Direct-drawing exposure apparatus and exposure method

The direct-drawing exposure apparatus with multiple exposure heads and rangefinders addresses deviations in exposure surface shapes by accurately measuring and adjusting focal positions, ensuring high-quality exposure processing.

JP2026142623APending Publication Date: 2026-09-08ADTEC ENG
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Patent Information

Application Number
JP2025029695
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-02-27
Publication Date
2026-09-08

AI Technical Summary

Technical Problem

Existing exposure technologies face challenges in achieving high-quality exposure processing when the shape of the exposure surface deviates significantly from the standard, necessitating waveform blunting to enable focus adjustment.

Method used

A direct-drawing exposure apparatus with a stage, multiple exposure heads, autofocus modules, and rangefinders is used to measure and adjust the focal position accurately, ensuring high-quality exposure by determining and correcting deviations in the distance between exposure heads and the illumination surface.

Benefits of technology

This approach enables high-quality exposure processing by accurately measuring and adjusting the focal position, thereby improving exposure precision and reducing errors due to substrate thickness variations.

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Abstract

To provide a direct-drawing exposure apparatus and exposure method that enable high-quality exposure processing. [Solution] The direct-draw exposure apparatus irradiates the illumination surface with exposure light while transporting the substrate in a first direction parallel to the illumination surface. The substrate is placed on the stage. Each exposure head irradiates the illumination surface with exposure light. A moving mechanism moves the stage in the first direction and in a second direction perpendicular to the illumination surface. An autofocus module is provided on at least one of the exposure heads and has a tracking range. A first rangefinder measures the exposure distance in a second direction between the exposure head and the illumination surface and has a first measurement range wider than the tracking range. A second rangefinder measures the exposure distance and has a second measurement range wider than the first measurement range. A controller determines whether the exposure distance exceeds the first measurement range based on the distance measured by the first rangefinder and the distance measured by the second rangefinder.
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