Vacuum chambers and vacuum chambers containing multiple sealable openings containing X-ray sources

Abstract

Furnishings, comprehensive: a vacuum chamber comprising a housing with a first sealable opening and a second sealable opening that is separate from the first sealable opening; a first compressible seal arranged near the first sealable opening and designed to form at least part of a vacuum seal over the first sealable opening when compressed; and a second seal that seals the second sealable opening.

Description

BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS Fig. Figure 1 is a block diagram of a vacuum chamber with a compressible seal according to some embodiments. Fig. 2 is a block diagram of a sealable opening of the vacuum chamber of Fig. 1 according to some embodiments. Fig. Figure 3 is a block diagram of a sealable opening of the vacuum chamber of Fig. 1 with a screw according to some embodiments. Fig. 4A-4C are block diagrams of a sealable opening of the vacuum chamber of Fig. 1 with a plurality of countersunk holes according to some embodiments. Fig. 5A-5B are block diagrams of a sealable opening of the vacuum chamber of Fig. 1 with alternative compression structures according to some embodiments. Fig. Figure 6 is a block diagram of an X-ray source according to some embodiments. Fig. Figure 7 is a block diagram of an X-ray imaging system according to some embodiments. DETAILED DESCRIPTION

[0001] Embodiments include vacuum chambers and vacuum chambers with multiple sealable openings containing X-ray sources. The treatment of a vacuum chamber, and in particular a vacuum chamber for an X-ray source, can involve purging the vacuum chamber with a gas, such as nitrogen (N₂) or an inert gas, such as argon (Ar). The gas can be used to pressurize the vacuum chamber. The gas can cause other materials, such as adsorbed materials like water (H₂O), to be removed from the surfaces of the vacuum chamber and suspend any trapped components in the gas. The gas can then be evacuated to remove the materials.

[0002] The embodiments described here can include a sealable opening that is separate from the opening through which gas is supplied. Gas containing the materials can escape through the sealable opening (or vent) to remove the materials. The embodiments described here can also be applied to pressure vessels instead of vacuum chambers. However, vacuum chambers are used as an example.

[0003] Fig. Figure 1 is a block diagram of a vacuum chamber with a compressible seal according to some embodiments. In some embodiments, the device comprises a vacuum chamber 100, which has a housing 104 with a first sealable opening 112 and a second sealable opening 108, which is separate from the first sealable opening 112. The vacuum chamber 100 separates an inner area 103 from an outer area 101. When the vacuum chamber 100 is sealed, a vacuum can be created in the inner area 103. The housing 104 may comprise a vacuum-compatible material or metal, such as stainless steel.

[0004] The setup can include any device with a vacuum chamber 100. For example, as described in more detail below, the vacuum chamber 100 can be part of an X-ray source or X-ray tube.

[0005] Examples of the first sealable opening 112 include a cylindrical hole that penetrates the housing 104. In other embodiments, the first sealable opening 112 can have different shapes, such as a rectangular cross-section, an elliptical cross-section, or the like.

[0006] Examples of the second sealable opening 108 include a metal pipe, such as a copper pipe or the like.

[0007] Fig. 2 is a block diagram of a sealable opening of the vacuum chamber of Fig. 1 according to some embodiments. With reference to the Fig. 1 and Fig. 2 In some embodiments, area 116 is an area that includes the first sealable opening 112.

[0008] A first compressible seal 120 is arranged at least around the first sealable opening 112 and is designed to form at least part of a vacuum seal over the first sealable opening 112 when compressed. The first compressible seal 120 may comprise a material that is compressible and vacuum-compatible, such as copper, stainless steel, oxygen-free high thermal conductivity (OFHC) material, oxygen-free electronic (OFE) copper, or the like. The first compressible seal 120 may comprise a material with a hardness, such as indentation hardness, that is lower than that of the housing 104.

[0009] In some embodiments, the first compressible seal 120 may include a sphere. A sphere is used as an example; however, the first compressible seal 120 may take other shapes, such as a cylinder, a rectangular prism, an ellipsoid, a torus, a washer, or the like. The first compressible seal 120 may be adapted to the shape of the first sealable opening 112.

[0010] In a specific example, the first compressible seal 120 is a copper sphere adapted to a cylindrical hole as the first sealable opening 112. The diameter of the copper sphere can be larger than the first sealable opening 112 by an amount such as 20%, 50%, or more.

[0011] As described in more detail below, a second seal can seal the second sealable opening 108. For example, the second seal can include a crimped copper pipe.

[0012] In some embodiments, the first compressible seal 120, when compressed, is arranged over the entire first sealable opening 112. The copper sphere described above is an example of a first compressible seal 120 that would cover the entire first sealable opening 112. In other embodiments, however, the first compressible seal 120 may include a torus or a washer. The torus or washer may be arranged around the first sealable opening 112. The compression structure 124 may include a structure which, when used to compress the first compressible seal 120, also forms part of the complete vacuum seal over the first sealable opening 112.In contrast, in some embodiments, the first compressible seal 120, when compressed, can form the complete vacuum seal over the first sealable opening 112 without relying on the compression structure 124. The compression structure 124 may include a region or shape corresponding to the opening of the recess 126, such as a cylinder or a rectangular prism.

[0013] In some embodiments, the compression structure 124 can be attached to the housing 104 in various ways. In one example, the compression structure 124 can be welded to the housing 104 while compressing the first compressible seal 120. In another example, the compression structure 124 can be riveted to the housing 104 while compressing the first compressible seal 120.

[0014] In some embodiments, the housing 104 includes convex areas 104a. The convex areas 104a can allow the first compressible seal 120 to deform around the convex areas 104a, thereby forming the vacuum seal.

[0015] When the vacuum seal is formed over the first sealable opening 112, the vacuum seal can have leakage rates of less than 1x10 -11 Millibar liters per second (mbar * L / sec) or 7.50 x 10 -12 Torr * L / sec (Torr liters per second).

[0016] In some embodiments, the first compressible seal 120 can be replaced by a first seal 120 that seals in a manner in which no compression takes place.

[0017] In some embodiments, the first compressible seal 120 can comprise a tubular structure that can be sealed by compressing the tube. For example, a copper tube can be used as the first compressible seal 120 and sealed by compressing the walls of the copper tube.

[0018] In some embodiments, the compression structure 124 can be omitted. The first compressible seal 120 can be crimped to both compress the first compressible seal 120 to form the vacuum seal over the first sealable opening 112 and to secure the first compressible seal 120 to the housing 104.

[0019] Fig. Figure 3 is a block diagram of a sealable opening of the vacuum chamber of Fig. 1 with a screw according to some embodiments. In some embodiments, the components can be those of Fig. 2. The compression structure 124 may, however, include a screw 124a. The screw 124a is designed to compress the first compressible seal 120. In some embodiments, the screw 124a may be a headless set screw, while in other embodiments, the screw 124a may have a head. The screw 124a may be of sufficient length so that the head does not contact the housing 104 over a compression area of ​​the first compressible seal 120 sufficient to create the vacuum seal. Thus, the head of the screw 124a does not limit the compression of the compressible seal 120. An area of ​​the housing 104 (e.g., within the recess 126) adjacent to the first sealable opening 112 has a thread 125a that meshes with a thread 125b of the screw 124a.In some embodiments, the joining of the thread 125 can also form an additional part of the vacuum seal over the first sealable opening 112.

[0020] In some embodiments, the first sealable opening 112 is arranged within a recess 126 in an outer wall of the housing 104. The recess 126 extends the wall of the housing 104 into the interior 103 of the vacuum chamber 100. When compressed, a metal ball contacts a circumference of the first sealable opening at the regions 104a and a side wall 126a of the recess 126.

[0021] In some embodiments, the thread 125a on the housing 104 does not extend completely into the recess 126. The thread 125a may terminate in such a way that the first compressible seal 120 on the side wall 126a, where there is no thread 125a, can deform. In some embodiments, the screw 124a extends beyond the end of the thread 125 in the recess 126. Even if the first compressible seal 120 deforms around the screw 124a, it consequently does not contact the thread 125a.

[0022] Although the tip of screw 124a, which contacts the first compressible seal 120, has been shown to be flat, the shape may differ in other embodiments. For example, the shape may be a convex conical shape, a concave conical shape, a convex or concave spherical shape, or the like.

[0023] Fig. 4A-4C are block diagrams of a sealable opening of the vacuum chamber of Fig. 1 with a plurality of countersunk bores according to some embodiments. In some embodiments, the housing 104 of the vacuum chamber 100 has a countersunk bore 127 as the recess 126. The first sealable opening 112 is arranged at the bottom of the countersunk bore 127.

[0024] The bottom of the countersunk borehole 127 can have a variety of shapes. For example, the bottom of the countersunk borehole 127 can have a flat surface, as in Fig. Figure 2 illustrates a curved surface, as in Fig. 4B illustrates a concave conical surface, as shown in Fig. 4A illustrates; a convex conical surface, as in Fig. 4C illustrates, or exhibits the like. Each of these shapes may further include the areas 104a about which the first compressible seal 120 can deform. In some embodiments, an angle 127a of the countersunk bore 127 may be approximately 118 + / - 10 degrees. An angle 127b of the countersunk bore 127 may be approximately 62 + / - 10 degrees. Although certain angles or ranges of angles serve as examples, the angles may differ in other embodiments.

[0025] Fig. 5A-5B are block diagrams of a sealable opening of the vacuum chamber of Fig. 1 with alternative compression structures according to some embodiments. With reference to Fig. 5A In some embodiments, the compression structure 124b can include a part 124b-1 that contacts the first compressible seal 120. A second part 124b-2 can be located sufficiently far from part 124b-1 such that, when the second part 124b-2 is attached to the housing 104 by fasteners 129, it does not contact the housing 104. Thus, the first compressible seal 120 can be compressed with the required force to create the vacuum seal before the second part 124b-2 contacts the housing 104. The alternative compression structure from Fig. 5 can be used if the screw 124a, as in Fig. 3 described, or another compression structure 124 no longer ensures sufficient sealing.

[0026] With reference to Fig. 5B can be the compression structure 124b in some embodiments of that of Fig. 5A. However, instead of having multiple fastening elements 129, the compression structure 124b can be attached to the housing 104 at an anchor point 131. Examples of the anchor point 131 include a hinge, a rod attached to the housing 104 that is mated with a corresponding channel of the compression structure 124b, a groove that is mated with a corresponding lug of the compression structure 124b, or the like. A hinge is illustrated as an example of an anchor point 131.

[0027] The anchor point 131 allows the compression structure 124b to rotate about the anchor point 131. In some embodiments, the anchor point 131 is designed to resist rotation of the compression structure 124b when forces are exerted on the compression structure 124b by the fastener 129 and the first compressible seal 120. That is, when the fastener 129 is tightened, the anchor point 131 causes at least part of the force to be exerted on the first compressible seal 120.

[0028] Fig. Figure 6 is a block diagram of an X-ray source according to some embodiments. In some embodiments, an X-ray source 200 includes a vacuum chamber 100, as described above. The X-ray source 200 may include an electron source 140 designed to generate an electron beam 160. A target 156 is arranged on an anode array within the vacuum chamber and is designed to generate radiation in response to the electron beam 160. Examples of the target 156 include a material designed to generate X-rays in response to the electron beam 160, such as tungsten (W), molybdenum (Mo), rhodium (Rh), silver (Ag), rhenium (Re), palladium (Pd), or the like.

[0029] In some embodiments, the target 156 is arranged on the shortest gas path between the first sealable opening 112 and the second sealable opening 108. As a result, it is more likely that gas entering the second sealable opening 108 will pass the target 156 on its way through the first sealable opening 112.

[0030] In some embodiments, the target 156 is arranged on a rotor assembly 144 (or bearing assembly or anode assembly). For brevity, the rotor assembly, bearing assembly, or anode assembly is referred to herein as the rotor 144. The rotor 144 may be configured to rotate a bearing assembly during operation. The first sealable opening is located on a first side of the rotor 144, and the second sealable opening 108 is located on a second side of the rotor 144, opposite the first side of the rotor 144. As a result, gas flowing from the second sealable opening 108 to the first sealable opening 112 may be more likely to pass through the rotor 144. As used herein, "side" refers to a plane shape through a major surface of the target area.The first side of the rotor 144 refers to a side facing the electron source 140, and the second side of the rotor 144 refers to a side facing away from the electron source 140 (towards a stator or heat sinks 148 and 152).

[0031] In some embodiments, the rotor 144 includes a first heat sink 148 on one side of the rotor 144 opposite the target 156. The housing 104' includes a second heat sink 152, which engages with the first heat sink 148. A gap may be present between the heat sinks 148 and 152 to allow the rotor 144 to move relative to the housing 104'. The gap may be relatively small to accommodate multiple fins of the heat sinks 148 and 152, to increase energy transfer from the rotor 144 to the housing 104', or for the like. Consequently, it may be difficult to remove adsorbed materials on the heat sinks 148 and 152 solely by pressurizing the housing 104' with a gas and evacuating the gas, as is used in conventional purging procedures.However, if a shortest gas path between the first sealable opening 112 and the second sealable opening 108 has a space between the engaging parts of the first heat sink 148 and the second heat sink 152, it may be more likely that the gas flowing along this path will pass over the surfaces with the adsorbed materials in order to remove the adsorbed materials from the housing 104'.

[0032] In some embodiments, several sealable openings similar to the first sealable opening 112 may be arranged on the housing 104'. For example, the housing 104' of the vacuum chamber of the X-ray source 200 has a third sealable opening 116', which is separate from the first sealable opening 112 and the second sealable opening 108. A third compressible seal (unnumbered) is arranged at least around the third sealable opening 116' and is designed to form at least part of a vacuum seal over the third sealable opening 116' when compressed, similarly to the first compressible seal 120 described above.

[0033] Some embodiments include a method for evacuating a vacuum chamber. The various vacuum chambers 100 and X-ray sources 200 and their components are used as examples. In some embodiments, a vacuum chamber 100 is provided, comprising a housing 104 with a first sealable opening 112 and a second sealable opening 108, which is separate from the first sealable opening 108. A gas is passed from the second sealable opening 108 through the vacuum chamber 100 to the first sealable opening 112 until a threshold condition is met. For example, the vacuum / gas source 111 may be configured to supply gaseous nitrogen to the interior of the housing 104 / 104'.

[0034] The threshold condition can be a variety of conditions. For example, the threshold can be a time period. Thus, the gas can be supplied through the vacuum / gas source 111 for a predetermined time period, determined to be sufficient to remove a desired amount of material from the vacuum chamber 100, so that a desired vacuum level, such as a vacuum level on the order of 10⁻⁵, is reached. -7 up to 10 -9 Torr or the like, is reached. In another example, the threshold can include a property of the gas escaping from the first sealable opening 112 that may indicate that a sufficient quantity of material has been removed. The threshold condition can be any condition that indicates that a sufficient quantity of material has been removed.

[0035] Once the condition is met, the first compressible seal 120 can be compressed at the first sealable opening 112 to create a vacuum seal over the first sealable opening 112. The compression can be carried out according to the various compression structures 124 described above. In some embodiments, the sealing can be repeated for all sealable openings except for one, which can be used to evacuate the housing 104 / 104'. In some embodiments, a cover is formed over the first compressible seal 120. For example, after a screw 124a or another compression structure 124 has been used for compression, the first compressible seal 120, a cover such as epoxy, a press-fit cap, or the like can be placed over the screw 124a or other compression structure 124.

[0036] The gas can be evacuated from the vacuum chamber 100 through the vacuum / gas source 111. Once a desired vacuum level is reached, the second sealable opening can be sealed to form a vacuum seal over the second sealable opening 108 after the gas has been evacuated from the vacuum chamber 100. For example, the second sealable opening 108 can be an opening in a copper tube. The copper tube can be compressed or pinched to form a vacuum-compatible seal over the opening in the copper tube.

[0037] In some embodiments, as described above, a screw 124a can be used to compress the first compressible seal 120. For example, while gas escapes through the first sealable opening 112, a copper ball can be placed over the first sealable opening 112. An adjusting screw 124a can be inserted into the threaded recess 126. In other embodiments, the copper ball and the adjusting screw 124a can be installed before gas is supplied, but still allow gas to escape through the first sealable opening 112. The adjusting screw 124a can be tightened until a desired level of compression is achieved for the required quality of a vacuum seal, while the gas escapes. Sealing the first sealable opening 112 with a copper ball is an example of compressing the first compressible seal 120 across the entire first sealable opening 112.As part of the compression of the copper sphere, the copper sphere can be compressed into the side walls 126a of the recess 126.

[0038] The first compressible seal 120 may offer advantages over a tubular seal, such as the pinched or compressed copper tube used to seal the second sealable opening 108. For example, the first compressible seal 120 may be reusable, meaning the seal can be opened and resealed. The first compressible seal 120 may be more durable than the tubular seal when subjected to force, whereas the tubular seal may be damaged, open, and leak under such force. The first compressible seal 120 may also be safer to handle, as it does not have sharp edges like the tubular seal that could cut or scratch an operator or user.

[0039] As described above, the vacuum chamber 100 or the X-ray source 200 can have several sealable openings. The gas can be passed from the second sealable opening 108 through each of them. Each of these can be sealed, as described above with reference to the first sealable opening 112.

[0040] In some embodiments, the vacuum chamber 100 includes an electron source 140 and a rotor 144. Guiding the gas through the vacuum chamber 100 from the second sealable opening 108 to the first sealable opening 112 comprises guiding the gas between the rotor 144 and the housing 104' along a path between the second sealable opening 108 and the first sealable opening 112. As described above, this path may include space between the heat sinks 148 and 152.

[0041] Some embodiments include means for enclosing a vacuum, such as the housings 104 / 104'. Some embodiments include means for generating X-rays arranged within the means for enclosing a vacuum, such as the electron source 140 and the target 156. Some embodiments include first means for penetrating the means for enclosing the vacuum, such as the first sealable opening 112 or the third sealable opening 116'. Some embodiments include second means for penetrating the means for enclosing the vacuum, such as the second sealable opening 108. Some embodiments include first compressible means for sealing the first means for penetrating the means for enclosing the vacuum, such as the first compressible seal 120.Some embodiments include second means for sealing the second means for penetrating the means for enclosing the vacuum, such as sealing a copper tube. Some embodiments include means for compressing the first compressible means, such as screw 124a.

[0042] Fig.Figure 7 is a block diagram of an X-ray imaging system according to some embodiments. The X-ray imaging system 700 comprises an X-ray source 702 and a detector 710. The X-ray source 702 may include the X-ray source 200 or the like, as described above. In some embodiments, the X-ray source 702 comprises multiple field emitters (FE) 724. Electron beams from the field emitters 724 can be directed onto an anode 726 to generate X-rays 720. The X-ray source 702 is arranged relative to the detector 710 such that X-rays 720 can be generated to pass through a sample 722 and be detected by the detector 710. In some embodiments, the detector 710 is part of a medical imaging system. In other embodiments, the X-ray imaging system 700 may include a portable vehicle scanning system as part of a cargo scanning system.System 700 can be any system that can include an X-ray source 702.

[0043] Some embodiments include a device comprising: a vacuum chamber 100 comprising a housing 104, 104' with a first sealable opening 112 and a second sealable opening 108 separated from the first sealable opening 112; a first compressible seal 120 arranged near the first sealable opening 112 and designed, when compressed, to form at least part of a vacuum seal over the first sealable opening 112; and a second seal sealing the second sealable opening 108.

[0044] In some embodiments, the first compressible seal 120, when compressed, is arranged over the entire first sealable opening 112.

[0045] In some embodiments, the device further comprises a screw 124a which compresses the first compressible seal 120; wherein a region of the housing 104, 104' next to the first sealable opening 112 has a thread which is joined to a thread of the screw 124a.

[0046] In some embodiments, the housing 104, 104' of the vacuum chamber 100 has a countersunk bore; and the first sealable opening 112 is arranged at the bottom of the countersunk bore.

[0047] In some embodiments, the bottom of the countersunk bore has the following: a flat surface; a curved surface; a concave conical surface; or a convex conical surface.

[0048] In some embodiments, the first compressible seal 120 was a metal ball before compression.

[0049] In some embodiments, the first sealable opening 112 is arranged within a recess in an outer wall of the housing 104, 104'; and the metal ball, when compressed, touches a circumference of the first sealable opening 112 and a side wall of the recess.

[0050] In some embodiments, the housing 104, 104' of the vacuum chamber 100 has a third sealable opening 116' which is separate from the first sealable opening 112 and the second sealable opening 108; and the device further comprises a third compressible seal 120 which is arranged at least around the third sealable opening 116' and is designed to form at least part of a vacuum seal over the third sealable opening 116' when compressed.

[0051] In some embodiments, the device further comprises a compression structure 124, 124b designed to compress the first compressible seal 120; and a fastening element 129 designed to exert a force on the compression structure 124, 124b to cause the compression structure 124, 124b to compress the first compressible seal 120.

[0052] In some embodiments, the device further comprises an anchor point 131 which is attached to the housing 104, 104' and couples the compression structure to the housing 104, 104'.

[0053] In some embodiments, the device further comprises an electron source 140 arranged within the vacuum chamber 100 and designed to generate an electron beam 160; and a target 156 arranged within the vacuum chamber 100 and designed to generate radiation in response to the electron beam 160, wherein the device is a radiation tube or an X-ray source.

[0054] In some embodiments, the target 156 is arranged on a shortest gas path between the first sealable opening 112 and the second sealable opening 108.

[0055] In some embodiments, the target 156 is arranged on a rotor assembly 144; the first sealable opening 112 is located on a first side of the target; and the second sealable opening 108 is located on a second side of the target, opposite the first side of the target 156.

[0056] In some embodiments, the target 156 is arranged on a rotor assembly 144; the rotor assembly 144 includes a first heat sink 148 on one side of the rotor assembly opposite the target; the housing 104, 104' includes a second heat sink 152 which engages with the first heat sink 148; and a shortest gas path between the first sealable opening 112 and the second sealable opening 108 includes a space between the engaging parts of the first heat sink 148 and the second heat sink 152.

[0057] Some embodiments include a method comprising: providing a vacuum chamber 100 comprising a housing 104, 104' with a first sealable opening 112 and a second sealable opening 108 separated from the first sealable opening 112; passing a gas through the vacuum chamber 100 from the second sealable opening 108 to the first sealable opening 112 until a threshold condition is met; compressing a first compressible seal 120 at the first sealable opening 112 to create a vacuum seal over the first sealable opening 112.

[0058] In some embodiments, the method further comprises evacuating the gas from the vacuum chamber 100; and sealing the second sealable opening 108 to form a vacuum seal over the second sealable opening 108 after evacuating the gas from the vacuum chamber 100.

[0059] In some embodiments, compressing the first compressible seal 120 at the first sealable opening 112 includes compressing the first compressible seal 120 with a screw 124a.

[0060] In some embodiments, compressing the first compressible seal 120 at the first sealable opening 112 includes compressing the first compressible seal 120 over the entire first sealable opening 112.

[0061] In some embodiments, compressing the first compressible seal 120 at the first sealable opening 112 includes compressing a metal ball onto the first sealable opening 112.

[0062] In some embodiments, compressing the first compressible seal 120 at the first sealable opening 112 includes compressing the metal ball into side walls of a recess in the housing 104, 104' which has the first sealable opening 112.

[0063] In some embodiments, the housing 104, 104' of the vacuum chamber 100 has a third sealable opening 116' which is separate from the first sealable opening 112 and the second sealable opening 108; and the method further comprises: guiding the gas through the vacuum chamber 100 from the second sealable opening 108 to the third sealable opening 116' until the threshold condition is met; and compressing a third compressible seal 120 at the third sealable opening 116' to create a vacuum seal over the third sealable opening 116'.

[0064] In some embodiments, the vacuum chamber 100 includes an electron source and a rotor; and the guiding of the gas through the vacuum chamber 100 from the second sealable opening 108 to the first sealable opening 112 comprises guiding the gas between the rotor 144 and the housing 104, 104' along a path between the second sealable opening 108 and the first sealable opening 112.

[0065] Some embodiments include an X-ray device comprising: means for enclosing a vacuum; means for generating X-rays arranged within the means for enclosing a vacuum; first means for penetrating the means for enclosing the vacuum; second means for penetrating the means for enclosing the vacuum; and first compressible means for sealing the first means for penetrating the means for enclosing the vacuum; and second means for sealing the second means for penetrating the means for enclosing the vacuum.

[0066] In some embodiments, the X-ray device further comprises means for compressing the first compressible means.

[0067] Some embodiments include a device comprising: a vacuum chamber 100 comprising a housing 104, 104' with a first sealable opening 112 and a second sealable opening 108 separated from the first sealable opening 112; a first seal arranged at least around the first sealable opening 112 and designed to form at least part of a vacuum seal over the first sealable opening 112 when sealed; and a second seal sealing the second sealable opening 108.

[0068] Although the structures, devices, methods, and systems have been described according to specific embodiments, the person skilled in the art will readily recognize that many variations of these embodiments are possible, and therefore any variations should be considered to be within the nature and scope of protection disclosed herein. Accordingly, a person skilled in the art may make many modifications without deviating from the nature and scope of protection of the attached claims.

[0069] The claims following this written disclosure are hereby expressly incorporated into the present written disclosure, each claim constituting a separate embodiment. This disclosure includes all permutations of the independent claims with their dependent claims. Furthermore, additional embodiments derived from the following independent and dependent claims are also expressly incorporated into the present written description. These additional embodiments are formed by replacing the dependency of a given dependent claim with the phrase "one of the claims beginning with claim [x] and ending with the claim immediately preceding it," where the term "[x]" in parentheses is replaced by the number of the last-mentioned independent claim.For example, in the first set of claims, which begins with independent claim 1, claim 4 may be dependent on either claim 1 or 3, with these separate dependencies resulting in two different embodiments; claim 5 may be dependent on any one of claims 1, 3 or 4, with these separate dependencies resulting in three different embodiments; claim 6 may be dependent on any one of claims 1, 3, 4 or 5, with these separate dependencies resulting in four different embodiments; and so on.

[0070] The use of the term "first" in the claims with respect to a feature or element does not necessarily imply the existence of a second or additional such feature or element. Elements specifically named in the middle-plus-function format, if present, shall be construed as encompassing the corresponding structure, material, or actions described herein and their equivalents pursuant to 35 USC § 112(f). Embodiments of the invention for which exclusive ownership or privilege is claimed are defined as follows.

Claims

[1] Institution, encompassing: a vacuum chamber comprising a housing with a first sealable opening and a second sealable opening that is separate from the first sealable opening; a first compressible seal arranged near the first sealable opening and designed to form at least part of a vacuum seal over the first sealable opening when compressed; and a second seal that seals the second sealable opening. [2] Device according to claim 1, wherein: the first compressible seal, when compressed, is positioned over the entire first sealable opening. [3] Device according to claim 1 or claim 2, further comprising: a screw that compresses the first compressible seal; wherein an area of ​​the housing next to the first sealable opening has a thread which is joined to a thread of the screw. [4] Device according to one of claims 1-3, wherein: the housing of the vacuum chamber has a countersunk bore; and the first sealable opening is located at the bottom of the countersunk borehole. [5] Device according to claim 4, wherein the bottom of the counterbore comprises the following: a flat surface; a curved surface; a concave conical surface; or a convex conical surface. [6] Device according to any one of the preceding claims, wherein: The first compressible seal was a metal ball before compression. [7] Device according to claim 6, wherein: the first sealable opening is located within a recess in an outer wall of the housing; and The metal ball, when compressed, touches a circumference of the first sealable opening and a side wall of the recess. [8] Device according to any one of the preceding claims, wherein: the housing of the vacuum chamber has a third sealable opening that is separate from the first sealable opening and the second sealable opening; and The device further comprises a third compressible seal arranged at least around the third sealable opening and designed to form at least part of a vacuum seal over the third sealable opening when compressed. [9] Establishment according to any of the preceding claims, further comprising: a compression structure designed to compress the first compressible seal; and a fastening element designed to exert a force on the compression structure to cause the compression structure to compress the first compressible seal. [10] Device according to claim 9, further comprising: an anchor point that is attached to the housing and couples the compression structure to the housing. [11] Equipment according to any of the preceding claims, further comprising: an electron source arranged within the vacuum chamber and designed to generate an electron beam; and a target arranged within the vacuum chamber and designed to generate radiation in response to the electron beam, wherein the apparatus is a radiation tube or an X-ray source. [12] Device according to claim 11, wherein: The target is positioned on the shortest gas path between the first sealable opening and the second sealable opening. [13] Device according to claim 11, wherein: the target is arranged on a rotor assembly; the first sealable opening is located on a first side of the target; and the second sealable opening is located on a second side of the target, opposite the first side of the target. [14] Device according to claim 11, wherein: the target is arranged on a rotor assembly; the rotor arrangement includes a first cooling body on a side of the rotor arrangement opposite the target; the housing includes a second heat sink that engages with the first heat sink; and a shortest gas path between the first sealable opening and the second sealable opening includes a space between the engaging parts of the first heat sink and the second heat sink. [15] X-ray apparatus comprising: Means for enclosing a vacuum; Means for generating X-rays, arranged within means for enclosing a vacuum; first means for penetrating the means for enclosing the vacuum; second means for penetrating the means for enclosing the vacuum; and first compressible means for sealing, first means for penetrating, means for enclosing the vacuum; and second means for sealing the second means for penetrating the means for enclosing the vacuum. [16] X-ray device according to claim 15, further comprising: Means for compressing the first compressible means. [17] Institution, comprehensive: a vacuum chamber comprising a housing with a first sealable opening and a second sealable opening that is separate from the first sealable opening; a first seal arranged at least around the first sealable opening and designed to form at least part of a vacuum seal over the first sealable opening when sealed; and a second seal that seals the second sealable opening.

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