A flipping mechanism and vacuum coating equipment

Abstract

This utility model discloses a substrate flipping mechanism and a vacuum coating equipment. The flipping mechanism includes: a flipping assembly, which includes a base and two clamping parts, respectively disposed on the upper and lower sides of the base to define a substrate mounting space; the base is rotatable to switch either clamping part to the upper side; and a lifting assembly, which includes a first lifting part, which is vertically and vertically disposed below the flipping assembly; wherein the first lifting part can move upward to lift the clamping part located on the upper side until it separates from the base, thereby opening the substrate mounting space. This utility model can flip the substrate 180 degrees, has a simple and reliable structure, and occupies a small area with low maintenance costs.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a flipping mechanism and a vacuum coating equipment. Background Technology

[0002] In the field of vacuum coating processes, especially in processes requiring double-sided coating such as through-glass vapor deposition (TGV), a flipping mechanism is needed to flip the substrate. This mechanism must simultaneously perform the functions of flipping and clamping / releasing the substrate. Existing flipping mechanisms are complex in design, resulting in numerous drawbacks such as large footprint, high maintenance costs, and low reliability. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention provides a flipping mechanism that can flip a substrate 180 degrees. It has a simple and reliable structure, a small footprint, and low maintenance costs.

[0004] This utility model also proposes a vacuum coating equipment including the above-mentioned flipping mechanism.

[0005] The flipping mechanism according to the first aspect of the present invention includes:

[0006] A flipping assembly includes a base and two clamping parts, which are respectively disposed on the upper and lower sides of the base to define a substrate mounting space. The base is rotatably configured to switch either clamping part to be located on the upper side.

[0007] A lifting assembly, the lifting assembly including a first lifting part, the first lifting part being vertically and vertically disposed below the flipping assembly;

[0008] The first lifting part can move upward to lift the clamping part located on the upper side until it separates from the base, thereby opening the substrate mounting space.

[0009] The flipping mechanism according to the embodiments of this utility model has at least the following beneficial effects:

[0010] By rotating the base and setting clamping parts on the upper and lower sides of the base for limiting the substrate, the substrate can be rotated 180 degrees. By raising and lowering the first lifting part, the clamping parts on the upper side can be lifted up during substrate loading and unloading, thereby opening the substrate mounting space to facilitate substrate loading and unloading by robotic arms and other substrate transfer mechanisms. The structure is simple and easy to operate. Since the first lifting part is located below the flipping component, it occupies less horizontal space and reduces the overall footprint. In addition, the flipping component for flipping the substrate and the first lifting part for opening the substrate mounting space are set independently, which has high reliability, is convenient and low-cost to maintain. Furthermore, since the two are set independently, the transmission structure for the flipping component and the first lifting part can be designed separately, which not only reduces the overall complexity of the equipment, but also improves the stability of the equipment operation.

[0011] According to some embodiments of the present invention, the two clamping parts are adsorbed onto the base by a magnetic attraction assembly.

[0012] According to some embodiments of the present invention, the clamping part is provided with an abutment structure, and the abutment structures of the two clamping parts are staggered in the horizontal direction and are 180 degrees rotationally symmetrical with respect to the rotation axis of the base.

[0013] The first lifting part can move upward through the clamping part located on the lower side and lift the abutting structure of the clamping part located on the upper side, so as to separate the clamping part located on the upper side from the base.

[0014] According to some embodiments of the present invention, the base is provided with a vertically penetrating first clearance opening, the clamping part is provided with a protrusion, the protrusion is inserted into the first clearance opening, and the protrusions of the two clamping parts surround to form the substrate mounting space.

[0015] According to some embodiments of the present invention, the lifting assembly further includes:

[0016] The second lifting section is vertically and vertically disposed below the flipping assembly and is capable of moving upward to pass through the substrate mounting space.

[0017] According to some embodiments of the present invention, the first lifting part and the second lifting part are connected as an integral structure, the top end of the first lifting part is higher than the second lifting part, and when the first lifting part moves upward to abut against the clamping part located on the upper side, the top end of the second lifting part is lower than the substrate mounting space.

[0018] According to some embodiments of the present invention, both the first lifting part and the second lifting part are configured as rod-shaped structures, and multiple rod-shaped structures are provided.

[0019] According to some embodiments of the present invention, a guide portion is provided between the base and the clamping portion. The guide portion is fixedly connected to one of the base and the clamping portion and slidably connected to the other. The guide portion is vertically distributed.

[0020] According to some embodiments of the present invention, the base is coaxially provided with connecting shafts on opposite sides in the horizontal direction, and the flipping mechanism further includes:

[0021] The cavity has mounting portions on its two opposite side walls, and the mounting portions are rotatably connected to the connecting shaft.

[0022] A rotary drive device is connected to any of the connecting shafts to drive the connecting shafts to rotate about their own axes.

[0023] The vacuum coating equipment according to a second aspect of the present invention includes a flipping mechanism of any of the above embodiments.

[0024] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0026] Figure 1 This is a schematic diagram of the overall structure of the flipping mechanism according to an embodiment of the present utility model;

[0027] Figure 2 Figure 1 A schematic diagram of a partial structure;

[0028] Figure 3 This is a schematic diagram of the state of the flipping component of this utility model when the substrate is installed;

[0029] Figure 4 This is a schematic diagram of the flipping mechanism of this utility model when the substrate is supported by the second lifting part;

[0030] Figure 5 This is a schematic diagram of the state of the flipping assembly in an embodiment of the present invention when the substrate is supported by the second lifting part;

[0031] Figure 6 This is a schematic diagram of the structure of the flipping component according to an embodiment of the present invention;

[0032] Figure 7 This is an exploded view of the structure of the flipping component according to an embodiment of the present invention;

[0033] Figure 8 This is a schematic diagram of the clamping part according to an embodiment of the present invention.

[0034] Icon labels:

[0035] The components include: a flipping assembly 100, a base 110, a first clearance opening 111, a clamping part 120, a protrusion 121, a supporting surface 122, a limiting stop bar 123, a second clearance opening 124, an abutment block, a sliding sleeve 126, a guide part 130, a connecting shaft 140, a first magnet 150, and a second magnet 160.

[0036] Lifting assembly 200, first lifting part 210, second lifting part 220, mounting plate 230;

[0037] Cavity 300, conveying port 301, mounting part 310;

[0038] Rotary drive unit 400;

[0039] Lifting drive device 500, connecting part 510;

[0040] Substrate 600;

[0041] Robotic arm 700. Detailed Implementation

[0042] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0043] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0044] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0045] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0046] In the field of vacuum coating processes, especially in processes requiring double-sided coating such as through-glass vapor deposition (TGV), a flipping mechanism is needed to flip the substrate. This mechanism must simultaneously perform the functions of flipping and clamping / releasing the substrate. Existing flipping mechanisms are complex in design, resulting in numerous drawbacks such as large footprint, high maintenance costs, and low reliability.

[0047] Based on this, the present invention proposes a flipping mechanism and a vacuum coating equipment, which can effectively improve the above-mentioned problems.

[0048] The flipping mechanism and vacuum coating equipment of this utility model are described below with reference to the accompanying drawings.

[0049] Reference Figure 1 , Figure 2 and Figure 4 As shown, the flipping mechanism of the first aspect of this utility model includes a flipping component 100 and a lifting component 200.

[0050] The flipping assembly 100 includes a base 110 and two clamping parts 120, which are respectively disposed on the upper and lower sides of the base 110 to define the substrate mounting space. The base 110 can be rotated to switch the position of either clamping part 120 to the upper side. For ease of understanding, taking the two clamping parts 120 as the first clamping part and the second clamping part as the second clamping part, the base 110 can rotate to position either the first clamping part on the upper side and the second clamping part on the lower side, or vice versa. Thus, after the substrate 600 is placed in the substrate mounting space, the substrate 600 can be flipped 180 degrees by rotating the base 110. Obviously, the rotation axis of the base 110 is horizontally distributed.

[0051] The lifting assembly 200 includes a first lifting portion 210, which is vertically and elliptably disposed below the tilting assembly 100. The first lifting portion 210 is capable of moving upward to lift the clamping portion 120 located on the upper side until it separates from the base 110 (e.g., Figure 4As shown, the substrate mounting space is opened to enable the placement and removal of the substrate 600. It should be noted that the first lifting part 210 has an initial position. When the first lifting part 210 is in the initial position, it avoids the rotation path of the base 110 to avoid interference. In addition, when either of the two clamping parts 120 is on the upper side, the first lifting part 210 can move upward to lift the clamping part 120 on the upper side until it is separated from the base 110, thereby opening the substrate mounting space.

[0052] During operation, the base 110 is rotated so that either clamping part 120 is positioned on the upper side. Then, the first lifting part 210 moves upward to lift the upper clamping part 120 until it separates from the base 110, thus opening the substrate mounting space. The substrate 600 is then transferred between the two clamping parts 120 via a substrate transfer mechanism such as a robotic arm 700. After the substrate 600 is in place and the robotic arm 700 retracts, the first lifting part 210 is lowered to its original position, causing the upper clamping part 120 to fall back down under gravity and re-engage with the base 110, thus aligning with the lower clamping part 120. The side clamping part 120 restricts the substrate 600 within the substrate mounting space. Then, the base 110 can be rotated to switch the positions of the two clamping parts 120, switching the clamping part 120 originally located on the lower side to the upper side, thereby realizing the 180-degree flip of the substrate 600. After the flip is completed, the first lifting part 210 is moved upward again to lift the clamping part 120 located on the upper side until it is separated from the base 110, so as to open the substrate mounting space. Then, the substrate 600 can be removed for related processes, and a new substrate 600 can be inserted for a new round of flipping operations.

[0053] The flipping mechanism of this utility model, by rotating the base 110 and providing clamping parts 120 for limiting the substrate 600 on the upper and lower sides of the base 110, allows the substrate 600 to be flipped 180 degrees by rotating the base 110. By raising and lowering the first lifting part 210, the clamping parts 120 located on the upper side can be lifted during substrate loading and unloading, thereby opening the substrate mounting space to facilitate substrate loading and unloading by a robotic arm 700 or other substrate transfer mechanism. The structure is simple and the operation is convenient. The lifting section 210 is located below the flipping assembly 100, which occupies less horizontal space and reduces the overall footprint. In addition, the flipping assembly 100 for flipping the substrate 600 and the first lifting section 210 for opening the substrate mounting space are set independently, which has high reliability, is convenient and low in maintenance cost. Since the two are set independently, the transmission structure for the flipping assembly 100 and the first lifting section 210 can be designed separately, which not only reduces the overall complexity of the equipment, but also improves the stability of the equipment operation.

[0054] It should be noted that the flipping mechanism in this embodiment can be applied not only to the flipping of glass substrates, but also to the flipping of other types of substrates. It is applicable to any substrate that requires double-sided processing, and this embodiment does not make any specific limitations on this.

[0055] It is conceivable that, in order to enable the clamping part 120 located on the upper side to be lifted by the first lifting part 210 to separate from the base 110, and to enable the clamping part 120 located on the upper side to reconnect with the base 110 and not easily separate when the first lifting part 210 moves down to reset, a structure that can automatically engage and connect and can disconnect under external force can be provided between the base 110 and the clamping part 120.

[0056] For example, refer to Figure 2 and Figure 7 As shown, in some embodiments, the two clamping parts 120 are attracted to the base 110 by a magnetic attraction assembly. With this configuration, when the first lifting part 210 moves upward, only a force greater than the magnetic attraction force of the magnetic attraction assembly needs to be applied to the clamping part 120 located on the upper side, so that the clamping part 120 located on the upper side can be separated from the base 110. After the first lifting part 210 moves downward and resets, the clamping part 120 located on the upper side can fall under its own gravity and re-attach to the base 110 by the magnetic attraction assembly. Obviously, the magnetic attraction assembly not only has the function of automatic engagement, but also provides a stable engagement force to prevent the clamping part 120 from detaching from the base 110 during the rotation of the base 110.

[0057] In some embodiments, such as Figure 6 and Figure 7 As shown, the magnetic attraction assembly includes a first magnet 150 and a second magnet 160. The first magnet 150 is disposed on the clamping part 120, and the second magnet 160 is disposed on the base 110. The clamping part 120 is attracted to the base 110 by the cooperation of the first magnet 150 and the second magnet 160. The north and south poles of the first magnet 150 and the second magnet 160 are distributed vertically relative to each other.

[0058] It is conceivable that, to ensure the connection stability between the base 110 and the clamping part 120, multiple first magnets 150 can be provided and evenly distributed on the clamping part 120, and multiple second magnets 160 can be provided correspondingly and evenly distributed on the base 110. Furthermore, two sets of second magnets 160 can be provided, respectively located on the upper and lower sides of the base 110, with each set of second magnets 160 used to cooperate with the first magnets 150 on the two clamping parts 120. Of course, in this embodiment, the specific number and arrangement of the first magnets 150 and the second magnets 160 are not limited.

[0059] Furthermore, to facilitate the assembly and disassembly of the magnetic components, a slot or hole for accommodating the first magnet 150 can be provided on the clamping part 120, and the first magnet 150 can be locked on the clamping part 120 by screws, while exposing the end of the first magnet 150 near the base 110; in addition, a slot or hole for accommodating the second magnet 160 can be provided on the base 110, and the second magnet 160 can be locked on the base 110 by screws, while exposing the end of the second magnet 160 that is used to cooperate with the first magnet 150.

[0060] Reference Figure 6 As shown, in some embodiments, the clamping portion 120 is provided with an abutment structure 125. The abutment structures 125 of the two clamping portions 120 are staggered in the horizontal direction and are 180 degrees rotationally symmetrical with respect to the rotation axis of the base 110. The first lifting portion 210 can move upward through the lower clamping portion 120 and lift the abutment structure 125 of the upper clamping portion 120, thereby separating the upper clamping portion 120 from the base 110. It is evident that the clamping portion 120 and the abutment structure 125 are an integral structure. The abutment structure 125 of the upper clamping portion 120 is vertically aligned with the first lifting portion 210, while the abutment structure 125 of the lower clamping portion 120 is horizontally staggered from the first lifting portion 210.

[0061] In this embodiment, by displacing the abutment structures 125 of the two clamping parts 120 in a horizontally staggered manner, interference between the first lifting part 210 and the abutment structure 125 of the clamping part 120 located on the lower side can be avoided when the first lifting part 210 moves upward. Furthermore, by making the abutment structures 125 of the two clamping parts 120 180 degrees rotationally symmetrical with respect to the rotation axis of the base 110, the abutment structure 125 of the upper clamping part 120 can be vertically aligned with the first lifting part 210 when either of the two clamping parts 120 is located on the upper side, ensuring that the first lifting part 210 can lift the clamping part 120 located on the upper side.

[0062] It is conceivable that, in order to avoid interference between the first lifting part 210 and the substrate 600, the vertical movement path of the first lifting part 210 avoids the substrate mounting space.

[0063] Reference Figure 3 , Figure 7 and Figure 8As shown, in some embodiments, the base 110 is provided with a vertically penetrating first clearance opening 111, and the clamping part 120 is provided with a protrusion 121. The protrusion 121 is inserted into the first clearance opening 111, and the protrusions 121 of the two clamping parts 120 surround to form a substrate mounting space. Specifically, the protrusions 121 of the two clamping parts 120 are provided with horizontal support surfaces 122 and limiting bars 123 protruding from the support surfaces 122 on the opposite side. The support surfaces 122 and the limiting bars 123 of the two clamping parts 120 together enclose a substrate mounting space. The support surfaces 122 are used to limit the displacement of the substrate 600 in its thickness direction, while the limiting bars 123 are used to abut against the circumferential edge of the substrate 600 to limit the displacement of the substrate 600 in other directions perpendicular to its thickness direction, thereby confining the substrate 600 within the substrate mounting space and preventing the substrate 600 from falling when it is flipped.

[0064] It is conceivable that the base 110 could be configured as a ring-shaped frame structure to reduce weight.

[0065] It is conceivable that when the substrate 600 is rectangular, limiting strips 123 can be provided on the support surface 122 corresponding to the four sides of the substrate 600. Of course, when the substrate 600 is circular, multiple limiting strips or annular limiting strips can be arranged on the support surface 122 around the circumference; in this embodiment, the specific shape and number of limiting strips 123 are not limited.

[0066] It is conceivable that by setting a support surface 122 to limit the thickness of the substrate 600, and setting a limiting stop 123 to abut against the circumferential edge of the substrate 600, the two clamping parts 120 can stably limit the substrate 600 without clamping it tightly, thereby avoiding damage to the substrate 600. Specifically, as... Figure 3 As shown, when the two clamping parts 120 are attached to the upper and lower sides of the base 110, the distance between the support surfaces 122 of the two clamping parts 120 is slightly greater than the thickness of the substrate 600.

[0067] Reference Figure 1 , Figure 2 and Figure 4 As shown, in some embodiments, the lifting assembly 200 further includes a second lifting portion 220, which is vertically and vertically disposed below the flipping assembly 100, and the second lifting portion 220 can move upward to pass through the substrate mounting space. Obviously, if a substrate 600 is placed in the substrate mounting space, when the second lifting portion 220 moves upward, it can lift the substrate 600 to separate it from the clamping portion 120 located on the lower side.

[0068] In this embodiment, by raising and lowering the second lifting part 220, during the placement of the substrate, the first lifting part 210 and the second lifting part 220 can be moved upwards. The first lifting part 210 sequentially lifts the upper clamping part 120 until it separates from the base 110, and the top end of the second lifting part 220 passes through the substrate mounting space between the base 110 and the upper clamping part 120. Then, the robot arm 700 transfers the substrate 600 onto the second lifting part 220. Afterwards, the second lifting part 220 and the first lifting part 210 are lowered back to their original positions, thus sequentially supporting the substrate 600 in place. The lower clamping part 120 is used to reconnect the upper clamping part 120 with the base 110, and the lower clamping part 120 is used to limit the substrate 600. When picking up the substrate, the first lifting part 210 and the second lifting part 220 are moved upward, and the first lifting part 210 lifts the upper clamping part 120 to separate it from the base 110, and the second lifting part 220 lifts the substrate 600 to between the base 110 and the upper clamping part 120. Then the robot arm 700 takes away the substrate 600. The picking and putting operation of the substrate 600 is very convenient.

[0069] It is conceivable that the clamping part 120 needs to be equipped with a clearance structure to avoid the second lifting part 220. For example, refer to Figure 5 and Figure 7 As shown, in some embodiments, the clamping part 120 is configured as an annular frame structure to form a second clearance opening 124. This configuration not only allows the second lifting part 220 to be cleared, but also reduces the weight of the clamping part 120.

[0070] It is conceivable that the first lifting part 210 and the second lifting part 220 can be set independently, that is, their lifting movements can be independent of each other. Of course, other forms can also be adopted.

[0071] For example, refer to Figure 2 and Figure 4 As shown, in some embodiments, the first lifting part 210 and the second lifting part 220 are connected as a single structure and can be raised and lowered synchronously. With this configuration, the first lifting part 210 and the second lifting part 220 can be driven by the same driving device, which simplifies the transmission structure. Specifically, the top of the first lifting part 210 is higher than the second lifting part 220. When the first lifting part 210 moves upward to abut against the clamping part 120 located on the upper side, the top of the second lifting part 220 is lower than the substrate mounting space. Thus, when the substrate 600 is placed in the substrate mounting space and is being removed, the second lifting part 220 will not come into contact with the substrate 600 before the first lifting part 210 lifts the clamping part 120 located on the upper side, thereby avoiding damage to the substrate 600.

[0072] Reference Figure 2As shown, in some embodiments, the lifting assembly 200 further includes a mounting plate 230. Multiple first lifting portions 210 are provided and are rod-shaped structures, as are multiple second lifting portions 220, which are also rod-shaped structures. Both the first lifting portions 210 and the second lifting portions 220 are vertically fixed to the upper surface of the mounting plate 230 so as to move synchronously up and down with the mounting plate 230. The multiple first lifting portions 210 are located around the multiple second lifting portions 220.

[0073] It is understandable that setting the first lifting part 210 and the second lifting part 220 as rod-shaped structures and setting multiple of them can facilitate the robot arm 700 to enter and exit the opened substrate mounting space when picking up and placing substrates.

[0074] Reference Figure 1 and Figure 2 As shown, in some embodiments, the flipping mechanism further includes a lifting drive device 500, which is connected to the mounting plate 230 for driving the mounting plate 230 to lift.

[0075] Reference Figure 5 and Figure 7 As shown, in some embodiments, the abutment structure 125 of the clamping part 120 is configured as an abutment block, and the abutment block is provided with a vertical through-hole. The first lifting part 210 is a rod-shaped structure and has an upward-facing stepped surface at the top. During the process of the first lifting part 210 moving upward to lift the clamping part 120 located on the upper side, the top of the first lifting part 210 can be inserted into the hole, and its stepped surface can abut against the lower end surface of the abutment block, thereby pushing the clamping part 120 located on the upper side to move upward.

[0076] Reference Figure 6 and Figure 7 As shown, in some embodiments, a guide portion 130 is provided between the base 110 and the clamping portion 120. The guide portion 130 is fixedly connected to one of the base 110 and the clamping portion 120 and slidably connected to the other. The guide portion 130 is vertically distributed. In this way, the guide portion 130 can provide guidance for the lifting and lowering movement of the clamping portion 120 relative to the base 110, so as to avoid horizontal misalignment between the clamping portion 120 located on the upper side and the base 110.

[0077] Reference Figure 6 and Figure 7 As shown, in some embodiments, the guide portion 130 is configured as a rod-shaped structure and fixed on the base 110. The upper and lower ends of the guide portion 130 protrude from the base 110 respectively. Sliding sleeves 126 are fixedly provided on both clamping portions 120 to slide and cooperate with the guide portion 130.

[0078] It is understandable that even if the clamping part 120 and the base 110 are connected by a magnetic attraction assembly, there is still a possibility that the clamping part 120 may accidentally detach from the base 110 during the flipping process. In order to prevent the clamping part 120 from accidentally detaching from the base 110 and falling, detachable blocks can be provided at both ends of the guide part 130 to prevent the clamping part 120 from separating from the guide part 130 and improve safety.

[0079] Reference Figure 1 and Figure 2 As shown, in some embodiments, the base 110 is coaxially provided with connecting shafts 140 on opposite sides in the horizontal direction. The flipping mechanism also includes a cavity 300 and a rotary drive device 400. The cavity 300 has mounting portions 310 on its two opposite sidewalls, which are rotatably connected to the connecting shafts 140. Specifically, a bearing can be provided between the mounting portion 310 and the connecting shaft 140. The rotary drive device 400 is drively connected to either connecting shaft 140 to drive the connecting shaft 140 to rotate around its own axis, thereby driving the base 110 to rotate around the central axis of the connecting shaft 140. By adopting the above structural configuration, both sides of the base 110 can be supported by the mounting portions 310, resulting in a stable and reliable structure.

[0080] It should be noted that the flipping of the substrate 600 needs to be performed in a vacuum environment. Therefore, in this embodiment, the cavity 300 is a vacuum environment. The flipping assembly 100 and the lifting assembly 200 are disposed inside the cavity 300, while the rotary drive device 400 and the lifting drive device 500 are disposed outside the cavity 300. The lifting drive device 500 can transmit power to the cavity 300 through a sealed bellows, while the rotary drive device 400 can transmit power to the cavity 300 through a magnetohydrodynamic fluid. This is a conventional technical method and will not be described in detail here. In addition, a conveying port 301 is provided on the side wall of the cavity 300. This conveying port 301 is disposed on the side wall adjacent to the mounting part 310 for the passage of the robotic arm 700.

[0081] It is conceivable that the lifting drive device 500 can be selected in various forms, such as hydraulic cylinders, pneumatic cylinders, motor screw structures, etc. All of the above-mentioned drive forms are conventional technical means, and this embodiment does not specifically limit or explain their principles. Similarly, the rotary drive device 400 can also be selected in various forms, such as rotary motors, rotary cylinders, etc., which are also conventional technical means; therefore, this embodiment does not specifically limit or explain their principles.

[0082] The following describes a flipping mechanism according to one specific embodiment of the present invention, with reference to... Figures 1 to 8 As shown, the flipping mechanism includes: a cavity 300, a flipping assembly 100, a lifting assembly 200, a rotation drive device 400, and a lifting drive device 500.

[0083] The cavity 300 is a vacuum environment. The cavity 300 has two opposite side walls in the horizontal direction with mounting parts 310. A conveying port 301 is provided on the side wall adjacent to the mounting parts 310 in the horizontal direction. The conveying port 301 is used for the robot arm 700 to pass through.

[0084] The flipping assembly 100 includes a base 110 and two clamping parts 120. The base 110 is rotatably configured and is a ring-shaped frame mechanism with a vertically penetrating first clearance opening 111. A connecting shaft 140 is coaxially configured on opposite sides of the base 110 in the horizontal direction. The connecting shaft 140 is rotatably connected to the mounting part 310 via bearings. A set of second magnets 160 is installed on the upper and lower sides of the base 110. Vertically distributed guide parts 130 are also installed on the horizontal periphery of the base 110. The guide parts 130 are rod-shaped structures and are multiple in number.

[0085] The clamping part 120 has an annular frame structure and a vertically penetrating second clearance opening 124, which is vertically aligned with the first clearance opening 111. A set of first magnets 150 are mounted on the clamping part 120. The two clamping parts 120 are respectively attracted to the upper and lower sides of the base 110 through the cooperation of the first magnets 150 and the second magnets 160. The two clamping parts 120 have protrusions 121 on their opposing sides, which are inserted into the first clearance opening 111. 21 has a horizontal support surface 122 and a limiting strip 123 protruding from the support surface 122 on the opposite side. The support surface 122 and the limiting strip 123 of the two clamping parts 120 together form a substrate mounting space. A sliding sleeve 126 is fixedly provided on the clamping part 120 and is sleeved on the guide part 130. An abutment block is also provided on the clamping part 120. The abutment blocks of the two clamping parts 120 are staggered in the horizontal direction and are 180 degrees rotationally symmetrical with respect to the central axis of the connecting shaft 140.

[0086] The base 110 is rotatable to switch the position of either clamping part 120 on the upper side.

[0087] The lifting assembly 200 includes a mounting plate 230, a first lifting part 210, and a second lifting part 220. The mounting plate 230 is horizontally positioned below the tilting assembly 100 and can move up and down. Both the first lifting part 210 and the second lifting part 220 are rod-shaped structures, and multiple rods are provided. Both the first lifting part 210 and the second lifting part 220 are fixed to the upper surface of the mounting plate 230, and the top end of the first lifting part 210 is higher than the top end of the second lifting part 220. The first lifting part 210 is connected to the clamping part 120 located on the upper side. The abutment blocks are vertically aligned. When the first lifting part 210 moves upward, it can abut against the abutment block of the clamping part 120 located on the upper side, thereby lifting the clamping part 120 located on the upper side until it separates from the base 110, thus opening the substrate mounting space. The second lifting part 220 is located directly below the substrate mounting space. The second lifting part 220 can move upward to pass through the substrate mounting space. When the first lifting part 210 moves upward to abut against the clamping part 120 located on the upper side, the top end of the second lifting part 220 is lower than the substrate mounting space. The lifting assembly 200 has an initial position (e.g., Figure 1 As shown), when the lifting assembly 200 is in the initial position, it avoids the rotation path of the base 110.

[0088] A rotary drive device 400 is installed outside the cavity 300 and is connected to one of the connecting shafts 140 of the base 110. The rotary drive device 400 is used to drive the connecting shaft 140 to rotate, thereby driving the base 110 to rotate 180 degrees, thereby switching the position of either clamping part 120 on the upper side.

[0089] The lifting drive device 500 is installed outside the cavity 300. The output end of the lifting drive device 500 is provided with a connecting part 510. The connecting part 510 passes into the cavity 300 and is fixedly connected to the mounting plate 230. The lifting drive device 500 is used to drive the mounting plate 230 to lift.

[0090] In this embodiment, the flipping mechanism operates by rotating the base 110 via the rotary drive device 400 until any clamping part 120 is positioned on the upper side. Then, the lifting drive device 500 drives the lifting assembly 200 to move upward, sequentially lifting the clamping part 120 on the upper side through the first lifting part 210 until it separates from the base 110, and allowing the top end of the second lifting part 220 to pass through the substrate mounting space between the base 110 and the clamping part 120 on the upper side. The substrate 600 is then transferred to the second lifting part 220 by the robot arm 700, and finally the lifting assembly is driven by the lifting drive device 500. The substrate 600 is moved down and reset so that the substrate 600 is supported on the lower clamping part 120 and the upper clamping part 120 is re-adsorbed onto the base 110, and the substrate 600 is limited by the lower clamping part 120. When picking up the substrate, the lifting drive device 500 drives the lifting assembly 200 to move upward, and the first lifting part 210 lifts the upper clamping part 120 to separate it from the base 110, and the second lifting part 220 lifts the substrate 600 between the base 110 and the upper clamping part 120. Then the robot arm 700 takes away the substrate 600.

[0091] The vacuum coating equipment of the second aspect of this utility model includes the flipping mechanism of any of the above embodiments; since the vacuum coating equipment of this embodiment adopts the flipping mechanism of the first aspect embodiment, this embodiment has all the beneficial effects brought by the flipping mechanism of the first aspect embodiment, which will not be repeated here.

[0092] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine different embodiments or examples described in this specification.

[0093] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A flipping mechanism, characterized in that, include: A flipping assembly includes a base and two clamping parts, which are respectively disposed on the upper and lower sides of the base to define a substrate mounting space. The base is rotatably configured to switch either clamping part to be located on the upper side. A lifting assembly, the lifting assembly including a first lifting part, the first lifting part being vertically and vertically disposed below the flipping assembly; The first lifting part can move upward to lift the clamping part located on the upper side until it separates from the base, thereby opening the substrate mounting space.

2. The flipping mechanism according to claim 1, characterized in that, The two clamping parts are attached to the base by a magnetic attachment assembly.

3. The flipping mechanism according to claim 1, characterized in that, The clamping part is provided with an abutting structure, and the abutting structures of the two clamping parts are staggered in the horizontal direction and are 180 degrees rotationally symmetrical with respect to the rotation axis of the base. The first lifting part can move upward through the clamping part located on the lower side and lift the abutting structure of the clamping part located on the upper side, so as to separate the clamping part located on the upper side from the base.

4. The flipping mechanism according to claim 1, characterized in that, The base is provided with a vertical through-hole first clearance opening, and the clamping part is provided with a protrusion. The protrusion is inserted into the first clearance opening, and the protrusions of the two clamping parts enclose the substrate mounting space.

5. The flipping mechanism according to claim 1, characterized in that, The lifting assembly also includes: The second lifting section is vertically and vertically disposed below the flipping assembly and is capable of moving upward to pass through the substrate mounting space.

6. The flipping mechanism according to claim 5, characterized in that, The first lifting part and the second lifting part are connected as a single structure. The top of the first lifting part is higher than the second lifting part. When the first lifting part moves upward to abut against the clamping part located on the upper side, the top of the second lifting part is lower than the substrate mounting space.

7. The flipping mechanism according to claim 5, characterized in that, Both the first lifting section and the second lifting section are configured as rod-shaped structures, and multiple rod-shaped structures are provided.

8. The flipping mechanism according to claim 1, characterized in that, A guide portion is provided between the base and the clamping portion. The guide portion is fixedly connected to one of the base and the clamping portion and slidably connected to the other. The guide portion is vertically distributed.

9. The flipping mechanism according to claim 1, characterized in that, The base has connecting shafts coaxially arranged on opposite sides in the horizontal direction, and the flipping mechanism further includes: The cavity has mounting portions on its two opposite side walls, and the mounting portions are rotatably connected to the connecting shaft. A rotary drive device is connected to any of the connecting shafts to drive the connecting shafts to rotate about their own axes.

10. A vacuum coating apparatus, characterized in that, include: The flipping mechanism according to any one of claims 1 to 9.

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