buffer position 101, and is vertically adjustable, used to drive the support structure 13 to detach from or be placed onto the support assembly 142. The lifting conveying assembly 18 is connected to the support structure lifting assembly 17 and is used to drive the support structure lifting assembly 17 to move so that the support structure lifting assembly 17 is located at the processed placement position 100 or the wafer replacement buffer position 101.

[0080] Specifically, the lifting and conveying assembly 18 is used to transport the support structure lifting assembly 17 so that the support structure lifting assembly 17 can switch between one or more process placement positions 100 and wafer change buffer positions 101.

[0081] For example, the lifting and conveying assembly 18 is used to drive the support structure lifting assembly 17 to move along the first direction X1 or the opposite direction of the first direction X1, so that the support structure lifting assembly 17 is located at the process placement position 100 or the wafer replacement buffer position 101.

[0082] When the carrier structure 13 of the first carrier structure 40 carrying the sheet 30 to be processed, located at the sheet changing buffer position 101, is taken away by the carrier structure conveying device 16, the lifting conveying assembly 18 drives the carrier structure lifting assembly 17 to the processed placement position 100. The carrier structure lifting assembly 17 lifts the carrier structure 13 located at the processed placement position 100 to receive the carrier structure 13 buffered by the buffer device 14 located at the processed placement position 100. The lifting conveying assembly 18 drives the carrier structure lifting assembly 17 carrying the carrier structure 13 to the sheet changing buffer position 101. The carrier structure lifting assembly 17 lowers the carrier structure 13 so that the carrier structure 13 is received by the buffer device 14 located at the sheet changing buffer position 101.

[0083] For example, a support structure lifting assembly 17 is provided on one side of the support structure conveying device 16. For example, the lifting conveying assembly 18 is connected to the lifting drive assembly 170 and is used to drive the lifting drive assembly 170 to move along the first direction X1 or the opposite direction of the first direction X1, so that the lifting platform 171 is located at the processed placement position 100 or the wafer replacement buffer position 101.

[0084] For example, the lifting and conveying assembly 18 may include one or more of the following drive structures: gear set, sprocket and chain, lead screw and guide rail, power cylinder, motor and crank-slider. For instance, the lifting and conveying assembly 18 may include a linear motor, guide rail and slider, etc.

[0085] For example, three or more buffer devices 14 are provided on one side of the carrier structure conveying device 16. Two or more buffer devices 14 are located at the processed placement position 100, and one buffer device 14 is located at the wafer change buffer position 101. For example, when the carrier structure 13 located at the processed placement position 100 adjacent to the wafer change buffer position 101 is taken away by the carrier structure conveying device 16, the lifting conveying assembly 18 and the carrier structure lifting assembly 17 cooperate to transport the carrier structure 13 located at the processed placement position 100 adjacent to the processed placement position 100 to the processed placement position 100.

[0086] The transport equipment 10 and buffer device 14 provided in this embodiment also include one or more load-bearing structure lifting components 17 and lifting conveying components 18. The lifting conveying components 18 are connected to the load-bearing structure lifting components 17 and can drive the load-bearing structure lifting components 17 to move so that the load-bearing structure lifting components 17 are located at the process placement position 100 or the wafer replacement buffer position 101, so that the process placement position 100 and the wafer replacement buffer position 101 can share a load-bearing structure lifting component 17, thereby enabling the load-bearing structure 13 to be transferred between multiple buffer devices 14 and load-bearing structure conveying devices 16.

[0087] In addition, the lifting and conveying assembly 18 and the supporting structure lifting assembly 17 work together to transport the supporting structure 13 located at the already placed position 100 to the changing buffer position 101, instead of through the supporting structure conveying device 16. This simplifies the operation of the supporting structure conveying device 16, which is conducive to speeding up the production pace and improving production efficiency and capacity.

[0088] Figure 10 The diagram shown is a structural schematic of a transportation device and a process device provided in another embodiment of this application.

[0089] In some embodiments, such as Figure 2 and Figure 10 As shown, the first side 162 and the second side 163 of the load-bearing structure conveying device are arranged opposite each other along the second direction X2. Both the first side 162 and the second side 163 of the load-bearing structure conveying device are equipped with a buffer device 14 and a rotating device 11. The buffer device 14 and the rotating device 11 located on the same side are arranged sequentially along the first direction X. The second direction X2 is perpendicular to the first direction X1. A sheet handling device 12 is disposed between the two rotating devices 11.

[0090] For example, one or more buffer devices 14 and rotating devices 11 corresponding to the first side 162 and the second side 163 of the load-bearing structure conveying device are arranged sequentially along the first direction X1. The sheet picking and placing device 12 may be provided on one side of the load-bearing structure conveying device 16 along the first direction X1.

[0091] Specifically, the sheet loading and unloading device 12 can load the first sheet carrier structure 40 carried by the rotating device 11 on the first side 162 and the second side 163 of the carrier structure conveying device. In some applications, when the sheet loading and unloading device 12 loads the first sheet carrier structure 40 carried by the rotating device 11 on the first side 162 of the carrier structure conveying device, the rotating device 11 on the second side 163 of the carrier structure conveying device can rotate the first sheet carrier structure 40 loaded with the processed sheet to a vertical position, and the sheet carrier structure handling device 15 transports the first sheet carrier structure 40 to the buffer device 14.

[0092] For example, both the first direction X1 and the second direction X2 are parallel to the horizontal direction. For example, the moving conveying assembly 161 has one or more buffer devices 14 and rotating devices 11 on each side along the second direction X2. The one or more buffer devices 14 and rotating devices 11 on each side of the moving conveying assembly 161 along the second direction X2 are arranged sequentially along the first direction X1.

[0093] For example, such as Figure 5As shown, the insertion assembly 160 has one or more telescopic arms 1600. The telescopic arms 1600 can extend or retract along the second direction X2 or the opposite direction of the second direction X2. Exemplarily, the insertion assembly 160 has two or more telescopic arms 1600. One telescopic arm 1600 can extend in the second direction X2, and the other telescopic arm 1600 can extend in the opposite direction of the second direction X2, so that the insertion assembly 160 can simultaneously transport the carrier structure 13 buffered by the buffer devices 14 located on opposite sides of the moving conveyor assembly 161 along the second direction X2, thereby improving transport efficiency.

[0094] For example, the sheet handling device 12 is disposed between the rotating devices 11 spaced apart along the second direction X2. For example, the transport equipment 10 is symmetrically distributed along the line connecting the load-bearing structure conveying device 16 and the sheet handling device 12.

[0095] The transport equipment 10 provided in this embodiment has one or more buffer devices 14 and rotating devices 11 on both sides of the bearing structure conveying device 16 along the second direction X2. The buffer devices 14 on both sides of the bearing structure conveying device 16 can buffer the first sheet carrier structure 40 carrying the sheet material. The rotating devices 11 on both sides of the bearing structure conveying device 16 can carry and rotate the first sheet carrier structure 40. These buffer devices 14 and rotating devices 11 cooperate with the sheet material picking and placing device 12 and the sheet carrier structure handling device 15, so that the devices on both sides of the bearing structure conveying device 16 can work simultaneously, improving transport efficiency, speeding up the production cycle, and helping to increase production capacity.

[0096] In some embodiments, such as Figure 2 and Figure 10 As shown, the wafer carrier structure transport device 15 includes a support frame 150 and a transport assembly 151. The transport assembly 151 is disposed on the support frame 150 and is used to transport the first wafer carrier structure 40 in an upright state between the wafer changing buffer position 101 of the buffer device 14 and the rotating device 11.

[0097] For example, the support frame 150 may include a first component 1500, a second component 1501, and a third component 1502. The first component 1500 is disposed adjacent to the buffer device 14 and the rotating device 11 located on the first side 162 of the load-bearing structure conveying device. The third component 1502 is disposed adjacent to the buffer device 14 and the rotating device 11 located on the second side 163 of the load-bearing structure conveying device. The second component 1501 connects the first component 1500 and the third component 1502.

[0098] Exemplarily, the conveying assembly 151 is used to convey the first upright carrier structure 40 between the buffer device 14 and the rotating device 11 located on the first side 162 of the carrier structure conveying device. The conveying assembly 151 is also used to convey the first upright carrier structure 40 between the buffer device 14 and the rotating device 11 located on the second side 163 of the carrier structure conveying device. This arrangement allows the buffer device 14 and the rotating device 11 on both sides of the carrier structure conveying device 16 to share a single carrier structure conveying device 15, making the structure of the transport device 10 more compact.

[0099] For example, the support frame 150 may include a gantry frame. The first component 1500 and the third component 1502 are the two ends of the gantry frame, respectively.

[0100] Exemplarily, the transport assembly 151 includes a transport drive assembly and a clamping assembly disposed on the transport drive assembly. The clamping assembly is used to clamp or release the first substrate structure 40. The transport drive assembly is disposed on the support frame 150 and is used to move along a first direction X1 or the opposite direction of the first direction X1, so that the clamping assembly transports the first substrate structure 40 between the buffer device 14 and the rotating device 11 located on one side of the carrier structure transport device 16. The transport drive assembly is also used to drive the clamping assembly to move along a second direction X2 or the opposite direction of the second direction X2, so that the clamping assembly can be located on the first side 162 or the second side 163 of the carrier structure transport device, so that the first substrate structure 40 can be transported on both sides of the carrier structure transport device 16.

[0101] Exemplarily, the transport drive assembly may include one or more combinations of the following drive structures: gear sets, sprockets and chains, lead screws and guides, power cylinders, motors, and crank-slider systems. For example, the transport drive assembly may include multiple linear modules. Exemplarily, the clamping assembly may clamp the clamped portion 410 on the top of the top plate 41. Exemplarily, the clamping assembly may include a gripper mechanism. For example, the clamping assembly may include mechanical grippers or vacuum suction grippers.

[0102] The transport equipment 10 and the load-bearing structure conveying device 16 provided in this embodiment have a simple structure, which facilitates the transport of large vertical first carrier structure 40 with a large weight. The transport is more stable and reliable, which helps to reduce the occurrence of fragments and cracks.

[0103] In some embodiments, such as Figure 2 and Figure 10 As shown, the transport device 10 also includes a buffer platform 19. The buffer platform 19 is disposed between the wafer changing buffer position 101 and the rotating device 11, so that the first wafer carrier structure 40 can be transported between the buffer device 14 and the buffer platform 19, or between the rotating device 11 and the buffer platform 19.

[0104] Exemplarily, the buffer platform 19 may be disposed on one side of the carrier structure conveying device 16 along the first direction X1 and adjacent to the wafer structure transporting device 15. The buffer platform 19 is used to buffer one or more first wafer structures 40 in an upright state. The wafer structure transporting device 15 is also used to transport the first wafer structure 40 between the buffer device 14 and the buffer platform 19, or between the rotating device 11 and the buffer platform 19.

[0105] Specifically, the wafer transport device 15 can transport the first wafer structure 40 between the buffer device 14, the buffer stage 19 and the rotating device 11.

[0106] For example, the buffer stage 19 can be used to buffer the first wafer carrier structure 40 loaded with the sheet 30 to be processed, and can also be used to buffer the first wafer carrier structure 40 loaded with the sheet that has already been processed. For example, the buffer stage 19 can also be used to buffer the carrier structure 13, through which the first wafer carrier structure 40 is carried.

[0107] For example, the load-bearing structure conveying device 16, the buffer platform 19 and the sheet picking and placing device 12 are arranged sequentially along the first direction X1.

[0108] The transport device 10 provided in this embodiment also includes a buffer platform 19. The buffer platform 19 can buffer the first carrier structure 40 in an upright state, reducing the floor space occupied by the buffer platform 19. This allows the first carrier structure 40 to be moved between the buffer device 14 and the buffer platform 19 or between the rotating device 11 and the buffer platform 19. When the transport device 10 is suspended due to failure, maintenance or initial debugging, the buffer platform 19 can temporarily store the first carrier structure 40, improving the reliability and maintainability of the transport device 10.

[0109] Figure 11 The diagram shown is a schematic diagram of the rotating device and the first carrier structure provided in an embodiment of this application.

[0110] In some embodiments, such as Figure 1 , Figure 2 and Figure 11 As shown, the rotating device 11 includes: a positioning and clamping assembly 110, a rotating assembly 111, and a moving assembly 112.

[0111] The positioning and clamping assembly 110 is used to support the first carrier structure 40 and to position and clamp the first carrier structure 40. The rotating assembly 111 is connected to the positioning and clamping assembly 110 and is used to drive the positioning and clamping assembly 110 to rotate so that the first carrier structure 40 is in an upright or horizontal state.

[0112] The moving assembly 112 has an insertion working area 102 and a rotating working area 103 along its moving path. The insertion working area 102 is adjacent to the sheet handling device 12, and the rotating working area 103 is adjacent to the sheet carrier structure transport device 15. The moving assembly 112 is connected to the rotating assembly 111 and is used to drive the rotating assembly 111 to move, so that the positioning clamping assembly 110 is located in the insertion working area 102 and moves within the insertion working area 102, so that the sheet handling device 12 can place multiple sheets 30 to be processed into the first sheet carrier structure 40, which is carried by the positioning clamping assembly 110 and is in a horizontal state. The moving assembly 112 is also used to drive the rotating assembly 111 to move, so that the positioning clamping assembly 110 is located in the rotating working area 103, and the rotating assembly 111 drives the positioning clamping assembly 110 to rotate.

[0113] Specifically, the movement path of the moving component 112 is the movement path of the movable portion of the moving component 112 that moves with the rotating component 111. Exemplarily, the moving component 112 can drive the rotating component 111 to move along the first direction X1 or the opposite direction of the first direction X1, so that the positioning clamping component 110 is located in the insert working area 102 or the rotating working area 103. Exemplarily, the insert working area 102 and the rotating working area 103 can be two areas spaced apart or two areas that intersect. Exemplarily, the rotating working area 103 and the insert working area 102 are arranged sequentially along the first direction X1.

[0114] In some application scenarios, the moving component 112 drives the rotating component 111 to move, positioning the clamping component 110 in the rotating working area 103. The rotating component 111 rotates the clamping component 110, allowing it to receive the first sheet carrier structure 40, which is in an upright state and not yet loaded with the sheet material 30 to be processed, transported by the sheet carrier structure transport device 15. After receiving the first sheet carrier structure 40, the rotating component 111 rotates the clamping component 110, bringing the first sheet carrier structure 40 to a horizontal state. Then, the moving component 112 drives the rotating component 111 to move, positioning the clamping component 110 in the insert working area 102. Since the area of ​​the first sheet carrier structure 40 where the sheet material is loaded is relatively long, the clamping component 110 is also driven to gradually move within the insert working area 102, so that the first sheet carrier structure 40 gradually loads the sheet material 30 to be processed inserted by the sheet material pick-and-place device 12.

[0115] For example, the positioning and clamping assembly 110 may include a support frame, a plurality of positioning blocks disposed on the support frame, and a clamping assembly corresponding to the positioning blocks. The support frame, positioning blocks, and clamping assembly form a receiving space for accommodating the first carrier structure 40. The positioning blocks and clamping assemblies may be arranged in a one-to-one correspondence, and the positioning blocks and clamping assemblies may be arranged opposite each other to press the first carrier structure 40 against the positioning blocks, thereby achieving the positioning and clamping of the first carrier structure 40. The clamping assembly may include a hydraulic cylinder and a pressure plate disposed on the piston of the hydraulic cylinder.

[0116] For example, the rotating assembly 111 may include a drive motor and a reducer connected to the drive motor. The output shaft of the reducer may be connected to the support frame to drive the support frame to rotate.

[0117] For example, the moving component 112 may include one or more combinations of the following drive structures: gear set, sprocket and chain, lead screw and guide rail, power cylinder, motor, and crank-slider. For instance, the moving component 112 may include a linear motor. The movement path of the moving component 112 is the movement path of the mover of the linear motor.

[0118] The transport device 10 provided in this embodiment includes a rotating device 11 comprising a positioning and clamping assembly 110, a rotating assembly 111, and a moving assembly 112. The positioning and clamping assembly 110 carries, positions, and clamps the first sheet carrier structure 40. The rotating assembly 111 drives the positioning and clamping assembly 110 to rotate, so that the first sheet carrier structure 40 is in an upright or horizontal state, thus realizing the receiving and rotation of the first sheet carrier structure 40. The insert working area 102 is adjacent to the sheet picking and placing device 12, which facilitates the sheet picking and placing device 12 to place the sheet to be processed 30 into the first sheet carrier structure 40. The rotating working area 103 is adjacent to the sheet carrier structure handling device 15, which facilitates the sheet carrier structure handling device 15 to pick up and place the first sheet carrier structure 40 in the rotating device 11.

[0119] Because the first sheet carrier structure 40 is relatively large, by setting up an insertion working area 102 and a rotating working area 103, interference from other structures of the transport equipment 10 (such as the sheet handling device 12) on the rotation of the first sheet carrier structure 40 is reduced. The moving component 112 drives the rotating component 111 to move, so that the positioning clamping component 110 moves within the insertion working area 102 after being positioned there, so that the large-sized first sheet carrier structure 40 can be fully loaded with the sheet to be processed 30, reducing the range of motion of the sheet handling device 12 and making the structure of the transport equipment 10 more compact.

[0120] In some embodiments, the transport device 10 further includes one or more sheet lifting assemblies 104 and one or more sheet straightening assemblies 105. Both the sheet lifting assembly 104 and the sheet straightening assembly 105 are disposed in the sheet insertion working area 102. The sheet straightening assembly 105 is disposed above the positioning and clamping assembly 110. The sheet lifting assembly 104 is correspondingly disposed to the sheet straightening assembly 105, and is disposed below the sheet straightening assembly 105.

[0121] The sheet lifting assembly 104 is used to receive the sheet and lower it so that the sheet is received by the first sheet carrier structure 40. The sheet straightening assembly 105 is used to straighten the sheet before it is received by the sheet lifting assembly 104.

[0122] In some application scenarios, the sheet pick-up and drop device 12 picks up the sheet, transports the sheet above the sheet straightening assembly 105, and lowers the sheet so that it is straightened by the sheet straightening assembly 105 and received by the sheet lifting assembly 104. After receiving the sheet, the sheet lifting assembly 104 lowers the sheet so that it is supported by the first sheet carrier structure 40.

[0123] Exemplarily, the sheet lifting assembly 104 includes a top gear and a top gear lifting assembly. The top gear has multiple toothed slots for receiving the sheet. The top gear lifting assembly is connected to the top gear and is used to drive the top gear to lift. The top gear lifting assembly may include one or more of the following drive structures: gear set, sprocket and chain, lead screw guide, power cylinder, motor, and crank-slider. For example, the top gear lifting assembly may include a linear motor.

[0124] Exemplarily, the sheet straightening assembly 105 includes two straightening members disposed opposite each other and a straightening drive assembly connected to the two straightening members. The straightening members extend along the movement path of the moving assembly 112. Each straightening member has a plurality of straightening comb teeth evenly arranged along the movement path of the moving assembly 112 on its side facing the other straightening member. The gap between adjacent straightening comb teeth is used to accommodate the sheet to be straightened. The straightening drive assembly is used to drive the two straightening members to move towards each other or in opposite directions, so that the straightening comb teeth straighten the sheet.

[0125] Exemplarily, the straightening member extends along a first direction X1. The straightening comb teeth are evenly arranged along the first direction X1. Exemplarily, the sheet lifting assembly 104 and the sheet straightening assembly 105 are disposed in a portion of the insert working area 102. Due to the large size of the first sheet carrier structure 40, the moving assembly 112 is also used to drive the rotating assembly 111 to move, so that the positioning clamping assembly 110 is located in the insert working area 102 and moves within the insert working area 102, so that the sheet straightening assembly 105 can straighten the sheet received by the entire first sheet carrier structure 40, and the sheet lifting assembly 104 can receive the sheet received by the entire first sheet carrier structure 40.

[0126] Exemplarily, the sheet lifting assembly 104 is also used to lift the sheet in the first sheet carrier structure 40 to detach the sheet from the first sheet carrier structure 40. The sheet straightening assembly 105 is also used to straighten the sheet when it is lifted by the sheet lifting assembly 104.

[0127] In some embodiments, such as Figure 10 As shown, the transport equipment 10 also includes one or more loading conveyors 106 and one or more unloading conveyors 107. The loading conveyor 106 is used to feed the sheet to be processed in the second sheet carrier structure to the loading position 108. The unloading conveyor 107 is used to receive the processed sheet at the unloading position 109 and place the processed sheet into the second sheet carrier structure.

[0128] The sheet handling device 12 is also used to place multiple sheets 30 to be processed from the loading position 108 into the first sheet carrier structure 40, which is carried by the rotating device 11 and is in a horizontal position. The sheet handling device 12 is also used to remove the processed sheets from the first sheet carrier structure 40, which is carried by the rotating device 11 and is in a horizontal position, and place the processed sheets into the unloading position 109. This arrangement allows the transport device 10 to also transport sheets between the first sheet carrier structure 40 and the second sheet carrier structure.

[0129] For example, the second carrier structure may include a flower basket.

[0130] The above text describes in detail the embodiments of the transportation equipment 10 of this application. The following text describes in detail the embodiments of the process system 1 of this application. It should be understood that the descriptions of the embodiments of the transportation equipment 10 correspond to the descriptions of the embodiments of the process system 1; therefore, any parts not described in detail can be referred to the preceding descriptions of the embodiments of the transportation equipment 10.

[0131] like Figure 1 and Figure 2 As shown, the process system 1 includes one or more process devices 20 and a transport device 10 mentioned in any of the above embodiments. The process device 20 has a process chamber. The process chamber is capable of accommodating multiple first sheet carrier structures 40 in an upright state. The transport device 10 is disposed adjacent to the process device 20 and is used to transport the sheet material 30 to be processed to the process device 20.

[0132] For example, one or more process devices 20 are disposed along a first direction X1 on at least one side of the support structure conveying device 16. For example, multiple process devices 20 are disposed along the first direction X1 on opposite sides of the support structure conveying device 16 along a second direction X2.

[0133] In the process system 1 provided in this embodiment, when the first sheet carrier structure 40 is loaded, it is supported by the rotating device 11 and is in a horizontal state. This allows the first sheet carrier structure 40 to support more sheets more stably, enabling it to be designed to be larger and accommodate more sheets, thus improving the sheet loading efficiency. Furthermore, except during loading, the first sheet carrier structure 40 is transported in an upright state, reducing the footprint of the transport equipment 10. In addition, by supporting multiple first sheet carrier structures 40 with the bearing structure 13, multiple first sheet carrier structures 40 can simultaneously load the process equipment 20, further improving loading efficiency.

[0134] Since the process equipment 20 can process multiple sheets to be processed carried by the first carrier structure 40 in an upright state, the footprint of the process equipment 20 is reduced and the process efficiency of the process equipment 20 is improved, thereby reducing the footprint of the process system 1 and improving the production efficiency and unit area capacity of the process system 1.

[0135] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0136] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0137] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0138] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0139] The above description has been given for illustrative and descriptive purposes. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A transport device for conveying sheets to be processed to one or more process devices and outputting processed sheets, the process device having a process chamber capable of accommodating a plurality of first sheet carrier structures in an upright state, the first sheet carrier structures being used to carry the plurality of sheets to be processed, the sheets to be processed forming the processed sheets after processing. Its features are, The transport equipment includes: One or more rotating devices are used to support and rotate the first substrate structure so that the first substrate structure is in an upright or horizontal state. A sheet picking and placing device is arranged adjacent to the rotating device. When the rotating device drives the first sheet carrier structure to a horizontal state, the sheet picking and placing device places multiple sheets to be processed and / or takes out multiple processed sheets in the first sheet carrier structure. One or more supporting structures are used to support multiple first carrier structures in an upright state; A buffer device includes a pre-processed placement position and a wafer replacement buffer position. The pre-processed placement position is used to place the carrier structure carrying the first wafer structure containing the pre-processed wafer. The carrier structure can be moved from the pre-processed placement position to the wafer replacement buffer position. A wafer carrier structure transport device is used to transport the first wafer carrier structure in an upright state between the wafer exchange buffer position and the rotating device; A carrier structure conveying device is arranged adjacent to the buffer device, and is used to convey the carrier structure carrying the first carrier structure containing the sheet to be processed, which is buffered by the buffer device, to the process equipment, and to output the carrier structure carrying the first carrier structure containing the processed sheet to the process equipment.

2. The transportation equipment according to claim 1, characterized in that, The cache device includes: The cache holder includes the pre-processed placement position and the wafer replacement cache position; Two or more carrier components are installed on the cache bracket and configured to support the carrier structure; the process placement position and the wafer replacement cache position are each provided with the carrier component, and the carrier structure can be moved from the carrier component corresponding to the process placement position to the carrier component corresponding to the wafer replacement cache position.

3. The transportation equipment according to claim 2, characterized in that, The cache device further includes: One or more load-bearing structure lifting components, wherein the load-bearing structure lifting components can be moved to the already processed placement position or the wafer replacement buffer position, and can be raised and lowered, for driving the load-bearing structure to detach from or be placed onto the load-bearing components; A lifting and conveying assembly is connected to the lifting assembly of the supporting structure and is used to drive the lifting assembly of the supporting structure to move so that the lifting assembly of the supporting structure is located at the already processed placement position or the wafer replacement buffer position; Each of the aforementioned support components includes two or more support blocks, which are installed on both sides of the buffer bracket to support the support structure. The support structure lifting component can extend from between the two support blocks to drive the support structure to detach from or be placed onto the support component.

4. The transportation equipment according to claim 1, characterized in that, The buffer device includes two or more process-ready placement positions and one wafer replacement buffer position. The process-ready placement positions and the wafer replacement buffer position are arranged sequentially along a first direction, and the supporting structure corresponding to each process-ready placement position can be moved to the wafer replacement buffer position.

5. The transportation equipment according to claim 1, characterized in that, The carrier structure conveying device can convey the carrier structure carrying the first carrier structure containing the processed sheet to the processed placement position, and when the processed sheet in the first carrier structure carried by the carrier structure corresponding to the sheet replacement buffer position is replaced with the sheet to be processed, the carrier structure corresponding to the sheet replacement buffer position can convey the carrier structure to the process equipment.

6. The transportation equipment according to claim 1, characterized in that, The load-bearing structure conveying device includes: An insertion component is used to place the carrier structure in the already-processed placement position, or to insert the carrier structure in the wafer replacement buffer position; A mobile conveying component is connected to the insertion component and drives the insertion component to move so that the insertion component places the carrier structure in the already-processed placement position or places it in the wafer change buffer position to insert the carrier structure.

7. The transport equipment according to any one of claims 1 to 6, characterized in that, The first side and the second side of the load-bearing structure conveying device are arranged opposite each other along the second direction. The first side and the second side of the load-bearing structure conveying device are each provided with the buffer device and the rotating device. The buffer device and the rotating device located on the same side are arranged sequentially along the first direction, wherein the second direction is perpendicular to the first direction. The sheet loading and unloading device is positioned between the two rotating devices.

8. The transportation equipment according to claim 1, characterized in that, The wafer transport device includes: Support frame; A transport assembly, disposed on the support frame, is used to transport the first wafer structure in an upright state between the wafer-changing buffer position of the buffer device and the rotating device.

9. The transportation equipment according to claim 1, characterized in that, Also includes: A buffer stage is disposed between the wafer changing buffer position and the rotating device, so that the first wafer carrier structure can be moved between the buffer device and the buffer stage, or between the rotating device and the buffer stage.

10. The transport equipment according to any one of claims 1 to 6, characterized in that, The rotating device includes: A positioning and clamping assembly is used to support the first carrier structure and to position and clamp the first carrier structure. A rotating component, connected to the positioning and clamping component, is used to drive the positioning and clamping component to rotate so that the first carrier structure is in an upright or horizontal state. A movable component has an insertion working area and a rotating working area along its moving path. The insertion working area is adjacent to the sheet picking and placing device, and the rotating working area is adjacent to the sheet carrier structure handling device. The movable component is connected to the rotating component and is used to drive the rotating component to move, so that the positioning and clamping component is located in the insertion working area and moves within the insertion working area, so that the sheet picking and placing device can place multiple sheets to be processed into the first sheet carrier structure, which is horizontal and carried by the positioning and clamping component, or place the positioning and clamping component in the rotating working area, and the rotating component drives the positioning and clamping component to rotate.

11. A process system, characterized in that, include: One or more process equipment, said process equipment having a process chamber, said process chamber being capable of accommodating multiple first wafer structures in a vertical position; The transport equipment as described in any one of claims 1 to 10 is arranged adjacent to one or more of the process equipment and is used to transport the sheet to be processed to the process equipment.

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