compound

Abstract

Provided is a compound capable of producing a resist pattern having a good focus margin. 【Solution means】 A compound represented by formula (I). JPEG2026094397000143.jpg46126 [In the formula, R 1 represents *-R 10 or *-L 2 -CO-O-R 10 . R 2 represents *-R 10 , *-CO-R 10 , *-CO-O-R 10 , *-L 2 -CO-O-R 10 or *-CO-O-L 2 -CO-O-R 10 . L 2 represents a substituted / unsubstituted alkanediyl group. R 10 represents a group represented by formula (IC). R A represents a saturated hydrocarbon group. L 3 represents a single bond or a substituted / unsubstituted hydrocarbon group. R 3 represents a halogen atom, a hydroxy group, etc.]

Claims

1. A compound represented by formula (I). [In formula (I), R １ is, *-R １０ or *-L ２ -CO-O-R １０ This represents the bond site with -O-. R ２ represents *-R １０ *-CO-R １０ *-CO-O-R １０ *-L ２ -CO-O-R １０ or *-CO-O-L ２ -CO-O-R １０ where * represents the bonding site with -O. L ２ This represents an alkanediyl group having 1 to 6 carbon atoms, which may have substituents. R １０ This represents a group represented by formula (IC). R Ａ This represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer from 0 to 2, and if u1 is 2, multiple R Ａ They are either identical or different. s1 represents either 1 or 2. t1 represents either 0 or 1, provided that the sum of s1 and t1 is either 1 or 2. L ３ This represents a hydrocarbon group having 1 to 36 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. * indicates a bond site with -O- or -CO-. m1 represents 1 or 2, and when m1 is 2, multiple R １ They may be identical or different from one another. m2 represents an integer from 1 to 5, and when m2 is 2 or greater, multiple R ２ They may be identical or different from one another. R ３ This represents a halogen atom, a hydroxyl group, a C1-C12 haloalkyl group, or a C1-C12 alkyl group, and the alkyl group contains -CH 2 The dash may be replaced by -O- or -CO-. m3 represents an integer from 0 to 4, and when m3 is 2 or greater, multiple R ３ They may be identical or different from each other, provided that 2 ≤ m1 + m2 + m3 ≤ 6.

2. m3 is an integer greater than or equal to 1, R ３ The compound according to claim 1, wherein the compound is a fluorine atom, an iodine atom, a hydroxyl group, a perfluoroalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 3 carbon atoms, or an alkoxy group having 1 to 3 carbon atoms.

3. The compound according to claim 1 or 2, wherein the sum of s1 and t1 is 2.

4. R １ However, *-L ２ -CO-O-R １０ The compound according to claim 1 or 2.

5. R ２ But *-CO-O-R １０ , *-L ２ -CO-O-R １０ Or *-CO-O-L ２ -CO-O-R １０ The compound according to claim 1 or 2.

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