Flexisha for hard disk drive suspension, and method for manufacturing a flexisha

Abstract

To provide a flexible suspension for hard disk drives that can suppress the degradation of reliability. [Solution] In one embodiment, the flexure of a suspension for a hard disk drive comprises a metal base having a first surface facing the load beam and a second surface opposite to the first surface. The metal base has a first limiter and a second limiter arranged in the width direction of the metal base, and a first opposing portion and a second opposing portion facing the first limiter and the second limiter. The first limiter and the second limiter have control portions that face the first opposing portion and the second opposing portion with a gap in the thickness direction of the metal base and are inclined with respect to the longitudinal direction of the metal base in a plan view.

Description

Technical Field

[0001] The present invention relates to a flexure for a hard disk drive suspension and a method for manufacturing the flexure.

Background Art

[0002] A hard disk drive (HDD) is used in an information processing device such as a computer. The hard disk drive includes a magnetic disk that rotates around a spindle, a carriage that pivots around a pivot shaft, and the like. The carriage has an arm and pivots around the pivot shaft in the track width direction of the disk by a positioning motor such as a voice coil motor.

[0003] A hard disk drive suspension (hereinafter simply referred to as a suspension) is attached to the above-described arm. The suspension includes a base plate connected to the arm, a load beam, and a flexure disposed along the load beam. A slider that constitutes a magnetic head is provided at a gimbal portion formed near the tip of the flexure.

[0004] An element (transducer) for performing access such as reading or writing data is provided on the slider. A head gimbal assembly is constituted by these load beams, flexures, sliders, and the like.

[0005] In order to cope with the higher recording density of the disk, it is necessary to further miniaturize the head gimbal assembly and to be able to position the slider with higher accuracy with respect to the recording surface of the disk.

[0006] Since there is a demand for improving the recording capacity of the hard disk drive in response to the improvement of the recording density, increasing the number of magnetic disks included in the hard disk drive (so-called multi-disk configuration) has been promoted. Along with this, thinning of the suspension has been demanded.

[0007] Furthermore, when a hard disk drive is subjected to an external shock, there is a need to suppress excessive deformation or damage to the suspension during loading and unloading, and various proposals have been made to address this (for example, Patent Document 1). [Prior art documents] [Patent Documents]

[0008] [Patent Document 1] Japanese Patent Publication No. 2021-140843 [Overview of the project] [Problems that the invention aims to solve]

[0009] However, even with the proposal in Patent Document 1, there is still room for various improvements regarding the limiter structure.

[0010] Therefore, one of the objectives of the present invention is to provide a flexure for a hard disk drive suspension that can suppress a decrease in reliability, and a method for manufacturing the flexure. [Means for solving the problem]

[0011] A flexi-shaft for a hard disk drive suspension according to one embodiment is a flexi-shaft that is superimposed on a load beam provided by the hard disk drive suspension. The flexi-shaft comprises a metal base having a first surface facing the load beam and a second surface opposite to the first surface. The metal base has a first limiter and a second limiter arranged in the width direction of the metal base, and a first opposing portion and a second opposing portion facing the first limiter and the second limiter. The first limiter and the second limiter have control portions that face the first opposing portion and the second opposing portion with a gap in the thickness direction of the metal base, and are inclined with respect to the longitudinal direction of the metal base in a plan view.

[0012] The metal base may further include a first base portion to which the first limiter and the second limiter are connected, and a second base portion provided on the tip side of the first base portion in the longitudinal direction, to which the first opposing portion and the second opposing portion are connected. The control portion may face the first surface of the second base portion with a gap in the thickness direction. The control portions of the first limiter and the second limiter may be inclined so as they move closer to each other in a plan view as they advance in the longitudinal direction.

[0013] The metal base may further include a first base portion to which the first opposing portion and the second opposing portion are connected, and a second base portion provided on the tip side of the first base portion in the longitudinal direction, to which the first limiter and the second limiter are connected. The control portion may face the second surface of the first base portion with a gap in the thickness direction. The control portions of the first limiter and the second limiter may be inclined to move away from each other as they advance in the longitudinal direction in a plan view.

[0014] The distance in the thickness direction between the first limiter and the second limiter and the first opposing portion and the second opposing portion may be substantially constant in the longitudinal direction when viewed in the width direction. The control portion may have sides substantially parallel to the first opposing portion and the second opposing portion. The metal base may further have a third base portion provided on the tip side of the second base portion, connected to the second base portion, and fixed to the load beam.

[0015] A method for manufacturing a flexi-sha according to one embodiment includes placing a workpiece having first and second extensions extending in the width direction for the first and second limiters on a first mold having first and second corners inclined with respect to the longitudinal direction in a plan view, fixing the workpiece by sandwiching it between the first and second molds, moving a third mold relative to the first and second molds, and bending the first and second extensions with respect to the first and second corners. The placement includes adjusting the position of the first and second corners in the width direction relative to the first and second extensions. The adjustment may include moving the workpiece relative to the first mold in the longitudinal direction. [Effects of the Invention]

[0016] According to the present invention, it is possible to provide a flexisha for a hard disk drive suspension that can suppress a decrease in reliability, and a method for manufacturing the flexisha. [Brief explanation of the drawing]

[0017] [Figure 1] Figure 1 is a schematic perspective view showing an example of a hard disk drive. [Figure 2] Figure 2 is a schematic cross-sectional view showing a part of a hard disk drive. [Figure 3] Figure 3 is a schematic plan view of the suspension according to the first embodiment. [Figure 4] Figure 4 is a schematic perspective view of the metal base in the first embodiment. [Figure 5] Figure 5 is a schematic plan view of the metal base in the first embodiment. [Figure 6] Figure 6 is a schematic plan view of the metal base in the first embodiment. [Figure 7] Figure 7 is a schematic side view of the metal base in the first embodiment. [Figure 8]FIG. 8 is a flowchart showing the manufacturing process of the flexure limiter. [Figure 9] FIG. 9 is a schematic plan view showing the metal base before the limiter is formed. [Figure 10] FIG. 10 is a diagram schematically showing the manufacturing apparatus of the flexure. [Figure 11A] FIG. 11A is a diagram for explaining an example of the method for adjusting the position in the second direction of the bending line. [Figure 11B] FIG. 11B is a diagram for explaining an example of the method for adjusting the position in the second direction of the bending line. [Figure 11C] FIG. 11C is a diagram for explaining an example of the method for adjusting the position in the second direction of the bending line. [Figure 12] FIG. 12 is a schematic plan view showing the metal base of the flexure according to the comparative example. [Figure 13] FIG. 13 is a schematic plan view showing the metal base of the flexure according to the second embodiment. [Figure 14] FIG. 14 is a schematic side view showing the metal base of the flexure according to the second embodiment. [Figure 15] FIG. 15 is a schematic plan view showing the metal base of the flexure according to the second embodiment. [Figure 16] FIG. 16 is a schematic plan view showing the metal base of the flexure according to the third embodiment. [Figure 17] FIG. 17 is a schematic plan view showing the metal base of the flexure according to the third embodiment. [Figure 18] FIG. 18 is a schematic plan view showing the metal base of the flexure according to the fourth embodiment. [Figure 19] FIG. 19 is a schematic plan view showing the metal base of the flexure according to the fourth embodiment.

Embodiments for Carrying Out the Invention

[0018] The embodiments of the present invention will be described below with reference to the drawings. In order to make the explanation clearer, the size, shape, etc. of each part may be schematically represented in the drawings with modifications from the actual embodiments.

[0019] [First Embodiment] Figure 1 is a schematic perspective view showing an example of a hard disk drive 1 (HDD). In the example in Figure 1, the hard disk drive 1 comprises a case 2, a plurality of magnetic disks (hereinafter simply referred to as disks 4) that rotate around a spindle 3, a carriage 6 that can pivot around a pivot axis 5, and a positioning motor (voice coil motor) 7 for driving the carriage 6. The case 2 is sealed by a lid (not shown).

[0020] Figure 2 is a schematic cross-sectional view showing a part of the hard disk drive 1. As shown in Figure 2, the carriage 6 is provided with multiple (for example, three) arms 8. The number of arms 8 provided on the carriage 6 is not limited to the example described above.

[0021] Multiple arms 8 each have a hard disk drive suspension (hereinafter referred to as suspension 10) attached to their tips. Furthermore, each suspension 10 has a slider 11 that constitutes a magnetic head.

[0022] As disc 4 rotates at high speed, air flows between disc 4 and slider 11, forming an air bearing. When the carriage 6 is rotated by the positioning motor 7, the suspension 10 moves radially around disc 4, causing slider 11 to move to the desired track on disc 4.

[0023] Figure 3 is a schematic plan view of the suspension 10 according to this embodiment. The suspension 10 comprises a base plate 20 connected to an arm 8 (shown in Figure 2), a load beam 30, and a flexure 40.

[0024] In Figures 3 and beyond, the X, Y, and Z axes are shown as mutually orthogonal. The direction along the X-axis is defined as the first direction X, the direction along the Y-axis as the second direction Y, and the direction along the Z-axis as the third direction Z. Viewing each element parallel to the third direction Z is sometimes called a plan view.

[0025] Here, the first direction X corresponds to the longitudinal direction of the suspension 10, base plate 20, load beam 30, and flexisha 40. In the first direction X, with respect to the base plate 20, the side on which the slider constituting the magnetic head is mounted may be called the tip or tip side.

[0026] Furthermore, the second direction Y corresponds to the width direction of the suspension 10, base plate 20, load beam 30, and flexure 40, and the third direction Z corresponds to the thickness direction of the suspension 10, base plate 20, load beam 30, and flexure 40. Hereafter, the length along the third direction Z may be referred to as the thickness. In addition, a sway direction S is defined near the tip of the load beam 30, indicated by an arc-shaped arrow.

[0027] The base plate 20 is made of a metal material such as stainless steel. The base plate 20 has a cylindrical boss portion 21 for connecting to the arm 8 (shown in Figure 2).

[0028] The load beam 30 is made of a metal material such as stainless steel. The thickness of the load beam 30 is, for example, 30 to 80 μm. The load beam 30 has a tapered shape towards the tip.

[0029] As shown in Figure 3, the load beam 30 is connected to the base plate 20 by spot welding, for example, using a laser, at multiple welds W. Specifically, the load beam 30 is elastically supported by the base plate 20 via a pair of spring sections 31 that include multiple welds W. The load beam 30 has a surface 30A on which the flexi 40 is positioned.

[0030] The flexi-shaft 40 is positioned along the base plate 20 and the load beam 30. The flexi-shaft 40 overlaps the surface 30A of the load beam 30. In addition, a portion of the flexi-shaft 40 extends rearward beyond the base plate 20.

[0031] The flexi-sha 40 comprises a metal base 41 and a wiring section 50 superimposed on the metal base 41. The metal base 41 is formed from, for example, a thin stainless steel plate. The thickness of the metal base 41 is less than the thickness of the load beam 30. The thickness of the metal base 41 is, for example, 15 to 20 μm.

[0032] The metal base 41 is fixed to the base plate 20 and the load beam 30 by, for example, spot welding using a laser at multiple welds W. The metal base 41 has a surface 411 facing the surface 30A of the load beam 30, and a surface 413 opposite to surface 411. Surface 411 faces in the direction opposite to the third direction Z, and surface 413 faces the third direction Z. Surface 413 corresponds to the surface on which the wiring section 50 is arranged.

[0033] The wiring section 50 includes a base insulating layer, a conductor layer superimposed on the base insulating layer, and a cover insulating layer superimposed on the conductor layer. The conductor layer includes, for example, wiring for reading and wiring for writing. These multiple wirings are covered by the cover insulating layer.

[0034] The metal base 41 further includes a tongue portion 42, a frame portion 43, and a fixing portion 44 near the tip of the suspension 10. The tongue portion 42, the frame portion 43, and the fixing portion 44 are all parts of the metal base 41, and their respective contours are formed, for example, by etching.

[0035] The tongue portion 42, the frame portion 43, and the fixing portion 44 each have the aforementioned surfaces 411 and 413. Each of the surfaces 411 and 413 is, for example, an unetched surface (rolled surface).

[0036] The center of the second direction Y of the tongue portion 42 roughly coincides with the center of the second direction Y of the fixing portion 44. The centers of the second direction Y of the tongue portion 42 and the fixing portion 44 roughly coincide with the center of the second direction Y of the suspension 10.

[0037] A slider 11, which constitutes the magnetic head, is mounted on a portion of the tongue portion 42. The tongue portion 42 includes the portion that overlaps with the slider 11 and the portion in its vicinity. In Figure 3, the slider 11 is shown by a dashed line. An element capable of converting magnetic signals to electrical signals, such as an MR element, is provided at the tip of the slider 11.

[0038] The wiring section 50 is electrically connected to the elements of the slider 11 via terminals for the slider 11. Note that the terminals for the slider 11 are omitted in each figure for simplicity. These elements perform access such as writing or reading data to the disk 4 (shown in Figure 2). The head gimbal assembly is composed of the slider 11, load beam 30, flexure 40, etc.

[0039] The frame section 43 is arranged to surround the tongue section 42. The frame section 43 includes outriggers 45A and 45B and a connecting section 46. The outriggers 45A and 45B are located on both sides of the tongue section 42 in the second direction Y. The outriggers 45A and 45B are connected by the connecting section 46 at the tip end of the tongue section 42.

[0040] The fixing portion 44 is located on the tip side of the tongue portion 42 and the connecting portion 46 in the first direction X. The tongue portion 42, the connecting portion 46, and the fixing portion 44 are arranged in this order in the first direction X. The metal base 41 is fixed to the load beam 30 by the weld portion W at the fixing portion 44.

[0041] The fixed portion 44 is connected to the connecting portion 46 via the intermediate portion 47 in the first direction X. The width of the intermediate portion 47 in the second direction Y is smaller than the width of the connecting portion 46 and the fixed portion 44 in the second direction Y.

[0042] The load beam 30 has dimples (shown by dashed lines in Figure 3) that protrude toward the tongue portion 42. The tips of the dimples 32 are in contact with the surface 411 on the tongue portion 42.

[0043] The tongue portion 42 is swung around the tip of the dimple 32, and is formed to enable the desired gimbal motion. The gimbal portion 48 is composed of the tongue portion 42, outriggers 45A, 45B, dimple 32, etc.

[0044] Actuators 60A and 60B are mounted on the gimbal section 48. Actuators 60A and 60B have the function of rotating the tongue section 42 in the sway direction S. Actuators 60A and 60B are, for example, piezoelectric elements and are formed from materials such as lead zirconate titanate (PZT).

[0045] Actuators 60A and 60B are arranged on surface 411 at intervals in the second direction Y. Actuators 60A and 60B, the metal base 41, and the slider 11 are arranged in this order in the third direction Z. Actuators 60A and 60B are fixed to the tongue portion 42 by adhesive or the like. Outriggers 45A and 45B are positioned outside of actuators 60A and 60B.

[0046] The following description focuses on the area near the tip of the flexi-sha 40 and explains the metal base 41 in this embodiment. Note that the following figures mainly show a portion of the tip side of the metal base 41.

[0047] Figure 4 is a schematic perspective view of the metal base 41 in this embodiment. Figures 5 and 6 are schematic plan views of the metal base 41 in this embodiment. Figure 7 is a schematic side view of the metal base 41 in this embodiment. In Figure 6, the metal base 41 is viewed from the opposite direction to that in Figure 5. In Figure 7, the metal base 41 is viewed in the second direction Y, and the outrigger 45A is omitted.

[0048] As shown in Figure 4, the metal base 41 has a tongue portion 42, a frame portion 43, and a fixing portion 44. As shown in Figure 4, the tongue portion 42 has a base portion 421 located towards the tip of the portion on which the slider 11 (shown in Figure 3) is mounted.

[0049] The base portion 421 is located between the slider 11 and the connecting portion 46 in the first direction X. In this embodiment, the base portion 421 corresponds to the portion of the tongue portion 42 that does not overlap with the slider 11.

[0050] The connecting portion 46 is not connected to the base portion 421. A gap G1 is formed between the base portion 421 and the connecting portion 46 in the first direction X. The gap G1 is formed along the second direction Y.

[0051] The connecting portion 46 has an elongated shape in the second direction Y. The width of the connecting portion 46 in the second direction Y is approximately equal to, for example, the width of the base portion 421 in the second direction Y. Also, the width of the connecting portion 46 in the first direction X is smaller than, for example, the width of the base portion 421 in the first direction X. The intermediate portion 47 extends from the central part of the connecting portion 46 in the first direction X.

[0052] The metal base 41 further includes limiters 70A and 70B, and opposing portions 80A and 80B that face the limiters 70A and 70B. In this embodiment, the limiters 70A and 70B are connected to the base portion 421, and the opposing portions 80A and 80B are connected to the connecting portion 46. In this case, in the third direction Z, the limiters 70A and 70B and the opposing portions 80A and 80B are arranged in this order.

[0053] Specifically, the limiters 70A and 70B are connected to both ends of the base portion 421 in the second direction Y, and the opposing portions 80A and 80B are connected to both ends of the connecting portion 46 in the second direction Y, respectively. The opposing portions 80A and 80B are formed integrally with the connecting portion 46, for example.

[0054] The limiters 70A and 70B are aligned in the second direction Y. Each of the limiters 70A and 70B is formed, for example, by bending a part of the base portion 421. Limiter 70A has a shape that is symmetrical to limiter 70B with respect to a hypothetical straight line extending in the first direction X, for example.

[0055] Each of the limiters 70A and 70B includes a portion 71, a portion 73, and a portion 75, as shown in Figure 5. The portions 71, 73, and 75 are formed integrally, for example. The portions 71, 73, and 75 each have surfaces 411 and 413, respectively.

[0056] Part 71 is connected to the base part 421. As shown in Figure 5, part 71 of limiter 70A extends from the base part 421 in the direction opposite to the second direction Y, and part 71 of limiter 70B extends from the base part 421 in the second direction Y.

[0057] As shown in Figure 5, part 73 is inclined with respect to the first direction X in a plan view. Specifically, part 73 of limiter 70A extends in a direction D1 that intersects the first direction X at an acute angle (e.g., angle θ1) counterclockwise. Part 73 of limiter 70B extends in a direction D2 that intersects the first direction X at an acute angle (e.g., angle θ1) clockwise. Angle θ1 is, for example, between 5 and 45 degrees. In one example, angle θ1 is 25 degrees. Note that the angles of directions D1 and D2 are equal at angle θ1, but the angles of directions D1 and D2 may be different.

[0058] As shown in Figure 6, the portions 73 of the limiters 70A and 70B are inclined so that they move closer to each other as they move in the first direction X, in a plan view. The distance W1 between adjacent portions 73 in the second direction Y decreases as they move in the first direction X.

[0059] Focusing on the opposing portions 80A and 80B, as shown in Figure 7, portion 73 of limiter 70A faces opposing portion 80A, and portion 73 of limiter 70B faces opposing portion 80B. The portions 73 of limiters 70A and 70B face each other with a gap G3 in the third direction Z relative to the surface 411 of opposing portions 80A and 80B.

[0060] Here, "facing each other" includes not only cases where no other elements are placed between each element, but also cases where other elements are placed between them. Furthermore, "facing each other" includes not only cases where each element is parallel to the other, but also cases where one element is tilted relative to the other.

[0061] The portion 73 of the limiters 70A and 70B is provided substantially parallel to the opposing portions 80A and 80B, for example. The portion 73 of the limiters 70A and 70B includes an edge portion 731 facing the opposing portions 80A and 80B, as shown in Figure 7.

[0062] In a plan view, the edge 731 of limiter 70A extends along direction D1, and the edge 731 of limiter 70B extends along direction D2. Specifically, the edges 731 of portions 73 of limiters 70A and 70B are provided substantially parallel to the surfaces 411 of the opposing portions 80A and 80B.

[0063] Here, "substantially parallel" includes the case where portion 73 (edge ​​portion 731) is inclined with respect to opposing portions 80A and 80B within a range of 0 to 10 degrees. Furthermore, the distance W3 between the edge portion 731 and opposing portions 80A and 80B in the third direction Z is substantially constant in the first direction X when viewed in the second direction Y. Here, "substantially constant" also includes the case where the distance W3 changes slightly at the position in the first direction X.

[0064] Section 75 connects sections 71 and 73. Section 75 extends toward the load beam 30 (shown in Figure 3). Section 75 is configured such that, for example, section 73 is substantially parallel to the opposing sections 80A and 80B. Section 75 extends in a direction different from both sections 71 and 73. The shape of section 75 is not limited to the illustrated example. Section 75 may be formed in a straight line or in an arc shape. Also, section 73 may be directly connected to section 71.

[0065] Next, an example of a manufacturing method for the flexi-sha 40 will be described. The following mainly describes the process of forming the limiters 70A and 70B of the metal base 41.

[0066] Figure 8 is a flowchart showing the manufacturing process of the limiters 70A and 70B of the flexi-sha 40. Figure 9 is a schematic plan view showing the metal base 41 before the limiters 70A and 70B are formed.

[0067] Hereafter, as shown in Figure 9, the metal base 41 before the limiters 70A and 70B are formed is referred to as the workpiece WP. The workpiece WP is connected to a frame, for example (not shown). The frame may have only one workpiece WP, or multiple workpiece WPs may be provided in a chain. Furthermore, the workpiece WP may not be provided on the frame at all.

[0068] Prior to steps S1 to S3 in Figure 8, the workpiece WP described above is prepared. The workpiece WP is formed by the process of forming a wiring section 50 on a metal base 41 and performing etching or the like to form a flexible blank, and then mounting actuators 60A and 60B. As shown in Figure 9, the workpiece WP has extensions 700A and 700B.

[0069] The extensions 700A and 700B include portions 71, 73, and 75. The extensions 700A and 700B extend from the base portion 421 in the second direction Y and the direction opposite to the second direction Y, respectively. Specifically, the extension 700A includes a straight portion 710A extending in the direction opposite to the second direction Y, and the extension 700B includes a straight portion 710B extending in the second direction Y.

[0070] By bending the extensions 700A and 700B at predetermined positions, the limiters 70A and 70B of the metal base 41 are formed. In Figure 9, the bending lines indicating the positions where the extensions 700A and 700B are bent are shown as lines L1A and L1B.

[0071] Line L1A extends along direction D1, and line L1B extends along direction D2. Also, portion 73 of extension 700A extends along direction D1, and portion 73 of extension 700B extends along direction D2. In other words, lines L1A and L1B are parallel to portions 73 of extensions 700A and 700B, respectively.

[0072] Figure 10 is a schematic diagram of a manufacturing apparatus 1000 for a flexi-sha 40. The manufacturing apparatus 1000 includes a mold 100. The mold 100 includes a die 101, a pad 103, and a punch 105. Although not shown, the manufacturing apparatus 1000 may further include a mechanism for driving the pad 103 and the punch 105, a mechanism for transporting the workpiece WP to the mold 100, and so on. The mold 100 may further include other elements, or may include other elements in place of the elements described above.

[0073] First, the workpiece WP is placed on the surface F1 of the die 101 (step S1 in Figure 8). The workpiece WP is positioned relative to the die 101 as appropriate using a jig (e.g., positioning pins, guides, etc.).

[0074] Next, the workpiece WP is fixed in place (step S2 in Figure 8). Specifically, as shown in Figure 10, the surface F1 of the die 101 supports the surface 411 of the workpiece WP, and the surface F2 of the pad 103 presses down on the surface 413 of the workpiece WP from above, thereby sandwiching the workpiece WP between the die 101 and the pad 103 and fixing it in place.

[0075] In this case, at least a portion of the straight portions 710A and 710B of the extended portions 700A and 700B is not located between the die 101 and the pad 103. Of the straight portions 710A and 710B, the portion located between the die 101 and the pad 103 corresponds to portion 71 of the limiters 70A and 70B.

[0076] Next, the bending process of the extensions 700A and 700B is performed (step S3 in Figure 8). Here, the punch 105 is moved relative to the die 101 and pad 103. For example, the punch 105 is lowered toward the extensions 700A and 700B. In the example shown in Figure 10, the state before the punch 105 is lowered is shown. Also in the example shown in Figure 10, the dashed line shows the state after the extension 700A has been bent.

[0077] The punch 105 is lowered, for example, at a constant speed, applying a predetermined force to the extensions 700A and 700B. The punch 105 has, for example, curved tip surfaces F3A and F3B. The tip surfaces F3A and F3B come into contact with the extensions 700A and 700B and slide along the surface 413 of the extensions 700A and 700B, bending them along the corners C1A and C1B of the die 101.

[0078] The extensions 700A and 700B are bent to a predetermined angle. Lines L1A and L1B are formed according to the positions of the corners C1A and C1B. The bending radius of the extensions 700A and 700B is set appropriately based on the material, the thickness of the workpiece, and the target bending angle. The bending angle θ2 is, for example, between 95 degrees and 115 degrees. The bending angle is the angle between the base portion 421 and the limiters 70A and 70B.

[0079] In Figure 10, the extensions 700A and 700B after step S3 in Figure 8 are shown by dashed lines. Then, the punch 105 is raised, and the bending process of the extensions 700A and 700B is completed. After going through the above steps S1 to S3, a flexi 40 as shown in Figure 3 can be obtained.

[0080] Next, an example of a method for adjusting the position of lines L1A and L1B in the second direction Y will be described. Figures 11A to 11C are diagrams illustrating an example of a method for adjusting the position of lines L1A and L1B in the second direction Y.

[0081] The die 101 has corners C1A and C1B. As shown in Figure 11A, in a plan view, corner C1A of the die 101 extends along direction D1, and corner C1B of the die 101 extends along direction D2. Corners C1A and C1B are inclined to approach each other as the first direction X progresses.

[0082] Furthermore, die 101 has side surfaces F5A and F5B connected to corners C1A and C1B. Side surfaces F5A and F5B face in opposite directions. Side surfaces F5A and F5B, like corners C1A and C1B, are inclined with respect to the first direction X in a plan view. Side surfaces F5A and F5B extend along directions D1 and D2.

[0083] The positions of lines L1A and L1B in the second direction Y are changed, for example, by adjusting the positions of the corners C1A and C1B of the die 101 in the second direction Y relative to the extensions 700A and 700B. Specifically, in the first direction X, the position of the workpiece WP is moved relative to the die 101. This changes the positions of the corners C1A and C1B in the second direction Y.

[0084] Here, we assume a case where the workpiece WP is moved relative to the die 101. The manufacturing apparatus 1000 may further include an adjustment mechanism 107, as shown in Figure 10. The adjustment mechanism 107 is configured, for example, to allow the workpiece WP to be moved relative to the die 101 in both the first direction X and the direction opposite to the first direction X. The adjustment mechanism 107 may be configured as part of the workpiece WP transport mechanism, or as a separate mechanism from the transport mechanism.

[0085] As described above, the corners C1A and C1B are inclined to approach each other in the first direction X. Here, the position of the workpiece WP relative to the die 101 in Figure 11A is shown as the first position P1.

[0086] For example, as shown in Figure 11B, when the workpiece WP is moved from the first position P1 in the first direction X, the position of the workpiece WP changes to the second position P2. In this case, compared to the first position P1, the position of the corner C1A in the extension 700A moves in the opposite direction to the second direction Y, and the position of the corner C1B in the extension 700B moves in the second direction Y.

[0087] As a result, the positions of lines L1A and L1B move closer to the center of the second direction Y. In this case, when step S3 in Figure 8 is performed, the length W7 of section 71 becomes smaller compared to the example in Figure 11A. Focusing on the gap G3 (shown in Figure 7), the distance W3 becomes larger compared to the example in Figure 11A.

[0088] Furthermore, as shown in Figure 11C, when the workpiece WP is moved from the first position P1 in the direction opposite to the first direction X, the position of the workpiece WP changes to the third position P3. In this case, compared to the first position P1, the position of the corner C1A in the extension 700A moves in the second direction Y, and the position of the corner C1B in the extension 700B moves in the direction opposite to the second direction Y.

[0089] As a result, the positions of lines L1A and L1B move away from the center of the second direction Y. In this case, when step S3 in Figure 8 is performed, the length of section 71 becomes larger compared to the example in Figure 11A. Focusing on the gap G3 (shown in Figure 7), the distance W3 becomes smaller compared to the example in Figure 11A.

[0090] In this way, by moving the position of the workpiece WP relative to the die 101 in the first direction X, the position in which the extensions 700A and 700B are bent can be adjusted. In other words, by moving the position of the workpiece WP relative to the die 101 in the first direction X, the positions of the lines L1A and L1B in the second direction Y can be adjusted.

[0091] The limiters 70A and 70B suppress the tongue portion 42 from moving too far away from the dimple 32 or from excessive gimbal movement when the suspension 10 is subjected to an external impact. Specifically, the movement of the tongue portion 42 is suppressed when the portion 73 of the limiters 70A and 70B comes into contact with the opposing portions 80A and 80B. This suppresses deformation and damage to the suspension 10.

[0092] Figure 12 is a schematic plan view showing the metal base 410 of a flexi-shape according to a comparative example. The metal base 410 has limiters 90A and 90B. The limiters 90A and 90B have a substantially L-shape when viewed in the second direction Y. The portions 91 of the limiters 90A and 90B extend in the first direction X. In other words, the distance between adjacent portions 91 in the second direction Y is substantially constant in the first direction X. Focusing on the relationship with the opposing portions 80A and 80B, each portion 73 is perpendicular to the opposing portions 80A and 80B in a plan view.

[0093] Due to the limited space available for placing the limiter to accommodate the thinner suspension, it is difficult to enlarge the limiter. Therefore, the limiter in the comparative example does not effectively suppress suspension deformation.

[0094] As in this embodiment, by tilting portion 73 of the limiters 70A and 70B in a plan view, portion 73 can be inserted into the inside of the opposing portions 80A and 80B. This makes it possible to increase the engagement area of ​​the limiters 70A and 70B with respect to the opposing portions 80A and 80B compared to the comparative example.

[0095] In this embodiment, the contact area between the limiters 70A and 70B and the opposing parts 80A and 80B can be made larger than in the comparative example, ensuring that the limiters 70A and 70B can reliably perform their function of suppressing deformation. This makes it easier to suppress deformation of the suspension 10. As a result, in this embodiment, the decrease in the reliability of the hard disk drive can be suppressed.

[0096] Furthermore, by increasing the contact area with the opposing parts 80A and 80B compared to the comparative example, the force applied to the limiters 70A and 70B can be distributed throughout, thereby suppressing deformation of the limiters 70A and 70B themselves.

[0097] Furthermore, with the manufacturing method of this embodiment, the distance W3 can be adjusted by relatively moving the position of the workpiece WP relative to the die 101. In other words, the heights of the limiters 70A and 70B can be easily adjusted by relatively moving the position of the workpiece WP relative to the die 101.

[0098] For example, by reducing the height of limiters 70A and 70B, the height of limiters 70A and 70B will have less impact on the thickness of the suspension 10, making it possible to accommodate the use of multiple disk drives in hard disk drives.

[0099] Furthermore, with the manufacturing method of this embodiment, it is not necessary to prepare multiple molds in advance according to the distance W3. Therefore, with this embodiment, it is possible to reduce the manufacturing cost of the metal base 41 and the cost of managing the molds.

[0100] Furthermore, in this embodiment, the limiter structure is formed by the limiters 70A, 70B and the opposing parts 80A, 80B. Since the limiters 70A, 70B and the opposing parts 80A, 80B are each part of the metal base 41, the limiter structure can be easily formed. For example, it is easy to adjust the degree of overlap between the portion 73 of the limiters 70A, 70B and the opposing parts 80A, 80B.

[0101] When a limiter structure is formed by a load beam and a flexi-shaft, the limiter on the flexi-shaft needs to be hooked onto a part of the load beam during assembly, which can sometimes result in improper hooking or deformation.

[0102] In this embodiment, a limiter structure can be formed that is less affected by the assembly accuracy of the load beam 30 and the flexure 40. In other words, in this embodiment, assembly of the flexure 40 and the load beam 30 becomes easier.

[0103] With the flexi-shaft 40 and suspension 10 equipped with the flexi-shaft 40 configured as described above, a decrease in reliability can be suppressed. In addition, various other desirable effects can be obtained from this embodiment.

[0104] Next, other embodiments will be described. In the other embodiments described below, components similar to those in the first embodiment described above will be given the same reference numerals as in the first embodiment, and their detailed descriptions may be omitted or simplified.

[0105] [Second Embodiment] Figure 13 is a schematic plan view showing the metal base 41 of the flexi-sha 40 according to this embodiment. Figure 14 is a schematic side view showing the metal base 41 of the flexi-sha 40 according to this embodiment. Figure 15 is a schematic plan view showing the metal base 41 of the flexi-sha 40 according to this embodiment. In Figure 15, the extensions 700A and 700B are shown before they are bent.

[0106] In this embodiment, the limiters 70A and 70B are connected to the connecting portion 46, and the opposing portions 80A and 80B are connected to the base portion 421, which is different from the first embodiment. Specifically, the limiters 70A and 70B are connected to both ends of the connecting portion 46 in the second direction Y, and the opposing portions 80A and 80B are connected to both ends of the base portion 421 in the second direction Y, respectively.

[0107] Each of the limiters 70A and 70B is formed, for example, by bending a part of the connecting portion 46. The opposing portions 80A and 80B are formed integrally with the base portion 421, for example. In this case, the arrangement of the limiters 70A and 70B and the opposing portions 80A and 80B differs from that of the first embodiment. Specifically, in the third direction Z, the opposing portions 80A and 80B and the limiters 70A and 70B are arranged in this order.

[0108] Each of the limiters 70A and 70B includes a portion 71, a portion 73, and a portion 75, as shown in Figure 13. Portion 71 is connected to a coupling portion 46. Specifically, as shown in Figure 13, portion 71 of limiter 70A extends from the coupling portion 46 in the direction opposite to the second direction Y, and portion 71 of limiter 70B extends from the coupling portion 46 in the second direction Y.

[0109] As shown in Figure 13, portion 73 is inclined with respect to the first direction X in a plan view. Specifically, portion 73 of limiter 70A extends in the opposite direction to direction D2, for example. Similarly, portion 73 of limiter 70B extends in the opposite direction to direction D1, for example.

[0110] The portions 73 of the limiters 70A and 70B are inclined to move away from each other as they move in the first direction X in a plan view. The distance W1 between adjacent portions 73 in the second direction Y increases as they move in the first direction X, as shown in Figure 13.

[0111] Focusing on the opposing portions 80A and 80B, as shown in Figure 14, the portion 73 of the limiters 70A and 70B faces the surface 413 of the opposing portions 80A and 80B with a gap G3 in the third direction Z.

[0112] As shown in Figure 14, portions 73 of limiters 70A and 70B include edges 731 facing the opposing portions 80A and 80B. In plan view, the edge 731 of limiter 70A extends in the direction opposite to direction D2, and the edge 731 of limiter 70B extends in the direction opposite to direction D1.

[0113] The portions 73 of the limiters 70A and 70B are provided substantially parallel to the opposing portions 80A and 80B, for example. Specifically, the edges 731 of the portions 73 of the limiters 70A and 70B are provided substantially parallel to the surfaces 413 of the opposing portions 80A and 80B.

[0114] Section 75 connects sections 71 and 73. Section 75 extends away from the load beam 30 (shown in Figure 3). Section 75 is configured such that section 73 is substantially parallel to the opposing sections 80A and 80B. Section 75 extends in a direction different from both sections 71 and 73. Section 75 may be formed in a straight line or in an arc. Also, section 73 may be directly connected to section 71.

[0115] Furthermore, as shown in Figure 15, focusing on the extensions 700A and 700B, line L1A extends along direction D2, and line L1B extends along direction D1. In this case, from the viewpoint of the mold 100 (shown in Figure 10), corner C1A of die 101 extends along direction D2, and corner C1B of die 101 extends along direction D1. Corners C1A and C1B of die 101 are inclined to move away from each other as they advance in the first direction X.

[0116] The same effects as in the first embodiment can be obtained with the configuration of this embodiment as well.

[0117] [Third Embodiment] Figures 16 and 17 are schematic plan views showing the metal base 41 of the flexure 40 according to this embodiment. In this embodiment, the configuration of the limiters 70A and 70B differs from that of the first embodiment.

[0118] As shown in Figure 17, the extensions 700A and 700B have a substantially L-shape in plan view. In this embodiment as well, the extensions 700A and 700B are bent, similar to the first embodiment.

[0119] In this embodiment, the limiters 70A and 70B are configured such that the gap between them and the opposing portions 80A and 80B increases as they advance in the first direction X. Focusing on portion 73, the edge portion 731 of portion 73 is inclined to move away from the surfaces 411 of the opposing portions 80A and 80B as it advances in the first direction X. In this embodiment, the angle at which lines L1A and L1B in Figure 17 are inclined with respect to the first direction X corresponds to the angle at which the edge portion 731 in Figure 16 is inclined with respect to the first direction X. This angle is, for example, between 0 and 50 degrees.

[0120] In this embodiment as well, the same effects as in the first embodiment can be obtained. Specifically, by tilting portion 73 of the limiters 70A and 70B with respect to the first direction X in a plan view, portion 73 can be inserted into the inside of the opposing portions 80A and 80B. As a result, the engagement area of ​​the limiters 70A and 70B with respect to the opposing portions 80A and 80B can be increased compared to the comparative example shown in Figure 12.

[0121] [Fourth Embodiment] Figures 18 and 19 are schematic plan views showing the metal base 41 of the flexure 40 according to this embodiment. In this embodiment, the configuration of the limiters 70A and 70B differs from that of the second embodiment.

[0122] As shown in Figure 19, the extensions 700A and 700B have a substantially L-shape in plan view. In this embodiment as well, the extensions 700A and 700B are bent, similar to the second embodiment.

[0123] In this embodiment, the limiters 70A and 70B are configured such that the gap between them and the opposing portions 80A and 80B decreases as they advance in the first direction X. Focusing on portion 73, the edge portion 731 of portion 73 is inclined to approach the surface 413 of the opposing portions 80A and 80B as it advances in the first direction X. In this embodiment, the angle at which lines L1A and L1B in Figure 19 are inclined with respect to the first direction X corresponds to the angle at which the edge portion 731 in Figure 18 is inclined with respect to the first direction X. This angle is, for example, between 0 and 50 degrees.

[0124] In this embodiment as well, the same effects as in the second embodiment can be obtained.

[0125] Furthermore, the manufacturing apparatus 1000 and manufacturing method disclosed in the first embodiment can also be applied to the metal base 41 of the flexi 40 in the second to fourth embodiments. However, the configuration of the mold 100 can be appropriately changed depending on the inclination of the lines L1A and L1B. In addition, although the above embodiments disclose an example in which the metal base 41 has two limiters, the number of limiters is not limited to the above example.

[0126] In each of the embodiments described above, surface 411 of the metal base 41 is an example of a first surface, surface 413 of the metal base 41 is an example of a second surface, limiters 70A and 70B are examples of a first and second limiter, and opposing parts 80A and 80B are examples of a first and second opposing part. Also, part 73 is an example of a control part, base part 421 is an example of a first base part, connecting part 46 is an example of a second base part, fixing part 44 is an example of a third base part, edge part 731 is an example of a side part, and extension parts 700A and 700B are examples of a first and second extension part. Also, die 101 is an example of a first die, pad 103 is an example of a second die, punch 105 is an example of a third die, and corners C1A and C1B of die 101 are examples of a first and second corner.

[0127] In implementing each of the above embodiments, the specific forms of each element constituting the hard disk drive, including the specific forms of the load beam and flexi-shaft, can be changed in various ways.

[0128] Various embodiments can be formed by appropriately combining the multiple components disclosed in each of the embodiments described above. For example, some components may be removed from all the components shown in each embodiment. Furthermore, components from different embodiments may be combined as appropriate. [Explanation of symbols]

[0129] 1...Hard disk drive, 10...Suspension, 30...Road beam, 40...Flexisha, 41...Metal base, 42...Tang section, 43...Frame section, 44...Fixed section, 45A,45B...Outrigger, 46...Connecting section, 70A,70B...Limiter, 71,73,75...Part, 80A,80B...Opposite section, 100...Mold, 101...Die, 103...Pad, 105...Punch, 411,413...Surface, 421...Base section, 700A,700B...Extension section, 731...Edge section, 1000...Manufacturing equipment, C1A,C1B...Corner section, L1A,L1B...Line (bending line), WP...Workpiece.

Claims

1. A flexible shaft that is superimposed on the road beam of a suspension for a hard disk drive, The metal base comprises a first surface facing the road beam and a second surface opposite to the first surface, The aforementioned metal base is The first limiter and the second limiter are arranged in the width direction of the metal base, It has a first opposing portion and a second opposing portion facing the first limiter and the second limiter, The first limiter and the second limiter have control sections that face the first opposing section and the second opposing section with a gap in the thickness direction of the metal base, and are inclined with respect to the longitudinal direction of the metal base in a plan view. A flexi-shaft suspension for hard disk drives.

2. The aforementioned metal base is A first base section to which the first limiter and the second limiter are connected, The present invention further comprises a second base portion, which is provided on the tip side of the first base portion in the longitudinal direction and to which the first opposing portion and the second opposing portion are connected. A flexure for a hard disk drive suspension according to claim 1.

3. The control unit faces the first surface of the second base portion with a gap in the thickness direction, The flexure for a hard disk drive suspension according to claim 2.

4. Each of the control units of the first limiter and the second limiter is inclined so as it moves toward each other in a plan view, A flexisha for a hard disk drive suspension according to claim 3.

5. The aforementioned metal base is A first base portion to which the first opposing portion and the second opposing portion are connected, The present invention further comprises a second base portion, which is provided on the tip side of the first base portion in the longitudinal direction and to which the first limiter and the second limiter are connected. A flexure for a hard disk drive suspension according to claim 1.

6. The control unit faces the second surface of the first base portion with a gap in the thickness direction, The flexure for a hard disk drive suspension according to claim 5.

7. Each of the control units of the first limiter and the second limiter is inclined to move away from each other as it moves along the longitudinal direction in a plan view. A flexure for a hard disk drive suspension according to claim 6.

8. The distance in the thickness direction between the first limiter and the second limiter and the first opposing portion and the second opposing portion is substantially constant in the longitudinal direction when viewed in the width direction. A flexi-shaft for a hard disk drive suspension according to any one of claims 1 to 7.

9. The control unit has sides that are substantially parallel to the first opposing portion and the second opposing portion. The flexure for a hard disk drive suspension according to claim 8.

10. The metal base further has a third base portion which is provided on the tip side of the second base portion, is connected to the second base portion, and is fixed to the road beam. A flexisha for a hard disk drive suspension according to claim 2 or 5.

11. A method for manufacturing a flexisha according to claim 1, A workpiece having a first extension and a second extension extending in the width direction for the first and second limiters is placed in a first mold having a first corner and a second corner inclined with respect to the longitudinal direction in a plan view. The workpiece is fixed by sandwiching it between the first type and the second type. This includes moving the third type relative to the first and second types, and bending the first and second extensions by the first and second corners, The arrangement described above includes adjusting the positions of the first and second corners in the width direction relative to the first and second extensions, Manufacturing method.

12. The adjustment described above includes moving the workpiece relative to the first type in the longitudinal direction. The manufacturing method according to claim 11.

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