Semiconductor temperature control machine (SJ-F201)
CN310018954SActive Publication Date: 2026-06-05SHANGHAI SHENGJIAN SEMICON TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- SHANGHAI SHENGJIAN SEMICON TECH CO LTD
- Filing Date
- 2025-10-24
- Publication Date
- 2026-06-05
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Figure 000007_ABST
Abstract
1. Name of the design product: semiconductor temperature control machine (SJ-F201). 2. Use of the design product: temperature control for semiconductor film deposition, etching, cutting and other processes. 3. Design points of the design product: in shape. 4. Picture or photo best indicating the design points: perspective view 1.
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