Heating disc vacuum force balancing device and semiconductor thin film deposition equipment

Abstract

The utility model discloses a kind of heating disc vacuum force balancing device and semiconductor thin film deposition equipment, the semiconductor thin film deposition equipment includes cavity, heating disc, bellows and heating disc vacuum force balancing device, the heating disc vacuum force balancing device includes lifting assembly and energy storage piece, the heating disc is located in the cavity, the bottom of the cavity and lifting assembly are connected respectively in the upper and lower ends of the bellows, the heating disc passes through the bellows and is connected with the lifting assembly, the energy storage piece is connected with the lifting assembly;Wherein, the lifting assembly drives the heating disc to rise to predetermined position when driving the energy storage piece energy storage, the energy storage piece generates reset force of driving the lifting assembly to drop.The utility model automatically offsets vacuum force by mechanical energy storage mode, significantly reduces servo motor load, improves system operation stability, effectively prevents the risk of equipment collision caused by motor failure at the same time, improves equipment reliability and security.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a heating plate vacuum force balancing device and a semiconductor thin film deposition equipment. Background Technology

[0002] Against the backdrop of the rapid development of the integrated circuit industry, the reliability of chip equipment is receiving increasing attention. As a key component of thin-film equipment, the wafer heating plate, due to its special materials and structure, not only has high manufacturing costs but also requires special protection during the process. During thin-film equipment production, the heating plate is in a vacuum environment within the reaction chamber and needs to perform lifting and lowering movements. Therefore, a bellows structure is typically used to isolate the vacuum inside the chamber from the outside atmosphere. However, the bellows, installed at the bottom of the chamber, is subjected to an upward force generated by atmospheric pressure. Existing heating plate lifting and lowering methods use servo motors for control. While controlling the lifting and lowering of the heating plate, the bellows needs to be stretched or compressed, thus bearing the additional atmospheric pressure from the bellows. Since the upward atmospheric pressure on the heating plate is much greater than its own weight, the servo motor constantly outputs downward torque to maintain the heating plate's position. Furthermore, the extremely close distance between the heating plate and the spray head during the process makes extreme position adjustments difficult. If the servo motor fails, it can easily cause the heating plate to collide, resulting in serious damage. Utility Model Content

[0003] The present invention provides a heating plate vacuum force balancing device and a semiconductor thin film deposition equipment, which aims to solve the problem that existing heating plates are difficult to maintain the process position due to the vacuum force.

[0004] In a first aspect, this utility model provides a vacuum force balancing device for a heating plate, comprising: a lifting assembly for driving the heating plate to rise and fall and an energy storage component, wherein the energy storage component is connected to the lifting assembly; wherein, when the lifting assembly drives the heating plate to rise to a predetermined position, it drives the energy storage component to store energy, and the energy storage component generates a reset force that drives the lifting assembly to fall.

[0005] Furthermore, the lifting assembly includes a driving component, a transmission component, and a connecting component. The driving component is connected to the transmission component, the transmission component is connected to the connecting component, and the connecting component is used to connect the heating plate. The energy storage component is connected to the transmission component and / or the connecting component.

[0006] Furthermore, the energy storage component is a spiral variable energy storage body, and the transmission component includes a lead screw and a nut seat. The lead screw is arranged along the lifting direction of the heating plate, with one end connected to the driving component and the other end connected to the spiral variable energy storage body. The nut seat is threaded to the lead screw and fixedly connected to the connecting component.

[0007] Furthermore, the spiral variable energy storage body is a coil spring, which includes a central winding end and an outer fixed end, and the other end of the lead screw is fixedly connected to the central winding end.

[0008] Furthermore, the connector includes a connecting portion and a supporting portion. One side of the connecting portion is fixedly connected to the nut seat. The supporting portion is perpendicularly connected to the connecting portion and extends in a direction away from the nut seat. The supporting portion is used to connect the bellows, and the connecting portion is used to connect the heating plate.

[0009] Furthermore, the heating plate vacuum force balancing device also includes a fixed bracket and two sets of guide components disposed on the fixed bracket. The two sets of guide components are disposed on both sides of the lead screw along the lifting direction of the heating plate, and both sets of guide components are connected to the connector.

[0010] Furthermore, the guide assembly includes a guide rail and a slider, the slider being slidably connected to the guide rail and connected to the connector.

[0011] Furthermore, the fixing bracket includes a middle fixing plate and two side fixing plates. The two side fixing plates are respectively vertically connected to the two sides of the middle fixing plate. The top end face of the middle fixing plate is coplanar with the top end faces of the two side fixing plates to jointly form the cavity fixing end face.

[0012] Furthermore, the energy storage component is any one of an elastic energy storage component, a gravitational potential energy storage component, a hydraulic energy storage component, or a pneumatic energy storage component.

[0013] Secondly, this utility model also provides a semiconductor thin film deposition apparatus, including: a cavity, a heating plate, a bellows, and a heating plate vacuum balancing device. The heating plate vacuum balancing device is the aforementioned heating plate vacuum balancing device. The heating plate is disposed in the cavity. The upper and lower ends of the bellows are respectively connected to the bottom of the cavity and a lifting assembly. The heating plate passes through the bellows and is connected to the lifting assembly.

[0014] This invention provides a heating plate vacuum balancing device and a semiconductor thin film deposition equipment. The semiconductor thin film deposition equipment includes a cavity, a heating plate, a bellows, and a heating plate vacuum balancing device. The heating plate vacuum balancing device includes a lifting assembly and an energy storage device. The heating plate is disposed in the cavity. The upper and lower ends of the bellows are connected to the bottom of the cavity and the lifting assembly, respectively. The heating plate passes through the bellows and is connected to the lifting assembly. The energy storage device is connected to the lifting assembly. When the lifting assembly drives the heating plate to rise to a predetermined position, it causes the energy storage device to store energy. The energy storage device generates a reset force that drives the lifting assembly to descend. This invention, through the cooperation of the lifting assembly and the energy storage device, enables the heating plate to synchronously store potential energy during its ascent. When the predetermined position is reached, the reset force generated by the energy storage device precisely counteracts the upward vacuum force exerted on the heating plate by the vacuum environment, thereby significantly reducing the load demand of the servo motor, improving the system control stability, and effectively avoiding the risk of heating plate collision due to motor failure. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A three-dimensional schematic diagram of the vacuum force balancing device for the heating plate according to an embodiment of this utility model is shown;

[0017] Figure 2 Another perspective view of the vacuum force balancing device for the heating plate according to an embodiment of this utility model is shown;

[0018] Figure 3 Showing Figure 2 Enlarged view of part A;

[0019] Figure 4 This invention presents a front view schematic diagram of the vacuum force balancing device for the heating plate according to an embodiment of the present invention;

[0020] Figure 5 A three-dimensional schematic diagram of the heating plate vacuum force balancing device and the bellows assembly according to an embodiment of the present invention is shown.

[0021] Figure 6 This invention presents another perspective view showing the assembly of the heating plate vacuum force balancing device and the bellows in an embodiment of the present invention;

[0022] Figure 7 This invention presents a front view schematic diagram showing the assembly of the heating plate vacuum force balancing device and the bellows according to an embodiment of the present invention;

[0023] Figure label:

[0024] 1. Lifting assembly; 11. Driving component; 12. Transmission component; 121. Lead screw; 122. Nut seat; 13. Connecting component; 131. Connecting part; 132. Support part; 2. Energy storage component; 3. Fixed bracket; 31. Intermediate fixed plate; 32. Side fixed plate; 4. Guide assembly; 41. Guide rail; 42. Slider; 5. Bellows. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0026] The directional terms used in this invention, such as "up," "down," "front," "back," "left," "right," "inner," "outer," and "side," are merely for reference to the accompanying drawings. Therefore, the directional terms used are for explanation and understanding of this invention, and not for limiting it. Furthermore, in the accompanying drawings, structures that are similar or identical are indicated by the same reference numerals.

[0027] In semiconductor thin film deposition equipment, the heating plate needs to perform precise lifting and lowering movements in a vacuum environment. However, due to the pressure difference between the inside and outside of the vacuum chamber, the heating plate is subjected to a significant upward vacuum force. This force is much greater than the weight of the heating plate itself, forcing the servo motor in traditional designs to continuously output a counterforce to maintain the process position. This not only increases the motor load and energy consumption but also easily leads to collisions between the heating plate and the spray head due to control instability. Especially during the process, when the heating plate approaches the extreme position of the spray head, this mechanical imbalance makes position control difficult, affecting the reliability of the equipment and the stability of the process. Therefore, an innovative solution that can automatically balance the vacuum force is urgently needed.

[0028] To address this, this utility model provides a heating plate vacuum force balancing device and a semiconductor thin film deposition equipment. By cooperating with a lifting component and an energy storage device, the heating plate can simultaneously store potential energy as it rises. After reaching a predetermined position, the resetting force of the energy storage device precisely counteracts the upward force of the vacuum, thereby reducing the load on the servo motor, improving control stability, and effectively avoiding the risk of heating plate collision caused by motor failure.

[0029] This embodiment of the invention aims to solve the problem of the heating plate being subjected to an upward vacuum force, and the specific approach is as follows:

[0030] By adding a coil spring device to the heating plate lifting assembly, when the lead screw drives the heating plate to rise, it simultaneously tightens the coil spring to store energy. This ensures that the reset torque generated by the coil spring precisely counteracts the upward force exerted on the heating plate by the vacuum environment when the heating plate reaches the process position. This innovative design automatically balances the vacuum force through mechanical energy storage, requiring the servo motor to provide only the small torque needed to maintain the position, without the need for continuous output of a reverse force. This significantly reduces the motor load and improves the system's control accuracy and reliability, fundamentally solving the position control problem caused by vacuum force imbalance in traditional designs.

[0031] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0032] Please see Figures 1-7 This utility model embodiment demonstrates a vacuum force balancing device for a heating plate, comprising: a lifting assembly 1 for driving the heating plate to rise and fall and an energy storage component 2, wherein the energy storage component 2 is connected to the lifting assembly 1; wherein, when the lifting assembly 1 drives the heating plate to rise to a predetermined position, it drives the energy storage component 2 to store energy, and the energy storage component 2 generates a reset force that drives the lifting assembly 1 to fall.

[0033] Specifically, the lifting assembly 1 is a component capable of driving the heating plate to achieve lifting and lowering actions. It can adopt various structural forms, such as a lead screw 121 assembly, including a lead screw 121 and a nut that cooperates with the lead screw 121. The lead screw 121 can rotate under the drive of a power source, thereby driving the nut to move along the axial direction of the lead screw 121 to achieve lifting and lowering; it can also be a gear and rack mechanism, including a gear and rack that mesh with each other. When the gear rotates, it drives the rack to move up and down; it can also be a belt drive assembly, including a pulley and a belt wound on the pulley. When the pulley rotates, it drives the connected components to lift and lower through the belt. Its function is to receive the driving force and convert it into the motion of driving the heating plate to lift and lower. The energy storage component 2 is a component capable of storing energy when subjected to force and generating a restoring force when released. It can also adopt various structures, such as a coil spring in a helical shape, storing energy through coiling deformation and generating a torsional restoring force upon release; it can also be a helical spring, storing energy through stretching or compression deformation and generating an axial stretching or compression restoring force upon release; or it can be an elastic rubber component, storing energy through elastic deformation and generating a restoring force upon release. Its function is to generate a restoring force to drive the lifting assembly 1 downward after being driven to store energy. The lifting assembly 1 is connected to the heating plate, either directly or indirectly through an intermediate connector 13, to drive the heating plate to rise and fall synchronously. The connection between the energy storage component 2 and the lifting assembly 1 depends on their structural forms. For example, when the lifting assembly 1 is a lead screw 121 assembly and the energy storage component 2 is a coil spring, the coil spring can be sleeved on one end of the lead screw 121, with one end connected to a fixed structure and the other end connected to the lead screw 121 or a transmission component on the lead screw 121. When the lifting assembly 1 is a gear and rack mechanism and the energy storage component 2 is a helical spring, one end of the helical spring can be fixed, and the other end is connected to the rack. When the lifting assembly 1 is a belt drive assembly and the energy storage component 2 is an elastic rubber component, one end of the elastic rubber component can be fixed, and the other end is connected to the slider 42 driven by the belt. When the lifting assembly 1 drives the heating plate to rise, the movement of the lifting assembly 1 synchronously causes the energy storage component 2 to deform in order to store energy. When the heating plate rises to the predetermined position, the reset force generated by the energy storage component 2 can just balance the vacuum force on the heating plate.

[0034] By cooperating with the lifting component 1 and the energy storage component 2, the resetting force of the energy storage component 2 can be used to counteract the upward force of the vacuum environment on the heating plate. This allows the lifting component 1 to maintain the heating plate in the predetermined position without continuously outputting a reverse force, reducing the load on the lifting component 1, improving the stability of the heating plate position, reducing the risk of failure caused by excessive drive load, and thus improving the operational reliability of the equipment.

[0035] In one embodiment, the energy storage component 2 is any one of an elastic energy storage component 2, a gravitational potential energy storage component 2, a hydraulic energy storage component 2, or a pneumatic energy storage component 2. Specifically, the elastic energy storage component 2 is a component that stores energy through its own elastic deformation, such as a coil spring, which has a helical structure and can accumulate elastic potential energy through coiling deformation, generating a torsional restoring force when released; or a helical spring, which stores energy through axial stretching or compression deformation, generating an axial elastic force when reset; or a leaf spring, which uses bending deformation to realize the storage and release of energy, and provides a restoring force through the restoring force of elastic deformation. The gravitational potential energy storage component is a component that stores energy by means of the change in gravity height of itself or related components, for example, it may include a counterweight and a rope, one end of the rope is connected to the lifting assembly 1, and the other end is connected to the counterweight. When the lifting assembly 1 drives the heating plate to rise, the counterweight is lifted and stores gravitational potential energy, and the tension generated when it falls forms a restoring force that drives the lifting assembly 1 to descend. The hydraulic energy storage component 2 is a component that stores energy through pressure changes in hydraulic oil. For example, it may include a hydraulic cylinder and an accumulator. The hydraulic cylinder is connected to the lifting assembly 1. When the lifting assembly 1 rises, the hydraulic oil in the hydraulic cylinder is forced into the accumulator to store energy. When the pressurized oil in the accumulator flows back, it drives the hydraulic cylinder, generating a resetting force that drives the lifting assembly 1 to descend. The pneumatic energy storage component 2 is a component that stores energy using the compression and expansion of gas. For example, it may include a cylinder and an air tank. The cylinder is connected to the lifting assembly 1. When the lifting assembly 1 rises, it compresses the gas in the cylinder and forces it into the air tank to store energy. When the compressed gas in the air tank expands and flows back, it pushes the cylinder, forming a resetting force that drives the lifting assembly 1 to descend. Regardless of the specific type of energy storage component 2 used, its core function is to store energy through corresponding mechanical structures (tightening, stretching, compressing, lifting heavy objects, compressing fluids, etc.) during the process of the heating plate being driven upwards by the lifting assembly 1 to a predetermined position, and to generate a resetting force at that position that drives the lifting assembly 1 to descend. All of the above-mentioned energy storage components 2 can cooperate with the lifting assembly 1 to complete energy storage when the lifting assembly 1 drives the heating plate to rise to the predetermined position and generate a corresponding reset force, thereby balancing the vacuum force on the heating plate, reducing the load on the lifting assembly 1, improving the stability of the heating plate position, reducing the risk of failure, and improving the reliability of equipment operation.

[0036] Reference Figures 1-4In one embodiment, the lifting assembly 1 includes a driving component 11, a transmission component 12, and a connecting component 13. The driving component 11 is connected to the transmission component 12, and the transmission component 12 is connected to the connecting component 13. The connecting component 13 is used to connect the heating plate. The energy storage component 2 is connected to the transmission component 12 and / or the connecting component 13. Specifically, the driving component 11 is a component capable of providing driving force, which can be a servo motor, stepper motor, or other power device. Its function is to output rotational or linear driving force to drive the transmission component 12. The transmission component 12 is a component capable of transmitting power and realizing motion conversion. It can be a lead screw 121 assembly (including a lead screw 121 and a nut), a gear and rack mechanism (including a gear and a rack), a synchronous belt assembly (including a synchronous pulley and a synchronous belt), etc. Its function is to transmit the power output by the driving component 11 to the connecting component 13 and convert the motion of the driving component 11 into the lifting motion of the connecting component 13. The connecting component 13 is used to connect the transmission component 12 and the heating plate. It can be a connecting flange, connecting bracket, connecting shaft, etc. Its function is to transmit the movement of the transmission component 12 to the heating plate, causing the heating plate to rise and fall synchronously. The driving component 11 is connected to the transmission component 12. For example, the output shaft of a servo motor can be connected to the lead screw 121 in the lead screw 121 assembly via a coupling, and the output shaft of a stepper motor can be connected to the gear in a gear and rack mechanism. The transmission component 12 is connected to the connecting component 13. For example, the nut in the lead screw 121 assembly can be fixedly connected to the connecting bracket, and the synchronous belt in the synchronous belt assembly can be connected to the connecting flange. The connecting component 13 is connected to the heating plate by bolt fixing, snap-fit ​​connection, etc., to ensure that the heating plate rises and falls synchronously with the connecting component 13. The energy storage component 2 is selectively connected to the transmission component 12 and / or the connecting component 13 according to its type and design requirements. For example, when the energy storage element 2 is a coil spring or torsion spring, it can be fixedly installed on the rotating part of the transmission element 12 (such as the end shaft of the lead screw); when the energy storage element 2 is a tension / compression spring, its two ends can be connected to the connecting element 13 (such as the slider 42) and the fixed frame respectively; or when the energy storage element 2 is a hydraulic / pneumatic cylinder, its piston rod can be connected to the moving part of the connecting element 13 or the transmission element 12. This connection relationship allows the driving element 11 to drive the connecting element 13 through the transmission element 12 and drive the heating plate to rise to the predetermined position. The movement (rotation or linear displacement) of the transmission element 12 and / or the connecting element 13 will synchronously drive the energy storage element 2 to deform or change its state (such as tightening the coil spring, tension / compression spring, lifting the counterweight or compressing the fluid), thereby storing energy. At this time, the downward resetting force generated by the energy storage element 2 acts directly on the transmission element 12 and / or the connecting element 13 connected to it, and is transmitted through the transmission chain of the lifting assembly 1, ultimately used to balance the upward vacuum force on the heating plate.By integrating the energy storage component 2 onto the key moving parts (transmission component 12 or connecting component 13) of the lifting assembly 1, the direct linkage between the energy storage action and the lifting motion of the heating plate is realized, ensuring the timeliness and accuracy of vacuum force balance. At the same time, the force transmission path is optimized, further reducing the load on the drive component 11 and improving the mechanical efficiency and operational reliability of the entire lifting system.

[0037] Reference Figure 3 In this embodiment, the energy storage component 2 is a spiral deformation energy storage body. The transmission component 12 includes a lead screw 121 and a nut seat 122. The lead screw 121 is arranged along the lifting direction of the heating plate, with one end connected to the driving component 11 and the other end connected to the spiral deformation energy storage body. The nut seat 122 is threaded to the lead screw 121 and fixedly connected to the connecting component 13. Specifically, the spiral deformation energy storage body is a component that stores and releases energy through the deformation of a spiral structure. It can curl or stretch as the transmission component 12 rotates, thereby generating a restoring force. The lead screw 121 in the transmission component 12 extends along the lifting direction of the heating plate. One end is connected to the driving component 11 to receive the driving force, for example, by fixing it to the output shaft of the driving component 11 through a coupling. The other end is connected to the spiral deformation energy storage body to drive the energy storage body to deform synchronously. The nut seat 122 has a thread on its inner side that matches the lead screw 121, and is threadedly fitted onto the lead screw 121. Its outer side is fixedly connected to the connecting member 13 (e.g., by welding, bolting, etc.). When the lead screw 121 rotates under the drive of the drive member 11, the nut seat 122 moves up and down along the axial direction of the lead screw 121, thereby driving the heating plate to move synchronously through the connecting member 13. During this process, the rotation of the lead screw 121 causes the helical deformation energy storage body to undergo helical deformation and store energy. When the heating plate reaches the predetermined position, the resetting force of the energy storage body is transmitted in the reverse direction through the lead screw 121, balancing the vacuum force on the heating plate, reducing the load on the drive member 11, and improving structural stability.

[0038] In a specific implementation, the spiral deformation energy storage body is a coil spring, which includes a central winding end and an outer fixed end. The other end of the lead screw 121 is fixedly connected to the central winding end. Specifically, the coil spring, as a spiral deformation energy storage body, has a spiral coiled structure and has the characteristic of storing elastic potential energy through coiling deformation. It includes a central winding end (not shown in the figure) and an outer fixed end (not shown in the figure). The central winding end is the inner winding starting end of the coil spring, which can be fixed to an external component and rotate with it. The outer fixed end is the outer end of the coil spring and can be fixed to a stationary structure (such as a fixed bracket 3). The other end of the lead screw 121 is fixedly connected to the central winding end of the coil spring (such as by key connection, welding, etc.). When the lead screw 121 rotates under the drive of the drive member 11, the central winding end rotates synchronously with the lead screw 121, causing the coil spring to further coil around the central winding end to store energy. The outer fixed end restricts the overall rotation of the coil spring, ensuring that the reset force generated by the deformation can be reversed through the lead screw 121 to act on the transmission member 12, thereby offsetting the vacuum force when the heating plate reaches the predetermined position and achieving force balance.

[0039] Reference Figure 1 and Figure 4 In one embodiment, the vacuum force balancing device for the heating plate further includes a fixed bracket 3 and two sets of guide components 4 disposed on the fixed bracket 3. The two sets of guide components 4 are located on both sides of the lead screw 121 along the lifting direction of the heating plate, and both sets of guide components 4 are connected to the connecting member 13. Specifically, the fixed bracket 3 is a support structure with a certain rigidity, which can be fixed to the equipment cavity or frame for installing and supporting components such as the lead screw 121 and guide components 4. The two sets of guide components 4 are spaced apart on the fixed bracket 3 and are located on both sides of the lead screw 121 along the lifting direction of the heating plate, forming a symmetrical guide structure for the connecting member 13. The guide components 4 may include, but are not limited to, linear slide rails, guide rod sleeves, or linear bearing structures. Each set of guide components 4 is connected to the connecting member 13 and can move synchronously with the lifting of the connecting member 13. By setting two sets of guide components 4, the lifting and lowering movements of the connector 13 and the heating plate can be guided and limited, effectively suppressing the swaying or shaking caused by uneven force during the lifting and lowering process, ensuring that the heating plate rises and falls smoothly in the preset direction, and improving the motion accuracy and stability of the overall structure.

[0040] Continue to refer to Figure 4In this embodiment, the guide assembly 4 includes a guide rail 41 and a slider 42. The slider 42 is slidably connected to the guide rail 41 and is connected to the connector 13. Specifically, the guide rail 41 in the guide assembly 4 is fixed to the fixed bracket 3 along the lifting direction of the heating plate. It is a long strip structure with a smooth guide surface on its surface. The inner side of the slider 42 is provided with a groove that matches the guide rail 41. It is slidably connected to the guide rail 41 through the groove and can slide freely along the length of the guide rail 41. The outer side is fixedly connected to the connector 13 (e.g., bolt connection, integral molding, etc.). When the connector 13 is lifted and lowered by the transmission component 12, the slider 42 slides synchronously along the guide rail 41 with the connector 13. With the cooperation of the guide rail 41 and the slider 42, the movement of the connector 13 and the heating plate is restricted to the preset lifting and lowering direction, reducing lateral deviation during the movement, further improving the stability and accuracy of the lifting and lowering of the heating plate, ensuring its relative position with other components inside the cavity (such as spray heads) is stable, and reducing the risk of collision.

[0041] Continue to refer to Figure 1 In one embodiment, the fixing bracket 3 includes a middle fixing plate 31 and two side fixing plates 32. The two side fixing plates 32 are respectively vertically connected to the two sides of the middle fixing plate 31. The top end face of the middle fixing plate 31 is coplanar with the top end faces of the two side fixing plates 32 to jointly form the cavity fixing end face. Specifically, the middle fixing plate 31 of the fixing bracket 3 is a plate-shaped structure, serving as the main support part 132 of the entire fixing bracket 3, and is used to install components such as the lead screw 121 and the guide assembly 4. The two side fixing plates 32 are also plate-shaped structures, respectively vertically connected to the two side edges of the middle fixing plate 31 (or integrally formed with the middle fixing plate 31 by means of welding, bolt fastening, etc.), forming a concave-shaped overall frame structure. The top end face of the middle fixing plate 31 and the top end faces of the two side fixing plates 32 are on the same plane. These coplanar end faces together constitute the cavity fixing end face, which is the mounting surface used to connect with the bottom of the equipment cavity. The cavity fixing end face is fixed to the bottom of the cavity by bolts and other fasteners, which can make the fixing bracket 3 stably support all components such as the lead screw 121, guide assembly 4, and lifting assembly 1 on it, ensuring that each component maintains a stable relative position during the lifting and lowering of the heating plate, avoiding the impact of bracket shaking on the movement accuracy of the heating plate, and enhancing the rigidity and load-bearing capacity of the overall structure.

[0042] Reference Figure 1 and Figure 2In one embodiment, the connector 13 includes a connecting portion 131 and a supporting portion 132. One side of the connecting portion 131 is fixedly connected to the nut seat 122. The supporting portion 132 is perpendicularly connected to the connecting portion 131 and extends away from the nut seat 122. The supporting portion 132 is used to connect the bellows 5, and the connecting portion 131 is used to connect the heating plate. Specifically, the connector 13 includes a connecting portion 131 and a supporting portion 132 that are perpendicularly fixed to each other. One side of the connecting portion 131 is rigidly fixed to the nut seat 122 of the transmission component 12 by bolts, welding, or integral molding, while the other side is used to connect to the heating plate (e.g., by flange mating, snap-fit, or threaded hole fixing). The supporting portion 132 extends horizontally from the top of the connecting portion 131 away from the nut seat 122, forming a cantilevered bearing platform, which has a mounting surface (e.g., a connecting plate with through holes) for fixing the lower flange of the bellows 5. The vertical layout allows the connecting part 131 to directly transmit the lifting driving force to the heating plate, while the support part 132 provides an independent mounting point for the bellows 5. This achieves mechanical decoupling between the movement of the heating plate and the extension and retraction of the bellows 5. It ensures that the heating plate can rise and fall stably with the nut seat 122 through the connecting part 131, and that the support part 132 provides stable support for the bellows 5. This ensures that the bellows 5 can extend and retract normally during the lifting and lowering of the heating plate to isolate the vacuum environment, while avoiding motion interference between the connecting part 13 and other components, thus improving the coordination and reliability of the overall structure.

[0043] Reference Figures 1-7 This utility model embodiment also provides a semiconductor thin film deposition apparatus, including: a cavity (not shown in the figure), a heating plate (not shown in the figure), a bellows 5, and a heating plate vacuum balancing device. The heating plate is disposed within the cavity. The upper and lower ends of the bellows 5 are respectively connected to the bottom of the cavity and a lifting assembly 1. The heating plate passes through the bellows 5 and is connected to the lifting assembly 1. The heating plate vacuum balancing device has been described in detail in the above embodiments, and for the sake of brevity, it will not be repeated here.

[0044] Reference Figures 5-7Specifically, the semiconductor thin film deposition equipment includes a sealed reaction chamber, a heating plate disposed inside the chamber to support the wafer, a bellows 5 for dynamic sealing of the bottom of the chamber, and a vacuum force balancing device for the heating plate. The heating plate extends vertically downwards via its bottom connecting shaft and passes through the hollow channel inside the bellows 5, ultimately being rigidly fixed to the connecting part 13 of the lifting assembly 1 in the vacuum force balancing device. The upper flange of the bellows 5 is sealed to the bottom opening of the chamber via a sealing ring, while the lower flange is sealed and fixed to the support part 132 of the lifting assembly 1, allowing the bellows 5 to expand and contract synchronously during the lifting of the heating plate to maintain the vacuum integrity of the chamber. By integrating the vacuum force balancing device, the upward vacuum force experienced by the heating plate in the process position is automatically offset by the reset force of the energy storage device 2, significantly reducing the driving load, improving the heating plate position control accuracy and process stability, reducing the risk of failure, ensuring the stable operation of the semiconductor thin film deposition process, and improving the overall operational reliability and process accuracy of the equipment.

[0045] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A vacuum force balancing device for a heating plate, characterized in that, include: A lifting assembly and an energy storage device are used to drive the heating plate to rise and fall. The energy storage device is connected to the lifting assembly. When the lifting assembly drives the heating plate to rise to a predetermined position, it causes the energy storage device to store energy, and the energy storage device generates a reset force that drives the lifting assembly to fall.

2. The vacuum force balancing device for the heating plate according to claim 1, characterized in that, The lifting assembly includes a driving component, a transmission component, and a connecting component. The driving component is connected to the transmission component, and the transmission component is connected to the connecting component. The connecting component is used to connect to the heating plate. The energy storage component is connected to the transmission component and / or the connecting component.

3. The vacuum force balancing device for the heating plate according to claim 2, characterized in that, The energy storage component is a spiral variable energy storage body. The transmission component includes a lead screw and a nut seat. The lead screw is arranged along the lifting direction of the heating plate. One end of the lead screw is connected to the driving component, and the other end is connected to the spiral variable energy storage body. The nut seat is threaded to the lead screw and fixedly connected to the connecting component.

4. The vacuum force balancing device for the heating plate according to claim 3, characterized in that, The spiral variable energy storage body is a coil spring, which includes a central winding end and an outer fixed end. The other end of the lead screw is fixedly connected to the central winding end.

5. The vacuum force balancing device for the heating plate according to claim 3, characterized in that, It also includes a fixed bracket and two sets of guide components disposed on the fixed bracket. The two sets of guide components are disposed on both sides of the lead screw along the lifting direction of the heating plate, and both sets of guide components are connected to the connector.

6. The vacuum force balancing device for the heating plate according to claim 5, characterized in that, The guide assembly includes a guide rail and a slider, the slider being slidably connected to the guide rail and connected to the connector.

7. The vacuum force balancing device for the heating plate according to claim 5, characterized in that, The fixing bracket includes a middle fixing plate and two side fixing plates. The two side fixing plates are respectively vertically connected to the two sides of the middle fixing plate. The top end face of the middle fixing plate is coplanar with the top end faces of the two side fixing plates to jointly form the cavity fixing end face.

8. The vacuum force balancing device for the heating plate according to claim 3, characterized in that, The connector includes a connecting part and a supporting part. One side of the connecting part is fixedly connected to the nut seat. The supporting part is perpendicularly connected to the connecting part and extends in a direction away from the nut seat. The supporting part is used to connect the bellows, and the connecting part is used to connect the heating plate.

9. The vacuum force balancing device for the heating plate according to claim 1, characterized in that, The energy storage device is any one of the following: elastic energy storage device, gravitational potential energy storage device, hydraulic energy storage device, and pneumatic energy storage device.

10. A semiconductor thin film deposition apparatus, characterized in that, include: The cavity, heating plate, bellows, and heating plate vacuum balancing device are as described in any one of claims 1-9. The heating plate is disposed in the cavity. The upper and lower ends of the bellows are respectively connected to the bottom of the cavity and the lifting assembly. The heating plate passes through the bellows and is connected to the lifting assembly.

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