Electromagnetic wave irradiation device

Abstract

Miniaturize the electromagnetic wave irradiation device. [Solution] The electromagnetic wave irradiation device comprises a first irradiation unit that irradiates a first electromagnetic wave, a changing unit that changes the direction of propagation of the first electromagnetic wave, a first optical member including a first surface to which the first electromagnetic wave from the changing unit is incident, a second optical member, and a first detection unit. The second optical member faces the first surface. The second optical member reflects the first electromagnetic wave incident on the first surface and causes it to propagate on the first surface. The first detection unit detects the first electromagnetic wave that is reflected by the second optical member and emitted from the first surface.

Claims

1. A first irradiation unit that irradiates with a first electromagnetic wave, A modification unit that changes the direction of propagation of the first electromagnetic wave, A first optical member including a first surface to which the first electromagnetic wave from the modified portion is incident, A second optical member facing the first surface and reflecting the first electromagnetic wave incident on the first surface and propagating it toward the first surface, An electromagnetic wave irradiation device comprising: a first detection unit for detecting the first electromagnetic wave reflected by the second optical member and emitted from the first surface.

2. The first optical element is a cylindrical lens, The first surface is the cylindrical surface of the cylindrical lens, The cylindrical lens includes a second planar surface on the opposite side of the first surface. The electromagnetic wave irradiation device according to claim 1, wherein the second optical member is a reflective surface formed on the second surface.

3. The first optical element is a cylindrical lens, The first surface is the cylindrical surface of the cylindrical lens, The cylindrical lens includes a second planar surface on the opposite side of the first surface. The electromagnetic wave irradiation device according to claim 1, wherein the second optical member reflects the first electromagnetic wave emitted from the second surface.

4. The electromagnetic wave irradiation device according to claim 1, wherein the first detection unit is not located on the path of the first electromagnetic wave from the modification unit to the first surface.

5. The electromagnetic wave irradiation device according to claim 1, further comprising a third optical member for propagating the first electromagnetic wave from the modified portion to the first optical member.

6. It further includes a second irradiation unit that irradiates a second electromagnetic wave, The modification unit changes the propagation direction of the first electromagnetic wave and the second electromagnetic wave. The first electromagnetic wave and the second electromagnetic wave, whose direction of propagation has been changed by the modification unit, propagate to the third optical member. The electromagnetic wave irradiation device according to claim 5, wherein the third optical member propagates the first electromagnetic wave to the first optical member and propagates the second electromagnetic wave to the outside of the electromagnetic wave irradiation device.

7. The electromagnetic wave irradiation device according to claim 6, further comprising a second detection unit for detecting the reflected wave of the second electromagnetic wave that has been reflected by an object.

8. The electromagnetic wave irradiation device according to any one of claims 1 to 7, further comprising a control unit that detects the state of the modification unit based on the detection result of the first electromagnetic wave of the first detection unit.

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