Air quantity control system of clean room

Abstract

To provide an air quantity control system of a clean room which can utilize a fan filter unit disposed independently from an air supply device in the clean room to achieve energy saving.SOLUTION: An air quantity control system of a clean room includes: an air supply device which supplies conditioned clean air to the clean room through an air supply duct; a fan filter unit which is disposed independently from the air supply device in the clean room and supplies the cleaned air to the clean room; and a control device for controlling an operation of the air supply device. The control device operates the air supply device at a fixed air volume set based on a cubic capacity of the clean room when the fan filter unit is not operated and operates the air supply device at an air volume obtained by subtracting the air volume of the fan filter unit from the fixed air volume when the fan filter unit is operated. Further, the control device obtains a temperature and a humidity in the clean room and then operates the air supply device at a variable air volume which varies according to the obtained temperature and the humidity.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an air volume control system for a clean room in which a safety cabinet is installed. [Background technology]

[0002] This type of air volume control system is disclosed, for example, in Patent Document 1. In this system, the work process in the cell room is divided into a cell processing process in which cell processing is performed in a safety cabinet and a cell culture process in which cell culture is performed in an incubator, and the operation of the air supply device is controlled in a different operating mode for each process. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-136712 Summary of the Invention [Problem to be solved by the invention]

[0004] However, a fan filter unit that is independent of the air supply device is sometimes placed in a clean room and clean air is supplied to the clean room from this fan filter unit. However, it has not been known to previously utilize the air volume of the fan filter unit to save energy.

[0005] The present disclosure has been made in view of the above-mentioned problems, and aims to provide an air volume control system for a clean room that can achieve energy savings by using a fan filter unit that is installed in the clean room independently of the air supply device. [Means for solving the problem]

[0006] To solve the above problem, a first aspect of the present disclosure relates to an air volume control system for a clean room in which a safety cabinet is arranged. The air volume control system includes an air supply device that supplies conditioned clean air to the clean room through an air supply duct, a fan filter unit that is arranged in the clean room independently of the air supply device and supplies the clean air into the clean room, and a control device that controls the operation of the air supply device. When the fan filter unit is not operating, the control device controls a fixed air volume Q set based on the volume Vr of the clean room. AC1 When the air supply device is operated and the fan filter unit is activated, the fixed air volume Q AC1 Airflow Q of the fan filter unit FFU The air supply device is operated at the air volume subtracted from the value of the temperature and humidity in the clean room, and then the variable air volume Q is set according to the temperature and humidity. AC2 Operate the air supply system.

[0007] The second aspect has the following characteristics in addition to the first aspect: The air volume control system further includes a sensor that measures the temperature and humidity in the clean room. The control device controls the variable air volume Q based on the temperature and humidity in the clean room obtained from the sensor. AC2 Calculate the ventilation rate of the clean room as Nv, and (Q AC2 +Q FFU If the condition of ) / Vr>Nv is not met, the calculated variable air volume Q AC2 Correct the following.

[0008] The third aspect has the following characteristics in addition to the first aspect: the air supply device includes a constant air volume device provided in the air supply duct. The control device controls the constant air volume device to maintain a fixed air volume Q when the fan filter unit is not operating. AC1 When the fan filter unit is operating, the constant air volume device is controlled to be fully open.

[0009] A fourth aspect of the present invention has the following characteristics in addition to any one of the first to third aspects: A bulkhead device is installed in a clean room opposite a safety cabinet, and a space is defined by the safety cabinet and the bulkhead device. The bulkhead device includes a fan filter unit, and clean air is supplied to the space from the fan filter unit. [Effects of the Invention]

[0010] According to the present disclosure, by utilizing the air volume of the fan filter unit when the fan filter unit is operating, the air volume supplied from the air supply device can be reduced, thereby achieving energy savings. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a diagram showing the configuration of an air volume control system for a clean room according to an embodiment; [Figure 2] FIG. 1 is a side view schematically illustrating an overview of a safety cabinet and a bulkhead device. [Figure 3] FIG. 2 is a front view schematically illustrating the configuration of the partition wall device. [Figure 4] FIG. 1 is a diagram schematically illustrating a clean area formed between a partition device and a safety cabinet. [Figure 5] FIG. 1(a) is a diagram schematically showing the flow of carried-in items, and FIG. 1(b) is a diagram schematically showing the flow of workers. [Figure 6] 4 is a flowchart illustrating air volume control in the air volume control system. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. However, when the number, quantity, amount, range, etc. of each element is mentioned in the embodiments described below, this disclosure is not limited to the mentioned numbers unless otherwise specified or clearly specified in principle. Furthermore, the structures, etc. described in the embodiments described below are not necessarily essential to this disclosure unless otherwise specified or clearly specified in principle.

[0013] Figure 1 is a diagram showing the configuration of a clean room air volume control system 1 according to an embodiment. A clean room 2 to which the air volume control system 1 is applied is a bio-related facility that handles cells, etc., such as a regenerative medicine facility, a pharmaceutical facility, or a testing facility. The clean room 2 is equipped with at least one safety cabinet 3 (one in Figure 1) used for processing raw materials and cells to be tested, and an incubator 4 for culturing cells.

[0014] An air intake port 21 through which conditioned and purified air is supplied is provided in the ceiling 20 of the clean room 2. A suction port 22 through which returned or exhausted air is taken out is provided in the side wall of the clean room 2. Instead of providing a single air intake port 22, a return air intake port through which returned air is taken out and an exhaust port through which exhausted air is taken out can be provided separately. In this case, a ventilation duct is connected to the ventilation port, and an exhaust duct is connected to the exhaust port. The relative positions of the safety cabinet 3, incubator 4, and bulkhead device 5 (described later) are not limited to those shown in FIG. 1.

[0015] Air volume control system 1 includes air supply device 11 and exhaust device 12. Air supply device 11 has an air supply duct 111 that supplies air into clean room 2, a return air duct 112 that returns air from inside clean room 2, and an outside air duct 113 that introduces outside air. Air supply duct 111 is connected to air supply port 21. Return air duct 112 extends from air intake port 22 and is connected to air supply duct 111. Outside air duct 113 extends from outside air intake port 23 and is connected to air supply duct 111. In other words, air returned from clean room 2 and air taken in from the outside are taken in by air supply duct 111.

[0016] The air supply device 11 is provided with an air handling unit (AHU) 114 for air conditioning within the clean room 2 and a constant air volume (CAV) 115 for controlling the supply air volume of the conditioned air, both of which are located in the air supply duct 111. The air handling unit (AHU) 114 is equipped with a temperature regulator, a humidity regulator, a blower, and a filter, all of which are not shown. The constant air volume (CAV) 115 is installed downstream of the AHU 114 in the air supply duct 111. The air supply device 11 is also provided with a high-performance filter 116 downstream of the CAV 115 in the air supply duct 111, specifically near the air supply opening 21, although the high-performance filter 116 is not essential. The air supplied to the clean room 2 from the air supply opening 21 is purified by the high-performance filter 116. That is, air that has been conditioned to an appropriate temperature and humidity and purified by the air supply device 11 is supplied to the clean room 2. In addition, a duct-inserted dew point temperature sensor 117 is provided between the AHU 114 and the CAV 115 of the air supply duct 111.

[0017] The exhaust device 12 has an exhaust duct 121 that exhausts air from within the clean room 2. The exhaust duct 121 branches off from the return air duct 112 and is connected to the indoor air outlet 24. The exhaust device 12 is equipped with a room pressure control damper (hereinafter also referred to as "PCD") 122 and an exhaust fan 123 for controlling the room pressure of the clean room 2. The PCD 122 is installed upstream of the exhaust fan 123 in the exhaust duct 121. A signal from a room pressure sensor (not shown) installed in the clean room 2 is input to the PCD 122 via the control device 6 (described later) or directly. The PCD 122 operates to maintain the room pressure of the clean room 2 at a constant positive or negative pressure relative to an outdoor reference point pressure (reference pressure). In other words, the exhaust device 12 is configured to exhaust air from the clean room 2 to the outside while maintaining the room pressure of the clean room 2 constant.

[0018] The safety cabinet 3 has an internal workspace 32, which is a sterile operation area where air purified by, for example, a HEPA filter 31 circulates. In the workspace 32, an operator Op (see FIG. 5(b)) performs tasks such as changing culture media and processing raw materials and specimens. For this reason, although not shown, the workspace 32 is filled with a large number of raw materials (including specimens), specimens, instruments, reagents, and the like that have already been brought in. A front opening 33 that overlooks the workspace 32 is provided in the front of the safety cabinet 3. A shutter 34 that can slide up and down is provided in the front opening 33, allowing the opening area of ​​the front opening 33 to be changed.

[0019] A partition device 5 is movably installed in front of the safety cabinet 3, facing the safety cabinet 3. The partition device 5 is equipped with a storage cabinet 54, which will be described later, and is capable of temporarily storing materials, specimens, instruments, reagents, and other items before they are carried into the safety cabinet 3. The materials include cells cultured in an incubator 4. As a known incubator 4 can be used, a detailed description thereof will be omitted here.

[0020] Fig. 2 is a side view schematically illustrating the safety cabinet 3 and the partition device 5. Fig. 3 is a front view schematically illustrating the configuration of the partition device 5. Fig. 4 is a diagram schematically illustrating the clean area formed between the partition device 5 and the safety cabinet 3. The distance d between the partition device 5 and the safety cabinet 3 can be set, for example, in the range of 1000 mm to 1500 mm so as to minimize the amount of work required by one or two operators.

[0021] The partition device 5 includes a frame 51, a partition 52, a fan filter unit (hereinafter also referred to as "FFU") 53, and a storage cabinet .

[0022] The frame 51 has a substantially rectangular parallelepiped outer shape. The frame 51 is made of, for example, steel so as to have a predetermined strength. However, when indoor sterilization is performed in the clean room 2, it is desirable for the frame 51 to be made of a chemical-resistant material (including a coating). The frame 51 has a width w equal to or greater than that of the safety cabinet 3 and a height equal to or greater than the height of the upper end of the front opening 33 of the safety cabinet 3. The width w of the frame 51 can be set to, for example, 1800 mm. The height h of the frame 51 can be set to the same height as that of the safety cabinet 3, specifically, in the range of 2100 mm to 2200 mm, taking into consideration the ease of operation of an operator Op when retrieving an incoming item Do from the storage cabinet 54. The depth (length in the front-to-rear direction) of the frame 51 can be set to the same depth as the storage cabinet 54. The frame 51 has a first frame portion 511 and a second frame portion 512 that are spaced apart in the width direction. A space 513 for loading and unloading the incoming item is formed between the first frame portion 511 and the second frame portion 512. The first frame portion 511 and the second frame portion 512 have the same configuration. Taking the first frame portion 511 as an example, the first frame portion 511 has four upper support columns 514 and four lower support columns 515. The lower ends of the four upper support columns 514 are fixed to the four corners of the upper surface of the storage cabinet 54, respectively, and the upper ends of the four lower support columns 515 are fixed to the four corners of the lower surface of the storage cabinet 54, respectively. The method of fixing the support columns 514, 515 to the storage cabinet 54 is not particularly limited, and welding, bolts, etc. can be used. However, when performing indoor sterilization in the clean room 2, it is desirable to use a chemical-resistant material (including a coating). Casters 516 are provided at the lower end of each lower support column 515, respectively, to allow the partition wall device 5 to be moved. This allows the partition wall device 5 to be easily moved to a predetermined position in response to changes in the layout of the clean room 2, improving usability. Each caster 516 is provided with a stopper (not shown), which allows the partition device 5 to be fixed in place after being positioned.

[0023] The partition wall 52 is fixed to the frame 51 and is made of, for example, a transparent or translucent resin. Known resins can be used to make the partition wall 52, and detailed description thereof will be omitted here. The shape of the partition wall 52 is not particularly limited, and it may be a panel or a film. The partition wall 52 includes a first partition wall portion 521 that covers the front sides (safety cabinet 3 sides) of the first frame portion 511 and the second frame portion 512, a second partition wall portion 522 that is disposed on the rear side of the space 513, and a third partition wall portion 523 that covers the outer side surfaces of the first frame portion 511 and the second frame portion 512 in the width direction. These partition walls 52 and the safety cabinet 3 define a work space 524. The defined space 524 is a clean area, and the clean area includes the space 513 between the first frame portion 511 and the second frame portion 512.

[0024] The FFU 53 is a fan-equipped high efficiency (HEPA) filter unit that is disposed independently from the air supply device 11 and supplies clean air into the clean room 2. Of the eight upper support columns 514 of the first frame section 511 and the second frame section 512, the FFU 53 is supported by the upper ends of four of the upper support columns 514 on the space 513 side. This allows the FFU 53 to be disposed above the space 513, and clean air is supplied from the FFU 53 to the space 513. Most of the clean air is then guided toward the space 524 by the second partition wall section 522, forming clean regions 513, 524 that are approximately T-shaped in plan view. The remaining clean air passes through the upper space 517 and lower space 518 of the storage cabinet 54, and after the first partition wall section 521 and the third partition wall section 523 change the airflow direction by 90 degrees from a direction toward the outside in the width direction to a direction toward the rear side, it flows toward the rear side of the partition wall device 5.

[0025] The storage cabinet 54 has an airtight structure and temporarily stores the incoming items Do therein. The incoming items Do include, for example, raw materials, specimens, instruments, and reagents. The storage cabinet 54 is held by a first frame portion 511 and a second frame portion 512. The storage cabinet 54 has a first opening / closing door 541 for inserting the incoming items Do into the storage cabinet 54 and a second opening / closing door 542 for removing the incoming items Do from the storage cabinet 54. The first opening / closing doors 541 are provided on the rear side (the incubator 4 side) of the storage cabinet 54. The second opening / closing doors 542 are provided on the inner side in the width direction facing the space 513. As a result, as shown in FIG. 5(a), the flow of people through the storage cabinet 54 is L-shaped. The storage cabinet 54 is provided with an interlock (electromagnetic lock) to prevent the first opening / closing door 541 and the second opening / closing door 542 from opening simultaneously, like a pass box. The storage cabinet 54 may be configured to have a decontamination function using an agent, a light source, or the like, and to be able to decontaminate the incoming items Do placed through the first opening / closing door 541. As a known pass box can be used as the storage cabinet 54, further detailed description will be omitted.

[0026] Next, the operation of the partition device 5 will be explained using the example of transporting an incoming item Do, which is placed in the storage cabinet 54 of the partition device 5 opposite the safety cabinet 3 through the first opening / closing door 541, into the work space 32 of the safety cabinet 3.

[0027] The partition device 5 is placed at a position opposite to the safety cabinet 3 to define a clean work area 524. When the FFU 53 is operated (turned ON) in this state, clean air is supplied to the clean areas 513 and 524. At this time, the supply air volume Q from the FFU 53 is FFU For example, 400 [m 3 / h] or more, and by establishing operational rules such as imposing certain restrictions on the work style and changing level of the workers Op, it is possible to regard the cleanliness of the clean areas 513, 524 as the cleanliness level (equivalent to grade b) required to approach (access) the work space 32 controlled to a predetermined cleanliness level (equivalent to grade a).

[0028] Next, the second opening / closing door 542 of the storage cabinet 54 is opened, the incoming item Do is removed from the storage cabinet 54, and the removed incoming item Do is carried into the work space 32 through the front opening 33. At this time, the incoming item Do is exposed to the clean area 523, which has a higher level of cleanliness than the clean room 2, thereby reducing the risk of contamination when carrying the incoming item Do into the work space 32. Moreover, because the incoming item Do is carried into the work space 32 through the front opening 33, it can easily avoid the numerous instruments, reagents, and the like arranged in the work space 32, improving the workability of the operator Op. The flow line of the incoming item Do from the storage cabinet 54 to the work space 32 is L-shaped, as shown in FIG. 5(a). At this time, the flow line of the operator Op is straight, as shown in FIG. 5(b), reducing the amount of movement of the operator Op.

[0029] In addition, the first opening / closing door 541 of the storage cabinet 54 is opened, and the incoming item Do is put in or taken out of the storage cabinet 54. At this time, as described above, part of the clean air from the FFU 53 is redirected by the first partition portion 521 and the third partition portion 523 and flows toward the rear side of the partition device 5 (toward the incubator 4). The clean air flowing in this manner cleans the area on the rear side of the storage cabinet 54 to some extent. Furthermore, the airflow of clean air flowing along the rear side of the storage cabinet 54, particularly the airflow (downflow) of clean air that has flowed toward the rear side through the upper space 517 of the storage cabinet 54, cleans the area on the rear side, and this, combined with the fact that the area on the rear side is cleaned, can be expected to suppress dust (contaminant particles) from entering the storage cabinet 54 when the incoming item Do is put in or taken out of the storage cabinet 54.

[0030] In this way, by placing the partition device 5 in front of the safety cabinet 3 in the clean room 2, clean areas 513, 524 are defined between the safety cabinet 3 and the partition 52 of the partition device 5. By supplying clean air from the FFU 53 to these clean areas 513, 524, it is possible to set the cleanliness of the clean areas 513, 524 to a level that allows direct access to the work space 32 of the safety cabinet 3, by establishing operational rules. In this state, the second opening / closing door 542 of the storage cabinet 54 is opened, and the carry-in item Do is removed from the storage cabinet 54 to the clean areas 513, 524. The carry-in item Do is then carried into the work space 32 through the front opening 33 of the safety cabinet 3 facing the clean area 513. In this way, the carry-in item Do is carried into the work space 32 inside the safety cabinet 3 via the clean areas 513, 524, thereby reducing the risk of contamination. Moreover, since the items Do are carried into the work space 32 from the front opening 33, they can be easily carried in while avoiding the numerous instruments and reagents arranged in the work space 32, thereby improving the worker's workability.

[0031] The air volume control system 1 includes a control device 6. The control device 6 includes a processor 61 and a memory 62. The memory 62 stores programs for causing the air volume control system 1 to function, and also temporarily stores signals from various sensors including a temperature sensor 71, a humidity sensor 72, and a room pressure sensor (not shown). The processor 61 controls the operation of the air supply device 11 and the exhaust device 12 in accordance with the programs stored in the memory 62.

[0032] However, since the clean areas 513, 524 are not completely isolated within the clean room 2, the clean air from the FFU 54 diffuses from the clean areas 513, 524 into the clean room 2. Therefore, the present inventors have discovered an air volume control method that regards the clean air supplied from the FFU 53 to the clean areas 513, 524 as part of the clean air supplied from the air supply duct 111 into the clean room 2.

[0033] FIG. 6 is a flowchart illustrating air volume control in the air volume control system 1.

[0034] According to the routine shown in FIG. 6, it is determined whether the FFU 53 is OFF (not operating) (step S1). Here, since the FFU 53 is ON when the operator Op is working, it is determined in step S1 whether the operator Op is working. When the FFU 53 is OFF, that is, when the operator Op is not working, the fixed air volume (also called "constant air volume") Q AC1 (Step S2). AC1 is calculated in advance by the following formula (1) and stored in the memory 62. In formula (1), Vr is the volume (fixed value) of the clean room 2, and Nv is the ventilation rate (hereinafter referred to as the "set ventilation rate") set based on the volume Vr. For example, if the volume Vr of the clean room 2 is 120 m 3 ], the set ventilation rate Nv is 30 [times / h].

[0035] Q AC1 / Vr=Nv (1)

[0036] Next, the fixed air volume Q obtained in step S2 above AC1 CAV 115 is set to an opening that realizes this (step S3). This allows constant air volume control to be performed. In this constant air volume control, the discharge pressure is controlled to a constant value by the blower inverter of AHU 114 so that the static pressure in supply air duct 111 is kept constant. Furthermore, the temperature regulator and humidity regulator of AHU 114 are controlled so that the supply air dew point temperature measured by dew point temperature sensor 117 is kept constant. Note that even when FFU 53 is turned off, the temperature and humidity in clean room 2 are measured by temperature sensor 71 and humidity sensor 72, but these are not used for air volume control. Furthermore, the operation of PCD 122 and exhaust fan 123 of exhaust device 12 is controlled so that the pressure in clean room 2 is maintained at the set pressure. Thereafter, this routine is temporarily terminated.

[0037] On the other hand, if it is determined in step S1 that the FFU 53 is ON, that is, if the operator Op is working, the process proceeds to step S4. In step S4, the CAV 115 is fully opened, and variable air volume control is started. In constant air volume control, first, the fixed air volume QAC1 And the air volume Q of FFU53 FFU When multiple FFUs 53 are installed in the clean room 2, the airflows Q FFU Here, the blower of the air supply device 11 is set to the minimum frequency, and the air volume required for cleaning is calculated as the air volume Q of the multiple FFUs 53. FFU Next, as shown in the following equation (2), the fixed air volume Q AC1 From FFU53 air volume Q FFU By subtracting this, the variable air volume (also called "variable air volume") Q AC2 is calculated (step S6).

[0038] Q AC2 =Q AC1 -Q FFU ···(2)

[0039] Thereafter, information on the temperature and humidity inside the clean room 2 is acquired (step S7). This information may be obtained by directly acquiring the measured values ​​from the temperature sensor 71 and the humidity sensor 72, or by reading the measured values ​​stored in the memory 62. Note that even when the FFU 53 is ON, the supply air dew point temperature is measured by the dew point temperature sensor 117, but this is not used for air volume control.

[0040] Next, the variable airflow Q is set based on the acquired temperature and humidity. AC2 (Step S8). In Step S8, variable air volume control (air conditioner INV control) of the outside air return processing air conditioner 114 may be performed so that the temperature in the clean room 2 is constant in accordance with the heat load in the clean room 2. Alternatively, a formula or map previously obtained through experiments or simulations may be used. Then, the variable air volume Q calculated in Step S8 is AC2 It is determined whether or not satisfies the condition of the following formula (3).

[0041] (Q AC2 +Q FFU ) / Vr>Nv···(3)

[0042] Here, depending on the number of FFU53 units, the number of workers Op, and the work content (movement), the calculated variable air volume Q AC2 In this case, the flow proceeds to step S10 and the calculated variable airflow Q AC2 After correcting the variable airflow Q in the increasing direction, step S9 is repeatedly executed. The correction amount can be set in advance so as to reliably satisfy the above formula (3) and stored in the memory 62. AC2 After correcting, if the above formula (3) is satisfied in step S9, the process proceeds to step S11. In step S11, it is determined whether the FFU 53 is ON. If the FFU 53 is ON, the process returns to step S7. On the other hand, if the FFU 53 is OFF, the process ends this routine.

[0043] As described above, according to this embodiment, when the FFU 53 is in operation, the air volume Q FFU By utilizing this, the amount of air supplied from the air supply device 11 can be reduced, thereby achieving energy savings.

[0044] Although the embodiments of the present disclosure have been described above, the present disclosure is not limited to the above embodiments and can be modified in various ways without departing from the spirit and scope of the present disclosure. In the above embodiments, the frame 51 includes a pair of frame sections 511, 512. However, the frame 51 may include a single frame section. In this case, one storage cabinet 54 is held by one frame section. Furthermore, in the above embodiments, the frame sections 511, 512 each include a single storage cabinet 54. However, each frame section 511, 512 may include two or more storage cabinets 54 arranged vertically. Furthermore, in the above embodiments, the frame sections 511, 512 each include an upper support column 514 and a lower support column 515. However, the frame 51 may include a beam connecting the upper support columns 514 to increase its strength.

[0045] In the above embodiment, the height w of the frame 51 is set to the same height as the safety cabinet 3, but to form the clean area 524, it may be set to be equal to or higher than the height of the upper end of the front opening 33. Furthermore, if the shutter 34 does not slide to the upper end of the front opening 33, the height w of the frame 51 may be set to be equal to or higher than the height of the lower end of the shutter 34 when it has slid to its upper limit position. However, considering the ease of operation for an operator when opening the second opening / closing door 542 of the storage cabinet 54 and removing the carry-in item Do, it is preferable to set the height w of the frame 51 to the same height as the safety cabinet 3 (for example, 2100 mm to 2200 mm) as in the above embodiment.

[0046] In the above embodiment, the second partition wall portion 522 is disposed to cover the rear side of the space 513. However, the second partition wall portion 522 may be disposed to further cover the rear sides of the spaces 517 and 518, i.e., to cover the entire rear side of the frame 51 (excluding the storage cabinet 54). The partition wall 52 may further include a fourth partition wall portion that covers the inner sides of the spaces 517 and 518 in the width direction, and the fourth partition wall portion may separate the space 513 from the spaces 517 and 518. This prevents clean air from the fan filter unit 53 from flowing into the spaces 517 and 518, and allows the clean air to be efficiently guided toward the clean area 524. However, since the air does not flow toward the rear sides of the spaces 517 and 518, and thus toward the rear side of the storage cabinet 54, the cleaning effect of the rear side of the storage cabinet 54 cannot be obtained. It is to be noted that a fifth partition wall portion that covers the upper sides of the spaces 517 and 518 may be further provided, and the partition wall 52 may be disposed so as to cover the entire surface of the frame 51.

[0047] In the above embodiment, the resin partition walls 521, 522, and 523 are fixed to the support columns 514 and 515 of the frame 51 fixed to the upper and lower surfaces of the storage cabinet 54. However, the present disclosure is not limited to this, and the frame 51 does not necessarily need to be used. Although not shown, for example, the partition walls 521, 522, and 523 of the partition wall 52 may be fixed to the storage cabinet 54 by bolting using bent steel plates. The partition walls 521, 522, and 523 of the partition wall 52 may be formed of separate resin panels, or may be formed of a single, bent resin panel. In this case, the partition wall 52 and the storage cabinet 54 constitute a storage unit as claimed. As in the above embodiment, the storage unit has a first storage section and a second storage section spaced apart in the width direction, and a fan filter unit 53 is disposed above a space 513 between the first and second storage sections for loading and unloading items. The first storage section and the second storage section each have a storage cabinet 54 with a second opening / closing door 542 facing the space 513. By placing partition devices 5 equipped with such storage units facing each other in front of the safety cabinet 3 to define a work space 524 and operating the fan filter unit 53, the clean areas 513 and 524 can be made clean enough to directly access the work space 32 of the safety cabinet 3, as in the above embodiment. As a result, the same effects as those of the above embodiment can be obtained. The thickness of the resin panel can be appropriately set to have a predetermined strength, and it may be reinforced appropriately using known reinforcing members. Furthermore, vertically elongated folded steel plates can also be used as the partitions 521, 522, and 523 instead of the fixing members. [Explanation of symbols]

[0048] 1...Air volume control system, 11...Air supply device, 111...Air supply duct, 112...Return air duct, 113...Outdoor air duct, 114...Outdoor air return air handling unit (AHU), 115...Constant air volume unit (CAV), 116...High-performance filter, 12...Exhaust device, 121...Exhaust duct, 122...Room pressure control damper (PCD), 123...Exhaust fan, 2...Clean room, 3...Safety cabinet, 31...HEPA filter, 32...Work space, 33...Front opening, 34...Shutter, 4...Incubator, 5...Bulkhead device, 51...F Frame, 511...first frame section, 512...second frame section, 513...space (clean area), 514...upper support column, 515...lower support column, 516...caster, 52...partition wall, 521...first partition wall section, 522...second partition wall section, 523...third partition wall section, 524...space (clean area), 53...fan filter unit, 54...storage cabinet, pass box, 541...first opening / closing door, 542...second opening / closing door, 6...control device, 61...processor, 62...memory, 71...temperature sensor, 72...humidity sensor, Do...carry-in item, Op...operator

Claims

1. An air volume control system for a clean room in which a safety cabinet is arranged, an air supply device that supplies conditioned clean air to the clean room through an air supply duct; a fan filter unit that is arranged in the clean room independently of the air supply device and supplies the clean air into the clean room; and a control device that controls the operation of the air supply device; The control device When the fan filter unit is not in operation, a fixed air volume Q set based on the volume Vr of the clean room is ＡＣ１ Operate the air supply device by When the fan filter unit is activated, the fixed air volume Q ＡＣ１ The air volume Q of the fan filter unit ＦＦＵ The air supply device is operated at an air volume obtained by subtracting the above-mentioned temperature and humidity from the ... ＡＣ２ The air supply device is operated by the air volume control system for a clean room.

2. 2. The air volume control system for a clean room according to claim 1, further comprising a sensor for measuring temperature and humidity in the clean room, The control device The variable airflow Q is determined based on the temperature and humidity in the clean room obtained from the sensor. ＡＣ２ is calculated, and the set ventilation rate of the clean room is set to Nv, and (Q ＡＣ２ +Q ＦＦＵ ) If the condition Vr>Nv is not satisfied, the calculated variable air volume Q ＡＣ２ A clean room air volume control system that corrects this.

3. 2. The air volume control system for a clean room according to claim 1, wherein the air supply device comprises a constant air volume device provided in the air supply duct, The control device When the fan filter unit is not in operation, the constant air volume device is set to the fixed air volume Q ＡＣ１ The opening is controlled according to the The air volume control system for a clean room controls the constant air volume device to be fully open when the fan filter unit is operating.

4. 4. The air volume control system for a clean room according to claim 1, wherein a partition wall device is installed in the clean room opposite the safety cabinet, and a space is defined by the safety cabinet and the partition wall device, The partition device is provided with the fan filter unit, and clean air is supplied to the space from the fan filter unit, in the air volume control system for a clean room.

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