Decontamination fluid supply device, and environmental control device equipped with decontamination fluid supply device

Abstract

A high-quality decontamination fluid is supplied to the area to be decontaminated at a sufficient flow rate. [Solution] A decontamination fluid supply device that supplies decontamination fluid to a space to be decontaminated is The system includes a particle generation unit that atomizes the decontamination liquid to produce fine particles for decontamination. The particle generation unit is located at the bottom of the case and has multiple spray nozzles that atomize the decontamination liquid using pressurized gas to produce fine particles of the decontamination liquid. The case is provided with multiple pressurized gas supply ports for supplying pressurized gas to each of the multiple spray nozzles. Each spray nozzle has a pressurized gas discharge path with a pressurized gas discharge port for discharging pressurized gas and a liquid discharge path with a liquid discharge port for discharging the decontamination liquid stored at the bottom of the case. The negative pressure created by discharging pressurized gas from the pressurized gas discharge port draws the stored decontamination liquid through the liquid discharge path to the liquid discharge port, where it is atomized when it merges with the pressurized gas discharged from the pressurized gas discharge port.

Description

Technical Field

[0001] The present invention relates to a decontamination fluid supply device and an environmental control device including the decontamination fluid supply device.

Background Art

[0002] For example, in the field of pharmaceuticals, inside a workroom of an environmental control device that is isolated from the external atmosphere and internally decontaminated (reducing target microorganisms to a predetermined level by a reproducible method), filling and sealing of drugs are performed in containers such as vials, ampoules, syringes, etc. Examples of environmental control devices include isolators, biosafety cabinets, clean rooms, etc. To decontaminate the workroom, a decontamination fluid containing a decontamination component obtained by vaporizing or atomizing a decontamination liquid such as hydrogen peroxide water is supplied to the workroom. Patent Document 1 describes supplying a decontamination fluid to an air circulation path inside an isolator for decontamination of the inside of the isolator.

[0003] As devices for generating decontamination fluid, there are various types such as those that evaporate the decontamination liquid by heating, those that atomize the decontamination liquid using a two-fluid nozzle, those that atomize the decontamination liquid by ultrasonic vibration, etc. (see Patent Documents 2 to 4, etc.).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Summary of the Invention

Problems to be Solved by the Invention

[0005] One object of the present invention is to provide a technology that can supply a high-quality decontamination fluid (for example, one that does not contain droplets of problematic size or quantity) to a space to be decontaminated at a sufficient flow rate.

[0006] Another object of the present invention is to provide a technology that allows for the independent control of the humidity (or amount of water vapor / hydrogen peroxide vapor, etc.) and the concentration of decontamination components of the decontamination fluid supplied to the space to be decontaminated. [Means for solving the problem]

[0007] According to one embodiment of the present invention, A decontamination fluid supply device that supplies a decontamination fluid (decontamination fluid) to a space to be decontaminated, The system includes a microparticle generating unit that atomizes a liquid containing decontamination components (decontamination liquid) to produce fine particles for decontamination, and the microparticle generating unit is A case configured to store decontamination liquid at the bottom, A plurality of spray nozzles are provided at the bottom of the case, which atomize the decontamination liquid using pressurized gas to generate fine particles of the decontamination liquid, The case is provided with a liquid supply port for supplying decontamination liquid into the interior of the case, The case is provided with a plurality of pressurized gas supply ports for supplying pressurized gas to each of the plurality of spray nozzles, The case is provided with a decontamination fluid outlet port for discharging a decontamination fluid, which consists of a mixed fluid of fine particles of the decontamination liquid sprayed from the spray nozzle and pressurized gas, to the outside of the case. It has, A decontamination fluid supply device is provided, wherein each spray nozzle comprises a gas discharge path having a gas discharge port for discharging pressurized gas supplied from a corresponding pressurized gas supply port, and a liquid discharge path having a liquid discharge port for discharging decontamination liquid stored at the bottom of the case, and is configured such that the decontamination liquid stored at the bottom of the case is drawn in through the liquid discharge path by the negative pressure generated by discharging pressurized gas from the gas discharge port to the liquid discharge port, and is atomized when it merges with the gas discharged from the gas discharge port.

[0008] According to the above embodiment of the present invention, a high-quality decontamination fluid can be supplied to the space to be decontaminated at a sufficient flow rate.

[0009] According to another embodiment of the present invention, A decontamination fluid supply device that supplies a decontamination fluid (decontamination fluid) to a space to be decontaminated, A decontamination fluid generating unit, which generates decontamination fine particles or decontamination gas by atomizing or vaporizing a liquid containing decontamination components (decontamination liquid) inside the unit, A pressurized gas supply pipe for supplying pressurized gas to the decontamination fluid generation unit, A decontamination fluid supply pipe supplies the decontamination fine particles or a mixed fluid of decontamination gas and pressurized gas generated by the decontamination fluid generation unit to the space to be decontaminated, A humidity control unit that adjusts the humidity of the pressurized gas supplied to the decontamination fluid generation unit, Equipped with, The pressurized gas is used, at least, as a carrier gas for transporting decontamination particles or decontamination gas generated inside the decontamination fluid generation unit. A decontamination fluid supply device is provided.

[0010] According to the above embodiment of the present invention, the humidity and concentration of decontamination components of the decontamination fluid supplied to the space to be decontaminated can be controlled independently of each other.

[0011] According to yet another embodiment of the present invention, A decontamination fluid supply device for supplying a decontamination fluid to a decontamination target space, a decontamination fluid generation unit that generates decontamination fine particles or decontamination gas by atomizing or vaporizing a liquid containing a decontamination component (decontamination liquid) therein, a first pipe for flowing a gas not containing the decontamination liquid toward the decontamination target space, a second pipe for flowing the decontamination fine particles or decontamination gas generated by the decontamination fluid generation unit toward the decontamination target space, a humidity adjustment unit for adjusting the humidity of the gas flowing through the first pipe toward the decontamination target space, and is provided with, the second pipe merges with the first pipe at a junction set in the first pipe, and is configured to supply a mixed fluid in which the gas not containing the decontamination liquid and the decontamination fine particles or decontamination gas are mixed to the decontamination target space. A decontamination fluid supply device.

[0012] According to the embodiment of the present invention, the humidity and decontamination component concentration of the decontamination fluid supplied to the decontamination target space can be controlled independently of each other.

[0013] Further features of the present invention are described in the dependent claims and the "Mode for Carrying Out the Invention".

Brief Description of the Drawings

[0014] [Figure 1] It is a front view of an isolator which is an example of an environmental control device including a decontamination fluid supply device and a work room as a decontamination target space which is a supply destination of the decontamination fluid. [Figure 2] It is a longitudinal sectional view of the isolator along the line II-II in FIG. 1. [Figure 3] It is a schematic view showing the air flow in the isolator (in this figure, the baffle plate and the HEPA filter in its vicinity are shown at positions different from the actual positions). [Figure 4]It is a cross-sectional view of the isolator along the cross-section line IV-IV in FIG. 1. [Figure 5] It is a schematic longitudinal cross-sectional view showing a configuration example of a fine particle generation unit of a decontamination fine particle generation device incorporated in the isolator shown in FIG. 1. [Figure 6] It is a schematic plan view showing the positional relationship between the components of the fine particle generation unit shown in FIG. 5. [Figure 7] It is a pneumatic circuit diagram for explaining the flow of fluid in a configuration example of a decontamination fine particle generation device incorporated in the isolator shown in FIG. 1.

Embodiments for Carrying Out the Invention

[0015] Hereinafter, embodiments of the invention will be described with reference to FIGS. 1 to 7.

[0016] First, referring to FIGS. 1 to 4, an isolator, which is an example of an environmental control device having a work chamber 10 as a decontamination target space to which a decontamination fluid (meaning a fluid used for decontamination. The same applies hereinafter) is supplied from a decontamination fluid supply device 300 described later, will be briefly described. The environmental control device may be a biosafety cabinet, a clean room, etc., and the decontamination fluid supply device 300 may supply the decontamination fluid to the work chamber of these environmental control devices.

[0017] The isolator 1 has a work chamber 10 at its front part. An opening is provided in the front panel of the work chamber 10, and this opening can be hermetically closed by a transparent door 12. The door 12 can be opened and closed via a hinge 13 provided at its upper end.

[0018] The door 12 has a plurality of glove connection ports 15 (attachment ports), and as shown in FIG. 2, gloves 14 (long gloves) are attached thereto in an airtight state. The gloves 14 are not shown in FIG. 1. An operator in front of the isolator 1 can perform operations on objects in the work chamber via the gloves 14 without touching the atmosphere in the work chamber 10.

[0019] Above and behind the work chamber 10, a non-working space, a return chamber (return passage) 16, is provided. The return chamber is roughly an inverted L-shaped space when viewed in longitudinal section. The term "return chamber" is used to mean the chamber (passage) through which air that has been blown from the fan filter unit 18 (described later) into the work chamber 10 and then flowed out of the work chamber 10 is returned to the fan filter unit 18 (described later).

[0020] A fan filter unit 18 is mounted on the ceiling panel (ceiling wall) 10a of the workroom 10. The fan filter unit 18 is a disassemblable assembly comprising one or more fans 181, one or more HEPA filters (first filters) 182, and a cover 183 that covers the HEPA filters 182.

[0021] By driving the fan 181, the air in the return chamber 16 passes through the HEPA filter 182 and is blown downward into the work chamber 10.

[0022] The rear panel (rear wall) 10b of the workroom 10 is provided with two rectangular openings (not shown), each fitted with a filter unit. Each filter unit has a high-performance air filter, specifically a HEPA filter 22. Air blown into the workroom 10 from the fan filter unit 18 passes through the HEPA filter 22 and flows out into the return chamber 16, then passes through the fan filter unit 18 again and is returned to the workroom 10. As described above, the air in the workroom 10 is highly purified by the circulation of air through the HEPA filter 182 and the HEPA filter 22.

[0023] The filter unit equipped with the HEPA filter 22 is preferably the filter device (SurePack System (trademark)) or filter unit described in the applicant's patent No. 5554553 (Title of invention: Filter device and method for replacing the same) or patent No. 06993122 (Title of invention: Filter unit for air purifier). This filter unit is attached to the rear panel 10b using screws. When removing a used filter unit from the rear panel 10b, the filter surface (the surface facing the workroom) to which hazardous substances have adhered is covered with a sealing plate, thereby enabling the replacement of the filter device without scattering the captured hazardous substances into the surroundings.

[0024] To ensure uniform airflow, a blowing screen 20 made of a fine mesh is provided directly below the fan filter unit 18, and a baffle plate 30 with numerous slits is provided directly in front of the inlet surface of the HEPA filter 22.

[0025] An air supply unit 24 and an exhaust unit 26 are provided on the left and right sides of the upper part of the return chamber 16.

[0026] The air supply unit 24 includes an air supply duct 241 that communicates with the space outside the isolator 1, an air supply fan 242, and an air supply damper 243. The air supply flow rate can be adjusted by adjusting the rotation speed of the air supply fan 242 and / or the opening degree of the air supply damper 243. It is preferable that the air supply unit 24 be provided with a pre-filter 245 to remove relatively large dust particles and other debris from the intake air.

[0027] The exhaust unit 26 includes an exhaust duct 261, an exhaust fan 262, a catalytic converter unit 263, and an exhaust damper 264. The exhaust flow rate can be adjusted by adjusting the rotational speed of the exhaust fan 262 and / or the opening degree of the exhaust damper 264.

[0028] A pressure sensor (not shown) is installed in the work chamber 10. A controller (not shown) controls the operation of the air supply unit 24 and / or exhaust unit 26 so that the pressure detected by the pressure sensor matches the target pressure in the work chamber 10. The pressure in the work chamber 10 can be increased or decreased by changing the relationship between the air supply flow rate and the exhaust flow rate. The air supply unit 24 and / or exhaust unit 26 only need to be operated as needed and do not need to be operated continuously.

[0029] To check the air quality inside the workroom 10, a particle counter, air sampler, anemometer, thermometer, hygrometer, and gas concentration meter (corresponding to the hydrogen oxide concentration / temperature / humidity sensor 520 described later) are installed inside the workroom 10.

[0030] Next, the decontamination function of the isolator 1 will be briefly explained. A pass box unit 40 is provided on the side of the work chamber 10 (on the right side in the illustrated example). A pass box 44 is provided in the middle section of the pass box unit 40. A decontamination fluid supply device 300 for supplying decontamination fluid is provided in the lower section of the pass box unit 40.

[0031] The decontamination fluid supply device 300 is configured to generate a decontamination fluid (in this embodiment, a mixed fluid of particulate hydrogen peroxide and air) and blow it into the space immediately below the blowing screen 20 in the work chamber 10 (see arrow F1 in Figure 3). The fluid is also called a decontamination gas. In this embodiment, hydrogen peroxide (H2O2) is used as the decontamination component of the decontamination fluid, but it is not limited to this, and other chemicals whose effectiveness and safety have been confirmed can also be used.

[0032] The decontamination fluid may be blown into the space between the ceiling panel 10a of the workroom 10 and the blowing screen 20. When pressurized decontamination fluid is blown into the workroom 10, the fluid spreads evenly throughout the workroom 10, and the workroom 10 is decontaminated.

[0033] Decontamination fluid can also be supplied to the pass box 44 (see arrow F2 in Figure 3). The pass box 44 is equipped with an airtight door 46 located on the front of the isolator 1 and an airtight door 48 located on the side panel (side wall) of the work chamber 10. Objects to be decontaminated can be placed inside the pass box 44 via the airtight door 46. Since the volume of the pass box 44 is significantly smaller than the volume of the work chamber 10, decontamination can be carried out quickly. Objects decontaminated inside the pass box 44 can also be transported into the work chamber 10 via the airtight door 48. Alternatively, objects decontaminated inside the pass box 44 may be removed via the airtight door 46 without being transported into the work chamber 10.

[0034] The decontamination fluid used to decontaminate the workroom 10 can be discharged to the outside of the isolator 1 via the return chamber 16 by the exhaust unit 26. At this time, the decontamination fluid is rendered harmless as it passes through the catalyst unit 263 of the exhaust unit 26. If the decontamination fluid contains hydrogen peroxide, the catalyst unit 263 decomposes the hydrogen peroxide into water and oxygen, which are harmless to humans.

[0035] The decontamination fluid used in pass box 44 can be discharged to the outside of isolator 1 after being rendered harmless by the catalyst unit via the same route as described above or through an exhaust route specifically for pass box 44.

[0036] Next, with reference to Figures 5 to 7, the decontamination fluid supply device 300, which supplies decontamination fluid to the work chamber 10 and the pass box 44, will be described.

[0037] The decontamination fluid supply device 300 is equipped with a particle generation unit 310 (decontamination fluid generation unit) that atomizes the decontamination liquid (hydrogen peroxide) to produce fine particles for decontamination. The configuration of the particle generation unit 310 will be explained with reference to Figure 5. The positional relationship of the components of the particle generation unit 310 shown in Figure 5 in terms of the left-right direction is not necessarily accurate. Please refer to Figure 6 for the correct positional relationship.

[0038] As shown in Figure 5, the particulate matter generating unit 310 has a case 312. The case 312 is made of a metal material that is high-strength and has sufficient corrosion resistance to the decontamination liquid (hydrogen peroxide in this example). Preferred metal materials for the case 312 include stainless steel, Hastelloy, or titanium or titanium alloy. It can also be made of metal coated with a corrosion-resistant resin (such as fluororesin) or of a corrosion-resistant resin (e.g., PVC, PP, fluororesin).

[0039] The case 312 is generally cylindrical in shape. The case 312 may also have other shapes, such as a rectangular parallelepiped with rounded corners. The case 312 can have a three-piece structure consisting of a bottom wall 314, a top wall 316, and side circumferential walls 315. In this case, the bottom wall 314 and side circumferential walls 315, and the top wall 316 and side circumferential walls 315 are airtightly connected by appropriate fastening members, such as clamping bands, with appropriate gaskets sandwiched between them. From the viewpoint of improving maintainability, it is preferable that the case 312 has the three-piece structure described above, but the number of pieces constituting the case 312 is not limited.

[0040] The bottom wall (bottom) 314 of the case 312 is provided with multiple spray nozzles 318 that generate fine particles of decontamination liquid. The spray nozzles 318 are formed in a cone shape (approximately conical) as a whole. The spray nozzles 318 are welded to the bottom wall 314 of the case 312, or a joint is provided at the lower end of the spray nozzles 318 to which piping can be connected in an airtight manner.

[0041] The bottom wall 314 is provided with the same number of pressurized gas supply ports 320 as the number of spray nozzles 318. Pressurized gas is supplied to the corresponding spray nozzle 318 through each pressurized gas supply port 320. In most cases, the gas is air. An inert gas (non-reactive gas) such as nitrogen gas can be used as the gas. In the following explanation, we will assume that the gas is air.

[0042] The pressurized gas supply port 320 may be configured by a coupler screwed into a screw hole formed on the upper side of the bottom wall portion 314. In this case, a coupler may be provided at the end of the gas supply piping connected to the pressurized gas supply port 320, and the pair of couplers may constitute a one-touch fitting. The configuration of the pressurized gas supply port 320 is arbitrary, as long as the pressurized gas supply piping is connected to or can be connected to the pressurized gas supply port 320 so that no problematic leaks occur at the pressurized gas supply port 320.

[0043] Inside the spray nozzle 318, a pressurized gas discharge passage 322 is formed for discharging pressurized air supplied to the pressurized gas supply port 320 into the internal space of the case 312. The pressurized gas discharge passage 322 terminates at the center of the upper end surface of the spray nozzle 318, forming a pressurized gas outlet 324. The pressurized gas discharge passage 322 extends along the central axis of the spray nozzle 318, and the inner diameter of the pressurized gas discharge passage 322 decreases as it goes upward.

[0044] Inside the spray nozzle 318, multiple liquid discharge passages 326 are formed, four in this example, surrounding the pressurized gas discharge passage 322. Alternatively, a liquid discharge passage 326 may be formed in the center, with multiple pressurized gas discharge passages 322 surrounding it. The lower end of each liquid discharge passage 326 is a liquid inlet 329 that opens in the liquid of the decontamination liquid (hydrogen peroxide in this example) stored in the bottom region of the case 312. Each liquid discharge passage 326 terminates at the upper end surface of the spray nozzle 318, forming a liquid discharge port 328. The four liquid discharge ports 328 can be arranged at positions that roughly divide the circumference centered on the pressurized gas discharge port 324 into four equal parts. A baffle 330 is provided directly above the gas discharge port 324. The baffle 330 is supported by a support member 332 at the upper end surface of the spray nozzle 318.

[0045] When air is ejected at high speed from the pressurized gas outlet 324, a negative pressure is created near the liquid outlet 328, causing the decontamination liquid in each liquid discharge passage 326 to be drawn out through each liquid outlet 328, and the decontamination liquid stored in the case 312 to be drawn into the liquid discharge passage 326 through the liquid intake port 329. The decontamination liquid drawn out from the outlet 328 is atomized when it merges with the high-speed airflow. In other words, a mixed fluid (two fluids) of fine particles of decontamination liquid (hydrogen peroxide) and air is ejected from the spray nozzle 318. The fine particles of the decontamination liquid collide with the baffle 330 located directly above the pressurized gas outlet 324, which breaks down the relatively large droplets contained in the fine particles into relatively uniform fine particles. Assuming the decontamination area does not have high humidity (i.e., water droplets form inside the space or on the surface of objects), at least a portion of the fine particles of the decontamination liquid contained in these two fluids will vaporize after the two fluids reach the decontamination area.

[0046] The basic operating mechanism of the spray nozzle 318 described above is generally the same as that of a jet nebulizer for respiratory therapy, and further detailed explanation is omitted.

[0047] Jet nebulizers for respiratory therapy are designed for human use and therefore have limitations in terms of air pressure, but the above-described spray nozzle 318 can deliver air at high pressure, allowing for the generation of a large quantity of high-quality decontamination fluid per unit time. This is also true for two-fluid nozzles that supply both decontamination liquid and gas at controlled flow rates. However, unlike such two-fluid nozzles, the above-described spray nozzle 318 does not require the supply of decontamination liquid (hydrogen peroxide) at a controlled flow rate. For the liquid, it is sufficient to manage the liquid level in the case 312. Therefore, there is no need to install liquid supply control equipment to supply decontamination liquid at a controlled flow rate to each individual spray nozzle 318, which is advantageous from the standpoint of equipment cost and operating cost.

[0048] Furthermore, in decontamination using a two-fluid nozzle, an air supply of several tens of liters per minute is required to generate fine particles suitable for decontamination. In small decontamination spaces, the sprayed particles are more likely to collide with walls, increasing the possibility of condensation. However, the spray nozzle 318 requires a lower amount of air supply per nozzle to generate fine particles than a two-fluid nozzle. By increasing or decreasing the number of spray nozzles supplying air, or by increasing or decreasing the carrier gas flow rate, it has the advantage of being able to flexibly accommodate various decontamination space sizes, from small to large spaces.

[0049] Furthermore, since the spray nozzle 318 described above is not equipped with electrical devices (such as electric heaters or ultrasonic transducers used in known vaporization or atomization devices) for vaporizing or atomizing the decontamination liquid, it is far less likely to malfunction compared to those devices and can exhibit stable performance over a long period of time. Electrical devices are susceptible to malfunction when exposed to highly corrosive chemicals (hydrogen peroxide), as well as high temperatures and ultrasonic vibrations, and their lifespan cannot be expected to be long.

[0050] In the spray nozzle 318 configuration described above, the amount of air required for atomization to achieve good atomization in each spray nozzle 318 is smaller compared to a two-fluid nozzle where both the decontamination liquid and gas are supplied at controlled flow rates. This is advantageous from an energy-saving standpoint and for small decontamination target spaces. However, the range of air supply to a single nozzle is not very large. In other words, the range of particle generation per spray nozzle 318 cannot be made very large. However, by changing the number of spray nozzles 318 supplied with pressurized air for atomization, and by adjusting the flow rate of the air supplied to the spray nozzles 318 for atomization, the range of adjustment for the amount of decontamination liquid particles that can be generated in the case 312 of the particle generation unit 310 can be increased. This is advantageous for decontamination in large spaces and for flexibly changing the concentration of decontamination components and humidity of the decontamination fluid supplied to the decontamination target space.

[0051] Furthermore, by providing the particulate generation unit 310 with multiple spray nozzles 318, there is the advantage that variations in the performance of the particulate generation unit 310 due to individual differences in the spray nozzles 318 are reduced.

[0052] Furthermore, if the spray nozzle 318 is manufactured by joining multiple separately formed pieces, liquid may seep into the gaps between the pieces, potentially causing corrosion or liquid contamination. For this reason, it is preferable that the spray nozzle 318 be a single-piece component.

[0053] From the standpoint of preventing liquid from seeping into the gaps between pieces, the bottom wall portion 314 and the side peripheral wall portion 315 of the case 312 may be joined together, for example by welding, to eliminate gaps, or they may be integrally molded. However, in this case, a trade-off occurs in that the maintainability of the inside of the case 312 is reduced, so the structure of the case 312 should be determined by which aspect is prioritized.

[0054] The one-piece spray nozzle 318 can be manufactured using methods such as machining, casting, or additive manufacturing using a 3D printer. The spray nozzle 318 may also be made of resin. The spray nozzle 318 may be formed from a metal material that has sufficient corrosion resistance to the decontamination liquid (hydrogen peroxide in this example), such as stainless steel, Hastelloy, or titanium or a titanium alloy. Alternatively, it can be formed from a corrosion-resistant resin (e.g., PVC, PP, fluororesin, etc.). When manufacturing the spray nozzle 318 from a metal material using an additive manufacturing method, metal powder containing a binder may be fabricated using a 3D printer and then sintered, or a laser-type metal 3D printer may be used. From the viewpoint of improving the durability of the spray nozzle 318, it is preferable to form the spray nozzle 318 from metal.

[0055] The top wall portion 316 of the case 312 is provided with a liquid supply port 334 for supplying decontamination liquid into the case 312. The liquid supply port 334 can be formed, for example, by a half union fitting. A liquid discharge pipe 336 is connected to the liquid supply port 334. The liquid discharge pipe 336 is bent so that the decontamination liquid discharged from it collides with the inner surface of the side circumferential wall portion 315 of the case 312. This prevents splashing that may occur when the decontamination liquid discharged from the liquid discharge pipe 336 falls directly onto the surface of the decontamination liquid already stored in the case 312.

[0056] Furthermore, a relatively large-diameter tubular member 338 penetrates the top wall 316 of the case 312 in the vertical direction. The upper end of the tubular member 338 serves as a decontamination fluid outlet port 339, which allows a mixed fluid (decontamination fluid) consisting of fine particles of the decontamination liquid (or the gas obtained by vaporizing it) and air for atomization, generated inside the case 312, to flow out of the case 312. The pressurized air supplied to the spray nozzle 318 serves not only as a gas for atomizing the decontamination liquid but also as a carrier gas for transporting the generated fine particles (or the gas obtained by vaporizing them).

[0057] The positional relationships of the multiple spray nozzles 318, the liquid supply port 334 (and the liquid discharge pipe 336 connected thereto), and the tubular member 338 will be explained with reference to Figure 6. Figure 6 is a schematic diagram showing the various components of the case 312 projected onto the upper surface (horizontal plane) of the bottom wall portion 314. As shown in Figure 6, the multiple spray nozzles 318 are arranged at equal intervals along a circumference centered on the central axis C of the case 312. The lower opening end (opening) 340 of the tubular member 338 is positioned so as not to overlap with any of the spray nozzles 318. Moreover, the tubular member 338 protrudes downward from the lower surface of the top wall portion 316 of the case 312 into the interior of the case 312.

[0058] As shown in Figure 6, by arranging multiple spray nozzles 318 in relatively close proximity, relatively large droplets contained in the fine particles sprayed from adjacent spray nozzles 318 collide with each other. If the collision velocity is slow, the droplets reassemble, increasing their size and making them more likely to adhere to the wall surface and be removed. If the collision velocity is fast, they are further subdivided into even smaller droplets, resulting in finer particles. Therefore, the possibility of fine particles containing large droplets leaking out of the case 312 is reduced.

[0059] To prevent fine particles containing large droplets from flowing out of the case 312, it is conceivable to install a relatively large baffle plate above the spray nozzle 318, for example, one that covers all the nozzles. However, installing such a baffle plate increases pressure loss and reduces the supply efficiency of the decontamination fluid, which is undesirable. In contrast, as in this embodiment, by installing small baffles 330 on the spray nozzle 318 and arranging the spray nozzles 318 adjacent to each other, it is possible to prevent fine particles containing large droplets from flowing out of the case 312 without significantly increasing pressure loss.

[0060] As will be described in detail later, a suction force acts on the conduit connected to the tubular member 338. Therefore, fine particles sprayed from the spray nozzle 318 and floating inside the case 312 flow into the conduit. Since the lower opening end 340 of the tubular member 338 is below the lower surface of the top wall 316, the fine particles sprayed from the spray nozzle 318 do not flow directly into the tubular member 338, but rather enter the space near the lower surface of the top wall 316, flow around the tubular member 338, and then enter the lower opening end 340 of the tubular member 338. By causing the fine particles to flow around the case 312 in this way, even if the fine particles contain large droplets, these large droplets are removed by adhering to the inner wall surface of the case 312 when they collide with it. This prevents large droplets from flowing out of the case 312.

[0061] Furthermore, when viewing case 312 from directly above, the liquid discharge pipe 336, which extends inside case 312 and is connected to the liquid supply port 334, is positioned so as not to overlap with any of the spray nozzles 318. The liquid discharge pipe 336 is also positioned so as not to overlap with any of the spray nozzles 318 when viewing case 312 from directly above. Therefore, the fine particles ejected from the spray nozzles 318 do not immediately collide with the liquid discharge pipe 336 after spraying.

[0062] The bottom wall portion 314 is provided with a drain port 321 for discharging the decontamination liquid from inside the case 312. The drain port 321 can be located, for example, directly below the liquid supply port 334. The drain port 321 can also be used as a liquid supply port, in which case the liquid supply port 334 may be omitted.

[0063] Instead of providing the tubular member 338 by penetrating the top wall portion 316 of the case 312, the tubular member 338 may be provided in the side peripheral wall portion 315 of the case 312. In this case, the tubular member 338 does not need to penetrate the side peripheral wall portion 315 of the case 312 and protrude into the case 312; the tubular member 338 may be connected to an opening provided in the side peripheral wall portion 315. In this case, it is preferable that the opening be provided at a position far from the area where the spray nozzle 318 is located, for example, at the right end of the side peripheral wall portion 315 in Figure 6.

[0064] Next, the overall configuration of the decontamination fluid supply device 300, including the aforementioned particulate matter generation unit 310, will be explained with reference to the pneumatic circuit diagram shown in Figure 7.

[0065] The decontamination fluid supply device 300 is equipped with a compressor 350 that delivers pressurized air obtained by taking in air from the surrounding environment and compressing it.

[0066] A main pipeline 352 is connected to the compressor 350. The main pipeline 352 has, in order from upstream, an on-off valve 354, a filter 356, a mist separator 358, a regulator 360, and a humidity control unit 362.

[0067] The humidity control unit 362 can adjust the moisture content of the pressurized air passing through it in at least two stages. The humidity control unit 362 has an air dryer 364. The air dryer 364 is, for example, a hollow fiber membrane type air dryer. A hollow fiber membrane type air dryer is advantageous from an energy-saving standpoint because it can dehumidify without cooling or heating the air.

[0068] Other known types of air dryers can also be used, such as those that dehumidify by passing air through a dehumidifying rotor using a heat-regenerating adsorbent, or those that dehumidify by passing air through a cooling coil to cause condensation. However, these air dryers allow for temperature increases or decreases in the air passing through them. This can cause the temperature of the space to be decontaminated to change to an undesirable level, reducing the efficiency and reproducibility of decontamination. Adjusting the temperature to prevent this requires extra energy and additional devices. For this reason, it is preferable to use a hollow fiber membrane type air dryer.

[0069] In the embodiment shown in Figure 7, the humidity control unit 362 is equipped with a bypass pipeline 366 that bypasses the air dryer 364. By using a suitable switching valve device (consisting of two three-way valves in the illustrated example), the amount of moisture contained in the pressurized air passing through the humidity control unit 362 can be adjusted in two stages by switching between a state in which the air passes through the air dryer 364 interposed in the main pipeline 352 and a state in which it passes through the bypass pipeline 366.

[0070] The humidity control unit 362 may be configured to adjust the amount of moisture contained in the pressurized air in multiple stages or continuously. To achieve such adjustment, any mechanism can be employed to adjust the ratio of the airflow rate passing through the air dryer 364 to the airflow rate bypassing the air dryer 364. Specifically, for example, the main pipeline 352 and the bypass pipeline 366, which form part of the humidity control unit 362, may be connected in parallel without a three-way valve, and one flow control valve may be provided in each pipeline 352 and 366, so that the air bypassing the air dryer 364 and the air not bypassing it can be mixed in any ratio.

[0071] At the branching section 368 located downstream of the humidity control unit 362, the main pipeline 352 branches into a first pipeline 370 and a second pipeline 400.

[0072] The first pipeline 370 is equipped with, in order from upstream, an on-off valve 372, a regulator 374, a flow controller 376, an on-off valve 378, a check valve 380, and a filter 382. A pressure sensor 377 is provided between the flow controller 376 and the on-off valve 378 of the first pipeline 370.

[0073] In the upstream portion 400A of the second pipeline 400 (i.e., the portion of the second pipeline 400 upstream of case 312), an on-off valve 402 and a regulator 404 are provided in order from the upstream side. Downstream of the regulator 404, a manifold 405 is provided, and through this manifold 405, the second pipeline 400 branches into the same number of branch pipelines (pressurized gas supply pipelines) 408 as the number of spray nozzles 318. Each branch pipeline 408 is connected to one of the pressurized gas supply ports 320 provided in the bottom wall portion 314 of case 312. Furthermore, if the flow controller used has a flow-below seat (normally the flow is in the direction that opens the valve, and in the case of backflow the force is applied in the direction that closes the valve), a check valve is not necessary, and if it has a built-in valve with a tight-shut function (the valve and seal material tightly seal together due to fluid pressure), a solenoid valve is not necessary.

[0074] A pressure sensor 407 is attached to the manifold 406 for detecting the pressure at the manifold 406 in the upstream portion 400A of the second pipeline 400.

[0075] Each branch pipeline 408 is equipped with a flow controller 410, an on-off valve 412, and a check valve 413 as flow control devices, and further downstream, a filter 414 is provided. By opening and closing the on-off valve 412, it is possible to switch between supplying and shutting off pressurized air to the corresponding spray nozzle 318. The flow controller 410 can adjust the flow rate of pressurized air supplied to the corresponding spray nozzle 318 (when the corresponding on-off valve 412 is open).

[0076] Case 312 can be considered as a confluence where multiple branch pipelines 408 merge. A decontamination fluid outlet port 339, formed by a tubular member 338 provided in case 312, is connected to a pipeline (hereinafter also referred to as "pipeline 400B") that forms the downstream portion 400B of the second pipeline 400 (i.e., the portion of the second pipeline 400 located downstream of case 312). An on-off valve 416 is interposed in the downstream portion 400B.

[0077] The downstream portion 400B of the second pipeline 400 merges with the first pipeline 370 at the junction 420. The junction 420 is equipped with a joint 420 that can connect three piping members. In one preferred configuration, a Y-type joint (Y-tee) for sanitary piping made of a highly corrosion-resistant material having ferrules at three ends can be used as the joint 420. Preferably, at least the downstream portion 400B of the second pipeline 400 through which the corrosive fluid passes, and the piping downstream of the junction 420, are made of sanitary piping made of a highly corrosion-resistant material. It is also preferable that the pipes be connected using ferrule joints. All piping constituting the decontamination fluid supply device 300 may be made of sanitary piping. However, other configurations are also possible. The upper end of the decontamination fluid outlet port 339 of the case 312 may also have a ferrule shape.

[0078] Near the confluence 420, the flow rate of pressurized air flowing through the first pipeline 370 is relatively high. Therefore, the decontamination fluid that has flowed from the second pipeline to the confluence 420 is drawn into the flow of pressurized air in the first pipeline 370, mixed with the pressurized air flow, and then flows through the first pipeline 370 downstream of the confluence 420.

[0079] Downstream of the confluence 420, a branch pipeline 392 branches off from the first pipeline 370 towards the pass box 44. Downstream of this branch, an on-off valve 390 is provided in the first pipeline 370, and an on-off valve 394 is provided in the branch pipeline 392. By switching the on-off valves 390 and 394 open or closed, the decontamination fluid is supplied to the selected decontamination target space (workroom 10 only, pass box 44 only, or both workroom 10 and pass box 44) and used for decontamination treatment of the decontamination target space.

[0080] Next, the configuration of the part 500 (hereinafter referred to as the "decontamination liquid supply mechanism 500") of the decontamination fluid supply device 300 that is involved in supplying decontamination liquid to the particulate generation unit 310 will be described.

[0081] A liquid supply pipe 502 is connected to the liquid supply port 334 of case 312. A container 504 for storing decontamination liquid (hydrogen peroxide solution) is provided in the liquid supply pipe 502. The container 504 is supported by a weighing scale 506 that measures the weight of the container 504. Based on the weight of the container 504 measured by the weighing scale 506, the amount of decontamination liquid stored in the container 504 can be detected, and based on this, the amount of decontamination liquid supplied to case 312 can be measured. A pump 507, an on-off valve 508, a three-way valve 510, and a filter 512 are interposed in the liquid supply pipe 502, in order from the container 504 side. A flow meter 514 for detecting the flow rate of the decontamination liquid flowing through the liquid supply pipe 502 and a limit switch 516 for detecting excessive pressure can be provided in the liquid supply pipe 502.

[0082] Case 312 is equipped with a liquid level sensor 518 for detecting the liquid level of the decontamination liquid stored inside Case 312. The liquid level sensor 518 has at least two functions: one for detecting when the liquid level exceeds the upper limit and another for detecting when the liquid level falls below the lower limit.

[0083] Case 312 is equipped with a pressure sensor 520 that detects the pressure inside Case 312. The pressure sensor 520 has at least two functions: one that detects when the pressure exceeds an upper limit, and another that detects when negative pressure occurs inside Case 312.

[0084] One end of the liquid discharge pipe 522 is connected to the drain port 321 of case 312. A filter similar to the filter 512 may also be provided on the liquid discharge pipe 522 between case 312 and the three-way valve 510.

[0085] The three-way valve 510 has a first port, a second port, and a third port. The container 504 side portion of the liquid supply pipe 502 is connected to the first port, the case side portion of the liquid supply pipe 502 is connected to the second port, and the liquid discharge pipe 522 is connected to the third port. The three-way valve 510 can be in a first state in which the first port and the second port are in communication and the third port is not in communication with any of the other ports, and a second state in which the first port and the third port are in communication and the second port is not in communication with any of the other ports.

[0086] Pump 507 is a bidirectional pump that can flow the decontamination liquid in the direction of sending it out of container 504 and in the direction of returning the decontamination liquid to container 504. By appropriately switching the three-way valve 510 and changing the driving direction of pump 507, it is possible to switch between a state in which the decontamination liquid is sent from container 504 to case 312 via liquid supply pipe 502 and a state in which the liquid discharged from case 312 to liquid discharge pipe 522 is recovered into container 504. Alternatively, two one-way pumps may be prepared and each connected to container 504, and the three-way valves may be used to switch between supplying and recovering the liquid.

[0087] Next, the operation of the decontamination fluid supply device 300 will be described. The operation of the decontamination fluid supply device 300 is controlled by a PLC (Programmable Logic Controller) 600 (control unit). The PLC 600 is, for example, the control unit of the isolator 1 itself, which is provided to control the overall operation of the isolator 1, or a subordinate controller that is dependent on the control unit of the isolator 1.

[0088] After the isolator 1 is opened, or if the workroom 10 and pass box 44 become contaminated with bacteria, viruses, etc., due to work performed inside them and decontamination is required, the operator of the isolator 1 operates a user interface (not shown) (for example, a touch panel or switch on the front of the isolator 1) to input a decontamination command while the doors 12, airtight door 46, and airtight door 48 are closed (a program that does not close airtight door 48 may be selected). The PLC 600 operates the decontamination fluid supply device 300 according to a predetermined decontamination sequence and supplies decontamination fluid to the space to be decontaminated (workroom 10, etc.). The user interface may allow selection of either the workroom 10 or the pass box 44, or both, as the space to be decontaminated.

[0089] The PLC600 monitors the detection values ​​of various sensors (pressure sensors, temperature sensors, liquid level sensors, flow sensors (including flow sensors attached to the flow controller)) installed in the decontamination fluid supply device 300, and controls the operation of necessary devices (on-off valves, three-way valves, flow controllers, pumps, etc.) based on these monitoring results.

[0090] First, the decontamination liquid supply mechanism 500 supplies decontamination liquid into the case 312. At this time, the three-way valve 510 is in a first state where the first port and the second port are in communication. The on-off valve 508 is also opened. In this state, the pump 507 is rotated forward to supply decontamination liquid from the container 504 to the case 312 via the liquid supply pipe 502.

[0091] At this time, the liquid level sensor 518 monitors the liquid level of the decontamination liquid in the case 312, and when it reaches a predetermined upper limit liquid level, the supply of decontamination liquid to the case 312 is stopped. The upper limit liquid level is a liquid level that is at least lower than the upper end surface of the spray nozzle 318 (the surface where the pressurized gas outlet 324 and the liquid outlet 328 are open) and higher than the height of the liquid inlet 329 (i.e., the liquid level between the upper end surface of the spray nozzle 318 and the liquid inlet 329).

[0092] Next, pressurized air is supplied to one or more spray nozzles 318. As a result, fine particles of the decontamination liquid are sprayed from the spray nozzles 318 by the mechanism described above, and the decontamination fluid, which is a mixture of fine particles (or vaporized gas of fine particles) and air, is sent out of the case 312. Details of the supply of pressurized air to the spray nozzles 318 will be described later.

[0093] By continuously spraying, the liquid level of the decontamination liquid in case 312 gradually decreases. If the liquid level drops too low, it becomes difficult to draw the decontamination liquid into the liquid discharge passage 326. The liquid level must be at least above the height of the liquid intake port 329. Furthermore, it is preferable for the liquid level to be sufficiently above the height of the liquid intake port 329 for smooth suction of the decontamination liquid. The lower limit liquid level is set with this in mind. When the liquid level sensor 518 confirms that the liquid level of the decontamination liquid in case 312 has fallen below the lower limit liquid level, the decontamination liquid supply mechanism 500 replenishes the decontamination liquid in case 312 so that the liquid level returns to the upper limit liquid level.

[0094] The above liquid level control maintains the liquid level of the decontamination liquid in case 312 within a predetermined range (between the lower and upper liquid levels). While the decontamination fluid is being supplied to the space to be decontaminated, the supply control of the decontamination liquid to case 312 is performed continuously, independently of the amount of pressurized air supplied to the spray nozzle 318, solely for the purpose of maintaining the liquid level of the decontamination liquid within the predetermined range. Furthermore, by using a method in which a single dose of hydrogen peroxide solution for decontamination is poured into case 312 and used up, or by modifying the spray nozzle 318 to allow direct liquid delivery and only pouring in a sprayable amount of liquid, it is possible to perform decontamination without recovering the hydrogen peroxide solution.

[0095] If the supply of decontamination fluid to the space to be decontaminated has ended and there are no plans to decontaminate isolator 1 for the time being, then cleaning of case 312 is performed. First, the decontamination liquid is discharged from case 312. At this time, the three-way valve 510 is set to the second state, where the first port and the third port are in communication. The on-off valve 508 is also opened. In this state, the pump 507 is reversed to return the decontamination liquid from case 312 to container 504. As for the liquid remaining in the liquid supply pipe 502, the pump 507 is reversed with the three-way valve 510 set to the first state, where the first port and the second port are in communication, and this is returned to container 504. The order in which the liquid is recovered with the three-way valve 510 in the first state and then the second state does not matter.

[0096] The transition to cleaning can be initiated by the operator inputting a cleaning command in case 312 through the user interface. Alternatively, the PLC 600 may be configured to automatically transition to cleaning after the supply of decontamination fluid to the decontamination target space has finished.

[0097] The fact that almost all of the decontamination liquid in case 312 has been discharged can be detected, for example, by the cumulative value of the flow rate detected by the flow meter 514 from the point when the liquid level of the decontamination liquid in case 312 falls below the lower limit level, as measured by the liquid level sensor 518, or by the increase in the weight of container 504 measured by the weighing scale 506.

[0098] Once almost all of the decontamination liquid in case 312 has been discharged, pressurized air (preferably low-humidity pressurized air) is supplied to all spray nozzles 318, forcibly discharging any remaining decontamination liquid in the liquid discharge passage 326 of the spray nozzles 318 by negative pressure, and further vaporizing any remaining decontamination liquid in case 312 with low-humidity pressurized air.

[0099] At this time, the fluid consisting of fine particles of the decontamination liquid or gas from vaporized fine particles that have flowed out of the tubular member 338 of case 312 is sent to the space to be decontaminated (for example, the work chamber 10), either on its own or combined with the pressurized air flowing through the first pipeline 370. This fluid flows from the work chamber 10 to the return chamber 16 on the circulating airflow that circulates between the work chamber 10 and the return chamber 16, is detoxified by passing through the catalyst unit 263 of the exhaust unit 26, and is then discharged to the outside (into the air) of the isolator 1. As a result, the decontamination liquid is removed from inside case 312 and the inside of case 312 is dried.

[0100] If it is anticipated that the area to be decontaminated will need to be decontaminated again in the relatively near future, the decontamination liquid may be left stored in Case 312.

[0101] Next, we will explain the supply management of pressurized air when decontaminating the space to be decontaminated (in this embodiment, the workroom 10 and / or pass box 44).

[0102] Let's consider the case of decontaminating the workroom 10 of isolator 1. At room temperature, the combination of decontamination component concentration (hydrogen peroxide concentration) and humidity (amount of water vapor and hydrogen peroxide vapor, etc.) suitable for decontamination varies depending on the decontamination method, the space to be decontaminated, and the environmental and physical conditions of the installation room. Therefore, in order to increase the reproducibility of decontamination, the decontamination device needs to have a function that can adjust the decontamination conditions to suit various installation and environmental conditions. In this device, in order to achieve a combination of decontamination component concentration and humidity suitable for decontamination, at least one of the following (operation 1) or (operation 2) is performed.

[0103] (Operation 1) Adjustment of the micronization processing conditions within the micron generation unit 310 The micronization processing conditions within the micron generation unit 310 are defined by the following parameters. (1A) Number of spray nozzles 318 from which pressurized gas is supplied (1B) Flow rate of pressurized gas supplied to the spray nozzle 318 to which pressurized gas is supplied. (1C) Pressurized gas pressure supplied to the spray nozzle 318 to which pressurized gas is supplied (1D) Humidity of pressurized gas supplied to spray nozzle 318 (1a) Parameter (1A) corresponds to the number of open on / off valves 412. (1b) Parameter (1B) can be adjusted by a flow controller 410 provided in the branch pipeline 408 where the open on-off valve 412 is located. (1c) Parameter (1C) can be adjusted by regulator 404. (1d) Parameter (1D) corresponds to the state of the humidity control unit 362. According to the above parameters (1A) to (1D), the flow rate, humidity, and concentration of decontamination components of the decontamination fluid flowing from the particulate generation unit 310 to the confluence section 420 are determined.

[0104] The amount of decontamination fluid generated by the fine particle generation unit 310, that is, the amount of decontamination liquid atomized by the spray nozzle 318, changes according to the flow rate of pressurized air supplied to the spray nozzle 318. Increasing (decreasing) the flow rate of pressurized air increases (decreases) the amount of decontamination liquid atomized. As a result, the total amount of water contained in the decontamination fluid generated by the fine particle generation unit 310 increases (decreases), and the total amount of decontamination components also increases (decreases). Although the particle size and spray speed of the fine particles generated by the fine particle generation unit 310 change with the increase or decrease in the flow rate of pressurized air supplied to the spray nozzle 318, causing a slight increase or decrease in the number of droplets adhering to the case 312, this effect is less significant than the effect of the increase or decrease in the amount of decontamination fluid due to the increase or decrease in the flow rate of pressurized air, so the water content and concentration of decontamination components in the decontamination fluid do not change much.

[0105] However, in this embodiment, the humidity control unit 362 can change the humidity of the pressurized air supplied to the spray nozzle 318 via the second pipeline 400. Therefore, the humidity of the decontamination fluid generated by the particulate generation unit 310 can be controlled substantially independently of the concentration of decontamination components. This makes it possible to control the humidity of the decontamination fluid supplied to the space to be decontaminated substantially independently of the concentration of decontamination components.

[0106] (Operation 2) Adjustment of the mixing conditions of pressurized air and decontamination liquid at the confluence 420. The mixing conditions between pressurized air and decontamination liquid at the confluence 420 are defined by the following parameters. (2A) Flow rate A of pressurized air flowing from the first pipeline 370 to the junction 420 (2B) Pressure of pressurized air flowing from the first pipeline 370 to the junction 420 (2C) Humidity of pressurized air flowing from the first conduit 370 to the junction 420 (2D) Flow rate B, humidity, and concentration of decontamination components of the decontamination liquid (which is quite humid) flowing from the second pipeline 400 (400B) to the confluence 420. (2a) Parameter (2A) can be adjusted by the flow controller 376. (2b) Parameter (2B) can be adjusted by regulator 374. (2c) Parameter (2C) corresponds to the state of the humidity control unit 362. (2d) The parameter (2D) is determined by the micronization processing conditions within the microparticle generation unit 310 described above. Based on the above parameters (2A) to (2D), the flow rate, humidity, and concentration of decontamination components of the decontamination fluid flowing into the decontamination target space from the first pipeline 370 downstream of the confluence 420 are determined.

[0107] The humidity of the decontamination fluid supplied to the space to be decontaminated (e.g., the workroom 10) can be adjusted by changing the ratio of the flow rate of pressurized air (flow rate A) flowing from the first pipeline 370 to the confluence 420 and the flow rate of the decontamination liquid (flow rate B) flowing from the second pipeline 400 (400B) to the confluence 420. Similarly, the concentration of decontamination components in the decontamination fluid supplied to the space to be decontaminated can be adjusted by changing the ratio of flow rate A to flow rate B (flow rate ratio A:B).

[0108] Increasing (decreasing) the flow rate ratio A:B lowers (increases) both the humidity and concentration of the decontamination fluid supplied to the decontamination target space (e.g., workroom 10). In other words, it is difficult to precisely control the humidity and concentration of the decontamination components of the decontamination fluid individually by changing only the flow rate ratio A:B. While it is possible to control the humidity and concentration of the decontamination target space to some extent by increasing or decreasing the amount of pressurized air with a constant humidity, the internal pressure of the device must always be kept at a constant positive pressure in order to prevent contaminated air from flowing into the device. Because the required flow rate range is limited, the level of control drops significantly if only air with a fixed humidity is used.

[0109] However, in this embodiment, the humidity control unit 362 can change the humidity of the pressurized air flowing from the first pipeline 370 into the confluence 420. As a result, the humidity of the decontamination fluid (a fluid mixed at the confluence 420 with the decontamination fluid from the particulate matter generation unit 310 and the pressurized fluid) ultimately supplied to the space to be decontaminated (e.g., the workroom 10) can be controlled substantially independently of the concentration of the decontamination components.

[0110] In the configuration shown in Figure 7, since the humidity control unit 362 is located upstream of the branching section 368, lowering (increasing) the humidity of the pressurized air passing through the humidity control unit 362 will lower (increase) not only the humidity of the pressurized air flowing from the first pipeline 370 to the confluence section 420, but also the humidity of the decontamination fluid generated by the particulate matter generation unit 310. However, this does not change the fact that the humidity of the decontamination fluid supplied to the space to be decontaminated can be controlled substantially independently of the concentration of decontamination components.

[0111] As described above, providing the humidity control unit 362 in both operation 1 and operation 2 allows the humidity of the decontamination fluid supplied to the decontamination target space to be controlled substantially independently of the concentration of the decontamination components. Therefore, it becomes possible to precisely supply the decontamination fluid having a humidity and concentration of decontamination components suitable for decontamination to the decontamination target space.

[0112] It is preferable, but not limited to, that the humidity control unit 362 be installed in the main pipeline 352 upstream of the branch section 368, as shown in Figure 7, so that it can adjust the humidity of the pressurized air flowing into both the first pipeline 370 and the second pipeline 400. The humidity control unit 362 may also be installed in the first pipeline 370 downstream of the branch section 368, or upstream of the manifold 406 of the second pipeline 400, or in both of these locations.

[0113] In this embodiment, the workroom 10 and / or pass box 44, which are the spaces to be decontaminated, are equipped with a temperature sensor to measure the temperature of the space, a humidity sensor to measure the humidity of the space, and a decontamination component concentration sensor to measure the concentration of decontamination components in the space, in this case, the concentration of hydrogen peroxide gas. Generally, an integrated sensor or probe (hereinafter also referred to as the "hydrogen peroxide concentration / temperature and humidity sensor 520") is used to measure temperature, humidity, and hydrogen peroxide gas concentration with high accuracy in an environment where hydrogen peroxide gas and water vapor coexist. Furthermore, since the humidity sensor only indicates the amount of water vapor contained in the air, it is difficult to accurately control condensation (the change in which gas changes into liquid) within the device. To improve the level of control, a condensation sensor or a sensor that can measure the amount of water vapor and hydrogen peroxide vapor separately or together may be used. Reference numerals 60 and 62 in Figure 3 are samplers that take in air from inside the workroom. The air taken in here may be used to detect particles and airborne microorganisms in the workroom 10, and to perform detection using the hydrogen peroxide concentration / temperature and humidity sensor 520 described above.

[0114] Based on the detection values ​​of the hydrogen peroxide concentration / temperature and humidity sensor 520, the PLC600 provides feedback control to the state of the devices described in (1a) to (1c) and (2a) to (2c) above, so that the humidity and hydrogen peroxide gas concentration in the space to be decontaminated are maintained within a favorable range.

[0115] Furthermore, adjusting the humidity of the pressurized air supplied to the atomizer, atomizer, vaporizer, etc., by the humidity control unit 362 is also beneficial when atomization, atomization, or vaporization is performed by means other than the spray nozzle 318 with the above-described configuration. For example, atomization, atomization, or vaporization may be performed by a two-fluid nozzle in which both the decontamination liquid and pressurized air are supplied to the nozzle at controlled flow rates and merged within the nozzle. In this case as well, the humidity of the decontamination fluid, which consists of a mixed fluid of mist (or gas derived from mist) of the decontamination liquid and pressurized air, can be controlled substantially independently of the concentration of the decontamination components.

[0116] Atomization, particleization, or vaporization may be carried out by other methods, such as a heating method or flash evaporation method that heats the decontamination liquid to generate vapor from the decontamination liquid, or an ultrasonic atomization method that atomizes the decontamination liquid using ultrasonic vibrations. In these cases as well, the atomized, particleized, or vaporized decontamination liquid is sent to the decontamination area together with pressurized air (relatively low-pressure pressurized air, not as high-pressure as that supplied to the spray nozzle 318 or two-fluid nozzle; similarly high-pressure air is also acceptable) as a carrier gas supplied to the atomizer, particleizer, or vaporizer. Therefore, by changing the humidity of the pressurized air as a carrier gas, the humidity of the fluid sent to the decontamination area can be controlled substantially independently of the concentration of the decontamination components.

[0117] Furthermore, a configuration in which the decontamination fluid generated by the atomizing device, particulating device, and vaporizing device merges with pressurized air whose humidity has been controlled by the humidity control unit 362 at the confluence point before being sent to the space to be decontaminated is also beneficial when the atomization, particulation, or vaporization of the decontamination liquid is performed by means other than the spray nozzle 318 in the above-described configuration. In this case as well, the humidity of the decontamination fluid, which consists of a mixture of fine particles (or gas derived from fine particles) of the decontamination liquid and pressurized air sent to the space to be decontaminated, can be controlled substantially independently of the concentration of the decontamination components.

[0118] The present invention is not limited to the embodiments described above, and can be modified in various ways without departing from the scope and spirit of the claims. [Explanation of symbols]

[0119] 10,44 Spaces to be decontaminated 300 Decontamination fluid supply device 310. Particulate matter generation unit, decontamination fluid generation unit 312 cases 318 Spray nozzle 320 Pressurized gas supply ports 321 Drainage port 322 Pressurized gas discharge path 324 Pressurized gas outlet 326 Liquid discharge path 328 Liquid discharge port 334 Liquid supply ports 338 Tubular member 339 Decontamination fluid outlet port 340 Opening of tubular member 362 Humidity Control Unit 408 Pressurized gas supply pipeline (branch pipeline) 410, 412 Flow control equipment (flow meters, shut-off valves) 352 Main pipeline 370 1st pipeline 400 2nd pipeline 420 Confluence 502 Liquid supply piping 510 Switching valve device (three-way valve) 518 Liquid level sensor 520 Detector for detecting humidity and decontamination component concentration 522 Liquid discharge piping 600 Control Unit (PLC)

Claims

1. A decontamination fluid supply device that supplies a decontamination fluid (decontamination fluid) to a space to be decontaminated, The system includes a microparticle generating unit that atomizes a liquid containing decontamination components (decontamination liquid) to produce fine particles for decontamination, and the microparticle generating unit is A case configured to store decontamination liquid at the bottom, A plurality of spray nozzles are provided at the bottom of the case, which atomize the decontamination liquid using pressurized gas to generate fine particles of the decontamination liquid, The case is provided with a liquid supply port for supplying decontamination liquid into the interior of the case, The case is provided with a plurality of pressurized gas supply ports for supplying pressurized gas to each of the plurality of spray nozzles, The case is provided with a decontamination fluid outlet port for discharging a decontamination fluid, which consists of a mixed fluid of fine particles of the decontamination liquid sprayed from the spray nozzle and pressurized gas, to the outside of the case. It has, Each of the spray nozzles comprises a pressurized gas discharge path having a pressurized gas outlet for discharging pressurized gas supplied from a corresponding pressurized gas supply port, and a liquid discharge path having a liquid discharge port for discharging decontamination liquid stored at the bottom of the case, wherein the decontamination liquid stored at the bottom of the case is drawn in through the liquid discharge path by the negative pressure generated by discharging pressurized gas from the pressurized gas outlet to the liquid discharge port, and is atomized when it merges with the gas discharged from the pressurized gas outlet, in a decontamination fluid supply device.

2. Each of the aforementioned spray nozzles is provided to spray fine particles into the space above the spray nozzle, The aforementioned particle generation unit further comprises a tubular member that extends vertically through the case, The decontamination fluid outlet port is the outlet side portion of the tubular member, The tubular member has an opening inside the case that opens downward to receive fine particles sprayed from the spray nozzle, The decontamination fluid supply device according to claim 1, wherein the opening is provided in a region outside the region where the plurality of spray nozzles are arranged, in a plan view.

3. The decontamination fluid supply device according to claim 1, further comprising a plurality of pressurized gas supply lines connected to the plurality of pressurized gas supply ports of the particle generation unit, wherein each of the plurality of pressurized gas supply lines is provided with a flow rate control device, thereby enabling independent control of the supply and shutoff of pressurized gas supplied to each pressurized gas supply port and / or the flow rate of pressurized gas supplied to each pressurized gas supply port, with respect to each pressurized gas supply port.

4. The decontamination fluid supply device according to claim 1, further comprising a humidity control unit capable of adjusting the humidity of the pressurized gas supplied to the plurality of pressurized gas supply ports.

5. A first pipeline for flowing pressurized gas, which does not contain decontamination liquid, toward the space to be decontaminated, A second pipeline for directing the decontamination fluid discharged from the aforementioned decontamination fluid outlet port toward the space to be decontaminated, Furthermore, The decontamination fluid supply device according to claim 1, wherein the first pipeline and the second pipeline merge at a confluence to form a single supply pipeline, and a mixed fluid of pressurized gas not containing decontamination liquid and decontamination fluid is supplied to the space to be decontaminated via this supply pipeline.

6. The decontamination fluid supply device according to claim 5, further comprising a humidity control unit capable of adjusting the humidity of the pressurized gas supplied to at least the first pipeline.

7. The first and second pipelines are pipelines that branch off from the main pipeline at the branching point. Pressurized gas is supplied to the main pipeline from a pressurized gas supply source. A humidity control unit is provided in the main pipeline to adjust the humidity of the pressurized gas. The decontamination fluid supply device according to claim 5, wherein the upstream portion of the second pipeline is connected to a plurality of pressurized gas supply ports of the case, and the downstream portion is connected to the decontamination fluid outlet port of the case, and the humidity control unit is capable of controlling both the humidity of the pressurized gas supplied to the space to be decontaminated via the first pipeline and the humidity of the pressurized gas supplied to the plurality of pressurized gas supply ports of the case via the second pipeline.

8. A detector for detecting the humidity and concentration of decontamination components inside the space to be decontaminated, Control unit and Furthermore, The control unit, in accordance with the value detected by the detector, Adjustment of the number of spray nozzles among the plurality of spray nozzles to which pressurized gas is supplied, Adjustment of the flow rate of pressurized gas to the spray nozzle to which the pressurized gas is supplied, Adjustment of the humidity of the pressurized gas supplied to the spray nozzle, It is configured to perform one of the following: The decontamination fluid supply device according to claim 1, further comprising equipment necessary for the adjustments to be performed.

9. A detector for detecting the humidity and concentration of decontamination components inside the space to be decontaminated, Control unit and Furthermore, The control unit, in accordance with the value detected by the detector, Adjustment of the number of spray nozzles among the plurality of spray nozzles to which the pressurized gas is supplied, Adjustment of the flow rate of pressurized gas to the spray nozzle to which the pressurized gas is supplied, Adjustment of the humidity of the pressurized gas supplied to the spray nozzle, Adjustment of the humidity of the pressurized gas supplied to the first pipeline, Adjustment of the flow rate of pressurized gas supplied to the first pipeline, Configured to perform at least one of the following: The decontamination fluid supply device according to claim 5, further comprising equipment necessary for the adjustment to be performed.

10. The decontamination fluid supply device according to claim 1, wherein each of the spray nozzles is a single, seamless component.

11. A liquid supply pipe connected to the liquid supply port of the case, A pump that supplies a controlled amount of decontamination liquid to the liquid supply port via the liquid supply piping, A liquid level sensor for detecting the liquid level of the decontamination liquid stored at the bottom of the case, Control unit and Furthermore, The control unit is configured to adjust the flow rate of the decontamination liquid supplied to the liquid supply port by the pump so that the liquid level detected by the liquid level sensor is within a predetermined range. The decontamination fluid supply device according to claim 1.

12. The case further has a drainage port for discharging the decontamination liquid stored inside the case. The aforementioned drain port is connected to the aforementioned liquid supply pipe via a liquid discharge pipe. The aforementioned pump is a pump capable of sending liquid in both the forward and reverse directions. The decontamination fluid supply device according to claim 11, wherein the liquid supply port and the drain port can be selectively connected to the pump via a switching valve device, thereby enabling the pump to recover the decontamination liquid stored in the case by connecting the drain port to the pump.

13. When the control unit receives a cleaning command for the inside of the case, The steps include connecting the drainage port to the pump and operating the pump to recover the decontamination liquid stored inside the case, The steps include: injecting only pressurized gas from the spray nozzle to vaporize the decontamination liquid remaining inside the case, and sending the vaporized decontamination liquid discharged from the case via the decontamination fluid outlet port to a catalyst for decomposition; A decontamination fluid supply device according to claim 12, configured to perform the following actions.

14. A decontamination fluid supply device that supplies a decontamination fluid (decontamination fluid) to a space to be decontaminated, A decontamination fluid generating unit, which generates decontamination fine particles or pressurized gas by atomizing or vaporizing a liquid containing decontamination components (decontamination liquid) inside the unit, A pressurized gas supply pipe for supplying pressurized gas to the decontamination fluid generation unit, A decontamination fluid supply pipe supplies the decontamination fine particles or a mixed fluid of decontamination gas and pressurized gas generated by the decontamination fluid generation unit to the space to be decontaminated, A humidity control unit that adjusts the humidity of the pressurized gas supplied to the decontamination fluid generation unit, Equipped with, The pressurized gas is used, at least, as a carrier gas for transporting decontamination particles or decontamination gas generated inside the decontamination fluid generation unit. Decontamination fluid supply device.

15. The decontamination fluid supply device according to claim 14, wherein the pressurized gas is also used as a particulating gas to generate fine particles for decontamination by being mixed with the decontamination fluid inside the decontamination fluid generation unit.

16. A decontamination fluid supply device that supplies a decontamination fluid (decontamination fluid) to a space to be decontaminated, A decontamination fluid generating unit, which generates decontamination fine particles or decontamination gas by atomizing or vaporizing a liquid containing decontamination components (decontamination liquid) inside the unit, A first pipe for flowing pressurized gas, which does not contain decontamination liquid, toward the space to be decontaminated, A second pipe for flowing decontamination particles or decontamination gas generated by the decontamination fluid generation unit toward the space to be decontaminated, A humidity control unit that adjusts the humidity of a pressurized gas that does not contain decontamination liquid and flows through the first pipe toward the space to be decontaminated, Equipped with, A decontamination fluid supply device is configured such that the second pipe merges with the first pipe at a junction set in the first pipe, and a mixed fluid, which is a mixture of pressurized gas that does not contain the decontamination liquid and decontamination fine particles or a decontamination gas, can be supplied to the space to be decontaminated.

17. A workroom in which work is performed that involves handling substances that may affect the human body (hazardous substances), work that requires maintaining a sterile or dust-free environment inside, or work that requires maintaining a constant air quality inside, An environmental control device comprising: a decontamination fluid supply device according to any one of claims 1 to 16, which supplies a decontamination fluid to the workroom, which is the space to be decontaminated, or to a space communicating with the workroom.

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