Heating disc vacuum force balancing device and semiconductor thin film deposition equipment

By adding an energy storage component, such as a coil spring, to the heating plate lifting assembly, the energy stored when the heating plate rises is used to generate a reset force at a predetermined position, thus solving the problem of the influence of vacuum force on the heating plate, achieving stable control of the heating plate position and improving the reliability of the equipment.

CN224548543UActive Publication Date: 2026-07-24PIOTECH (SHENYANG) SEMICONDUCTOR EQUIPMENT CO LTD
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Patent Information

Application Number
CN202521635684.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-01
Publication Date
2026-07-24
Estimated Expiration
2035-08-01

AI Technical Summary

Technical Problem

The existing heating plate experiences upward atmospheric pressure in a vacuum environment that is much greater than its own weight. This causes the servo motor to continuously output reverse torque, increasing the motor load and energy consumption. Furthermore, the heating plate is prone to collision with the spray head due to control instability, affecting equipment reliability and process stability.

Method used

By adding an energy storage component, such as a coil spring, to the lifting assembly, energy is stored when the heating plate rises. After reaching the predetermined position, the energy storage component generates a reset force to counteract the vacuum force, thereby reducing the load on the servo motor and improving control stability.

Benefits of technology

It significantly reduces the load requirements of the servo motor, improves the control stability of the heating plate position and the operational reliability of the equipment, avoids the risk of heating plate collision, and improves the stability and precision of the process.

✦ Generated by Eureka AI based on patent content.
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Abstract

The utility model discloses a heating disc vacuum force balancing device and semiconductor film deposition equipment, the semiconductor film deposition equipment comprises a cavity, a heating disc, a corrugated pipe and a heating disc vacuum force balancing device, the heating disc vacuum force balancing device comprises a lifting assembly and an energy storage part, the heating disc is arranged in the cavity, and the corrugated pipe is arranged in the cavity. The upper end and the lower end of the corrugated pipe are connected with the bottom of the cavity and the lifting assembly respectively, the heating disc penetrates through the corrugated pipe to be connected with the lifting assembly, and the energy storage part is connected with the lifting assembly; when the lifting assembly drives the heating disc to ascend to a preset position, the energy storage piece is driven to store energy, and the energy storage piece generates reset acting force for driving the lifting assembly to descend. Vacuum force is automatically counteracted in a mechanical energy storage mode, the load of the servo motor is remarkably reduced, the system operation stability is improved, meanwhile, the equipment collision risk caused by motor faults is effectively prevented, and the equipment reliability and safety are improved.
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