GUI for semiconductor manufacturing cluster tools

Abstract

The image diagram is an image for displaying information displayed on a display panel having a graphical user interface. Specifically, it is for displaying information associated with each chamber of a semiconductor manufacturing cluster tool having multiple chambers. For example, a "Monitor" and "Explore" section are provided for each chamber, and when the "Monitor" section is clicked, information on current or past executions of the corresponding chamber is displayed, and when the "Explore" section is clicked, detailed information such as simulation information related to the corresponding chamber is expanded and displayed.

Images