Gas analyzers, fluid control systems, gas analysis programs, gas analysis methods

Abstract

A gas analysis device 100 for analyzing H2O gas and a compound gas, which is obtained by vaporization of a compound, generated in a main reaction in which an aqueous solution obtained by mixing a compound and water vaporizes, in order to facilitate specification of the cause of a difference between the actual concentration of the compound gas and a desired ideal concentration, wherein the gas analysis device 100 is configured so as to comprise: a first concentration calculation unit 41 for calculating the concentration of the compound gas; a second concentration calculation unit 42 for calculating the concentration of the H2O gas; an analysis unit 44 for comparing a first actual concentration which is the concentration of the compound calculated by the first concentration calculation unit 41, and a first ideal concentration which is the concentration of the compound gas in the case that the main reaction progresses ideally, and comparing a second actual concentration which is the concentration of the H2O gas calculated by the second concentration calculation unit 42, and a second ideal concentration which is the concentration of the H2O gas in the case that the main reaction progresses ideally; and an output unit 45 for outputting an analysis result based on the comparison by the analysis unit 44.

Description

Technical Field

[0001] The present invention relates to a gas analyzer, a fluid control system, a gas analysis program, and a gas analysis method.

Background Art

[0002] In a cleaning process of a semiconductor manufacturing process or a sterilization process of medical equipment, for example, hydrogen peroxide gas formed by vaporizing hydrogen peroxide may be used. Specifically, hydrogen peroxide gas is generated by vaporizing an aqueous solution in which liquid hydrogen peroxide is mixed with water.

[0003] As such a system using hydrogen peroxide gas, as shown in Patent Document 1, there is one provided with a concentration monitor for detecting the concentration of hydrogen peroxide gas. With such a configuration, it is possible to monitor whether the supplied hydrogen peroxide gas has a desired concentration, or in other words, whether it is the ideal concentration obtained when the vaporization of the above-mentioned aqueous solution proceeds ideally.

[0004] However, even if such a concentration monitor is provided, when there is a difference between the actual concentration detected by this concentration monitor and the desired ideal concentration, the cause cannot be specified. This is because, for example, as factors for the actual concentration being lower than the ideal concentration, various factors can be considered, such as the vaporization of the above-mentioned aqueous solution not proceeding ideally, or side reactions such as liquefaction and decomposition of hydrogen peroxide gas occurring complexly.

[0005] As a result, even if it is found that there is a difference between the actual concentration and the ideal concentration by the concentration monitor, ultimately, no countermeasure can be determined, and the difference has to be filled by trial and error. Note that such problems occur not only with hydrogen peroxide gas but also when a compound such as formaldehyde is vaporized and used in the above-mentioned cleaning process or sterilization process.

Prior Art Documents

Patent Documents

[0006] [Patent Document 1] Japanese Patent Publication No. 2000-217894 [Overview of the project] [Problems that the invention aims to solve]

[0007] Therefore, the present invention was made to solve the above-mentioned problems, and its main objective is to make it easier to identify the factors causing a difference between the actual concentration of a compound gas obtained by vaporizing a compound and the desired ideal concentration. [Means for solving the problem]

[0008] In other words, the gas analyzer according to the present invention is a gas analyzer that analyzes compound gas and H2O gas produced in a main reaction in which an aqueous solution obtained by mixing a compound and water vaporizes, and is characterized by comprising: a first concentration calculation unit for calculating the concentration of the compound gas; a second concentration calculation unit for calculating the concentration of the H2O gas; an analysis unit that compares a first actual concentration, which is the concentration of the compound gas calculated by the first concentration calculation unit, with a first ideal concentration, which is the concentration of the compound gas when the main reaction proceeds ideally, and also compares a second actual concentration, which is the concentration of the H2O gas calculated by the second concentration calculation unit, with a second ideal concentration, which is the concentration of the H2O gas when the main reaction proceeds ideally; and an output unit that outputs the analysis results based on the comparison by the analysis unit.

[0009] With a gas analyzer configured in this way, the analysis results are output by comparing the first actual concentration and the first ideal concentration, which are the concentrations of compound gases. This makes it possible to determine whether or not there is a difference between the first actual concentration and the first ideal concentration, as in conventional methods. Furthermore, since the analysis results are also output by comparing the second actual concentration and the second ideal concentration, which are the concentrations of H2O gas, it becomes easier to identify factors that would not be apparent from comparing only the first actual concentration and the first ideal concentration, if a difference occurs between them.

[0010] Preferably, when the analysis unit determines that the first actual concentration is lower than the first ideal concentration, it compares the second actual concentration with the second ideal concentration to determine the type of side reaction, and the result of this determination is output as the analysis result by the output unit. This makes it easier to identify the type of side reaction and to take appropriate measures to reduce the difference between the first actual concentration and the first ideal concentration.

[0011] More specifically, it is preferable that the type of side reaction includes at least one of the following: liquefaction of the compound gas, decomposition of the compound gas, or redissolution of the compound gas into the liquefied H2O gas.

[0012] Preferably, the analysis unit compares the first actual concentration with the first ideal concentration to determine whether or not a side reaction other than the main reaction is occurring, and the result of this determination is output as the analysis result by the output unit. With this configuration, if there is a difference between the first actual concentration and the first ideal concentration, it is possible to determine whether there is a high probability that a side reaction other than the main reaction is occurring, or whether there is a high probability that another factor is at play.

[0013] Preferably, the analysis unit compares the first actual concentration with the first ideal concentration to determine whether or not there is an abnormality on the gas analyzer side, and the result of this determination is output as the analysis result by the output unit. With this configuration, if there is a difference between the first actual concentration and the first ideal concentration, it is possible to determine whether there is a high probability that there is a malfunction in the device, or whether there is a high probability that there is another factor at play.

[0014] In order to reduce the difference between the first actual concentration and the first ideal concentration, and the difference between the second actual concentration and the second ideal concentration, it is preferable to further include an adjustment unit that adjusts the set temperature of the vaporizer that vaporizes the aqueous solution, or the set flow rate of the flow control device that controls the flow rate of the fluid introduced into the vaporizer or the fluid discharged from the vaporizer, based on the analysis results.

[0015] A more specific embodiment is one in which the first concentration calculation unit calculates the concentration of hydrogen peroxide, formaldehyde, or peracetic acid.

[0016] It is preferable that the first concentration calculation unit and the second concentration calculation unit calculate the concentration based on the output signal output from a common photodetector. This approach allows for the calculation of compound gas and H2O gas concentrations using a common photodetector, enabling the device to be made more compact and reducing manufacturing costs.

[0017] Furthermore, a fluid control system comprising a vaporizer for vaporizing the aqueous solution, a fluid control device provided in a flow path that guides the aqueous solution to the vaporizer, and the gas analyzer described above is also one of the present inventions.

[0018] Furthermore, the gas analysis program according to the present invention is used in a gas analyzer that analyzes compound gas and H2O gas produced in a main reaction in which an aqueous solution of a compound and water is vaporized, and is characterized in that it causes a computer to perform functions as an output unit that calculates the concentration of the compound gas, a first concentration calculation unit that calculates the concentration of the H2O gas, a first actual concentration which is the concentration of the compound gas calculated by the first concentration calculation unit, and a first ideal concentration which is the concentration of the compound gas when the main reaction proceeds ideally, and also compares the second actual concentration which is the concentration of the H2O gas calculated by the second concentration calculation unit, with the second ideal concentration which is the concentration of the H2O gas when the main reaction proceeds ideally, and outputs the analysis results based on the comparison by the analysis unit.

[0019] In addition, the gas analysis method according to the present invention is a gas analysis method for analyzing compound gas and H2O gas produced in a main reaction in which an aqueous solution obtained by mixing a compound and water vaporizes, and is characterized by comprising an analysis step of comparing a first actual concentration, which is the calculated concentration of the compound gas, with a first ideal concentration, which is the concentration of the compound gas when the main reaction proceeds ideally, and comparing a second actual concentration, which is the calculated concentration of the H2O gas, with a second ideal concentration, which is the concentration of the H2O gas when the main reaction proceeds ideally, and an output step of outputting the analysis results based on the comparison in the analysis step.

[0020] Such gas analysis programs and methods can achieve similar effects to those of the gas analyzers described above.

[0021] Furthermore, the gas analyzer according to the present invention is a gas analyzer that analyzes compound gas and H2O gas produced in the main reaction in which an aqueous solution obtained by mixing a compound and water vaporizes, and comprises a first concentration calculation unit for calculating the concentration of the compound gas, The device is characterized by comprising: a second concentration calculation unit for calculating the concentration of the H2O gas; an output unit that outputs, in a comparable manner, a first actual concentration which is the concentration of the compound gas calculated by the first concentration calculation unit and a first ideal concentration which is the concentration of the compound gas when the main reaction proceeds ideally; and an output unit that outputs, in a comparable manner, a second actual concentration which is the concentration of the H2O gas calculated by the second concentration calculation unit and a second ideal concentration which is the concentration of the H2O gas when the main reaction proceeds ideally. With this configuration, the first actual concentration and the first ideal concentration, which represent the concentrations of the compound gas, are output in a comparable manner. This makes it possible to determine whether or not there is a difference between the first actual concentration and the first ideal concentration, as in the conventional method. Furthermore, the second actual concentration and the second ideal concentration, which represent the concentrations of H2O gas, are also output in a comparable manner. This makes it easier to identify factors that would not be apparent from comparing only the first actual concentration and the first ideal concentration if a difference were to occur between them. [Effects of the Invention]

[0022] According to the present invention described above, when there is a difference between the actual concentration of the compound gas formed by vaporizing the compound and the desired ideal concentration, it becomes easier to identify the cause.

Brief Description of the Drawings

[0023] [Figure 1] Schematic diagram showing a fluid control system incorporating a gas analyzer according to an embodiment of the present invention. [Figure 2] Diagram showing a chemical reaction formula for explaining the types of side reactions in the same embodiment. [Figure 3] Schematic diagram showing the configuration of the concentration monitor in the same embodiment. [Figure 4] Functional block diagram for explaining the functions of the information processing unit in the same embodiment. [Figure 5] Flowchart for explaining the operation of the information processing device in the same embodiment. [Figure 6] Functional block diagram for explaining the functions of the information processing unit in other embodiments. [Figure 7] Functional block diagram for explaining the functions of the information processing unit in other embodiments. [Figure 8] Schematic diagram showing a fluid control system incorporating a gas analyzer according to other embodiments. [Figure 9] Schematic diagram showing a sterilization treatment device incorporating a gas analyzer according to other embodiments.

Explanation of Reference Numerals

[0024] 100 ··· Gas analyzer 200 ··· Fluid control system S ··· Gas supply space 10 ··· Vaporizer L1 ··· Gas supply line 30 ··· Concentration monitor 40 ··· Information processing unit 41 ··· First concentration calculation unit 42 ··· Second concentration calculation unit 43 ··· Ideal concentration storage unit 44...Analysis Department 45... Output section [Modes for carrying out the invention]

[0025] A gas analyzer according to one embodiment of the present invention will be described below with reference to the drawings.

[0026] As shown in Figure 1, the gas analyzer 100 of this embodiment constructs a fluid control system 200 that controls the gas supplied to a predetermined gas supply space S, and measures the concentration of that gas.

[0027] First, let's describe the fluid control system 200. As shown in Figure 1, this fluid control system 200 supplies material gas to a process chamber, which is a gas supply space S in a semiconductor manufacturing apparatus. Specifically, it comprises a vaporizer 10 that vaporizes an aqueous solution obtained by mixing a compound and water as a liquid material, and a gas supply passage L1 that supplies the material gas obtained by vaporizing the liquid material in the vaporizer 10 to the process chamber S. In this embodiment, the liquid material is obtained by mixing hydrogen peroxide (H2O2) and water (H2O) and adjusting the hydrogen peroxide to a desired concentration, and the material gas is hydrogen peroxide gas.

[0028] The vaporizer 10 vaporizes a liquid material by heating and / or reducing the pressure, and is equipped with a heater (not shown) for heating the liquid material and a nozzle (not shown) for ejecting and vaporizing the liquid material. The vaporizer 10 is connected to a material introduction passage L2 through which the liquid material stored in the storage container 20 is introduced, and to a carrier gas introduction passage L3 through which the carrier gas is introduced. The storage container 20 is connected to a pressurized gas introduction passage L4 through which the pressurized gas is introduced. The material introduction passage L2 is equipped with a first mass flow controller MFC1, which is a fluid control device for controlling the flow rate of the liquid material, and the carrier gas introduction passage L3 is equipped with a second mass flow controller MFC2, which is a fluid control device for controlling the flow rate of the carrier gas. Although oxygen is used as the carrier gas and pressurized gas here, nitrogen, argon, or hydrogen may be used depending on the type of liquid material.

[0029] As shown in Figure 1, the gas supply channel L1 connects the vaporizer 10 and the gas supply space S, and carries the compound gas and its by-product gases generated by the main reaction of vaporizing an aqueous solution obtained by mixing a compound and water. In this embodiment, the compound gas is hydrogen peroxide gas, and the by-product gas is H2O gas. Along with these gases, the carrier gas and the pressurized gas, oxygen, also flow through the gas supply channel L1.

[0030] Here, as mentioned above, by-product gases are generated by the main reaction, but their concentration can also fluctuate due to side reactions other than the main reaction, and can even be a factor in fluctuating the concentration of compound gases. Therefore, the present invention finds technical significance in monitoring the concentration of by-product gases, which will be described in detail below. As shown in Figure 2, side reactions in this embodiment include the liquefaction of hydrogen peroxide gas, the decomposition of hydrogen peroxide gas, and the redissolution of hydrogen peroxide gas into liquefied water by H2O gas.

[0031] As shown in Figure 1, the gas analyzer 100 of this embodiment includes a concentration monitor 30 provided in the gas supply path L1 and an information processing unit 40 that acquires the output signal from the concentration monitor 30. Note that the concentration monitor 30 does not necessarily have to be provided in the gas supply path L1, and may be provided, for example, in a branch channel branched off from the gas supply path L1.

[0032] The concentration monitor 30 analyzes the target component contained in the gas using infrared absorption spectroscopy. Specifically, as shown in Figure 3, it comprises a light source unit 31 containing a light source that irradiates the gas with infrared light X, and a detection unit 32 containing a photodetector that detects the infrared light X transmitted through the gas. The light intensity signal of the infrared light X detected by the photodetector is output as an output signal to the information processing unit 40.

[0033] The information processing unit 40 is a general-purpose or dedicated computer equipped with a CPU, memory, AD converter, DA converter, etc., and may be integrated with the concentration monitor 30 or may be a separate unit. The information processing unit 40 functions as a first concentration calculation unit 41, a second concentration calculation unit 42, an ideal concentration storage unit 43, an analysis unit 44, and an output unit 45, as shown in Figure 4, through the cooperation of the CPU and its peripheral devices according to a gas analysis program stored in a predetermined area of ​​the memory. Note that the gas concentration described below may refer to the component concentration of the gas or to the partial pressure of the gas. The operation of the information processing unit 40 in this embodiment will be explained below, along with a description of the functions of each part.

[0034] The first concentration calculation unit 41 calculates the concentration of hydrogen peroxide gas, which is a compound gas (hereinafter also referred to as the first actual concentration). Specifically, it receives a light intensity signal, which is the output signal from the photodetector, and performs calculations on the value indicated by this light intensity signal to calculate the concentration of hydrogen peroxide gas contained in the gas flowing through the gas supply path L1 as the first actual concentration. This calculation process uses first calibration curve data that shows the relationship between the value indicated by the light intensity signal and the first actual concentration. This first calibration curve data is stored in the calibration curve data storage unit 46 set in a predetermined area of ​​the memory (see Figure 4).

[0035] The second concentration calculation unit 42 calculates the concentration of the by-product gas H2O gas (hereinafter also referred to as the second actual concentration). Specifically, it receives a light intensity signal, which is the output signal from the photodetector, and performs calculations on the value indicated by this light intensity signal to calculate the concentration of H2O gas contained in the gas flowing through the gas supply path L1 as the second actual concentration. This calculation process uses second calibration curve data that shows the relationship between the value indicated by the light intensity signal and the second actual concentration. This second calibration curve data is stored in the calibration curve data storage unit 46 set in a predetermined area of ​​the memory (see Figure 4).

[0036] In this embodiment, the first concentration calculation unit 41 and the second concentration calculation unit 42 are configured to calculate the first and second actual concentrations, respectively, based on output signals output from a common photodetector, thereby enabling the device to be made more compact and reducing manufacturing costs. However, the first concentration calculation unit 41 and the second concentration calculation unit 42 may also be configured to calculate the first and second actual concentrations, respectively, based on output signals output from separate photodetectors.

[0037] The ideal concentration storage unit 43 is set in a predetermined area of ​​the memory and stores the first ideal concentration, which is the concentration of hydrogen peroxide gas when the main reaction described above proceeds ideally, and the second ideal concentration, which is the concentration of H2O gas when the main reaction described above proceeds ideally.

[0038] The first ideal concentration can be calculated in advance, for example, before the start of the control process by the fluid control system 200. Specifically, it can be calculated based on the theoretical concentration of hydrogen peroxide (specifically, the volume fraction of hydrogen peroxide) which can be theoretically determined using the titration concentration obtained by actually measuring the concentration of hydrogen peroxide contained in the aqueous solution stored in the reservoir 20 by titration, etc., and the total flow rate of the gas flowing through the concentration monitor 30 (the sum of the flow rates of hydrogen peroxide gas, H2O gas, and oxygen gas). This theoretical concentration is the concentration of hydrogen peroxide gas when the aqueous solution stored in the reservoir 20 is 100% vaporized, in other words, the concentration of hydrogen peroxide gas when only the main reaction described above occurs. This theoretical concentration may be used as the first ideal concentration, but in this embodiment, the first ideal concentration is set considering that the compound gas decreases to some extent in the process from the reservoir 20 to the concentration monitor 30, for example, due to condensation. In other words, since there is a difference between the theoretical concentration and the concentration measured by the concentration monitor 30 (referred to as the effective concentration), the ratio of the effective concentration to the theoretical concentration (hereinafter referred to as the vaporization efficiency) is determined in advance, and the concentration obtained by multiplying this vaporization efficiency by the theoretical concentration is set as the first ideal concentration. Alternatively, the effective concentration may be used as the first ideal concentration without determining the vaporization efficiency.

[0039] The second ideal concentration, like the first ideal concentration, can be calculated in advance, for example, before the start of the control process by the fluid control system 200. Specifically, it can be calculated based on the theoretical concentration of H2O (specifically, the volume fraction of H2O) which can be theoretically determined using the titration concentration described above and the total flow rate of gas flowing through the concentration monitor 30. Here, the concentration obtained by multiplying this theoretical concentration by the vaporization efficiency described above is taken as the second ideal concentration. Alternatively, the concentration of H2O gas measured in advance by the concentration monitor 30 before the start of the control process by the fluid control system 200 may also be used as the second ideal concentration.

[0040] The first and second ideal concentrations calculated in this manner are input from an external source, for example, via an input means, and stored in the ideal concentration storage unit 43. However, the information processing unit 40 may be equipped with a function as an ideal concentration calculation unit that calculates the first and second ideal concentrations, and the first and second ideal concentrations calculated by this ideal concentration calculation unit may be stored in the ideal concentration storage unit 43.

[0041] The analysis unit 44 compares the first actual concentration with the first ideal concentration, and also compares the second actual concentration with the second ideal concentration. Specifically, it determines the relative magnitudes of the first actual concentration and the first ideal concentration, and also determines the relative magnitudes of the second actual concentration and the second ideal concentration.

[0042] The analysis unit 44 of this embodiment is configured to compare the first actual concentration and the first ideal concentration to determine whether a side reaction other than the main reaction is occurring, and to determine whether there is an abnormality on the device side.

[0043] More specifically, as shown in Figure 5, the analysis unit 44 first compares the first actual concentration and the first ideal concentration (S1). If the difference between the first actual concentration and the first ideal concentration is below a predetermined threshold, the analysis unit 44 determines that the main reaction described above is proceeding ideally (S2).

[0044] On the other hand, in S1, if the difference between the first actual concentration and the first ideal concentration exceeds a predetermined threshold, the analysis unit 44 determines the relative magnitudes of the first actual concentration and the first ideal concentration (S3) to determine whether a side reaction other than the main reaction is occurring, or whether there is an abnormality on the device side (S4, S5).

[0045] Specifically, if the first actual concentration is higher than the first ideal concentration, the analysis unit 44 determines that there is an abnormality on the device side (S4). Examples of abnormalities include calibration errors, incorrect settings of various settings such as the first calibration curve data, the second calibration curve data, and vaporization efficiency mentioned above.

[0046] In contrast, if the first actual concentration is lower than the first ideal concentration, the analysis unit 44 determines that a side reaction separate from the main reaction is occurring (S5).

[0047] If the analysis unit 44 determines that a side reaction has occurred in S5, it identifies the type of side reaction based on the comparison result between the second actual concentration and the second ideal concentration. As mentioned above, the types of side reactions include the liquefaction of hydrogen peroxide gas, the decomposition of hydrogen peroxide gas, and the redissolution of hydrogen peroxide gas into the liquefied water by H2O gas (see Figure 2). The type of side reaction identified by the analysis unit 44 only needs to include at least one of these three: liquefaction, decomposition, and redissolution.

[0048] In this embodiment, the analysis unit 44 compares the second actual concentration and the second ideal concentration (S6), and if the difference between the second actual concentration and the second ideal concentration is less than or equal to a predetermined threshold, it determines that liquefaction of hydrogen peroxide gas has occurred as a side reaction (S7).

[0049] On the other hand, in S6, if the difference between the second actual concentration and the second ideal concentration exceeds a predetermined threshold, the analysis unit 44 determines the relative magnitudes of the second actual concentration and the second ideal concentration (S8). If the second actual concentration is higher than the second ideal concentration, the analysis unit 44 determines that decomposition of hydrogen peroxide gas is occurring as a side reaction (S9). If the second actual concentration is lower than the second ideal concentration, the analysis unit 44 determines that one or more of the following side reactions are occurring: liquefaction, decomposition, and redissolution of hydrogen peroxide gas (S10).

[0050] Thus, the analysis results from the analysis unit 44 include at least a comparison between the first actual concentration and the first ideal concentration, and a comparison between the second actual concentration and the second ideal concentration. Furthermore, the analysis results of this embodiment also include various judgments made based on these comparison results, namely whether or not there is an abnormality on the device side, whether or not a side reaction other than the main reaction is occurring, and the type of side reaction occurring (liquefaction, decomposition, or redissolution).

[0051] The analysis results based on the comparison performed by the analysis unit 44 are then output in a visually readable format by the output unit 45. Specifically, the output unit 45 outputs some or all of the information included in the analysis results in a visually readable format, and is configured to display on the display whether there is a malfunction on the device side, whether an adverse reaction has occurred, and the type of adverse reaction. The output unit 45 may also be a device that prints the analysis results onto paper or the like.

[0052] According to the gas analyzer 100 of this embodiment, configured in this way, the analysis results are output by comparing the first actual concentration and the first ideal concentration, which are the concentrations of hydrogen peroxide gas. This makes it possible to determine whether there is a difference between the first actual concentration and the first ideal concentration, that is, whether the main reaction is proceeding ideally. Furthermore, by comparing the second actual concentration and the second ideal concentration, which represent the concentration of H2O gas, and outputting the analysis results, it becomes easier to identify the most probable cause of the difference between the first actual concentration and the first ideal concentration from among various factors that cannot be determined by comparing only the first actual concentration and the first ideal concentration, such as a malfunction on the equipment side or side reactions such as liquefaction, decomposition, or redissolution of hydrogen peroxide gas. In turn, it becomes easier to take appropriate measures to reduce the difference between the first actual concentration and the first ideal concentration.

[0053] However, the present invention is not limited to the embodiments described above.

[0054] For example, in the above embodiment, the output unit 45 output information indicating that there is a malfunction on the device side, that a side reaction has occurred, and the type of the side reaction. However, it may output only some of these information. Alternatively, it may display the comparison result (magnitude relationship) between the first actual concentration and the first ideal concentration, and the comparison result (magnitude relationship) between the second actual concentration and the second ideal concentration. In this case, the analysis unit 44 does not need to determine whether there is a malfunction on the device side, that a side reaction has occurred, or the type of the side reaction.

[0055] Furthermore, the output unit 45 may display or print the analysis results, or, as shown in Figure 6, output the analysis results to the adjustment unit 47. The adjustment unit 47 may be configured to adjust, for example, the set temperature of the vaporizer 10 and the set flow rates of the mass flow controllers MFC1 and MFC2 so that the difference between the first actual concentration and the first ideal concentration becomes small.

[0056] Furthermore, the output unit 45 may output the first actual concentration and the first ideal concentration in a comparable manner, and also output the second actual concentration and the second ideal concentration in a comparable manner, for example, on a display, without outputting the analysis results from the analysis unit 44. In this case, the information processing unit 40 does not need to have the functionality of the analysis unit 44.

[0057] Furthermore, as described in the above embodiment, the information processing unit 40 may also function as an ideal concentration calculation unit 48 that calculates a first ideal concentration and a second ideal concentration, as shown in Figure 7. Specifically, this ideal concentration calculation unit 48 can be configured to calculate the first ideal concentration and the second ideal concentration using the vaporization efficiency input via the input means.

[0058] The information processing unit 40 may also be equipped with a notification function that notifies the system when the difference between the first actual concentration and the first ideal concentration exceeds a predetermined threshold, as a result of the comparison unit comparing the first actual concentration and the first ideal concentration.

[0059] Furthermore, some of the functions of the first concentration calculation unit 41, second concentration calculation unit 42, analysis unit 44, and output unit 45 of the information processing unit 40 may be provided by another computer, and the ideal concentration storage unit 43 may be set in a predetermined area of ​​external memory separate from the memory of the information processing unit 40.

[0060] In the above embodiment, the fluid control system 200 vaporized a liquid material by ejecting it from a nozzle, but as shown in Figure 8, it may also vaporize the liquid material by heating it and bubbling it. Specifically, the fluid control system 200 includes a vaporizer equipped with a vaporization tank 11 that contains an aqueous solution obtained by mixing a compound and water and vaporizes the aqueous solution, a carrier gas introduction passage L3 for introducing a carrier gas into the vaporization tank 11, a mass flow controller MFC which is a fluid control device provided in the carrier gas introduction passage L3, and a gas supply passage L1 for supplying the gas vaporized by the vaporization tank 11 to a gas supply space S such as a chamber, and further includes a concentration monitor 30 provided in the gas supply passage L1 and an information processing unit 40 that acquires output signals from the concentration monitor 30.

[0061] Furthermore, as shown in Figure 9, the gas analyzer 100 according to the present invention may also be applied to a sterilization processing apparatus 300 that sterilizes objects to be sterilized, such as medical devices. Specifically, the sterilization processing apparatus 300 comprises a gas supply space S which is a chamber for containing the object to be sterilized, a vaporizer 10 which vaporizes an aqueous solution obtained by mixing a compound and water, and a gas supply passage L1 which guides the gas vaporized by the vaporizer 10 into the chamber. The apparatus further comprises a concentration monitor 30 provided in the gas supply passage L1 and an information processing unit 40 which acquires the output signal from the concentration monitor 30.

[0062] In addition, although hydrogen peroxide was used as an example of a compound that can be mixed with water in the above embodiment, formaldehyde may also be used. That is, the first concentration calculation unit 41 may be one that calculates the concentration of formaldehyde contained in the gas flowing through the gas supply path L1. Furthermore, the compound that can be mixed with water may be peracetic acid. In this specific embodiment, an aqueous solution of peracetic acid and water is placed in a container, and the concentration of peracetic acid gas and H2O gas contained in the vapor inside the container is monitored by a concentration monitor 30.

[0063] Furthermore, various modifications and combinations of the embodiments are permitted, as long as they do not contradict the spirit of the present invention. [Industrial applicability]

[0064] According to the present invention, when there is a difference between the actual concentration of a compound gas obtained by vaporizing a compound and the desired ideal concentration, it is possible to easily identify the cause of that difference.

Claims

1. The compound gas and H are produced in the main reaction in which an aqueous solution, formed by mixing a compound and water, vaporizes. ２ A gas analyzer for analyzing O gas, A first concentration calculation unit for calculating the concentration of the compound gas, The aforementioned H ２ A second concentration calculation unit for calculating the concentration of O gas, The first actual concentration, which is the concentration of the compound gas calculated by the first concentration calculation unit, is compared with the first ideal concentration, which is the concentration of the compound gas when the main reaction proceeds ideally, and the second concentration calculation unit calculates the H ２ The second actual concentration is the concentration of O gas, and the H when the main reaction proceeds ideally. ２ An analysis unit that compares the concentration of O gas with the second ideal concentration, A gas analyzer comprising an output unit that outputs analysis results based on the comparison performed by the aforementioned analysis unit.

2. The gas analyzer according to claim 1, wherein, when the analysis unit determines that the first actual concentration is lower than the first ideal concentration, it compares the second actual concentration with the second ideal concentration to determine the type of side reaction occurring separately from the main reaction, and the result of this determination is output as the analysis result by the output unit.

3. The types of the aforementioned side reactions include liquefaction of the compound gas, decomposition of the compound gas, or H ２ The gas analyzer according to claim 2, comprising at least one of the redissolution of the compound gas into liquefied O gas.

4. The gas analyzer according to any one of claims 1 to 3, wherein the analysis unit compares the first actual concentration with the first ideal concentration to determine whether or not a side reaction other than the main reaction is occurring, and the result of this determination is output as the analysis result by the output unit.

5. The gas analyzer according to any one of claims 1 to 4, wherein the analysis unit compares the first actual concentration with the first ideal concentration to determine whether or not an abnormality has occurred on the gas analyzer side, and the result of this determination is output as the analysis result by the output unit.

6. The gas analyzer according to any one of claims 1 to 5, further comprising an adjustment unit for adjusting the set temperature of a vaporizer that vaporizes the aqueous solution, or the set flow rate of a flow control device that controls the flow rate of a fluid introduced into the vaporizer or a fluid discharged from the vaporizer, based on the analysis results.

7. The gas analyzer according to any one of claims 1 to 6, wherein the first concentration calculation unit calculates the concentration of hydrogen peroxide, formaldehyde, or peracetic acid.

8. The gas analyzer according to any one of claims 1 to 7, wherein the first concentration calculation unit and the second concentration calculation unit calculate the concentration based on an output signal output from a common photodetector.

9. A vaporizer for vaporizing the aforementioned aqueous solution, A fluid control device provided in a flow path that guides the aqueous solution to the vaporizer, A fluid control system comprising a gas analyzer according to any one of claims 1 to 8.

10. The compound gas and H are produced in the main reaction in which an aqueous solution, formed by mixing a compound and water, vaporizes. ２ A program used in a gas analyzer for analyzing O gas, A first concentration calculation unit for calculating the concentration of the compound gas, The aforementioned H ２ A second concentration calculation unit for calculating the concentration of O gas, Compare the first actual concentration, which is the concentration of the compound gas calculated by the first concentration calculation unit, with the first ideal concentration, which is the concentration of the compound gas when the main reaction proceeds ideally, and compare the second actual concentration, which is the concentration of the H ２ O gas calculated by the second concentration calculation unit, with the second ideal concentration, which is the concentration of the H ２ O gas when the main reaction proceeds ideally, and an analysis unit for comparing them. A gas analysis program that enables a computer to function as an output unit, outputting analysis results based on comparisons performed by the aforementioned analysis unit.

11. The compound gas and H are produced in the main reaction in which an aqueous solution, formed by mixing a compound and water, vaporizes. ２ A gas analysis method for analyzing O gas, The first actual concentration, which is the calculated concentration of the compound gas, is compared with the first ideal concentration, which is the concentration of the compound gas when the main reaction proceeds ideally, and the calculated H ２ The second actual concentration is the concentration of O gas, and the H when the main reaction proceeds ideally. ２ An analytical step to compare the concentration of O gas with the second ideal concentration, A gas analysis method comprising an output step that outputs analysis results based on the comparison performed in the analysis step.

12. The compound gas and H are produced in the main reaction in which an aqueous solution, formed by mixing a compound and water, vaporizes. ２ A gas analyzer for analyzing O gas, A first concentration calculation unit for calculating the concentration of the compound gas, The aforementioned H ２ A second concentration calculation unit for calculating the concentration of O gas, The first concentration, which is the concentration of the compound gas calculated by the first concentration calculation unit, and the first ideal concentration, which is the concentration of the compound gas when the main reaction proceeds ideally, are output in a comparable manner, and the H calculated by the second concentration calculation unit are also output. ２ The second actual concentration is the concentration of O gas, and the H when the main reaction proceeds ideally. ２ A gas analyzer comprising an output unit that outputs a second ideal concentration, which is the concentration of O gas, in a manner comparable to that of the O gas.

Images