Flow channel structure, fluid measuring device, and fluid control device

Abstract

The fluid resistance member is fixed without applying unnecessary force, while also ensuring sealing performance. [Solution] The fluid resistance member 2 is made of ceramic and is provided in the fluid resistance member 2. The fluid resistance member 2 is made of ceramic and is provided in the fluid resistance member 2. The fluid resistance member 2 is fixed in the fluid resistance member 2 by being sandwiched between the fluid resistance member 11a and 11b. The fixing mechanism 3 has a sealing portion 4 that seals the outer surface of the fluid resistance member 2 and a pressing fixing portion 5 that presses and fixes the outer surface of the fluid resistance member 2. The sealing portion 4 and the pressing fixing portion 5 are provided at least at different positions from each other in the axial direction of the fluid resistance member 2.

Claims

1. A pipe member that constitutes a fluid flow path, A ceramic fluid resistance member provided in the aforementioned flow path and having one or more resistance channels, The system includes a fixing mechanism that is sandwiched between the pipe members to fix the fluid resistance member in the flow path, The aforementioned fixing mechanism is A sealing portion made of an elastic material that seals the outer circumferential surface of the fluid resistance member, It has a pressing and fixing part that presses and fixes the outer surface of the fluid resistance member, A flow path structure in which the sealing portion and the pressing and fixing portion are provided at different positions in the axial direction of the fluid resistance member.

2. The aforementioned fixing mechanism is An annular gasket is provided on the outer circumferential surface of the fluid resistance member and is sandwiched between the pipe member, The gasket further comprises a cylindrical fixing member provided on the outer circumferential surface of the fluid resistance member on one or the other side, The sealing portion is provided between the outer circumferential surface of the fluid resistance member and the inner circumferential surface of the fixing member, and seals the space between them. The flow path structure according to claim 1, wherein the pressing and fixing portion is formed by the fixing member.

3. The flow path structure according to claim 2, wherein the fixing members are provided on one side and the other side of the gasket, and fix the gasket in place by sandwiching it.

4. The flow path structure according to claim 2 or 3, wherein the sealing portion further seals the space between the opposing surfaces of the fixing member and the gaskets.

5. The flow path structure according to claim 4, wherein the opposing surface portion of the fixing member has an inclined pressing surface that presses the sealing portion toward the outer circumferential surface of the fluid resistance member and the opposing surface portion of the gasket.

6. A pipe member that constitutes a fluid flow path, A ceramic fluid resistance member provided in the aforementioned flow path and having one or more resistance channels, The system includes a fixing mechanism that is sandwiched between the pipe members to fix the fluid resistance member in the flow path, The aforementioned fixing mechanism is A sealing portion made of an elastic material that seals the outer circumferential surface of the fluid resistance member, A cylindrical intermediate support portion is provided between the outer circumferential surface of the fluid resistance member and the inner circumferential surface of the fixing member, It has a pressing and fixing part that presses and fixes the outer surface of the fluid resistance member, The sealing portion and the pressing and fixing portion are provided at different positions in the axial direction of the fluid resistance member. The intermediate support portion is a flow channel structure that extends outward from the end face of the fixing member that is opposite to the end face that contacts the gasket.

7. The flow path structure according to any one of claims 2 to 6, wherein the pressing and fixing portion is formed on the side of the fixing member opposite to the end face that contacts the gasket.

8. An annular groove is formed on the end face of the fixing member that is opposite to the end face that contacts the gasket. The flow path structure according to claim 7, wherein the pressing and fixing portion is formed by crimping the inner portion which is on the side of the fluid resistance member that is closer to the groove.

9. The flow path structure according to claim 7, wherein the pressing and fixing portion is formed by crimping the outer circumferential surface on the opposite side of the end face of the fixing member that is in contact with the gasket.

10. A flow channel structure according to any one of claims 1 to 9, An upstream pressure sensor for measuring the upstream pressure of the fluid resistance member in the flow path, A fluid measuring device comprising a downstream pressure sensor for measuring the downstream pressure of the fluid resistance member in the aforementioned flow path.

11. A flow channel structure according to any one of claims 1 to 9, An upstream pressure sensor for measuring the upstream pressure of the fluid resistance member in the flow path, A downstream pressure sensor for measuring the downstream pressure of the fluid resistance member in the aforementioned flow path, A fluid control device comprising a fluid control valve provided on the upstream or downstream side of the fluid resistance member in the flow path.

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