Liquid storage container and liquid ejection device

Abstract

To provide a liquid discharge head which can reduce a possibility to cause interfacial peeling between a substrate and a lid member.SOLUTION: A liquid discharge head includes: a recording element substrate which has a substrate in which a plurality of flow passages of liquid discharged to a recording material by a recording element is formed and a lid member having a plurality of communication ports communicated with the plurality of flow passages and joined to the substrate; a liquid supply member which supplies the liquid to the plurality of flow passages through the plurality of communication ports of the lid member; and an adhesive member which adheres the lid member to the liquid supply member. A lid member opening for bringing the adhesive member into contact with the substrate is formed in at least a part of an abutting region abutting on the substrate, which is separated from a region where the plurality of communication ports are formed of the lid member.SELECTED DRAWING: Figure 11

Description

Technical Field

[0001] The present invention relates to a liquid ejection head and a liquid ejection device.

Background Art

[0002] In the field of inkjet for ejecting a liquid such as ink onto a recording medium for recording, in recent years, recording applications have diversified, and high-definition and high-quality recording have been demanded. In order to achieve high-definition and high-quality recording, it has become necessary to suppress the thickening of ink due to factors such as a decrease in the ejection speed of the liquid and water evaporation from the ejection port that causes modulation of the colorant concentration. <ooOOOOll> As a method for suppressing the thickening of ink due to water evaporation from the ejection port, etc., there is known a method of forcibly flowing the ink in the pressure chamber where the ejection port is arranged to cause the thickened ink staying in the pressure chamber to flow out. In the liquid ejection head of Patent Document 1, a supply path for supplying liquid and a recovery path for recovering liquid are provided as paths communicating with the pressure chamber, and a plurality of communication ports communicating with the supply path and the recovery path are provided respectively. Thus, in the liquid ejection head of Patent Document 1, the liquid in the pressure chamber can flow in and out while suppressing variations in the liquid flow rate.

[0004] According to the liquid ejection head of Patent Document 1, the ink supply path and recovery path provided in the head housing and the supply path and recovery path provided in the substrate constituting the recording element substrate can be connected by performing pitch conversion with a lid member provided on the back surface of the substrate. The lid member has communication ports formed corresponding to the supply path and recovery path of the substrate with a narrow pitch. Therefore, it is desirable that a photosensitive resin material is used for the lid member and the communication ports are formed by photolithography. Also, in order to reduce the flow resistance of the communication ports, it is desirable that the lid member is formed of a thin film.

Prior Art Documents

Patent Documents

[0005] [Patent Document 1] Japanese Patent Publication No. 2017-124619 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] However, in the conventional liquid ejection head described above, since the lid member is formed of a thin film, the adhesion between the recording element substrate and the lid member of the liquid ejection head may decrease. Also, when an adhesive is used to join the substrate and the lid member, if the adhesive layer is made thicker, the recording element substrate may become thicker, or variations in the thickness of the adhesive layer may reduce the accuracy of the arrangement of the recording element substrate. On the other hand, if the adhesive layer between the substrate and the lid member is made thin, sufficient adhesive strength may not be obtained. Furthermore, when joining the substrate and the lid member by other joining methods, there are concerns about physical stress problems due to bending, etc., because the lid member is a thin material. As a result, in the conventional recording element substrate, delamination at the interface between the substrate and the lid member may occur. In addition, if multiple channels are provided in the substrate, there is a possibility that the multiple channels will communicate with each other.

[0007] This invention has been made in view of the above problems, and aims to provide a liquid dispensing head that can reduce the possibility of interfacial delamination between the substrate and the lid member. [Means for solving the problem]

[0008] The liquid dispensing head related to the technology disclosed herein is A recording element substrate having a substrate in which multiple channels for liquid discharged onto a recording material by a recording element are formed, and a lid member having multiple communication openings that communicate with the multiple channels and being joined to the substrate, A liquid supply member that supplies the liquid to the plurality of flow paths through the plurality of communication openings of the lid member, An adhesive member for bonding the lid member and the liquid supply member, It has, The liquid dispensing head is characterized in that a lid member opening is formed in at least a portion of the contact area of ​​the lid member that contacts the substrate, separate from the area in which the plurality of communication openings are formed, for bringing the adhesive member into contact with the substrate.

[0009] Furthermore, the liquid dispensing head related to the technology disclosed herein is A recording element substrate having a substrate in which multiple channels for liquid discharged onto a recording material by a recording element are formed, and a lid member having multiple communication openings that communicate with the multiple channels and being joined to the substrate, A liquid supply member that supplies the liquid to the plurality of flow paths through the plurality of communication openings of the lid member, An adhesive member for bonding the lid member and the liquid supply member, It has, The lid member consists of a plurality of divided members, each divided according to the plurality of flow paths. The aforementioned plurality of divided members are arranged with intervals between them, The liquid dispensing head is characterized in that the gaps between the plurality of divided members function as openings in a lid member through which the adhesive member and the substrate come into contact.

[0010] Furthermore, the liquid dispensing device related to the technology disclosed herein is The above liquid dispensing head and The liquid dispensing device is characterized by being equipped with the following features. [Effects of the Invention]

[0011] The technology disclosed herein can reduce the possibility of delamination occurring at the interface between the substrate and the lid member. [Brief explanation of the drawing]

[0012] [Figure 1] This figure shows the schematic configuration of the liquid dispensing device according to the first embodiment. [Figure 2] A schematic diagram showing the ink circulation path according to the first embodiment. [Figure 3] Figures 3A and 3B are perspective views of the liquid discharge head according to the first embodiment. [Figure 4] Exploded perspective view of the liquid ejection head according to the first embodiment [Figure 5] Figs. 5A to 5F are diagrams showing the configuration of the flow path member according to the first embodiment [Figure 6] Enlarged view of the portion surrounded by the rectangle α in Fig. 5A [Figure 7] Diagram showing the cross section taken along the line IX-IX in Fig. 6 [Figure 8] Fig. 8A is a perspective view of the ejection module, and Fig. 8B is an exploded view of the ejection module [Figure 9] Fig. 9A is a plan view of the recording element substrate, Fig. 9B is an enlarged view of the portion indicated by the circle A in Fig. 9A, and Fig. 9C is a plan view of the back surface of the recording element substrate [Figure 10] Perspective view showing the cross section taken along the line XII-XII in Fig. 9A [Figure 11] Enlarged view of the portion indicated by the rectangle B in Fig. 7 [Figure 12] Plan view of the recording element substrate according to the second embodiment [Figure 13] Plan view of the recording element substrate according to the third embodiment [Figure 14] Plan view of the recording element substrate according to the fourth embodiment [Figure 15] Plan view of the recording element substrate according to the fifth embodiment [Figure 16] Plan view of the recording element substrate according to the sixth embodiment [Figure 17] Plan view of the recording element substrate according to the seventh embodiment [Figure 18] Plan view of the recording element substrate according to the eighth embodiment

Mode for Carrying Out the Invention

[0013] A preferred embodiment of the technology disclosed herein will be described below with reference to the drawings. However, the dimensions, materials, shapes, and relative arrangements of the components described below should be appropriately modified depending on the configuration and various conditions of the apparatus to which the invention is applied. Therefore, this is not intended to limit the scope of the invention to the following description. In particular, well-known or prior art in the relevant field can be applied to configurations and processes that are not illustrated or described. Also, redundant explanations may be omitted.

[0014] (First Embodiment) Figure 1 shows a schematic configuration of an inkjet recording device (hereinafter also referred to as a recording device) 1000, which performs recording on a recording medium by ejecting liquid ink, as an example of a liquid ejection device according to the first embodiment. The recording device 1000 comprises a transport unit 1 for transporting a recording medium 2 and a line-type (page-wide type) liquid ejection head 3 arranged substantially perpendicular to the transport direction of the recording medium 2. The recording device 1000 is a line-type recording device that performs continuous recording in one pass while transporting a plurality of recording media 2 continuously or intermittently.

[0015] The liquid ejection head 3 comprises a negative pressure control unit 230 that controls the pressure (negative pressure) in the flow path, a liquid supply unit 220 that is in fluid communication with the negative pressure control unit 230, a liquid connection part 111 that serves as an ink supply port and discharge port to the liquid supply unit 220, and a housing 80. The recording medium 2 is not limited to cut paper, but may also be a continuous roll medium. In this case, the liquid ejection head 3 enables full-color recording using cyan (C), magenta (M), yellow (Y), and black (K) inks. The ink supply path to the liquid ejection head 3, the main tank, and the buffer tank (see Figure 2, described later) are fluidly connected to each other. Furthermore, the liquid ejection head 3 is electrically connected to an electrical control unit that transmits power and control signals for ejecting ink to the liquid ejection head 3. The liquid path and electrical signal path of the liquid ejection head 3 will be described later.

[0016] The recording device 1000 is an inkjet recording device that circulates ink between a tank (described later) and a liquid ejection head 3. Ink circulation in the recording device 1000 is achieved by operating two circulation pumps (one for high pressure and one for low pressure) downstream of the liquid ejection head 3.

[0017] Figure 2 is a schematic diagram showing the ink circulation path applied to the recording device 1000 in this embodiment. The liquid ejection head 3 is fluidically connected to the first circulation pump (high pressure side) 1001, the first circulation pump (low pressure side) 1002, the buffer tank 1003, etc. For the sake of simplicity, Figure 2 shows the circulation path for one of the cyan, magenta, yellow, and black inks, but in reality, the recording device 1000 is provided with circulation paths for all four colors.

[0018] In the ink circulation path of the recording device 1000 in this embodiment, the ink in the main tank 1006 is supplied to the buffer tank 1003 by the replenishment pump 1005. The ink is then supplied to the liquid supply unit 220 of the liquid ejection head 3 via the liquid connection part 111 by the second circulation pump 1004. The ink, which has been adjusted to two different negative pressures (high pressure and low pressure) by the negative pressure control unit 230 connected to the liquid supply unit 220, is divided into two flow paths, the high-pressure side and the low-pressure side, and circulates. The ink in the liquid ejection head 3 circulates within the liquid ejection head 3 by the action of the first circulation pump (high-pressure side) 1001 and the first circulation pump (low-pressure side) 1002 located downstream of the liquid ejection head 3. The ink is then discharged from the liquid ejection head 3 via the liquid connection part 111 and returned to the buffer tank 1003.

[0019] The buffer tank 1003, which is a sub-tank, is connected to the main tank 1006 and has an air vent (not shown) that connects the inside and outside of the tank, making it possible to discharge air bubbles in the ink to the outside. A replenishment pump 1005 is provided between the buffer tank 1003 and the main tank 1006. The replenishment pump 1005 sends ink consumed by discharging (discharging) ink from the outlet of the liquid discharge head 3, such as for recording by discharging ink or suction recovery, from the main tank 1006 to the buffer tank 1003.

[0020] Two first circulation pumps 1001 and 1002 draw ink through the liquid connection part 111 of the liquid ejection head 3 and transfer it to the buffer tank 1003. A positive displacement pump with a quantitative liquid delivery capacity is preferred as the first circulation pump. Specific examples of positive displacement pumps include tube pumps, gear pumps, diaphragm pumps, and syringe pumps. However, a configuration that maintains a constant ink flow rate by providing a general constant flow valve or relief valve at the pump outlet may also be adopted. When the liquid ejection head 3 is driven, the first circulation pump (high pressure side) 1001 and the first circulation pump (low pressure side) 1002 are operated, causing a predetermined flow rate of ink to flow through the common supply path 211 and common recovery path 212, respectively. This flow of ink maintains the temperature of the liquid ejection head 3 at an appropriate temperature during recording. It is preferable to set the ink flow rate during the operation of the liquid ejection head 3 to a flow rate that can be maintained at a level where the temperature difference between the recording element substrates 10 does not affect the recording image quality. However, if the ink flow rate becomes too high, the pressure loss in the flow path within the liquid ejection unit 300 can cause a large negative pressure difference on the recording element substrate 10, potentially resulting in uneven image density. Therefore, it is preferable to set the ink flow rate while considering the temperature difference and negative pressure difference between the recording element substrates 10.

[0021] The negative pressure control unit 230 is located in the path between the second circulation pump 1004 and the liquid discharge unit 300. The negative pressure control unit 230 maintains the pressure downstream of the negative pressure control unit 230 (i.e., on the liquid discharge unit 300 side) at a preset constant pressure, even when the ink flow rate in the circulation system fluctuates due to differences in discharge volume per unit area, etc. The two negative pressure control mechanisms constituting the negative pressure control unit 230 can be any mechanism that can control the pressure fluctuations downstream of the negative pressure control unit 230 within a certain range centered on a desired set pressure. As an example, a mechanism similar to a so-called "pressure reducing regulator" can be adopted. In the circulation path in this embodiment, the second circulation pump 1004 pressurizes the upstream side of the negative pressure control unit 230 via the liquid supply unit 220. This suppresses the effect of hydrostatic pressure on the liquid discharge head 3 of the buffer tank 1003, thereby increasing the degree of freedom in the layout of the buffer tank 1003 in the recording device 1000.

[0022] Furthermore, the second circulation pump 1004 can be any pump that has a head pressure above a certain pressure within the fluctuation range of the ink circulation flow rate used when driving the liquid discharge head 3, and can be a turbo pump or a positive displacement pump, for example. Specifically, a diaphragm pump or the like can be used for the second circulation pump 1004. Alternatively, instead of the second circulation pump 1004, a head tank can be used, for example, that is positioned to create a certain head difference with respect to the negative pressure control unit 230.

[0023] As shown in Figure 2, the negative pressure control unit 230 is equipped with two negative pressure adjustment mechanisms, each with a different control pressure set. Of the two negative pressure adjustment mechanisms, the one with the relatively high pressure setting (indicated as "H" in Figure 2) and the one with the relatively low pressure setting (indicated as "L" in Figure 2) are connected to the common supply path 211 and common recovery path 212 of the liquid discharge unit 300, respectively, via the liquid supply unit 220. The liquid discharge unit 300 is provided with the common supply path 211, the common recovery path 212, and individual flow paths 215 (individual supply path 213, individual recovery path 214) that communicate with each recording element substrate. Furthermore, the negative pressure control mechanism H is connected to the common supply path 211, and the common recovery path Each of the collection paths 212 is connected to a negative pressure control mechanism L, and a differential pressure is generated between these two common flow paths. Furthermore, since the individual flow path 215 is in communication with the common supply path 211 and the common recovery path 212, a flow occurs in which some of the ink flows from the common supply path 211 through the internal flow path of the recording element substrate 10 to the common recovery path 212 (see arrow in Figure 2).

[0024] In this way, the liquid ejection unit 300 generates a flow of liquid passing through the common supply passage 211 and the common recovery passage 212, respectively, and a flow of a portion of the ink passing through each recording element substrate 10. Therefore, the heat generated in each recording element substrate 10 can be discharged to the outside of the recording element substrate 10 by the ink flowing through the common supply passage 211 and the common recovery passage 212. In addition, when recording is being performed by the liquid ejection head 3, ink flow can be generated even in the ejection port and pressure chamber where ink is not being ejected. As a result, the viscosity of the ink that has thickened at the ejection port can be reduced by the ink flow, thereby suppressing ink thickening. Furthermore, the thickened ink and foreign matter in the ink can be discharged into the common recovery passage 212. As a result, the liquid ejection head 3 of this embodiment makes it possible to maintain high-speed and high-quality recording.

[0025] (Liquid dispensing head configuration explained) Next, the configuration of the liquid ejection head 3 according to this embodiment will be described. Figures 3A and 3B are perspective views of the liquid ejection head 3. The liquid ejection head 3 is a so-called line-type liquid ejection head in which 15 recording element boards 10 capable of ejecting cyan / magenta / yellow / black inks on a single recording element board are arranged in a straight line (inline). As shown in Figure 3A, the liquid ejection head 3 comprises each recording element board 10 and a signal input terminal 91 and a power supply terminal 92 electrically connected via a flexible wiring board 40 and an electrical wiring board 90. The signal input terminal 91 and the power supply terminal 92 are electrically connected to the control unit of the recording device 1000. The signal input terminal 91 supplies an ejection drive signal to the recording element board 10 to control the ejection operation, and the power supply terminal 92 supplies the power necessary for ejection to the recording element board 10.

[0026] By consolidating the wiring using the electrical circuits within the electrical wiring board 90, the number of signal input terminals 91 and power supply terminals 92 can be reduced compared to the number of recording element boards 10. This reduces the number of electrical connections that need to be removed when assembling the liquid ejection head 3 to the recording device 1000 or when replacing the liquid ejection head 3. As shown in Figure 3B, the liquid connection parts 111 provided at both ends of the liquid ejection head 3 are connected to the liquid supply path of the recording device 1000. As a result, the four colors of ink—cyan, magenta, yellow, and black—are supplied to the liquid ejection head 3 via the liquid supply path of the recording device 1000, and the ink that has passed through the liquid ejection head 3 is collected back into the liquid supply path of the recording device 1000. In this way, the ink of each color can circulate through the liquid supply path of the recording device 1000 and the liquid path of the liquid ejection head 3.

[0027] Figure 4 is an exploded perspective view showing the components or units that make up the liquid ejection head 3. The liquid ejection head 3 has a housing 80, to which a liquid ejection unit 300, a liquid supply unit 220, and an electrical wiring board 90 are mounted. The liquid supply unit 220 is provided with a liquid connection part 111 (see also Figures 2 and 3), and inside the liquid supply unit 220 are color-specific filters 221 (see also Figure 2) for removing foreign matter from the supplied ink. Each filter 221 communicates with a corresponding opening in the liquid connection part 111.

[0028] Each of the two liquid supply units 220 has two filters 221 for each color. The ink that has passed through the filters 221 is supplied to a negative pressure control unit 230 located on the liquid supply unit 220, corresponding to each color. The negative pressure control unit 230 is This unit consists of separate negative pressure control valves for each color. The valves and spring components within the unit reduce pressure loss in the supply system of the recording device 1000 (the supply system upstream of the liquid ejection head 3) that occurs due to fluctuations in ink flow rate. As a result, the negative pressure control unit 230 can stabilize the negative pressure change downstream of the negative pressure control unit 230 (on the liquid ejection unit 300 side) within a certain range.

[0029] Each negative pressure control unit 230 for each color has two negative pressure control valves built in, one for each ink color, as shown in Figure 2. The two negative pressure control valves are set to different control pressures, with the high-pressure side communicating with the common supply passage 211 (see Figure 2) in the liquid discharge unit 300, and the low-pressure side communicating with the common recovery passage 212 (see Figure 2) and the liquid supply unit 220.

[0030] The housing 80 consists of a support portion 81 for the liquid ejection unit 300 and a support portion 82 for the electrical wiring board 90, supporting the liquid ejection unit 300 and the electrical wiring board 90 while ensuring the rigidity of the liquid ejection head 3. The support portion 82 for the electrical wiring board 90 supports the electrical wiring board 90 and is fixed to the support portion 81 for the liquid ejection unit 300 by screws. The support portion 81 for the liquid ejection unit 300 corrects warping and deformation of the liquid ejection unit 300, ensuring the accuracy of the relative positions of the multiple recording element substrates 10 and suppressing ink streaks and unevenness on the recording medium. Therefore, it is preferable that the support portion 81 for the liquid ejection unit 300 has sufficient rigidity, and suitable materials include SUS (Steel Use Stainless) and aluminum. Metals such as nium or ceramics such as alumina are preferred. The support portion 81 of the liquid dispensing unit 300 is provided with openings 83 and 84 into which the joint rubber 100 is inserted. The ink supplied from the liquid supply unit 220 is guided through the joint rubber 100 to the third flow channel member 70 that constitutes the liquid dispensing unit 300.

[0031] The liquid ejection unit 300 consists of a plurality of ejection modules 200 and a flow path member 210, and a cover member 130 is attached to the recording medium side of the liquid ejection unit 300. The cover member 130 is a frame-shaped member with a long opening 131, through which the recording element substrate 10 and sealing member 110 (see also Figure 8, described later) included in the ejection module 200 are exposed. The frame portion around the opening 131 functions as a contact surface for a cap member that caps the liquid ejection head 3 when recording is in standby mode. For this reason, it is preferable that the cover member 130 is configured such that an adhesive, sealant, filler, etc. is applied along the perimeter of the opening 131 to fill any irregularities or gaps on the ejection port surface of the liquid ejection unit 300, thereby forming a closed space when capped.

[0032] Next, the configuration of the flow path member 210 of the liquid discharge unit 300 will be described. The flow path member 210 is made up of a stack of a first flow path member 50, a second flow path member 60, and a third flow path member 70, and distributes the ink supplied from the liquid supply unit 220 to the discharge modules 200 corresponding to each color. The flow path member 210 also serves to return the ink circulating from the discharge modules 200 back to the liquid supply unit 220. Since the flow path member 210 is fixed to the support portion 81 of the liquid discharge unit 300 with screws, warping and deformation of the flow path member 210 are suppressed. The flow path member 210 corresponds to a liquid supply member that supplies liquid to multiple flow paths through multiple communication ports of the lid member.

[0033] Figures 5A to 5F show the front and back surfaces of the first flow channel member 50 (Figures 5A and 5B), the second flow channel member 60 (Figures 5C and 5D), and the third flow channel member 70 (Figures 5E and 5F). Figure 5A shows the front surface of the first flow channel member 50 on which the discharge module 200 is mounted. Figure 5B shows the back surface of the first flow channel member 50 that is in contact with the front surface of the second flow channel member 60. Figure 5C shows the front surface of the second flow channel member 60 that is in contact with the back surface of the first flow channel member 50. Figure 5D shows the back surface of the second flow channel member 60 that is in contact with the front surface of the third flow channel member 70. Figure 5E shows the front surface of the third flow channel member 70 that is in contact with the back surface of the second flow channel member 60. Figure 5F shows the liquid discharge unit 300. This shows the back surface of the third flow channel member 70 that is in contact with the support portion 81.

[0034] In this embodiment, the back surface of the first flow channel member 50 (Figure 5B) and the front surface of the second flow channel member 60 (Figure 5C) are joined facing each other, and the back surface of the second flow channel member 60 (Figure 5D) and the front surface of the third flow channel member 70 (Figure 5E) are joined facing each other. In addition, the second flow channel member 60 and the third flow channel member 70 are joined together. As a result, eight common flow channels (211a, 211b, 211c, 211d, 212a, 212b, 212c, 212d) extending in the longitudinal direction of each flow channel member are formed from the common flow channel grooves 62 and 71 formed in each flow channel member. As a result, a set of common supply channels 211 and common recovery channels 212 are formed within the flow channel member 210 for each ink color.

[0035] Ink is supplied to the liquid ejection head 3 from the common supply passage 211, and the ink supplied to the liquid ejection head 3 is recovered by the common recovery passage 212. The communication ports 72 of the third flow channel member 70 communicate with each hole in the joint rubber 100 and are fluidly connected to the liquid supply unit 220 (see Figure 4). As shown in Figure 5D, multiple communication ports 61 (communication port 61-1 communicating with the common supply passage 211, and communication ports 61-2 communicating with the common recovery passage 212) are formed on the bottom surface of the common flow channel groove 62 of the second flow channel member 60. Each communication port 61 also communicates with one end of any of the individual flow channel grooves 52 of the first flow channel member 50 shown in Figure 5B. As shown in Figure 5A, a communication port 51 is formed at the other end of the individual flow channel groove 52 of the first flow channel member 50, and each individual flow channel groove 52 is fluidly connected to the ejection module 200 via its respective communication port 51. By providing individual flow channel grooves 52, it becomes possible to concentrate the flow channels towards the center of the flow channel member.

[0036] The first channel member 50, the second channel member 60, and the third channel member 70 are preferably formed from a material that is corrosion-resistant to liquids and has a low coefficient of thermal expansion. Suitable materials for the channel members include composite materials (resin materials) with inorganic fillers added to a base material such as alumina, LCP (liquid crystal polymer), PPS (polyphenyl sulfide), PSF (polysulfone), or modified PPE (polyphenylene ether). Examples of inorganic fillers include silica fine particles and fibers. As for the method of forming the channel member 210, the first channel member 50, the second channel member 60, and the third channel member 70 may be laminated and bonded to each other, or, if a composite material (resin material) is selected as the material, they may be joined to each other by welding.

[0037] Figure 6 is an enlarged view of the area enclosed by rectangle α in Figure 5A, and is a perspective view of the flow channels within the flow channel member 210, in which the first to third flow channel members are stacked, as seen from the surface side of the first flow channel member 50. As shown in Figure 6, the flow channel member 210 is provided with common supply channels 211 (211a, 211b, 211c, 211d) and common recovery channels 212 (212a, 212b, 212c, 212d) that extend in the longitudinal direction of the liquid discharge head 3 for each ink color.

[0038] More specifically, a common supply path 211 for each color is connected to a plurality of individual supply paths 213 (213a, 213b, 213c, 213d) formed by individual flow channel grooves 52 via a communication port 61. Similarly, a common recovery path 212 for each color is connected to a plurality of individual recovery paths 214 (214a, 214b, 214c, 214d) formed by individual flow channel grooves 52 via a communication port 61. This flow path configuration allows ink to be concentrated from each common supply path 211 through the individual supply paths 213 to the recording element substrate 10 located in the center of the flow path member. The ink supplied to the recording element substrate 10 can then be recovered to each common recovery path 212 via the individual recovery paths 214.

[0039] Figure 7 shows a cross-section along the line IX-IX in Figure 6. As shown in Figure 7, the individual recovery paths 214a and 214c are connected to the discharge module 200 via the communication port 51. Although only the individual recovery paths 214a and 214c are shown in Figure 7, in another cross-section of the flow path member 210 in Figure 6, the individual supply path 213 is also connected to the discharge module 200. The support member 30 and the recording element substrate 10 included in the Joule 200 have channels formed therein for supplying ink from the first channel member 50 to the recording element 15 provided on the recording element substrate 10.

[0040] Furthermore, the support member 30 and the recording element substrate 10 have channels formed therein for recovering (recirculating) some or all of the ink supplied to the recording element 15 to the first channel member 50. The recording element substrate 10 and the support member 30 are joined by an adhesive member 400, which will be described later. The adhesive member 400 is provided with openings 401 corresponding to the communication port 31 (see Figure 8) provided in the support member 30 and the communication port 21 (see Figure 9) provided in the lid member 20 (see Figure 9). The material of the adhesive member 400 is preferably a material that has high adhesion to the substrate 11, the lid member 20 and the support member 30, and has corrosion resistance and penetration resistance to liquids. For example, epoxy adhesive is an example, and more preferably one that contains a silane agent. This is expected to have the effect of further increasing the adhesion between the adhesive member 400 and the substrate 11 or the lid member 20 when the substrate 11 is made of a silicon substrate or the lid member 20 is made of an epoxy resin material.

[0041] Here, the common supply channel 211 is connected to the corresponding color ink negative pressure control unit 230 (high pressure side) and liquid supply unit 220. Similarly, the common recovery channel 212 is connected to the negative pressure control unit 230 (low pressure side) and liquid supply unit 220. The negative pressure control unit 230 creates a differential pressure (pressure difference) between the common supply channel 211 and the common recovery channel 212. Therefore, as shown in Figures 6 and 7, within the liquid discharge head 3 where each flow path is fluidically connected, the ink of each color flows sequentially through the common supply channel 211, individual supply channel 213, recording element substrate 10, individual recovery channel 214, and common recovery channel 212.

[0042] (Explanation of the discharge module) Figure 8A is a perspective view of one ejection module 200, and Figure 8B is an exploded view of the ejection module 200. As for the manufacturing method of the ejection module 200, first, the recording element substrate 10 and the flexible wiring board 40 are bonded to a support member 30, which is provided with a communication port 31 in advance, using an adhesive member 400. Then, the terminals 16 on the recording element substrate 10 and the terminals 41 on the flexible wiring board 40 are electrically connected by wire bonding, and the wire bonding portion (electrical connection portion) is covered and sealed with a sealing member 110. The terminal 42 on the side of the flexible wiring board 40 opposite to the recording element substrate 10 is electrically connected to the connection terminal 93 of the electrical wiring board 90 (see also Figure 4). The support member 30 is a support member that supports the recording element substrate 10, and is also a flow channel member that fluidly connects the recording element substrate 10 and the flow channel member 210. Therefore, it is preferable that the support member 30 has high flatness and can be bonded to the recording element substrate with sufficiently high reliability. For the material of the support member 30, alumina or resin material is preferred, for example.

[0043] (Explanation of the structure of the recording element substrate) Figure 9A is a plan view of the surface (the front surface of the recording element substrate 10) where the ejection ports 13 of the recording element substrate 10 are formed. Figure 9B is an enlarged view of the part indicated by circle A in Figure 9A. Figure 9C is a plan view of the back surface of the recording element substrate 10. Now, the configuration of the recording element substrate 10 in this embodiment will be described. As shown in Figure 9A, four rows of ejection ports 13 corresponding to each ink color are formed on the flat ejection port forming member 12 of the recording element substrate 10. In the following description, the direction in which the ejection ports 13 are arranged in each row will be referred to as the "row direction of the ejection port row".

[0044] As shown in Figure 9B, recording elements 15, which are heating elements for foaming the liquid using thermal energy, are positioned at the locations corresponding to each discharge port 13. A partition wall 22 separates the pressure chamber 23 containing the recording elements 15. The recording elements 15 are electrically connected to terminals 16 by electrical wiring (not shown) provided on the recording element substrate 10. The recording element 15 generates heat and boils the ink based on pulse signals input from the control circuit of the recording device 1000 via the electrical wiring board 90 (see also Figure 4) and the flexible wiring board 40 (see also Figure 8). This causes the ink film to boil. The pressure of the foam generated by the ink film boiling phenomenon is then used to discharge the ink from the discharge port 13. As shown in Figure 9B, along the row direction of the discharge port row, a liquid supply path 18, which is a flow path for supplying ink, is provided on one side, and a liquid recovery path 19, which is a flow path for recovering ink, is provided on the other side, flanking the row of discharge ports 13. The liquid supply path 18 and the liquid recovery path 19 are flow paths that extend in the row direction of the discharge port row provided on the recording element substrate 10, and are in communication with the discharge port 13 via the supply port 17a and the recovery port 17b, respectively.

[0045] Furthermore, as shown in Figure 9C, a sheet-like lid member 20 is laminated on the back surface of the recording element substrate 10, and the lid member 20 is provided with multiple communication ports 21 that communicate with the liquid supply passage 18 and the liquid recovery passage 19. In this embodiment, three communication ports 21 are provided on the lid member 20 for one liquid supply passage 18, and two communication ports 21 are provided on the lid member 20 for one liquid recovery passage 19. As shown in Figure 9B, each communication port 21 of the lid member 20 communicates with the multiple communication ports 31 shown in Figure 8. Silicon substrates, epoxy resin materials, etc., can be used as the material for the lid member 20. In addition, an adhesive member may be provided between the back surface of the recording element substrate 10 and the lid member 20.

[0046] The lid member 20 preferably has corrosion resistance to ink, and from the viewpoint of preventing ink color mixing, high precision is required in the opening shape and position of the communication port 21. For this reason, it is preferable to use a photosensitive resin material as the material for the lid member 20 and to provide the communication port 21 by a photolithography process. Thus, the lid member 20 changes the pitch of the flow path by the communication port 21, and considering pressure loss, it is desirable that the thickness of the lid member 20 be thin and that it be composed of a film-like material. Furthermore, if an adhesive member is provided between the recording element substrate 10 and the lid member 20, it is desirable that the adhesive member that adheres the recording element substrate 10 and the support substrate has a higher adhesive strength than the adhesive member that adheres the lid member.

[0047] In this embodiment, the lid member 20 is provided with a plurality of slits 501 at positions facing the portion between the liquid supply passage 18 and the liquid recovery passage 19 of the recording element substrate 10. The slits 501 may be formed by a photolithography process, or by thermal and / or physical processes such as laser processing or sandblasting. As an example, the slits 501 are formed with a width of 150 μm. The slits 501 correspond to lid member openings formed in at least a portion of the contact area that contacts the substrate, separate from the area where the plurality of communication openings are formed, and the adhesive member and the substrate come into contact at the slits 501.

[0048] Figure 10 is a perspective view showing a cross-section of the recording element substrate 10 and the lid member 20 along the line XII-XII in Figure 9A. The flow of liquid within the recording element substrate 10 will be explained with reference to Figure 10. The lid member 20 functions as a lid that forms part of the wall of the liquid supply passage 18 and the liquid recovery passage 19 formed in the substrate 11 of the recording element substrate 10.

[0049] The recording element substrate 10 is formed by laminating a substrate 11, for example, made of silicon (Si), and an ejection port forming member 12, for example, made of a photosensitive resin, with a lid member 20 bonded to the back surface of the substrate 11. Recording elements 15 are formed on the front surface of the substrate 11 (see Figure 9), and grooves constituting liquid supply channels 18 and liquid recovery channels 19 extending along the rows of ejection ports are formed on the back surface of the substrate 11. Thus, the substrate 11 has multiple channels for the liquid ejected onto the recording material by the recording elements. The liquid supply channels 18 and liquid recovery channels 19 also serve as substrate openings for the channels formed on the surface to which the lid member abuts. The lid member 20 has multiple communication ports that communicate with the multiple channels and is bonded to the substrate 11.

[0050] The liquid supply passage 18 and liquid recovery passage 19, formed by the substrate 11 and the lid member 20, are connected to the common supply passage 211 and common recovery passage 212 within the flow path member 210, respectively, and a differential pressure is generated between the liquid supply passage 18 and the liquid recovery passage 19. When ink is ejected from the ejection port 13 for recording, in the ejection port 13 where ejection is not taking place, this differential pressure causes the ink in the liquid supply passage 18 to flow through the supply port 17a, pressure chamber 23, and recovery port 17b to the liquid recovery passage 19 (arrow C in the figure). This flow of ink allows thickened ink due to evaporation from the ejection port 13, as well as bubbles and foreign matter, to be recovered into the liquid recovery passage 19 in the ejection port 13 and pressure chamber 23 where ink is not being ejected. In addition, the effect of making it less likely for the ink to thicken in the ejection port 13 and pressure chamber 23 is also obtained.

[0051] The ink collected in the liquid recovery path 19 flows through the communication port 21 of the lid member 20 and the liquid communication port 31 of the support member 30 (see Figure 8B), then through the communication port 51 of the flow path member 210, the individual recovery path 214, and the common recovery path 212, and is collected in the recovery path of the recording device 1000.

[0052] Furthermore, the lid member 20 is provided with a plurality of slits 501 at positions facing the portion of the substrate 11 between the liquid supply passage 18 and the liquid recovery passage 19. Ink flows from the liquid connection part 111 of the liquid supply unit 220 to the liquid discharge head 3. The ink then flows in the following order: through the joint rubber 100, the communication port 72 and common flow channel groove 71 provided in the third flow channel member 70, the common flow channel groove 62 and communication port 61 provided in the second flow channel member 60, and the individual flow channel groove 52 and communication port 51 provided in the first flow channel member 50. The ink then flows in the following order to the pressure chamber 23: through the liquid communication port 31 provided in the support member 30, the communication port 21 provided in the lid member 20, and the liquid supply passage 18 and supply port 17a provided in the substrate 11.

[0053] Of the ink supplied to the pressure chamber 23, the ink that is not discharged from the discharge port 13 flows sequentially through the recovery port 17b and liquid recovery path 19 provided on the substrate 11, the communication port 21 provided on the lid member 20, and the liquid communication port 31 provided on the support member 30. The liquid then flows sequentially through the communication port 51 and individual flow channel groove 52 provided on the first flow channel member, the communication port 61 and common flow channel groove 62 provided on the second flow channel member, the common flow channel groove 71 and communication port 72 provided on the third flow channel member 70, and the joint rubber 100. Finally, the ink flows out of the liquid discharge head 3 from the liquid connection part 111 provided on the liquid supply unit 220. In this way, the liquid discharge head 3 of this embodiment can suppress the viscosity increase of the ink in the pressure chamber 23 and discharge port 13, thereby suppressing distortion in the direction of ink discharge and ink non-discharge, and as a result, high-quality recording can be achieved.

[0054] Figure 11 is an enlarged view of the area indicated by rectangle B in Figure 7. As shown in Figure 11, the recording element substrate 10 has a slit 501 in the lid member 20 between a liquid supply channel 18Cy formed for supplying cyan ink and a liquid recovery channel 19Ma formed for recovering magenta ink. The adhesion force between the substrate 11, which is made of the inorganic material Si, and the lid member 20, which is made of the organic material photosensitive resin, is weaker than the adhesion force between each of them and the adhesive member 400. In this embodiment, the slit 501 in the lid member 20 is provided between the liquid supply channel 18 and the liquid recovery channel 19, which correspond to each of the inks of each color. As a result, in the area where the slit 501 is provided, the substrate 11 is joined to the adhesive member 400, which has a higher adhesion than the lid member 20. This reduces the possibility of interfacial delamination between the substrate 11 and the lid member 20 compared to when the substrate 11 is joined to the lid member 20, and reduces the possibility of ink color mixing in the ink flow path formed in the substrate 11.

[0055] In particular, the edge of the communication opening 21 provided in the lid member 20 overlaps with the liquid supply passage 18 and liquid recovery passage 19 of the substrate 11, so the rigidity of the communication opening 21 portion is weak. In other words, delamination at the interface between the substrate 11 and the lid member 20 is likely to occur around the communication opening 21. However, in this implementation... Depending on the configuration, even if delamination occurs at the interface between the substrate 11 and the lid member 20 around the communication opening 21, the interface of the substrate 11 changes at the slit 501 from the lid member 20 to the adhesive member 400, which has higher adhesion. As a result, delamination at the interface between the substrate 11 and the lid member 20 is suppressed by the adhesive member 400. Consequently, the possibility of ink mixing occurring due to the communication of different colored ink channels caused by delamination at the interface between the substrate 11 and the lid member 20 can be suppressed.

[0056] In this embodiment, a liquid discharge head has been described in which two types of flow paths, a liquid supply path and a liquid recovery path, are provided on the recording element substrate. However, the above slit configuration can also be applied to a configuration in which only a liquid supply path is provided on the recording element substrate, as long as a lid member is provided on the back surface of the recording element substrate and the substrate and the lid member are joined with an adhesive.

[0057] (Second embodiment) Next, the configuration of the liquid discharge head according to the second embodiment will be described. Figure 12A shows a plan view of the surface on which the discharge port 13 of the recording element substrate 2010 according to this embodiment is formed, and Figure 12B shows a plan view of the back surface of the recording element substrate 10. In the recording element substrate 2010 of this embodiment, the configuration other than the slits described below is the same as in the first embodiment. In the following description, the same reference numerals are used for components similar to those in the first embodiment, and detailed descriptions are omitted.

[0058] As shown in Figure 12A, the ejection port forming member 12 of the recording element substrate 2010 has a total of four rows of ejection ports: two rows of ejection ports 601a and 601b corresponding to cyan ink, and two rows of ejection ports 601c and 601d corresponding to magenta ink. The liquid supply passage 18 and the liquid recovery passage 19 are flow paths that extend in a direction parallel to the extension direction of the rows of ejection ports formed on the substrate 11 of the recording element substrate 2010. As shown in Figure 11 above, the liquid supply passage 18 and the liquid recovery passage 19 are in communication with the ejection port 601x via the supply port 17a and the recovery port 17b, respectively (where x is one of a, b, c, or d). The liquid supply passage 18Cy and the liquid recovery passage 19Cy are flow paths for cyan ink, and the liquid supply passage 18Ma and the liquid recovery passage 19Ma are flow paths for magenta ink. As shown in Figure 12B, in this embodiment, the lid member 2020 is provided with a slit 511 as an opening at a position corresponding to the region between the liquid supply path 18Cy and the liquid recovery path 19Ma of the substrate 11. Here, the liquid supply path 18Cy and the liquid recovery path 19Cy correspond to the first liquid flow path, and the liquid supply path 18Ma and the liquid recovery path 19Ma correspond to the second liquid flow path. Furthermore, the slit 511 corresponds to the lid member opening formed at a position corresponding to the region between the first liquid flow path and the second liquid flow path among the multiple flow paths in the substrate.

[0059] In this embodiment, in a plan view of the recording element substrate 2010, the lid member 2020 is provided with a slit 511 at a position corresponding to the region between two liquid supply channels, which are flow paths for inks of different colors formed in the substrate 11. This reduces the number of steps required for slitting the lid member, while also reducing the possibility of communication between the flow paths and mixing of ink colors due to interfacial delamination between the substrate 11 and the lid member 2020.

[0060] (Third embodiment) Next, the configuration of the liquid discharge head according to the third embodiment will be described. Figure 13A shows a plan view of the surface on which the discharge port 13 of the recording element substrate 3010 according to this embodiment is formed, and Figure 13B shows a plan view of the back surface of the recording element substrate 3010. In the recording element substrate 3010 of this embodiment, the configuration other than the slits described below is the same as in the first embodiment. In the following description, the same reference numerals are used for components similar to those in the first embodiment, and detailed descriptions are omitted.

[0061] As shown in Figure 13B, in a plan view of the recording element substrate 3010, the lid member 3020 has A slit 521 is provided at a position corresponding to the region between the liquid supply passage 18 and the liquid recovery passage 19 of the substrate 11. The slit 521 is not formed in a region within, for example, 50 μm from the opening edge of the communication opening 21 of the lid member 3020. Thus, in this embodiment, the slit 521 is formed at a position that excludes the region adjacent to the communication opening 21 of the lid member 3020.

[0062] In this embodiment, in a plan view of the recording element substrate 3010, the direction in which the discharge port row of the discharge port 13 extends is defined as the reference direction. At this time, the liquid supply passage 18 and the liquid recovery passage 19 extend along the reference direction of the substrate 11. The slit 521, which is the opening of the lid member, is formed in a region that is a predetermined distance away from the communication port 21.

[0063] In this embodiment, the slit 521 in the lid member 3020 is formed at a distance greater than a certain distance from the communication opening 21. This reduces the possibility of defects such as cracks occurring in the lid member 3020 between the slit 521 and the lid member 3020. In addition, the slit 521, which contacts the bottom surface of the substrate 11 and the adhesive member 400, is formed in a stepping-stone-like manner in the row direction of the discharge port row of the discharge port 13 between the liquid supply passage 18 and the liquid recovery passage 19. For this reason, in terms of suppressing ink mixing when interfacial delamination occurs starting from the vicinity of the communication opening 21 of the lid member 3020, the effect is inferior to that of the first embodiment. However, since the adhesion force of the entire surface between the substrate 11 and the lid member 3020 is increased, the possibility of communication of the flow path and ink mixing due to interfacial delamination between the substrate 11 and the lid member 2020 can be reduced.

[0064] (Fourth embodiment) Next, the configuration of the liquid discharge head according to the fourth embodiment will be described. Figure 14A shows a plan view of the surface on which the discharge port 13 of the recording element substrate 4010 according to this embodiment is formed, and Figure 14B shows a plan view of the back surface of the recording element substrate 4010. In the recording element substrate 3010 of this embodiment, the configuration other than the slits described below is the same as in the first embodiment. In the following description, the same reference numerals are used for components similar to those in the first embodiment, and detailed descriptions are omitted.

[0065] As shown in Figure 14B, in a plan view of the recording element substrate 4010, the lid member 4020 is provided with a slit 531, which is a lid member opening, at a position corresponding to the area surrounding the liquid supply passage 18 and the liquid recovery passage 19 of the substrate 11.

[0066] Furthermore, in a plan view of the recording element substrate 4010, the extension direction of the discharge port row of the discharge port 13 is defined as the reference direction. In this case, the liquid supply passage 18 and the liquid recovery passage 19 extend along the reference direction of the substrate 11. In addition, the slit 531, which is the opening of the lid member, is constructed by connecting a plurality of slits extending from one end to the other in the reference direction with each other by slits that are openings extending in a direction perpendicular to the reference direction.

[0067] Thus, the lid member 4020 consists of multiple divided members, each divided into multiple flow paths. The multiple divided members are spaced apart from each other, and the gaps between the multiple divided members function as slits 531, which are lid member openings where the adhesive member 400 and the substrate 11 come into contact.

[0068] Furthermore, since the slit 531 is provided in such a way that it surrounds the liquid supply passage 18 and the liquid recovery passage 19, even if delamination occurs at the interface between the substrate 11 and the lid member 20 at both ends of the discharge port row of the discharge port 13, the possibility of communication of the flow path and mixing of inks can be reduced.

[0069] (Fifth embodiment) Next, the configuration of the liquid discharge head according to the fifth embodiment will be described. Figure 15A shows a plan view of the surface on which the discharge port 13 of the recording element substrate 5010 according to this embodiment is formed. Reference numeral 15B indicates a plan view of the back surface of the recording element substrate 5010. In the recording element substrate 3010 of this embodiment, the configuration other than the slits described below is the same as in the first embodiment. In the following description, the same reference numerals are used for components similar to those in the first embodiment, and detailed descriptions are omitted.

[0070] As shown in Figure 15B, in a plan view of the recording element substrate 5010, the lid member 5020 is provided with a slit 541, which is a lid member opening, in a so-called single-stroke pattern, at a position corresponding to the area surrounding a part of the outer periphery of the liquid supply passage 18 and liquid recovery passage 19 of the substrate 11.

[0071] According to this embodiment, the slit 541 is provided so as to surround at least a portion of the outer circumference of the liquid supply passage 18 and the liquid recovery passage 19. This reduces the possibility of communication between the flow paths and ink mixing even if interfacial delamination occurs between the substrate 11 and the lid member 20 at the end of the discharge port row of the discharge port 13.

[0072] Furthermore, in a plan view of the recording element substrate 5010, the extension direction of the discharge port row of the discharge port 13 is defined as the reference direction. At this time, the liquid supply passage 18 and the liquid recovery passage 19 extend along the reference direction of the substrate 11. In addition, the slit 541, which is the opening of the lid member, is constructed by connecting a plurality of slits extending from one end to the other in the reference direction with each other by slits that are openings extending in a direction perpendicular to the reference direction.

[0073] Furthermore, unlike the fourth embodiment, the slit 541 is formed in a single continuous line, making it easier to process the slit 541 compared to the processing of the slit 531 in the fourth embodiment. Moreover, in the fourth embodiment, there is a possibility that the portion of the lid member 4020 inside the slit 531 and the portion outside the slit 531 may separate and become fragmented. However, with the slit 541 of this embodiment, such fragmentation of the lid member 20 can be suppressed, and the risk of fragmented portions falling off when interfacial delamination occurs between the substrate 10 and the lid member 20 can also be reduced.

[0074] (Sixth embodiment) Next, the configuration of the liquid discharge head according to the sixth embodiment will be described. Figure 16A shows a plan view of the surface on which the discharge port 13 of the recording element substrate 6010 according to this embodiment is formed, and Figure 16B shows a plan view of the back surface of the recording element substrate 6010. In particular, the configuration of the recording element substrate 3010 of this embodiment is the same as that of the first embodiment, except for the slits described below. In the following description, the same reference numerals are used for components similar to those in the first embodiment, and detailed descriptions are omitted.

[0075] As shown in Figure 16A, the ejection port forming member 12 of the recording element substrate 6010 has a total of three rows of ejection ports: two rows of ejection ports 602a and 602b corresponding to black ink, and one row of ejection ports 602c corresponding to red ink.

[0076] In this embodiment, the spacing between the two rows of discharge ports 602b and 602c is wider than the spacing between the two rows of discharge ports 602a and 602b. The liquid supply path 18 and the liquid recovery path 19 are flow paths that extend in a direction parallel to the direction in which the rows of discharge ports formed on the substrate 11 of the recording element substrate 6010 extend. The liquid supply path 18 and the liquid recovery path 19 communicate with the discharge port 601x via the supply port 17a and the recovery port 17b, respectively (where x is one of a, b, or c).

[0077] Furthermore, the lid member 6020 has communication openings 21a to 21e that communicate with the liquid supply passage 18 which communicates with the discharge port 602a and the liquid recovery passage 19. Similarly, the lid member 6020 has communication openings 21a to 21e that communicate with the liquid supply passage 18 which communicates with the discharge port 602b and the liquid recovery passage 19. f to 21j are formed. Similarly, the lid member 6020 has communication ports 21k to 21o that communicate with the liquid supply passage 18 and liquid recovery passage 19 that communicate with the discharge port 602c. Note that communication ports 21a to 21e correspond to the first communication ports, communication ports 21f to 21j correspond to the second communication ports, and communication ports 21k to 21o correspond to the third communication ports. Furthermore, the liquid supply passage 18 and liquid recovery passage 19 that communicate with communication ports 21a to 21e correspond to the first flow path of the first liquid. Furthermore, the liquid supply passage 18 and liquid recovery passage 19 that communicate with communication ports 21f to 21j correspond to the second flow path of the second liquid. Furthermore, the liquid supply passage 18 and liquid recovery passage 19 that communicate with communication ports 21k to 21o correspond to the third flow path of the third liquid.

[0078] As shown in Figure 16B, in this embodiment, the lid member 6020 is provided with a slit 551 at a position corresponding to the region between the liquid supply passage 18 and the liquid recovery passage 19 of the substrate 11. Furthermore, in a plan view of the recording element substrate 6010, the slit 551 in the lid member 6020 is provided at a position corresponding to the region between the two liquid supply passages, which are the flow paths for inks of different colors formed in the substrate 11. That is, the lid member opening is formed between the second communication opening (21f~21j) and the third communication opening (21k~21o). This reduces the number of steps required for slitting the lid member while reducing the possibility of communication between the flow paths and mixing of ink colors due to interfacial delamination between the substrate 11 and the lid member 6020. In addition, since the slit 551 is provided between rows of discharge openings that discharge inks of different colors, the slit 551 is provided in a wider area than between rows of discharge openings that discharge inks of the same color. This allows for a longer distance between the slit 551 and the communication opening 21 of the lid member 6020, making it easier to process the slit.

[0079] (Seventh Embodiment) Next, the configuration of the liquid discharge head according to the seventh embodiment will be described. Figure 17A shows a plan view of the surface on which the discharge port 13 of the recording element substrate 7010 according to this embodiment is formed, and Figure 17B shows a plan view of the back surface of the recording element substrate 7010. In the recording element substrate 3010 of this embodiment, the configuration other than the slit described below is the same as in the first embodiment. In the following description, the same reference numerals are used for the same components as in the first embodiment, and detailed descriptions are omitted.

[0080] As shown in Figure 17B, in a plan view of the recording element substrate 7010, the lid member 7020 is provided with a slit 561, which is a so-called zigzag-shaped lid member opening, at a position corresponding to the area between the liquid supply passage 18 and the liquid recovery passage 19 of the substrate 11.

[0081] In this embodiment, in a plan view of the recording element substrate 7010, the direction in which the discharge port row of the discharge port 13 extends is defined as the reference direction. At this time, the liquid supply passage 18 and the liquid recovery passage 19 extend along the reference direction of the substrate 11. The slit 561, which is the opening of the lid member, is provided from one end to the other in the reference direction and is provided to have a portion that extends in the reference direction and a portion that extends in a direction intersecting the reference direction.

[0082] According to this embodiment, the lid member 7020 is provided with a slit 561 at a position corresponding to the area between the two liquid supply channels 18 and the liquid recovery channel 19, which are the flow paths for inks of different colors formed in the substrate 11. Furthermore, the slit 561 has a larger opening area than if it were a straight slit, and it also has a bent portion. Therefore, the slit 561 allows for a larger contact area between the back surface of the substrate 11 and the adhesive member 400 than if it were a straight slit, and it also allows for the distribution of stress on the interface between the back surface of the substrate 11 and the adhesive member 400. This reduces the possibility of communication between the flow paths and mixing of ink colors due to interfacial delamination between the substrate 11 and the lid member 7020.

[0083] (Eighth embodiment) Next, the configuration of the liquid discharge head according to the seventh embodiment will be described. Figure 18A shows a plan view of the surface on which the discharge port 13 of the recording element substrate 8010 according to this embodiment is formed, and Figure 18B shows a plan view of the back surface of the recording element substrate 8010. In the recording element substrate 3010 of this embodiment, the configuration other than the slits described below is the same as in the first embodiment. In the following description, the same reference numerals are used for the same components as in the first embodiment, and detailed descriptions are omitted.

[0084] As shown in Figure 18B, in a plan view of the recording element substrate 8010, the lid member 8020 is provided with slits 571 at positions corresponding to the regions between the liquid supply passage 18 and the liquid recovery passage 19 of the substrate 11.

[0085] In this embodiment, a slit 571 is formed in the lid member 8020 between the respective liquid supply passages and liquid recovery passages of the substrate 11. By providing more slits in the lid member compared to the above embodiment, the possibility of communication of the flow paths and mixing of inks due to interfacial delamination between the substrate 11 and the lid member 8020 can be reduced more effectively. [Explanation of Symbols]

[0086] 3 liquid discharge head, 10 recording element substrate, 11 substrate, 15 recording element, 18 liquid supply path, 19 liquid recovery path, 20 lid member, 21 communication port, 501 slit

Claims

1. a recording element substrate having a substrate on which a plurality of flow paths for liquid to be ejected onto a recording material by recording elements are formed, and a cover member having a plurality of communication ports communicating with the plurality of flow paths and joined to the substrate; a liquid supply member that supplies the liquid to the plurality of flow paths through the plurality of communication ports of the cover member; an adhesive member that adheres the cover member and the liquid supply member; and A liquid ejection head characterized in that a lid member opening is formed in at least a portion of the contact area of ​​the lid member that contacts the substrate, separate from the area in which the multiple communication holes are formed, for bringing the adhesive member into contact with the substrate.

2. 2. The liquid ejection head according to claim 1, wherein the opening of the cover member is formed at a position corresponding to an area between a first liquid flow path and a second liquid flow path among the plurality of flow paths in the substrate.

3. 3. The liquid ejection head according to claim 2, wherein the first liquid and the second liquid have different colors.

4. a first communication port, a second communication port, and a third communication port among the communication ports communicate with a first flow path for a first liquid, a second flow path for a second liquid, and a third flow path for a third liquid, respectively; In a plan view of the recording element substrate, a width between the second communication port and the third communication port is wider than a width between the first communication port and the second communication port; 2. The liquid ejection head according to claim 1, wherein the cover member opening is formed between the second communication port and the third communication port.

5. 5. The liquid ejection head according to claim 4, wherein the second liquid and the third liquid have different colors.

6. the substrate has a substrate opening of the flow channel on a surface that comes into contact with the lid member, 6. A liquid ejection head according to claim 1, wherein, in a plan view of the recording element substrate, the cover member opening is formed in at least a part of the contact area surrounding the substrate opening.

7. In a plan view of the recording element substrate, the plurality of flow paths extend along a reference direction of the substrate, and the cover member opening extends from one end to the other end in the reference direction, 6. The liquid ejection head according to claim 1, wherein the plurality of cover member openings are connected to one another by openings extending in a direction perpendicular to the reference direction.

8. In a plan view of the recording element substrate, the plurality of flow paths extend along a reference direction of the substrate, and the cover member opening extends from one end to the other end in the reference direction, 8. The liquid ejection head according to claim 1, wherein the opening of the cover member is formed in an area spaced a predetermined distance from the communication port.

9. In a plan view of the recording element substrate, the plurality of flow paths extend along a reference direction of the substrate, and the cover member opening is provided from one end to the other end in the reference direction, 9. The liquid container according to claim 1, wherein the opening of the cover member has a portion extending in the reference direction and a portion extending in a direction intersecting the reference direction. Discharge head.

10. a recording element substrate having a substrate on which a plurality of flow paths for liquid to be ejected onto a recording material by recording elements are formed, and a cover member having a plurality of communication ports communicating with the plurality of flow paths and joined to the substrate; a liquid supply member that supplies the liquid to the plurality of flow paths through the plurality of communication ports of the cover member; an adhesive member that adheres the cover member and the liquid supply member; and the cover member is made up of a plurality of divided members each divided into a plurality of flow paths, The plurality of divided members are arranged at intervals from one another, A liquid ejection head, wherein the gaps between the plurality of divided members function as openings in a lid member where the adhesive member and the substrate come into contact.

11. 11. A liquid ejection head according to claim 1, wherein the flow path includes a supply flow path portion that supplies the liquid to the recording element, and a recovery flow path portion that recovers the liquid supplied to the recording element.

12. 12. The liquid ejection head according to claim 1, wherein the recording element substrate is made of a silicon substrate.

13. 13. The liquid ejection head according to claim 12, wherein the cover member is made of an epoxy resin material.

14. 14. A liquid ejection head according to claim 13, wherein the adhesive member is made of an epoxy resin material containing a silane agent.

15. A liquid ejection apparatus comprising the liquid ejection head according to claim 1 .

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