Liquid dispensing module

Abstract

To provide a liquid ejection module that allows ejection openings for high resolution to be arranged while suppressing an increase in wiring resistance without reducing liquid circulation efficiency.SOLUTION: A liquid delivery mechanism 9 is arranged below an energy generating element 1, a plurality of penetrating flow paths 6 are provided in correspondence with a plurality of pressure chambers 3, and electric wiring 8 is routed between the adjacent penetrating flow paths 6.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a liquid discharge module that discharges liquid.

Background Art

[0002] Patent Document 1 discloses a configuration in which an energy generating element for discharging liquid, a liquid feeding mechanism for feeding the liquid to be discharged, and a circulation flow path that fluidly connects the liquid feeding mechanism and the energy generating element are arranged in the same layer.

[0003] Further, Patent Document 2 discloses a liquid discharge module including an energy generating element for discharging liquid and a liquid feeding mechanism for feeding the liquid to be discharged, in which the liquid feeding mechanism is arranged on the back surface portion of the energy generating element.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the configuration of Patent Document 1, since the liquid feeding mechanism is arranged within the row of discharge ports, there is a restriction on the resolution, and it becomes difficult to arrange the discharge ports corresponding to high resolution. Further, when attempting to achieve high resolution, the size of the liquid feeding mechanism becomes small, resulting in a low circulation effect.

[0006] Also, in the configuration of Patent Document 2, liquid is supplied to a plurality of pressure chambers through a common supply flow path and recovered through a common recovery flow path. Therefore, the wiring for supplying power to the energy generating element needs to bypass the supply flow path and the recovery flow path, and there is a risk of increased resistance due to the lengthening of the wiring.

[0007] Therefore, the present invention provides a liquid discharge module that enables the arrangement of high-resolution discharge ports without reducing the liquid circulation efficiency and can suppress an increase in wiring resistance. [Means for solving the problem]

[0008] Therefore, the liquid discharge module of the present invention comprises: a discharge port provided in a part of a pressure chamber; an energy generating element provided at a position opposite to the discharge port on a first substrate forming a part of the pressure chamber, which imparts energy to the liquid in the pressure chamber for discharge; a through-channel that penetrates the first substrate and is connected to the pressure chamber by a first opening; a liquid delivery channel connected to a second opening different from the first opening of the through-channel; a liquid delivery mechanism provided in the liquid delivery channel which imparts energy to the liquid for supplying the liquid in the liquid delivery channel to the pressure chamber via the through-channel; and a first electrical wiring electrically connected to the energy generating element, wherein a plurality of pressure chambers and a plurality of energy generating elements are provided in the liquid discharge module, wherein the liquid delivery mechanism is provided on a second substrate laminated with the first substrate, each of the plurality of through-channels is provided corresponding to each of the plurality of pressure chambers, and the first electrical wiring is wired between adjacent through-channels. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a liquid discharge module that enables the arrangement of high-resolution discharge ports without reducing the liquid circulation efficiency and can suppress the increase in wiring resistance. [Brief explanation of the drawing]

[0010] [Figure 1] This is an external perspective view showing the inkjet recording head. [Figure 2] This is a magnified view of a portion of the recording element substrate. [Figure 3] This diagram shows the flow direction of the circulation channel when resupplying ink to the pressure chamber. [Figure 4] This is a magnified view of a portion of the recording element substrate. [Figure 5] This is a magnified view of a portion of the recording element substrate. [Figure 6] This is a cross-sectional view showing the channel structure of the recording element substrate. [Modes for carrying out the invention]

[0011] (First embodiment) A first embodiment of the present invention will be described below with reference to the drawings.

[0012] Figure 1 is an external perspective view showing an inkjet recording head (hereinafter also simply referred to as a recording head) 100 that can be used as a liquid ejection module in this embodiment. The recording head 100 is composed of multiple recording element substrates 4, each consisting of multiple recording elements arranged in the Y direction, arranged in the Y direction. Figure 1 shows a full-line type recording head 100 in which the recording element substrates 4 are arranged in the Y direction for a distance corresponding to the width of an A4 size sheet.

[0013] Each of the recording element substrates 4 is connected to the electrical wiring board 102 via the flexible wiring board 101. The electrical wiring board 102 is equipped with a power supply terminal 103 for receiving power and a signal input terminal 104 for receiving ejection signals. The ink supply unit 105 has a circulation channel formed to supply liquid (hereinafter also referred to as ink) supplied from an ink tank (not shown) to each recording element substrate 4 and to recover ink that was not consumed during recording.

[0014] Each recording element on the recording element substrate 4 uses power supplied from the power supply terminal 103 to eject ink supplied from the ink supply unit 105 in the Z direction in the diagram, based on an ejection signal input from the signal input terminal 104.

[0015] FIG. 2 is an enlarged view showing a part of the recording element substrate 4, and is a view showing the flow path configuration and wiring in the vicinity of the discharge port in the present embodiment. FIGS. 2(a) and (b) are perspective views of the recording element substrate 4 viewed from the side facing the discharge port 2 (+Z direction), and FIG. 2(c) is a cross-sectional view taken along the line IIc-IIc of FIG. 2(a). Note that FIG. 2(a) shows the configuration in the first substrate 14 from the orifice plate 12, and FIG. 2(b) shows the configuration from the first substrate 14 to the second substrate 16.

[0016] The recording element substrate 4 has the second substrate 16, the second flow path member 15, the first substrate 14, the first flow path member 13, and the orifice plate 12 laminated in this order in the Z direction. On the surface of the first substrate 14, an energy generating element 1 which is an electrothermal conversion element is arranged, and a discharge port 2 is formed at the position of the orifice plate 12 corresponding to the energy generating element 1. The discharge ports 2 also form a discharge port row corresponding to the row of the energy generating elements 1. Between the orifice plate 12 and the first substrate 14, individual pressure chambers 3 for each discharge port 2 and energy generating element 1 are formed by the first flow path member 13. The pressure chambers 3 are formed by providing a partition wall between a plurality of discharge ports 2 arranged in the Y direction and the energy generating elements 1.

[0017] The energy generating element 1 applies energy for discharging to the ink in the pressure chamber, and the ink to which the energy is applied is discharged from the discharge port 2. In the present embodiment, the case where the energy generating element 1 is an electrothermal conversion element is described, but a piezoelectric element such as a piezo element may be used.

[0018] Next, in this embodiment, a circulation channel 5 for supplying the ink supplied from the supply channel 7 to the pressure chamber 3 and discharging it to the common channel 7 will be described. As shown in Fig. 2(c), each of the second substrate 16, the second channel member 15, the first substrate 14, the first channel member 13, and the orifice plate 12 forms a wall, thereby forming an individual circulation channel 5 for each recording element. In the circulation channel 5, the ink flows and circulates as indicated by the arrows shown in Fig. 2(c). The circulation channel 5 is composed of a liquid supply channel 10 formed between the first substrate 14 and the second substrate 16 by the second channel member 15, a through channel 6 formed in the first substrate 14 and connecting the liquid supply channel 10 and the pressure chamber 3, the pressure chamber 3, and a discharge channel 17 connected to the pressure chamber 3.

[0019] As a mechanism for generating the flow of the ink in the circulation channel 5, a liquid supply mechanism 9 is arranged in the liquid supply channel 10. The liquid supply mechanism 9 is provided at a position on the surface of the second substrate 16 that faces the back surface of the surface of the first substrate 14 where the energy generating element 1 is arranged. Thus, in this embodiment, since the discharge port 2, the energy generating element 1, and the liquid supply mechanism 9 are arranged side by side in the Z direction, the arrangement of the liquid supply mechanism 9 does not affect the arrangement of the discharge port 2, and there is no restriction on the resolution, so it is possible to arrange the discharge port 2 that can achieve high resolution. Further, since the arrangement of the liquid supply mechanism 9 does not affect the arrangement of the discharge port 2, the size of the liquid supply mechanism 9 and the width of the liquid supply channel 10 can be set with a high degree of freedom according to the discharge port diameter, and it is possible to realize the circulation efficiency according to the discharge port diameter.

[0020] Regarding the arrangement of the energy generating element 1 and the liquid supply mechanism 9 described here, hereinafter, it will be expressed that the liquid supply mechanism 9 is arranged below the energy generating element 1 and the energy generating element 1 is arranged above the liquid supply mechanism 9. Also, regarding the positional relationship of other members, following this, the expressions of above and below will be used to describe the Z direction.

[0021] In this embodiment, the liquid delivery mechanism 9 uses an electrothermal conversion element. However, the liquid delivery mechanism 9 is not limited to an electrothermal conversion element; a piezoelectric element such as a piezo element may also be used. In that case, the circulation direction may be opposite to that of this embodiment, but the same application is possible by considering the flow resistance within the circulation channel.

[0022] When not discharging, the flow direction of the circulation channel 5 is as shown by the arrow in Figure 2(c). The ink supplied from the through channel 6 to the pressure chamber 3 flows through the discharge channel 17 to the common channel 7. The common channel 7 is in communication with the liquid supply channel 10 and the discharge channel 17, and is provided extending in the Y direction along the row of discharge ports.

[0023] Figure 3 shows the flow direction of the circulation channel 5 when resupplying ink to the pressure chamber 3. As shown in Figure 3, when resupplying ink to the pressure chamber 3 after ink has been discharged from the discharge port 2, the flow in the circulation channel 5 consists of an ink flow supplied from the through channel 6 and an ink flow supplied from the discharge channel 17, with the discharge port 2 in between. Therefore, the flow in the discharge channel 17 is the opposite of the flow when circulation is occurring without discharge, and the ink is supplied from the common channel 7 to the discharge channel 17.

[0024] When the ink in the pressure chamber 3 is consumed by the dispensing operation, new, unconcentrated, fresh ink is supplied to the discharge port 2. Even when the dispensing operation is not taking place, ink is circulated in the circulation channel, and fresh ink is supplied to the discharge port 2. In this case, it is desirable to provide a filter 22 (see Figures 2(a) and (b)) capable of capturing foreign matter and air bubbles to prevent them from entering the channel and the discharge port 2. By placing a filter 22 not only at the inlet of the liquid supply channel 10 into which ink flows into the circulation channel 5, but also on the discharge channel 17 side, it is possible to prevent foreign matter from entering when ink is also supplied from the discharge channel 17 during the dispensing operation.

[0025] As shown in Figure 2(a), the energy generating element 1 generates heat based on a pulse signal input via the first electrical wiring 8 provided on the first substrate 14. The heat generated by the energy generating element 1 causes film boiling in the ink, and the growth energy of the generated bubbles causes the ink to be ejected from the discharge port 2. As shown in Figure 2(c), in this embodiment, the first electrical wiring layer 19 is arranged below the energy generating element 1, and the energy generating element 1 and the first electrical wiring layer 19 are connected via a first plug 18, which is an electrical connection member, but the configuration is not limited to this. They may be connected by a plug formed by multiple wiring layers.

[0026] The first electrical wiring 8, including the first electrical wiring layer 19, is a wiring that electrically connects an external connection terminal (not shown) that can be connected to an external device to an energy generating element 1, and is formed using a conductive material. In this embodiment, a plurality of through-flow channels 6 corresponding to each of the plurality of pressure chambers 3 are provided. Therefore, the electrical wiring 8 connecting the first electrical wiring layer 19 to the external connection terminal is wired to pass between adjacent through-flow channels 6. By passing the electrical wiring 8 between adjacent through-flow channels 6 in this way, wiring can be done without unnecessarily routing the wiring. This makes it possible to suppress an increase in wiring resistance.

[0027] Furthermore, a second electrical wiring layer 21 is positioned below the liquid delivery mechanism 9, and the liquid delivery mechanism 9 and the second electrical wiring layer 21 are connected via a second plug 20, which is an electrical connection member, but the configuration is not limited to this. They may be connected by a plug formed by multiple wiring layers. The second electrical wiring 11, including the second electrical wiring layer 21, is wiring that electrically connects the liquid delivery mechanism 9 to an external connection terminal (not shown), and is formed using a conductive material.

[0028] The first substrate 14 and the second substrate 16 may be configured such that a drive circuit is provided on each substrate, and the energy generating element 1 and the liquid delivery mechanism 9 are electrically connected within each substrate. Alternatively, there may be an electrical connection via (not shown) between the first substrate 14 and the second substrate 16, and the energy generating element 1 and the liquid delivery mechanism 9 are electrically connected between the substrates.

[0029] In this embodiment, an example was described in which the energy generating element 1 and the liquid delivery mechanism 9 are arranged vertically, but this is not the only possible arrangement. In other words, the energy generating element 1 and the liquid delivery mechanism 9 are only required to be in a vertical positional relationship, and not in a positional relationship that interferes with each other on the same layer.

[0030] In this manner, a liquid delivery mechanism 9 is positioned below the energy generating element 1, and multiple through-flow channels 6 are provided corresponding to each of the multiple pressure chambers 3, with electrical wiring 8 passing between adjacent through-flow channels 6. This makes it possible to provide a liquid discharge module that allows for the arrangement of high-resolution discharge ports without reducing the liquid circulation efficiency and suppresses the increase in wiring resistance.

[0031] (Second embodiment) A second embodiment of the present invention will be described below with reference to the drawings. Since the basic configuration of this embodiment is the same as that of the first embodiment, only the characteristic configurations will be described below.

[0032] Figure 4 is an enlarged view of a portion of the recording element substrate 4 in this embodiment, and shows the flow path configuration and wiring near the discharge port in this embodiment. Figures 4(a) and 4(b) are perspective views of the recording element substrate 4 viewed from the side facing the discharge port 2 (+Z direction). Figure 4(a) shows the configuration from the orifice plate 12 to the first substrate 14, and Figure 4(b) shows the configuration from the first substrate 14 to the second substrate 16.

[0033] In this embodiment, the multiple discharge ports 2 in the discharge port row have different discharge port diameters. In addition, the flow path width of the energy generating element 1 and pressure chamber 3, and the flow path width of the through-flow channel 6 are configured to match the discharge port diameter. In this embodiment, in the discharge port row, discharge ports with large diameters and discharge ports with small diameters are arranged alternately. Furthermore, the pressure chamber width corresponding to the discharge port with a large diameter is configured to be wider than the pressure chamber width corresponding to the discharge port with a small diameter. Similarly, the energy generating element 1 corresponding to the discharge port with a large diameter is larger in size than the energy generating element 1 corresponding to the discharge port with a small diameter.

[0034] When the discharge port diameter is small and the pressure chamber width is narrow, the amount of ink that flows is less than when the discharge port diameter is large and the pressure chamber width is wide. Ink evaporates from discharge port 2, but this evaporation depends largely on the flow rate, and the evaporation rate from discharge port 2 is higher when the ink flow rate is low and the pressure chamber width is narrower than when the flow rate is high and the pressure chamber width is wide.

[0035] Therefore, in this embodiment, as shown in Figure 4(b), the liquid delivery mechanism 9 corresponding to the small discharge port diameter is made larger than the liquid delivery mechanism 9 corresponding to the large discharge port diameter, and the width of the liquid delivery channel 10 is also made wider for the liquid delivery channel 10 corresponding to the small discharge port diameter than for the liquid delivery channel 10 corresponding to the large discharge port diameter. By doing so, the flow velocity in the channel corresponding to the small discharge port diameter is increased and the circulation efficiency is improved, thereby suppressing the thickening of the ink in the channel corresponding to the small discharge port diameter.

[0036] Thus, a configuration with multiple discharge ports of different diameters is also acceptable.

[0037] (Third embodiment) A second embodiment of the present invention will be described below with reference to the drawings. Since the basic configuration of this embodiment is the same as that of the first embodiment, only the characteristic configurations will be described below.

[0038] Figure 5 is an enlarged view of a portion of the recording element substrate 4 in this embodiment, and shows the flow path configuration and wiring near the discharge port in this embodiment. Figures 5(a) and (b) are perspective views of the recording element substrate 4 viewed from the side facing the discharge port 2 (+Z direction). Figure 5(a) shows the configuration from the orifice plate 12 to the first substrate 14, and Figure 5(b) shows the configuration from the first substrate 14 to the second substrate 16.

[0039] In this embodiment, a common flow path 31 connecting to multiple (two in this embodiment) pressure chambers 3 is formed in the first flow path member 13. The common flow path 31 is connected to a through-flow path 6 and supplies ink supplied from the liquid delivery flow path 10 to each pressure chamber 3 via the through-flow path 6. As shown in Figure 5(b), an individual circulation flow path 5 having one liquid delivery mechanism 9 and one liquid delivery flow path 10 is formed for each through-flow path 6. Therefore, multiple (two in this embodiment) energy generating elements 1 are provided corresponding to one liquid delivery mechanism 9. The first electrical wiring 8 may be formed for each energy generating element 1 as shown in Figure 2(a), or it may be formed between adjacent through-flow paths 6 by connecting multiple energy generating elements 1 together as shown in Figure 5(a). Note that connecting multiple energy generating elements 1 together as shown in Figure 5(a) is more preferable because it can reduce the resistance of the electrical wiring.

[0040] (Fourth embodiment) A second embodiment of the present invention will be described below with reference to the drawings. Since the basic configuration of this embodiment is the same as that of the first embodiment, only the characteristic configurations will be described below.

[0041] Figure 6(a) is a cross-sectional view showing the flow path structure of the recording element substrate 4 in this embodiment. The first substrate 14 in the recording element substrate 4 of this embodiment is made of a thicker substrate than the first substrate in the first embodiment, and the outlet of the discharge flow path 17 and the inlet of the liquid supply flow path 10 are separated in the height direction. This suppresses the re-inflow of concentrated ink discharged from the outlet of the discharge flow path 17 through the inlet of the liquid supply flow path 10, thereby suppressing ink concentration in the circulation flow path.

[0042] Furthermore, in this embodiment, the opening width of the first opening 41, which is the connection part of the through-flow channel 6 to the pressure chamber 3, and the opening width of the second opening 42, which is the connection part to the liquid delivery channel 10, are different, with the opening width of the second opening 42 being wider than that of the first opening 41. In this embodiment, the length of the through-flow channel 6 increases due to the increase in the thickness of the first substrate 14, and the flow resistance in the through-flow channel 6 increases. Therefore, by making the opening width of the second opening 42 wider than that of the first opening 41, the increase in flow resistance in the through-flow channel 6 can be suppressed.

[0043] (modified version) Figure 6(b) shows a modified example of this embodiment, and is a cross-sectional view showing the flow channel structure of the modified recording element substrate 4. In this embodiment, the through-channel 6 is formed by a first substrate 14 and a third substrate 43. The combined thickness of the first substrate 14 and the third substrate 43 is greater than that of the first substrate in the first embodiment. Furthermore, the opening width of the second opening 42 of the through-channel 6 in the third substrate 43 is wider than the opening width of the first opening 41 of the through-channel 6 in the first substrate 14. This configuration may suppress the increase in flow resistance in the through-channel 6.

[0044] This embodiment includes the following configurations and methods.

[0045] (Composition 1) A discharge port located in part of the pressure chamber, An energy generating element is provided at a position opposite the discharge port of the first substrate which forms part of the pressure chamber, and which imparts energy to the liquid in the pressure chamber for discharge. A through-channel that penetrates the first substrate and is connected to the pressure chamber by the first opening, A liquid delivery channel connected to a second opening different from the first opening of the aforementioned through-channel, A liquid delivery mechanism provided in the liquid delivery channel, which imparts energy to the liquid in the liquid delivery channel to supply the liquid to the pressure chamber via the through-channel, A first electrical wiring electrically connected to the energy generating element, Equipped with, A liquid discharge module provided with a plurality of pressure chambers and a plurality of energy generating elements, The liquid delivery mechanism is provided on the second substrate which is laminated with the first substrate, Each of the multiple through-flow channels is provided corresponding to each of the multiple pressure chambers, The liquid discharge module is characterized in that the first electrical wiring is routed between adjacent through-flow channels.

[0046] (Configuration 2) The liquid discharge module according to configuration 1, characterized in that the discharge ports are formed in an orifice plate laminated on the first substrate and are provided in each of the plurality of pressure chambers, and the discharge ports form a row of discharge ports.

[0047] (Composition 3) The liquid discharge module according to configuration 1 or 2, characterized in that the pressure chamber is connected to a discharge channel that discharges the liquid supplied from the through channel into a common channel.

[0048] (Composition 4) The liquid discharge module according to configuration 3, characterized in that the common channel is connected to the liquid supply channel, and the liquid supplied from the common channel to the liquid supply channel is supplied to the discharge channel via the through channel and the pressure chamber.

[0049] (Composition 5) The liquid discharge module according to configuration 3 or 4, characterized in that the liquid delivery channel and the discharge channel are equipped with filters capable of capturing foreign matter and air bubbles contained in the liquid.

[0050] (Composition 6) The liquid discharge module according to configuration 2, characterized by having a plurality of discharge ports of different diameters.

[0051] (Composition 7) A liquid discharge module according to configuration 6, comprising a first discharge port and a second discharge port having a larger diameter than the first discharge port, wherein the first discharge port and the second discharge port are arranged alternately in the row of discharge ports.

[0052] (Composition 8) The liquid discharge module according to configuration 7, characterized in that the width of the first pressure chamber corresponding to the first discharge port is narrower than the width of the second pressure chamber corresponding to the second discharge port.

[0053] (Composition 9) The liquid discharge module according to configuration 8, characterized in that the first liquid delivery mechanism that imparts energy to the liquid supplied to the first pressure chamber is larger in size than the second liquid delivery mechanism that imparts energy to the liquid supplied to the second pressure chamber.

[0054] (Composition 10) The liquid discharge module according to configuration 8 or 9, characterized in that the width of the first liquid supply channel for supplying liquid to the first pressure chamber is wider than the width of the second liquid supply channel for supplying liquid to the second pressure chamber.

[0055] (Composition 11) The liquid discharge module according to any one of configurations 1 to 5, characterized in that the liquid supply channel supplies liquid to a plurality of pressure chambers.

[0056] (Composition 12) The liquid discharge module according to configuration 11, characterized in that the plurality of energy generating elements are connected to a common first electrical wiring.

[0057] (Composition 13) A liquid discharge module according to any one of configurations 1 to 5, characterized in that the width of the first opening is narrower than the width of the second opening.

[0058] (Composition 14) The liquid discharge module according to configuration 13, characterized in that the through-channel is formed from the first substrate and the third substrate.

[0059] (Composition 15) The system further comprises a second electrical wiring connected to the aforementioned liquid delivery mechanism, The liquid discharge module according to any one of configurations 1 to 14, characterized in that the liquid delivery mechanism is an electrothermal conversion element.

[0060] (Composition 16) The liquid discharge module according to configuration 15, characterized in that it has an electrical connection via between the first substrate and the second substrate, and the energy generating element and the liquid delivery mechanism are electrically connected between the substrates.

[0061] (Composition 17) The liquid discharge module according to any one of configurations 1 to 5, characterized in that the energy generating element and the first electrical wiring are connected by a plug formed by a plurality of wiring layers.

[0062] (Composition 18) The liquid discharge module according to configuration 15, characterized in that the liquid delivery mechanism and the second electrical wiring are connected by a plug formed by multiple wiring layers.

[0063] (Composition 19) The liquid discharge module according to configuration 15, characterized in that the first electrical wiring and the second electrical wiring are electrically connected to an external connection terminal that can be connected to an external device.

[0064] (Composition 20) The liquid discharge module according to any one of configurations 1 to 19, characterized in that the energy generating element is an electrothermal conversion element.

[0065] (Composition 21) The liquid dispensing module according to any one of configurations 1 to 19, characterized in that the energy generating element is a piezoelectric element. [Explanation of symbols]

[0066] 1. Energy generating element 2 outlet 3. Pressure chamber 4. Recording element substrate 5 Circulation channel 6 Through-flow channels 9. Fluid delivery mechanism 10 Fluid delivery channel 11. Second electrical wiring 12 Orifice Plates 13 First flow channel member 14. First substrate 15 Second flow channel member 16. Second substrate 17 Discharge channel

Claims

1. A discharge port located in part of the pressure chamber, An energy generating element is provided at a position opposite the discharge port of the first substrate which forms part of the pressure chamber, and which imparts energy to the liquid in the pressure chamber for discharge. A through-channel that penetrates the first substrate and is connected to the pressure chamber by the first opening, A liquid delivery channel connected to a second opening different from the first opening of the aforementioned through-channel, A liquid delivery mechanism provided in the liquid delivery channel, which imparts energy to the liquid in the liquid delivery channel to supply the liquid to the pressure chamber via the through-channel, A first electrical wiring electrically connected to the energy generating element, Equipped with, A liquid discharge module provided with a plurality of pressure chambers and a plurality of energy generating elements, The liquid delivery mechanism is provided on the second substrate which is laminated with the first substrate. Each of the multiple through-flow channels is provided corresponding to each of the multiple pressure chambers, The liquid discharge module is characterized in that the first electrical wiring is routed between adjacent through-flow channels.

2. The liquid discharge module according to claim 1, characterized in that the discharge ports are formed in an orifice plate laminated on the first substrate and are provided in each of the plurality of pressure chambers, and the discharge ports form a row of discharge ports.

3. The liquid discharge module according to claim 1, characterized in that the pressure chamber is connected to a discharge channel that discharges the liquid supplied from the through channel into a common channel.

4. The liquid discharge module according to claim 3, characterized in that the common channel is connected to the liquid delivery channel, and the liquid supplied from the common channel to the liquid delivery channel is supplied to the discharge channel via the through channel and the pressure chamber.

5. The liquid discharge module according to claim 3, characterized in that the liquid delivery channel and the discharge channel are equipped with filters capable of capturing foreign matter and air bubbles contained in the liquid.

6. The liquid dispensing module according to claim 2, characterized in that it is provided with a plurality of dispensing ports of different diameters.

7. The liquid dispensing module according to claim 6, comprising a first discharge port and a second discharge port having a larger diameter than the first discharge port, wherein the first discharge port and the second discharge port are arranged alternately in the row of discharge ports.

8. The liquid discharge module according to claim 7, characterized in that the width of the first pressure chamber corresponding to the first discharge port is narrower than the width of the second pressure chamber corresponding to the second discharge port.

9. The liquid discharge module according to claim 8, characterized in that the first liquid delivery mechanism for supplying energy to the liquid supplied to the first pressure chamber is larger in size than the second liquid delivery mechanism for supplying energy to the liquid supplied to the second pressure chamber.

10. The liquid discharge module according to claim 8, characterized in that the width of the first liquid supply channel for supplying liquid to the first pressure chamber is wider than the width of the second liquid supply channel for supplying liquid to the second pressure chamber.

11. The liquid discharge module according to claim 1, characterized in that the liquid supply channel supplies liquid to a plurality of pressure chambers.

12. The liquid discharge module according to claim 11, characterized in that the plurality of energy generating elements are connected to a common first electrical wiring.

13. The liquid dispensing module according to claim 1, characterized in that the width of the first opening is narrower than the width of the second opening.

14. The liquid discharge module according to claim 13, characterized in that the through-channel is formed from the first substrate and the third substrate.

15. The system further comprises a second electrical wiring connected to the aforementioned liquid delivery mechanism, The liquid discharge module according to claim 1, characterized in that the liquid delivery mechanism is an electrothermal conversion element.

16. The liquid discharge module according to claim 15, characterized in that it has an electrical connection via between the first substrate and the second substrate, and the energy generating element and the liquid delivery mechanism are electrically connected between the substrates.

17. The liquid discharge module according to claim 1, characterized in that the energy generating element and the first electrical wiring are connected by a plug formed by a plurality of wiring layers.

18. The liquid discharge module according to claim 15, characterized in that the liquid delivery mechanism and the second electrical wiring are connected by a plug formed by a plurality of wiring layers.

19. The liquid discharge module according to claim 15, characterized in that the first electrical wiring and the second electrical wiring are electrically connected to an external connection terminal that can be connected to an external device.

20. The liquid discharge module according to claim 1, characterized in that the energy generating element is an electrothermal conversion element.

21. The liquid dispensing module according to claim 1, characterized in that the energy generating element is a piezoelectric element.

Images