Actuator

Abstract

To provide an actuator capable of greatly tilting a driven member.SOLUTION: An actuator 100 includes a case member 1, movable members MB, an upper support member 2U, and a lower support member 2D. The upper support member 2U includes: an upper fixation-side portion 2U3 that is connected to the upper end of the case member 1; an upper movable-side portion 2U1 that is connected to respective upper ends of four movable members MB in a rotatable manner; and an upper intermediate portion 2U2 connecting the upper fixation-side portion 2U3 and the upper movable-side portion 2U1. The lower support member 2D includes: a lower fixation-side portion 2D3 that is connected to the lower end of the case member 1; a lower movable-side portion 2D1 that is connected to respective lower ends of the four movable members MB in a rotatable manner; and a lower intermediate portion 2D2 connecting the lower fixation-side portion 2D3 and the lower movable-side portion 2D1. The actuator 100 moves, in a driving direction, at least one of the four movable members MB to tilt an optical element OE which is fixed to the upper movable-side portion 2U1.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an actuator.

Background Art

[0002] Conventionally, a device that tilts an optical element by utilizing the Lorentz force generated between four magnets connected to a movable member including a mirror and four coils connected to a fixed member is known (see Patent Document 1). Also, a device that tilts a mirror by utilizing the Lorentz force generated between four coils connected to a movable member including a mirror and eight magnets connected to a fixed member is known (see Patent Document 2).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] The above-described device can tilt a mirror in a desired direction. However, in a device as described above, there is a risk that the magnet and the coil may interfere if the mirror is tilted too much.

[0005] Therefore, it is desirable to provide an actuator that can tilt a driven member such as a mirror significantly.

Means for Solving the Problems

[0006] An actuator according to an embodiment of the present invention comprises a fixed member, a plurality of movable members, a drive device for moving each of the plurality of movable members in a predetermined driving direction relative to the fixed member, and a first support member and a second support member for supporting each of the plurality of movable members so as to be movable in the driving direction relative to the fixed member, wherein the first support member includes a first fixed-side portion connected to one end of the fixed member in the driving direction, a first movable-side portion rotatably connected to one end of each of the plurality of movable members in the driving direction, and a first intermediate portion elastically connecting the first fixed-side portion and the first movable-side portion, the second support member includes a second fixed-side portion connected to the other end of the fixed member in the driving direction, a second movable-side portion rotatably connected to the other end of each of the plurality of movable members in the driving direction, and a second intermediate portion elastically connecting the second fixed-side portion and the second movable-side portion, and the drive device moves at least one of the plurality of movable members in the driving direction, thereby moving a driven member fixed to the first movable-side portion. Tiltable The movable members are configured to be driven, and the fixed member has a through hole that penetrates in the driving direction, and each of the plurality of movable members is connected to the first support member and the second support member through the through hole. [Effects of the Invention]

[0007] The actuator described above can tilt the driven member significantly. [Brief explanation of the drawing]

[0008] [Figure 1] This is a perspective view of an actuator according to an embodiment of the present invention. [Figure 2] This is a perspective view of the actuator with some components omitted from the illustration. [Figure 3] This is a top view of the upper support member to which the optical element is attached. [Figure 4] This is an exploded perspective view of the movable member and the support member. [Figure 5]This is a disassembled perspective view of the coil assembly. [Figure 6] This is a perspective view of the coil holding member. [Figure 7] This is an exploded perspective view of the fixing member. [Figure 8] These are top and bottom views of the fixing member. [Figure 9] This is a cross-sectional view of the fixing member. [Figure 10] This is a top view of the actuator. [Figure 11] This is a cross-sectional view of the actuator. [Figure 12] This is a cross-sectional view of the actuator. [Figure 13] This is a perspective view of the first upper elastic member. [Figure 14] This is a top view of the first upper elastic member. [Figure 15] This is a right side view of the movable member and the support member. [Figure 16] This is a cross-sectional view of the actuator. [Figure 17] This is a magnified view of the area enclosed by the dashed line in Figure 16. [Figure 18] This is a perspective view of the upper support member. [Modes for carrying out the invention]

[0009] Hereinafter, referring to the drawings, the actuator 100 according to an embodiment of the present invention will be described. FIG. 1 is a perspective view of the actuator 100. FIG. 2 is a perspective view of the actuator 100 with the illustration of some members (the case member 1 and the fastening member 3) omitted. In FIG. 1, X1 represents one direction of the X-axis constituting a three-dimensional orthogonal coordinate system, and X2 represents the other direction of the X-axis. Also, Y1 represents one direction of the Y-axis constituting a three-dimensional orthogonal coordinate system, and Y2 represents the other direction of the Y-axis. Similarly, Z1 represents one direction of the Z-axis constituting a three-dimensional orthogonal coordinate system, and Z2 represents the other direction of the Z-axis. In the present embodiment, the X1 side of the actuator 100 corresponds to the front side (front face side) of the actuator 100, and the X2 side of the actuator 100 corresponds to the rear side (rear face side) of the actuator 100. Also, the Y1 side of the actuator 100 corresponds to the left side of the actuator 100, and the Y2 side of the actuator 100 corresponds to the right side of the actuator 100. And the Z1 side of the actuator 100 corresponds to the upper side of the actuator 100, and the Z2 side of the actuator 100 corresponds to the lower side of the actuator 100. The same applies to other figures. The same also applies to the members constituting the actuator 100.

[0010] In the illustrated example, the actuator 100 is configured to be able to move the optical element OE as a driven member. Specifically, the actuator 100 is configured to translate the optical element OE along the central axis CX of the actuator 100 extending parallel to the Z-axis direction, and to rotate the optical element OE around the rotation axis AX in a plane perpendicular to the central axis CX. More specifically, the rotation axis AX includes a first rotation axis AX1 parallel to the X-axis and a second rotation axis AX2 parallel to the Y-axis. The central axis CX, the first rotation axis AX1, and the second rotation axis AX2 are perpendicular to each other and intersect orthogonally at the center point CP of the optical element OE. The center point CP of the optical element OE may be a point on the upper surface (the surface on the Z1 side) of the optical element OE, may be a point on the lower surface (the surface on the Z2 side) of the optical element OE, or may be a point on a virtual plane located in the middle between the upper surface and the lower surface of the optical element OE. In the illustrated example, the center point CP of the optical element OE is a point on the upper surface (the surface on the Z1 side) of the optical element OE. In this case, the actuator 100 can tilt the optical element OE without changing the position of the intersection of the central axis CX and the upper surface of the optical element OE.

[0011] Specifically, as shown in FIG. 1, the actuator 100 includes a case member 1 as a fixed member FB, a movable member MB (first movable member MB1 to fourth movable member MB4), a support member 2 that supports the movable member MB movably with respect to the case member 1, and a fastening member 3 for fastening the support member 2 to the case member 1.

[0012] The case member 1 is a component that constitutes the main body of the actuator 100. In the illustrated example, the case member 1 is made of a magnetic material that constitutes part of the magnetic circuit described later. However, the case member 1 may be made of a non-magnetic material. In this case, part of the magnetic circuit described later may be embedded in the case member 1 as a separate component from the case member 1, or it may be fixed to the case member 1. Specifically, the case member 1 may be made of synthetic resin, metal, or ceramics, rubber, or glass. Alternatively, the case member 1 may be made of two or more materials. For example, the case member 1 may include a part made of synthetic resin and a part made of metal. In this case, the case member 1 may be formed by insert molding.

[0013] The movable member MB is a member that can move relative to the fixed member FB. In the illustrated example, the movable member MB is configured to move in the driving direction, which is parallel to the Z-axis direction, by a drive unit DM (see Figures 11, 12, and 15). Specifically, the movable member MB includes first movable members MB1 to fourth movable members MB4, and the drive unit DM includes first drive unit DM1 to fourth drive unit DM4. The first movable members MB1 to fourth movable members MB4 are configured to move independently of each other by the first drive unit DM1 to fourth drive unit DM4. More specifically, the first movable member MB1 is configured to move in the driving direction by the first drive unit DM1 (see Figure 11), the second movable member MB2 is configured to move in the driving direction by the second drive unit DM2 (see Figure 11), the third movable member MB3 is configured to move in the driving direction by the third drive unit DM3 (see Figure 12), and the fourth movable member MB4 is configured to move in the driving direction by the fourth drive unit DM4 (see Figure 15). The first movable member MB1 and the second movable member MB2 are arranged symmetrically with respect to the second rotation axis AX2 in a top view, and the third movable member MB3 and the fourth movable member MB4 are arranged symmetrically with respect to the second rotation axis AX2 in a top view. Furthermore, the first movable member MB1 and the fourth movable member MB4 are arranged so as to be symmetrical with respect to the first rotation axis AX1 when viewed from above, and the second movable member MB2 and the third movable member MB3 are arranged so as to be symmetrical with respect to the first rotation axis AX1 when viewed from above.

[0014] The support member 2 includes an upper support member 2U fixed to the upper end (Z1 side end) of the case member 1 and a lower support member 2D fixed to the lower end (Z2 side end) of the case member 1. In the illustrated example, the upper support member 2U and the lower support member 2D are the same part formed from a leaf spring and have the same shape and size.

[0015] Specifically, as shown in Figure 3, the upper support member 2U includes an upper movable portion 2U1 located on the innermost side, an upper fixed portion 2U3 located on the outermost side, and an upper intermediate portion 2U2 located between the upper movable portion 2U1 and the upper fixed portion 2U3.

[0016] Figure 3 is a top view of the upper support member 2U to which the optical element OE is attached. In Figure 3, for clarity, a coarse dot pattern is applied to the upper movable portion 2U1 and the upper fixed portion 2U3, and a fine dot pattern is applied to the upper intermediate portion 2U2.

[0017] In the illustrated example, the optical element OE is fixed to the center of the upper movable portion 2U1 of the upper support member 2U with adhesive. However, the optical element OE may also be fitted into a through hole formed in the center of the upper movable portion 2U1. In the illustrated example, the optical element OE is configured to be rectangular when viewed from above, but it may be configured to be circular, elliptical, polygonal, or other shapes when viewed from above. In the illustrated example, the optical element OE is configured to be flat, but it may be configured to be three-dimensional, such as spherical, frustoconical, frustopyramidal, cylindrical, elliptical prism, or polygonal prism.

[0018] Specifically, the upper support member 2U includes an upper fixed portion 2U3 connected to the upper end of the case member 1, an upper movable portion 2U1 rotatably connected to the upper ends of each of the four movable members MB (first movable member MB1 to fourth movable member MB4), and an upper intermediate portion 2U2 elastically connecting the upper fixed portion 2U3 and the upper movable portion 2U1.

[0019] The fact that the upper movable portion 2U1 is rotatable with respect to the upper end of the first movable member MB1 means, for example, that a virtual plane including the upper surface of the upper movable portion 2U1 can be tilted in any direction at an angle within a predetermined angular range with respect to the center line of the first movable member MB1 (a line parallel to the Z-axis) extending in the driving direction of the first movable member MB1. In the illustrated example, the predetermined angular range is from -20 degrees to +20 degrees.

[0020] The upper intermediate portion 2U2 includes a shaft portion 2S and an annular portion 2M. The shaft portion 2S includes a rear shaft portion 2SB, a front shaft portion 2SF, a left shaft portion 2SL, and a right shaft portion 2SR. The rear shaft portion 2SB and the front shaft portion 2SF, which are a pair of shaft portions, constitute a first rotation axis AX1, and the other pair of shaft portions, the left shaft portion 2SL and the right shaft portion 2SR, constitute a second rotation axis AX2.

[0021] Specifically, the left shaft portion 2SL and the right shaft portion 2SR are configured to elastically connect the annular portion 2M and the upper movable portion 2U1, while the rear shaft portion 2SB and the front shaft portion 2SF are configured to elastically connect the annular portion 2M and the upper fixed portion 2U3. The annular portion 2M is configured not to elastically deform. This is to ensure that the shaft portion 2S can reliably elastically deform when the movable member MB moves. However, the annular portion 2M may be configured to elastically deform slightly.

[0022] In the illustrated example, the upper fixed portion 2U3 has a rear side portion 2U3B, a front side portion 2U3F, a left side portion 2U3L, and a right side portion 2U3R. The rear shaft portion 2SB is configured to elastically connect the annular portion 2M to the rear side portion 2U3B of the upper fixed portion 2U3, and the front shaft portion 2SF is configured to elastically connect the annular portion 2M to the front side portion 2U3F of the upper fixed portion 2U3. The left shaft portion 2SL is configured to elastically connect the annular portion 2M to the left side of the upper movable portion 2U1, and the right shaft portion 2SR is configured to elastically connect the annular portion 2M to the right side of the upper movable portion 2U1. However, the left shaft portion 2SL may be configured to elastically connect the annular portion 2M and the left side portion 2U3L of the upper fixed portion 2U3, and the right shaft portion 2SR may be configured to elastically connect the annular portion 2M and the right side portion 2U3R of the upper fixed portion 2U3. In this case, the rear shaft portion 2SB may be configured to elastically connect the annular portion 2M and the rear portion of the upper movable portion 2U1, and the front shaft portion 2SF may be configured to elastically connect the annular portion 2M and the front portion of the upper movable portion 2U1.

[0023] In the illustrated example, the four shafts 2S are arranged such that the first rotation axis AX1 and the second rotation axis AX2 are perpendicular to each other, but they may also be arranged so that the first rotation axis AX1 and the second rotation axis AX2 intersect each other at an angle other than a right angle. Furthermore, the four shafts 2S may be arranged such that the first rotation axis AX1 extends along one of the two diagonals of the rectangular optical element OE and the second rotation axis AX2 extends along the other of the two diagonals.

[0024] Furthermore, the upper movable portion 2U1 and the upper fixed portion 2U3 may be elastically connected by four shaft portions 2S (rear shaft portion 2SB, front shaft portion 2SF, left shaft portion 2SL, and right shaft portion 2SR). That is, the upper intermediate portion 2U2 is composed of the rear shaft portion 2SB, front shaft portion 2SF, left shaft portion 2SL, and right shaft portion 2SR, and the annular portion 2M may be omitted. In this case, the upper movable portion 2U1 and the upper fixed portion 2U3 may be elastically connected by two or three shaft portions, or by five or more shaft portions.

[0025] Furthermore, in the illustrated example, each of the four shaft portions 2S is configured to have a meander shape. This is to suppress damage to the rear shaft portion 2SB and the front shaft portion 2SF when torsional stress acts on them, respectively, as the upper movable portion 2U1 rotates around the first rotation axis AX1. It is also to suppress damage to the left shaft portion 2SL and the right shaft portion 2SR when torsional stress acts on them, respectively, as the upper movable portion 2U1 rotates around the second rotation axis AX2. However, the shaft portions 2S may have shapes other than meander shapes, such as a linear shape.

[0026] The lower support member 2D is configured similarly to the upper support member 2U, except that the optical element OE is attached to it. That is, as shown in Figure 4, the lower support member 2D includes a lower fixed portion 2D3 connected to the lower end of the case member 1, a lower movable portion 2D1 rotatably connected to the lower ends of each of the four movable members MB (first movable member MB1 to fourth movable member MB4), and a lower intermediate portion 2D2 elastically connecting the lower fixed portion 2D3 and the lower movable portion 2D1. The lower movable portion 2D1 is configured to move parallel along the central axis CX and to rotate around a rotation axis BX in a plane perpendicular to the central axis CX. Specifically, as shown in Figure 2, the rotation axis BX includes a first rotation axis BX1 parallel to the X axis and a second rotation axis BX2 parallel to the Y axis. The central axis CX, the first rotation axis BX1, and the second rotation axis BX2 are perpendicular to each other and orthogonal to each other on the central axis CX. Furthermore, the first rotation axis AX1 and the first rotation axis BX1 are parallel to each other, and the second rotation axis AX2 and the second rotation axis BX2 are parallel to each other.

[0027] The fastening member 3 is configured to fasten the support member 2 to the case member 1. In the illustrated example, the fastening member 3 is a bolt and includes six upper fastening members 3U for fastening the upper support member 2U to the upper end of the case member 1, and six lower fastening members 3D for fastening the lower support member 2D to the lower end of the case member 1. In Figure 1, the three rear of the six lower fastening members 3D are hidden behind the case member 1 and are not visible. As shown in Figure 3, the upper fixed portion 2U3 of the upper support member 2U has a through hole 2H through which the upper fastening member 3U is inserted. The same applies to the lower fixed portion 2D3.

[0028] Next, with reference to Figure 4, the details of the movable member MB will be described. Figure 4 is an exploded perspective view of the movable member MB and the support member 2.

[0029] The movable member MB includes a fixing member 4, an elastic member 5, and a coil assembly CA, as shown in Figure 4.

[0030] The fixing member 4 is a member for fixing the elastic member 5 to the support member 2. The elastic member 5 is an example of a connecting member for connecting the end of the movable member MB (coil assembly CA) to the support member 2 so that the end of the movable member MB (coil assembly CA) can rotate relative to the support member 2 in the driving direction. The connecting member provides the function of converting the linear motion of the movable member MB (coil assembly CA) into the rotational motion of the driven member (optical element OE).

[0031] In the illustrated example, the fastening member 4 is made of synthetic resin, and the elastic member 5 is made of rubber. The fastening member 4 includes an upper fastening member 4U and a lower fastening member 4D, and the elastic member 5 includes an upper elastic member 5U and a lower elastic member 5D. The fastening member 4 may be configured to be elastic. For example, the fastening member 4 may be made of a thermosetting elastomer or a thermoplastic elastomer.

[0032] Specifically, the upper elastic member 5U is configured to connect the upper end of the movable member MB (coil assembly CA) to the upper movable side portion 2U1 of the upper support member 2U, so that the upper end of the movable member MB (coil assembly CA) can rotate relative to the upper movable side portion 2U1 of the upper support member 2U. Similarly, the lower elastic member 5D is configured to connect the lower end of the movable member MB (coil assembly CA) to the lower movable side portion 2D1 of the lower support member 2D, so that the lower end of the movable member MB (coil assembly CA) can rotate relative to the lower movable side portion 2D1 of the lower support member 2D.

[0033] The upper fixing member 4U is configured to fix the upper elastic member 5U to the upper movable side portion 2U1 of the upper support member 2U, and the lower fixing member 4D is configured to fix the lower elastic member 5D to the lower movable side portion 2D1 of the lower support member 2D.

[0034] More specifically, the upper fixing member 4U includes the first upper fixing member 4U1 to the fourth upper fixing member 4U4, and the lower fixing member 4D includes the first lower fixing member 4D1 to the fourth lower fixing member 4D4. Furthermore, the upper elastic member 5U includes the first upper elastic member 5U1 to the fourth upper elastic member 5U4, and the lower elastic member 5D includes the first lower elastic member 5D1 to the fourth lower elastic member 5D4. Also, the coil assembly CA includes the first coil assembly CA1 to the fourth coil assembly CA4.

[0035] The first movable member MB1 is composed of a first upper fixing member 4U1, a first upper elastic member 5U1, a first coil assembly CA1, a first lower fixing member 4D1, and a first lower elastic member 5D1. The second movable member MB2 is composed of a second upper fixing member 4U2, a second upper elastic member 5U2, a second coil assembly CA2, a second lower fixing member 4D2, and a second lower elastic member 5D2. The third movable member MB3 is composed of a third upper fixing member 4U3, a third upper elastic member 5U3, a third coil assembly CA3, a third lower fixing member 4D3, and a third lower elastic member 5D3. The fourth movable member MB4 is composed of a fourth upper fixing member 4U4, a fourth upper elastic member 5U4, a fourth coil assembly CA4, a fourth lower fixing member 4D4, and a fourth lower elastic member 5D4.

[0036] Regarding the first movable member MB1, the first upper elastic member 5U1 has a cylindrical central annular portion MR (see Figures 13 and 14) that fits into a through-hole 2T (first through-hole 2T1, see Figure 3) formed in the upper movable portion 2U1 of the upper support member 2U. The first upper fixing member 4U1 is bonded and fixed to the upper support member 2U and the first upper elastic member 5U1 with adhesive, with the upper movable portion 2U1 of the upper support member 2U sandwiched between the first upper fixing member 4U1 and the first upper elastic member 5U1. Similarly, the first lower elastic member 5D1 has a cylindrical central annular portion MR (not shown) that fits into a through-hole 2T (first through-hole 2T1, not shown) formed in the lower movable portion 2D1 of the lower support member 2D. The first lower fixing member 4D1 is bonded and fixed to the lower support member 2D and the first lower elastic member 5D1 by adhesive, with the lower movable portion 2D1 of the lower support member 2D sandwiched between the first lower fixing member 4D1 and the first lower elastic member 5D1. The same applies to the second movable members MB2 to the fourth movable members MB4.

[0037] In the illustrated example, the movable member MB is configured such that the upper fixing member 4U is positioned above the upper support member 2U and the upper elastic member 5U is positioned below the upper support member 2U. However, the upper elastic member 5U may be positioned above the upper support member 2U in an inverted state, and the upper fixing member 4U may be positioned below the upper support member 2U in an inverted state. Also, in the illustrated example, the movable member MB is configured such that the lower fixing member 4D is positioned above the lower support member 2D and the lower elastic member 5D is positioned below the lower support member 2D. However, the lower elastic member 5D may be positioned above the lower support member 2D in an inverted state, and the lower fixing member 4D may be positioned below the lower support member 2D in an inverted state.

[0038] Next, we will describe the coil assembly CA with reference to Figure 5. Figure 5 is an exploded perspective view of the coil assembly CA.

[0039] As shown in Figure 5, the coil assembly CA includes a coil 6, a coil holding member 7, a substrate 8, a lower plate member 9, and a lower cylindrical member 10.

[0040] Coil 6 is a component of the drive unit DM. In the illustrated example, coil 6 is a wound coil formed by winding conductive wire whose surface is covered with an insulating material, and is fixed to the coil holding member 7. For clarity, Figure 5 omits a detailed illustration of the winding state of the conductive wire. The same applies to other figures illustrating coil 6.

[0041] The coil holding member 7 is a member for holding the coil 6. In the illustrated example, the coil holding member 7 is made of synthetic resin.

[0042] The substrate 8 is a component that enables connection between the coil 6 and a control unit (not shown) located outside the movable member MB. In the illustrated example, the substrate 8 is an insulating substrate fixed to the coil holding member 7. Both ends of the conductive wires constituting the coil 6 are connected to terminals provided on the substrate 8.

[0043] The control unit is a device including an electronic circuit and a non-volatile memory device, and is configured to control the direction and magnitude of the current flowing through the coil 6. The control unit may be configured to control the direction and magnitude of the current flowing through the coil 6 in response to control commands from an external device such as a computer, or it may be configured to control the direction and magnitude of the current flowing through the coil 6 without receiving control commands from an external device. In the illustrated example, the control unit is installed outside the case member 1, but it may also be installed inside the case member 1.

[0044] The lower plate member 9 is a member attached to the lower end of the coil holding member 7. In the illustrated example, the lower plate member 9 is a disc-shaped member extending along a plane parallel to the XY plane and is made of synthetic resin.

[0045] The lower cylindrical member 10 is a member attached to the lower side of the lower plate member 9. In the illustrated example, the lower cylindrical member 10 is a two-stage cylindrical member extending in the driving direction (Z-axis direction) and is made of synthetic resin.

[0046] In the illustrated example, coil 6 includes the first coil 6A to the fourth coil 6D, coil holding member 7 includes the first coil holding member 7A to the fourth coil holding member 7D, and substrate 8 includes the first substrate 8A to the fourth substrate 8D. Also, lower plate member 9 includes the first lower plate member 9A to the fourth lower plate member 9D, and lower cylindrical member 10 includes the first lower cylindrical member 10A to the fourth lower cylindrical member 10D.

[0047] The first coil assembly CA1 consists of a first coil 6A, a first coil holding member 7A, a first substrate 8A, a first lower plate member 9A, and a first lower cylindrical member 10A. The second coil assembly CA2 consists of a second coil 6B, a second coil holding member 7B, a second substrate 8B, a second lower plate member 9B, and a second lower cylindrical member 10B. The third coil assembly CA3 consists of a third coil 6C, a third coil holding member 7C, a third substrate 8C, a third lower plate member 9C, and a third lower cylindrical member 10C. The fourth coil assembly CA4 consists of a fourth coil 6D, a fourth coil holding member 7D, a fourth substrate 8D, a fourth lower plate member 9D, and a fourth lower cylindrical member 10D.

[0048] Next, the coil holding member 7 will be described with reference to Figure 6. Figure 6 is a perspective view of the coil holding member 7. Specifically, Figure 6 is a perspective view of the first coil holding member 7A. The following description with reference to Figure 6 pertains to the first coil holding member 7A, but it also applies similarly to the second coil holding member 7B to the fourth coil holding member 7D.

[0049] As shown in Figure 6, the first coil holding member 7A includes a first upper cylindrical portion 7AT, a first upper plate portion 7AU, a first central cylindrical portion 7AS, a first substrate holding portion 7AF, and a first leg portion 7AL.

[0050] The first upper cylindrical portion 7AT is a cylindrical part that extends in the driving direction (Z-axis direction) and corresponds to the first lower cylindrical member 10A.

[0051] The first upper plate portion 7AU is a disc-shaped part extending along a plane parallel to the XY plane and corresponds to the first lower plate member 9A. In the illustrated example, the first upper plate portion 7AU constitutes the upper cover of the first central cylindrical portion 7AS.

[0052] The first central cylindrical portion 7AS is the part to which the first coil 6A is fixed. In the illustrated example, the first central cylindrical portion 7AS has a cylindrical shape. The first central cylindrical portion 7AS is also configured to have a space inside for housing the first magnetic member 11A and the first magnet 12A (see Figure 7), which constitute the first drive unit DM1.

[0053] The first substrate holder portion 7AF is the part to which the first substrate 8A is attached. In the illustrated example, the first substrate holder portion 7AF is configured to protrude to the left (towards Y1) from the lower end of the first central cylindrical portion 7AS.

[0054] The first leg portion 7AL is the part that connects the first central cylindrical portion 7AS of the first coil holding member 7A to the first lower plate member 9A. In the illustrated example, the first leg portion 7AL has three extending portions (first extending portion 7AL1 to third extending portion 7AL3) that extend in the driving direction (Z-axis direction). The first lower plate member 9A is configured to connect the lower ends of each of these three extending portions (first extending portion 7AL1 to third extending portion 7AL3).

[0055] Next, the fixing member FB will be described with reference to Figures 7 to 9. Figure 7 is an exploded perspective view of the fixing member FB. The upper part of Figure 8 is a top view of the fixing member FB, and the lower part of Figure 8 is a bottom view of the fixing member FB. Figure 9 is a cross-sectional view of the fixing member FB. Specifically, Figure 9 is a view of the cross-section of the actuator 100 from the Y2 side in a plane parallel to the XZ plane, which includes the cutting line (dashed line IX-IX) shown in Figure 8. In Figures 8 and 9, a dot pattern is added to the case member 1 for clarity. Also, in the upper part of Figure 8, a cross pattern is added to the magnetic member 11 for clarity.

[0056] As shown in Figure 7, the fixing member FB includes a case member 1, a magnetic member 11, and a magnet 12.

[0057] The case member 1 is a magnetic material that constitutes the main body of the actuator 100. In the illustrated example, the case member 1 has a prismatic upper recess 1P (see upper diagram in Figure 8) and a prismatic lower recess 1Q (see lower diagram in Figure 8).

[0058] As shown in the upper part of Figure 8, the upper recess 1P has a cylindrical recess 1V for accommodating the upper part of the movable member MB, and a rectangular prismatic recess 1R for accommodating the substrate 8.

[0059] The cylindrical recess 1V has a circular bottom 1K, as shown in the lower part of Figure 8. Three through holes 1H (see upper part of Figure 8) and three bridging portions 1J (see lower part of Figure 8) are formed around the bottom 1K.

[0060] Specifically, the cylindrical recess 1V includes a first cylindrical recess 1VA for accommodating the upper part of the first movable member MB1, a second cylindrical recess 1VB for accommodating the upper part of the second movable member MB2, a third cylindrical recess 1VC for accommodating the upper part of the third movable member MB3, and a fourth cylindrical recess 1VD for accommodating the upper part of the fourth movable member MB4.

[0061] Furthermore, a first bottom portion 1KA is formed in the first cylindrical recess 1VA, and three first through holes 1HA (first hole 1HA1 to third hole 1HA3) and three first bridging portions 1JA (first crossbar 1JA1 to third crossbar 1JA3) are formed around the first bottom portion 1KA. The same applies to the second cylindrical recess 1VB to the fourth cylindrical recess 1VD.

[0062] Furthermore, the prismatic recess 1R includes a first prismatic recess 1RA for accommodating the first substrate 8A, a second prismatic recess 1RB for accommodating the second substrate 8B, a third prismatic recess 1RC for accommodating the third substrate 8C, and a fourth prismatic recess 1RD for accommodating the fourth substrate 8D.

[0063] As shown in the lower part of Figure 8, a rectangular prism-shaped recess 1W is formed in the lower recess 1Q to accommodate the lower part of the movable member MB.

[0064] The magnetic member 11 is a component of the drive unit DM. In the illustrated example, the magnetic member 11 is a cylindrical magnetic material (soft iron) fixed to the upper end of the magnet 12, and functions as a yoke that increases the density of the magnetic flux generated by the magnet 12.

[0065] The magnet 12 is a component of the drive unit DM. In the illustrated example, the magnet 12 is a permanent magnet with two poles magnetized in the vertical direction (Z-axis direction) and is fixed to the upper surface of the bottom 1K of the cylindrical recess 1V of the case member 1. In Figure 9, for clarity, a coarse cross pattern is applied to the south pole portion of the magnet 12, and a fine dot pattern is applied to the north pole portion of the magnet 12 and the magnetic member 11 fixed to the north pole portion. Also, the dotted line in Figure 9 represents a portion of the magnetic flux generated by the magnet 12. That is, the dotted line in Figure 9 represents that the case member 1, the magnetic member 11, and the magnet 12 constitute a magnetic circuit.

[0066] Specifically, the magnetic member 11 includes the first magnetic member 11A to the fourth magnetic member 11D, and the magnet 12 includes the first magnet 12A to the fourth magnet 12D.

[0067] The first cylindrical recess 1VA houses the first magnetic member 11A and the first magnet 12A, the second cylindrical recess 1VB houses the second magnetic member 11B and the second magnet 12B, the third cylindrical recess 1VC houses the third magnetic member 11C and the third magnet 12C, and the fourth cylindrical recess 1VD houses the fourth magnetic member 11D and the fourth magnet 12D.

[0068] The first coil 6A, first magnetic member 11A, and first magnet 12A housed in the first cylindrical recess 1VA constitute the first drive unit DM1; the second coil 6B, second magnetic member 11B, and second magnet 12B housed in the second cylindrical recess 1VB constitute the second drive unit DM2; the third coil 6C, third magnetic member 11C, and third magnet 12C housed in the third cylindrical recess 1VC constitute the third drive unit DM3; and the fourth coil 6D, fourth magnetic member 11D, and fourth magnet 12D housed in the fourth cylindrical recess 1VD constitute the fourth drive unit DM4.

[0069] Furthermore, the three first through holes 1HA (first hole 1HA1 to third hole 1HA3) formed around the first bottom 1KA of the first cylindrical recess 1VA are configured to correspond to the three extended portions (first extended portion 7AL1 to third extended portion 7AL3) that constitute the first leg portion 7AL (see Figure 6) of the first coil holding member 7A. Specifically, the first hole 1HA1 is positioned to receive the first extended portion 7AL1, the second hole 1HA2 is positioned to receive the second extended portion 7AL2, and the third hole 1HA3 is positioned to receive the third extended portion 7AL3. The same applies to the second coil holding members 7B to the fourth coil holding members 7D.

[0070] Next, the drive unit DM will be described with reference to Figures 10 to 12. Figure 10 is a top view of the actuator 100. Figures 11 and 12 are cross-sectional views of the actuator 100. Specifically, Figure 11 is a view of the cross-section of the actuator 100 from the Y2 side in a plane parallel to the XZ plane, which includes the cutting line (dashed line XI-XI) shown in Figure 10. Figure 12 is a view of the cross-section of the actuator 100 from the X1 side in a plane parallel to the YZ plane, which includes the cutting line (dashed line XII-XII) shown in Figure 10. Note that in Figures 10 to 12, a dot pattern is added to the case member 1 for clarity.

[0071] The drive unit DM consists of a coil 6, a magnetic member 11, and a magnet 12. Specifically, the drive unit DM is configured to reciprocate the movable member MB in the driving direction (Z-axis direction) by utilizing the Lorentz force acting on the current (charged particles) flowing through the coil 6 in the magnetic field generated by the magnet 12. The magnetic flux density of the magnet 12 is increased by the magnetic member 11, which functions as a yoke, and the magnetic flux is configured to cross the conductive wires constituting the coil 6 perpendicularly.

[0072] Specifically, as shown in Figure 11, the first drive unit DM1 is composed of a first coil 6A held by a first coil holding member 7A, a first magnet 12A fixed to the upper surface of the first bottom 1KA of the case member 1, and a first magnetic member 11A fixed to the upper surface of the first magnet 12A. The first drive unit DM1 is configured to reciprocate the first movable member MB1 along the drive direction (Z-axis direction), as indicated by the double arrow AR1. The upper end of the first movable member MB1 is rotatably connected to the upper movable side portion 2U1 of the upper support member 2U via a first upper fixing member 4U1 and a first upper elastic member 5U1, and the lower end is rotatably connected to the lower movable side portion 2D1 of the lower support member 2D via a first lower fixing member 4D1 and a first lower elastic member 5D1.

[0073] Furthermore, as shown in Figure 11, the second drive unit DM2 is composed of a second coil 6B held by a second coil holding member 7B, a second magnet 12B fixed to the upper surface of the second bottom portion 1KB of the case member 1, and a second magnetic member 11B fixed to the upper surface of the second magnet 12B. The second drive unit DM2 is configured to reciprocate the second movable member MB2 along the drive direction (Z-axis direction), as indicated by the double arrow AR2. The upper end of the second movable member MB2 is rotatably connected to the upper movable portion 2U1 of the upper support member 2U via a second upper fixing member 4U2 and a second upper elastic member 5U2, and the lower end is rotatably connected to the lower movable portion 2D1 of the lower support member 2D via a second lower fixing member 4D2 and a second lower elastic member 5D2.

[0074] Furthermore, as shown in Figure 12, the third drive unit DM3 is composed of a third coil 6C held by a third coil holding member 7C, a third magnet 12C fixed to the upper surface of the third bottom portion 1KC of the case member 1, and a third magnetic member 11C fixed to the upper surface of the third magnet 12C. The third drive unit DM3 is configured to reciprocate the third movable member MB3 along the drive direction (Z-axis direction), as indicated by the double arrow AR3. The upper end of the third movable member MB3 is rotatably connected to the upper movable portion 2U1 of the upper support member 2U via a third upper fixing member 4U3 and a third upper elastic member 5U3, and the lower end is rotatably connected to the lower movable portion 2D1 of the lower support member 2D via a third lower fixing member 4D3 and a third lower elastic member 5D3.

[0075] Similarly, as shown in Figure 15, the fourth drive unit DM4 is composed of a fourth coil 6D held by a fourth coil holding member 7D, a fourth magnet 12D fixed to the upper surface of the fourth bottom portion 1KD of the case member 1, and a fourth magnetic member 11D fixed to the upper surface of the fourth magnet 12D. The fourth drive unit DM4 is configured to reciprocate the fourth movable member MB4 along the drive direction (Z-axis direction). The upper end of the fourth movable member MB4 is rotatably connected to the upper movable portion 2U1 of the upper support member 2U via a fourth upper fixing member 4U4 and a fourth upper elastic member 5U4, and the lower end is rotatably connected to the lower movable portion 2D1 of the lower support member 2D via a fourth lower fixing member 4D4 and a fourth lower elastic member 5D4.

[0076] The control unit can independently move each of the first to fourth movable members MB1 to MB4 up and down along the drive direction (Z-axis direction) by operating each of the first to fourth drive units DM1 to DM4 separately. As a result, the control unit can achieve rotation around the first rotation axis AX1, rotation around the second rotation axis AX2, and parallel movement along the central axis CX of the upper movable portion 2U1 of the upper support member 2U, to which the upper ends of each of the first to fourth movable members MB1 to MB4 are connected. Furthermore, the control unit can achieve rotation around the first rotation axis BX1, rotation around the second rotation axis BX2, and parallel movement along the central axis CX of the lower movable portion 2D1 of the lower support member 2D, to which the lower ends of each of the first to fourth movable members MB1 to MB4 are connected.

[0077] Next, the details of the elastic member 5 will be described with reference to Figures 13 and 14. Figure 13 is a perspective view of the first upper elastic member 5U1, and Figure 14 is a top view of the first upper elastic member 5U1. The following description with reference to Figures 13 and 14 pertains to the first upper elastic member 5U1, but also applies to the second upper elastic member 5U2 to the fourth upper elastic member 5U4 and the first lower elastic member 5D1 to the fourth lower elastic member 5D4, which have the same size and shape.

[0078] The first upper elastic member 5U1 is a member (rubber bush) made of an elastically deformable material such as synthetic rubber. In the illustrated example, the first upper elastic member 5U1 includes a connecting portion SP, an inner annular portion IR, a central annular portion MR, and an outer annular portion OR.

[0079] The connecting portion SP is the part that connects the inner annular portion IR and the central annular portion MR. In the illustrated example, the connecting portion SP includes six spoke portions (first spoke portion SP1 to sixth spoke portion SP6) that extend radially from the outer circumferential surface of the inner annular portion IR in a top view and connect to the inner circumferential surface of the central annular portion MR. However, the connecting portion SP may consist of five or fewer spoke portions, or seven or more spoke portions. Also, in the illustrated example, the connecting portion SP is composed of six spoke portions that extend in a straight line, but it may be composed of multiple spoke portions that extend in a spiral shape, or multiple spoke portions that have other shapes. Alternatively, the connecting portion may consist of an annular thin film portion that extends in the circumferential direction from the outer circumferential surface of the inner annular portion IR in a top view and connects to the inner circumferential surface of the central annular portion MR. In this case, the thin film portion may be flat, dome-shaped with an upward convexity, or dome-shaped with a downward convexity.

[0080] The inner annular portion IR is the part that is fixed to the upper end of the first upper cylindrical portion 7AT (see Figure 6) of the first coil holding member 7A. In the illustrated example, the inner annular portion IR is fastened to the first upper cylindrical portion 7AT by a bolt BT and a nut NT (see Figure 17, described later).

[0081] The central annular portion MR is the part that is fixed to the inner circumferential surface of the first upper fixing member 4U1. In the illustrated example, as shown in Figure 17 described later, the central annular portion MR is formed to protrude above the upper surface of the outer annular portion OR, and is also formed to protrude above the upper surface of the upper movable portion 2U1 when the upper surface of the outer annular portion OR and the lower surface of the upper movable portion 2U1 of the upper support member 2U are in contact.

[0082] The outer annular portion OR is the part that is fixed to the lower surface of the upper movable portion 2U1 of the upper support member 2U. In the example shown in Figure 17, the upper surface and outer surface of the central annular portion MR and the ceiling surface and inner surface of the first upper fixing member 4U1 are bonded and fixed together with adhesive, with the upper movable portion 2U1 sandwiched between the lower surface of the first upper fixing member 4U1 and the upper surface of the outer annular portion OR.

[0083] Next, with reference to Figures 15 to 18, the state of each component when the optical element OE is moved will be explained. Specifically, Figures 15 to 18 show the state of each component when the first movable member MB1 and the fourth movable member MB4 are moved downward by the same distance, and the second movable member MB2 and the third movable member MB3 are moved upward by the same distance.

[0084] More specifically, Figure 15 is a right side view of the movable member MB and the support member 2. Figure 16 is a cross-sectional view of the actuator 100 seen from the right side (Y2 side), where the position of the cutting line corresponds to the position of the cutting line in Figure 11. Figure 17 is an enlarged view of the area R1 enclosed by the dashed line in Figure 16. Figure 18 is a perspective view of the upper support member 2U.

[0085] The control unit can move the optical element OE attached to the upper support member 2U by driving the drive unit DM. In the example shown in Figures 15 and 16, the control unit drives the first drive unit DM1 and the fourth drive unit DM4, respectively, to move the first movable member MB1 and the fourth movable member MB4 downward by a distance HT1 (see Figure 16), and drives the second drive unit DM2 and the third drive unit DM3, respectively, to move the second movable member MB2 and the third movable member MB3 upward by a distance HT2 (see Figure 16). As a result, the control unit rotates the optical element OE counterclockwise around the second rotation axis AX2 by an inclination angle θ1, as shown in Figure 15. In the illustrated example, distances HT1 and HT2 are the same size. However, distances HT1 and HT2 may be different sizes.

[0086] The first plane PL1, represented by the dashed line in Figure 15, is a virtual plane parallel to the upper movable portion 2U1 of the upper support member 2U and containing the second rotation axis AX2. The second plane PL2, represented by the dashed line in Figure 15, is a virtual plane parallel to the lower movable portion 2D1 of the lower support member 2D and containing the second rotation axis BX2.

[0087] As shown in Figure 15, the lower movable portion 2D1 of the lower support member 2D is configured to rotate in the same way as the upper movable portion 2U1 of the upper support member 2U. Specifically, the lower movable portion 2D1 of the lower support member 2D and the upper movable portion 2U1 of the upper support member 2U are configured to move in conjunction so that the angle formed between the second plane PL2 and the XY plane (inclination angle θ1) and the angle formed between the first plane PL1 and the XY plane (inclination angle θ2) are equal.

[0088] Furthermore, as shown in Figure 16, the drive unit DM is configured to move the movable member MB up and down while maintaining the distance between the inner circumferential surface of the cylindrical recess 1V formed in the case member 1 and the coil 6.

[0089] In the illustrated example, the control unit controls the second drive unit DM2 so that a predetermined current is supplied to the second coil 6B via a lead wire (not shown), raising the second movable member MB2 by a distance HT2. Similarly, the control unit controls the third drive unit DM3 so that a predetermined current is supplied to the third coil 6C via a lead wire (not shown), raising the third movable member MB3 by a distance HT2. On the other hand, the control unit controls the first drive unit DM1 so that a predetermined current is supplied to the first coil 6A via a lead wire (not shown), lowering the first movable member MB1 by a distance HT1. Similarly, the control unit controls the fourth drive unit DM4 so that a predetermined current is supplied to the fourth coil 6D via a lead wire (not shown), lowering the fourth movable member MB4 by a distance HT1.

[0090] In the illustrated example, the first movable member MB1 and the case member 1 are configured such that the distance GP1 (see Figure 16) in the X-axis direction between the inner surface of the first cylindrical recess 1VA formed in the case member 1 and the first coil 6A remains within a predetermined range, whether the first movable member MB1 is in its initial state or in a driven state.

[0091] The initial state of the first movable member MB1 refers to the state of the first movable member MB1 when no current is supplied to the first coil 6A. In the initial state, the first movable member MB1 is supported by the upper support member 2U and the lower support member 2D such that the first movable member MB1 and the case member 1 are not in contact. Specifically, the first movable member MB1 is supported by the upper support member 2U and the lower support member 2D such that the distance (height) in the Z-axis direction between the lower end of the first central cylindrical portion 7AS of the first coil holding member 7A and the upper surface of the first bottom portion 1KA of the case member 1 is height ST (see Figure 11).

[0092] The driving state of the first movable member MB1 refers to the state of the first movable member MB1 when current is supplied to the first coil 6A. In the driving state, the first movable member MB1 is driven so that the distance (height) between the lower end of the first central cylindrical portion 7AS and the upper surface of the first bottom portion 1KA is different from the height ST.

[0093] When the supply of current to the first coil 6A of the first movable member MB1, which was in a driven state, is stopped, the first movable member MB1 returns to its initial state. Specifically, the first movable member MB1 is returned to its initial position by the restoring force of the elastically deformed support member 2 (leaf spring).

[0094] Similarly, the second movable member MB2 and the case member 1 are configured such that the distance GP2 (see Figure 16) in the X-axis direction between the inner surface of the second cylindrical recess 1VB formed in the case member 1 and the second coil 6B remains within a predetermined range, whether the second movable member MB2 is in its initial state or in a driven state. Furthermore, the third movable member MB3 and the case member 1 are configured such that the distance GP3 (not shown) in the X-axis direction between the inner surface of the third cylindrical recess 1VC formed in the case member 1 and the third coil 6C remains within a predetermined range, whether the third movable member MB3 is in its initial state or in a driven state. Furthermore, the fourth movable member MB4 and the case member 1 are configured such that the distance GP4 (not shown) in the X-axis direction between the inner surface of the fourth cylindrical recess 1VD formed in the case member 1 and the fourth coil 6D remains within a predetermined range, whether the fourth movable member MB4 is in its initial state or in a driven state.

[0095] In the illustrated example, the actuator 100 is configured such that distances GP1 to GP4 each fall within the same size range. However, the actuator 100 may be configured such that distances GP1 to GP4 each fall within different size ranges. Typically, distance GP1 is at its minimum value when the amount of movement of the first movable member MB1 is at its maximum, and at its maximum value when the first movable member MB1 is in its initial state. The same applies to distances GP2 to GP4. Furthermore, the actuator 100 is configured such that the maximum values ​​of distances GP1 to GP4 are as small as possible, as long as the movable member MB and the case member 1 do not come into contact. This is to maximize the density of magnetic flux passing through the coil 6 by minimizing the distance between the case member 1, which is a magnetic material, and the magnetic member 11. In other words, this is to efficiently utilize the driving force from the drive device DM. It is also to reduce the size of the actuator 100.

[0096] As shown in Figures 15 and 16, when the upper movable portion 2U1 of the upper support member 2U is tilted with respect to the XY plane, the connecting portion SP of the first upper elastic member 5U1 deforms elastically as shown in Figure 17. Figure 17 shows the elastic deformation of the first spoke portion SP1 and the fourth spoke portion SP4 of the six connecting portions SP. However, in reality, the second spoke portion SP2, the third spoke portion SP3, the fifth spoke portion SP5, and the sixth spoke portion SP6, which are not visible in Figure 17, also deform elastically in the same way. The same applies to the connecting portions SP of each of the second upper elastic member 5U2 to the fourth upper elastic member 5U4.

[0097] Furthermore, when the upper movable portion 2U1 of the upper support member 2U tilts with respect to the XY plane, the lower movable portion 2D1 of the lower support member 2D also tilts with respect to the XY plane. As a result, the connecting portion SP of the first lower elastic member 5D1 deforms elastically in the same way as the connecting portion SP of the first upper elastic member 5U1 shown in Figure 17. The same applies to the connecting portions SP of the second lower elastic member 5D2 to the fourth lower elastic member 5D4.

[0098] With this configuration, each of the first movable member MB1 to the fourth movable member MB4 can move in parallel in the driving direction (Z-axis direction) without tilting with respect to the center line extending along the driving direction, even if the upper movable portion 2U1 of the upper support member 2U is tilted with respect to the XY plane.

[0099] Furthermore, in the example shown in Figures 15 to 18, the control unit rotates the optical element OE counterclockwise around the second rotation axis AX2 in a right-side view by simultaneously lowering the first movable member MB1 and the fourth movable member MB4 and simultaneously raising the second movable member MB2 and the third movable member MB3. However, the control unit may tilt the optical element OE in any direction by raising or lowering at least one of the first movable member MB1 to the fourth movable member MB4. That is, the control unit can direct the direction of the normal vector NL (see Figures 15 and 18) perpendicular to the surface of the optical element OE to any direction. The control unit may also move the optical element OE upward by raising all of the first movable member MB1 to the fourth movable member MB4 by the same distance in the Z-axis direction, or move the optical element OE downward by lowering all of the first movable member MB1 to the fourth movable member MB4 by the same distance in the Z-axis direction.

[0100] For example, the control unit can rotate the optical element OE clockwise around the second rotation axis AX2 in a right-side view by simultaneously raising the first movable member MB1 and the fourth movable member MB4 and simultaneously lowering the second movable member MB2 and the third movable member MB3.

[0101] Furthermore, the control unit can rotate the optical element OE around the first rotation axis AX1 in a counterclockwise direction when viewed from the front by simultaneously lowering the first movable member MB1 and the second movable member MB2 and simultaneously raising the third movable member MB3 and the fourth movable member MB4.

[0102] Furthermore, the control unit can rotate the optical element OE clockwise in a front view around the first rotation axis AX1 by simultaneously raising the third movable member MB3 and the fourth movable member MB4 and simultaneously lowering the first movable member MB1 and the second movable member MB2.

[0103] Furthermore, the control unit can rotate the optical element OE around the third rotation axis AX3 (see Figure 3) by raising the first movable member MB1 and lowering the third movable member MB3, or by lowering the first movable member MB1 and raising the third movable member MB3, without moving the second movable member MB2 and the fourth movable member MB4. The third rotation axis AX3 is a rotation axis that extends along one of the two diagonals of the rectangular optical element OE.

[0104] Furthermore, the control unit can rotate the optical element OE around the fourth rotation axis AX4 (see Figure 3) by raising the second movable member MB2 and lowering the fourth movable member MB4, or by lowering the second movable member MB2 and raising the fourth movable member MB4, without moving the first movable member MB1 and the third movable member MB3. The fourth rotation axis AX4 is a rotation axis that extends along the other of the two diagonals of the rectangular optical element OE.

[0105] Furthermore, the control unit can rotate the optical element OE counterclockwise in a right-side view around a rotation axis parallel to the Y-axis by simultaneously raising the second movable member MB2 and the third movable member MB3 without moving the first movable member MB1 and the fourth movable member MB4.

[0106] Furthermore, the control unit can rotate the optical element OE clockwise in a right-side view around a rotation axis parallel to the Y-axis by simultaneously lowering the second movable member MB2 and the third movable member MB3 without moving the first movable member MB1 and the fourth movable member MB4.

[0107] Furthermore, the control unit can rotate the optical element OE clockwise in a right-side view around a rotation axis parallel to the Y-axis by simultaneously raising the first movable member MB1 and the fourth movable member MB4 without moving the second movable member MB2 and the third movable member MB3.

[0108] Furthermore, the control unit can rotate the optical element OE in a counterclockwise direction in a right-side view around a rotation axis parallel to the Y-axis by simultaneously lowering the first movable member MB1 and the fourth movable member MB4 without moving the second movable member MB2 and the third movable member MB3.

[0109] Furthermore, the control unit can rotate the optical element OE in a counterclockwise direction when viewed from the front, around a rotation axis parallel to the X-axis, by simultaneously raising the third movable member MB3 and the fourth movable member MB4 without moving the first movable member MB1 and the second movable member MB2.

[0110] Furthermore, the control unit can rotate the optical element OE clockwise in a front view around a rotation axis parallel to the X-axis by simultaneously lowering the third movable member MB3 and the fourth movable member MB4 without moving the first movable member MB1 and the second movable member MB2.

[0111] Furthermore, the control unit can rotate the optical element OE clockwise in a front view around a rotation axis parallel to the X-axis by simultaneously raising the first movable member MB1 and the second movable member MB2 without moving the third movable member MB3 and the fourth movable member MB4.

[0112] Furthermore, the control unit can rotate the optical element OE counterclockwise in a front view around a rotation axis parallel to the X-axis by simultaneously lowering the first movable member MB1 and the second movable member MB2 without moving the third movable member MB3 and the fourth movable member MB4.

[0113] Furthermore, the control unit may simultaneously perform at least two of the following actions by operating each of the first to fourth drive units DM1 to DM4 separately: rotation of the optical element OE around a rotation axis parallel to the Y-axis, rotation of the optical element OE around a rotation axis parallel to the X-axis, and translation of the optical element OE in the Z-axis direction.

[0114] As described above, the actuator 100 according to an embodiment of the present invention includes a fixed member FB (case member 1), a plurality of movable members MB, a drive device DM that moves each of the plurality of movable members MB in a predetermined driving direction (Z-axis direction) relative to the fixed member FB (case member 1), and a first support member (upper support member 2U) and a second support member (lower support member 2D) that support each of the plurality of movable members MB so as to be movable in the driving direction (Z-axis direction) relative to the fixed member FB (case member 1). The first support member (upper support member 2U) includes a first fixed-side portion (upper fixed-side portion 2U3) connected to one end of the fixed member FB (case member 1) in the driving direction (Z-axis direction), a first movable-side portion (upper movable-side portion 2U1) rotatably connected to one end of each of the multiple movable members MB in their respective driving directions, and a first intermediate portion (upper intermediate portion 2U2) elastically connecting the first fixed-side portion (upper fixed-side portion 2U3) and the first movable-side portion (upper movable-side portion 2U1). Furthermore, the second support member (lower support member 2D) includes a second fixed side portion (lower fixed side portion 2D3) connected to the other end of the fixed member FB (case member 1) in the driving direction, a second movable side portion (lower movable side portion 2D1) rotatably connected to the other end of each of the multiple movable members MB in the driving direction, and a second intermediate portion (lower intermediate portion 2D2) elastically connecting the second fixed side portion (lower fixed side portion 2D3) and the second movable side portion (lower movable side portion 2D1). The drive device DM is configured to drive a driven member (optical element OE) fixed to the first movable side portion (upper movable side portion 2U1) by moving at least one of the multiple movable members MB in the driving direction.

[0115] This configuration has the effect of allowing the driven member to be tilted significantly. In the illustrated example, the actuator 100 has the effect of being able to tilt the optical element OE at an inclination angle of 20 degrees or more. This is because the actuator 100 is configured so that the components constituting the actuator 100 do not interfere with each other, even when the optical element OE is tilted at an inclination angle of 20 degrees or more. Furthermore, the actuator 100 can tilt the driven member while moving each of the multiple movable members MB in the driving direction without tilting each of them, or it can move the driven member in parallel in the driving direction. Therefore, the actuator 100 can move the driven member while avoiding contact between the movable member MB and the fixed member FB.

[0116] Each of the multiple movable members MB may be rotatably connected to the first movable side portion (upper movable side portion 2U1) via an elastic member (upper elastic member 5U) or a connecting member which is a ball joint, in the direction of drive. The other end of each of the multiple movable members MB may be rotatably connected to the second movable side portion (lower movable side portion 2D1) via another connecting member which is an elastic member (lower elastic member 5D) or a ball joint. The connecting member may be integrated with the leaf spring that constitutes the support member 2. That is, the connecting member may be part of the leaf spring. In this case, the connecting member which is part of the leaf spring may be formed to have a spiral shape, a radial shape, or a shape other than a spiral shape or a radial shape.

[0117] This configuration has the effect of easily converting the linear motion of each of the multiple movable members MB into the rotational motion of the driven member.

[0118] The fixed member FB may be a case member 1 made of a magnetic material having a plurality of recesses (cylindrical recesses 1V) corresponding to a plurality of movable members MB. Each of the plurality of movable members MB may be housed in a non-contact state inside one of the plurality of recesses (cylindrical recesses 1V) that corresponds to it.

[0119] This configuration has the effect of preventing each of the multiple movable members MB from tilting excessively with respect to the drive axis (the axis parallel to the Z axis). This is because the inner wall of the recess (cylindrical recess 1V) can function as a stopper. Furthermore, this configuration has the effect of increasing the driving force of the drive unit DM. This is because the distance between the case member 1 and the magnetic member 11 that constitute the magnetic circuit can be reduced.

[0120] The driven member may be an optical element OE. The optical element OE may be, for example, a mirror, a prism, or an image sensor such as a CCD or CMOS. Alternatively, the driven member may be a light source (laser irradiation device) that constitutes a LIDAR, a light source that constitutes an illumination device, or a light source that constitutes a projector.

[0121] This configuration has the effect of allowing the actuator 100 to orient the axis (optical axis) of the optical element OE in any direction. Alternatively, this configuration has the effect of allowing the actuator 100 to orient the optical axis of a light source such as a LiDAR, illumination device, or projection device in any direction.

[0122] The first intermediate portion (upper intermediate portion 2U2) may include a pair of shaft portions 2S that constitute the rotation axis AX. The second intermediate portion (lower intermediate portion 2D2) may also include another pair of shaft portions 2S that constitute another rotation axis BX parallel to the rotation axis AX. The drive device DM may rotate the first support member (upper support member 2U) around the rotation axis AX and the second support member (lower support member 2D) around the rotation axis BX by moving at least one of the plurality of movable members MB in the driving direction.

[0123] This configuration has the effect of allowing the driven member (optical element OE) attached to the upper movable portion 2U1 of the upper support member 2U to rotate around the rotation axis AX.

[0124] The first intermediate section (upper intermediate section 2U2) may include a pair of first shaft portions (rear shaft portion 2SB and front shaft portion 2SF of the upper intermediate section 2U2) that constitute the first rotation axis AX1 and a pair of second shaft portions (left shaft portion 2SL and right shaft portion 2SR of the upper intermediate section 2U2) that constitute the second rotation axis AX2. The second intermediate section (lower intermediate section 2D2) may also include a pair of third shaft portions (rear shaft portion 2SB and front shaft portion 2SF of the lower intermediate section 2D2) that constitute the third rotation axis (first rotation axis BX1) parallel to the first rotation axis AX1 and a pair of fourth shaft portions (left shaft portion 2SL and right shaft portion 2SR of the lower intermediate section 2D2) that constitute the fourth rotation axis (second rotation axis BX2) parallel to the second rotation axis AX2. In this case, the drive unit DM may rotate the first support member (upper support member 2U) around at least one of the first rotation axis AX1 and the second rotation axis AX2, and rotate the second support member (lower support member 2D) around at least one of the first rotation axis BX1 and the second rotation axis BX2, by moving at least one of the multiple movable members MB in the driving direction.

[0125] This configuration has the effect of allowing the driven member (optical element OE) attached to the upper movable portion 2U1 of the upper support member 2U to rotate around the first rotation axis AX1 and the second rotation axis AX2, respectively.

[0126] Preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the embodiments described above. Various modifications or substitutions can be applied to the embodiments described above without departing from the scope of the present invention. Furthermore, each of the features described with reference to the embodiments described above may be combined as appropriate, as long as they do not conflict technically.

[0127] For example, in the above embodiment, the movable member MB is connected to the support member 2 via an elastic member 5, which is a connecting member made of synthetic rubber, but it may also be directly connected to the support member 2. That is, the connecting member may be part of the support member 2. In this case, the elastic member 5 may be omitted.

[0128] Furthermore, in the above-described embodiment, the elastic member 5 is fixed to the support member 2 using the fixing member 4, but it may also be fixed to the support member 2 by insert molding. In this case, the fixing member 4 may be omitted.

[0129] Furthermore, in the above-described embodiment, the drive device DM is a device utilizing a moving coil type voice coil motor composed of a coil 6 as a movable member MB and a magnetic member 11 and a magnet 12 as fixed members FB, but it may also be a device utilizing a moving magnet type voice coil motor.

[0130] Furthermore, in the above-described embodiment, the drive device DM is a device utilizing a voice coil motor, but it may also be a device utilizing a piezoelectric element, a device utilizing a shape memory alloy wire, or a device utilizing a solenoid, etc. [Explanation of symbols]

[0131] 1···Case member 1H···Through hole 1HA···First through hole 1HB···Second through hole 1HC···Third through hole 1HD···Fourth through hole 1HA1, 1HB1, 1HC1, 1HD1···First hole 1HA2, 1HB2, 1HC2, 1HD2···Second hole 1HA3, 1HB3, 1HC3, 1HD3···Third hole 1J···Bridge section 1JA···First bridge section 1JB···Second bridge section 1JC···Third bridge section 1JD···Fourth bridge section 1JA1, 1JB1, 1JC1, 1JD1···First crossbar 1JA2, 1JB2, 1JC2, 1JD2···Second crossbar 1JA3, 1JB3, 1JC3, 1JD3···Third crossbar 1K...Bottom 1KA...First bottom 1KB...Second bottom 1KC...Third bottom 1KD...Fourth bottom 1P...Upper recess 1Q...Lower recess 1R...Pristar recess 1RA...First prismatic recess 1RB...Second prismatic recess 1RC...Third prismatic recess 1RD...Fourth prismatic recess 1V...Cylindrical recess 1VA...First cylindrical recess 1VB...Second cylindrical recess 1VC...Third cylindrical recess 1VD...Fourth cylindrical recess 1W...Pristar recess 2...Support member 2D...Lower support member 2D1...Lower movable side portion 2D2...Lower intermediate portion 2D3...Lower fixed side portion 2H...Through hole 2M...Annular section 2S...Shaft section 2SB...Rear shaft section 2SF...Front shaft section 2SL...Left shaft section 2SR...Right shaft section 2T...Through round hole 2T1...First through round hole 2T2...Second through round hole 2T3...Third through round hole 2T4...Fourth through round hole 2U...Upper support member 2U1...Upper movable side section 2U2...Upper intermediate section 2U3...Upper fixed side section 2U3B...Rear side section 2U3F...Front side section 2U3L...Left side section 2U3R...Right side section 3...Fastening member 3D...Lower fastening member 3U...Upper fastening member 4...Fixing member 4D...Lower fixing member 4D1...First lower fixing member 4D2...Second lower fixing member 4D3...Third lower fixing member 4D4...Fourth lower fixing member 4U...Upper fixing member 4U1...First upper fixing member 4U2...Second upper fixing member 4U3...Third upper fixing member 4U4...Fourth upper fixing member 5...Elastic member 5D...Lower elastic member5D1...First lower elastic member 5D2...Second lower elastic member 5D3...Third lower elastic member 5D4...Fourth lower elastic member 5U...Upper elastic member 5U1...First upper elastic member 5U2...Second upper elastic member 5U3...Third upper elastic member 5U4...Fourth upper elastic member 6...Coil 6A...First coil 6B...Second coil 6C...Third coil 6D...Fourth coil 7...Coil holding member 7A...First coil holding member 7AF...First substrate holding part 7AL...First leg part 7AL1...First extension part 7AL2...Second extension part 7AL3...Third extension part 7AS...First central cylindrical part 7AT...First upper cylindrical part 7AU...First upper plate part 7B...Second coil holding member 7C...Third coil holding member 7D...Fourth coil holding member 8...Substrate 8A...First substrate 8B...Second substrate 8C...Third substrate 8D...Fourth substrate 9...Lower plate member 9A...First lower plate member 9B...Second lower plate member 9C...Third lower plate member 9D...Fourth lower plate member 10...Lower cylindrical member 10A...First lower cylindrical member 10B...Second lower cylindrical member 10C...Third lower cylindrical member 10D...Fourth lower cylindrical member 11...Magnetic member 11A...First magnetic member 11B...Second magnetic member 11C...Third magnetic member 11D...Fourth magnetic member 12...Magnet 12A...First magnet 12B...Second magnet 12C...Third magnet 12D...Fourth magnet 100...Actuator AX...Rotation axis AX1...First rotation axis AX2...Second rotation axis AX3...Third rotation axis AX4...Fourth rotation axis BX...Rotation axis BX1...First rotation axis BX2...Second rotation axis CA...Coil assembly CA1...First coil assembly CA2...Second coil assembly CA3...Third coil assembly CA4...Fourth coil assembly CP...Center point CX...Center axis DM...Drive unit DM1...First drive unit DM2...Second drive unit DM3...Third drive unit DM4...Fourth drive unit FB...Fixed member GP1, GP2, HT1, HT2...Distance IR...Inner annular part MB...Movable member MB1...First movable member MB2...Second movable memberMB3...Third movable member MB4...Fourth movable member MR...Central annular section NL...Normal vector OE...Optical element OR...Outer annular section SP...Connecting section SP1...First spoke SP2...Second spoke SP3...Third spoke SP4...Fourth spoke SP5...Fifth spoke SP6...Sixth spoke ST...Height

Claims

1. Fixing member and Multiple movable members, A drive device that moves each of the multiple movable members in a predetermined driving direction relative to the fixed member, An actuator having a first support member and a second support member that support each of the plurality of movable members so as to be movable in the driving direction relative to the fixed member, The first support member includes a first fixed-side portion connected to one end of the fixed member in the driving direction, a first movable-side portion rotatably connected to one end of each of the plurality of movable members in the driving direction, and a first intermediate portion elastically connecting the first fixed-side portion and the first movable-side portion. The second support member includes a second fixed-side portion connected to the other end of the fixed member in the driving direction, a second movable-side portion rotatably connected to the other end of each of the plurality of movable members in the driving direction, and a second intermediate portion elastically connecting the second fixed-side portion and the second movable-side portion. The drive device is configured to drive the driven member fixed to the first movable side portion in a tiltable manner by moving at least one of the plurality of movable members in the driving direction. The fixing member has a through hole that penetrates in the driving direction, Each of the multiple movable members is connected to the first support member and the second support member through the through hole. Actuator.

2. Each of the multiple movable members has one end in the driving direction that is rotatably connected to the first movable side portion via a connecting member which is an elastic member or a ball joint. The other end of each of the multiple movable members in the driving direction is rotatably connected to the second movable side portion via another connecting member, which is an elastic member or a ball joint. The actuator according to claim 1.

3. The fixing member is a case member made of a magnetic material having a plurality of recesses corresponding to a plurality of the movable members, Each of the multiple movable members is housed in a non-contact manner inside one of the multiple recesses. The actuator according to claim 1 or claim 2.

4. The driven member is an optical element. The actuator according to any one of claims 1 to 3.

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