Membrane device for semiconductor polishing wastewater reuse treatment

Abstract

The utility model relates to semiconductor grinding wastewater treatment technical field, concretely to a kind of membrane device in semiconductor grinding wastewater reuse treatment, including filter tank, the filter tank top is provided with tank cover, the tank cover top is provided with inlet pipe, the tank cover top side is provided with flush pipe, semiconductor grinding wastewater is directly introduced into filter tank inside by inlet pipe, then wastewater will enter inside assembly barrel, pass through buffer splitter and deflector, then by the membrane body of assembly barrel inner bottom filtering, by assembly barrel and membrane body make wastewater get full-flow filtration, greatly increase the recovery rate of wastewater, reduce water resource consumption, reduce wastewater discharge, and membrane body adopts aluminium oxide material, the membrane body material strength of aluminium oxide is high, there is no broken wire phenomenon, water quality is stable, and oxidation resistance is strong, can resist chemical cleaning total number of times, membrane body life is long, and wastewater front section does not need additional pretreatment, such as multiple medium filter, guarantee the treatment efficiency of wastewater.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor grinding wastewater treatment technology, specifically a membrane device for the reuse treatment of semiconductor grinding wastewater. Background Technology

[0002] This application claims priority to Chinese Patent Application No. 2024212822082, filed on June 6, 2024, entitled "A Membrane Device for the Reuse and Treatment of Semiconductor Grinding Wastewater", the entire contents of which are incorporated herein by reference.

[0003] In the semiconductor manufacturing process, grinding wastewater and cutting wastewater are generated during the cleaning process after processes such as cutting, grinding, dicing, thinning, and chemical planarization (CMP). Grinding wastewater contains a small amount of grinding paste, tiny particles that have been ground off, and cleaning agents, but the water quality is relatively good and the conductivity content is relatively low, making it valuable for recycling.

[0004] Traditional cutting and grinding wastewater is treated by organic ultrafiltration and reverse osmosis. However, the particles in grinding wastewater are sharp, and organic ultrafiltration has insufficient membrane fiber strength, which can easily lead to fiber breakage and turbidity of the effluent. Organic ultrafiltration has strict requirements for pretreatment of the influent, the membrane fibers have general hydrophilicity and limited chemical stability, and the performance recovery of the membrane after chemical cleaning is not ideal. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, this utility model provides a membrane device for the reuse and treatment of semiconductor grinding wastewater.

[0007] (II) Technical Solution

[0008] To achieve the above objectives, this utility model provides the following technical solution: a membrane device for the reuse treatment of semiconductor grinding wastewater, comprising a filter tank, a tank cover at the top of the filter tank, an inlet pipe at the top of the tank cover, a flushing pipe on one side of the top of the tank cover, a drain pipe at the middle of the bottom of the filter tank, a first fixing ring inside the filter tank, a spring at the top of the first fixing ring, a connecting ring frame at the top of the spring, an assembly bucket at the top of the connecting ring frame, a membrane body at the bottom of the assembly bucket, handles on both sides of the top of the assembly bucket, a fixing ring tube at the bottom of the tank cover, one end of the flushing pipe connected to the fixing ring tube, a nozzle at the bottom of the fixing ring tube, and bolts on both sides of the tank cover, one end of the bolt penetrating the tank cover and connecting to the filter tank.

[0009] Furthermore, the present invention is improved in that the assembly barrel is provided with locking blocks on both sides of the bottom end, the connecting ring frame is provided with connecting blocks on both sides of the top end, the connecting block is provided with a slot on one side, and one end of the locking block is locked inside the slot.

[0010] Furthermore, the present invention is improved in that a fixed telescopic rod is provided inside the spring, the spring is sleeved on the fixed telescopic rod, and multiple fixed telescopic rods and springs are provided and evenly arranged on the top of the first fixed ring.

[0011] Furthermore, the present invention is improved in that multiple nozzles are provided and are evenly arranged on the fixed ring tube.

[0012] Furthermore, an improvement of this utility model is that an anti-corrosion layer is provided on the surface of the assembly barrel.

[0013] Furthermore, the present invention is improved by providing supports on both sides of the bottom of the filter tank, and providing anti-slip pads at the bottom of the supports, the anti-slip pads being made of rubber.

[0014] Furthermore, an improvement of this utility model is that a valve is provided on the drain pipe.

[0015] Furthermore, an improvement of this utility model is that the membrane is made of aluminum oxide.

[0016] Furthermore, a guide plate is provided above the membrane, and the guide plate has an array of several inclined guide holes. This invention uses the inclined guide holes to disperse the impact force and prevent sharp particles in the semiconductor grinding wastewater from directly impacting the membrane and causing damage.

[0017] Furthermore, a buffer diversion plate is provided above the flow guide plate. The middle part of the buffer diversion plate has an upward arched convex surface facing the water inlet pipe. The buffer diversion plate is provided with honeycomb-shaped filter holes.

[0018] The present invention uses a buffer diversion plate with an upward-arching convex surface in the middle so that the wastewater coming from the inlet pipe first impacts the convex surface, thereby further reducing the impact force brought by the wastewater coming from the inlet pipe. This prevents sharp particles in the semiconductor grinding wastewater from directly impacting the membrane and causing damage to the membrane. Large particles of impurities are then removed through the filter holes, reducing membrane clogging.

[0019] The flow guide plate and buffer flow divider are detachably located above the membrane body. The buffer flow divider can be replaced to prevent clogging.

[0020] Furthermore, the bottom of the membrane body is provided with an annular groove, and the side wall of the assembly barrel is provided with a second fixing ring. The second fixing ring is formed with a limiting protrusion that cooperates with the annular groove. The cooperation between the annular groove and the limiting protrusion allows the membrane body to be detachably connected, so that the membrane body can be replaced and blockage can be prevented.

[0021] (III) Beneficial Effects

[0022] Compared with the prior art, this utility model provides a membrane device for the reuse treatment of semiconductor grinding wastewater, which has the following beneficial effects:

[0023] 1. The membrane device in this semiconductor grinding wastewater recycling treatment allows the semiconductor grinding wastewater to be directly introduced into the filter tank through the inlet pipe. Then, the wastewater enters the assembly tank and is filtered by the membrane at the bottom of the assembly tank. Through the assembly tank and the membrane, the wastewater achieves full-flow filtration, greatly increasing the wastewater recovery rate, reducing water consumption, and reducing wastewater discharge. The membrane is made of alumina, which has high strength, no fiber breakage, stable water quality, strong oxidation resistance, can withstand a large number of chemical cleaning cycles, and has a long membrane life. Moreover, no additional pretreatment such as multi-media filters is required before the wastewater is treated, ensuring the wastewater treatment efficiency.

[0024] 2. This invention uses inclined guide holes to disperse the impact force and prevent sharp particles in semiconductor grinding wastewater from directly impacting the membrane and causing damage to the mold.

[0025] 3. The present invention enables the membrane body to be detachably connected through the cooperation of the annular groove and the limiting protrusion, so that the membrane body can be replaced and blockage is prevented. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of this utility model;

[0027] Figure 2 This utility model Figure 1 Schematic diagram of the internal structure of the filter tank;

[0028] Figure 3 This utility model Figure 2 A side view of the internal structure;

[0029] Figure 4 This utility model Figure 1 A schematic diagram of the disassembled tank lid;

[0030] Figure 5 This utility model Figure 2 Schematic diagram of the structure of the middle tank lid;

[0031] Figure 6 This utility model Figure 4A structural diagram of the intermediate assembly barrel;

[0032] Figure 7 This is a schematic cross-sectional view of the bottom of the assembly bucket of this utility model;

[0033] Figure 8 This is a schematic diagram of the buffer diversion plate of this utility model;

[0034] Figure 9 This utility model Figure 7 An enlarged view of point A;

[0035] In the diagram: 1. Filter tank; 2. Tank cover; 3. Inlet pipe; 4. Flushing pipe; 5. Drain pipe; 6. First fixing ring; 7. Spring; 8. Connecting ring frame; 9. Assembly tank; 10. Connecting block; 11. Membrane body; 12. Handle; 13. Fixing ring tube; 14. Nozzle; 15. Bolt; 16. Clamping block; 20. Guide plate; 201. Inclined guide hole; 110. Buffer diversion plate; 111. Convex surface; 112. Filter hole; 113. Annular groove; 115. Second fixing ring; 114. Limiting protrusion ring. Detailed Implementation

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0037] Please see Figure 1-6 A membrane device for the reuse treatment of semiconductor grinding wastewater includes a filter tank 1, a tank cover 2 at the top of the filter tank 1, a water inlet pipe 3 at the top of the tank cover 2, a flushing pipe 4 on one side of the top of the tank cover 2, a drain pipe 5 at the middle of the bottom of the filter tank 1, a first fixing ring 6 inside the filter tank 1, a spring 7 at the top of the first fixing ring 6, a connecting ring frame 8 at the top of the spring 7, and an assembly barrel 9 at the top of the connecting ring frame 8. The bottom of the assembly barrel 9... The membrane body 11 is provided at one end. The top of the assembly tank 9 is provided with handles 12 on both sides. The bottom of the tank cover 2 is provided with a fixing ring tube 13. One end of the flushing pipe 4 is connected to the fixing ring tube 13. The bottom end of the fixing ring tube 13 is provided with a nozzle 14. Bolts 15 are provided on both sides of the tank cover 2. One end of the bolt 15 passes through the tank cover 2 and connects to the filter tank 1. The membrane body 11 is made of alumina. Multiple nozzles 14 are provided and are evenly arranged on the fixing ring tube 13. A valve is provided on the drain pipe 5.

[0038] like Figure 7-8As shown, a guide plate 20 is provided above the membrane 11, and a plurality of inclined guide holes 201 are arrayed on the guide plate 20. A buffer diversion plate 110 is provided above the guide plate 20. The middle part of the buffer diversion plate 110 has an upward arched convex surface 111, which faces the water inlet pipe 3. The buffer diversion plate 110 has honeycomb-shaped filter holes 112.

[0039] like Figure 9 As shown, the bottom of the membrane body 11 is provided with an annular groove 113, and the side wall of the assembly barrel 9 is provided with a second fixing ring 115. The second fixing ring 115 is formed with a limiting protrusion 114 that cooperates with the annular groove 113.

[0040] In actual use, the above structure first introduces semiconductor grinding wastewater into the filter tank 1 through the inlet pipe 3. The wastewater then enters the assembly tank 9 and is filtered by the membrane 11 inside the assembly tank 9. The assembly tank 9 and the membrane 11 achieve full-flow filtration of the wastewater, greatly increasing the wastewater recovery rate, reducing water consumption, and decreasing wastewater discharge. During the wastewater filtration process, the wastewater directly impacts the membrane 11, causing impact force. At this time, the assembly tank 9 drives the connecting ring frame 8 to press down, compressing the spring 7. The spring 7 undergoes elastic deformation within its elastic limit. Simultaneously, the buffer diversion plate effectively mitigates the impact force, reducing damage to the membrane 11, making it less prone to deformation and breakage, and extending its service life. After passing through the buffer diversion plate 110, the wastewater first flows into the filter tank 1 through the inclined guide holes 201 on the guide plate 20. The flow into the membrane body 11 can disperse the impact force and prevent sharp particles in the semiconductor grinding wastewater from directly impacting the membrane body and causing damage. The wastewater filtered by the membrane body 11 will be discharged directly through the drain pipe 5. When the membrane body 11 needs to be rinsed, cleaning agents such as acid, alkali, and sodium hypochlorite are directly introduced into the fixed ring pipe 13 through the rinsing pipe 4. Multiple nozzles 14 spray into the assembly tank 9 to rinse the membrane body 11. During use, some impurities can be removed through the filter holes 110 to reduce membrane clogging. At the same time, the membrane body can be detachably connected through the annular groove 113 and the limiting protrusion ring 114, so that it can be disassembled and replaced if clogging occurs later. The membrane body 11 is made of alumina material, which makes the membrane body 11 strong, without fiber breakage, with stable water quality, strong oxidation resistance, and can withstand a large number of chemical cleaning cycles, resulting in a long membrane fiber life.

[0041] In this embodiment, the assembly barrel 9 is provided with locking blocks 16 on both sides of its bottom end, and the connecting ring frame 8 is provided with connecting blocks 10 on both sides of its top end. The connecting block 10 has a slot inside one side, and one end of the locking block 16 is locked inside the slot, so that the assembly barrel 9 can be securely locked on the top of the connecting ring frame 8. When it is necessary to disassemble the assembly barrel 9, the assembly barrel 9 is rotated by the handle 12, so that the assembly barrel 9 drives the locking block 16 to rotate out of the slot, and then the assembly barrel 9 is removed from the connecting ring frame 8 by the handle 12. The installation and disassembly are both convenient.

[0042] In this embodiment, a fixed telescopic rod is provided inside the spring 7, and the spring 7 is sleeved on the fixed telescopic rod. Multiple fixed telescopic rods and springs 7 are provided and evenly arranged on the top of the first fixed ring 6 to improve the stability when the spring 7 is compressed and to prevent the spring 7 from shaking.

[0043] In this embodiment, an anti-corrosion layer is provided on the surface of the assembly barrel 9, which improves the durability of the assembly barrel 9.

[0044] In this embodiment, the filter tank 1 is provided with supports on both sides of the bottom end, and the bottom of the supports is provided with anti-slip pads. The anti-slip pads are made of rubber, which improves the stability of the filter tank 1 after it is placed.

[0045] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A membrane device for the reuse and treatment of semiconductor grinding wastewater, characterized in that: The filter includes a filter tank (1), a tank cover (2) at the top of the filter tank (1), a water inlet pipe (3) at the top of the tank cover (2), a flushing pipe (4) on one side of the top of the tank cover (2), a drain pipe (5) at the middle of the bottom of the filter tank (1), a first fixing ring (6) inside the filter tank (1), a spring (7) at the top of the first fixing ring (6), a connecting ring frame (8) at the top of the spring (7), an assembly bucket (9) at the top of the connecting ring frame (8), a membrane (11) at the bottom of the assembly bucket (9), handles (12) on both sides of the top of the assembly bucket (9), a fixing ring pipe (13) at the bottom of the tank cover (2), one end of the flushing pipe (4) connected to the fixing ring pipe (13), a nozzle (14) at the bottom of the fixing ring pipe (13), bolts (15) on both sides of the tank cover (2), and one end of the bolts (15) penetrating the tank cover (2) and connecting to the filter tank (1).

2. The membrane device for the reuse treatment of semiconductor grinding wastewater according to claim 1, characterized in that: The assembly barrel (9) has locking blocks (16) on both sides of its bottom end, and the connecting ring frame (8) has connecting blocks (10) on both sides of its top end. The connecting block (10) has a slot inside one side, and one end of the locking block (16) is locked inside the slot.

3. The membrane device for the reuse treatment of semiconductor grinding wastewater according to claim 2, characterized in that: The spring (7) has a fixed telescopic rod inside, and the spring (7) is sleeved on the fixed telescopic rod. There are multiple fixed telescopic rods and springs (7), which are evenly arranged on the top of the first fixed ring (6).

4. The membrane device for the reuse treatment of semiconductor grinding wastewater according to claim 3, characterized in that: The membrane (11) is made of aluminum oxide.

5. The membrane device for the reuse treatment of semiconductor grinding wastewater according to claim 4, characterized in that: A guide plate (20) is provided above the membrane (11), and a plurality of inclined guide holes (201) are arranged on the guide plate (20).

6. The membrane device for the reuse treatment of semiconductor grinding wastewater according to claim 5, characterized in that: A buffer diversion plate (110) is provided above the flow guide plate (20). The middle part of the buffer diversion plate (110) has an upward arched convex surface (111) facing the water inlet pipe (3). The buffer diversion plate (110) has honeycomb-shaped filter holes (112).

7. The membrane device for the reuse treatment of semiconductor grinding wastewater according to claim 2, characterized in that: The bottom of the membrane (11) is provided with an annular groove (113), and the side wall of the assembly barrel (9) is provided with a second fixing ring (115). The second fixing ring (115) is formed with a limiting protrusion (114) that cooperates with the annular groove (113).

8. The membrane device for the reuse treatment of semiconductor grinding wastewater according to claim 4, characterized in that: Multiple nozzles (14) are provided and are evenly arranged on the fixed ring pipe (13).

9. The membrane device for the reuse treatment of semiconductor grinding wastewater according to claim 8, characterized in that: The assembly barrel (9) has an anti-corrosion layer on its surface.

10. The membrane device for the reuse treatment of semiconductor grinding wastewater according to claim 9, characterized in that: The filter tank (1) is provided with supports on both sides of the bottom end, and anti-slip pads are provided at the bottom of the supports. The anti-slip pads are made of rubber.

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