Optical waveguide element, optical modulation device using the same, and optical transmission device

By employing a high-density and low-density intermediate layer structure with controlled hydroxyl group concentrations and voids, the optical waveguide element addresses Li diffusion and DC drift issues, enhancing mechanical strength and high-frequency performance for miniaturized optical modulation and transmission devices.

JP2026142925APending Publication Date: 2026-09-08SUMITOMO OSAKA CEMENT CO LTD
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Patent Information

Application Number
JP2025030219
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-02-27
Publication Date
2026-09-08

AI Technical Summary

Technical Problem

Optical waveguide elements with thin lithium niobate substrates face issues of Li diffusion and DC drift due to the presence of an intermediate layer, which degrades propagation characteristics and mechanical strength, especially when used in high-bandwidth coherent driver modulators.

Method used

The optical waveguide element incorporates a high-density intermediate layer on the support substrate side and a low-density layer on the optical waveguide substrate side, with controlled hydroxyl group concentrations and thicknesses to suppress Li diffusion and DC drift, and may include a buffer layer and voids to enhance mechanical strength and high-frequency characteristics.

Benefits of technology

This configuration effectively suppresses Li diffusion and DC drift, maintaining mechanical strength and improving high-frequency characteristics, enabling miniaturization and efficient operation of optical modulation and transmission devices.

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Abstract

The present invention provides an optical waveguide element that suppresses the occurrence of DC drift phenomena due to the diffusion of materials constituting the optical waveguide substrate, such as Li diffusion, even when an intermediate layer is present between the optical waveguide substrate and the support substrate. [Solution] The optical waveguide element comprises an optical waveguide substrate 1 having an optical waveguide OW, a support substrate 3 supporting the optical waveguide substrate, and an intermediate layer formed between the optical waveguide substrate and the support substrate, wherein the intermediate layer is composed of a high-density layer 21 disposed on the support substrate side and having a high density, and a low-density layer 20 disposed on the optical waveguide substrate side and having a lower density than the high-density layer.
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