Handling system

Abstract

The utility model relates to a kind of handling systems, comprising: base;Handling device, is movably installed on base along first direction, to can be between at least two stations Product handling;Inertia hedging device, is movably installed on base along first direction, and the movement direction of inertia hedging device is opposite with handling device, to offset the movement inertia of handling device.Handling device when moving handling product along first direction, control the movement direction of inertia hedging device and handling device is opposite, so that inertia hedging device can offset the movement inertia of handling device, to reduce the influence of inertial action on the acceleration ability and response speed of handling device between station movement, improve the acceleration ability and response speed of handling device between station movement.And, inertia hedging device can offset the movement inertia of handling device, also can reduce the vibration problem due to inertia, improve the stability of handling device driven product movement and improve the positioning accuracy when taking and placing product.

Description

Technical Field

[0001] This utility model relates to the field of testing and sorting equipment technology, and in particular to a handling system. Background Technology

[0002] In the semiconductor manufacturing process, products (chips) need to undergo rigorous testing and classification to ensure that their performance and quality meet standards. During testing, products are typically transferred from the loading station to the testing station for testing. After testing, they are then transferred from the testing station to the unloading station for unloading. This transfer of products is usually achieved through a material handling system.

[0003] The material handling system includes a handling device, which moves between workstations to transfer products between them. Inertia not only affects the acceleration and response speed of the handling device between workstations, but also leads to poor stability in the movement of products and poor positioning accuracy when picking up and placing products due to vibration caused by inertial impact. Utility Model Content

[0004] Therefore, it is necessary to provide a material handling system that can improve upon the aforementioned problems.

[0005] A transport system, comprising:

[0006] Base;

[0007] A conveying device is movably mounted on the base in a first direction to enable the conveying of products between at least two workstations;

[0008] An inertia counteracting device is movably mounted on the base along the first direction, and the inertia counteracting device moves in the opposite direction to the movement direction of the conveying device, so as to counteract the movement inertia of the conveying device.

[0009] In the aforementioned handling system, when the handling device moves along the first direction to transport products, the inertia counterbalancing device moves in the opposite direction to the handling device. This allows the inertia counterbalancing device to counteract the inertia of the handling device, thereby reducing the impact of inertia on the acceleration and response speed of the handling device when moving between workstations, and improving the acceleration and response speed of the handling device when moving between workstations. Furthermore, the inertia counterbalancing device, by counteracting the inertia of the handling device, can also reduce vibration problems caused by inertia, improve the stability of the handling device in moving products, and improve the positioning accuracy when picking up and placing products.

[0010] In one embodiment, the conveying system further includes a first drive device mounted on the base, the conveying device being connected to the first drive device, and the first drive device being used to drive the conveying device to move relative to the base along the first direction;

[0011] and / or

[0012] The transport system further includes a second drive device mounted on the base, and the inertia counteracting device is connected to the second drive device. The second drive device is used to drive the inertia counteracting device to move relative to the base along the first direction.

[0013] In one embodiment, the first driving device is a first linear motor, which includes a first stator and a first moving part, and the conveying device is connected to the first moving part;

[0014] and / or

[0015] The second driving device is a second linear motor, which includes a second stator and a second mover. The inertia counteracting device is connected to the second mover.

[0016] In one embodiment, the conveying device and the inertia counteracting device are disposed on opposite sides of the base along a second direction;

[0017] The first direction and the second direction intersect.

[0018] In one embodiment, the conveying system further includes a first grating ruler mounted on the base and extending along the first direction, and the conveying device is equipped with a first reading head for reading the value on the first grating ruler;

[0019] and / or

[0020] The transport system also includes a second grating ruler mounted on the base and extending along the first direction, and a second reading head for reading the value on the second grating ruler is mounted on the inertia counteracting device.

[0021] In one embodiment, the conveying device includes:

[0022] The mounting structure is movably mounted on the base.

[0023] Both the vision mechanism and the suction nozzle mechanism are mounted on the mounting structure.

[0024] An adjustment mechanism is provided, wherein at least one of the nozzle mechanism and the vision mechanism is adjustable in position relative to the mounting structure via the adjustment mechanism.

[0025] The adjustment mechanism connected to the suction nozzle mechanism is used to adjust the suction surface of the suction nozzle mechanism to be parallel to the first plane;

[0026] The adjustment mechanism connected to the vision mechanism is used to adjust the optical axis of the vision mechanism to be perpendicular to the first plane;

[0027] The first direction is parallel to the first plane.

[0028] In one embodiment, the conveying system further includes a first limiting component mounted on the base, the first limiting component being used to limit the conveying device when the conveying device moves relative to the base along the first direction to the first extreme positions at both ends;

[0029] and / or

[0030] The transport system further includes a second limiting component installed on the base, the second limiting component being used to limit the inertia counteracting device when the inertia counteracting device moves relative to the base along the first direction to the second extreme positions at both ends.

[0031] In one embodiment, along the first direction, at least a portion of the first limiting component and the second limiting component located at at least one end of the base are shared.

[0032] In one embodiment, the inertia counterweight device includes a connecting plate and a counterweight, the connecting plate being movably connected to the base, and the counterweight being mounted on the connecting plate.

[0033] In one embodiment, the mass of the conveying device and the inertia counteracting device are equal. Attached Figure Description

[0034] Figure 1 A structural diagram of a handling system provided in an embodiment of this application;

[0035] Figure 2 for Figure 1 Another structural view of the conveying system shown;

[0036] Figure 3 for Figure 1 A structural diagram of the conveying system shown from another perspective;

[0037] Figure 4 for Figure 1 The structural diagram of the inertia counterbalancing device of the conveying system shown ( Figure 4 It also includes the first mover;

[0038] Figure 5 for Figure 1A structural diagram of a partial structure of the conveying system shown;

[0039] Figure 6 for Figure 5 A structural diagram of the structure shown from another perspective;

[0040] Figure 7 for Figure 5 A structural diagram from another perspective of the structure shown;

[0041] Figure 8 for Figure 1 The diagram shows the structure of the conveying device in the conveying system.

[0042] Figure 9 for Figure 8 A structural diagram of the conveying device shown from another perspective;

[0043] Figure 10 for Figure 8 A structural diagram of the conveying device shown from another perspective;

[0044] Figure 11 for Figure 8 A structural diagram of a portion of the conveying device shown;

[0045] Figure 12 for Figure 11 An exploded view of the structure shown;

[0046] Figure 13 for Figure 11 Another exploded view of the structure shown;

[0047] Figure 14 for Figure 11 A structural diagram of the structure shown from another perspective;

[0048] Figure 15 for Figure 14 Enlarged view of point E of the structure shown;

[0049] Figure 16 for Figure 8 The diagram shows the structure of the first eccentric pin of the adjusting mechanism of the conveying device (the structure of the second eccentric pin is the same as that of the first eccentric pin);

[0050] Figure 17 for Figure 8 An exploded view of the conveying device described above, concealing the vision mechanism and light source;

[0051] Figure 18 for Figure 10 Enlarged view of section B of the conveying device shown;

[0052] Figure 19 for Figure 8A cross-sectional view of the conveying device shown;

[0053] Figure 20 for Figure 19 Enlarged view of point D of the conveying device shown;

[0054] Figure 21 for Figure 10 Enlarged view of point A of the conveying device shown.

[0055] Explanation of reference numerals in the attached figures:

[0056] 1000. Handling system; 100a. Base; 10a. Support base; 11a. Support column; 20a. Support beam; 100b. Inertia counterweight; 10b. Connecting plate; 20b. Counterweight; 100c. Handling device; 10c. Mounting structure; 11c. Drive mechanism; 12c. Mounting base; 20c. Vision mechanism; 21c. Camera; 22c. Lens; 30c. Suction nozzle mechanism; 31c. Adsorption surface; 32c. Second drive assembly; 321 c. Housing; 322c. Ventilation component; 33c. Nozzle assembly; 331c. Nozzle rod; 332c. Nozzle; 341c. Connecting rod; 342c. First anti-drop sleeve; 343c. Second anti-drop sleeve; 344c. First set screw; 345c. Second set screw; 40c. Adjustment mechanism; 41c. First adjusting plate; 411c. First socket; 412c. Second socket; 42c. Second adjusting plate; 43c. First rotating shaft; 44c. Second rotating shaft; 4 5c, First eccentric pin; 451c, First through-hole part; 46c, Second eccentric pin; 47c, First adjusting member; 48c, First fixing member; 49c, Second adjusting member; 410c, Second fixing member; 4101c, Second rod part; 4102c, Second head; 50c, Light source; 60c, Vacuum generator; 100d, First driving device; 10d, First stator; 20d, First mover; 30d, First guide rail; 40d, First slider; 100 e, second drive unit; 10e, second stator; 20e, second mover; 30e, second guide rail; 40e, second slider; 100f, first grating ruler; 100g, first reading head; 100h, second grating ruler; 100i, second reading head; 100j, first limiting assembly; 10j, limiting plate; 20j, first buffer pad; 30j, second buffer pad; 100k, second limiting assembly; X, first direction; Y, second direction; Z, third direction. Detailed Implementation

[0057] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0058] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0059] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0060] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0061] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0062] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0063] See Figure 1 and Figure 2 One embodiment of this application provides a handling system 1000, which includes a base 100a, a handling device 100c, and an inertia counteracting device 100b. The handling device 100c and the inertia counteracting device 100b are both movably mounted on the base 100a along a first direction X.

[0064] Optionally, the base 100a includes a support seat 10a and a support beam 20a, with the support beam 20a mounted on the support seat 10a, forming the mounting foundation for the support beam 20a. In some specific embodiments, the support seat 10a includes two support columns 11a, spaced apart along a first direction X, and the support beam 20a extends along the first direction X and is mounted above the two support columns 11a. The conveying device 100c and the inertia counteracting device 100b are both movably mounted on the support beam 20a along the first direction X.

[0065] It is understood that in other embodiments, the structure of the base 100a is not limited, and when the base 100a includes a support 10a and a support beam 20a, the structure of the support 10a is also not limited.

[0066] Specifically, both the support base 10a and the support beam 20a are made of marble. Of course, in some other embodiments, the material of the support base 10a and the support beam 20a is not limited.

[0067] Since the conveying device 100c is movably mounted on the support beam 20a along the first direction X, it can convey products between at least two workstations. Optionally, the conveying device 100c can convey products between a transfer workstation and a testing workstation. Of course, in some other embodiments, the conveying device 100c can also convey products between multiple workstations, and the specific types of workstations are not limited here.

[0068] Furthermore, the inertia counterbalancing device 100b moves in the opposite direction to the first direction X, which is the same as the movement direction of the conveying device 100c along the first direction X. That is, when the conveying device 100c moves in the positive direction of the first direction X, the inertia counterbalancing device 100b moves in the negative direction; when the conveying device 100c moves in the negative direction of the first direction X, the inertia counterbalancing device 100b moves in the positive direction of the first direction X, ensuring that the movements of the inertia counterbalancing device 100b and the conveying device 100c are always opposite, thus counteracting the inertia of the conveying device 100c. Here, inertia is a physical quantity describing the magnitude of an object's inertia, typically including rotational inertia and linear inertia. The inertia known in this paper is linear inertia, which is directly related to the object's mass.

[0069] The conveying system 1000 provided in this application embodiment, when the conveying device 100c moves along the first direction X to convey products, controls the inertia counterbalancing device 100b to move in the opposite direction to the conveying device 100c. This allows the inertia counterbalancing device 100b to counteract the inertia of the conveying device 100c, thereby reducing the impact of inertia on the acceleration capability and response speed of the conveying device 100c when moving between workstations, and improving the acceleration capability and response speed of the conveying device 100c when moving between workstations. Furthermore, the inertia counterbalancing device 100b, in addition to counteracting the inertia of the conveying device 100c, can also reduce vibration problems caused by inertia, improve the stability of the conveying device 100c in moving products, and improve the positioning accuracy when picking up and placing products.

[0070] In some embodiments, see Figure 2 and Figure 3 The conveying device 100c and the inertia counteracting device 100b are disposed on opposite sides of the base 100a along the second direction Y. The first direction X intersects the second direction Y. Specifically, the first direction X is perpendicular to the second direction Y. The first direction X is the length direction of the support beam 20a, and the second direction Y is the width direction of the support beam 20a.

[0071] By placing the conveying device 100c and the inertia counteracting device 100b on opposite sides of the base 100a along the second direction Y, it is ensured that the inertia counteracting device 100b can completely counteract the motion inertia of the conveying device 100c without causing additional shaking.

[0072] Furthermore, the masses of the conveying device 100c and the inertia counterbalancing device 100b are equal. Since linear inertia is directly related to the mass of an object, by setting the masses of the conveying device 100c and the inertia counterbalancing device 100b to be equal, it is ensured that the inertia counterbalancing device 100b can counteract the operating inertia of the conveying device 100c.

[0073] It is conceivable that in some other embodiments, the mass of the conveying device 100c and the inertia counteracting device 100b may be different. In this case, the mass difference between the two can be filled by other components, such as by the moving part of the drive device that drives the two devices.

[0074] In some embodiments, see Figure 4 The inertia counterbalancing device 100b includes a connecting plate 10b and a counterweight 20b. The connecting plate 10b is connected to the support beam 20a, and the counterweight 20b is mounted on the connecting plate 10b. This arrangement facilitates the movable connection between the inertia counterbalancing device 100b and the support beam 20a via the connecting plate 10b. Furthermore, by mounting the counterweight 20b on the connecting plate 10b, the mass of the inertia counterbalancing device 100b can be adjusted, thereby counterbalancing the inertia of the conveying device 100c.

[0075] It is understood that in some other embodiments, the structure of the inertia counteracting device 100b is not limited. For example, the inertia counteracting device 100b may omit the mating block and only include the connecting plate 10b.

[0076] Continue reading Figure 2 The conveying system 1000 also includes a first drive device 100d, which is mounted on the support beam 20a. The conveying device 100c is connected to the first drive device 100d, and the first drive device 100d is used to drive the conveying device 100c to move relative to the support beam 20a in the first direction X.

[0077] In some embodiments, see Figure 5 The first driving device 100d is a first linear motor, which includes a first stator 10d and a first mover 20d. The conveying device 100c is connected to the first mover 20d. Specifically, the first linear motor also includes a first guide rail 30d and a first slider 40d. The first slider 40d is connected to the first guide rail 30d, and the conveying device 100c is connected to the first slider 40d. The first guide rail 30d extends along a first direction X. The first stator 10d generates a magnetic field that interacts with the magnetic field of the first mover 20d. The first mover 20d drives the conveying device 100c to move along the first direction X under the guidance of the first slider 40d and the first guide rail 30d.

[0078] In other embodiments, the first driving device 100d may also use a linear module to drive the conveying device 100c to move along the first direction X, which is not limited here.

[0079] The handling system 1000 also includes a first driver, which can receive control signals from the controller and transmit information to the first linear motor, driving the first linear motor to perform corresponding actions.

[0080] In some embodiments, see further reference. Figure 1 The conveying system 1000 also includes a second drive device 100e, which is mounted on the support beam 20a. The connecting plate 10b of the inertia counteracting device 100b is connected to the second drive device 100e. The second drive device 100e is used to drive the inertia counteracting device 100b to move relative to the support beam 20a in the first direction X.

[0081] Optionally, see Figure 4 and Figure 6 The second driving device 100e is a second linear motor, which includes a second stator 10e and a second mover 20e. An inertia counterbalancing device 100b is connected to the second mover 20e. Specifically, the second linear motor also includes a second guide rail 30e and a second slider 40e. The second slider 40e is connected to the second guide rail 30e, and the inertia counterbalancing device 100b is connected to the second slider 40e. The second guide rail 30e extends along the first direction X. The second stator 10e generates a magnetic field that interacts with the magnetic field of the second mover 20e. The second mover 20e drives the inertia counterbalancing device 100b to move along the first direction X under the guidance of the second slider 40e and the second guide rail 30e.

[0082] In other embodiments, the second driving device 100e may also use a linear module to drive the inertia counteracting device 100b to move along the first direction X, which is not limited here.

[0083] The conveying system 1000 also includes a second driver, which can receive control signals from the controller and transmit the information to the second linear motor, driving the second linear motor to perform corresponding actions.

[0084] When the conveying system 1000 is conveying products, the first driver and the second driver simultaneously send control signals to energize the coils of the first stator 10d of the first linear motor and the coils of the second linear motor. The first mover 20d and the second mover 20e, under the influence of the Lorentz force in the magnetic field, generate linear acceleration and move in opposite directions. This allows the inertia counterbalancing device 100b to counteract the inertial force of the conveying device 100c, thereby reducing the inertia of the conveying device 100c and improving its acceleration capability and response speed. Due to the reduction in inertial impact and vibration, the stability of the conveying device 100c during product conveying is improved, reducing the risk of material dropping.

[0085] In some embodiments, see further reference. Figure 3 The conveying system 1000 also includes a first grating ruler 100f, which is mounted on the support beam 20a and extends along the first direction X. The conveying device 100c is equipped with a first reading head 100g for reading the value on the first grating ruler 100f.

[0086] Since the first reading head 100g is installed on the conveying device 100c, it can follow the movement of the conveying device 100c. By reading the value of the first grating ruler 100f, the position of the conveying device 100c can be obtained in real time, so as to accurately control the movement position of the conveying device 100c.

[0087] See Figure 7 The conveying system 1000 also includes a second grating ruler 100h, which is mounted on the support beam 20a and extends along the first direction X. The inertia counteracting device 100b is equipped with a second reading head 100i for reading the value on the second grating ruler 100h.

[0088] Since the second reading head 100i is installed on the inertia counteracting device 100b, it can follow the movement of the inertia counteracting device 100b. By reading the value of the second grating ruler 100h, the position of the inertia counteracting device 100b can be obtained in real time, so as to accurately control the movement position of the inertia counteracting device 100b.

[0089] The first grating ruler 100f and the second grating ruler 100h are glass-ceramic grating rulers. The linear accuracy of the glass-ceramic grating ruler can reach below ±0.001mm, ensuring the positional accuracy of the material handling device 100c when picking up and placing materials. In addition, the glass-ceramic grating ruler has an ultra-low coefficient of thermal expansion close to zero expansion, reducing the influence of temperature on measurement accuracy and ensuring the positional accuracy of the material handling device 100c when operating in high-temperature environments.

[0090] In some embodiments, see Figure 5The conveying system 1000 also includes a first limiting component 100j, which is mounted on the support beam 20a. The first limiting component 100j is used to limit the conveying device 100c when it moves relative to the support beam 20a along the first direction X to the first limit positions at both ends. By setting the first limiting component 100j, the conveying device 100c is limited from exceeding the first limit position, thus limiting and protecting the conveying device 100c.

[0091] See Figure 7 The handling system 1000 also includes a second limiting component 100k, which is mounted on the support beam 20a. The second limiting component 100k is used to limit the inertia counterbalancing device 100b when it moves relative to the base 100a along the first direction X to its second extreme positions at both ends. By setting the second limiting component 100k, the inertia counterbalancing device 100b is prevented from exceeding the second extreme position, thus limiting and protecting the inertia counterbalancing device 100b.

[0092] Furthermore, along the first direction X, at least a portion of the first limiting component 100j and the second limiting component 100k located at at least one end of the support beam 20a are shared, so as to simplify the structural arrangement.

[0093] For some specific implementation methods, please refer to [link / reference]. Figure 6 The first limiting component 100j and the second limiting component 100k located at one end of the support beam 20a share a limiting plate 10j. The limiting plate 10j is equipped with a first buffer pad 20j and a second buffer pad 30j. The first buffer pad 20j is used to buffer the transport device 100c, and the second buffer pad 30j is used to buffer the inertia counteracting device 100b.

[0094] Specifically, when the conveying device 100c and the inertia counteracting device 100b are respectively disposed on both sides of the support beam 20a along the second direction Y, the limiting plate 10j is located at the end of the support beam 20a along the first direction X, and both ends extend along the second direction Y to both sides of the support beam 20a, the first buffer pad 20j is disposed at one end of the limiting plate 10j, and the second buffer pad 30j is disposed at the other end of the limiting plate 10j.

[0095] Of course, in some other embodiments, the first limiting component 100j and the second limiting component 100k at both ends of the support beam 20a may share the limiting plate 10j, which is not limited here.

[0096] See Figure 8The conveying device 100c includes a mounting structure 10c, a vision mechanism 20c, and a suction nozzle mechanism 30c, both of which are mounted on the mounting structure 10c. The suction nozzle mechanism 30c is used to pick up and place products, while the vision mechanism 20c is used to capture the position of the products picked up or placed by the suction nozzle mechanism 30c. Specifically, before the suction nozzle mechanism 30c picks up a product, the vision mechanism 20c captures the position of the product, and the suction nozzle mechanism 30c picks up the product based on the capture result from the vision mechanism 20c. After the suction nozzle mechanism 30c places the product on the workstation, the vision mechanism 20c can also capture the position of the suction nozzle 332c to observe whether the product is placed in the target position, ensuring feeding accuracy.

[0097] In some embodiments, the vision mechanism 20c includes a camera 21c and a lens 22c. The camera 21c is mounted on the mounting structure 10c, and the lens 22c is connected to the camera 21c. The cooperation between the camera 21c and the lens 22c can improve the shooting effect of the vision mechanism 20c. Of course, in other embodiments, the specific structure of the vision mechanism 20c is not limited. For example, the vision mechanism 20c may be configured to include only the camera 21c.

[0098] The conveying device 100c also includes an adjustment mechanism 40c, a suction nozzle mechanism 30c and a vision mechanism 20c, at least one of which is positionally adjustable between the adjustment mechanism 40c and the mounting structure 10c.

[0099] In some embodiments, the suction nozzle mechanism 30c is connected to the mounting structure 10c via an adjusting mechanism 40c, which adjusts the position between the suction nozzle mechanism 30c and the mounting structure 10c. The vision mechanism 20c is directly connected to the mounting structure 10c. In other embodiments, the vision mechanism 20c is connected to the mounting structure 10c via an adjusting mechanism 40c, which adjusts the position between the vision mechanism 20c and the mounting structure 10c. The suction nozzle mechanism 30c is directly connected to the mounting structure 10c. In still other embodiments, the vision mechanism 20c is connected to the mounting structure 10c via an adjusting mechanism 40c, and the suction nozzle mechanism 30c is also connected to the mounting structure 10c via an adjusting mechanism 40c. The adjusting mechanism 40c connected to the vision mechanism 20c adjusts the position between the vision mechanism 20c and the mounting structure 10c, and the adjusting mechanism 40c connected to the suction nozzle mechanism 30c adjusts the position between the suction nozzle mechanism 30c and the mounting structure 10c.

[0100] Furthermore, the adjustment mechanism 40c connected to the suction nozzle mechanism 30c is used to adjust the adsorption surface 31c of the suction nozzle mechanism 30c (see [reference]). Figure 9The optical axis of the vision mechanism 20c is parallel to the first plane. The adjustment mechanism 40c, connected to the vision mechanism 20c, is used to adjust the optical axis of the vision mechanism 20c to be perpendicular to the first plane. Generally, the first plane is parallel to the plane where the product is located. When the product is supported on the support surface, the first plane is also parallel to the support surface supporting the product.

[0101] In the above configuration, since at least one of the suction nozzle mechanism 30c and the vision mechanism 20c is connected to the mounting structure 10c via the adjustment mechanism 40c, the adjustment mechanism 40c connected to the suction nozzle mechanism 30c can adjust the adsorption surface 31c of the suction nozzle mechanism 30c to be parallel to the first plane. When the adsorption surface 31c is parallel to the first plane, the contact area between the suction nozzle mechanism 30c and the product is larger, resulting in better adsorption of the product. The adjustment mechanism 40c connected to the vision mechanism 20c can adjust the optical axis of the vision mechanism 20c to be perpendicular to the first plane. When the optical axis is perpendicular to the first plane, the vision mechanism 20c can capture the product at a better angle, resulting in better capturing effects. Compared with the prior art, the method of adjusting the suction nozzle mechanism 30c and / or the vision mechanism 20c via the adjustment mechanism 40c in this application does not require disassembling the suction nozzle mechanism 30c and / or the vision mechanism 20c from the mounting structure 10c for adjustment, saving time and effort.

[0102] Furthermore, the conveying device 100c also includes a controller, and the vision mechanism 20c and the suction nozzle mechanism 30c are both electrically connected to the controller. The controller can control the operation of the vision mechanism 20c and the suction nozzle mechanism 30c.

[0103] It is conceivable that in other embodiments, the conveying device 100c may not include a controller, but the vision mechanism 20c and the suction mechanism 30c may be controlled by the controller of the conveying system 1000 including the conveying device 100c, which is not limited here.

[0104] In some embodiments, see further reference. Figure 8 The mounting structure 10c includes a drive mechanism 11c and a mounting base 12c. Both the drive mechanism 11c and the suction nozzle mechanism 30c are mounted on the mounting base 12c. The vision mechanism 20c is connected to the drive mechanism 11c, which drives the vision mechanism 20c to move along a third direction Z. The third direction Z intersects with the first plane. Specifically, the third direction Z is perpendicular to the first plane.

[0105] Since the conveying device 100c can move products between the transfer station P and the testing station Q, the position of the vision mechanism 20c in the third direction Z needs to be adjusted to adapt to the different positions of the stations in the third direction Z. By setting the mounting structure 10c to include a drive mechanism 11c, which drives the vision mechanism 20c to move along the third direction Z, it is easy to adjust the position of the vision mechanism 20c in the third direction Z to adapt to the imaging and inspection of products at different stations.

[0106] In some embodiments, the mounting base 12c is composed of multiple mounting plates. It is understood that in other embodiments, the specific structure of the mounting base 12c is not limited, as long as it can enable the mounting of the drive mechanism 11c and the suction nozzle mechanism 30c.

[0107] In some embodiments, the driving mechanism 11c is a third linear module, which drives the vision mechanism 20c to move along the third direction Z. It should be understood that in other embodiments, the structure of the driving mechanism 11c is not limited, and the driving mechanism 11c is configured as long as it can achieve the effect of driving the vision mechanism 20c to move along the third direction Z.

[0108] See Figure 9 and Figure 10 The conveying device 100c also includes a light source 50c, which is also connected to the third linear module. The light source 50c is positioned opposite the lens 22c along the third direction Z to provide supplementary lighting for the camera 21c. When the vision mechanism 20c moves along the third direction Z, the light source 50c moves synchronously with the vision mechanism 20c.

[0109] In some embodiments, the adjustment mechanism 40c is used to adjust the rotation of the nozzle mechanism 30c or the vision mechanism 20c relative to the mounting structure 10c about a first axis and a second axis. Specifically, the adjustment mechanism 40c connected to the nozzle mechanism 30c adjusts the rotation of the nozzle mechanism 30c relative to the mounting structure 10c about a first axis and a second axis, and the adjustment mechanism 40c connected to the vision mechanism 20c adjusts the rotation of the vision mechanism 20c relative to the mounting structure 10c about a first axis and a second axis. The first axis extends along a first direction X, and the second axis extends along a second direction Y. The first direction X and the second direction Y intersect and are both parallel to a first plane.

[0110] It should be noted that when both the suction mechanism 30c and the vision mechanism 20c are provided with an adjustment mechanism 40c, the first axis corresponding to the suction mechanism 30c and the vision mechanism 20c can be the same axis or two parallel axes, and the second axis corresponding to the suction mechanism 30c and the vision mechanism 20c can be the same axis or two parallel axes.

[0111] With the above configuration, the adjustment mechanism 40c can easily adjust the suction surface 31c to be parallel to the first plane by adjusting the suction nozzle mechanism 30c to rotate relative to the mounting structure 10c around the first axis and the second axis. Furthermore, the adjustment mechanism 40c can easily adjust the optical axis of the vision mechanism 20c to be perpendicular to the first plane by adjusting the vision mechanism 20c to rotate relative to the mounting structure 10c around the first axis and the second axis.

[0112] Of course, in other embodiments, the adjustment mechanism 40c can also adjust the adsorption surface 31c to be parallel to the first plane in other ways, and adjust the optical axis of the vision mechanism 20c to be parallel to the first plane in other ways, which is not limited here.

[0113] See Figure 11 and Figure 12 The adjustment mechanism 40c includes a first adjustment plate 41c, a second adjustment plate 42c, a first rotating shaft 43c, and a second rotating shaft 44c. The first adjustment plate 41c is connected to the vision mechanism 20c or the suction nozzle mechanism 30c, and the second adjustment plate 42c connects the first adjustment plate 41c and the drive mechanism 11c. The first rotating shaft 43c extends along a first direction X, and the second rotating shaft 44c extends along a second direction Y. (See reference...) Figures 12-15 A first rotating shaft 43c passes through a first adjusting plate 41c and a second adjusting plate 42c, and a second rotating shaft 44c passes through a second adjusting plate 42c and a drive mechanism 11c. The first adjusting plate 41c rotates relative to the second adjusting plate 42c about a first axis via the first rotating shaft 43c, and the second adjusting plate 42c rotates relative to the mounting structure 10c about a second axis via the second rotating shaft 44c.

[0114] With the above configuration, since the first adjustment plate 41c is connected to the vision mechanism 20c or the suction nozzle mechanism 30c, when the first adjustment plate 41c rotates relative to the second adjustment plate 42c via the first rotating shaft 43c, the vision mechanism 20c or the suction nozzle mechanism 30c can rotate around the first axis relative to the mounting structure 10c. When the second adjustment plate 42c rotates relative to the mounting structure 10c via the second rotating shaft 44c, the vision mechanism 20c or the suction nozzle mechanism 30c can rotate around the second axis, so as to facilitate adjusting the adsorption surface 31c to be parallel to the first plane or the optical axis to be perpendicular to the first plane.

[0115] Optionally, please continue reading Figure 12 The first adjustment plate 41c includes a first socket 411c and a second socket 412c. The first socket 411c is sleeved on the outside of the camera 21c, and the second socket 412c is sleeved on the outside of the lens 22c, thereby improving the stability of the camera 21c and the lens 22c.

[0116] In some embodiments, see further reference. Figure 12The adjusting mechanism 40c also includes a first eccentric pin 45c arranged parallel to the first rotating shaft 43c. The first eccentric pin 45c includes two eccentrically arranged first through-parts 451c (see reference). Figure 16 The two first through-holes 451c are respectively rotatably disposed within the first adjusting plate 41c and the second adjusting plate 42c. Since the two first through-holes 451c of the first eccentric pin 45c are eccentrically disposed, when the first eccentric pin 45c is rotated, the first eccentric pin 45c causes the first adjusting plate 41c to rotate relative to the second adjusting plate 42c around the first axis.

[0117] Furthermore, the adjusting mechanism 40c also includes a second eccentric pin 46c, which includes two eccentrically positioned second through-holes (the structure can be referenced). Figure 16 The two second through-holes are respectively rotatably disposed within the second adjusting plate 42c and the mounting structure 10c. Due to the eccentric arrangement of the two second through-holes of the second eccentric pin 46c, when the second eccentric pin 46c is rotated, the second eccentric pin 46c causes the second adjusting plate 42c to rotate relative to the mounting structure 10c around the second axis.

[0118] In other embodiments, see Figures 17-20 The adjustment mechanism 40c further includes a first adjusting member 47c and a first fixing member 48c. The first adjusting member 47c is screwed into one of the first adjusting plate 41c and the second adjusting plate 42c along the second direction Y, and its end face abuts against the other. The first fixing member 48c includes a first rod portion and a first head. The first rod portion passes through the first adjusting plate 41c and the second adjusting plate 42c along the second direction Y. The first head is connected to one end of the first rod portion. The first rod portion is screwed into one of the first adjusting plate 41c and the second adjusting plate 42c that is away from the first head, and is clearance-fitted to the other, with the first head able to abut against and fix it.

[0119] In the above configuration, when the first adjusting plate 41c needs to rotate in the positive direction relative to the second adjusting plate 42c around the first axis, the first fixing member 48c is loosened, and the first adjusting member 47c, which is screwed to one of the first adjusting plate 41c and the second adjusting plate 42c, is screwed on. The end face of the first adjusting member 47c applies force to the other of the first adjusting plate 41c and the second adjusting plate 42c, causing the first adjusting plate 41c to rotate relative to the second adjusting plate 42c around the first axis. After the positions of the first adjusting plate 41c and the second adjusting plate 42c are adjusted, the first fixing member is screwed on to fix the first adjusting plate 41c and the second adjusting plate 42c. When the first adjusting plate 41c needs to rotate in the opposite direction relative to the second adjusting plate 42c about the first axis, the first adjusting member 47c, which is screwed into one of the first adjusting plate 41c and the second adjusting plate 42c, is fixed by tightening the first fixing member 48c to fix the first adjusting plate 41c and the second adjusting plate 42c.

[0120] The adjusting mechanism 40c also includes a second adjusting member 49c and a second fixing member 410c. The second adjusting member 49c is screwed into one of the second adjusting plate 42c and the mounting structure 10c along the first direction X, and its end face abuts against the other. The second fixing member 410c includes a second rod portion 4101c and a second head 4102c (see reference). Figure 18 The second rod portion 4101c passes through the second adjusting plate 42c and the mounting structure 10c along the first direction X. The second head 4102c is connected to one end of the second rod portion 4101c. The second rod portion 4101c is screwed to one of the second adjusting plate 42c and the mounting structure 10c that is away from the second head, and is clearance-fitted to the other one, and the second head 4102c can abut against and be fixed to that one.

[0121] With the above configuration, when the second adjusting plate 42c needs to rotate in the positive direction relative to the mounting structure 10c around the second axis, the second fixing member 410c is loosened, and the second adjusting member 49c, which is screwed into one of the second adjusting plate 42c and the mounting structure 10c, is tightened. The end face of the second adjusting member 49c applies force to the other of the second adjusting member 49c and the mounting structure 10c, causing the second adjusting plate 42c to rotate around the second axis relative to the mounting structure 10c. After the position of the second adjusting plate 42c and the mounting structure 10c is adjusted, the second fixing member 410c is tightened to fix the second adjusting plate 42c and the mounting structure 10c. When the second adjusting plate 42c needs to rotate in the opposite direction relative to the mounting structure 10c about the second axis, the second adjusting member 49c, which is screwed into one of the second adjusting plate 42c and the mounting structure 10c, is tightened so that the end face of the second adjusting member 49c is away from the other of the second adjusting plate 42c and the mounting structure 10c. The second fixing member 410c is tightened to fix the second adjusting plate 42c and the mounting structure 10c.

[0122] In some specific embodiments, the adjustment mechanism 40c connected to the vision mechanism 20c includes a first adjustment plate 41c, a second adjustment plate 42c, a first rotating shaft 43c, a second rotating shaft 44c, a first eccentric pin 45c, and a second eccentric pin 46c. The optical axis of the vision mechanism 20c is adjusted to be perpendicular to the first plane through the cooperation of these components. The adjustment mechanism 40c connected to the suction nozzle mechanism 30c includes a first adjustment plate 41c, a second adjustment plate 42c, a first rotating shaft 43c, a second rotating shaft 44c, a first adjustment member 47c, a first fixing member 48c, a second adjustment member 49c, and a second fixing member 410c. The suction surface 31c of the suction nozzle mechanism 30c is adjusted to be parallel to the first plane through the cooperation of these components.

[0123] It should be understood that in other embodiments, the adjustment mechanism 40c can be modified accordingly, such as by setting the adjustment mechanism 40c to include a first adjustment plate 41c, a second adjustment plate 42c, a first rotating shaft 43c, a second rotating shaft 44c, a first eccentric pin 45c, a second adjustment member 49c, and a second fixing member 410c, so that the optical axis of the vision mechanism 20c is adjusted to be perpendicular to the first plane or the adsorption surface 31c of the suction nozzle mechanism 30c is adjusted to be parallel to the first plane through the cooperation of each component.

[0124] In some embodiments, see further reference. Figure 9 The conveying device 100c includes two suction nozzle mechanisms 30c, which are distributed along a first direction X on both sides of the vision mechanism 20c. By including two suction nozzle mechanisms 30c in the conveying device 100c, the conveying device 100c can simultaneously convey multiple products, thereby improving work efficiency.

[0125] Specifically, when the conveying device 100c includes two suction nozzle mechanisms 30c, each suction nozzle mechanism 30c is connected to the mounting structure 10c through an adjustment mechanism 40c. The adjustment mechanism 40c is used to adjust the adsorption surface 31c of its corresponding suction nozzle mechanism 30c to be parallel to the first plane.

[0126] It is conceivable that in other embodiments, the conveying device 100c may be provided with only one suction mechanism 30c or more than two suction mechanisms 30c, which is not limited here.

[0127] Further reading Figure 9 and Figure 10The suction nozzle mechanism 30c includes a second drive assembly 32c and a suction nozzle assembly 33c connected to each other. The second drive assembly 32c is connected to the mounting structure 10c, and the suction nozzle assembly 33c is connected to the second drive assembly 32c. An adsorption surface 31c is formed on the suction nozzle assembly 33c. The second drive assembly 32c is used to drive the suction nozzle assembly 33c to move along a third direction Z to pick up and place products and to rotate about a third axis extending along the third direction Z. The third direction Z intersects with the first plane. Specifically, the third direction Z is perpendicular to the first plane. At this time, the first direction X, the second direction Y, and the third direction Z are all perpendicular to each other.

[0128] When the nozzle assembly 33c needs to pick up a product, the second drive assembly 32c drives the nozzle assembly 33c to approach the product to pick it up. When picking up the product requires transferring it from one station to another, the second drive assembly 32c drives the nozzle assembly 33c to move in the opposite direction, so that the nozzle assembly 33c avoids other structures during the product transfer process. Furthermore, since the second drive assembly 32c can also drive the nozzle assembly 33c to rotate around a third axis, it is convenient for the nozzle assembly 33c to place the product on the station in the correct posture.

[0129] Optionally, the nozzle assembly 33c is pluggably mounted on the first drive assembly 21b along the third direction Z to facilitate the replacement of the nozzle assembly 33c.

[0130] In some embodiments, see Figure 21 The second drive assembly 32c includes a housing 321c, a drive component, and a venting component 322c. The housing 321c is connected to the mounting structure 10c, and both the drive component and the venting component 322c are mounted on the housing 321c. The suction nozzle assembly 33c is mounted on the venting component 322c and communicates with its internal airflow channel. Specifically, the conveying device 100c also includes a vacuum generator 60c, and the airflow channel is connected to the vacuum generator 60c to create a vacuum state inside the suction nozzle assembly 33c to adsorb the product. The drive component drives the venting component 322c to move along a third direction Z and rotate around a third axis.

[0131] With the above configuration, the driving component can not only drive the nozzle assembly 33c to move along the third direction Z and rotate around the third axis through the vent 322c, but the vent 322c can also connect the nozzle assembly 33c with the vacuum generator 60c so as to form a vacuum state inside the nozzle assembly 33c.

[0132] The venting component 322c has a rod-shaped structure. The nozzle assembly 33c can be directly connected to the venting component 322c or connected to the venting component 322c through an intermediate connector.

[0133] For some specific implementation methods, please refer to [link / reference]. Figure 21The nozzle assembly 33c is connected to the venting component 322c via an intermediate connector. The intermediate connector includes a connecting rod 341c, a first anti-drop sleeve 342c, and a second anti-drop sleeve 343c. One end of the connecting rod 341c is sleeved over the venting component 322c. A first set screw 344c passes through the connecting rod 341c and the venting component 322c to secure them. The first anti-drop sleeve 342c is sleeved over the connecting rod 341c to cover the second set screw 345c and prevent it from falling off. The nozzle assembly 33c includes a nozzle rod 331c and a nozzle 332c. The nozzle 332c is connected to the nozzle rod 331c and is used to adsorb products. An adsorption surface 31c is formed on the nozzle 332c. The nozzle 332c can be made of materials such as rubber. The suction rod 331c is sleeved inside the other end of the connecting rod 341c. The second set screw 345c passes through the connecting rod 341c and the suction rod 331c to fix them together. The second anti-drop sleeve 343c is sleeved outside the connecting rod 341c to cover the second set screw 345c and prevent the second set screw 345c from falling off.

[0134] When it is necessary to replace the nozzle assembly 33c, first remove the second protective sleeve and the second set screw 345c, pull the nozzle rod 331c out of the connecting rod 341c, and then insert the new nozzle assembly 33c into the connecting rod 341c.

[0135] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0136] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A handling system, characterized in that, include: Base (100a); A conveying device (100c) is movably mounted on the base (100a) along a first direction (X) to be able to convey products between at least two workstations; An inertia counteracting device (100b) is movably mounted on the base (100a) along the first direction (X), and the inertia counteracting device (100b) moves in the opposite direction to the movement of the conveying device (100c) to counteract the inertia of the conveying device (100c).

2. The handling system according to claim 1, characterized in that, The conveying system further includes a first drive device (100d), which is mounted on the base (100a). The conveying device (100c) is connected to the first drive device (100d), and the first drive device (100d) is used to drive the conveying device (100c) to move relative to the base (100a) along the first direction (X). and / or The transport system further includes a second drive device (100e), which is mounted on the base (100a). The inertia counteracting device (100b) is connected to the second drive device (100e), and the second drive device (100e) is used to drive the inertia counteracting device (100b) to move relative to the base (100a) along the first direction (X).

3. The handling system according to claim 2, characterized in that, The first driving device (100d) is a first linear motor, which includes a first stator (10d) and a first mover (20d). The conveying device (100c) is connected to the first mover (20d). and / or The second drive device (100e) is a second linear motor, which includes a second stator (10e) and a second mover (20e). The inertia counteracting device (100b) is connected to the second mover (20e).

4. The handling system according to claim 1, characterized in that, The conveying device (100c) and the inertia counteracting device (100b) are disposed on opposite sides of the base (100a) along the second direction (Y); The first direction (X) and the second direction (Y) intersect.

5. The handling system according to claim 1, characterized in that, The transport system further includes a first grating ruler (100f) mounted on the base (100a) and extending along the first direction (X), and a first reading head (100g) for reading the value on the first grating ruler (100f) is mounted on the transport device (100c); and / or The transport system also includes a second grating ruler (100h) mounted on the base (100a) and extending along the first direction (X), and a second reading head (100i) for reading the value on the second grating ruler (100h) is mounted on the inertia counteracting device (100b).

6. The handling system according to claim 1, characterized in that, The conveying device (100c) includes: The mounting structure (10c) is movably mounted on the base (100a); The vision mechanism (20c) and the suction nozzle mechanism (30c) are both mounted on the mounting structure (10c); An adjustment mechanism (40c) is provided, wherein at least one of the suction nozzle mechanism (30c) and the vision mechanism (20c) is positionally adjustable between the adjustment mechanism (40c) and the mounting structure (10c). The adjustment mechanism (40c) connected to the suction nozzle mechanism (30c) is used to adjust the adsorption surface (31c) of the suction nozzle mechanism (30c) to be parallel to the first plane; The adjustment mechanism (40c) connected to the vision mechanism (20c) is used to adjust the optical axis of the vision mechanism (20c) to be perpendicular to the first plane; The first direction (X) is parallel to the first plane.

7. The handling system according to claim 1, characterized in that, The transport system further includes a first limiting component (100j) mounted on the base (100a), the first limiting component (100j) being used to limit the transport device (100c) when the transport device (100c) moves relative to the base (100a) along the first direction (X) to the first extreme positions at both ends; and / or The transport system further includes a second limiting component (100k) mounted on the base (100a), the second limiting component (100k) being used to limit the inertia counteracting device (100b) when the inertia counteracting device (100b) moves relative to the base (100a) along the first direction (X) to the second extreme positions at both ends.

8. The handling system according to claim 7, characterized in that, Along the first direction (X), at least a portion of the first limiting component (100j) and the second limiting component (100k) located at at least one end of the base (100a) are shared.

9. The handling system according to any one of claims 1-8, characterized in that, The inertia counterweight device (100b) includes a connecting plate (10b) and a counterweight (20b). The connecting plate (10b) is movably connected to the base (100a), and the counterweight (20b) is mounted on the connecting plate (10b).

10. The handling system according to any one of claims 1-8, characterized in that, The mass of the conveying device (100c) and the inertia counteracting device (100b) are equal.

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