Part, timepiece movement having part, timepiece having timepiece movement, and method for manufacturing part

Abstract

To provide a component capable of improving dimensional accuracy, and when fitting two components, performing joining and integration with no deformation, simultaneously suppressing outward protrusion of a bonding material, suppressing deterioration in a function and appearance as a component, and improving fitting force.SOLUTION: With an ankle 709, a shaft hole unit into which a shaft 701 is inserted has a two-stage opening unit. In the opening unit on a shaft insertion side of the two-stage opening unit, an inclined portion 706 is provided whose opening is widened from a shaft insertion direction toward an inside. The shaft 701 is mounted by a joining member made of metal filled in a space formed between the opening unit and the shaft 701.SELECTED DRAWING: Figure 7

Description

[Technical field]

[0001] The present invention relates to a component, a timepiece movement comprising the component, a timepiece comprising the timepiece movement, and a method for manufacturing the component. [Background technology]

[0002] The effect of magnetism on mechanical watches has long been a problem, but in recent years, the number of magnets or magnetic-generating products mounted on or used to charge portable devices such as mobile phones, smartphones and tablets has increased. Mechanical watches, which are also portable devices, are often placed nearby, and the parts that make up the watch movement built into them are affected by this magnetism, causing errors in the time display and, in severe cases, causing the watch to stop working. For this reason, it is desirable to minimize the influence of magnetism in the parts that make up a timepiece movement, particularly in a component called the escapement, which has a significant impact on the accuracy of timekeeping.

[0003] Of the components that make up this escapement, the anchor and escape wheel are often made from electroformed parts produced using a technology called UV-LIGA, or silicon parts produced by silicon etching, due to their high precision. Materials for electroformed non-magnetic parts produced by the former UV-LIGA include amorphous nickel-phosphorus alloys (see, for example, Non-Patent Documents 1 and 2). On the other hand, the latter silicon parts, due to their property of not being affected by magnetism (hereinafter referred to as non-magnetic), are widely used as antimagnetic timepiece parts that are not easily affected by magnetism, such as hairsprings, pallets, and escape wheels. However, due to the brittleness of silicon, these parts are often connected to the shaft parts that fit together and are integrated with them by bonding with adhesives or joining with solder, and many proposals have been made for the structure of these fitting parts (for example, see Patent Documents 1 to 3). [Prior art documents] [Non-patent literature]

[0004] [Non-Patent Document 1] Horological Journal August 2001 pp275-277 [Non-Patent Document 2] Advanced Materials Research Vols.317-319(2011)pp1635-1639 [Patent documents]

[0005] [Patent Document 1] Special Publication No. 2012-500386 [Patent Document 2] JP 2002-276771 A [Patent Document 3] JP 2012-215183 A Summary of the Invention [Problem to be solved by the invention]

[0006] However, many of the parts made with UV-LIGA or silicon are thin, such as gears, to which a part that acts as a rotating shaft is often attached. In this case, the part that acts as the shaft is often integrated with a gear or a flange-like structure called a pinion. These two parts are integrated by pressing or gluing the shaft into an opening formed in the UV-LIGA part or silicon part.

[0007] In UV-LIGA, nickel electroforming is often used, making it possible to press in the shaft by utilizing plastic deformation. However, non-magnetic amorphous nickel-phosphorus alloys, etc., are hard but difficult to press in with the shaft due to their brittleness, and there was a problem of breakage due to pressing in.

[0008] When attaching shafts to such brittle materials, adhesive fixation is the main method used. When inserting a shaft into a part such as a gear made of brittle material, a relatively large gap is required to prevent breakage due to brittleness, taking into account the processing tolerance. In this case, if the amount and location of adhesive application is not strictly controlled, the adhesive may adhere to unnecessary parts of the gear or shaft, causing functional defects or problems with the appearance after bonding.

[0009] In addition, when welding or a similar connection is performed, high temperatures are generated, which can cause amorphous nickel-phosphorus alloys and the like to crystallize in whole or in part, changing the non-magnetic material into a magnetic material that is affected by magnetism. In addition, the welded part is visible from the outside, which can cause problems with appearance. In addition, when connecting by soldering, there are problems with the method of placing the solder material on the microscopic parts and the solder's bondability, and in particular, the bondability and wettability of normal solder materials that are mainly composed of tin are poor for amorphous nickel-phosphorus alloys, making it difficult to achieve a reliable connection. Furthermore, depending on the temperature and time involved in the joining, there is a problem in that the amorphous nickel-phosphorus alloy can crystallize, just like welding.

[0010] The present invention has been made in consideration of the above problems, and aims to provide a part, a timepiece movement having a part, a timepiece having a timepiece movement, and a method for manufacturing a part, which can increase dimensional accuracy, suppress deformation and overflow of adhesive during fitting, improve fitting force, and suppress appearance defects. [Means for solving the problem]

[0011] A part according to a first aspect is a part including a first part formed to a predetermined thickness and made of a brittle material, and a second part fitted to the first part, wherein the first part has two openings of a two-stage structure at a portion where the first part fits to the second part, and a first opening of the two-stage structure on a side where the second part is inserted is wider than a second opening of the two-stage structure, and a joint made of a metal joint material is provided in a gap between the first part and the second part formed in the opening of the two-stage structure. The first opening of the first component has an inclined portion that is spaced apart in the width direction from a surface on the side where the second component is inserted toward a step portion formed with the second opening.

[0013] The part of the second aspect is the first aspect, wherein the first opening of the first part has an inclined portion that is spaced apart in the width direction from the surface on the side where the second part is inserted toward a step portion formed with the second opening.

[0014] moreover, The first opening in the first part has a slope that narrows in the width direction toward the side where the second part is inserted, i.e., the side having a gear or flange with a wider area in the width direction than the first opening, thereby preventing the metal bonding material sealed in the gap from coming out of the second part due to external force. Furthermore, by making the shape of the first opening different from that of the second opening, the strength in the rotational direction can be further increased by the metal bonding material filled in the gap.

[0015] No. 2 The part according to the embodiment is First aspect In the above-mentioned embodiment, a part or the whole of the first component is an amorphous material containing phosphorus.

[0016] No. 2 In the embodiment, the material constituting the first component includes an amorphous substance containing phosphorus. Such substances include nickel-phosphorus alloy, cobalt-phosphorus alloy, nickel-cobalt-phosphorus alloy, etc., and since they can be produced by UV-LIGA, they can be used as non-magnetic materials that have complex shapes and high precision, and are furthermore amorphous.

[0017] No. 3 In the component according to this embodiment, a part or the whole of the first component is an amorphous material made of nickel-phosphorus.

[0018] No. 3 In this embodiment, the material constituting the first component is an amorphous material made of nickel-phosphorus, and therefore it can be easily produced by UV-LIGA.

[0019] No. 4 In the part according to this aspect, a part or the whole of the first part is made of silicon.

[0020] No. 4 In the embodiment, since the material constituting the first component is made of silicon, a highly accurate, fine, non-magnetic component can be easily produced using photolithography and a dry etching method called Deep-RIE (Reactive Ion Etching).

[0021] No. 5 In the component according to the aspect, the metal joining material is a solder material.

[0022] No. 5 In the aspect, since a solder material is used as the metal joining material used to fit the first component and the second component, when the solder material is filled into the gap formed between the first opening, the second opening, and the second component, the fluidity imparted by heating and melting the solder material allows the solder material to fill the gap along the shape of the gap, thereby increasing the fitting strength between the first component and the second component. Furthermore, since a solder material is used as the metal bonding material used to fit the first and second components, it can be machined or electroformed into a preform shape in advance, and can be placed in the step formed by the first and second openings before the second component is inserted, making it possible to form a metal bonding part easily and with high precision. Furthermore, since the preformed solder material can be attached to a second component, a metal joint can be formed easily and with high precision.

[0023] No. 6 In the component according to the embodiment, the metal joining material is made of a brazing material.

[0024] No. 6 In the aspect, since the brazing material is used as the metal joining material used to fit the first part and the second part, when the brazing material is filled into the gap formed between the first opening, the second opening, and the second part, the fluidity imparted by heating and melting the brazing material allows the brazing material to fill the gap along the shape of the gap, thereby increasing the fitting strength between the first part and the second part. Furthermore, since a solder material is used as the metal bonding material used to fit the first and second components, it can be machined or electroformed into a preform shape in advance, and can be placed in the step formed by the first and second openings before the second component is inserted, making it possible to form a metal bonding part easily and with high precision. Furthermore, since the brazing material in the preform shape can be attached to the second component, a metal joint can be formed easily and with high precision.

[0025] No. 7 The component according to this aspect is a component having a diffusion layer containing an element contained in the metallic bonding material in at least one of the first component and the second component.

[0026] No. 7 In this aspect, at least one of the elements constituting at least one of the first part or the second part forms a diffusion layer with an element contained in the metal joining material, thereby increasing the fitting strength.

[0027] No. 8 The clock movement according to the embodiment is the first to third embodiments. 7 The present invention has a component according to any one of the above aspects.

[0028] No. 8According to this aspect, the fitting force of the parts can be improved, and a timepiece movement that is low cost, shock resistant, and has excellent magnetic resistance can be provided.

[0029] No. 9 The watch according to the embodiment is 8 The present invention relates to a clock movement.

[0030] According to the ninth aspect, the fitting force of the parts can be improved, and a low-cost, shock-resistant timepiece can be provided.

[0031] No. 10 The embodiment is the same as the first embodiment to the third embodiment. 3 The form of , the fifth aspect to the seventh aspect The method for manufacturing a part according to any one of the above aspects includes a first coating step of coating a first photoresist layer on a substrate to a first thickness, a first exposure step of partially exposing the first photoresist layer through a first photomask, a second coating step of coating a second photoresist layer on the first photoresist layer to a second thickness, a second exposure step of partially exposing the second photoresist layer through a second photomask, and developing the exposed first photoresist layer and the second photoresist layer to expose the substrate. the forming step of forming a molding die having an opening having an outer shape of the metal part; the forming step of depositing metal inside the opening by immersing the molding die in an electroforming solution and passing an electric current through it to perform an electroforming process, or by immersing the molding die in an electroless plating solution and performing an electroless plating process to form a metal body of a desired thickness along the molding die; the thickness adjusting step of adjusting the thickness of the metal body to the predetermined thickness; and the removal step of removing the first photoresist layer, the second photoresist layer, and the substrate to obtain a metal part.

[0032] No. 10 According to this aspect, a first component having a first opening and a second opening and made of nickel-phosphorus or the like can be produced by electroforming.

[0033] No. 11 The embodiment of the present invention is as follows: First aspect, fourth aspect to seventh aspect The method for manufacturing a component according to any one of the preceding aspects, comprising: A first photoresist layer is applied to the on a second surface opposite the first surface 2nd a first exposure step of partially exposing the first photoresist layer through a first photomask; a second exposure step of partially exposing the second photoresist layer through a second photomask; a development step of developing the exposed first photoresist layer and the second photoresist layer to open parts of the photoresist layers and expose parts of the silicon substrate; a first etching step of etching a part of the silicon substrate where silicon is exposed in the first surface; a second etching step of etching a part of the silicon substrate where silicon is exposed in the second surface; and a removal step of removing the first photoresist layer and the second photoresist layer.

[0034] No. 11 According to this aspect, a first component made of silicon having a first opening and a second opening can be fabricated. Effect of the Invention

[0035] According to the present invention, it is possible to improve the dimensional accuracy, and at the same time, it is possible to obtain a part that has sufficient strength without damaging the brittle material during fitting, and also has an excellent appearance. [Brief description of the drawings]

[0036] [Figure 1] FIG. 1A is a diagram showing the shape of the ankle in the first embodiment of the present invention, FIG. 1B is a diagram showing a cross section taken along line A-A' in FIG. 1A, and FIG. 1C is a diagram showing a cross section taken along line B-B' in FIG. [Diagram 2] 1A to 1G are diagrams showing a method for manufacturing an pallet fork body, which is a first part, according to a first embodiment of the present invention. [Diagram 3]1A to 1C are diagrams showing a method for manufacturing an pallet fork body, which is a first part, according to a first embodiment of the present invention. [Figure 4] 1(A) to 1(E) are diagrams illustrating a first embodiment of the present invention, showing a process of fitting a shaft, which is a second part, into an pallet body, which is a first part. [Diagram 5] 1(A) to 1(C) are diagrams illustrating a first embodiment of the present invention, showing a process of fitting a shaft, which is a second part, into an pallet body, which is a first part. [Figure 6] 1A to 1C are diagrams illustrating examples of shapes of a shaft hole portion provided in an pallet fork body, which is a first part, according to a first embodiment of the present invention. [Figure 7] 1(A) and 1(B) are diagrams illustrating examples of the form of a fitting portion between an pallet body, which is a first part, and a shaft, which is a second part, according to a first embodiment of the present invention. [Figure 8] 1(A) and 1(B) are diagrams illustrating examples of the form of a fitting portion between an pallet body, which is a first part, and a shaft, which is a second part, according to a first embodiment of the present invention. [Figure 9] 1(A) and 1(B) are diagrams illustrating examples of the form of a fitting portion between an pallet body, which is a first part, and a shaft, which is a second part, according to a first embodiment of the present invention. [Figure 10] 1(A) and 1(B) are diagrams illustrating examples of the form of a fitting portion between an pallet body, which is a first part, and a shaft, which is a second part, according to a first embodiment of the present invention. [Figure 11] FIG. 5 shows a second embodiment of the present invention, in which (A) is a diagram showing the planar shape of an escape wheel and (B) is a diagram showing the cross-sectional shape of a pinion. [Figure 12] 1(A) to 1(F) are diagrams showing a method for manufacturing an escape wheel, which is a first part, according to a second embodiment of the present invention. [Figure 13] 13(A) and 13(B) are diagrams illustrating a second embodiment of the present invention, showing a process of fitting a pinion, which is a second part, into an escape wheel, which is a first part. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0037] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. (First embodiment) Fig. 1(A) is a diagram showing an anchor according to the first embodiment. The anchor is a very important part of the movement that constitutes a timepiece, called an escapement, which is related to the drive and precision of the timepiece and requires high precision. In addition, since it is a component that is easily affected by magnetism, it is desirable to use a non-magnetic material.

[0038] An pallet fork 101 which is a part of the present invention is composed of an pallet body 102 which is a first part, a shaft 103 which is a second part, a pallet stone 104 made of ruby, and a tip 105. The pallet body 102 is made of an amorphous and non-magnetic nickel-phosphorus alloy and is produced by UV-LIGA. This nickel-phosphorus alloy is a very brittle material, and is subject to destruction or breakage when mechanically fitted by hammering, press-fitting, or the like. The shaft 103 is made by machining using a non-magnetic stainless steel material.

[0039] Fig. 1(B) is a cross-sectional view of the A-A' portion in Fig. 1(A). The fitting portion of the pallet body 102 has a first opening 107 having an inclined portion 106 that widens in the width direction toward the inside, and a second opening 108 that widens in the width direction from the inside toward the outside. The shaft 103 is provided with a flange 109 and has a size that completely hides the first opening 107 of the pallet body 102 after fitting. The pallet body 102 and the shaft 103 are fitted together by a joint 110 having a shape sealed in the first opening 107 to form the pallet 101 which is an integrated part. The joint 110 is, for example, a solder material containing tin and a small amount of copper.

[0040] FIG. 1(C) is a diagram showing a cross section of portion B-B' in FIG. 1, in which the ankle body 102 is fitted and integrated with the tip 105 via a joint 113 which is a solder material filled in an opening 112 having a sloping portion 111 which extends in the width direction from the non-penetrating opening surface side formed from one surface toward the inside.

[0041] Such an ankle body 102 is manufactured through a first coating step, a first exposure step, a second coating step, a second exposure step, a developing step, a molding step, a thickness adjustment step, and a removal / separation step shown in Figures 2 and 3. Each of these steps will be described in detail below.

[0042] In the first coating step, as shown in Fig. 2(A), a conductive film 202 is formed on one surface of a silicon wafer 201. The conductive film 202 is made of a metal such as gold, copper, or chromium, but may be composed of a layer structure of multiple films. The formation method may be a vapor-phase plating method such as a vacuum deposition method or a sputtering method, or a wet plating method such as electroless plating. The film thickness is preferably in the range of several nm to several μm. Next, a photoresist is applied onto the conductive film 202 to form a first photoresist layer 203 shown in Fig. 2(B). In this embodiment, the thickness of the first photoresist layer 203 is set to 75 µm. Either a negative type or a positive type photoresist can be used as the photoresist, but in this embodiment, an example in which a negative type photoresist is used will be described.

[0043] Next, a first exposure step is performed. In the first exposure step, exposure is performed using a first photomask (not shown) to form an exposed portion 204 that becomes the first opening 107 shown in FIG. 2(C). Since ultraviolet light incident from the photomask side (not shown) is absorbed by the first photoresist layer 203, the exposed portion 204 has a distribution of exposure amount in the depth direction, and the exposed portion 204 where the photoresist hardens shrinks in the thickness direction as shown in FIG. 2(C), forming an inclined portion 206 at the boundary with the unexposed portion 205. The angle of the inclined portion 206 can be controlled within a range of about +1 degree (the exposed portion widens in the thickness direction) to -5 degrees (the exposed portion narrows in the thickness direction) with respect to the vertical, depending on the exposure amount. In this embodiment, the exposure amount was set so that the width narrows toward the inside of the photoresist with an inclination of -1 degree.

[0044] Next, in the second coating step, the same photoresist as that used for the first photoresist layer 203 is coated on the first photoresist layer 203 to form a second photoresist layer 207 as shown in Fig. 2(D). This second photoresist layer 207 is integrated with the unexposed portion 205 of the first photoresist layer 203 to form a photoresist layer 208 having a thickness of 180 μm as shown in Fig. 2(E).

[0045] Next, in the second exposure step, exposure is performed using a second photomask (not shown) to obtain exposed portion 209 and exposed portion 210 shown in Fig. 2(F). Exposed portion 209 is the portion of the fitting portion that is to become second opening 108, and exposed portion 210 has a shape that is to become the outer shape of pallet body 102. Note that non-through opening 112 for fitting tip 105 shown in Fig. 1(C) may be formed without exposure using a second photomask (not shown).

[0046] Next, a development step is performed by immersing the mold in a developer (not shown), and a molding die 212 having an opening 211 as shown in FIG.

[0047] Next, the molding process is performed. Figure 3 is a diagram of the process related to electroforming in the method of manufacturing the pallet body. In the molding process, the mold 212 is immersed in a nickel-phosphorus alloy electroforming bath (not shown), and a nickel-phosphorus alloy with a thickness of 200 μm is electroformed in the mold 301 shown in Figure 3 (A) to obtain an electroformed body 302. The electroforming bath used is made of nickel sulfate and phosphorous acid, and the conditions are set so that the phosphorus content of the electroformed alloy is 14 wt%. This precipitate with a phosphorus content of 14 wt% is amorphous and at the same time exhibits nonmagnetic properties.

[0048] Next, a thickness adjustment step is performed. After electroforming is completed, the thickness and surface of the electroformed body 302 are adjusted using a grinding device and a polishing device (not shown) to obtain an electroformed body 303 having a desired thickness.

[0049] Finally, a removal and separation process is performed. An pallet body 304 made of nickel-phosphorus alloy electrocasting is obtained by peeling off and dissolving unnecessary parts of the mold 301 in which the electroformed body 303 with adjusted thickness and surface is formed. In this pallet body 304, the shaft hole 305 into which the shaft 103 is to be fitted is composed of a first opening 306 and a second opening 307 of a two-stage structure, and the first opening 306 is wider in the width direction than the second opening. In addition, the side wall of the first opening 306 has a first inclined portion 308 that spreads from the opening surface side toward the inside. That is, the first opening 306 has an inclined portion that is spaced apart in the width direction from the surface on the side where the shaft 103 is inserted toward the step portion formed with the second opening 307. In addition, the second opening 307 has a second inclined portion 309 that spreads from the inside toward the outside toward the opposite surface.

[0050] Next, the attachment of the shaft 103, which is the second part, to the pallet body 102, which is the first part, will be described. FIG. 4 is a cross-sectional view of each part showing the fitting process. As shown in FIG. 4(A), of the anchor body 401, which is the first part, the shaft hole 402, which is the fitting part, is composed of a first opening 403, a second opening 404, and a bottom 405 formed by these openings.

[0051] First, as shown in FIG. 4(B), a solder washer 406 made of tin containing 0.7% copper as a main component is placed using the first opening 403 and the bottom 405. Next, as shown in FIG. 4(C), shaft 408 having flange 407 is placed into shaft hole 402 from the first opening 403 side. The shaft 408 has flange 407, and the shaft hole 402 side of flange 407 has a protrusion 409 that is large enough to be inserted into first opening 403 but not into second opening 404.

[0052] 4(D), shaft 408 is press-fitted to pallet body 401. At this time, even if solder washer 406 is, for example, annular and its inner diameter is smaller than the outer diameter of true part 410, true part 410 can be inserted into second opening 404 without affecting pallet body 401, which is made of a brittle material, because solder washer 406 is very soft.

[0053] 4(E), by heating and melting the solder washer to above 230° C., which is the liquidus temperature of the solder washer, the solder washer 406 becomes fluid and is deformed into the shape of first opening 403, and part or all of protrusion 409 on shaft 408 is inserted into first opening 403 to form joint 411, thereby fitting and integrating pallet body 401 and shaft 408. At this time, the filling amount of joint 411 can be adjusted by appropriately determining the dimensions of protrusion 409 and solder washer 406.

[0054] In this embodiment, the solder washer 406 is inserted and placed in the first opening 403 of the pallet body 401, which is the first component, but as shown in FIG. 5, it may be placed on the shaft 501 side, which is the second component. Furthermore, if solder washer 504 is heated and melted, and flows not only into first opening 506 but also into gap 512 formed between second opening 508 and shaft 501 without causing any problems in appearance, this is a preferable state since it increases the fitting strength.

[0055] Furthermore, in this embodiment, the shapes of first opening 403 and second opening 404 in the planar direction are not particularly limited. Another example of the shape in the planar direction is shown in Fig. 6. Fig. 6(A) is a diagram showing a cross section of an pallet body 601, which is the first component, and shows a first opening 602, a second opening 603, and a bottom portion 604.

[0056] FIG. 6(B) is an example of an enlarged view of the first opening 602, the second opening 603, and the bottom 604 as viewed from direction C in FIG. 6(A), showing a first opening edge 605 having a circular shape, a second opening edge 606 having a circular shape, and a bottom 607. FIG. 6(C) is another example, showing an enlarged view of the first opening 602, the second opening 603, and the bottom 604 as viewed from the direction C in FIG. 6(A), in which the second opening edge 608 is circular in shape while the first opening edge 609 is irregular in shape.

[0057] Further, another embodiment of this embodiment is shown in Fig. 7. As shown in Fig. 7(A), the cross-sectional shape of protrusion 702 formed integrally with shaft 701 is made to narrow toward flange 703. As a result, by heating and melting solder washer 704 and press-fitting it, protrusion 702 acts like a wedge inside joint 707 as shown in Fig. 7(B), and the strength of shaft 701 against removal force is increased.

[0058] Furthermore, in this embodiment, a non-magnetic stainless steel material is used for the shaft 103, and a nickel-phosphorus electroformed material is used for the pallet body 102, but these materials or materials having a plated layer on the surface may also be used. It goes without saying that materials other than stainless steel may also be used.

[0059] Another embodiment of this embodiment is shown in Fig. 8. Fig. 8(A) shows an electroless nickel-boron plating layer 802 with high solder wettability formed on the surface of shaft 801 made of an iron-based material, a non-magnetic gold plating layer 804 formed on the surface of pallet body 803 made of nickel-phosphorus, and a solder washer 805 made of tin containing 0.7% copper arranged, and Fig. 8(B) shows a solder washer 805 melted by heating to integrate shaft 801 and pallet body 803, forming diffusion layer 807 made of tin and nickel at the interface between joint 806 made of solder material and shaft 801, and diffusion layer 808 made of tin and gold at the interface between joint 806 made of solder material and pallet body 803.

[0060] In pallet fork 809, which is a part according to the present invention having this joint 806, since it has joint 806 that forms diffusion layer 808 having a very strong bond between pallet body 803, which is the first part according to the present invention, and shaft 801, which is the second part, 808, it is possible to obtain a part with excellent strength.

[0061] Yet another embodiment of this embodiment is shown in Fig. 9. Fig. 9(A) shows an example in which a plating layer 902 with high solder wettability is formed only on shaft 901, while Fig. 9(B) shows a diagram in which a solder washer 903 is melted by heating, shaft 901 and pallet body 904 are integrated, and a diffusion layer 905 made of tin and nickel is formed at the interface between joint 906 made of solder material and shaft 901. In this case, diffusion layer 905 is formed between shaft 901 and joint 906, providing a strong joint. Ankle body 904 exhibits strength against the removal force direction due to inclined portion 907, and by giving the planar cross-sectional structure an irregular shape other than a circular shape, such as the shape shown in Fig. 6(C), it becomes possible to exhibit strength against forces in the rotational direction.

[0062] Furthermore, another embodiment of this embodiment is shown in Fig. 10. Fig. 10(A) shows an example in which a plating layer 1002 having solder wettability is formed on the surface of an pallet body 1004, and Fig. 10(B) shows a diagram in which a solder washer 805 is melted by heating, and shaft 801 and pallet body 803 are integrated together. In this case, diffusion layer 1005 is formed at the interface between pallet body 1004 and joint 1006 made of solder material, which increases the joint strength between pallet body 1004 and joint 1006. In order to increase the strength with the shaft 1001 side, it is preferable that the planar cross-sectional structure of convex portion 1007 of shaft 1001 be a shape other than circular.

[0063] In addition, in this embodiment including another embodiment example, as shown in FIG. 1, when fitting the anchor body 102, which is the first part, into the shaft 103, a joint 110 is provided in the gap between the first opening 107 and the second opening 108 and the shaft 103, and this joint 110 is covered with a flange 109, so that it can be hidden and no problems arise in appearance.

[0064] The above describes the pallet fork according to the present invention as the first component, the pallet body made of electrocast non-magnetic, amorphous nickel-phosphorus alloy, and the second component, the ribbed shaft made of stainless steel or iron-based material, but it goes without saying that the present invention can also be applied to similar electrocast escape wheels, shaft parts called pinions or shafts with ribs fitted to regular gears, etc. Furthermore, it is possible to manufacture a watch movement using this component, and a watch using this watch movement.

[0065] Second embodiment Fig. 11 shows a second embodiment of the present invention, where Fig. 11(A) is a diagram showing the planar shape of the escape wheel and Fig. 11(B) is a diagram showing the cross-sectional shape of the pinion. This diagram shows a silicon escape wheel 1101, which is a first part, and a metal pinion 1102, which is a second part, and these two parts are used as an integrated part through a shaft hole 1103.

[0066] FIG. 12 is a cross-sectional view for explaining the manufacturing process of the silicon escape wheel 1101, and the process is composed of a coating process, a first exposure process, a second exposure process, a developing process, a first etching process, a second etching process, and a removal process.

[0067] First, in the coating step, a first positive photoresist layer 1203 and a second positive photoresist layer 1204, from which exposed areas are removed by development, are coated on both sides of a silicon wafer 1202 shown in FIG. 12(A).

[0068] Next, in a first exposure step, an exposed portion 1205 is formed on one surface of the silicon wafer using a first photomask (not shown) shown in FIG. 12(B). Next, in a second exposure step, an exposed portion 1206 and an exposed portion 1207 are formed on another surface opposite to the one surface of the silicon wafer, using a second photomask (not shown) shown in FIG. 12(B).

[0069] Next, in the development step, as shown in FIG. 12(C), the exposed portions 1205, 1206 and 1207 are removed by immersing the substrate 1201 in a developer (not shown).

[0070] Next, in the first etching step, as shown in FIG. 12(D), a so-called silicon deep etching technique called D-RIE (Deep-Reactive Ion Etching) is used, with SF as the reactive gas. 6 and CF 4 is used to etch an opening 1208 on a first surface of silicon wafer 1202 to the center of the thickness of silicon wafer 1202, forming first opening 1210 and outer shape portion 1211. By setting appropriate etching conditions, first opening 1210 can be made to widen toward the inside of silicon wafer 1202, resulting in a structure having an inclined portion 1212 and a bottom portion 1213.

[0071] Next, in the second etching step, as shown in Fig. 12(E), similarly to the first etching step, etching of the opening 1209 on the second surface is performed until the bottom 1213 and the outer shape portion 1211 of the first opening 1210 formed in the first etching step are reached, thereby obtaining a penetrating second opening 1214 and a penetrating outer shape portion 1215. The first opening 1210 and the second opening 1214 are connected to form a through hole, but a part of the bottom 1213 of the first opening 1210 remains as a bottom 1217. Also, the second opening 1214 has an inclined portion 1216 that narrows toward the inside, unlike the first opening 1210.

[0072] Next, in the removal step, as shown in FIG. 12(F), the substrate 1201 is immersed in a peeling liquid (not shown) to remove the photoresist layer 1218, thereby obtaining the escape wheel 1219 made of silicon, which is the first part.

[0073] Next, the attachment of the pinion 1102, which is the second part, to the escape wheel 1101, which is the first part, will be described. FIG. 13 is a schematic cross-sectional view of the main parts of each component showing the fitting process. 13(A), a first opening 1302 and a second opening 1303 are provided in an escape wheel 1301 made of silicon, which is a first component, and the first opening 1302 has a first inclined portion 1304 that widens toward the inside in the thickness direction of the escape wheel 1301, and the second opening 1303 has a second inclined portion 1305 that narrows toward the inside in the thickness direction of the escape wheel 1301. Also, a solder washer 1307 made of tin containing 0.7% copper is disposed at a bottom 1306 of the first opening 1302.

[0074] The second part, a pinion 1308 made of metal, is composed of a gear part 1309, a shaft part 1310, a convex part 1311 formed on the shaft part 1310, a centering part 1312, and a true part 1313. Of these, the convex part 1311 has an inclination that narrows toward the gear part 1309. First, the pinion 1308 is positioned so that the true portion 1313 and a part of the centering portion 1312 pass through the solder washer 1307 .

[0075] Next, as shown in FIG. 13(B), pinion 1308 is pressed into escape wheel 1301 and at the same time, both are heated and solder washer 1307 is melted, thereby completely pressing pinion 1308 into it, and then cooled to solidify the solder, forming joint 1314 to integrate pinion 1308 and escape wheel 1301, thereby obtaining escape wheel 1301 with pinion 1308 attached.

[0076] When the pinion 1308 is fitted into the escape wheel 1301, the first opening 1302 and the second opening 1303 form an axial hole 1315. The accuracy of aligning the pinion 1308 with the axial hole 1315 is determined by the positional relationship between the centering portion 1312 and the edge 1316 of the bottom 1306 created by the first opening 1302, which is the narrowest opening diameter part of the second opening 1303. This edge 1316 is determined by the precision of the etching process using photolithography and D-RIE used in the etching process. Both are means excellent in terms of fine processing and have superior precision compared to the pinion 1308 made by machining, and therefore have extremely high positioning precision.

[0077] The pinion-equipped escape wheel 1317 manufactured in this manner has the convex portion 1311 embedded in the joint 1314 like a wedge, and the joint portion 1314 embedded in the first opening 1302 extending in the thickness direction of the escape wheel 1317 similarly act like a wedge, so that the shaft portion 1310 is fitted into the escape wheel 1301 with extremely high strength against the removal force. Moreover, if the cross-sectional shape in the planar direction of the shaft portion 1310 is made to be the shape exemplified in FIG. 6(C), the strength of the pinion 1308 in the rotational direction can be increased.

[0078] Furthermore, by forming a section having a cross-sectional shape other than circular in the planar direction on a part or the whole of the portion of the pinion 1308 that is embedded in the joint portion 1314, the strength in the rotational direction can be improved. Furthermore, by using a material with high solder wettability as the material for shaft portion 1310, or by taking measures such as forming a plating layer with high solder wettability on the surface portion, the bonding strength between joint portion 1314 and shaft portion 1310 can be further increased, thereby improving reliability in terms of strength and expanding the range of use.

[0079] In this embodiment, solder is used as the metal bonding material for the joint 1314. However, if the first and second components are made of materials having sufficient heat resistance, for example, if the first component is made of silicon and the second component is made of stainless steel or a highly heat-resistant alloy, it is also possible to use brazing material. Furthermore, when silicon is used for the first component, silicon can be diffusion bonded to gold, and therefore the present invention also includes the use of a washer or the like made of gold as a brazing material.

[0080] In addition, in this embodiment, when the first part, the escape wheel 1301, is fitted to the shaft portion 1310, a joint portion 1314 is provided in the gap between the first opening 1302 and the second opening 1303 and the pinion 1308, and this joint portion 1314 is covered by the gear portion 1309, so that the joint portion 1314 can be hidden and no problems arise in appearance.

[0081] The escape wheel with a pinion fitted thereto has been described above as the part according to the present invention, the silicon escape wheel as the first part, and the geared pinion made of stainless steel or an iron-based material as the second part. However, it goes without saying that the present invention can also be applied to cases in which an axle or pinion is fitted to an anchor body, balance spring, gears, etc. made of silicon. In addition, a timepiece movement using this part and a timepiece using this timepiece movement can be manufactured. [Explanation of symbols]

[0082] 101, 412, 510, 709, 809, 908, 1008...Uncle 102, 304, 401, 505, 601, 705, 803, 904, 1004...Ankle body 103, 408, 501, 701, 801, 901, 1001...Axis 104...Claw Stone 105...Tip of the sword 106, 111, 206, 1212, 1216...Slope part 107, 306, 403, 506, 602, 1210, 1302...First opening 108, 307, 404, 508, 603, 1214, 1303...Second opening 109, 407, 502, 703...Tsuba 110, 113, 411, 511, 707, 708, 806, 906, 1006, 1314...joint 112, 211, 1208...Opening 201, 1202...Silicon wafer 202...Conductive film 203...first photoresist layer 204, 209, 210, 1205, 1206, 1207...Exposure section 205...Unexposed area 207, 208, 1218...photoresist layer 212, 301...molding mold 302, 303...Electroformed body 305, 402...shaft hole 308, 507, 706, 907, 1304...First inclined section 309, 509, 1305...Second inclined section 405, 604, 607, 1213, 1217, 1306...Bottom 406, 504, 704, 805, 903, 1003, 1307...Solder washers 409, 702, 1007, 1107, 1311...Convex 410, 503, 1313…Mabe 512...Gap part 605, 609...first opening edge 606, 608...Second opening edge 802...Nickel-boron plating layer 804…Gold plating layer 807, 808, 905, 1005... Diffusion layer 902, 1002...plated layer 1101, 1219, 1301, 1317...Escape wheel 1102, 1308...Kana 1103...Axle hole 1104, 1313…Mabe 1105, 1309…Gear section 1106, 1312...Centering section 1201... Circuit board 1203...first positive photoresist layer 1204...Second positive photoresist layer 1208...first surface opening 1209...Second surface opening 1211, 1215...Outline shape part 1310…Shaft 1315...Shaft hole 1316…Edge

Claims

1. A component composed of a first component formed with a predetermined thickness from a brittle material and a second component fitted to the first component, wherein the first component has two openings in a two-step structure at a portion fitted to the second component, among the openings in the two-step structure, a first opening on the side where the second component is inserted is wider than a second opening in the two-step structure, a joint portion made of a metal bonding material is provided in a gap between the first component and the second component formed in the opening of the two-step structure, and the component is provided with an inclined portion that is spaced apart in the width direction from a surface on the side where the second component is inserted in the first opening of the first component toward a stepped portion formed with the second opening.

2. The component according to claim 1, wherein part or all of the first component is an amorphous material containing phosphorus.

3. The component according to claim 1, wherein part or all of the first component is an amorphous material composed of nickel-phosphorus.

4. The component according to claim 1, wherein part or all of the first component is made of silicon.

5. The component according to any one of claims 1 to 4, wherein the metal bonding material is a solder material.

6. The component according to any one of claims 1 to 4, wherein the metal bonding material is a brazing material.

7. The component according to any one of claims 1 to 6, wherein at least one of the first component or the second component has a diffusion layer with an element contained in the metal bonding material.

8. A timepiece movement having the component according to any one of claims 1 to 7.

9. A timepiece having the timepiece movement according to claim 8.

10. A first coating step of coating a first photoresist layer on a substrate to a first thickness, a first exposure step of partially exposing the first photoresist layer through a first photomask, a second coating step of coating a second photoresist layer on the first photoresist layer to a second thickness, a second exposure step of partially exposing the second photoresist layer through a second photomask, a development step of developing the exposed first photoresist layer and the second photoresist layer to expose the substrate and forming a molding die having an opening with an outer shape of a component. A forming step of depositing a metal inside the opening to form a metal body with a desired thickness along the forming die by immersing the forming die in an electroforming solution and applying electricity to perform electroforming, or by immersing the forming die in an electroless plating solution to perform electroless plating processing; A thickness adjustment step of adjusting the thickness so that the thickness of the metal body becomes the predetermined thickness; A removing step of removing the first photoresist layer, the second photoresist layer, and the substrate to obtain a metal component. The method for manufacturing a component according to any one of claims 1 to 3 and 5 to 7.

11. An application step of applying a first photoresist layer on a first surface of a silicon substrate and applying a second photoresist layer on a second surface facing the first surface; A first exposure step of partially exposing the first photoresist layer through a first photomask; A second exposure step of partially exposing the second photoresist layer through a second photomask; A developing step of developing the exposed first photoresist layer and the second photoresist layer to open a part of the photoresist layer and expose a part of the silicon substrate; A first etching step of etching a part of the first surface of the silicon substrate where silicon is exposed with the silicon substrate; A second etching step of etching a part of the second surface of the silicon substrate where silicon is exposed with the silicon substrate; A removing step of removing the first photoresist layer and the second photoresist layer. The method for manufacturing a component according to any one of claims 1 and 4 to 7.

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