X-ray tube, and method for manufacturing an X-ray tube

Abstract

The objective is to provide an X-ray tube that can reduce thermal stress in the sealing portion and improve heat dissipation, as well as a method for manufacturing an X-ray tube. [Solution] The X-ray tube according to the embodiment comprises a container having a space inside, an X-ray generating unit provided inside the container and having a cathode structure and an anode structure, a sealing part provided between the inner wall of the container and the X-ray generating unit and containing an insulating resin, and a peeling part provided on at least a part of either the inner wall of the container or the outer surface of the X-ray generating unit and suppressing bonding with the sealing part.

Description

【Technical Field】 【0001】 Embodiments of the present invention relate to an X-ray tube and a method for manufacturing an X-ray tube. 【Background Art】 【0002】 There is a fixed anode X-ray tube as a type of X-ray tube. Such an X-ray tube includes, for example, a container having a cylindrical shape, and an X-ray generation unit provided inside the container and having an anode structure and a cathode structure. Further, a sealing portion containing a material having high thermal conductivity and insulation is provided between the inner wall of the container and the X-ray generation unit. For example, the sealing portion contains a silicone resin or the like. If such a sealing portion is provided, the sealing portion can insulate between the X-ray generation unit to which a high voltage is applied and the container. In addition, heat generated when X-rays are generated by the anode structure and the cathode structure can be radiated to the outside of the X-ray tube through the sealing portion and the container. In this case, if the sealing portion is joined to the inner wall of the container and the outer surface of the X-ray generation unit, improvement in insulation and heat dissipation (thermal conductivity) can be achieved. 【0003】 However, since the container and the X-ray generation unit are formed of metal, ceramics, or the like, and the sealing portion is formed of a resin such as a silicone resin, the thermal expansion coefficients of the container and the X-ray generation unit and the sealing portion are significantly different. Therefore, if the sealing portion is joined to the inner wall of the container and the outer surface of the X-ray generation unit, thermal stress due to the difference in thermal expansion coefficient occurs in the sealing portion during operation (when generating heat) and non-operation (when not generating heat) of the X-ray tube. 【0004】 In this case, if the sealing part contains an elastic material such as silicone resin, the generated thermal stress can be alleviated. However, repeated operation and deactivation of the X-ray tube may cause cracks or other damage inside the sealing part or near the interface between the sealing part and the inner wall of the container or the outer surface of the X-ray generating part. If cracks or other damage occur in the sealing part, the insulating and heat dissipation properties will decrease, which may make abnormal discharges more likely to occur or worsen the vacuum level inside the X-ray generating part. If the vacuum level inside the X-ray generating part worsens, the cathode filament may break due to collisions with ionized gas molecules, or substances contained in the cathode filament may scatter and adhere inside the X-ray generating part, which may lead to a decrease in X-ray intensity or an increase in impurity X-rays. 【0005】 Therefore, there was a need for the development of a technology that could reduce thermal stress in the sealing portion and improve heat dissipation. [Prior art documents] [Patent Documents] 【0006】 [Patent Document 1] Japanese Patent Publication No. 2024-3557 [Overview of the Initiative] [Problems that the invention aims to solve] 【0007】 The problem that this invention aims to solve is to provide an X-ray tube that can reduce thermal stress in the sealing portion and improve heat dissipation, and a method for manufacturing an X-ray tube. [Means for solving the problem] 【0008】 The X-ray tube according to the embodiment comprises a container having a space inside; an X-ray generating unit provided inside the container and having a cathode structure and an anode structure; a sealing unit provided between the inner wall of the container and the X-ray generating unit and containing an insulating resin; and a peeling unit provided on at least a part of either the inner wall of the container or the outer surface of the X-ray generating unit and suppressing bonding with the sealing unit. [Effects of the Invention] 【0009】 According to embodiments of the present invention, it is possible to provide an X-ray tube that can reduce thermal stress in the sealing portion and improve heat dissipation, and a method for manufacturing an X-ray tube. [Brief explanation of the drawing] 【0010】 [Figure 1] This is a schematic cross-sectional view illustrating an X-ray tube according to this embodiment. [Figure 2] This is a schematic cross-sectional view illustrating an X-ray tube according to another embodiment. [Figure 3] This is a schematic cross-sectional view illustrating an X-ray tube according to another embodiment. [Figure 4] This is a schematic cross-sectional view illustrating an X-ray tube according to another embodiment. [Modes for carrying out the invention] 【0011】 The embodiments will be illustrated below with reference to the drawings. In each drawing, similar components are denoted by the same reference numerals, and detailed descriptions will be omitted as appropriate. 【0012】 The X-ray tube 1 according to this embodiment can be used, for example, in an X-ray fluorescence analyzer. However, the use of the X-ray tube 1 is not limited to an X-ray fluorescence analyzer. Furthermore, in this specification, a pressure state lower than atmospheric pressure is referred to as a vacuum state. 【0013】 Figure 1 is a schematic cross-sectional view illustrating an X-ray tube 1 according to this embodiment. As shown in Figure 1, the X-ray tube 1 includes, for example, an X-ray generating unit 2, a container 3, a heat dissipation unit 4, a cable 5, a sealing unit 6, and a peeling unit 8. 【0014】 There are no particular restrictions on the orientation in which the X-ray tube 1 is installed. For example, the X-ray tube 1 can be installed so that its central axis 1a extends vertically, or so that its central axis 1a extends in a direction that intersects the vertical. Also, for example, the X-ray generating section 2 side of the X-ray tube 1 can be pointed downwards in the direction of gravity, upwards in the direction of gravity, or horizontally. 【0015】 The X-ray generating unit 2 is located, for example, inside the container 3. The X-ray generating unit 2 includes, for example, an enclosure 21, an output window 22, an anode structure 23, a cathode structure 24, a focusing electrode 25, and an insulating enclosure 26. 【0016】 The enclosure 21 is, for example, cylindrical. The central axis of the enclosure 21 can be, for example, substantially coaxial with the central axis 1a of the X-ray tube 1. One end of the enclosure 21 (the end on the insulating enclosure 26 side) is open. The other end 21a of the enclosure 21 is a substantially flat surface. A hole 21a1 is provided in the central region of the end 21a of the enclosure 21. 【0017】 The side end 21a of the enclosure 21 is inclined 21b. The inclined portion 21b is inclined in a direction that approaches the central axis 1a of the X-ray tube 1 as it approaches the end 21a. For example, the outer diameter of the enclosure 21 gradually decreases towards the tip. The electric field formed by the inclined portion 21b and the focusing electrode 25 can control the trajectory of thermionic electrons traveling from the filament 24a to the target 23b. For example, by changing the angle between the inner wall of the inclined portion 21b and the central axis 1a of the X-ray tube 1, the region (focus) in which thermionic electrons are incident on the target 23b can be made to an appropriate size. If the region (focus) in which thermionic electrons are incident on the target 23b is of an appropriate size, melting due to overheating of the target 23b can be suppressed. The outer enclosure 21 can be formed of a metal such as stainless steel, for example. 【0018】 The output window 22 is in the shape of a disc and is provided at the end portion 21a of the outer enclosure 21. The output window 22 is provided so that the hole 21a1 in the end portion 21a of the outer enclosure 21 is airtight. For example, the periphery of the output window 22 is joined by brazing or the like in the vicinity of the periphery of the hole 21a1. The output window 22 maintains the vacuum state inside the outer enclosure 21 and transmits the X-rays generated inside the outer enclosure 21. Therefore, the output window 22 is formed of a material with little X-ray attenuation. The output window 22 is formed of, for example, beryllium or the like. Also, in order to reduce X-ray attenuation, the thickness of the output window 22 can be, for example, on the order of several tens of μm to several hundreds of μm. 【0019】 Also, depending on the use of the X-ray tube 1, there may be cases where corrosive substances are scattered or corrosive gases are contained in the atmosphere where the X-ray tube 1 is provided. In such cases, a protective film 22a can be provided to cover the surface of the output window 22 on the side opposite to the target 23b side. The protective film 22a can contain, for example, diamond-like carbon as the main material. The protective film 22a can be formed to cover the output window 22 using a film-forming method such as vapor deposition, for example. The thickness of the protective film 22a can be, for example, on the order of 0.5 μm to 1 μm. 【0020】 The anode structure 23 has, for example, a support portion 23a and a target 23b. The support portion 23a is columnar and extends along the central axis 1a of the X-ray tube 1. One end of the support portion 23a is provided inside the outer enclosure 21 and faces the output window 22. The other end of the support portion 23a is provided, for example, inside the heat radiating portion 4. The support portion 23a is formed of a conductive material such as copper, for example. 【0021】 The target 23b is, for example, disc-shaped and is located inside the enclosure 21. The central axis of the target 23b can be, for example, substantially coaxial with the central axis 1a of the X-ray tube 1. The target 23b faces the output window 22. The target 23b can be, for example, located at the end of the support portion 23a facing the output window 22. The target 23b contains a material that generates X-rays when thermionic electrons collide with it. The target 23b contains, for example, at least one of Rh (rhodium), W (tungsten), molybdenum (Mo), chromium (Cr), palladium (Pd), platinum (Pt), and copper (Cu). 【0022】 The cathode structure 24 is located inside the enclosure 21. The cathode structure 24 has, for example, a filament 24a. 【0023】 The filament 24a surrounds the focusing electrode 25 and the target 23b. The filament 24a is linear, and its shape, when viewed from a direction along the central axis 1a of the X-ray tube 1, is approximately circular or approximately C-shaped. The filament 24a can be formed from, for example, a wire containing tungsten as its main component. The filament 24a is electrically connected, for example, to the negative electrode of a power supply provided outside the X-ray tube 1. 【0024】 The focusing electrode 25 is, for example, cylindrical. The central axis of the focusing electrode 25 can be, for example, substantially coaxial with the central axis 1a of the X-ray tube 1. The focusing electrode 25 surrounds the target 23b. When viewed from a direction along the central axis 1a of the X-ray tube 1, the focusing electrode 25 is positioned between the target 23b and the filament 24a. The focusing electrode 25 can be formed from a conductive material such as iron (Fe) or stainless steel. 【0025】 The focusing electrode 25 and the enclosure 21 can be grounded. Alternatively, the focusing electrode 25 and the enclosure 21 can be electrically connected to a power supply located outside the X-ray tube 1. When the focusing electrode 25 and the enclosure 21 are connected to a power supply, the voltage applied to the focusing electrode 25 and the enclosure 21 can be higher than the voltage applied to the filament 24a and lower than the voltage applied to the support section 23a. 【0026】 The insulating enclosure 26 is cylindrical in shape, with open ends on both sides. The central axis of the insulating enclosure 26 can be approximately coaxial with, for example, the central axis 1a of the X-ray tube 1. A support portion 23a is provided inside the insulating enclosure 26. The insulating enclosure 26 can be formed from an insulating material such as ceramics. 【0027】 The container 3 has an internal space. For example, the container 3 is cylindrical with openings at both ends. Inside the container 3, for example, an X-ray generating unit 2 (enclosure 21, output window 22, anode structure 23, cathode structure 24, focusing electrode 25, insulating enclosure 26) and a heat dissipation unit 4 can be provided. The container 3 can be made of a metal such as stainless steel. 【0028】 The heat dissipation section 4 is cylindrical in shape. One end of the heat dissipation section 4 can be connected to the insulating enclosure 26. The other end of the heat dissipation section 4 can be exposed, for example, from the container 3. The heat dissipation section 4 insulates the support section 23a from the container 3 and releases the heat generated when thermionic electrons collide with the target 23b and transferred to the support section 23a to the outside through the sealing section 6 and the container 3. Therefore, the heat dissipation section 4 can be made from a material that has insulating properties and high thermal conductivity. For example, the heat dissipation section 4 can be made from ceramics such as aluminum nitride. 【0029】 Furthermore, cooling devices 7 can be provided on the outer wall of the container 3 and the outer wall of the heat dissipation section 4. If cooling devices 7 are provided, it becomes easier to dissipate heat from the container 3 and the heat dissipation section 4. For example, the cooling device 7 may be liquid-cooled, air-cooled, or heat pipe type. In this case, the cooling device 7 can be appropriately selected according to the output required for the X-ray tube 1 (the amount of heat generated when thermionic electrons collide with the target 23b). For example, if the output of the X-ray tube 1 is high (high heat generation), a liquid-cooled cooling device can be selected, and if the output of the X-ray tube 1 is relatively low (relatively low heat generation), an air-cooled or heat pipe type cooling device that is easy to maintain can be selected. 【0030】 One end of cable 5 is electrically connected to support portion 23a inside heat dissipation portion 4. The other end of cable 5 is electrically connected to the positive electrode of a power supply located outside the X-ray tube 1. 【0031】 The sealing section 6 is provided between the inner wall of the container 3 and the X-ray generating section 2 and the heat dissipation section 4. Here, when X-rays are generated in the X-ray tube 1, a positive high voltage is applied to the target 23b from a power supply located outside the X-ray tube 1 via the cable 5 and the support part 23a. A negative voltage is also applied to the filament 24a, which is heated. Thermionic electrons generated by the heating of the filament 24a are accelerated by the potential difference between the target 23b, to which a positive high voltage is applied, and the filament 24a, and their trajectories are bent by the electric field formed by the enclosure 21 and the focusing electrode 25, before colliding with the target 23b. 【0032】 When thermionic electrons collide with the target 23b, X-rays and heat are generated. The generated X-rays pass through the output window 22 and irradiate, for example, the sample surface for X-ray fluorescence analysis. The generated heat is transferred from the support part 23a to the heat dissipation part 4 and the insulating enclosure 26, and then to the container 3 via the sealing part 6. The heat transferred to the container 3 is released to the outside of the X-ray tube 1. 【0033】 Therefore, the sealing portion 6 has the function of insulating the container 3 from the X-ray generating portion 2 and the heat dissipation portion 4, and the function of transferring the heat generated in the X-ray generating portion 2 to the container 3. The sealing portion 6 having such functions is formed from a material that has insulating properties and high thermal conductivity. For example, the sealing portion 6 can be formed from a resin such as silicone resin. Furthermore, in order to improve thermal conductivity and X-ray shielding efficiency, fine particles containing inorganic materials (e.g., silica) can be added to the resin such as silicone resin. 【0034】 If the sealing portion 6, the inner wall of the container 3, the outer surface of the X-ray generating portion 2, and the outer surface of the heat dissipation portion 4 are joined together, then insulation and heat dissipation (thermal conductivity) can be improved. 【0035】 However, as mentioned above, the container 3 and the outer casing 21 contain metal. The heat dissipation section 4 and the insulating outer casing 26 contain ceramics. In contrast, the sealing section 6 contains resin. Since the thermal expansion coefficient of resin is greater than that of metal and ceramics, when the sealing section 6 is joined to the inner wall of the container 3, the outer surface of the X-ray generating section 2, and the outer surface of the heat dissipation section 4, thermal stress due to the difference in thermal expansion coefficients occurs in the sealing section 6 when the X-ray tube 1 is operating (heating) and when the X-ray tube 1 is not operating (non-heating). Since the sealing section 6 contains an elastic silicone resin or the like, it can alleviate the generated thermal stress. 【0036】 However, repeated operation and deactivation of the X-ray tube 1 may cause cracks or other damage to occur in areas such as the inside of the sealing part 6, near the interface of the sealing part 6 with the inner wall of the container 3, near the interface of the sealing part 6 with the outer surface of the X-ray generating part 2, and near the interface of the sealing part 6 with the outer surface of the heat dissipation part 4. If cracks or other damage occur in the sealing part 6, the insulating and heat dissipating properties will decrease, which may make abnormal discharges more likely to occur, or the vacuum level inside the X-ray generating part 2 may deteriorate. If the vacuum level inside the X-ray generating part 2 deteriorates, the filament 24a may break due to collisions with ionized gas molecules, or substances contained in the filament 24a may scatter and adhere inside the X-ray generating part 2, which may lead to a decrease in X-ray intensity or an increase in impure X-rays. 【0037】 Therefore, the X-ray tube 1 is provided with a peeling section 8. The peeling section 8 can be provided, for example, on at least a portion of any one of the inner wall of the container 3, the outer surface of the X-ray generating section 2, and the outer surface of the heat dissipation section 4. For example, in the X-ray tube 1 illustrated in Figure 1, the delamination section 8 is provided over the entire area of ​​the inner wall of the container 3. In this case, if the area where the delamination section 8 is provided is large, the area where the sealing section 6 is separated from the delamination section 8 can be increased, as described later, thus facilitating the relaxation of the thermal stress mentioned above. On the other hand, in areas where the delamination section 8 is not provided, the sealing section 6 can be joined to the inner wall of the container 3, etc., so that the position of the sealing section 6 does not shift or the sealing section 6 moves can be suppressed. 【0038】 The release portion 8 is, for example, in the form of a film. The release portion 8 contains a material that does not readily bond with the sealing portion 6. The release portion 8 may include, for example, a fluororesin such as PTFE or PFA, or a solidified release agent. That is, the release portion 8 may contain at least one of the components of a fluororesin and a release agent. The release agent may be, for example, a mixture of cyclohexane, heptane, n-hexane, a fluorine aerosol type release agent, or a hydrocarbon-based mixed solvent such as IPA. There are no particular limitations on the thickness of the peel-off portion 8; for example, it is sufficient if it can cover the inner wall of the container 3. 【0039】 During operation (when generating heat) of the X-ray tube 1, the heat generated by the X-ray generating unit 2 causes the sealing unit 6, which has a high coefficient of thermal expansion, to expand, and the sealing unit 6 joins with the release unit 8. In other words, the sealing unit 6 joins with the inner wall of the container 3 via the release unit 8. Therefore, insulation and heat dissipation (thermal conductivity) can be improved. 【0040】 When the X-ray tube 1 is not in operation (not generating heat), the sealing portion 6, which has a high thermal shrinkage rate, shrinks, and the sealing portion 6 separates from the delamination portion 8, which contains a material that is difficult to bond with the sealing portion 6. In the portion where the sealing portion 6 is separated from the delamination portion 8, no thermal stress is generated in the sealing portion 6, so damage such as cracks in the sealing portion 6 can be suppressed. 【0041】 In other words, with the X-ray tube 1 according to this embodiment, it is possible to reduce thermal stress in the sealing portion 6 and improve heat dissipation. In this case, as shown in Figure 1, if a release portion 8 is provided over the entire area of ​​the inner wall of the container 3, the generation of thermal stress in the sealing portion 6 can be almost completely eliminated. 【0042】 On the other hand, if, for example, a part of the inner wall of the container 3 is joined to the sealing portion 6, then, as mentioned above, it is possible to prevent the sealing portion 6 from shifting position or moving inside the container 3. For example, the temperature of the sealing portion 6 may be lower near the end of the container 3. If there is a low-temperature area in the sealing portion 6, this area can be joined to the inner wall of the container 3. For example, a release portion 8 does not need to be provided at the part where the inner wall of the container 3 and the sealing portion 6 are joined. 【0043】 Furthermore, peeling sections 8 can be provided on the outer surface of the X-ray generating section 2 and the outer surface of the heat dissipation section 4. In this case, the generation of thermal stress in the sealing section 6 can be suppressed, thereby preventing damage such as cracks from occurring in the sealing section 6. However, if a peeling section 8 is provided on the inner wall of the container 3, the formation of the peeling section 8 becomes easier. 【0044】 Figure 2 is a schematic cross-sectional view illustrating an X-ray tube 11 according to another embodiment. As shown in Figure 2, the X-ray tube 11 includes, for example, an X-ray generating unit 2, a container 31, a heat dissipation unit 4, a cable 5, a sealing unit 6, and a peeling unit 8. In other words, the X-ray tube 11 can be made by replacing the container 3 of the aforementioned X-ray tube 1 with container 31. 【0045】 The container 31 is cylindrical in shape, with openings at both ends. A flange 31a is provided at the opening of the container 31, projecting toward the central axis 11a of the X-ray tube 11. In other words, the container 31 can be the same as the container 3 described above, but with an additional flange 31a. The presence of the flange 31a prevents the sealing portion 6 from moving in the direction along the central axis 11a of the X-ray tube 11. That is, the flange 31a acts as a retainer, preventing the sealing portion 6 from moving inside the container 3. 【0046】 In Figure 2, the flange 31a is shown as an example where it is provided on both ends of the container 31, but the flange 31a can be provided on at least one end of the container 31. For example, if the X-ray tube 11 is installed with its tube axis 11a extending vertically, the flange 31a should be provided on the lower end of the container 31 in the direction of gravity. However, if the flange 31a is provided on both ends of the container 31, the degree of freedom regarding the installation direction of the X-ray tube 11 can be greatly increased. 【0047】 Figure 3 is a schematic cross-sectional view illustrating an X-ray tube 12 according to another embodiment. As shown in Figure 3, the X-ray tube 12 includes, for example, an X-ray generating unit 2, a container 32, a heat dissipation unit 4, a cable 5, a sealing unit 6, and a peeling unit 8. In other words, the X-ray tube 12 can be made by replacing the container 3 of the aforementioned X-ray tube 1 with container 32. 【0048】 The container 32 is cylindrical in shape, with openings at both ends. The opening dimension of one side of the container 32 is smaller than the opening dimension of the other side. In the container 32 illustrated in Figure 3, the opening dimension of the container 32 on the X-ray generating section 2 side is smaller than the opening dimension of the container 32 on the heat dissipation section 4 side. For example, an inclined section can be provided on the inner wall of the container 32 so that the opening dimension of one side of the container 32 is smaller than the opening dimension of the other side. If the opening dimensions of the container 32 are set in this way, it is possible to suppress the movement of the sealing section 6 in the direction along the central axis 12a of the X-ray tube 12. For example, when the X-ray tube 12 is installed, the side of the container 32 with the smaller opening dimension should be on the lower side in the direction of gravity. In this embodiment, the inclined section provided on the inner wall of the container 32 acts as a retainer to suppress the movement of the sealing section 6 inside the container 32. 【0049】 Furthermore, the container 32 can be provided with protrusions that extend from its inner wall toward the central axis 12a of the X-ray tube 12, or with recesses on its inner wall. In these cases, the sealing portion 6 can be prevented from moving in the direction along the central axis 12a of the X-ray tube 12. In addition, the degree of freedom regarding the installation direction of the X-ray tube 12 can be greatly increased. In such cases, the protrusions or recesses on the inner wall of the container 32 act as retainers, preventing the sealing portion 6 from moving inside the container 32. Furthermore, the retaining devices provided at the ends of the container and the retaining devices provided on the inner wall of the container can be combined as appropriate. In other words, the retaining devices can be provided at least one of the ends of the container and the inner wall of the container. 【0050】 Figure 4 is a schematic cross-sectional view illustrating an X-ray tube 13 according to another embodiment. As shown in Figure 4, the X-ray tube 13 includes, for example, an X-ray generating unit 2a, a container 33, a heat dissipation unit 41, a high-voltage receptacle 51, a sealing unit 16, and a peeling unit 8. While the aforementioned X-ray tubes 1, 11, and 12 apply a high voltage to the anode structure 23 of the X-ray generating unit 2, X-ray tube 13 applies a high voltage to the cathode structure 29 of the X-ray generating unit 2a. 【0051】 The X-ray generating unit 2a includes, for example, an enclosure 27, an output window 22, an anode structure 28, a cathode structure 29, and a focusing electrode 25. 【0052】 The enclosure 27 has a cylindrical shape with both ends closed. The enclosure 27 can be made from a metal such as stainless steel. 【0053】 Furthermore, a flow path 27a for cooling the anode structure 28 is provided inside the enclosure 27. A supply unit 28a for supplying refrigerant to the target 23b is provided inside the flow path 27a. A supply pipe 27b for supplying refrigerant into the flow path 27a and a discharge pipe 27c for discharging refrigerant from the flow path 27a are connected to the end of the enclosure 27. The refrigerant supplied from the supply pipe 27b into the flow path 27a flows through the flow path 27a, comes into contact with the target 23b via the supply unit 28a, and is then discharged to the outside of the X-ray tube 13 via the discharge pipe 27c. As a result, the target 23b is cooled by the refrigerant. In other words, the X-ray tube 13 is a liquid-cooled X-ray tube. 【0054】 The anode structure 28 includes, for example, a supply section 28a and a target 23b. The target 23b is located inside the enclosure 27, with one side exposed to the flow path 27a. The opening of the supply section 28a faces the target 23b. 【0055】 The cathode structure 29 is located inside the enclosure 27. The cathode structure 29 has, for example, a filament 24a. The focusing electrode 25 is located inside the enclosure 27 and surrounds the filament 24a. 【0056】 The container 33 has a box-like shape. Inside the container 33 are the side of the outer casing 27 on which the cathode structure 29 and focusing electrode 25 are provided, a heat dissipation section 41, and a high-voltage receptacle 51. The container 3 is made of a metal such as stainless steel. 【0057】 The heat dissipation section 41 is cylindrical in shape, with openings at both ends. Inside the heat dissipation section 41, L-shaped leads 24a1 electrically connected to the filament 24a are exposed. Holes are also provided on the sides of the heat dissipation section 41, and through these holes, the ends of the leads 24a1 opposite to the filament 24a are exposed to the outside of the heat dissipation section 41. The heat dissipation section 41 can be formed from, for example, ceramics such as aluminum nitride. 【0058】 Note that the heat dissipation section 41 is not necessarily required and can be omitted. Furthermore, the heat dissipation section can be provided on the side to which the high voltage of the X-ray generation section is applied. For example, in the aforementioned X-ray tubes 1, 11, and 12, a high voltage is applied to the anode structure 23 of the X-ray generation section 2, so the heat dissipation section 4 is provided on the side of the anode structure 23 of the X-ray generation section 2. For example, in the X-ray tube 13, a high voltage is applied to the cathode structure 29 of the X-ray generation section 2a, so the heat dissipation section 41 is provided on the side of the cathode structure 29 of the X-ray generation section 2a. 【0059】 The high-voltage receptacle 51 is provided, for example, inside the container 33. The high-voltage receptacle 51 has a substantially cylindrical shape, for example, with one end open and the other end closed. The closed end of the high-voltage receptacle 51 is located inside a hole provided on the side surface of the heat dissipation section 41. A lead 24a1 is exposed inside the high-voltage receptacle 51. The open side surface of the high-voltage receptacle 51 is provided in the container 33 in an airtight manner. A high-voltage cable electrically connected to a power supply is connected to the lead 24a1 exposed inside the high-voltage receptacle 51. The high-voltage receptacle 51 can be made from a ceramic, for example, aluminum nitride. 【0060】 The sealing portion 16, like the sealing portion 6 described above, is provided between the inner wall of the container 33 and the outer surface of the X-ray generating portion 2a and the outer surface of the heat dissipation portion 41. The sealing portion 16 can also be provided inside the heat dissipation portion 41. The sealing portion 16 has the function of insulating the container 33 from the X-ray generating portion 2a and the heat dissipation portion 41, and the function of transferring the heat generated in the X-ray generating portion 2a to the container 33. The material of the sealing portion 16 can be, for example, the same as the material of the sealing portion 6. 【0061】 Similar to the case of the X-ray tube 1 described above, the peeling section 8 is provided on at least a portion of one of the inner walls of the container 33, the outer surface of the X-ray generating section 2a, and the outer surface of the heat dissipation section 41. If the heat dissipation section 41 is omitted, the peeling section 8 is provided on at least a portion of either the inner wall of the container 33 or the outer surface of the X-ray generating section 2a. 【0062】 In the case of the X-ray tube 13 illustrated in Figure 4, the delamination portion 8 is provided on a part of the inner wall of the container 33. For example, the temperature of the sealing portion 16 is relatively low near the end of the heat dissipation portion 41 opposite to the X-ray generation portion 2a. Therefore, as shown in Figure 4, the delamination portion 8 can be omitted from the region of the inner wall of the container 33 that faces the end of the heat dissipation portion 41 opposite to the X-ray generation portion 2a. As mentioned above, in the region where the delamination portion 8 is not provided, the inner wall of the container 33 and the sealing portion 16 are joined. Therefore, movement of the sealing portion 16 can be suppressed. It is also possible to provide the delamination portion 8 over the entire inner wall of the container 33, or to provide the delamination portion 8 on the outer surfaces of the X-ray generation portion 2a and the heat dissipation portion 41. 【0063】 The effects of the sealing portion 16 can be the same as those of the sealing portion 6 described above, so a detailed explanation will be omitted. 【0064】 As described above, the invention according to this embodiment can be applied to either an X-ray tube that applies a high voltage to an anode structure or an X-ray tube that applies a high voltage to a cathode structure. 【0065】 Next, an example of a method for manufacturing an X-ray tube according to this embodiment will be given. In the following description, we will explain the manufacturing method of the X-ray tube 1 as an example, but the same method can be used for the manufacturing methods of the other embodiments of the X-ray tube described above. 【0066】 Furthermore, known technologies can be applied to the manufacturing and assembly of elements other than the sealing portion 6 and the release portion 8. Therefore, the manufacturing methods for the sealing portion 6 and the release portion 8 will be described below. In addition, the case in which the release portion 8 is provided on the inner wall of the container 3 will be described below. 【0067】 First, form container 3. Next, a release portion 8 is formed on the inner wall of the container 3 by applying a fluororesin coating and / or a release agent to the inner wall of the container 3. In this process, the release portion 8 can be formed over the entire inner wall of the container 3, or it can be left unreleased in a portion of the inner wall of the container 3. If a release agent is applied, it can be solidified by heating or other means. Furthermore, if a release portion 8 is provided on the outer surface of the X-ray generating unit 2 and the outer surface of the heat dissipation unit 4, at least one of the following may be applied to the outer surface of the X-ray generating unit 2 and the outer surface of the heat dissipation unit 4: a fluororesin coating and / or a mold release agent. 【0068】 Next, an X-ray generating unit 2, to which a heat dissipation unit 4 is joined, is placed inside the container 3 where the peeling section 8 is formed. Next, resin is filled into the space between the inner wall of the container 3 and the X-ray generating unit 2 and the heat dissipation unit 4. Next, the resin is heated to solidify it, forming a sealing portion 6 between the inner wall of the container 3 and the X-ray generating portion 2 and the heat dissipation portion 4. For example, if the resin is silicone resin, heating the silicone resin to about 50°C will cause it to melt. After filling with the molten silicone resin, heating the silicone resin to about 100°C will cause the silicone resin to solidify and form the sealing portion 6. 【0069】 In this case, when the sealing portion 6 reaches room temperature, it shrinks, causing the sealing portion 6 to separate from the peeling portion 8 in the area where the peeling portion 8 is provided, thus creating a gap between the sealing portion 6 and the peeling portion 8. By following the above procedure, the X-ray tube 1 can be manufactured. 【0070】 As described above, the method for manufacturing an X-ray tube according to this embodiment may include the following steps. A step of forming a release portion by applying a fluororesin coating and / or a release agent to at least a portion of either the inner wall of the container or the outer surface of an X-ray generating unit having a cathode structure and an anode structure. A process of installing an X-ray generating unit inside a container. A process of filling the space between the inner wall of the container and the X-ray generating unit with resin. A process of heating and solidifying the filled resin to form a sealing portion. The details of each step can be the same as those described above, so a detailed explanation will be omitted. 【0071】 Although several embodiments of the present invention have been illustrated above, these embodiments are presented as examples only and are not intended to limit the scope of the invention. With respect to the embodiments described above, any additions, deletions, or design changes made by those skilled in the art, or additions, omissions, or changes in processes, are also included within the scope of the present invention, as long as they retain the features of the present invention. 【0072】 For example, the shape, dimensions, material, and arrangement of each element of an X-ray tube are not limited to those exemplified and can be changed as appropriate. Furthermore, the elements of each embodiment described above can be combined as much as possible, and these combinations are also included within the scope of the present invention insofar as they include the features of the present invention. 【0073】 The following are additional notes regarding the embodiments described above. 【0074】 (Note 1) A container having space inside, An X-ray generating unit is provided inside the container and has a cathode structure and an anode structure. A sealing portion containing an insulating resin is provided between the inner wall of the container and the X-ray generating unit. A peeling portion is provided on at least a part of either the inner wall of the container or the outer surface of the X-ray generating portion, which suppresses bonding with the sealing portion. An X-ray tube equipped with [a specific feature / equipment]. 【0075】 (Note 2) The aforementioned release portion is an X-ray tube according to Appendix 1, comprising at least one of a fluororesin and a mold release agent component. 【0076】 (Note 3) During operation of the X-ray tube, the heat generated by the X-ray generating section causes the sealing section to expand, and the sealing section becomes joined to the peeling section. The X-ray tube according to Appendix 1 or 2, wherein when the X-ray tube is not in operation, the sealing portion contracts and the sealing portion separates from the peeling portion. 【0077】 (Note 4) The X-ray generating unit further comprises a heat dissipation section provided on the cathode structure side or the anode structure side of the X-ray generating unit, The peeling portion is provided on at least a part of at least one of the inner wall of the container, the outer surface of the X-ray generating portion, and the outer surface of the heat dissipation portion, as described in any one of the X-ray tubes described in any one of Appendix 1 to 3. 【0078】 (Note 5) An X-ray tube according to any one of appendices 1 to 4, further comprising a retainer provided on at least one of the end of the container and the inner wall of the container to suppress the movement of the sealing portion inside the container. 【0079】 (Note 6) The process involves forming a release portion by applying a fluororesin coating and / or a release agent to at least a portion of at least one of the outer surfaces of the X-ray generating section having the inner wall of the container and the cathode structure and anode structure, The steps include: installing the X-ray generating unit inside the container; A step of filling the space between the inner wall of the container and the X-ray generating unit with resin, The process involves heating the filled resin to solidify it and form a sealing portion, A method for manufacturing an X-ray tube equipped with [a specific component]. [Explanation of Symbols] 【0080】 1 X-ray tube, 1a central axis, 2 X-ray generation unit, 2a X-ray generation unit, 3 container, 4 heat dissipation unit, 6 sealing unit, 8 peeling unit, 11 X-ray tube, 11a central axis, 12 X-ray tube, 12a central axis, 21 enclosure, 22 output window, 23 anode structure, 24 cathode structure, 25 focusing electrode, 26 insulating enclosure, 28 anode structure, 29 cathode structure, 31 container, 32 container, 33 container, 41 heat dissipation unit

Claims

[Claim 1] A container having space inside, An X-ray generating unit is provided inside the container and has a cathode structure and an anode structure. A sealing portion containing an insulating resin is provided between the inner wall of the container and the X-ray generating unit. A peeling portion is provided on at least a part of either the inner wall of the container or the outer surface of the X-ray generating portion, which suppresses bonding with the sealing portion. An X-ray tube equipped with [a specific feature / equipment]. [Claim 2] The X-ray tube according to claim 1, wherein the release portion comprises at least one of a fluororesin and a mold release agent component. [Claim 3] During operation of the X-ray tube, the heat generated by the X-ray generating section causes the sealing section to expand, and the sealing section becomes joined to the peeling section. The X-ray tube according to claim 1 or 2, wherein when the X-ray tube is not in operation, the sealing portion contracts and the sealing portion separates from the peeling portion. [Claim 4] The X-ray generating unit further comprises a heat dissipation section provided on the cathode structure side or the anode structure side of the X-ray generating unit, The X-ray tube according to claim 1 or 2, wherein the peeling portion is provided on at least a portion of any one of the inner wall of the container, the outer surface of the X-ray generating portion, and the outer surface of the heat dissipation portion. [Claim 5] The X-ray tube according to claim 1 or 2, further comprising a retainer provided on at least one of the end of the container and the inner wall of the container to suppress the movement of the sealing portion inside the container. [Claim 6] The process involves forming a release portion by applying a fluororesin coating and / or a release agent to at least a portion of at least one of the following: the inner wall of the container and the outer surface of the X-ray generating unit having a cathode structure and an anode structure. The steps include: installing the X-ray generating unit inside the container; A step of filling the space between the inner wall of the container and the X-ray generating unit with resin, The process involves heating the filled resin to solidify it and form a sealing portion. A method for manufacturing an X-ray tube equipped with [a specific feature / equipment].

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