Environmental monitoring device, environmental monitoring system, and environmental monitoring method

Abstract

This invention provides environmental monitoring devices, environmental monitoring systems, and environmental monitoring methods that offer improvements over conventional technologies. [Solution] The environmental monitoring device comprises a radio frequency identification tag, a radio frequency reading module, and a determination circuit. The radio frequency identification tag is configured to transmit air quality information within the target facility. The radio frequency reading module reads the air quality information. The determination circuit is configured to determine whether the air quality information meets the air quality standards. If the air quality information does not meet the air quality standards, it generates warning information.

Description

Technical Field

[0001] The present invention relates to monitoring equipment and monitoring methods, and particularly to environmental monitoring devices, environmental monitoring systems, and environmental monitoring methods.

Background Art

[0002] If the relative humidity in the wafer transfer box is too high, phenomena such as oxidation, corrosion, short circuit, or leakage current may occur in the semiconductor wafers in the wafer transfer box, thereby reducing the performance and lifespan of the semiconductor wafers.

Summary of the Invention

Problems to be Solved by the Invention

[0003] In the prior art, as a method for controlling the relative humidity in the wafer transfer box, a method is used in which an air conditioning system periodically injects a gas (e.g., clean dry air or nitrogen) for reducing the relative humidity into the inside of the wafer transfer box. However, in this method, even when the relative humidity in the wafer transfer box is normal, there is a possibility that the air conditioning system still injects a gas for reducing the relative humidity into the inside of the wafer transfer box, and as a result, the gas for reducing the relative humidity is excessively wasted. In addition, there is a possibility that the relative humidity is too high before injecting the gas, and defects may be formed in the semiconductor wafers.

[0004] The technical problem to be solved by the present invention is to improve over the prior art and provide an environmental monitoring device, an environmental monitoring system, and an environmental monitoring method.

Means for Solving the Problems

[0005] To solve the technical problems described above, the present invention employs a technical means to provide an environmental monitoring device. The environmental monitoring device comprises a radio frequency identification tag, a radio frequency reading module, and a determination circuit. The radio frequency identification tag is configured to transmit air quality information within a target facility. The radio frequency reading module reads the air quality information. The determination circuit is configured to determine whether the air quality information meets the air quality standards. If the air quality information does not meet the air quality standards, it generates warning information.

[0006] To solve the aforementioned technical problems, another technical means employed by the present invention is to provide an environmental monitoring system. The environmental monitoring system comprises a target facility, a radio frequency identification tag, a radio frequency reading module, and a determination circuit. The radio frequency identification tag is configured to transmit air quality information within the target facility. The radio frequency reading module reads the air quality information. The determination circuit is configured to determine whether the air quality information meets the air quality standards. If the air quality information does not meet the air quality standards, it generates warning information.

[0007] To solve the aforementioned technical problems, another technical means employed by the present invention is to provide an environmental monitoring method. The environmental monitoring method includes transmitting air quality information within a target facility using a radio frequency identification tag, reading the air quality information using a radio frequency reading module, determining whether the air quality information meets the air quality standards using a determination circuit, and generating warning information if the air quality information does not meet the air quality standards.

[0008] One of the advantageous effects of the present invention is that the environmental monitoring device, environmental monitoring system, and environmental monitoring method according to the present invention allow for real-time monitoring of the relative humidity inside a target facility via reminders provided by warning information, enabling accurate identification of the timing when the relative humidity becomes too high. This makes it possible to inject gas to lower the relative humidity into the target facility at the precise timing, avoiding unnecessary waste of gas and reducing the possibility of defects occurring due to excessively high relative humidity.

[0009] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the invention, however, the drawings provided are for reference and illustrative purposes only and are not intended to limit the invention. [Brief explanation of the drawing]

[0010] [Figure 1] This is a schematic diagram of an environmental monitoring system according to the first embodiment of the present invention. [Figure 2] Figure 1 is a flowchart of the environmental monitoring method for the environmental monitoring system shown. [Figure 3] This is a schematic diagram of an environmental monitoring system according to a second embodiment of the present invention. [Figure 4] Figure 3 is a flowchart of the environmental monitoring method for the environmental monitoring system shown. [Figure 5] This is a schematic diagram of an environmental monitoring system according to a third embodiment of the present invention. [Figure 6A] Figure 5 is a flowchart of the environmental monitoring method for the environmental monitoring system shown. [Figure 6B] Figure 5 is a flowchart of the environmental monitoring method for the environmental monitoring system shown. [Modes for carrying out the invention]

[0011] The embodiments of the "environmental monitoring device, environmental monitoring system, and environmental monitoring method" disclosed herein will be described below with reference to specific examples. Those skilled in the art will be able to understand the advantages and effects of the present invention from the contents disclosed herein. The present invention can be implemented or applied through other different specific embodiments, and the various detailed descriptions herein can be modified and changed in various ways without departing from the spirit of the invention, based on different viewpoints and applications. It should also be noted in advance that the drawings of the present invention are for illustrative purposes only and are not based on actual dimensions. The technical content relating to the present invention will be described in more detail using the following embodiments, but the contents disclosed are not intended to limit the scope of protection of the present invention.

[0012] In this specification, terms such as “first,” “second,” and “third” may be used to describe various elements, but it should be understood that these elements or signals should not be limited by these terms. These terms are primarily used to distinguish one element from another, or one signal from another. Furthermore, the term “or” in this specification should be understood to include any one or more of the items listed in relation to it, depending on the actual situation.

[0013] Figure 1 is a schematic diagram of an environmental monitoring system according to a first embodiment of the present invention. As shown in Figure 1, the environmental monitoring system comprises an environmental monitoring device 100, a target equipment 200, and a backend monitoring center 300. In this embodiment, the target equipment 200 is a wafer transport box, but the present invention is not limited thereto. In other embodiments, the target equipment 200 may be, for example, a server rack or a battery box.

[0014] The wafer transport box comprises an air intake port 2001, an exhaust port 2002, and a plurality of wafer tanks 2003 located at different heights. The air intake port 2001 is used to inject clean dry air or nitrogen gas, and each wafer tank 2003 is positioned to hold wafers.

[0015] The environmental monitoring device 100 comprises a radio frequency identification tag 10, a radio frequency reading module 20, and a determination circuit 30. The radio frequency identification tag 10 is, for example, a passive radio frequency identification tag. The determination circuit 30 is, for example, one or any combination of an embedded controller, an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA), a microcontroller unit (MCU), or a system on a chip (SOC).

[0016] The radio frequency identification tag 10 is placed at the bottom of the wafer tank 2003, which has the lowest height. The radio frequency reading module 20 and the determination circuit 30 are both located outside the target equipment 200. The radio frequency reading module 20 includes a radio frequency antenna 201 and a radio frequency reading circuit 202, with the radio frequency antenna 201 being electrically connected to the radio frequency reading circuit 202 via a radio frequency cable.

[0017] When the radio frequency antenna 201 receives a radio frequency signal from an external source, it transmits the radio frequency signal to the radio frequency reading circuit 202. The radio frequency reading circuit 202 then reads the data in the radio frequency signal. Furthermore, the radio frequency reading circuit 202 can also generate a radio frequency signal with embedded data and transmit it via the radio frequency antenna 201.

[0018] The radio frequency reading circuit 202 is electrically connected to the judgment circuit 30 via an Ethernet cable. The judgment circuit 30 establishes a network connection with the backend monitoring center 300.

[0019] The radio frequency identification tag 10 is configured to detect the air quality information inside the wafer carrier box. The determination circuit 30 determines whether the air quality information meets the air quality standard.

[0020] The air quality information includes the oxygen concentration. The radio frequency identification tag 10 includes a gas concentration detection circuit 101, a control circuit 102, a radio frequency signal processing circuit 103, a light emitting element 104, and a radio frequency antenna 105. The control circuit 102 is electrically connected to the gas concentration detection circuit 101, the radio frequency signal processing circuit 103, and the light emitting element 104. The radio frequency signal processing circuit 103 is electrically connected to the radio frequency antenna 105. Here, the control circuit 102 is, for example, any one or an arbitrary combination of an embedded controller, an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), a microcontroller unit (MCU), and a system on a chip (SOC).

[0021] In other embodiments, an active radio frequency identification tag can also be used as the radio frequency identification tag 10. The active radio frequency identification tag has a built-in battery.

[0022] The gas concentration detection circuit 101 is an oxygen concentration detector. The gas concentration detection circuit 101 is configured to detect the inside of the wafer carrier box and output the oxygen concentration in the wafer carrier box to the control circuit 102. The control circuit 102 is configured to transmit the oxygen concentration to the radio frequency signal processing circuit 103.

[0023] The radio frequency signal processing circuit 103 is configured to generate a radio frequency signal embedded with an oxygen concentration and transmit the radio frequency signal via the radio frequency antenna 105. The radio frequency antenna 201 of the radio frequency reading module 20 is configured to receive the radio frequency signal transmitted from the radio frequency identification tag 10 and transmit the radio frequency signal to the radio frequency reading circuit 202.

[0024] The radio frequency reading circuit 202 is configured to read the oxygen concentration in the radio frequency signal and transmit the oxygen concentration to the determination circuit 30.

[0025] The determination circuit 30 is configured to calculate the nitrogen concentration inside the wafer transfer box based on the oxygen concentration and determine whether the nitrogen concentration inside the wafer transfer box is less than a nitrogen concentration threshold value (for example, 94%).

[0026] When the determination circuit 30 determines that the nitrogen concentration inside the wafer transfer box is less than the nitrogen concentration threshold value, the determination circuit 30 generates an alarm signal and transmits the alarm signal to the back-end monitoring center 300, and drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light. Also, the alarm signal and the light of the light-emitting element 104 become different types of warning information respectively.

[0027] In another embodiment, the light-emitting element 104 of the radio frequency identification tag 10 may be replaced with a buzzer. When the determination circuit 30 determines that the nitrogen concentration is less than the nitrogen concentration threshold value, the determination circuit 30 drives the buzzer of the radio frequency identification tag 10 to make a sound, and the sound of the buzzer is a kind of warning information.

[0028] In this way, whether it is the administrator of the back-end monitoring center 300 or the administrator in the factory, they can grasp that the nitrogen concentration in the wafer transfer box on the current production line is too low just by looking at the warning information. Then, the administrator can check whether there is a gas leak in the wafer transfer box.

[0029] Figure 2 is a flowchart of the environmental monitoring method of the environmental monitoring system shown in Figure 1. Refer to Figures 1 and 2 together. In step S201, the gas concentration detection circuit 101 outputs the oxygen concentration in the wafer transport box to the control circuit 102. Here, the gas concentration detection circuit 101 is an oxygen concentration detector.

[0030] In step S202, the control circuit 102 reads the oxygen concentration and transmits the oxygen concentration to the radio frequency signal processing circuit 103.

[0031] In step S203, the radio frequency signal processing circuit 103 transmits a radio frequency signal with an embedded oxygen concentration via the radio frequency antenna 105.

[0032] In step S204, the radio frequency reading module 20 reads the oxygen concentration in the radio frequency signal and transmits the oxygen concentration to the determination circuit 30.

[0033] In step S205, the determination circuit 30 calculates the nitrogen concentration in the wafer transport box based on the oxygen concentration and determines whether the nitrogen concentration is below the nitrogen concentration threshold.

[0034] If the determination circuit 30 determines that the nitrogen concentration is below the nitrogen concentration threshold, the process proceeds to step S206.

[0035] If the determination circuit 30 determines that the nitrogen concentration is not below the nitrogen concentration threshold, the process returns to step S201.

[0036] In step S206, the determination circuit 30 transmits an alarm signal to the backend monitoring center 300 and a start command to the radio frequency reading module 20. Here, the alarm signal functions as warning information.

[0037] In step S207, the radio frequency reading module 20 reads the start command and transmits the radio frequency signal in which the start command is embedded.

[0038] In step S208, the radio frequency antenna 105 of the radio frequency identification tag 10 receives a radio frequency signal from the radio frequency reading module 20 and transmits the radio frequency signal to the radio frequency signal processing circuit 103.

[0039] In step S209, the radio frequency signal processing circuit 103 extracts the activation command from the radio frequency signal and transmits the activation command to the control circuit 102.

[0040] In step S210, the control circuit 102 drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light based on the activation command. Here, the light from the light-emitting element 104 functions as another warning message.

[0041] Specifically, the gas concentration detection circuit 101 is used to detect the oxygen concentration inside the wafer transport box, and the determination circuit 30 calculates the nitrogen concentration inside the wafer transport box based on the oxygen concentration. If the determination circuit 30 determines that the nitrogen concentration inside the wafer transport box is less than 94%, it indicates that there is a possibility of a gas leak.

[0042] Figure 3 is a schematic diagram of an environmental monitoring system according to a second embodiment of the present invention. As shown in Figure 3, the difference between Figure 3 and Figure 1 is that the gas concentration detection circuit 101 of the radio frequency identification tag 10 is replaced with a relative humidity detection circuit 106, and the relative humidity detection circuit 106 is electrically connected to the control circuit 102.

[0043] The radio frequency identification tag 10 is configured to generate relative humidity within the wafer transport box. Furthermore, the radio frequency signal processing circuit 103 of the radio frequency identification tag 10 is configured to generate a radio frequency signal in which the relative humidity is embedded and to transmit the radio frequency signal via the radio frequency antenna 105.

[0044] The radio frequency reading module 20 is configured to read the relative humidity in the radio frequency signal and transmit the relative humidity to the determination circuit 30.

[0045] The determination circuit 30 is configured to determine whether the relative humidity exceeds a relative humidity threshold (for example, 6%). If the determination circuit 30 determines that the relative humidity has exceeded the relative humidity threshold, it transmits an alarm signal to the backend monitoring center 300 and drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light. The alarm signal and the light emitted by the light-emitting element 104 each represent different types of warning information.

[0046] In this way, whether the administrator at the backend monitoring center 300 or the factory administrator can see the warning information and understand that the relative humidity inside the wafer transport box on the current production line is too high. The administrator can then lower the relative humidity by injecting clean dry air into the wafer transport box, thereby avoiding phenomena such as oxidation, corrosion, or short circuits caused by excessively high relative humidity in the wafers.

[0047] Figure 4 is a flowchart of the environmental monitoring method for the environmental monitoring system shown in Figure 3. The environmental monitoring method shown in Figure 4 includes steps S401 to S410. Figure 4 differs from Figure 2 in the following ways.

[0048] In step S401, the relative humidity detection circuit 106 outputs the relative humidity inside the wafer transport box to the control circuit 102.

[0049] In step S402, the control circuit 102 transmits the relative humidity to the radio frequency signal processing circuit 103.

[0050] In step S403, the radio frequency signal processing circuit 103 transmits a radio frequency signal in which relative humidity is embedded via the radio frequency antenna 105.

[0051] In step S404, the radio frequency reading module 20 reads the relative humidity in the radio frequency signal and transmits the relative humidity to the determination circuit 30.

[0052] In step S405, the determination circuit 30 determines whether the relative humidity exceeds the relative humidity threshold.

[0053] If the determination circuit 30 determines that the relative humidity has exceeded the relative humidity threshold, the process proceeds to step S406.

[0054] If the determination circuit 30 determines that the relative humidity does not exceed the relative humidity threshold, the process returns to step S401.

[0055] Figure 5 is a schematic diagram of an environmental monitoring system according to a third embodiment of the present invention. The difference between Figure 5 and Figures 1 and 3 is that the radio frequency identification tag 10 in Figure 5 includes both a gas concentration detection circuit 101 and a relative humidity detection circuit 106. Here, the gas concentration detection circuit 101 and the relative humidity detection circuit 106 are electrically connected to the control circuit 102.

[0056] The radio frequency signal processing circuit 103 of the radio frequency identification tag 10 is configured to generate a radio frequency signal into which oxygen concentration and relative humidity are embedded, and to transmit the radio frequency signal via the radio frequency antenna 105.

[0057] The radio frequency reading circuit 202 reads the oxygen concentration and relative humidity in the radio frequency signal.

[0058] The determination circuit 30 calculates the nitrogen concentration in the wafer transport box based on the oxygen concentration and determines whether the nitrogen concentration is below the nitrogen concentration threshold and whether the relative humidity exceeds the relative humidity threshold. If the nitrogen concentration is below the nitrogen concentration threshold and / or the relative humidity exceeds the relative humidity threshold, the determination circuit 30 transmits an alarm signal to the backend monitoring center 300 and drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light.

[0059] Figures 6A and 6B are flowcharts of the environmental monitoring method for the environmental monitoring system shown in Figure 5. The environmental monitoring method shown in Figures 6A and 6B includes steps S601 to S616. Figures 6A and 6B differ from Figures 2 and 4 in the following ways.

[0060] In step S601, the gas concentration detection circuit 101 and the relative humidity detection circuit 106 output the oxygen concentration and relative humidity inside the wafer transport box to the control circuit 102, respectively.

[0061] In step S602, the control circuit 102 transmits the oxygen concentration and relative humidity to the radio frequency signal processing circuit 103.

[0062] In step S603, the radio frequency signal processing circuit 103 transmits a radio frequency signal embedded with oxygen concentration and relative humidity via the radio frequency antenna 105.

[0063] In step S604, the radio frequency reading module 20 reads the oxygen concentration and relative humidity in the radio frequency signal and transmits the oxygen concentration and relative humidity to the determination circuit 30.

[0064] In step S605, the determination circuit 30 calculates the nitrogen concentration in the wafer transport box based on the oxygen concentration and determines whether the nitrogen concentration is below the nitrogen concentration threshold.

[0065] If the determination circuit 30 determines that the nitrogen concentration is below the nitrogen concentration threshold, the process proceeds to step S606.

[0066] If the determination circuit 30 determines that the nitrogen concentration is not below the nitrogen concentration threshold, the process proceeds to step S611.

[0067] In step S611, the determination circuit 30 determines whether the relative humidity exceeds the relative humidity threshold.

[0068] If the determination circuit 30 determines that the relative humidity has exceeded the relative humidity threshold, the process proceeds to step S612. If the determination circuit 30 determines that the relative humidity has not exceeded the relative humidity threshold, the process returns to step S601.

[0069] In step S612, the determination circuit 30 transmits an alarm signal to the backend monitoring center 300 and a start command to the radio frequency reading module 20.

[0070] In step S613, the radio frequency reading module 20 reads the start command and transmits the radio frequency signal in which the start command is embedded.

[0071] In step S614, the radio frequency antenna 105 of the radio frequency identification tag 10 receives a radio frequency signal from the radio frequency reading module 20 and transmits the radio frequency signal to the radio frequency signal processing circuit 103.

[0072] In step S615, the radio frequency signal processing circuit 103 extracts the activation command from the radio frequency signal and transmits the activation command to the control circuit 102.

[0073] In step S616, the control circuit 102 drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light based on the activation command.

[0074] In other embodiments, the control circuit 102 is omitted, and the determination circuit 30 is installed on the radio frequency identification tag 10. The determination circuit 30, located inside the target equipment 200 (e.g., a wafer transport box), is configured to calculate air quality information (e.g., nitrogen concentration and / or relative humidity) within the target equipment 200 and to determine whether the air quality information meets the air quality standards. If the air quality information does not meet the air quality standards, the determination circuit 30 itself generates warning information or drives other elements to generate warning information (e.g., sound or light). The determination circuit 30 transmits the air quality determination result to a radio frequency reading module 20 outside the target equipment 200. The radio frequency reading module 20 is configured to read the air quality determination result and transmit it to a backend monitoring center 300.

[0075] In another embodiment, the control circuit 102 of the radio frequency identification tag 10 placed inside the target facility 200 is configured to calculate air quality information within the target facility 200. The radio frequency identification tag 10 transmits the air quality information to a radio frequency reading module 20 outside the target facility 200 via a radio frequency antenna 105. The radio frequency reading module 20 reads the air quality information and transmits it to a determination circuit 30 outside the target facility 200. The determination circuit 30 is configured to determine whether the air quality information meets the air quality standards. If the air quality information does not meet the air quality standards, the determination circuit 30 transmits an alarm signal to a backend monitoring center 300 or drives other elements to generate warning information.

[0076] [Beneficial effects from the examples] One of the advantageous effects of the present invention is that the environmental monitoring device, environmental monitoring system, and environmental monitoring method according to the present invention allow for real-time monitoring of the relative humidity inside a target facility via reminders provided by warning information, enabling accurate identification of the timing when the relative humidity becomes too high. This makes it possible to inject gas to lower the relative humidity into the target facility at the precise timing, avoiding unnecessary waste of gas and reducing the possibility of defects occurring due to excessively high relative humidity.

[0077] The information disclosed herein represents only preferred embodiments of the present invention and does not limit the scope of the claims. Accordingly, all equivalent technical modifications made using the specification and drawings of the present invention are included within the scope of the claims. [Explanation of symbols]

[0078] 100:Environmental monitoring equipment 200: Target equipment 2001: Air intake 2002: Exhaust port 2003: Wafer bath 10: Radio frequency identification tag 101: Gas concentration detection circuit 102: Control circuit 103: Radio frequency signal processing circuit 104: Light-emitting element 105: Radio frequency antenna 106: Relative humidity detection circuit 20: Wireless frequency reading module 201: Radio frequency antenna 202: Radio frequency reading circuit 30: Judgment circuit 300: Backend Monitoring Center S201~S210, S401~S410, S601~S616: Step

Claims

1. A radio frequency identification tag configured to transmit air quality information within a target facility, A radio frequency reading module for reading the aforementioned air quality information, A determination circuit configured to determine whether the air quality information meets the air quality standards, Equipped with, If the air quality information does not meet the air quality standards, a warning is generated. An environmental monitoring device characterized by the following features.

2. The aforementioned air quality information includes oxygen concentration. The radio frequency identification tag includes a gas concentration detection circuit configured to generate the oxygen concentration, The determination circuit calculates the nitrogen concentration based on the oxygen concentration, determines whether the nitrogen concentration is below the nitrogen concentration threshold, and if the nitrogen concentration is below the nitrogen concentration threshold, determines that the air quality information does not meet the air quality standards. The environmental monitoring device according to claim 1.

3. The aforementioned air quality information includes relative humidity. The radio frequency identification tag includes a relative humidity detection circuit configured to generate the relative humidity, The determination circuit determines whether the relative humidity exceeds the relative humidity threshold, and if the relative humidity exceeds the relative humidity threshold, the air quality information does not meet the air quality standards. The environmental monitoring device according to claim 1.

4. The aforementioned air quality information includes oxygen concentration and relative humidity. The radio frequency identification tag includes a gas concentration detection circuit configured to generate the oxygen concentration and a relative humidity detection circuit configured to generate the relative humidity. The determination circuit calculates the nitrogen concentration based on the oxygen concentration, determines whether the nitrogen concentration is less than the nitrogen concentration threshold, determines whether the relative humidity exceeds the relative humidity threshold, and if the nitrogen concentration is less than the nitrogen concentration threshold or the relative humidity exceeds the relative humidity threshold, determines that the air quality information does not meet the air quality standards. The environmental monitoring device according to claim 1.

5. The radio frequency identification tag further comprises a light-emitting element, and the warning information is light emitted from the light-emitting element. The environmental monitoring device according to any one of claims 1 to 4.

6. The determination circuit is installed in the radio frequency identification tag, and the radio frequency reading module is configured to read the determination result of the determination circuit and transmit the determination result to the backend monitoring center. The environmental monitoring device according to any one of claims 1 to 4.

7. Target equipment and, A radio frequency identification tag installed within the target facility and configured to transmit air quality information within the target facility, A radio frequency reading module for reading the aforementioned air quality information, A determination circuit configured to determine whether the air quality information meets the air quality standards, Equipped with, If the air quality information does not meet the air quality standards, a warning is generated. An environmental monitoring system characterized by the following features.

8. The aforementioned air quality information includes oxygen concentration. The radio frequency identification tag includes a gas concentration detection circuit configured to generate the oxygen concentration, The determination circuit calculates the nitrogen concentration based on the oxygen concentration, determines whether the nitrogen concentration is below the nitrogen concentration threshold, and if the nitrogen concentration is below the nitrogen concentration threshold, determines that the air quality information does not meet the air quality standards. The environmental monitoring system according to claim 7.

9. The aforementioned air quality information includes relative humidity. The radio frequency identification tag includes a relative humidity detection circuit configured to generate the relative humidity, The determination circuit determines whether the relative humidity exceeds the relative humidity threshold, and if the relative humidity exceeds the relative humidity threshold, the air quality information does not meet the air quality standards. The environmental monitoring system according to claim 7.

10. The aforementioned air quality information includes oxygen concentration and relative humidity. The radio frequency identification tag includes a gas concentration detection circuit configured to generate the oxygen concentration and a relative humidity detection circuit configured to generate the relative humidity. The determination circuit calculates the nitrogen concentration based on the oxygen concentration, determines whether the nitrogen concentration is below the nitrogen concentration threshold, and further determines whether the relative humidity exceeds the relative humidity threshold. If the nitrogen concentration is below the nitrogen concentration threshold or the relative humidity exceeds the relative humidity threshold, the air quality information does not meet the air quality standards. The environmental monitoring system according to claim 7.

11. The radio frequency identification tag further comprises a light-emitting element, and the warning information is light emitted from the light-emitting element. An environmental monitoring system according to any one of claims 7 to 10.

12. The aforementioned target equipment is a wafer transport box. The environmental monitoring system according to claim 7.

13. The determination circuit is installed in the radio frequency identification tag, and the radio frequency reading module is configured to read the determination result of the determination circuit and transmit the determination result to the backend monitoring center. An environmental monitoring system according to any one of claims 7 to 10.

14. Transmitting air quality information within the target facility using a radio frequency identification tag, The air quality information is read by a wireless frequency reading module, The determination circuit determines whether the air quality information meets the air quality standards, If the air quality information does not meet the air quality standards, a warning is generated. including, An environmental monitoring method characterized by the following features.

15. The aforementioned air quality information includes oxygen concentration. The determination circuit calculates the nitrogen concentration based on the oxygen concentration, and if the determination circuit determines that the nitrogen concentration is below the nitrogen concentration threshold, the air quality information does not meet the air quality standards. The environmental monitoring method according to claim 14.

16. The aforementioned air quality information includes relative humidity. If the determination circuit determines that the relative humidity exceeds the relative humidity threshold, the air quality information does not meet the air quality standards. The environmental monitoring method according to claim 14.

17. The aforementioned air quality information includes oxygen concentration and relative humidity. The determination circuit calculates the nitrogen concentration based on the oxygen concentration, and if it determines that the nitrogen concentration is below the nitrogen concentration threshold and / or the relative humidity exceeds the relative humidity threshold, then the air quality information does not meet the air quality standards. The environmental monitoring method according to claim 14.

18. The radio frequency identification tag further comprises a light-emitting element, and the warning information is light emitted from the light-emitting element. The environmental monitoring method according to any one of claims 14 to 17.

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