A thin film probe card device

Abstract

The utility model relates to probe card technical field, and disclose a kind of film probe card device, including substrate, the upper fixed mounting of substrate has connecting assembly, the outside fixed mounting of slider one has locating rod, the inside of locating rod is equipped with sliding slot two, the inside sliding connection of sliding slot two has slider two, the outside fixed mounting of slider two has limit rod.The utility model is equipped with sliding slot one by being in the inside of connecting assembly, first the probe is welded by the one end of being away from connecting assembly with locating groove, so that locating groove is fixedly connected with connecting assembly by the inner groove of probe, positioning rod is positioned and installed by the sliding connection of slider one and sliding slot one at this time, slider two is extruded by the elastic force of spring at this time, so that slider two is slidingly connected in the inside of sliding slot two, so that limit rod extrudes probe, prevent the situation that probe can appear to shake and fall off.

Description

Technical Field

[0001] This utility model relates to the field of probe card technology, and more specifically, to a thin-film probe card device. Background Technology

[0002] Thin-film probe cards are a key tool for semiconductor wafer testing, primarily used to perform electrical performance testing on integrated circuits on wafers during chip manufacturing. They are an upgraded version of traditional probe cards, employing thin-film technology to achieve higher precision and density testing. However, existing probe cards often decompress after testing semiconductor chips. Due to the large number of probes inside the card, this can lead to pressure between the probes, causing them to wobble or detach, potentially significantly impacting subsequent testing. Utility Model Content

[0003] To overcome the shortcomings of the prior art, this utility model provides a thin-film probe card device, which has the advantage of maintaining the stability of the probe card.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a thin-film probe card device, comprising a substrate, a connecting component fixedly mounted on the top of the substrate, a positioning groove formed inside the substrate, a probe placed inside the positioning groove, the probe being fixedly connected to the connecting component, a sliding groove first formed inside the connecting component, a slider first slidably connected inside the sliding groove first, a positioning rod fixedly mounted on the outside of the slider first, a sliding groove second formed inside the positioning rod, a slider second slidably connected inside the sliding groove second, and a limit rod fixedly mounted on the outside of the slider second.

[0005] As a preferred embodiment of this utility model, a telescopic rod is fixedly installed inside the second slide groove, and a spring is sleeved on the outside of the telescopic rod, and the spring is fixedly connected to the second slide block.

[0006] As a preferred embodiment of this utility model, a connecting plate is fixedly installed above the connecting component, and a contact is fixedly installed above the connecting plate. There are multiple contacts, and all of the multiple contacts are located above the connecting component.

[0007] As a preferred embodiment of the present invention, the substrate has four positioning holes inside, which are located on the outside of the positioning groove.

[0008] As a preferred embodiment of this utility model, there are multiple positioning slots and multiple probes, which are located around the connecting component, and the multiple probes are located inside the multiple positioning slots.

[0009] As a preferred embodiment of this utility model, there are four slide grooves and four sliders. The four slide grooves are distributed at the four corners of the connecting assembly. There are multiple positioning rods, and the multiple positioning rods are fixedly connected to the four sliders respectively.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0011] 1. This utility model features a sliding groove inside the connecting component, with a slider slidably connected inside the sliding groove. A positioning rod is fixedly installed on the outside of the slider. The positioning rod has a sliding groove inside, with a slider slidably connected inside the sliding groove. A limit rod is fixedly installed on the outside of the slider. When assembling the probe, the probe is first spot-welded to the end of the positioning groove away from the connecting component, so that the positioning groove is fixedly connected to the connecting component through the inner groove of the probe. Then, the positioning rod is positioned and installed through the sliding connection between the slider and the sliding groove. The slider is then squeezed by the spring force, causing the slider to slide inside the sliding groove. The limit rod squeezes the probe, preventing the probe from shaking or falling off.

[0012] 2. This utility model features positioning grooves inside the substrate, with probes fixedly installed within these grooves. Multiple positioning grooves and probes are located around the connecting assembly, with each probe positioned within a specific positioning groove. During installation, the numerous positioning grooves may cause mutual compression and entanglement, leading to pulling between probes during subsequent testing. By separating the corresponding positioning grooves with different probes, a certain distance is maintained between them, ensuring stability during installation. Furthermore, the positioning grooves provide a degree of enclosure for the probes, preventing dust accumulation on the substrate surface from affecting probe connectivity and thus extending the overall lifespan of the probes. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This utility model Figure 1 Enlarged schematic diagram of the structure at point A;

[0015] Figure 3 This utility model Figure 1 Enlarged schematic diagram of the structure at point B;

[0016] Figure 4 This is a schematic diagram of the substrate structure of this utility model;

[0017] Figure 5 This utility model Figure 4 A magnified schematic diagram of the structure at point C.

[0018] In the diagram: 1. Base plate; 2. Connecting assembly; 3. Positioning groove; 4. Probe; 5. Slide 1; 6. Slider 1; 7. Positioning rod; 8. Slide 2; 9. Telescopic rod; 10. Spring; 11. Slider 2; 12. Limiting rod; 13. Connecting plate; 14. Contact point; 15. Positioning hole. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] like Figures 1 to 5 As shown, this utility model provides a thin film probe card device, including a substrate 1, a connecting component 2 fixedly installed on the top of the substrate 1, a positioning groove 3 is formed inside the substrate 1, a probe 4 is placed inside the positioning groove 3, the probe 4 is fixedly connected to the connecting component 2, a sliding groove 5 is formed inside the connecting component 2, a slider 6 is slidably connected inside the sliding groove 5, a positioning rod 7 is fixedly installed on the outside of the slider 6, a sliding groove 8 is formed inside the positioning rod 7, a slider 11 is slidably connected inside the sliding groove 8, and a limit rod 12 is fixedly installed on the outside of the slider 11.

[0021] When assembling the probe card, the probe 4 is first spot-welded to the end of the positioning groove 3 away from the connecting component 2, so that the positioning groove 3 is fixedly connected to the connecting component 2 through the inner groove of the probe 4. Then, the positioning rod 7 is positioned and installed through the sliding connection between the slider 1 6 and the slide groove 1 5. At this time, the slider 2 11 is squeezed by the elastic force of the spring 10, so that the slider 2 11 slides inside the slide groove 2 8, and the limiting rod 12 squeezes the probe 4 to prevent the probe 4 from shaking or falling off.

[0022] The slide groove 2 8 has a telescopic rod 9 fixedly installed inside, and a spring 10 is sleeved on the outside of the telescopic rod 9. The spring 10 is fixedly connected to the slide block 2 11.

[0023] The main function of spring 10 is to push slider 2 11 closer to connecting component 2 through elastic force, so that limit rod 12 slightly squeezes probe 4 to maintain the stability of probe 4.

[0024] A connecting plate 13 is fixedly installed on the top of the connecting component 2, and a contact 14 is fixedly installed on the top of the connecting plate 13. There are multiple contacts 14, and all of the multiple contacts 14 are located on the top of the connecting component 2.

[0025] The main function of the multiple contacts 14 is to make contact with the chip during chip testing, thereby checking whether the internal circuitry of the chip is normal and achieving a rapid testing effect.

[0026] The substrate 1 has four positioning holes 15 inside, and the four positioning holes 15 are located on the outside of the positioning groove 3.

[0027] The main function of the four positioning holes 15 is to facilitate the quick positioning of the substrate 1 when it is necessary to fix the substrate 1, and to prevent slight movement.

[0028] There are multiple positioning slots 3 and multiple probes 4. The multiple positioning slots 3 and multiple probes 4 are located around the connecting component 2, and the multiple probes 4 are located inside the multiple positioning slots 3.

[0029] During installation, due to the large number of positioning slots 3, they may squeeze each other or become entangled. This can lead to tension between probes 4 during subsequent testing. To address this, different probes 4 are installed separately with their corresponding positioning slots 3, maintaining a certain distance between them. This ensures stability during installation. Furthermore, the positioning slots 3 provide a certain degree of enclosure for the probes 4, preventing dust accumulation on the surface of the substrate 1 over time from affecting the connectivity of the probes and thus extending their overall lifespan.

[0030] There are four slides 5 and four sliders 6. The four slides 5 are distributed at the four corners of the connecting component 2. There are multiple positioning rods 7, which are fixedly connected to the four sliders 6 respectively.

[0031] When multiple probes 4 need to be limited, firstly, the four sliders 6 and the four slide grooves 5 are slidably connected so that multiple positioning rods 7 are installed in the designated positions. Then, the limiting rod 12 is pressed towards the side of the positioning rod 7 away from the connecting component 2. After the multiple positioning rods 7 are installed, they are released so that the limiting rod 12 is squeezed by the elastic force of the spring 10, thereby achieving the effect of keeping the probe 4 stable.

[0032] Working principle and usage process of this utility model:

[0033] Firstly, since a positioning groove 3 is provided inside the substrate 1, and a probe 4 is fixedly installed inside the positioning groove 3, and there are multiple positioning grooves 3 and multiple probes 4, which are located around the connecting component 2 respectively, and the multiple probes 4 are located inside the multiple positioning grooves 3 respectively. When installing, due to the large number of positioning grooves 3, they may squeeze each other and easily become entangled during installation, which will cause the probes 4 to be pulled apart during subsequent testing. At this time, the corresponding positioning grooves 3 are installed separately by using different probes 4 to maintain a certain distance between the probes 4 and achieve a certain stability during installation.

[0034] Meanwhile, since the positioning groove 3 has a certain degree of wrapping around the probe 4, even if the surface of the working substrate 1 is covered with dust for a long time, it will not affect the connectivity of the probe 4, thereby improving the overall service life of the probe 4.

[0035] Finally, because a sliding groove 5 is provided inside the connecting component 2, a slider 6 is slidably connected inside the sliding groove 5, a positioning rod 7 is fixedly installed on the outside of the slider 6, and a sliding groove 8 is provided inside the positioning rod 7, a slider 11 is slidably connected inside the sliding groove 8, and a limiting rod 12 is fixedly installed on the outside of the slider 11, when assembling the probe card, the probe 4 is first spot-welded to the end of the positioning groove 3 away from the connecting component 2, so that the positioning groove 3 is fixedly connected to the connecting component 2 through the inner groove of the probe 4. At this time, the positioning rod 7 is positioned and installed through the sliding connection between the slider 6 and the sliding groove 5. At this time, the slider 11 is squeezed by the elastic force of the spring 10, so that the slider 11 is slidably connected inside the sliding groove 8, and the limiting rod 12 squeezes the probe 4 to prevent the probe 4 from shaking or falling off.

[0036] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A thin film probe card assembly comprising a substrate (1) characterised in that: A connecting component (2) is fixedly installed on the top of the substrate (1). A positioning groove (3) is opened inside the substrate (1). A probe (4) is placed inside the positioning groove (3). The probe (4) is fixedly connected to the connecting component (2). A sliding groove (5) is opened inside the connecting component (2). A slider (6) is slidably connected inside the sliding groove (5). A positioning rod (7) is fixedly installed on the outside of the slider (6). A sliding groove (8) is opened inside the positioning rod (7). A slider (11) is slidably connected inside the sliding groove (8). A limit rod (12) is fixedly installed on the outside of the slider (11).

2. A thin film probe card apparatus according to claim 1, wherein: A telescopic rod (9) is fixedly installed inside the slide groove (8), and a spring (10) is sleeved on the outside of the telescopic rod (9). The spring (10) is fixedly connected to the slide block (11).

3. A thin film probe card apparatus as in claim 1, wherein: A connecting plate (13) is fixedly installed above the connecting component (2), and a contact (14) is fixedly installed above the connecting plate (13). There are multiple contacts (14), and all of the multiple contacts (14) are located above the connecting component (2).

4. The thin film probe card apparatus of claim 1, wherein: The substrate (1) has four positioning holes (15) inside, and the four positioning holes (15) are located on the outside of the positioning groove (3).

5. The thin film probe card apparatus of claim 1, wherein: There are multiple positioning slots (3) and probes (4). The multiple positioning slots (3) and multiple probes (4) are located around the connecting component (2), and the multiple probes (4) are located inside the multiple positioning slots (3).

6. The thin film probe card apparatus of claim 1, wherein: There are four slides (5) and four sliders (6). The four slides (5) are distributed at the four corners of the connecting assembly (2). There are multiple positioning rods (7). The multiple positioning rods (7) are fixedly connected to the four sliders (6) respectively.

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