A glue coating and developing machine liquid constant temperature control unit

Abstract

The utility model discloses a kind of gluing developing machine liquid medicine constant temperature control unit, to solve the problem of low precision, slow response and insufficient safety of existing gluing developing machine liquid temperature control. The unit includes liquid storage component, temperature regulating component, temperature detection component, control component and safety protection component, and each component works cooperatively through pipeline or circuit: liquid storage component contains tank with heat preservation layer, liquid inlet pipe and liquid outlet pipe, realizes liquid storage and transportation;Temperature regulating component integrates heating module, refrigeration module and temperature exchange coil pipe, and heating or refrigeration is completed by switching medium circuit through three-way valve;Temperature detection component uses main, auxiliary double high-precision platinum resistance sensor and environmental temperature sensor, and temperature data is collected in real time;Control component takes PLC controller as core, and realizes temperature setting, data display and dynamic adjustment in combination with touch screen;Safety protection component contains leakage detection, over-temperature protection and overload protection module, and guarantees operation safety.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically to a constant temperature control unit for the chemical solution of a coating and developing machine. Background Technology

[0002] In the photoresist coating and developing process of semiconductor wafer manufacturing, the temperature of the photoresist solution is one of the key parameters affecting the process effect. If the temperature of the photoresist is too low, its viscosity will increase, and defects such as uneven film thickness and bubbles will easily occur during coating; if the temperature is too high, it may cause the solution to react prematurely or for components to volatilize, affecting the developing accuracy.

[0003] Currently, Chinese patent CN117170188A discloses a constant temperature heating device for a coating and developing machine, including a base and a main housing. The top of the base is rotatably connected to a column via a rotating rod, and the top of the column is fixedly connected to the bottom of the main housing. One end of the rotating rod passes through the inner wall of the base and is fixedly connected to a knob. The base is provided with a locking mechanism corresponding to the knob. The main housing is provided with multiple symmetrically arranged mounting slots, each with an opening that is vertically connected. A dustproof net is fixedly inserted into the opening, and a control box is slidably inserted into the mounting slot. The inner wall of the mounting slot is provided with a buffer mechanism corresponding to the control box, and the control box is provided with a positioning slot corresponding to the buffer mechanism.

[0004] Although the constant temperature heating device for this type of coating and developing machine can effectively ensure airflow through the design of the heating and blowing structures, and the temperature monitoring and control mechanism can enable the device to maintain a constant temperature, and the disassembly and installation mechanism can facilitate disassembly and maintenance, the temperature control accuracy is low: it can only be adjusted by simple heating wires or cooling pipes, and cannot be dynamically adjusted according to the real-time temperature of the chemical solution. Summary of the Invention

[0005] The purpose of this invention is to provide a constant temperature control unit for the chemical solution of a coating and developing machine. This unit has the advantages of achieving high-precision, rapid and stable control of the chemical solution temperature and improving safety through the integrated collaborative work of multiple modules.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0007] A constant temperature control unit for a coating and developing machine includes a chemical solution storage component, a temperature regulation component connected to the chemical solution storage component, and a temperature detection component. The temperature regulation component also includes a control component and a safety protection component. The temperature regulation component includes a heating module, a cooling module, a temperature exchange coil, and a three-way valve. The temperature exchange coil is coiled inside the chemical solution storage tank, with both ends extending outside the tank. The heating module includes a heating water tank, an electric heating element, and a heating circulation pump. The electric heating element is located inside the heating water tank. The heating circulation pump is connected to the heating water tank and the three-way valve via a pipeline. The cooling system includes a cooling unit and a refrigerant pipeline. The cooling unit is connected to the three-way valve via a refrigerant pipeline. The three-way valve is connected to the inlet of the temperature exchange coil.

[0008] Further configuration: The chemical solution storage component includes a chemical solution tank, an inlet pipe, and an outlet pipe. The inner wall of the chemical solution tank is provided with a heat insulation layer. One end of the inlet pipe is connected to the chemical solution supply source of the coating and developing machine, and the other end extends into the interior of the chemical solution tank. A solenoid valve is provided on the inlet pipe. One end of the outlet pipe is connected to the bottom of the chemical solution tank, and the other end is connected to the chemical solution usage end of the coating and developing machine. A delivery pump is provided on the outlet pipe.

[0009] Further configuration: The temperature detection component includes a main temperature sensor, an auxiliary temperature sensor, and an ambient temperature sensor. The main temperature sensor is located inside the drug storage tank and its detection end is in contact with the drug liquid. The auxiliary temperature sensor is installed on the outlet pipe and located at the front end of the delivery pump. The ambient temperature sensor is located outside the drug storage tank.

[0010] Further configuration: The control components include a PLC controller, a touch screen, and a relay module. The PLC controller is electrically connected to the solenoid valve, delivery pump, electric heating tube, heating circulation pump, refrigeration unit, three-way valve, main temperature sensor, auxiliary temperature sensor, ambient temperature sensor, and relay module. The touch screen communicates bidirectionally with the PLC controller.

[0011] Further configuration: The safety protection components include a leakage sensor, a temperature fuse, an over-temperature alarm unit, and an overload protector. The leakage sensor is located at the bottom of the liquid storage tank. The temperature fuse is electrically connected to the power supply circuit of the electric heating tube. The over-temperature alarm unit is electrically connected to the main temperature sensor. The overload protector is electrically connected to the delivery pump (131), the heating circulation pump, and the refrigeration unit, respectively.

[0012] In summary, this utility model has the following beneficial effects: High temperature control accuracy: By collecting data through main and auxiliary dual temperature sensors and combining it with the precise algorithm of the PLC controller, stable control of the liquid temperature is achieved, meeting the requirements of high-precision semiconductor processes; Fast response speed: The heating and cooling modules can be switched quickly, and when the liquid temperature fluctuates, it can quickly return to the target temperature, ensuring the consistency of continuous production; and Strong safety: It integrates leakage detection, over-temperature protection, and overload protection functions, and can monitor the equipment status in real time. In case of abnormality, it will immediately stop the machine and alarm, avoiding waste of liquid or damage to the equipment. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings.

[0014] Figure 1 This is a flowchart illustrating the overall structure of a constant temperature control unit for the chemical solution in a coating and developing machine.

[0015] In the diagram: 1. Chemical storage component; 11. Chemical storage tank; 111. Insulation layer; 12. Inlet pipe; 121. Solenoid valve; 13. Outlet pipe; 131. Transfer pump; 2. Temperature control component; 21. Heating module; 211. Heating water tank; 212. Electric heating element; 213. Heating circulation pump; 22. Refrigeration module; 221. Refrigeration unit; 222. Refrigerant pipeline; 23. Temperature exchange coil; 24. Three-way valve; 3. Temperature detection component; 31. Main temperature sensor; 32. Auxiliary temperature sensor; 33. Ambient temperature sensor; 4. Control component; 41. PLC controller; 42. Touch screen; 43. Relay module; 5. Safety protection component; 51. Leakage sensor; 52. Temperature fuse; 53. Over-temperature alarm unit; 54. Overload protector; 6. Chemical supply source for coating and developing machine; 7. Chemical usage end for coating and developing machine. Detailed Implementation

[0016] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings.

[0017] The technical solution adopted in this utility model is: a constant temperature control unit for the chemical solution of a coating and developing machine, such as... Figure 1 As shown, the coating and developing machine chemical supply source 6 is connected to the chemical storage tank 11 through the inlet pipe 12, and the solenoid valve 121 is connected in series on the inlet pipe 12; the bottom of the chemical storage tank 11 is connected to the coating and developing machine chemical usage end 7 through the outlet pipe 13, and the delivery pump 131 is connected in series on the outlet pipe 13; the inner wall of the chemical storage tank 11 is fitted with a heat insulation layer 111, and a temperature exchange coil 23 is coiled inside.

[0018] The temperature exchange coil 23 extends out of the storage tank at both ends, with one end connected to a three-way valve 24. The other two ports of the three-way valve 24 are connected to the heating module 21 and the cooling module 22, respectively. The heating water tank 211 of the heating module 21 is connected to the heating circulation pump 213 through a pipeline, and the outlet pipeline of the heating circulation pump 213 is connected to the three-way valve 24. The refrigeration unit 221 of the cooling module 22 is connected to the three-way valve 24 through the refrigerant pipeline 222. The heating water tank 211 has an internal electric heating element 212.

[0019] The signal output terminals of the main temperature sensor 31, auxiliary temperature sensor 32, ambient temperature sensor 33, and liquid level sensor are all connected to the signal input terminal of the PLC controller 41 via wires; the touch screen 42 is bidirectionally connected to the PLC controller 41 via a communication line; the control output terminal of the PLC controller 41 is connected to the power supply terminals of the solenoid valve 121, transfer pump 131, electric heating tube 212, heating circulation pump 213, refrigeration unit 221, and three-way valve 24 via the relay module 43.

[0020] Safety protection components 5 and circuits: the signal output terminal of the leakage sensor 51 is connected to the PLC controller 41; the temperature fuse 52 (52) is connected in series in the power supply circuit of the electric heating tube 212; the signal input terminal of the over-temperature alarm unit 53 is connected to the PLC controller 41; the overload protector 54 is connected in series in the power supply circuits of the delivery pump 131, the heating circulation pump 213, and the refrigeration unit 221 respectively.

[0021] Its main working principle is as follows:

[0022] The operator controls the PLC controller 41 via the touch screen 42, and then controls the relay module 43 to connect the power supply to the solenoid valve 121. The solenoid valve 121 opens, and the medicine flows from the supply source into the storage tank through the inlet pipe 12. When the liquid level sensor detects that the liquid has reached 80% of the storage tank volume, it sends a signal to the PLC controller 41. The PLC controller 41 cuts off the power supply to the solenoid valve 121, and the solenoid valve 121 closes, stopping the liquid supply.

[0023] The main temperature sensor 31 collects the temperature of the liquid medicine in the storage tank in real time, the auxiliary temperature sensor 32 collects the temperature of the liquid medicine in the outlet pipe 13, and the ambient temperature sensor 33 collects the ambient temperature. The data from these three sensors are transmitted synchronously to the PLC controller 41. The PLC controller 41 compares the detected temperature with the target temperature, determines that heating is required, controls the three-way valve 24 to switch to the heating module 21 circuit, and simultaneously connects the power supply to the heating circulation pump 213 and the electric heating tube 212. The heating circulation pump 213 delivers hot water to the temperature exchange coil 23, where the coil exchanges heat with the liquid medicine to raise the temperature of the liquid medicine. When the main temperature sensor 31 detects that the temperature of the liquid medicine has risen to the corresponding degree, the PLC controller 41 reduces the power of the electric heating tube 212 to maintain a stable temperature. Then, the delivery pump 131 is started, and the constant-temperature liquid is delivered to the user end through the outlet pipe 13. If the auxiliary temperature sensor 32 detects that the outlet temperature is low, the PLC controller 41 adjusts the power of the electric heating tube 212 until the temperature recovers. If the leakage sensor 51 detects a leakage of the liquid, it immediately sends a signal to the PLC controller 41, which triggers the over-temperature alarm unit 53 with an audible and visual alarm, and simultaneously cuts off the power to the solenoid valve 121 and the delivery pump 131. If the electric heating tube 212 malfunctions and causes the temperature of the heating tank 211 to exceed the limit, the temperature fuse 52 melts and cuts off the power. If the delivery pump 131 is overloaded, the overload protector 54 cuts off its power.

[0024] The above are merely preferred embodiments of this utility model and are not intended to limit this utility model in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this utility model shall fall within the scope of the utility model's technical solution.

Claims

1. A temperature control unit for the chemical solution of a coating and developing machine, characterized in that: The system includes a liquid medicine storage component (1), a temperature regulating component (2) connected to the liquid medicine storage component (1), and a temperature detection component (3). A control component (4) is also connected to the temperature regulating component (2), and a safety protection component (5) is connected to the control component (4). The temperature regulating component (2) includes a heating module (21), a cooling module (22), a temperature exchange coil (23), and a three-way valve (24). The temperature exchange coil (23) is coiled inside the liquid medicine storage tank (11), with both ends extending to the outside of the tank. The heating module (21) includes a heating water tank (211), an electric heating tube (212), and a heating circulation pump (213). The electric heating tube (212) is located inside the heating water tank (211). The heating circulation pump (213) is connected to the heating water tank (211) and a three-way valve (24) through a pipeline. The refrigeration includes a refrigeration unit (221) and a refrigerant pipeline (222). The refrigeration unit (221) is connected to the three-way valve (24) through the refrigerant pipeline (222). The three-way valve (24) is connected to the inlet of the temperature exchange coil (23).

2. The temperature control unit for the coating and developing machine's chemical solution according to claim 1, characterized in that: The liquid storage component (1) includes a liquid storage tank (11), an inlet pipe (12) and an outlet pipe (13). The inner wall of the liquid storage tank (11) is provided with a heat insulation layer (111). One end of the inlet pipe (12) is connected to the liquid supply source (6) of the coating and developing machine, and the other end extends into the liquid storage tank (11). A solenoid valve (121) is provided on the inlet pipe (12). One end of the outlet pipe (13) is connected to the bottom of the liquid storage tank (11), and the other end is connected to the liquid use end (7) of the coating and developing machine. A delivery pump (131) is provided on the outlet pipe (13).

3. The constant temperature control unit for the coating and developing machine's chemical solution according to claim 2, characterized in that: The temperature detection component (3) includes a main temperature sensor (31), an auxiliary temperature sensor (32) and an ambient temperature sensor (33). The main temperature sensor (31) is located inside the liquid storage tank (11) and its detection end is in contact with the liquid. The auxiliary temperature sensor (32) is installed on the outlet pipe (13) and located at the front end of the delivery pump (131). The ambient temperature sensor (33) is located outside the liquid storage tank (11).

4. The constant temperature control unit for the coating and developing machine's chemical solution according to claim 3, characterized in that: The control component (4) includes a PLC controller (41), a touch screen (42), and a relay module (43). The PLC controller (41) is electrically connected to a solenoid valve (121), a delivery pump (131), an electric heating tube (212), a heating circulation pump (213), a refrigeration unit (221), a three-way valve (24), a main temperature sensor (31), an auxiliary temperature sensor (32), an ambient temperature sensor (33), and a relay module (43). The touch screen (42) communicates bidirectionally with the PLC controller (41).

5. The constant temperature control unit for the coating and developing machine's chemical solution according to claim 4, characterized in that: The safety protection component (5) includes a leakage sensor (51), a temperature fuse (52), an over-temperature alarm unit (53), and an overload protector (54). The leakage sensor (51) is located at the bottom of the liquid storage tank (11). The temperature fuse (52) is electrically connected to the power supply circuit of the electric heating tube (212). The over-temperature alarm unit (53) is electrically connected to the main temperature sensor (31). The overload protector (54) is electrically connected to the delivery pump (131), the heating circulation pump (213), and the refrigeration unit (221), respectively.

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