A protective cover substrate measuring device

Abstract

The utility model provides a kind of protective cover substrate measuring device, it is related to substrate measurement technical field, including position transfer mechanism, rotating mechanism, workpiece placing mechanism and laser probe, rotating mechanism is connected with position transfer mechanism, the rotation axis of rotating mechanism and the axis of laser probe are non-collinear and parallel arrangement.Through the setting of position transfer mechanism, rotating mechanism, workpiece placing mechanism, when measuring, workpiece is placed on placing mesa, annular placing mesa can effectively support workpiece, rotating mechanism drives workpiece rotation, multiple detection points are rotated to laser probe downside to measure respectively, without manual switching, while improving efficiency, avoid the problem of scratch in the process of manual multiple taking and placing, after using the device in the present scheme, the proportion of scratch is reduced from original 3.73% to 0.23%.

Description

Technical Field

[0001] This utility model relates to the field of substrate measurement technology, and in particular to a protective cover substrate measurement device. Background Technology

[0002] Currently, the thickness of the protective cover substrate, i.e. the chip, is mostly measured by laser measurement. During the measurement, multiple points on the chip need to be measured to ensure the quality of the chip. If there are unqualified chips, they need to be eliminated in time. At present, when measuring the thickness of the chip at multiple points, it is generally done by manually picking up and changing the points multiple times. This method is prone to damage caused by human error, and the efficiency of manual picking up and changing points multiple times is low. In order to address the above defects, this application is proposed. Utility Model Content

[0003] The purpose of this invention is to provide a protective cover substrate measuring device, which solves the problems of easy damage to the wafer and low detection efficiency caused by manual handling and changing of points during the current wafer thickness detection process.

[0004] To solve the above problems, this utility model provides a protective cover substrate measuring device, including a position transfer mechanism, a rotation mechanism, a workpiece placement mechanism, and a laser probe. The rotation mechanism is connected to the position transfer mechanism, and the rotation axis of the rotation mechanism is not collinear with the axis of the laser probe and is parallel to it, that is, the two axes are eccentrically set. The position transfer mechanism is used to switch the workpiece placement mechanism between the workpiece placement station and the workpiece detection station. The rotation mechanism is used to drive the workpiece placement mechanism to rotate, realizing multi-point switching measurement. The workpiece placement mechanism includes an annular placement platform and a cavity surrounded by the placement platform.

[0005] During measurement, the workpiece is placed on the platform. The annular platform can effectively support the workpiece. The cavity design assists the laser probe in completing the thickness measurement and reduces the contact area with the workpiece, thus avoiding scratches.

[0006] The rotating mechanism drives the workpiece to rotate, rotating multiple detection points to the underside of the laser probe for measurement. This eliminates the need for manual switching, improving efficiency and avoiding scratches caused by repeated manual handling of the workpiece.

[0007] According to one embodiment of the present invention, the workpiece placement mechanism and the rotation mechanism are detachably connected, and the corresponding workpiece placement mechanism is installed according to the size of the workpiece to be measured.

[0008] According to one embodiment of the present invention, the rotating mechanism and the workpiece placement mechanism are connected by a plug-in joint. The rotating platform of the rotating mechanism is provided with a plurality of plug-in blocks, and the workpiece placement mechanism is provided with a plurality of plug-in slots that cooperate with the plug-in blocks.

[0009] Furthermore, while using a plug-in connection, a bolted connection structure can be installed to achieve a tight connection.

[0010] Alternatively, the detachable connection structure can also be connected using only bolts.

[0011] Optionally, the position transfer mechanism includes a linear displacement drive module or a rotary drive module (such as a turntable).

[0012] According to one embodiment of the present invention, the position transfer mechanism adopts a linear displacement drive module, which includes a ball screw slide rail.

[0013] According to one embodiment of the present invention, the placement platform is an inclined surface, with the side closest to the cavity being the lowest point. The inclined surface can be an arc surface or an inclined surface with a constant slope. The inclined surface serves as a positioning effect when the workpiece is placed. The material of the placement platform or the overall material of the workpiece placement mechanism is preferably a plastic material, such as polyvinyl chloride or other materials with moderate hardness.

[0014] According to one embodiment of the present invention, the placement table is provided with a pick-up and put-down groove to facilitate manual pick-up and put-down of workpieces.

[0015] According to one embodiment of the present invention, a negative pressure generating device is provided in the cavity, such as a vacuum generator to generate a negative pressure environment to ensure the stability of the workpiece during rotation.

[0016] According to one embodiment of the present invention, a filter sponge is provided in the pick-and-place groove to prevent impurities from entering the cavity when negative pressure is generated. The filter sponge is compressible and is compressed when picking up or placing the workpiece.

[0017] According to one embodiment of the present invention, the protective cover substrate measuring device further includes a base, and the position transfer mechanism and the laser probe are both mounted on the base.

[0018] According to one embodiment of the present invention, the protective cover substrate measuring device further includes a digital display host electrically connected to the laser probe.

[0019] The beneficial effects of this utility model are that, through the setting of the position transfer mechanism, the rotation mechanism, and the workpiece placement mechanism, during measurement, the workpiece is placed on the placement table. The annular placement table can effectively support the workpiece. The rotation mechanism drives the workpiece to rotate, and multiple detection points are rotated to the underside of the laser probe for measurement. There is no need for manual switching, which improves efficiency and avoids the problem of scratches caused by manual handling during the multiple pick-up and drop-off process. After using the device in this solution, the scratch rate is reduced from the original 3.73% to 0.23%. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0021] Figure 1 This is a schematic diagram of the overall structure of the protective cover substrate measuring device in Example 1;

[0022] Figure 2 This is a schematic diagram of the rotating mechanism and the workpiece placement mechanism in Example 2;

[0023] Figure 3 This is a schematic diagram of the workpiece placement mechanism in Example 3;

[0024] Figure 4 This is a schematic diagram of the workpiece placement mechanism in Example 4;

[0025] Figure 5 This is a schematic diagram of the workpiece placement mechanism in Example 6. Detailed Implementation

[0026] The following description is only intended to disclose the present invention so that those skilled in the art can implement it. The embodiments in the following description are merely examples, and those skilled in the art will conceive of other obvious modifications. The basic principles of the present invention defined in the following description can be applied to other embodiments, modifications, improvements, equivalents, and other solutions that do not depart from the spirit and scope of the present invention.

[0027] Example 1:

[0028] A protective cover substrate measuring device is provided. This solution is not only applicable to the thickness detection of protective cover substrates, but also applicable to other wafers that can be thickness detected using laser probes, such as... Figure 1 It includes a base 1, a position transfer mechanism 3, a rotation mechanism 4, a workpiece placement mechanism 5, and a laser probe 7.

[0029] Both the position transfer mechanism 3 and the laser probe 7 are mounted on the base 1.

[0030] The base 1 is also equipped with a control device 2, which is electrically connected to the position transfer mechanism 3 and the rotation mechanism 4, and is used to control the start and stop of the position transfer mechanism 3 and the rotation mechanism 4.

[0031] The position transfer mechanism 3 is a linear displacement drive module, and in this embodiment, a ball screw slide is preferably used.

[0032] The rotating mechanism 4 is connected to the position transfer mechanism 3. The rotating mechanism 4 can be any motor-driven rotary table in the prior art. The rotation axis of the rotating mechanism 4 is not collinear with the axis of the laser probe 7 and is set parallel to it, that is, the two axes are set eccentrically.

[0033] The rotating mechanism 4 is used to drive the workpiece placement mechanism 5 to rotate, so as to realize multi-point switching measurement. The workpiece placement mechanism 5 is cylindrical in shape, including an annular placement platform 52 and an air-proof cavity 51 surrounded by the placement platform 52.

[0034] In this embodiment, the placement surface 52 is a plane.

[0035] The position transfer mechanism 3 is used to switch the workpiece placement mechanism 5 between the workpiece placement station and the workpiece inspection station, such as... Figure 1 The workpiece placement mechanism 5 is in the workpiece inspection station. After the inspection is completed, the workpiece placement mechanism 5 retracts to the workpiece placement station, where workers or robots pick up and place the workpiece.

[0036] During measurement, the workpiece is placed on the placement platform 52. The annular placement platform 52 can effectively support the workpiece. The cavity 51 is set to assist the laser probe 7 in completing the thickness measurement and to reduce the contact area with the workpiece, thus avoiding scratching the workpiece.

[0037] The rotating mechanism 4 drives the workpiece to rotate. The rotation angle is generally ≤360° during the entire inspection process. Multiple inspection points are rotated to the lower side of the laser probe 7 for measurement. No manual switching is required, which improves efficiency and avoids the problem of scratches caused by manual handling of the workpiece. After using the device in this solution, the scratch rate has been reduced from 3.73% to 0.23%.

[0038] Example 2:

[0039] Based on Example 1, in this example, as Figure 2 The workpiece placement mechanism 5 is detachably connected to the rotation mechanism 4, and the corresponding workpiece placement mechanism 5 is installed according to the size of the workpiece to be measured.

[0040] Detachable connections are available in plug-in, bolt, or a combination of both.

[0041] In this embodiment, the rotating mechanism 4 and the workpiece placement mechanism 5 are connected by a plug-in joint. Three sets of plug-in blocks 41 are provided on the rotating table surface of the rotating mechanism 4, and three sets of plug-in slots that cooperate with the plug-in blocks 41 are provided on the bottom surface of the workpiece placement mechanism 5.

[0042] Furthermore, while engaging the plug-in connection, a bolt connection structure can be provided to achieve a tight connection. Bolt holes can be provided on the plug-in block 41 or the rotating table.

[0043] Preferably, the protective cover substrate measuring device also includes a digital display host 8 electrically connected to the laser probe 7, through which the measured values ​​can be observed in real time. The digital display host 8 can also be equipped with storage, alarm and other modules to store test data and issue audible / visual alarms when non-conforming products are detected.

[0044] Example 3:

[0045] Unlike in Example 1, as Figure 3 In this embodiment, the placement platform 52 is an inclined surface, with the side closest to the cavity 51 being the lowest point. The inclined surface can be an arc surface or an inclined surface with a constant slope. The inclined surface serves as a positioning effect when the workpiece is placed. The material of the placement platform 52 or the overall material of the workpiece placement mechanism 5 is preferably plastic, such as polyvinyl chloride, which is a material with moderate hardness to avoid scratches. After the test is completed, the robot or worker uses a suction cup or other tools to remove the workpiece.

[0046] Example 4:

[0047] Based on Example 3, in this example, as Figure 4 The workpiece is placed in a groove 54 at the table 52 for easy manual handling.

[0048] The number of retrieval grooves 54 can be set to multiple sets.

[0049] Example 5:

[0050] Based on Example 1, in this example, a negative pressure generating device 53 is provided in the cavity 51. For example, a vacuum generator is installed, or the workpiece placement mechanism 5 is connected to the vacuum generator through a pipeline or to a negative pressure fan. A negative pressure environment is generated in the cavity 51 to fix the workpiece and ensure the stability of the workpiece during rotation.

[0051] Example 6:

[0052] Based on Example 4, such as Figure 5 In this embodiment, a filter sponge 55 is provided in the pick-and-place groove 54 to prevent impurities from entering the cavity 51 when negative pressure is generated. The filter sponge 55 is compressible and can completely fill the pick-and-place groove 54 or only fill it to supplement it, so as to achieve a certain sealing effect. The negative pressure environment generated only needs to maintain the workpiece from shifting and falling when rotating. When picking up and placing the workpiece, the filter sponge 55 is compressed.

[0053] Those skilled in the art should understand that the embodiments of the present invention described above and shown in the accompanying drawings are merely examples and do not limit the present invention. The purpose of the present invention has been fully and effectively achieved. The functional and structural principles of the present invention have been shown and explained in the embodiments. Without departing from the stated principles, the implementation of the present invention may have any variations and modifications.

Claims

1. A protective cover substrate measuring device, characterized in that: The device includes a position transfer mechanism (3), a rotation mechanism (4), a workpiece placement mechanism (5), and a laser probe (7). The rotation mechanism (4) is connected to the position transfer mechanism (3). The rotation axis of the rotation mechanism (4) is not collinear with the axis of the laser probe (7) and is set parallel to it. The position transfer mechanism (3) is used to switch the workpiece placement mechanism (5) between the workpiece placement station and the workpiece detection station. The rotation mechanism (4) is used to drive the workpiece placement mechanism (5) to rotate, so as to realize multi-point switching measurement. The workpiece placement mechanism (5) includes an annular placement platform (52) and a cavity (51) surrounded by the placement platform (52).

2. The protective cover substrate measuring device according to claim 1, characterized in that: The workpiece placement mechanism (5) is detachably connected to the rotation mechanism (4), and the corresponding workpiece placement mechanism (5) is installed according to the size of the workpiece to be measured.

3. The protective cover substrate measuring device according to claim 2, characterized in that: The rotating mechanism (4) and the workpiece placement mechanism (5) are connected by a plug-in joint. The rotating platform of the rotating mechanism (4) is provided with a number of plug-in blocks (41), and the workpiece placement mechanism (5) is provided with a number of plug-in slots that cooperate with the plug-in blocks (41).

4. The protective cover substrate measuring device according to any one of claims 1-3, characterized in that: The position transfer mechanism (3) includes a linear displacement drive module or a rotary drive module.

5. The protective cover substrate measuring device according to claim 4, characterized in that: The position transfer mechanism (3) adopts a linear displacement drive module, which includes a ball screw slide rail.

6. The protective cover substrate measuring device according to claim 1, characterized in that: The placement platform (52) is an inclined surface, with the side closest to the cavity (51) being the lowest point.

7. The protective cover substrate measuring device according to claim 6, characterized in that: The placement surface (52) is provided with a pick-up and put-down groove (54).

8. The protective cover substrate measuring device according to any one of claims 1, 6, and 7, characterized in that: A negative pressure generating device (53) is provided in the cavity (51).

9. The protective cover substrate measuring device according to claim 7, characterized in that: A negative pressure generating device (53) is provided in the cavity (51), and a filter sponge (55) is provided in the groove (54).

10. The protective cover substrate measuring device according to claim 1, characterized in that: The protective cover substrate measuring device also includes a base (1), on which the position transfer mechanism (3) and the laser probe (7) are both mounted.

Images