X-ray generator

Abstract

To provide an X-ray generator which can suppress displacement of a circuit part in an insulating part.SOLUTION: An X-ray generation device 1A includes a housing 2, an electron gun 3, a target 4, a power supply unit 6, a power feeding unit 7, and a fixing member 8 having at least one of an insulating first fixing member 81 and an insulating second fixing member 82. The power supply unit 6 includes a solid insulating part 61 and a circuit part 62 embedded in the insulating part 61, and the circuit part 62 includes a first voltage part 62a, a boosting part 62b, and a second voltage part 62c. The first fixing member 81 is embedded in the insulating part 61, is fixed to the circuit part 62, and reaches a surface 61a of the insulating part 61. The second fixing member 82 is embedded in the insulating part 61, is fixed to each of the circuit part 62, and the power feeding unit 7.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an X-ray generating device. [Background technology]

[0002] Known X-ray generators include a housing, an electron gun that emits an electron beam within the housing, a target that generates X-rays when the electron beam is incident on it within the housing, a power supply unit that generates a voltage to be applied to the electron gun or the target, and a power supply unit that supplies voltage to the electron gun or the target, and the power supply unit has an insulating unit and a circuit unit covered by the insulating unit (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-213974 Summary of the Invention [Problem to be solved by the invention]

[0004] In the X-ray generator described above, the circuit section is covered by the insulating section, thereby suppressing the occurrence of discharge in the power supply section. In such an X-ray generator, if the circuit section is misaligned within the insulating section during use or manufacturing, discharge may occur in the power supply section.

[0005] An object of the present invention is to provide an X-ray generator that can suppress misalignment of a circuit portion within an insulating portion. [Means for solving the problem]

[0006] The X-ray generator of the present invention is [1] "an X-ray generator comprising: a housing; an electron gun that emits an electron beam within the housing; a target that generates X-rays within the housing when the electron beam is incident on it; a power supply unit that generates a voltage to be applied to the electron gun or the target; a power supply unit that supplies the voltage to the electron gun or the target; and a fixing member having an insulating first fixing member and at least one of an insulating or conductive second fixing member, wherein the power supply unit has a solid insulating unit and a circuit unit embedded in the insulating unit, and the circuit unit includes a first voltage unit that receives a first voltage from an outside, a boost unit that boosts the first voltage to a second voltage that is the above-mentioned voltage, and a second voltage unit that outputs the second voltage to the electron gun or the target via the power supply unit, wherein the first fixing member is embedded in the insulating unit, fixed to the circuit unit, and reaches the surface of the insulating unit, and the second fixing member is embedded in the insulating unit and fixed to the circuit unit and the power supply unit."

[0007] In the X-ray generator described in [1] above, the fixing member includes at least one of an insulating first fixing member and an insulating or conductive second fixing member. When the fixing member includes at least the first fixing member, the first fixing member is embedded in the insulating portion, fixed to the circuit portion, and reaches the surface of the insulating portion. Therefore, for example, when molding the insulating portion during manufacturing of the X-ray generator, the position of the circuit portion can be maintained constant within the insulating portion by fixing the first fixing member to both the circuit portion and the mold. Furthermore, when the fixing member includes at least the second fixing member, the second fixing member is embedded in the insulating portion and fixed to both the circuit portion and the power supply portion. Therefore, for example, when molding the insulating portion during manufacturing of the X-ray generator, the position of the circuit portion can be maintained constant within the insulating portion. Therefore, the X-ray generator described in [1] above can suppress misalignment of the circuit portion within the insulating portion.

[0008] The X-ray generator of the present invention may be [2] "the X-ray generator according to the above [1], in which the fixing member has at least the first fixing member." According to the X-ray generator according to [2], when molding the insulating section during manufacture of the X-ray generator, a part of the first fixing member exposed outside the insulating section is fixed to a mold. This makes it possible to maintain a constant position of the circuit section within the insulating section via the first fixing member, thereby reliably suppressing misalignment of the circuit section within the insulating section. Furthermore, because the first fixing member is insulating, even if the first fixing member is exposed outside the insulating section, it is possible to suppress discharge from the circuit section to the outside via the first fixing member.

[0009] The X-ray generator of the present invention may be [3] "the X-ray generator according to the above [2], in which the fixing member has both the first fixing member and the second fixing member." According to the X-ray generator according to [3], the position of the circuit unit within the insulating unit can be more reliably fixed by both the first fixing member and the second fixing member.

[0010] The X-ray generator of the present invention may be [4] "the X-ray generator according to the above [3], wherein the power supply unit is embedded in the insulating unit such that a portion of the power supply unit is exposed outside the insulating unit." According to the X-ray generator according to [4], for example, when molding the insulating unit during manufacture of the X-ray generator, the portion of the power supply unit exposed outside the insulating unit can be fixed to a mold, whereby the position of the circuit unit can be maintained constant within the insulating unit via the power supply unit and the second fixing member, thereby reliably suppressing positional deviation of the circuit unit within the insulating unit.

[0011] The X-ray generator of the present invention may be [5] "the X-ray generator according to the above [3], wherein the housing and the power supply unit are fixed to each other, the power supply unit is embedded in the insulating unit such that the entirety of the power supply unit is located within the insulating unit, and the housing is embedded in the insulating unit such that a portion of the housing is exposed to the outside of the insulating unit." According to the X-ray generator according to [5], for example, when molding the insulating unit during manufacture of the X-ray generator, the portion of the housing exposed to the outside of the insulating unit can be fixed to a mold, whereby the position of the circuit unit can be maintained constant within the insulating unit via the housing, the power supply unit, and the second fixing member, thereby reliably suppressing positional deviation of the circuit unit within the insulating unit.

[0012] The X-ray generator of the present invention may be [6] "the X-ray generator according to any one of the above [1] to [5], wherein the circuit unit further has a substrate on which the first voltage unit, the voltage step-up unit, and the second voltage unit are mounted, and at least one of the first fixing member and the second fixing member is fixed to the substrate." According to the X-ray generator described in [6], at least one of the first fixing member and the second fixing member can be fixed to the circuit unit so as not to physically interfere with the first voltage unit, the voltage step-up unit, and the second voltage unit.

[0013] The X-ray generator of the present invention may be [7] "the X-ray generator according to any one of the above [1] to [6], wherein the first fixing member is fixed to the circuit unit at a position on the first voltage unit side relative to the booster unit, and the second fixing member is fixed to the circuit unit at a position on the second voltage unit side relative to the booster unit." According to the X-ray generator described in [7], the first fixing member and the second fixing member can be fixed to the circuit unit so as not to affect the booster unit.

[0014] The X-ray generator of the present invention [8] comprises "a housing, an electron gun that emits an electron beam within the housing, a target that generates X-rays when the electron beam is incident within the housing, a power supply unit that generates a voltage to be applied to the electron gun or the target, a power supply unit that supplies the voltage to the electron gun or the target, and a fixing member having at least one of an insulating first fixing member and an insulating or conductive second fixing member, wherein the power supply unit is configured to fix the electron gun to a container and a liquid or gaseous insulating material contained in the container. and a circuit unit covered with the insulating member, wherein the circuit unit includes a first voltage unit to which a first voltage is input from the outside, a boost unit that boosts the first voltage to a second voltage that is the above voltage, and a second voltage unit that outputs the second voltage to the electron gun or the target via the power supply unit, wherein the first fixing member is covered with the insulating member and is fixed to each of the circuit unit and the housing unit, and the second fixing member is covered with the insulating member and is fixed to each of the circuit unit and the power supply unit.

[0015] In the X-ray generator described in [8] above, the fixing member has at least one of an insulating first fixing member and an insulating or conductive second fixing member. When the fixing member has at least the first fixing member, the first fixing member is covered with an insulating portion and fixed to each of the circuit portion and the housing portion. Therefore, for example, when the X-ray generator is in use, the position of the circuit portion within the insulating portion can be maintained constant. When the fixing member has at least the second fixing member, the second fixing member is covered with an insulating portion and fixed to each of the circuit portion and the power supply portion. Therefore, for example, when the X-ray generator is in use, the position of the circuit portion within the insulating portion can be maintained constant. Therefore, according to the X-ray generator described in [8] above, it is possible to suppress misalignment of the circuit portion within the insulating portion. [Effects of the Invention]

[0016] According to the present invention, it is possible to provide an X-ray generator that can suppress misalignment of a circuit portion within an insulating portion. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a cross-sectional view of an X-ray generator according to a first embodiment. [Figure 2] FIG. 2 is a perspective view of a portion of the X-ray generating device shown in FIG. 1. [Figure 3] FIG. 10 is a cross-sectional view of an X-ray generator according to a second embodiment. [Figure 4] FIG. 4 is a cross-sectional view of a portion of the X-ray generating device shown in FIG. 3. [Figure 5] FIG. 10 is a cross-sectional view of an X-ray generator according to a third embodiment. [Figure 6] FIG. 10 is a cross-sectional view of a modified X-ray generating device. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each drawing, the same or corresponding parts are designated by the same reference numerals, and duplicated explanations will be omitted. [X-ray generating device of the first embodiment]

[0019] 1, the X-ray generator 1A of the first embodiment includes a housing 2, an electron gun 3, a target 4, an anode 5, a power supply unit 6, a power supply unit 7, and a fixing member 8. The X-ray generator 1A is a microfocus X-ray source used, for example, in X-ray nondestructive testing.

[0020] The housing 2 accommodates the electron gun 3, the target 4, and the anode 5. The space within the housing 2 is a vacuum space. The housing 2 includes a head 21, a bulb 22, and a flange 23. The head 21 is formed into a cylindrical shape with a bottom from a metal material such as stainless steel. The bulb 22 is formed into a cylindrical shape with a bottom from an insulating material such as glass. The head 21 is airtightly joined to the bulb 22 so that the interior of the head 21 is in communication with the interior of the bulb 22. The flange 23 is formed into a circular shape along the outer edge of the head 21 from a metal material such as stainless steel. Here, the direction along the central axis (tube axis) A1 of the bulb 22 is referred to as the Z-axis direction (second direction), the direction perpendicular to the Z-axis direction is referred to as the X-axis direction (first direction), and the direction perpendicular to both the Z-axis direction and the X-axis direction is referred to as the Y-axis direction.

[0021] The electron gun 3 emits an electron beam toward the target 4 inside the housing 2. The electron gun 3 is composed of a hot cathode that emits thermal electrons, an extraction electrode that extracts electrons, and an electron lens that adjusts the convergence of the electron beam (all not shown). The electron gun 3 may have a cold cathode instead of the hot cathode. The electron gun 3 is fixed to the head 21 so that the central axis A2 of the electron gun 3 is perpendicular to the central axis A1 of the bulb 22. The central axis A2 of the electron gun 3 is aligned along the X-axis direction.

[0022] The target 4 generates X-rays when the electron beam emitted from the electron gun 3 is incident on it within the housing 2. The target 4 is formed into a plate shape from a high-melting point metal material such as tungsten. The target 4 is supported by the anode 5 within the housing 2 so as to face the electron gun 3 in the X-axis direction. The target 4 may be formed integrally with the anode 5.

[0023] The anode 5 applies a voltage generated in the power supply unit 6 to the target 4. Therefore, the anode 5 is electrically connected to the target 4. The anode 5 is formed in a rod shape extending along the Z-axis direction from a metal material such as copper. The anode 5 extends from the outside to the inside of the housing 2 so that the central axis of the anode 5 coincides with the central axis A1 of the bulb 22. The anode 5 is fixed to the bottom of the bulb 22. The tip surface of the anode 5 within the housing 2 is an inclined surface inclined with respect to both the central axis A1 and the central axis A2. The target 4 is embedded in the tip portion 5a of the anode 5 so as to be flush with the tip surface of the anode 5.

[0024] The power supply unit 6 generates a voltage to be applied to the target 4 via the power supply unit 7 and the anode 5. The power supply unit 6 is disposed on one side in the Z-axis direction (below the housing 2) with respect to the housing 2. The power supply unit 6 has an insulating unit 61, a circuit unit 62, and wiring 63.

[0025] The insulating section 61 is a solid insulating section that electrically insulates the circuit section 62 and the wiring 63 from other components. The insulating section 61 is formed in a rectangular parallelepiped shape from a resin material such as epoxy resin. The surface 61a of the insulating section 61 is composed of an upper surface 61b that faces the housing 2, a lower surface 61c that is opposite the upper surface 61b, and a side surface 61d that connects the upper surface 61b and the lower surface 61c to each other. A ring-shaped wall section 61e is formed in the center of the upper surface 61b.

[0026] The circuit unit 62 has a substrate 621, which is a rectangular printed circuit board. A surface 621a (see FIG. 2) of the substrate 621 is perpendicular to the Y-axis direction. A first voltage unit 62a, a boost unit 62b, and a second voltage unit 62c are mounted on the surface 621a of the substrate 621. The first voltage unit 62a includes an input terminal to which a first voltage is input from outside via a power supply unit (not shown) and is electrically connected to the boost unit 62b. The boost unit 62b includes a boost circuit that boosts the first voltage to a second voltage. The boost unit 62b is, for example, a Cockcroft-Walton circuit. The second voltage unit 62c includes an output terminal that outputs a second voltage to be applied to the target 4 and is electrically connected to the boost unit 62b. The output terminal outputs the second voltage to the target 4 via wiring 63, the power supply unit 7, and the anode 5. In other words, relatively speaking, the first voltage section 62a can be said to be the low-voltage section of the circuit section 62, and the second voltage section 62c can be said to be the high-voltage section of the circuit section 62. The boost section 62b can also be said to be substantially included in the high-voltage section of the circuit section 62. In other words, the substrate 621 includes a relatively low-voltage region in which the first voltage section 62a is arranged, and a relatively high-voltage region in which the boost section 62b and the second voltage section 62c are arranged. Note that the surface of the substrate 621 may be orthogonal to either the X-axis direction or the Z-axis direction. It does not matter which of the two surfaces of the substrate 621 is the surface of the substrate 621 (the surface on which the first voltage section 62a, etc. are mounted).

[0027] The booster 62b is located in the center of the surface 621a of the substrate 621. The first voltage unit 62a is located on one side (the lower surface 61c side) of the booster 62b in the Z-axis direction. The second voltage unit 62c is located on the other side (the upper surface 61b side) of the booster 62b in the Z-axis direction.

[0028] The circuit section 62 is embedded in the insulating section 61 so that the entire circuit section 62 is located within the insulating section 61. The circuit section 62 is embedded in the insulating section 61 so that the substrate 621 extends straight along the Z-axis direction.

[0029] The wiring 63 electrically connects the second voltage unit 62c and the target 4 via the power supply unit 7 and the anode 5. One end of the wiring 63 is electrically connected to the second voltage unit 62c, and the other end of the wiring 63 is connected to the power supply unit 7. In this embodiment, the wiring 63 is made of, for example, a copper wire and a coating material coating the copper wire, but it may also be a plate or rod made of a conductive material. The wiring 63 is embedded in the insulating portion 61 so that at least a portion of the wiring 63 is located within the insulating portion 61. In the X-ray generator 1A, the wiring 63 is entirely embedded in the insulating portion 61 so that the portion of the wiring 63 is aligned along the Z-axis direction.

[0030] The power supply unit 7 supplies the second voltage output from the second voltage unit 62c to the target 4. The power supply unit 7 is a cylindrical socket made of a metal material such as aluminum. The power supply unit 7 is embedded in the insulating unit 61 so that a portion 7a of the power supply unit 7 is exposed outside the insulating unit 61. The portion 7a protrudes from the upper surface 61b to the outside of the insulating unit 61. The portion 7a is surrounded by the wall portion 61e when viewed from the Z-axis direction. The base end portion 5b of the anode 5 is fitted into the portion 7a. The power supply unit 7 is fixed to the housing 2 via the anode 5. That is, the housing 2 and the power supply unit 7 are fixed to each other.

[0031] When viewed from the Z-axis direction, the target 4, the anode 5, and the power supply part 7 overlap with the insulating part 61. The circuit part 62 is embedded in the insulating part 61 so that the second voltage part 62c is located between the first voltage part 62a and the target 4 in the Z-axis direction.

[0032] The fixing member 8 will be described in detail with further reference to Figure 2. The fixing member 8 has both a first fixing member 81 and a second fixing member 82.

[0033] The first fixing member 81 has insulating properties. In the X-ray generator 1A, the first fixing member 81 is formed in a rod shape from an insulating material and extends along the Z-axis direction. As an example, the first fixing member 81 is formed in a rectangular parallelepiped shape from glass epoxy or the like and extends along the Z-axis direction. The first fixing member 81 is embedded in the insulating section 61 and fixed to the circuit section 62. In the X-ray generator 1A, the first fixing member 81 has an end 81a on one side in the Z-axis direction and an end 81b on the other side in the Z-axis direction. The end 81a is fixed to the substrate 621. Specifically, the end 81a is in contact with the back surface 621b opposite to the front surface 621a of the substrate 621. In this state, the shank of the screw S2 is inserted into a through hole (not shown) provided in the substrate 621 and is screwed into a screw hole (not shown) provided in the end 81a. The first fixing member 81 and the substrate 621 may be joined not only by screwing but also by bonding with an adhesive or thermal fusion. The end 81b reaches the surface 61a (lower surface 61c) of the insulating part 61. In the X-ray generator 1A, the end face of the first fixing member 81 included in the end 81b is flush with the surface 61a (lower surface 61c).

[0034] The second fixing member 82 has insulating properties. In the X-ray generator 1A, the second fixing member 82 is formed in a rod shape from an insulating material and extends along the Z-axis direction. As an example, the second fixing member 82 is formed in a rectangular parallelepiped shape from glass epoxy or the like and extends along the Z-axis direction. The second fixing member 82 is embedded in the insulating section 61 and fixed to each of the circuit section 62 and the power supply section 7. In the X-ray generator 1A, the second fixing member 82 has an end 82a on one side in the Z-axis direction and an end 82b on the other side in the Z-axis direction. The end 82a is fixed to the substrate 621. Specifically, the end 82a is in contact with the back surface 621b of the substrate 621, and in this state, the shank of the screw S2 is inserted into a through-hole (not shown) provided in the substrate 621 and is screwed into a screw hole (not shown) provided in the end 82a. The joining of second fixing member 82 and substrate 621 is not limited to screwing, and may be achieved by bonding with an adhesive, thermal fusion, or the like. End 82b is fixed to a portion of power supply unit 7 that is embedded in insulating unit 61. Specifically, end 82b is screwed to a portion of power supply unit 7 that is embedded in insulating unit 61. The joining of second fixing member 82 and power supply unit 7 is not limited to screwing, and may be achieved by bonding with an adhesive, thermal fusion, or the like.

[0035] The first fixing member 81 is fixed to the circuit unit 62 at a position on the first voltage unit 62a side relative to the booster unit 62b, i.e., in the low-voltage region of the circuit unit 62. The second fixing member 82 is fixed to the circuit unit 62 at a position on the second voltage unit 62c side relative to the booster unit 62b, i.e., in the high-voltage region of the circuit unit 62. That is, the first fixing member 81 and the second fixing member 82 are fixed to the circuit unit 62 so as to sandwich the booster unit 62b in the Z-axis direction. The first fixing member 81 can be called the low-voltage side fixing member, and the second fixing member 82 can be called the high-voltage side fixing member.

[0036] The X-ray generator 1A further includes a first plate member 11, a second plate member 12, a plurality of (four in this embodiment) support columns 13, a cylindrical member 14, insulating oil 15, and conductive paint 16. The conductive paint 16 is applied to a side surface 61d of the insulating portion 61, and the potential of the side surface 61d is set to ground potential.

[0037] The first plate member 11 is formed into a rectangular plate shape from a metal material such as aluminum. The insulating portion 61 is disposed on the first plate member 11 so that its lower surface 61c contacts the first plate member 11. The second plate member 12 is formed into a rectangular plate shape from a metal material such as aluminum. The second plate member 12 is disposed on the insulating portion 61 so that its upper surface 61b contacts the second plate member 12. An opening 12a is provided in the second plate member 12. The wall portion 61e and the power supply portion 7 are located inside the opening 12a when viewed from the Z-axis direction.

[0038] Each of the multiple support posts 13 is disposed between one of the four corners of the first plate member 11 and one of the four corners of the second plate member 12. The support posts 13 are formed in a rectangular parallelepiped shape from a metal material such as aluminum. The first plate member 11 and the second plate member 12 are fixed to each other via the support posts 13. Specifically, the shank of the screw S1 is inserted into a through hole provided in the first plate member 11 or the second plate member 12 and is screwed into a screw hole provided in the support posts 13. This fixes the first plate member 11 and the second plate member 12 to each other.

[0039] The tubular member 14 accommodates insulating oil 15. The tubular member 14 is formed into a cylindrical shape from a metal material such as aluminum. The tubular member 14 is disposed on the second plate member 12 so that the interior of the tubular member 14 is in communication with the opening 12a. A valve 22 and an anode 5 are located inside the tubular member 14. One end 14a of the tubular member 14 is tapered, with the diameter decreasing toward the tip end surface of the tubular member 14. A flange 23 is screwed to the tip end surface of the tubular member 14 via a sealing member (not shown). A flange 14b is formed at the other end of the tubular member 14. The flange 14b is screwed to the second plate member 12 via a sealing member (not shown). An internal space is defined by the inner surface of the opening 12a, the inner surface of the tubular member 14, the flange 23, and the insulating portion 61. The internal space is filled with insulating oil 15, the main component of which is, for example, mineral oil. Insulating oil 15 covers bulb 22, the part of anode 5 exposed to the outside of housing 2, and the part of power supply part 7 exposed to the outside of insulating part 61.

[0040] In the X-ray generator 1A configured as described above, the side surface 61d of the insulating unit 61 is set to ground potential, and a voltage of, for example, several hundred volts is input as a first voltage from an external power supply via a power supply unit to the first voltage unit 62a. The booster unit 62b boosts the first voltage to a second voltage of, for example, several kV to several hundred kV. The second voltage unit 62c then outputs the second voltage to the target 4 via the wiring 63, the power supply unit 7, and the anode 5. With the second voltage applied to the target 4, an electron beam from the electron gun 3 is incident on the target 4, causing X-rays to be generated from the target 4. The X-ray generator 1A is a so-called sealed reflection X-ray generator. Power may be supplied to the electron gun 3 by a transformer (not shown) included in the power supply unit 6, or by the circuit unit 62.

[0041] The power supply unit 6 of the X-ray generator 1A is manufactured, for example, as follows. First, the circuit unit 62, wiring 63, power supply unit 7, first fixing member 81, and second fixing member 82 are placed at predetermined positions in a mold. Then, the first fixing member 81 is fixed to the circuit unit 62 and the mold, respectively, the second fixing member is fixed to the circuit unit 62 and power supply unit 7, respectively, and a part 7a of the power supply unit 7 is fixed to the mold. In this state, a thermosetting resin is introduced into the mold. Then, the thermosetting resin is thermally cured in the mold to form the insulating unit 61. [Action and effect]

[0042] As described above, in the X-ray generator 1A, the fixing member 8 includes both the insulating first fixing member 81 and the insulating second fixing member 82. The first fixing member 81 is embedded in the insulating portion 61, fixed to the circuit portion 62, and reaches the surface 61a of the insulating portion 61. Therefore, for example, when molding the insulating portion 61 during manufacturing of the X-ray generator 1A, the position of the circuit portion 62 can be maintained constant within the insulating portion 61 by fixing the first fixing member 81 to both the circuit portion 62 and a mold. In other words, by fixing a portion of the first fixing member 81 exposed outside the insulating portion 61 to the mold, the position of the circuit portion 62 can be maintained constant within the insulating portion 61 via the first fixing member 81, thereby reliably suppressing misalignment of the circuit portion within the insulating portion 61. Furthermore, because the first fixing member 81 is insulating, even if the first fixing member 81 is exposed outside the insulating portion 61, discharge from the circuit portion 62 to the outside via the first fixing member 81 can be suppressed. Furthermore, since the second fixing member 82 is embedded in the insulating part 61 and fixed to both the circuit part 62 and the power supply part 7, for example, when molding the insulating part 61 during the manufacture of the X-ray generator 1A, the position of the circuit part 62 can be maintained constant within the insulating part 61. Therefore, according to the X-ray generator 1A, it is possible to prevent the position of the circuit part 62 within the insulating part 61 from shifting.

[0043] In X-ray generator 1A, fixing member 8 has second fixing member 82, and power supply unit 7 is embedded in insulating portion 61 so that part 7a of power supply unit 7 is exposed outside insulating portion 61. As a result, for example, when insulating portion 61 is molded during the manufacture of X-ray generator 1A, part 7a of power supply unit 7 exposed outside insulating portion 61 is fixed to a mold, whereby the position of circuit unit 62 can be maintained constant within insulating portion 61 via power supply unit 7 and second fixing member 82, thereby reliably suppressing positional deviation of circuit unit 62 within insulating portion 61.

[0044] In the X-ray generating device 1A, the fixing member 8 has both the first fixing member 81 and the second fixing member 82. This makes it possible to fix the position of the circuit unit 62 in the insulating unit 61 more reliably by both the first fixing member 81 and the second fixing member 82.

[0045] In the X-ray generator 1A, the circuit unit 62 has a substrate 621 on which the first voltage unit 62a, the boost unit 62b, and the second voltage unit 62c are mounted, and both the first fixing member 81 and the second fixing member 82 are fixed to the substrate 621. This allows the first fixing member 81 and the second fixing member 82 to be fixed to the circuit unit 62 so as not to physically interfere with the first voltage unit 62a, the boost unit 62b, and the second voltage unit 62c.

[0046] In the X-ray generator 1A, the first fixing member 81 is fixed to the circuit section 62 at a position on the first voltage section 62a side relative to the booster section 62b, and the second fixing member 82 is fixed to the circuit section 62 at a position on the second voltage section 62c side relative to the booster section 62b. This allows the first fixing member 81 and the second fixing member 82 to be fixed to the circuit section 62 so that they do not affect the booster section 62b.

[0047] [X-ray generator according to the second embodiment]

[0048] 3 and 4, the X-ray generator 1B of the second embodiment differs from the X-ray generator 1A of the first embodiment mainly in that the housing 2 is configured so that the interior of the housing 2 can be opened and closed, and that the circuit unit 62 outputs a second voltage to the electron gun 3. The X-ray generator 1B of the second embodiment will be described below, focusing on the differences from the X-ray generator 1A of the first embodiment.

[0049] The X-ray generating device 1B further includes an exhaust pipe 17 and a power supply unit 18. The power supply unit 6 further includes a wiring 64 and an electron emission control unit (not shown) electrically connected to the wirings 63 and 64.

[0050] The housing 2 has a fixed part 24, a detachable part 25, a hinge 26, and a cap 27. The fixed part 24 and the detachable part 25 are each formed into a cylindrical shape from a metal material such as stainless steel. The detachable part 25 is attached to the fixed part 24 via the hinge 26. The detachable part 25 defines a passage 25a through which the electron beam passes. An exhaust pipe 17 is attached to the side wall of the fixed part 24. A vacuum pump (not shown) is connected to the exhaust pipe 17. A target 4, which is housed in a cap 27, is attached to the upper end of the detachable part 25. In the X-ray generator 1B, the detachable part 25 is tilted relative to the fixed part 24 to open the interior of the housing 2, allowing the filament and other components of the electron gun 3 to be replaced. A plurality of coils 28 are provided inside the detachable part 25. The multiple coil sections 28 function as electromagnetic deflection lenses to focus the electron beam traveling through the passage 25 a from the electron gun 3 toward the target 4 onto the target 4 .

[0051] The insulating part 61 is composed of a rectangular parallelepiped first part 61f and a cylindrical second part 61g provided on the first part 61f. The fixing part 24 is attached to the upper end of the first part 61f. The second part 61g is located inside the fixing part 24. A portion of each of the power supply parts 7 and 18 is embedded in the second part 61g.

[0052] The electron gun 3 is attached to the tip of the second section 61g. The electron gun 3 includes a grid base 31, screws 32, a heater socket 33, a heater pin (filament) 34, a heater base 35, a grid cap 36, and rings 37 and 38. The grid base 31 is fixed to the power supply unit 18 with the screws 32. The heater socket 33 is fitted to the power supply unit 7. The heater pin 34 is detachably attached to the heater socket 33. The heater base 35 supports the heater pin 34. The heater pin 34 and the heater base 35 form a cathode electrode. The grid cap 36 covers the heater pin 34 and the heater base 35. The ring 37 is screwed onto the grid base 31 and holds the grid cap 36 in place. This fixes the position of the heater base 35 within the grid cap 36 in cooperation with the ring 38.

[0053] Wiring 63 electrically connects second voltage section 62c and electron gun 3 (heater socket 33) via power supply section 7. One end of wiring 63 is electrically connected to second voltage section 62c, and the other end of wiring 63 is connected to power supply section 7. Wiring 64 electrically connects second voltage section 62c and electron gun 3 (screw 32) via power supply section 18. One end of wiring 64 is electrically connected to second voltage section 62c, and the other end of wiring 64 is connected to power supply section 18. Wiring 63 is embedded in insulating section 61 so that the entirety of wiring 63 is located within insulating section 61, and wiring 64 is embedded in insulating section 61 so that the entirety of wiring 64 is located within insulating section 61.

[0054] In the X-ray generator 1B configured as described above, the target 4 is set to ground potential, and a negative voltage of, for example, several hundred volts is input as a first voltage from an external power supply via a power supply unit to the first voltage unit 62a. The booster unit 62b boosts the first voltage to a second voltage of, for example, several kV to several hundred kV. The second voltage unit 62c then outputs the second voltage to the electron gun 3 via the wiring 63 and the power supply unit 7. The heater pin 34 is heated via the heater socket 33, causing an electron beam to be emitted from the heater pin 34. The electron beam from the electron gun 3 is incident on the target 4, causing X-rays to be generated from the target 4. The X-ray generator 1B is a so-called open transmission type X-ray generator.

[0055] As described above, in the X-ray generator 1B, the housing 2 is configured so that the inside of the housing 2 can be opened and closed. This allows the filament and the like of the electron gun 3 to be replaced. [X-ray generator according to the third embodiment]

[0056] 5, the X-ray generator 1C of the third embodiment is different from the X-ray generator 1A of the first embodiment mainly in that the power supply unit 6 has a housing unit 65 and a liquid insulating unit 61 housed in the housing unit 65. The X-ray generator 1C of the third embodiment will be described below, focusing on the differences from the X-ray generator 1A of the first embodiment.

[0057] The power supply unit 6 has an insulating part 61, a circuit part 62, wiring 63, and a housing part 65. The housing part 65 is formed in a box shape from a metal material such as aluminum. The insulating part 61 is housed inside the housing part 65. The insulating part 61 is a liquid insulating part. In the X-ray generator 1C, the insulating part 61 is, for example, insulating oil whose main component is mineral oil. In the power supply unit 6, the circuit part 62 and wiring 63 are covered by the insulating part 61 inside the housing part 65.

[0058] The power supply unit 7 is fixed to the housing 65 so that a portion of the power supply unit 7 is located inside the housing 65. The power supply unit 7 is fixed to the housing 65 by, for example, screwing. The portion of the power supply unit 7 is covered by the insulating part 61 inside the housing 65.

[0059] The first fixing member 81 is covered by the insulating part 61 inside the housing part 65, and is fixed to both the circuit part 62 and the housing part 65. An end part 81a of the first fixing member 81 is fixed to the substrate 621. Specifically, the end part 81a is screwed to the substrate 621. The connection between the first fixing member 81 and the substrate 621 is not limited to screwing, and may be bonding with an adhesive, heat fusion, or the like. An end part 81b of the first fixing member 81 is fixed to the inner surface 65a of the housing part 65. Specifically, the end part 81b is screwed to the inner surface 65a of the housing part 65. The connection between the first fixing member 81 and the inner surface 65a of the housing part 65 is not limited to screwing, and may be bonding with an adhesive, heat fusion, or the like.

[0060] The second fixing member 82 is covered by the insulating portion 61 inside the housing 65, and is fixed to both the circuit portion 62 and the power supply portion 7. An end portion 82a of the second fixing member 82 is fixed to the substrate 621. Specifically, the end portion 82a is screwed to the substrate 621. The connection between the second fixing member 82 and the substrate 621 is not limited to screwing, and may be joined by adhesive, heat fusion, or the like. An end portion 82b of the second fixing member 82 is fixed to a portion of the power supply portion 7 that is covered by the insulating portion 61. Specifically, the end portion 82b is screwed to a portion of the power supply portion 7 that is covered by the insulating portion 61. The connection between the second fixing member 82 and the power supply portion 7 is not limited to screwing, and may be joined by adhesive, heat fusion, or the like.

[0061] The flange 14b of the tubular member 14 is screwed to the upper surface of the accommodating portion 65 via a sealing member (not shown). In this embodiment, the insulating oil 15 and the insulating oil of the insulating portion 61 are separated by the accommodating portion 65, but a penetration portion may be provided in the partition of the accommodating portion 65 to allow the insulating oil 15 and the insulating oil of the insulating portion 61 to communicate with each other.

[0062] As described above, in the X-ray generator 1C, the fixing member 8 includes both the insulating first fixing member 81 and the insulating second fixing member 82. The first fixing member 81 is covered by the insulating portion 61 and is fixed to both the circuit portion 62 and the housing portion 65. Therefore, for example, when the X-ray generator 1C is in use, the position of the circuit portion 62 within the insulating portion 61 can be maintained constant. Furthermore, the second fixing member 82 is covered by the insulating portion 61 and is fixed to both the circuit portion 62 and the power supply portion 7. Therefore, for example, when the X-ray generator 1C is in use, the position of the circuit portion 62 within the insulating portion 61 can be maintained constant. Therefore, the X-ray generator 1C can prevent the circuit portion 62 from shifting in position within the insulating portion 61.

[0063] In X-ray generator 1C, power supply unit 7 is fixed to housing unit 65. As a result, for example, when X-ray generator 1C is in use, the position of circuit unit 62 can be maintained constant within insulating unit 61 via power supply unit 7 and second fixing member 82, and positional deviation of circuit unit 62 within insulating unit 61 can be reliably suppressed. [Variations]

[0064] The present invention is not limited to the above-described embodiments. In the X-ray generator 1A of the first embodiment, the circuit unit 62, the wiring 63, the power supply unit 7, the first fixing member 81, and the second fixing member 82 are embedded in the insulating unit 61, but the configuration of the insulating unit 61 is not limited thereto. For example, as shown in FIG. 6 , in the X-ray generator 1A, the power supply unit 7 may be embedded in the insulating unit 61 so that the entire power supply unit 7 is located within the insulating unit 61, the anode 5 may be embedded in the insulating unit 61 so that the portion of the anode 5 located outside the housing 2 is located within the insulating unit 61, and the housing 2 may be embedded in the insulating unit 61 so that a portion of the housing 2 (the head 21 and the flange 23) is exposed outside the insulating unit 61. In this case, for example, when molding the insulating section 61 during the manufacture of the X-ray generating device 1A, by fixing a part of the housing 2 exposed outside the insulating section 61 to a mold, the position of the circuit section 62 can be maintained constant within the insulating section 61 via the housing 2, the power supply section 7 and the second fixing member 82, thereby reliably suppressing positional deviation of the circuit section 62 within the insulating section 61.

[0065] Although the X-ray generator 1A of the first embodiment, the X-ray generator 1B of the second embodiment, and the X-ray generator 1C of the third embodiment each include both the first fixing member 81 and the second fixing member 82, each of the X-ray generators 1A, 1B, and 1C may include at least one of the first fixing member 81 and the second fixing member 82. Even in this case, it is possible to suppress displacement of the circuit unit 62 within the insulating unit 61. Furthermore, although the X-ray generator 1A of the first embodiment, the X-ray generator 1B of the second embodiment, and the X-ray generator 1C of the third embodiment each include the insulating second fixing member 82, they may instead include a conductive second fixing member 82. In this case, the second fixing member 82 can also be used as a power supply path from the circuit unit 62 to the power supply unit 7.

[0066] In the X-ray generator 1A of the first embodiment, the power supply unit 7 is embedded in the insulating portion 61 so that a portion 7a of the power supply unit 7 is located outside the insulating portion 61. However, in the X-ray generator 1A, the power supply unit 7 does not have to be embedded in the insulating portion 61. For example, the power supply unit 7 may be fixed onto the upper surface 61b of the insulating portion 61. Even in this case, the power supply unit 7 located outside the insulating portion 61 can be fixed to a mold when molding the insulating portion 61 during the manufacture of the X-ray generator 1A. Similarly, in the X-ray generator 1C, it is sufficient that the power supply unit 7 is fixed to the housing portion 65, and a portion of the power supply unit 7 does not have to be located within the housing portion 65.

[0067] In the X-ray generating device 1C of the third embodiment, the insulating part 61 is a liquid insulating part, but in the X-ray generating device 1C, the insulating part 61 may be a gaseous insulating part whose main component is sulfur hexafluoride gas or the like.

[0068] In the X-ray generator 1A of the first embodiment, the X-ray generator 1B of the second embodiment, and the X-ray generator 1C of the third embodiment, both the first fixing member 81 and the second fixing member 82 were fixed to the back surface 621b of the substrate 621, but each of the first fixing member 81 and the second fixing member 82 may be fixed to the front surface 621a of the substrate 621 or may be fixed to the side surface of the substrate 621.

[0069] In the X-ray generator 1C of the third embodiment, the circuit unit 62, the wiring 63, the power supply unit 7, the first fixing member 81, and the second fixing member 82 are covered by the insulating unit 61, but the form of the insulating unit 61 is not limited thereto. For example, in the X-ray generator 1C, the power supply unit 7 may be covered by the insulating unit 61 so that the entire power supply unit 7 is located within the insulating unit 61 (housing unit 65), the anode 5 may be covered by the insulating unit 61 so that the portion of the anode 5 located outside the housing 2 is located within the insulating unit 61 (housing unit 65), the housing 2 may be covered by the insulating unit 61 so that part of the housing 2 (the head 21 and the flange 23) is exposed outside the housing unit 65, and the housing 2 may be fixed to the housing unit 65. That is, the housing unit 65 may house the entire power supply unit 7 and part of the housing 2 (e.g., the bulb 22) in a state in which the housing 2 is fixed to the housing unit 65. In this case, for example, when the X-ray generating device 1C is in use, the position of the circuit section 62 can be maintained constant within the insulating section 61 via the housing 2, the power supply section 7, and the second fixing member 82, thereby reliably suppressing positional deviation of the circuit section 62 within the insulating section 61.

[0070] The X-ray generator 1A of the first embodiment and the X-ray generator 1C of the third embodiment are sealed reflection type X-ray generators, but each of the X-ray generators 1A and 1C may be a sealed transmission type X-ray generator. The X-ray generator 1B of the second embodiment is an open transmission type X-ray generator, but the X-ray generator 1B may be an open reflection type X-ray generator. [Explanation of symbols]

[0071] 1A, 1B, 1C...X-ray generator, 2...housing, 3...electron gun, 4...target, 6...power supply unit, 7...power supply unit, 8...fixing member, 61...insulating unit, 61a...surface, 62...circuit unit, 62a...first voltage unit, 62b...boosting unit, 62c...second voltage unit, 65...accommodating unit, 81...first fixing member, 82...second fixing member, 621...substrate.

Claims

1. The housing and an electron gun that emits an electron beam within the housing; a target disposed within the housing and configured to generate X-rays when the electron beam is incident thereon; a power supply unit that generates a voltage to be applied to the electron gun or the target; a power supply unit that supplies the voltage to the electron gun or the target; a fixing member having an insulating first fixing member and at least one of an insulating or conductive second fixing member; the power supply unit has a solid insulating portion and a circuit portion embedded in the insulating portion, the circuit unit includes a first voltage unit to which a first voltage is input from an external device, a boost unit that boosts the first voltage to a second voltage that is the voltage, and a second voltage unit that outputs the second voltage to the electron gun or the target via the power supply unit, the first fixing member is embedded in the insulating portion, fixed to the circuit portion, and extends to a surface of the insulating portion; The second fixing member is embedded in the insulating portion and fixed to each of the circuit portion and the power supply portion.

2. The X-ray generating device according to claim 1 , wherein the fixing member includes at least the first fixing member.

3. The X-ray generating device according to claim 2 , wherein the fixing member includes both the first fixing member and the second fixing member.

4. The X-ray generating device according to claim 3 , wherein the power supply unit is embedded in the insulating portion so that a portion of the power supply unit is exposed to the outside of the insulating portion.

5. the housing and the power supply unit are fixed to each other, the power supply portion is embedded in the insulating portion such that the entire power supply portion is located within the insulating portion, The X-ray generating device according to claim 3 , wherein the housing is embedded in the insulating portion so that a part of the housing is exposed to the outside of the insulating portion.

6. the circuit unit further includes a substrate on which the first voltage unit, the boost unit, and the second voltage unit are mounted, 6. The X-ray generating device according to claim 1, wherein at least one of the first fixing member and the second fixing member is fixed to the substrate.

7. the first fixing member is fixed to the circuit unit at a position on the first voltage unit side relative to the voltage step-up unit, 6. The X-ray generating device according to claim 1, wherein the second fixing member is fixed to the circuit section at a position on the second voltage section side relative to the voltage step-up section.

8. The housing and an electron gun that emits an electron beam within the housing; a target disposed within the housing and configured to generate X-rays when the electron beam is incident thereon; a power supply unit that generates a voltage to be applied to the electron gun or the target; a power supply unit that supplies the voltage to the electron gun or the target; a fixing member having an insulating first fixing member and at least one of an insulating or conductive second fixing member; the power supply unit has a housing, a liquid or gaseous insulating part housed in the housing, and a circuit part covered by the insulating part, the circuit unit includes a first voltage unit to which a first voltage is input from an external device, a boost unit that boosts the first voltage to a second voltage that is the voltage, and a second voltage unit that outputs the second voltage to the electron gun or the target via the power supply unit, the first fixing member is covered by the insulating portion and fixed to each of the circuit portion and the accommodating portion, The second fixing member is covered with the insulating part and fixed to each of the circuit part and the power supply part.

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