Electrostatic discharge mitigation valve

Abstract

To provide an operating component used in an ultrapure fluid handling system with electrostatic discharge mitigation.SOLUTION: Included are diaphragm valves that provide fluid control and allow static charge to be dissipated when the diaphragm valve is grounded.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE Embodiments of the present disclosure relate to fluid handling systems, and more particularly to actuating components used in ultra-pure fluid handling systems with electrostatic discharge mitigation. [Background technology]

[0002] Fluid handling systems offering high purity standards have many uses in advanced technology applications. These applications include the processing and manufacturing of solar panels, flat panel displays, and in the semiconductor industry for applications such as photolithography, bulk chemical delivery, chemical mechanical polishing (CMP), wet etching, and cleaning. Certain chemicals used in these applications are particularly corrosive, preventing the use of some conventional fluid handling technologies due to the potential for corrosion of fluid handling components and leaching of chemicals into the environment.

[0003] To meet the corrosion resistance and purity requirements for such applications, fluid handling systems provide piping, fittings, valves, and other elements made from inert polymers. These inert polymers can include, but are not limited to, fluoropolymers such as tetrafluoroethylene polymer (PTFE), perfluoroalkoxyalkane polymer (PFA), ethylene and tetrafluoroethylene polymer (ETFE), ethylene, tetrafluoroethylene, and hexafluoropropylene polymer (EFEP), and fluorinated ethylene propylene polymer (FEP). In addition to providing a noncorrosive and inert structure, many fluoropolymers, such as PFA, are injectable, moldable, and / or extrudable.

[0004] Electrostatic discharge (ESD) is a significant technical issue in fluid handling systems in the semiconductor industry and other technology applications. Frictional contact between fluids and the surfaces of various operating components within a fluid system (e.g., piping or tubes, valves, fittings, filters, etc.) can result in the generation and accumulation of static charge. The extent of charge generation depends on various factors, including, but not limited to, the properties of the components and fluid, fluid velocity, fluid viscosity, the electrical conductivity of the fluid, the path to ground, turbulence and shear in the liquid, the presence of air in the fluid, and surface area. These characteristics, and methods for mitigating unwanted static charges caused by these characteristics, are discussed and reported in NFPA 77, "Recommended Practice on Static Electricity," pp. 77-1 through 77-67, 2014.

[0005] Additionally, as fluids flow through a system, charge may be carried downstream in a phenomenon called flowing charge, which can build up beyond the point where the charge originated. Sufficient charge buildup can cause ESD on tubing or pipe walls, component surfaces, or even on substrates or wafers during various process steps.

[0006] In some applications, semiconductor substrates or wafers are highly sensitive to electrostatic charges, and such ESD can damage or destroy the substrate or wafer. For example, circuitry on the substrate can be destroyed, and photoactive compounds can be activated before regular exposure due to uncontrolled ESD. Furthermore, accumulated electrostatic charges can be discharged from within the fluid handling system to the external environment, damaging components within the fluid handling system (e.g., piping or tubes, fittings, components, vessels, filters, etc.), which can result in leaks, fluid spills within the system, and reduced component performance. In these situations, such discharges can result in potential fires or explosions when flammable, toxic, and / or corrosive fluids are used in the compromised fluid handling system.

[0007] In some fluid handling systems, to reduce the buildup of static charge, certain metal or conductive components within the fluid handling system are grounded to mitigate the buildup of static charge within the system as it is continuously dissipated from the metal or conductive component to ground. Conventional use of multiple grounding straps can result in excessive mechanical clutter in the fluid handling system and can result in complex grounding system networks that require extensive maintenance, or complex systems that can result in undesirable contamination, corrosion, or failure of the system.

[0008] It would be desirable to improve ESD mitigation in ultra-pure fluid handling systems to improve component performance and reduce potentially damaging ESD events. Summary of the Invention

[0009] One or more embodiments of the present disclosure relate to an actuating component for a fluid circuit, the actuating component comprising: a housing having i) one or more fluid intake fittings, ii) one or more fluid output fittings, and iii) one or more fluid control components, the fluid control components including a conductive fluoropolymer for transferring static charge from the fluid control component to ground. An exemplary embodiment is a valve that controls the flow of fluid from the intake fitting to the output fitting of the actuating component.

[0010] In certain embodiments, the actuating component comprises a diaphragm valve having a flexible fluoropolymer body for controlling the flow of fluid from the intake fitting to the output fitting. In selected embodiments, the flexible fluoropolymer body comprises a conductive fluoropolymer which can be, for example, either a conductive composite fluoropolymer forming a flexible fluoropolymer body that is substantially conductive throughout or throughout the structure of the flexible body, or a conductive fluoropolymer segment around the periphery of a non-conductive flexible fluoropolymer body forming a flexible fluoropolymer body having a conductive composite fluoropolymer perimeter segment and a non-conductive fluoropolymer region within the perimeter segment.

[0011] Fluoropolymers suitable for the disclosed diaphragm valves include, but are not limited to, perfluoroalkoxyalkane polymers (PFA), ethylene and tetrafluoroethylene polymers (ETFE), ethylene, tetrafluoroethylene and hexafluoropropylene polymers (EFEP), fluorinated ethylene propylene polymers (FEP), tetrafluoroethylene polymers (PTFE), or combinations thereof. In certain embodiments, polymers suitable for diaphragm valves include tetrafluoroethylene polymers filled with conductive materials. In certain embodiments, these fluoropolymers are loaded with carbon black in the range of about 0.1-10 wt%, preferably about 1-7 wt%, or more preferably about 3-5 wt%.

[0012] In some embodiments, the disclosed diaphragm valves include perfluorinated ionomer particles blended with a non-conductive fluoropolymer to form a composite comprising a non-conductive fluoropolymer matrix and domains of the perfluorinated ionomer distributed within the non-conductive fluoropolymer matrix. The domains of the perfluorinated ionomer within the non-conductive fluoropolymer matrix impart static dissipative properties to the resulting composite. An example of a suitable perfluorinated ionomer is a perfluorosulfonic acid (PFSA) polymer having a poly(tetrafluoroethylene) backbone with pendant perfluoroether side chains terminated by sulfonic acid groups, commercially available as NAFION™ ionomer (NAFION™ is a trademark of The Chemours Company). Further examples of commercially available perfluorinated ionomers include, but are not limited to, FLEMION™ (AGC Corporation (Asahi Glass Company)), ACIPLEX™ (Asahi Kasei), or FUMION™ F (FuMA-Tech) ionomer. Perfluorinated ionomers for use in static dissipative systems are reported in U.S. Patent Application Publication No. 2020 / 0103056, which is incorporated herein by reference in its entirety for all purposes.

[0013] Another embodiment of the present disclosure relates to a diaphragm valve for a fluid circuit, comprising two or more housing components, one or more intake fittings, one or more output fittings, and a diaphragm, the diaphragm comprising a flexible, conductive fluoropolymer body for transferring electrostatic charge from the diaphragm to ground. The flexible fluoropolymer body comprises a conductive fluoropolymer, which can be, for example, either a conductive composite fluoropolymer forming a flexible fluoropolymer body that is substantially conductive throughout or throughout the structure of the flexible body, or a conductive fluoropolymer segment around the periphery of a non-conductive flexible fluoropolymer body forming a flexible fluoropolymer body having a conductive composite fluoropolymer peripheral segment and a non-conductive fluoropolymer region within the peripheral segment throughout or throughout the structure of the peripheral segment.

[0014] Suitable fluoropolymers for the disclosed flexible fluoropolymer body of the diaphragm valve include, but are not limited to, perfluoroalkoxyalkane polymers (PFA), ethylene and tetrafluoroethylene polymers (ETFE), ethylene, tetrafluoroethylene and hexafluoropropylene polymers (EFEP), fluorinated ethylene propylene polymers (FEP), tetrafluoroethylene polymers (PTFE), or combinations thereof. In certain embodiments, suitable polymers for the flexible fluoropolymer body of the diaphragm valve include tetrafluoroethylene polymers filled with conductive materials. In some of these embodiments, the flexible conductor of the diaphragm valve mitigates electrostatic discharge at the flange segments of the diaphragm valve.

[0015] Certain embodiments of the present disclosure relate to a diaphragm valve for a fluid circuit comprising two or more housing components each having a flange segment, one or more intake fittings, one or more output fittings, a diaphragm, and a gasket, the gasket including a conductive fluoropolymer for transferring static charge from the diaphragm valve to ground. In selected embodiments, the diaphragm includes a flexible fluoropolymer body in conductive contact with the gasket.

[0016] Fluoropolymers suitable for the disclosed gaskets include, but are not limited to, perfluoroalkoxyalkane polymers (PFA), ethylene and tetrafluoroethylene polymers (ETFE), ethylene, tetrafluoroethylene and hexafluoropropylene polymers (EFEP), fluorinated ethylene propylene polymers (FEP), tetrafluoroethylene polymers (PTFE), or combinations thereof. In certain embodiments, the gasket comprises a tetrafluoroethylene polymer filled with an electrically conductive material. In some of these embodiments, the gasket mitigates electrostatic discharge at flange segments of diaphragm valves.

[0017] In some embodiments, the disclosed gaskets include perfluorinated ionomer particles blended with a non-conductive fluoropolymer to form a composite comprising a non-conductive fluoropolymer matrix and domains of perfluorinated ionomer distributed within the non-conductive fluoropolymer matrix. The domains of perfluorinated ionomer within the non-conductive fluoropolymer matrix impart static dissipative properties to the resulting composite. An example of a suitable perfluorinated ionomer is the commercially available NAFION™ ionomer, a perfluorosulfonic acid (PFSA) polymer having a poly(tetrafluoroethylene) backbone with pendant perfluoroether side chains terminated by sulfonic acid groups (NAFION™ is a trademark of The Chemours Company). Further examples of commercially available perfluorinated ionomers include, but are not limited to, FLEMION™ (AGC Corporation (Asahi Glass Company)), ACIPLEX™ (Asahi Kasei), or FUMION™ F (FuMA-Tech) ionomer. Perfluorinated ionomers for use in static dissipative systems are reported in U.S. Patent Application Publication No. 2020 / 0103056.

[0018] One or more embodiments of the present disclosure also relate to a fluid circuit with integrated electrostatic discharge mitigation comprising a grounded actuating component, a diaphragm valve, or a gasket of any of the above-described embodiments.

[0019] Additionally, one or more embodiments of the present disclosure relate to a method of making a fluid circuit with an integrated electrostatic discharge mitigation system, comprising installing an actuating component, diaphragm valve, or gasket of any of the above-described embodiments in the fluid circuit, and grounding the actuating component, or diaphragm valve or gasket.

[0020] The above summary is not intended to describe each illustrated embodiment or every implementation of the present disclosure.

[0021] The drawings included in this disclosure illustrate embodiments of the disclosure and, together with the description, serve to explain the principles of the disclosure. The drawings are merely illustrative of particular embodiments and are not intended to limit the disclosure. [Brief explanation of the drawings]

[0022] [Figure 1] 1 illustrates an isometric view of a diaphragm valve according to one or more embodiments of the present disclosure. [Figure 2] 1 illustrates a cross-sectional view of a diaphragm valve according to one or more embodiments of the present disclosure. [Figure 3] 1 illustrates an exploded view of a diaphragm valve according to one or more embodiments of the present disclosure. [Figure 4] 1 illustrates an isometric view of a diaphragm valve actuator according to one or more embodiments of the present disclosure. [Figure 5] 1 shows a digital image of one embodiment of a flexible fluoropolymer body of a diaphragm valve according to one or more embodiments of the present disclosure. [Figure 6] 10 shows a digital image of another embodiment of a flexible fluoropolymer body of a diaphragm valve according to one or more embodiments of the present disclosure. [Figure 7] 10 shows yet another digital image of an embodiment of a flexible fluoropolymer body of a diaphragm valve according to one or more embodiments of the present disclosure. [Figure 8] 1 shows a schematic diagram of a fluid control circuit with actuation components according to one or more embodiments of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0023] While embodiments of the present disclosure are susceptible to various modifications and alternative forms, specific details have been shown, for example, in the drawings and will be described in detail. It is understood that there is no intention to limit the disclosure to the particular embodiments described, but rather the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the present disclosure.

[0024] This disclosure reports embodiments of actuating components or diaphragm valves for use in fluid handling systems with ESD mitigation, having a fluid flow path from a fluid supply to one or more downstream process stages. Conventional and several ESD mitigation fluid circuits are reported, for example, in International Publication No. 2017 / 210293, which is incorporated herein by reference except for any express definitions or claims contained therein. Other ESD mitigation fluid circuits are reported, for example, in Entegris' brochure, Fluoroline Electrostatic (ESD) Tubing, 2015-2017.

[0025] FIG. 1 is an isometric view illustrating one embodiment of a diaphragm valve 10. The diaphragm valve 10 includes an inlet fitting 12 and an outlet fitting 14. The inlet valve 12 and the outlet valve 14 are connected to a first housing component 16 having a first flange segment 18. The diaphragm valve further includes a second housing component 20 having a second flange 22. The first flange 18 and the second flange 22 are configured to provide a leak-proof connection when the diaphragm valve is used in a fluid circuit to control fluid flow between the inlet fitting 12 and the outlet fitting 14. FIG. 1 also shows a ground tab 24 that is in conductive contact with the diaphragm, which includes a flexible fluoropolymer body (not shown) in the interior portion of the first housing component 16 and the second housing component 20. The ground tab 24 allows for the transfer of static charge when connected to ground. FIG. 1 also shows the exterior portion of an actuator 26, which provides both internal and external structures for adjusting or controlling the position of the flexible fluoropolymer body (not shown) in the interior portion of the diaphragm valve. The position of the flexible fluoropolymer body controls the flow of fluid from the inlet fitting to the outlet fitting.

[0026] FIG. 2 is a cutaway view showing the interior portion of the diaphragm valve 10. FIG. 2 shows all of the exterior portions of the diaphragm valve, including the inlet fitting 10, the outlet fitting 12, the first housing component 16, the first flange segment 18, the second housing component 20, the second flange segment 22, and the exterior portion of the actuator 26. FIG. 2 also shows a cutaway portion of the flexible fluoropolymer body. The flexible fluoropolymer body 28 is configured to mount the diaphragm valve 10 between the first flange segment 18 and the second flange segment 22. When the diaphragm valve 10 is used in a fluid circuit, the flexible fluoropolymer body provides an exterior structure that allows a conductive path between the internal and external structures of the diaphragm valve 10. The exterior structure of the flexible fluoropolymer body may be connected to ground to provide electrostatic mitigation of electrical charges that may be generated by fluid flow within the interior region of the fluid circuit.

[0027] Figure 3 is an exploded view showing the principal structure of one embodiment of diaphragm valve 30. The structure includes an inlet fitting 32, an outlet fitting 34, and a first housing component 36. Figure 3 further shows flexible fluoropolymer bodies 38a and 38b configured to be mounted between first housing component 36 and a second housing component 40. Second housing component 40 also includes an outer portion of actuator 42.

[0028] 4 is an isometric view of a housing component 40 including a flange segment 42, a flexible fluoropolymer body 44, and an exterior portion of an actuator 46. The combination of the flexible fluoropolymer body and the exterior portion of the actuator 46 allows for control of fluid within the assembled diaphragm valve by adjusting or controlling the position of the flexible fluoropolymer body.

[0029] FIG. 5 illustrates one embodiment of a diaphragm or flexible fluoropolymer body 50. In this embodiment, the flexible fluoropolymer body is molded to a predetermined shape using a selected conductive fluoropolymer, providing the molded flexible fluoropolymer body with an essentially uniform polymer structure. The conductive fluoropolymer includes tabs 52 that extend to the exterior portion of the assembled diaphragm valve. When tabs 52 are grounded, the conductive fluoropolymer provides a conductive path for dissipating static charges that may be generated by fluid flow in the interior portion of the diaphragm valve and through the fluid circuit.

[0030] FIG. 6 illustrates one embodiment of a diaphragm or flexible fluoropolymer body 60. In this embodiment, the flexible fluoropolymer body includes a conductive fluoropolymer 62 at the periphery of the flexible fluoropolymer body 60 and a non-conductive fluoropolymer 64 within the interior region of the flexible fluoropolymer body. The flexible fluoropolymer body 60 is molded to a predetermined shape using a selected conductive fluoropolymer and a selected non-conductive fluoropolymer to provide a molded flexible fluoropolymer body 60 having a conductive periphery and a non-conductive interior region. The conductive fluoropolymer periphery includes a tab 66 that extends to the exterior portion of the assembled diaphragm valve. When the tab 66 is grounded, the conductive fluoropolymer periphery provides a conductive path to relieve static charges that may be generated by fluid flow in the interior portion of the diaphragm valve and through the fluid circuit.

[0031] FIG. 7 illustrates one embodiment of a diaphragm or flexible fluoropolymer body 70 and a conductive fluoropolymer gasket 72. In this embodiment, the flexible fluoropolymer body comprises a non-conductive fluoropolymer body 70. Similarly, the conductive fluoropolymer gasket 72 is molded to a predetermined shape using a selected conductive fluoropolymer. The shape of the gasket 72 is configured to correspond to the shape of the periphery of the flexible fluoropolymer body 70 and the flange segments of a diaphragm valve having first and second housing components, as shown in FIG. 3, for example. The conductive fluoropolymer gasket includes tabs 74 that extend to the exterior portion of the assembled diaphragm valve. When the tabs 74 are grounded, the conductive fluoropolymer provides a conductive path to relieve static charges that may be generated by fluid flow in the interior portion of the diaphragm valve and through the fluid circuit.

[0032] Actuating components and diaphragm valves in this disclosure refer to any component or device that has a fluid input and a fluid output and connects with piping to direct or provide fluid flow. Related and additional components of fluid control systems are shown, for example, in U.S. Pat. Nos. 5,672,832, 5,678,435, 5,869,766, 6,412,832, 6,601,879, 6,595,240, 6,612,175, 6,652,008, 6,758,104, 6,789,781, 7,063,304, 7,308,932, 7,383,967, 8,561,855, 8,689,817, and 8,726,935, each of which is incorporated herein by reference except for any express definitions or claims contained in the recited document.

[0033] In the present disclosure, fluid control components, such as fluoropolymer-containing diaphragms, may be constructed from conductive and / or non-conductive fluoropolymers, including, for example, perfluoroalkoxyalkane polymers (PFA), ethylene and tetrafluoroethylene polymers (ETFE), ethylene, tetrafluoroethylene, and hexafluoropropylene polymers (EFEP), fluorinated ethylene propylene polymers (FEP), tetrafluoroethylene polymer (PTFE), or other suitable polymeric materials. For example, in some embodiments, conductive fluoropolymers may be filled with conductive materials (e.g., filled fluoropolymers), including, but not limited to, fluoropolymers filled with carbon fiber, nickel-coated graphite, carbon fiber, carbon powder, carbon nanotubes, metal particles, and steel fibers.

[0034] Alternatively, for the present disclosure, a fluid control component, such as a diaphragm, may be constructed from perfluorinated ionomer particles blended with a non-conductive fluoropolymer to form a composite comprising a non-conductive fluoropolymer matrix and domains of perfluorinated ionomer distributed within the non-conductive fluoropolymer matrix as described above in this disclosure.

[0035] In various embodiments, the conductive material is about 1×10 10 Non-conductive materials have resistance levels below ohm-m, but are approximately 1×10 10 In various embodiments, the conductive material has a resistance level of greater than about 1×10 ohm-m. 9 Non-conductive materials have resistance levels below ohm-m, but are approximately 1×10 9 Having a resistance level exceeding ohm-m. When the disclosed fluid handling system is configured for use in ultra-pure fluid handling applications, the fluid control components can be constructed from polymeric materials to meet purity and corrosion resistance standards.

[0036] In addition to the flexible fluoropolymer body described above, various additional elements of the actuating components and diaphragm valves of the present disclosure may be constructed from materials including metals, polymeric materials, or filled polymeric materials. Commonly loaded polymeric materials of selected structural elements of actuating components and diaphragm valves can include polymers loaded with steel wire, aluminum flake, nickel-coated graphite, carbon fiber, carbon powder, carbon nanotubes, or other conductive materials. In some examples, these elements may have a major portion constructed from a non-conductive or low-conductive material, such as constructed from various hydrocarbon and non-hydrocarbon polymers, including, but not limited to, polyester, polycarbonate, polyamide, polyimide, polyurethane, polyolefin, polystyrene, polyester, polycarbonate, polyketone, polyurethane, polyvinyl resin, polyacrylate, polymethylacrylate, and fluoropolymers. Exemplary fluoropolymers include, but are not limited to, perfluoroalkoxyalkane polymers (PFA), ethylene tetrafluoroethylene polymers (ETFE), ethylene, tetrafluoroethylene and hexafluoropropylene polymers (EFEP), fluorinated ethylene propylene polymers (FEP), and tetrafluoroethylene polymers (PTFE), or other suitable polymeric materials, for example, having a secondary coextruded conductive portion.

[0037] The actuating components and diaphragm valves of the present disclosure are suitable for use in fluid circuits having static mitigation systems. FIG. 8 is a schematic diagram of an exemplary fluid handling system 150. Fluid handling system 150 provides a flow path for fluid to flow from a fluid supply 152 to one or more process stages 156 positioned downstream of the fluid supply source. Fluid handling system 150 includes a fluid circuit 160 that includes a portion of the flow path of fluid handling circuit 150. Fluid circuit 160 includes a piping segment 164 and multiple actuating components 168 interconnected via piping segment 164. In FIG. 8, actuating components 168 include an elbow fitting 170, a T-fitting 172, a valve 174, a filter 176, a flow sensor 178, and a straight fitting 179. However, in various embodiments, fluid circuit 160 can include additional or fewer actuating components in number and type. For example, fluid circuit 160 may alternatively or additionally include a pump, a mixer, a dispense head, a sprayer nozzle, a pressure regulator, a flow controller, or other types of actuating components. When assembled, actuating components 168 are connected to one another by multiple piping segments 164 that connect to components 168 at respective piping connector fittings 186. Multiple interconnected piping segments 164 and actuating components 168 provide a fluid flow path through fluid circuit 160 from fluid supply 152 toward process stage 156.

[0038] The descriptions of various embodiments of the present disclosure are presented for illustrative purposes, but are not intended to be exhaustive or limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terms used herein are selected to explain the principles of the embodiments, practical applications or technical improvements to technology found in the market, or to enable those skilled in the art to understand the embodiments disclosed herein.

Claims

1. 1. An actuating component for a fluid circuit, comprising: a housing having i) one or more fluid intake fittings; ii) one or more fluid output fittings; and iii) one or more fluid control components, said fluid control components comprising a conductive fluoropolymer for transferring static charge from said fluid control component to ground.

2. The actuation component of claim 1 , wherein the actuation component comprises a valve that controls the flow of fluid from the intake fitting to the output fitting.

3. The actuating component of claim 1 or 2, wherein the actuating component comprises a diaphragm valve.

4. The actuating component of claim 3 , wherein the diaphragm valve comprises a flexible fluoropolymer body for controlling fluid flow from the intake fitting to the output fitting.

5. The actuating component of claim 4 , wherein the flexible fluoropolymer body comprises a conductive fluoropolymer.

6. The actuating component of claim 4 , wherein the flexible fluoropolymer body comprises a conductive composite fluoropolymer forming the flexible fluoropolymer body that is substantially conductive throughout the body.

7. The actuating component of claim 4 , wherein the flexible fluoropolymer body comprises a conductive fluoropolymer segment around the periphery of a non-conductive flexible fluoropolymer body.

8. The actuating component of claim 7 , wherein the conductive fluoropolymer segment comprises a composite conductive fluoropolymer.

9. 9. The actuating component of claim 7 or 8, wherein the conductive fluoropolymer segment is in conductive contact with the non-conductive flexible fluoropolymer body.

10. 10. The working component of claim 1, wherein the conductive fluoropolymer comprises perfluoroalkoxyalkane polymer (PFA), ethylene and tetrafluoroethylene polymer (ETFE), ethylene, tetrafluoroethylene and hexafluoropropylene polymer (EFEP), fluorinated ethylene propylene polymer (FEP), tetrafluoroethylene polymer (PTFE), or a combination thereof.

11. 10. The working component of claim 1, wherein the conductive fluoropolymer comprises a tetrafluoroethylene polymer filled with a conductive material.

12. 1. A diaphragm valve for a fluid circuit, comprising: two or more housing components; one or more intake fittings; one or more output fittings; and a diaphragm, said diaphragm comprising a flexible, conductive fluoropolymer body for transferring electrostatic charge from said diaphragm to ground.

13. The diaphragm valve of claim 12 , wherein the flexible conductive fluoropolymer body comprises a composite polymer.

14. 13. The diaphragm valve of claim 12, wherein the flexible fluoropolymer body comprises a conductive fluoropolymer segment around a periphery of a non-conductive flexible fluoropolymer body.

15. 15. The diaphragm valve of claim 14, wherein the conductive fluoropolymer segment is in conductive contact with the non-conductive flexible fluoropolymer body.

16. The diaphragm valve of claim 12 , wherein the conductive fluoropolymer segment is a composite fluoropolymer.

17. 17. The diaphragm valve of any one of claims 12 to 16, wherein the conductive fluoropolymer segment comprises perfluoroalkoxyalkane polymer (PFA), ethylene and tetrafluoroethylene polymer (ETFE), ethylene, tetrafluoroethylene and hexafluoropropylene polymer (EFEP), fluorinated ethylene propylene polymer (FEP), tetrafluoroethylene polymer (PTFE), or a combination thereof.

18. 17. The diaphragm valve of any one of claims 12 to 16, wherein the conductive fluoropolymer segment comprises a tetrafluoroethylene polymer filled with a conductive material.

19. 12. The actuating component of claim 1, wherein the conductive fluoropolymer segment mitigates electrostatic discharge at a flange segment of the actuating component.

20. 20. The diaphragm valve of any one of claims 12 to 19, wherein the conductive fluoropolymer segment mitigates electrostatic discharge at a flange segment of the diaphragm valve.

21. 1. A diaphragm valve for a fluid circuit, comprising: two or more housing components; one or more intake fittings; one or more output fittings; a diaphragm; and a gasket, the gasket comprising a conductive fluoropolymer for transferring electrostatic charge from the diaphragm valve to ground.

22. 22. The diaphragm valve of claim 21, wherein the diaphragm comprises a flexible fluoropolymer body.

23. 23. The diaphragm valve of claim 22, wherein the gasket is in conductive contact with the flexible fluoropolymer body.

24. 22. The diaphragm valve of claim 21, wherein the gasket comprises a composite fluoropolymer.

25. 25. The diaphragm valve of any one of claims 21 to 24, wherein the gasket comprises perfluoroalkoxyalkane polymer (PFA), ethylene and tetrafluoroethylene polymer (ETFE), ethylene, tetrafluoroethylene and hexafluoropropylene polymer (EFEP), fluorinated ethylene propylene polymer (FEP), tetrafluoroethylene polymer (PTFE), or a combination thereof.

26. 25. The diaphragm valve of any one of claims 21 to 24, wherein the gasket comprises a tetrafluoroethylene polymer filled with a conductive material.

27. 27. The diaphragm valve of any one of claims 21 to 26, wherein the gasket mitigates electrostatic discharge at a flange segment of the diaphragm valve.

28. A fluid circuit with integrated electrostatic discharge mitigation comprising a grounded actuating component or a diaphragm valve or any one of claims 1 to 27.

29. 28. A method of making a fluid circuit having an integrated electrostatic discharge mitigation system, comprising installing an actuating component or diaphragm valve according to any one of claims 1 to 27 in the fluid circuit and grounding the actuating component or diaphragm valve.

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