Liquid dispensing device and imprinting device

Abstract

To provide a liquid discharge device that can more securely remove foreign matters inside and on the surface of a discharge outlet.SOLUTION: The liquid discharge device includes an accommodation unit for accommodating a discharge, a discharge port connected to the accommodation unit for discharging the discharge accommodated in the accommodation unit, and a pressure control unit for controlling the pressure of the discharge accommodated in the accommodation unit. The pressure control unit controls the pressure of the discharge to shift from a first negative pressure state to a second negative pressure state where the negative pressure is even greater than the first negative pressure state and thereafter to a third positive pressure state.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a liquid ejection device.

Background Art

[0002] There is known a liquid ejection device that ejects liquid, which uses a cartridge in which a discharge head for ejecting liquid from a plurality of ejection ports and a storage container for storing the liquid are integrated. Such a liquid ejection device includes a maintenance mechanism for maintaining and restoring the ejection performance of the ejection means by eliminating clogging of the ejection ports provided in the ejection means and removing foreign matter adhering to the ejection surface on which the ejection ports are formed.

[0003] Patent Document 1 describes that it has a wiper that moves and wipes the liquid remaining on the ejection surface along the ejection surface, and ejects liquid from each ejection port of the ejection means to clean the inside of the ejection port.

Prior Art Documents

Patent Documents

[0004] <00000Z0>

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, with the method described in Patent Document 1, although it is possible to discharge foreign matter together with the liquid present on the ejection port surface, it is not possible to effectively remove foreign matter inside the ejection port and in the head flow path. Further, in Patent Document 1, since the cross-sectional area of the ejection port is smaller than the cross-sectional area of the flow path, it is not possible to remove foreign matter having a size larger than the ejection port present in the flow path.

[0006] The present invention has been made in view of the above-described problems, and an object thereof is to provide a liquid ejection device capable of more reliably removing foreign matter inside and on the ejection surface of the ejection port.

Means for Solving the Problems

[0007] The liquid discharge device according to the present invention comprises a storage section for storing a discharged substance, a discharge port communicating with the storage section for discharging the discharged substance stored in the storage section, a small liquid chamber communicating the discharge port with the storage section, and a pressure control means for controlling the pressure of the discharged substance stored in the storage section, wherein the pressure control means controls the pressure of the discharged substance to transition from a first negative pressure state to a second negative pressure state where the negative pressure is greater than the first negative pressure state, and then to a third positive pressure state. The pressure control means includes a first pressure generating unit for generating the first negative pressure state, a second pressure generating unit connected to the housing independently of the first pressure generating unit for generating the second negative pressure state, and a third pressure generating unit connected to the housing independently of the first and second pressure generating units for generating the third positive pressure state. It is characterized by the following: [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a liquid dispensing device that can more reliably remove foreign matter from inside the discharge port and on the discharge port surface. [Brief explanation of the drawing]

[0009] [Figure 1] A diagram showing the configuration of the imprint device according to the first embodiment. [Figure 2] A diagram showing a liquid dispensing device according to the first embodiment. [Figure 3] Enlarged view of the liquid dispensing section. [Figure 4] A diagram showing the change in pressure during the cleaning process. [Figure 5] A diagram showing the pressure control unit in the first embodiment. [Figure 6] A flowchart of the cleaning operation in the first embodiment. [Figure 7] A diagram showing the pressure control unit in the second embodiment. [Figure 8] Flowchart of the cleaning operation in the second embodiment. [Figure 9] A diagram showing the pressure control unit in the third embodiment. [Modes for carrying out the invention]

[0010] The embodiments will be described in detail below with reference to the attached drawings. Note that the following embodiments do not limit the invention as defined in the claims. While the embodiments describe multiple features, not all of these features are essential to the invention, and the features may be combined in any way. Furthermore, in the attached drawings, identical or similar configurations are given the same reference numerals, and redundant descriptions are omitted.

[0011] <First Embodiment> Figure 1 shows the configuration of an imprint apparatus according to the first embodiment of the present invention. In this embodiment, an example of an apparatus that uses an ultraviolet-curable resin as the imprint material and cures the ultraviolet-curable resin by irradiation with ultraviolet light is described. However, the material of the imprint material and the curing method are not limited to this. For example, the photocurable resin may be cured by irradiating it with light of a wavelength other than ultraviolet light using a light irradiation device, or a thermosetting resin may be used and cured by heat.

[0012] In Figure 1, the imprint apparatus 100 comprises a liquid discharge system 101, a stage 6 supported by a base frame 5, a mold 1, a mold drive mechanism 2 held by a structure 3, and an ultraviolet irradiation device 7.

[0013] The liquid discharge system 101 comprises a liquid discharge device 10 and a pressure control unit 13. The liquid discharge device 10 includes a discharge section 11 for discharging imprint material and a storage section 12 for storing the imprint material.

[0014] As shown in FIG. 1(b), a substrate 4 is placed on a stage 6, and an imprint material 8 is discharged (coated) from a discharge unit 11 onto the substrate 4 (on the substrate). As shown in FIG. 1(c), a mold 1 having a fine uneven pattern or the like is brought into contact with the imprint material 8 discharged onto the substrate 4, and the imprint material 8 is filled so as to fill the unevenness of the mold 1. In this state, the imprint material 8 is irradiated with ultraviolet rays 9 from an ultraviolet irradiation device 7 to cure the imprint material 8. When the mold 1 is moved upward (released), the imprint material 8 is in a state where the pattern of the mold 1 is transferred and formed. In this way, a pattern is formed on the imprint material 8.

[0015] The liquid discharge device 10 is detachable. When all of the internal imprint material 8 is consumed, the imprint device 100 can be immediately used by replacing it with a new liquid discharge device 10.

[0016] The stage 6 is movable on the base frame 5 while holding the substrate 4. A mold drive mechanism 2 that drives the mold 1 up and down is held by a structure 3 and can bring the mold 1 into contact with the imprint material 8 discharged onto the substrate 4.

[0017] An ultraviolet irradiation device 7 is disposed above the mold 1, and irradiates the imprint material 8 with ultraviolet rays 9 through the mold 1. The ultraviolet rays 9 may be generated from a light source such as a halogen lamp that generates i-rays or g-rays, for example. Further, the ultraviolet irradiation device 7 may have a function of condensing and shaping the light generated by the light source.

[0018] Next, the imprint operation using the imprint device 100 will be described in detail.

[0019] First, the substrate 4 is mounted on the stage 6. The substrate 4 is moved by the stage 6 below the discharge unit 11 of the liquid discharge device 10. Then, while moving the stage 6, the imprint material 8 is discharged from the discharge unit 11 onto the substrate 4.

[0020] Next, the stage 6 moves the portion of the substrate 4 from which the imprint material 8 has been extruded downwards from the mold 1. Furthermore, the mold 1 is lowered by the mold drive mechanism 2 so that the mold 1 and the substrate 4 are in close proximity. In this state, the alignment marks on the mold 1 and the alignment marks on the substrate 4 are aligned using an alignment scope or the like, and their relative positions are adjusted.

[0021] After adjusting the relative position, the mold drive mechanism 2 further lowers the mold 1 toward the substrate 4, bringing the mold 1 into contact with the imprint material 8. Maintaining this state, the imprint material 8 is filled into the uneven areas of the mold 1. Then, ultraviolet light 9 is irradiated from the ultraviolet irradiation device 7, and the ultraviolet light 9 that has passed through the mold 1 is irradiated onto the imprint material 8. As a result, a photocuring reaction occurs in the imprint material 8, and the imprint material 8 hardens.

[0022] Finally, the mold drive mechanism 2 raises the mold 1, separating it from the hardened imprint material 8.

[0023] Through the process described above, the patterned imprint material 8 can be formed on the substrate 4. In some cases, the imprint equipment used in semiconductor manufacturing may form patterns over the entire area of ​​the substrate 4. In this case, a series of imprint operations are repeated while changing the area of ​​the substrate 4.

[0024] Next, Figure 2 shows the configuration of the liquid dispensing device 10.

[0025] The liquid dispensing device 10 mainly comprises a dispensing section 11, a storage container 12 for containing the discharged material 8 (liquid), and a pressure control unit 13. Inside the storage container 12, which is capable of containing the liquid, is a separation membrane 14 made of a flexible member that separates the space inside the storage section. The thickness of the separation membrane 14 is preferably 10 μm or more and 200 μm or less, and it is preferably made of a material with low permeability to liquids and gases. The separation membrane 14 can be made of, for example, a film of a fluororesin material such as PFA, or a composite multilayer film combining a fluororesin material and a plastic material.

[0026] One containment section 15 of the containment container 12, separated by a separation membrane 14, contains the discharged material 8, while the other containment section 16 contains the filling liquid 8a. Containment sections 15 and 16 are separated by the separation membrane 14. Containment section 16 is connected to the pressure control unit 13 by piping 17, and containment section 15 is connected to the discharge unit 11.

[0027] The pressure control unit 13 is equipped with a filling liquid tank, piping, a pressure sensor, a pump, valves, etc., and is configured to control the pressure inside the containment section 16. By controlling the pressure of the filling liquid 8a inside the containment section 16 with the pressure control unit 13, the pressure of the discharged material 8 inside the containment section 15 can be controlled via the separation membrane 14.

[0028] As the discharge 8 is repeatedly discharged from the discharge section 11, the discharge 8 inside the containment section 15 is consumed and decreases, and the separation membrane 14 gradually deforms in the +X direction. As the separation membrane 14 deforms, the pressure control unit 13 replenishes the containment section 16 with filling liquid 8a from the filling liquid tank. This stabilizes the shape of the meniscus in the discharge section 11, allowing the discharge 8 to be discharged with good reproducibility.

[0029] Next, the circulation unit 40 will be described. The circulation unit 40 includes a fitting 42, a pump 44, a filter 41 for filtering the discharged material 8, and a flow path 45 connecting the fitting 43, and is connected to the containment container 12 by fittings 42 and 43. By driving the pump 44, the discharged material 8 inside the containment container 15 is sucked into the flow path 45 via fitting 43, and the discharged material, from which foreign matter has been removed by the filter 41, can be returned to the containment container 15 via the filter 41 and fitting 43. This circulation unit 40 makes it possible to remove foreign matter mixed in the discharged material 8 inside the containment container 15.

[0030] Furthermore, considering the possibility of foreign matter being generated in the discharged material due to dust generation from the pump 44, it is preferable to place the filter 41 downstream of the pump 44. The pump 44 is preferably located within the flow path 45, but it may also be located outside of this flow path.

[0031] Figure 3 is an enlarged cross-sectional view of the discharge unit 11. The discharge unit 11 comprises a common liquid chamber 56 and a module substrate 57. The module substrate 57 is provided with a supply port 21 for supplying the discharge material 8 to the module substrate 57, a plurality of discharge nozzles 54 each having a discharge port 19 capable of discharging the discharge material 8, and an energy generating element 18 provided inside the discharge nozzles 54 to generate energy for discharging the discharge material 8.

[0032] Here, the surface of the module substrate 57 on which the supply port 21 is provided is referred to as the supply port side surface 59, and the surface on which the discharge port 19 is provided is referred to as the discharge surface 58. The opening area of ​​the discharge port 19 is smaller than the opening area of ​​the supply port 21, and it has the smallest cross-sectional area in the flow path of the discharge nozzle 54.

[0033] Examples of energy generating elements 18 include piezoelectric elements and heat-generating resistors. Since materials containing a large amount of resin are often used as the discharged material 8, a piezoelectric element is used as the energy generating element 18 here. The supply port 21 communicates with the discharge port 19 inside the module substrate 57. By controlling the energy generating element 18 with a controller (not shown), the discharged material 8 supplied from the supply port 21 to the small liquid chamber 20 between the energy generating element 18 and the discharge port 19 is discharged from the discharge port 19. The discharge unit 11 is preferably an discharge head, such as those used in inkjet heads. Alternatively, the supply and stop of the discharged material may be controlled using control valves or the like.

[0034] Next, the detection of blockage of the discharge port 19 due to foreign matter (discharge abnormality) will be explained. The energy generating element 18 can also be used to determine the blockage state of the discharge port 19 (discharge abnormality detection). In the liquid discharge device of this embodiment, by applying a voltage of 30% to 70% of the voltage applied to the energy generating element 18 when discharging the discharged material 8, the volume of the small liquid chamber 20 is fluctuated (hereinafter referred to as inspection oscillation), and vibration is applied to the discharged material 8 in the small liquid chamber 20. With a voltage fluctuation range of this magnitude, the discharged material 8 in the small liquid chamber 20 will vibrate, but it will not break the meniscus of the discharge port 19 and be discharged from the discharge section 11. On the other hand, the vibration in the small liquid chamber 20 generates a back electromotive force in the energy generating element 18, and if the discharge port is blocked by accumulated material or if air bubbles have entered the small liquid chamber 20, a waveform different from the standard state (waveform when meniscus is formed) can be detected.

[0035] Typically, a liquid dispensing device has a normal dispensing position for dispensing liquid towards the target and a standby position for maintenance of the liquid dispensing device. The liquid dispensing device is mounted on a stage (not shown) and moved between the dispensing position and the standby position. By detecting blockages in the dispensing port 19 at the standby position, it is possible to suppress erroneous dispensing at the dispensing position due to malfunctions of the inspection oscillator. When dispensing is not being performed, the degree of blockage in the dispensing port 19 is inspected by the inspection oscillator of the energy generating element 18, and if an abnormality is detected, the process moves to a cleaning step. If there is no abnormality, it is returned to the dispensing position and the desired dispensing is performed.

[0036] In this example, a faulty nozzle was detected by inspection oscillation. Alternatively, a projectile impact inspection device (not shown) may be used to detect faulty nozzles by measuring the presence, location, velocity, and amount of projectile impact.

[0037] One end of the discharge section 11 is open to the atmosphere by a discharge port 19, but the diameter of the discharge port 19 is several micrometers to several tens of micrometers, so the discharged material 8 does not leak out due to its own weight by capillary action. The liquid surface near the discharge port 19 is maintained in a concave, so-called meniscus state.

[0038] Next, the cleaning process will be explained. If the inspection oscillation determines that foreign matter is attached to the discharge port 19, the cleaning process is performed. The cleaning process is also performed in the standby position, similar to the detection of blockage in the discharge port 19. If it is determined that foreign matter is attached to the discharge port 19, the pressure control unit 13 is set to a negative pressure greater than the meniscus force, for example, -30kPa. This draws the discharged material 8 in the discharge port 19 and small liquid chamber 20, along with any foreign matter attached nearby, into the discharge port 19 as a gas-liquid mixture with the surrounding air, moving the attached foreign matter into the containment unit 15. After that, the pump 44 of the circulation unit 40 is driven to remove the foreign matter with the filter 41. Then, the pressure control unit 13 is set to a positive pressure, for example, +30kPa, to discharge any remaining air in the small liquid chamber 20 and discharge port 19 along with the discharged material 8. Finally, the pressure is set to a normal slightly negative pressure state that can stably maintain the meniscus state of the discharged material 8.

[0039] Figure 4 shows the pressure changes during the cleaning process. First, before performing the cleaning process, as shown in Figure 4(a), the pressure control unit 13 maintains a first negative pressure state (a normal slight negative pressure state) that can stably maintain the meniscus of the discharged material 8 at the discharge port 19. If foreign matter 200 is attached to the discharge port 19, as shown in Figures 4(b) and (c), the pressure control unit 13 generates a second negative pressure state, which is a negative pressure greater than the first negative pressure state (greater than the meniscus force), such as -30kPa. This moves the discharged material 8 in the discharge port 19 and small liquid chamber 20, along with any foreign matter 200 attached nearby, into the containment section 15 along with the surrounding air. After the foreign matter 200 is removed by the filter 41, as shown in Figure 4(d), the pressure control unit 13 generates a third positive pressure state, such as +30kPa. This allows the air remaining in the small liquid chamber 20 and discharge port 19 to be discharged along with the discharged material 8. After these steps are completed, as shown in Figure 4(e), the pressure control unit 13 returns the pressure to the first negative pressure state (normal slight negative pressure state). This allows the meniscus of the discharged material 8 to be stably formed again. The cleaning process is then performed in this manner.

[0040] Thus, the liquid discharge device 10 of this embodiment creates a slight negative pressure state that can stably maintain the meniscus state of the discharged material 8, as well as a negative pressure state that can draw in foreign matter in a gas-liquid mixture into the small liquid chamber 20 and the containment section 15, and a positive pressure state that can discharge the discharged material 8 from the discharge port 19. The negative pressure state is adjusted by the negative pressure source (pressure generating unit) 131, and the positive pressure state is adjusted by the positive pressure source (pressure generating unit) 132 (see Figure 5, which will be described later).

[0041] In this embodiment, the liquid discharge device has been described as having a pressure control unit 13 connected to the storage unit 15 by a single pipe. However, it is not limited to this configuration, and may be configured to have multiple pipes connected to control a slight negative pressure state, a negative pressure state, and a positive pressure state, respectively.

[0042] In this embodiment, the pressure was set to -30kPa and +30kPa, but the suction volume and discharge volume may also be set to 3cc or more and 10cc or less, respectively.

[0043] Alternatively, a degassing device (not shown) may be placed in the circulation unit 40 to remove air bubbles sucked in along with the discharged material 8 during suction by driving the circulation unit 40.

[0044] After the discharged material 8 is discharged from the discharge port 19, the discharged material 8 adhering to the discharge surface 58 is removed by suction using a suction nozzle (not shown). The suction nozzle, which is directly connected to a negative pressure source, is brought within 100 μm of the discharge surface 58 to begin suction. While maintaining a distance from the discharge surface 58, the suction nozzle is scanned along the discharge surface 58 to suck up any remaining droplets. The gap at the suction opening of the suction nozzle is set to several tens to several hundreds of μm, and the remaining liquid causes a momentary liquid conductivity between the discharge surface 58 and the tip of the suction nozzle. Therefore, to prevent the risk of metal contamination, a resin such as PTFE is used as the material for the suction nozzle.

[0045] After recovering the remaining liquid from the discharge surface, the foreign matter is confirmed to have been removed from the discharge port 19 by test oscillation. If it has not been removed, the cleaning process is repeated, and if it cannot be restored after multiple attempts, the liquid discharge device 10 is replaced.

[0046] In this embodiment, the liquid dispensing device 10 has been described as performing pressure control via a separation membrane 14 inside the containment container 12. However, it is also possible to omit the separation membrane 14 and instead have a containment section that only contains the discharged material 8, and to configure the device to control the pressure of the discharged material 8 with a pressure control unit 13. In this case, the circulation section 40 described in this embodiment may be provided within the pressure control unit 13 to remove foreign matter.

[0047] In addition, in the field of inkjet recording devices, measures have been taken to maintain a certain range of negative pressure for the ejected material 8 in order to stabilize the meniscus shape at the ejection port 19 of the ejected material 8. For example, a method is known in which a porous body is constructed inside the containment section to hold liquid and negative pressure is formed by utilizing the capillary force inside the porous body. Other methods include forming negative pressure inside the containment section by combining a mechanical element such as a spring with a balloon-shaped membrane, or controlling the negative pressure using a control valve and air pressure. In the present invention, the pressure in the containment section may also be controlled by these methods.

[0048] Figure 5 shows the configuration of the pressure control unit 13 in this embodiment.

[0049] As shown in Figure 5, the pressure control unit 13 of this embodiment has a meniscus control unit 27, a negative pressure source 131, and a positive pressure source 132, each independently connected to the housing unit 16. A first control valve 133, a second control valve 134, and a third control valve 135 are provided between these elements and the housing unit 16, respectively.

[0050] Since the filling liquid 8a is also contained in the supply tank 26 which constitutes the meniscus control unit 27, the liquid level of the filling liquid 8a is controlled to be lower than the liquid level at the discharge port 19. Specifically, the liquid level of the filling liquid 8a is set to be ΔH lower than the discharge port 19. In order to maintain the meniscus state, it is preferable to control the internal pressure of the discharged material 8 to a value 0.40 ± 0.04 kPa lower than the ambient pressure (slight negative pressure), and ΔH is controlled to be 40 ± 4 mm. For example, the discharged material 8 has a density approximately equal to that of water.

[0051] Next, the cleaning process in this embodiment will be described. Figure 6 is a flowchart showing the operation of the cleaning process.

[0052] First, in the normal discharge operation state of the liquid discharge device 10, when the cleaning operation of the discharge surface in step S1 is not performed, the first control valve 133 is open, and the second control valve 134 and the third control valve 135 are closed.

[0053] From there, as already explained, the liquid dispensing device 10 is moved to the standby position, and the degree of clogging of the dispensing port 19 is checked by the test oscillation of the energy generating element 18 when dispensing is not being performed. If an abnormality is found, the cleaning process is initiated. If there is no abnormality, the device is returned to the dispensing position and the desired dispensing is performed.

[0054] If an abnormality is detected, in step S2, the negative pressure source 131 is set so that the pressure of the discharged material 8 is greater than the meniscus force, at -30kPa. After closing the first control valve 133, the second control valve 134 is opened. As a result, the pressure of the discharged material 8, which had been controlled to maintain the meniscus of the discharge port 19, is temporarily reduced to -30kPa. Then, the meniscus collapses as a gas-liquid mixture is drawn in from the discharge port 19. At this time, any foreign matter present in the discharge port 19 and the small liquid chamber 20 moves into the containment section 15 along with the gas and liquid.

[0055] Next, in step S3, pressurization is applied to the discharge 8. After closing the second control valve 134, opening only the third control valve 135 applies the pressure from the positive pressure source 132 to the discharge 8 via the filling liquid 8a, filling the small liquid chamber 20 with the discharge 8, and the discharge 8 is discharged from the outlet 19.

[0056] Subsequently, the pump 44 of the circulation unit 40 is driven to remove foreign matter using the filter 41. Alternatively, the removal of foreign matter by the circulation unit 40 may be performed between steps S2 and S3. After that, the system is set to return to a normal slightly negative pressure state that can stably maintain the meniscus state of the discharged material 8.

[0057] <Second Embodiment> In the first embodiment, a configuration was described in which a slight negative pressure state that can stably maintain the meniscus state of the discharged material 8, a negative pressure state that draws gas-liquid mixture into the small liquid chamber 20 and the containment section 15, and a positive pressure state that discharges the discharged material 8 from the discharge port 19 are controlled by pressure sources independently connected to the containment section 16. In contrast, in this embodiment, there is only one pipe connecting the containment section 16 and the pressure control unit 13. This makes it possible to miniaturize the device and simplify its design and manufacturing.

[0058] Furthermore, in the first embodiment, the negative pressure source 131 and the positive pressure source 132 are configured to be switched by a single control valve each. In contrast, in this embodiment, another control valve is provided after each control valve, and the pressure between the control valves is compressed or expanded, and then the control valve is released to change the pressure all at once. This improves the responsiveness of the pressure control.

[0059] Figure 7 shows the configuration of the pressure control unit 13 in this embodiment.

[0060] In this embodiment, as shown in Figure 7, a negative pressure source 131 and a positive pressure source 132 are connected to the meniscus control unit 27. The negative pressure source 131 and the positive pressure source 132 are arranged in parallel, and a third control valve 135 and a fourth control valve 136 are connected to them, respectively. Furthermore, a second control valve 134 is arranged between the third control valve 135 and the fourth control valve 136 and the meniscus control unit 27. In addition, a first control valve 133 is arranged in the meniscus control unit 27.

[0061] Next, the cleaning process in this embodiment will be described. Figure 8 is a flowchart showing the operation of the cleaning process.

[0062] First, in the normal discharge operation state of the liquid discharge device 10, when the cleaning operation of the discharge surface in step S11 is not performed, the first control valve 133 is open, and the second control valve 134, the third control valve 135, and the fourth control valve 136 are closed.

[0063] From there, as already explained, the liquid dispensing device 10 is moved to the standby position, and the degree of clogging of the dispensing port 19 is checked by the test oscillation of the energy generating element 18 when dispensing is not being performed. If an abnormality is found, the cleaning process is initiated. If there is no abnormality, the device is returned to the dispensing position and the desired dispensing is performed.

[0064] In the cleaning process, step S12 prepares for suction. With the second control valve 134 and the fourth control valve 136 closed, the third control valve 135 is opened. At this time, for example, the negative pressure source 131 is set so that the second pressure sensor 141, which indicates the pressure in the piping connecting the second control valve 134, the third control valve 135, and the fourth control valve 136, reads -30kPa.

[0065] Next, suction is performed in step S13. After closing the first control valve 133 and the third control valve 135, only the second control valve 134 is opened. As a result, the pressure of the discharged material 8, which had been controlled to maintain the meniscus of the discharge port 19, is temporarily reduced to -30 kPa. Then, the meniscus collapses due to suction of a gas-liquid mixture from the discharge port 19. At this time, any foreign matter present in the discharge port 19 and the small liquid chamber 20 moves into the containment section 15 along with the gas and liquid.

[0066] Next, in step S14, preparations for pressurization are carried out. After closing the second control valve 134, only the fourth control valve 136 is opened. At this time, for example, the positive pressure source 132 is set so that the second pressure sensor 141, which indicates the pressure in the piping connecting the second control valve 134, the third control valve 135, and the fourth control valve 136, reads +30kPa.

[0067] Next, in step S15, pressurization is applied to the discharge 8. After closing the fourth control valve 136, opening only the second control valve 134 applies the pressure from the positive pressure source 132 to the discharge 8 via the filling liquid 8a, filling the small liquid chamber 20 with the discharge 8, and the discharge 8 is discharged from the outlet 19.

[0068] Subsequently, the pump 44 of the circulation unit 40 is driven to remove foreign matter using the filter 41. Alternatively, the removal of foreign matter by the circulation unit 40 may be performed between step S13 and step S14.

[0069] In this embodiment, the liquid dispensing device 10 has been described as performing the cleaning operation in the order of steps S12 to S15. However, instead, it may be done as follows: First, the first control valve 133 is closed and the second control valve 134 is opened. Then, during suction, the third control valve 135 is opened while the fourth control valve 136 is closed. During pressurization, the fourth control valve 136 is opened while the third control valve 135 is closed. In this case, the first pressure sensor 140 is set to temporarily -30kPa during suction and temporarily +30kPa during pressurization.

[0070] Furthermore, in the liquid discharge device 10 of this embodiment, the piping connected from the negative pressure source 131 and the positive pressure source 132 is located above the liquid level in the supply tank 26. However, it may also be connected to the liquid in the supply tank 26. In other words, the fluid in the piping is not limited to gas but may also be a liquid.

[0071] Alternatively, instead of using a third and fourth control valve, a single three-way valve may perform both of those functions.

[0072] Furthermore, after step S15, the system returns to the normal slightly negative pressure state as in step S11.

[0073] <Third Embodiment> In the second embodiment, gas was supplied to the piping connecting the second control valve 134, the third control valve 135, and the fourth control valve 136. In contrast, in this embodiment, liquid is supplied to the piping. While the internal volume of a compressible fluid like gas changes, the internal volume of an incompressible fluid like liquid hardly changes. As a result, the responsiveness of pressure control is improved compared to when the piping contains gas.

[0074] Figure 9 shows the configuration of the pressure control unit 13 in this embodiment.

[0075] In this embodiment, as shown in Figure 9, a negative pressure source 131 and a positive pressure source 132 are arranged in parallel with the meniscus control unit 27. A first control valve 133 is provided between the meniscus control unit 27 and the housing unit 16. Separately from the meniscus control unit 27, the negative pressure source 131 and the positive pressure source 132 are connected in parallel to the end of piping connected to the housing unit 15. A third control valve 135 and a fourth control valve 136 are provided for each of the negative pressure source 131 and the positive pressure source 132, and they merge further down the line. A second control valve 134 is provided between them and the housing unit 16 further down the line.

[0076] In this embodiment, the role of the first control valve 133 is the same as in the second embodiment in that it closes the meniscus control unit 27, which maintains a slightly negative pressure state, from an open-to-the-atmosphere state in order to switch between a negative pressure state and a positive pressure state. Furthermore, the other pressure control units have the same basic roles as in the second embodiment, differing only in whether the fluid supplied to the piping is a gas or a liquid.

[0077] Therefore, the flowchart for the cleaning operation is the same as that shown in Figure 7, which illustrates the operation of the second embodiment.

[0078] (Other embodiments) Furthermore, the present invention can also be realized by supplying a program that implements one or more of the functions of the above-described embodiments to a system or device via a network or storage medium, and by having one or more processors in the computer of that system or device read and execute the program. It can also be realized by a circuit (e.g., an ASIC) that implements one or more functions.

[0079] The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, claims are attached to disclose the scope of the invention. [Explanation of symbols]

[0080] 8: Discharge material, 10: Liquid dispensing device, 11: Dispensing section, 12: Containing container, 13: Pressure control section, 14: Separation membrane, 15,16: Containing section, 18: Energy generating element, 19: Discharge port, 20: Small liquid chamber, 21: Supply port

Claims

1. A containment section for containing discharged material, A discharge port that communicates with the aforementioned storage section and discharges the discharged material stored in the aforementioned storage section, A small liquid chamber connecting the discharge port and the storage section, The facility comprises pressure control means for controlling the pressure of the discharged material contained in the aforementioned storage section, The pressure control means controls the pressure of the discharged material to transition from a first negative pressure state to a second negative pressure state in which the negative pressure is greater than that of the first negative pressure state, and then to a third positive pressure state. The liquid dispensing device is characterized in that the pressure control means comprises a first pressure generating unit for generating the first negative pressure state, a second pressure generating unit connected to the housing independently of the first pressure generating unit for generating the second negative pressure state, and a third pressure generating unit connected to the housing independently of the first and second pressure generating units for generating the third positive pressure state.

2. The liquid dispensing device according to claim 1, characterized in that the first negative pressure state is a state that generates a negative pressure at the discharge port for maintaining the meniscus of the discharged substance.

3. The liquid dispensing device according to claim 1 or 2, characterized in that the second negative pressure state is a state that generates a negative pressure greater than the meniscus force of the discharge port.

4. The liquid dispensing device according to any one of claims 1 to 3, characterized in that the third positive pressure state is a state that generates positive pressure for discharging the discharged material from the discharge port.

5. The liquid discharge device according to claim 1, characterized in that a first control valve is disposed between the first pressure generating unit and the housing unit, a second control valve is disposed between the second pressure generating unit and the housing unit, and a third control valve is disposed between the third pressure generating unit and the housing unit.

6. The liquid dispensing device according to claim 5, characterized in that the pressure control means forms a second negative pressure state by closing the first control valve and the third control valve and opening the second control valve, and forms a third positive pressure state by closing the first control valve and the second control valve and opening the third control valve.

7. A storage section for storing discharged material, A discharge port that communicates with the aforementioned storage section and discharges the discharged material stored in the aforementioned storage section, A small liquid chamber connecting the discharge port and the storage section, The facility comprises pressure control means for controlling the pressure of the discharged material contained in the aforementioned storage section, The pressure control means controls the pressure of the discharged material to transition from a first negative pressure state to a second negative pressure state in which the negative pressure is greater than that of the first negative pressure state, and then to a third positive pressure state. The liquid dispensing device is characterized in that the pressure control means comprises a first pressure generating unit for generating the first negative pressure state, a second pressure generating unit connected to the first pressure generating unit for generating the second negative pressure state, and a third pressure generating unit connected to the first pressure generating unit for generating the third positive pressure state.

8. The liquid discharge device according to claim 7, characterized in that the second pressure generating unit has a second pipe, the third pressure generating unit has a third pipe, and the first pipe formed by the confluence of the second pipe and the third pipe is connected to the first pressure generating unit.

9. The liquid dispensing device according to claim 8, characterized in that a third control valve is arranged in the second pipe, a fourth control valve is arranged in the third pipe, and a second control valve is arranged in the first pipe.

10. The liquid dispensing device according to claim 9, characterized in that the pressure control means closes the second control valve and the fourth control valve and opens the third control valve, then closes the third control valve and further opens the second control valve to form the second negative pressure state.

11. The liquid dispensing device according to claim 9, characterized in that the pressure control means closes the second control valve and the third control valve and opens the fourth control valve, then closes the fourth control valve and further opens the second control valve to form the third positive pressure state.

12. The liquid dispensing device according to any one of claims 8 to 11, further comprising a first detection means for detecting the pressure inside the first pressure generating unit.

13. The liquid dispensing device according to any one of claims 8 to 12, further comprising a second detection means for detecting the pressure inside the first pipe.

14. A storage section for storing discharged material, A discharge port that communicates with the aforementioned storage section and discharges the discharged material stored in the aforementioned storage section, A small liquid chamber connecting the discharge port and the storage section, The facility comprises pressure control means for controlling the pressure of the discharged material contained in the aforementioned storage section, The pressure control means controls the pressure of the discharged material to transition from a first negative pressure state to a second negative pressure state in which the negative pressure is greater than that of the first negative pressure state, and then to a third positive pressure state. The liquid dispensing device is characterized in that the pressure control means comprises a first pressure generating unit for generating the first negative pressure state, a second pressure generating unit connected to the housing independently of the first pressure generating unit for generating the second negative pressure state, and a third pressure generating unit connected to the housing independently of the first pressure generating unit for generating the third positive pressure state.

15. The liquid discharge device according to claim 14, characterized in that the second pressure generating unit has a second pipe, the third pressure generating unit has a third pipe, and the first pipe formed by the confluence of the second pipe and the third pipe is connected to the housing unit.

16. The liquid dispensing device according to claim 15, characterized in that a third control valve is arranged in the second pipe, a fourth control valve is arranged in the third pipe, and a second control valve is arranged in the first pipe.

17. The liquid dispensing device according to claim 15 or 16, characterized in that liquid is supplied to the first to third pipes.

18. The liquid dispensing device according to any one of claims 1 to 17, further comprising a pump connected to the storage section for circulating the discharged material, and a filter for filtering the discharged material.

19. The liquid dispensing apparatus according to any one of claims 1 to 18, further comprising a degassing means for degassing the discharged material.

20. The liquid dispensing device according to any one of claims 1 to 19, further comprising a recovery means for recovering the remaining liquid on the dispensing surface having the discharge port after transitioning from the third positive pressure state to the first negative pressure state.

21. The liquid dispensing device according to any one of claims 1 to 20, further comprising an abnormality detection means for detecting an abnormality in the discharge of the discharge port.

22. A liquid dispensing device according to any one of claims 1 to 21, A molding means for pressing a mold having a pattern onto an imprint material applied to a substrate by the liquid dispensing device, and then releasing the mold after the imprint material has hardened, An imprinting device characterized by comprising the following features.

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