Substrate handling system and processing apparatus

The substrate processing system stabilizes wheel contact and load distribution using a guide member and pivotable rear trolley configuration, addressing misalignment and uneven surface issues for precise substrate processing.

JP7873393B2Active Publication Date: 2026-06-12PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
Filing Date
2022-11-30
Publication Date
2026-06-12

AI Technical Summary

Technical Problem

Existing substrate processing systems face challenges in maintaining stability and uniform load distribution due to misalignment and uneven floor surfaces, leading to instability and support load imbalances.

Method used

A substrate processing system with a guide member and guided member configuration that includes a front trolley and a pivotably connected rear trolley, along with guide rails, to stabilize wheel contact and distribute load evenly.

🎯Benefits of technology

Ensures stable wheel contact and uniform load distribution, allowing precise positioning and stable operation on uneven surfaces.

✦ Generated by Eureka AI based on patent content.

Smart Images

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Patent Text Reader

Abstract

To secure safety of attachment of a processing device attached to a work device for a substrate.SOLUTION: A work system for a substrate 100 includes a work device for a substrate 110 and a processing device 130 removably attached to the work device 110 for a substrate. The work device 110 has a guide member 111 for guiding the processing device 130. The processing device 130 includes: a front wagon 132; a back wagon 133; and a guidance target member 134 attached to the front wagon 132, the guidance target member being for determining a position engaged with the guide member 111. The back wagon 133 is connected to the front wagon 132 to be rotatable around a wagon shaft 140 extending in a direction in which the processing device 130 is attached to the work device for a substrate 110 or is removed from the work device for a substrate 110.SELECTED DRAWING: Figure 2
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Description

【Technical Field】 【0001】 The present invention relates to a substrate working system that performs operations on a substrate and a processing device included in the substrate working system. 【Background Art】 【0002】 Conventionally, there is a processing device that is transported on the floor surface where a substrate working device for performing operations on a printed circuit board or the like is installed and is attached to the substrate working device. Specifically, a component supply device, which is one of the processing devices that automatically supplies components, particularly carrier tapes, to a component mounting device, which is one of the substrate working devices, is transported in a self-standing state on the floor surface. When the component supply device is attached to the component mounting device, a relative positional and postural error occurs between the component mounting device and the component supply device due to undulations on the floor surface or the like. 【0003】 Patent Document 1 describes a technique in which a positioning unit consisting of a pair of rails is provided in a component supply device, and the positioning unit is guided to correct the misalignment of the component supply device with respect to the component mounting device. 【Prior Art Documents】 【Patent Documents】 【0004】 【Patent Document 1】 Japanese Unexamined Patent Application Publication No. 2021-064679 【Summary of the Invention】 【Problems to be Solved by the Invention】 【0005】 However, when attempting to correct the misalignment of the component supply device with respect to the component mounting device by structural guidance, it has been difficult to ensure the grounding state of a plurality of wheels attached to the component supply device and the stability of the support load due to the relationship between the guided self-standing component supply device and the uneven floor surface such as undulations. 【0006】 The present invention has been made in view of the above problems, and aims to provide a substrate work system and a processing apparatus that ensure the stability of the contact state of the wheels when the processing apparatus is guided to the substrate work apparatus and suppress the uneven distribution of support loads on multiple wheels. [Means for solving the problem] 【0007】 To achieve the above objective, one of the present inventions is a substrate work system comprising: a substrate work device for performing work on a substrate; and a processing device that is transported on the floor surface on which the substrate work device is installed and attached to and detached from the substrate work device, wherein the substrate work device is equipped with a guide member that guides the movement of the processing device when the processing device is attached, the processing device comprises a front trolley positioned on the side closer to the substrate work device and a rear trolley positioned on the side further away from the substrate work device when attached to the substrate work device, and a guided member attached to the front trolley that engages with the guide member to determine the position of the processing device relative to the substrate work device, wherein the rear trolley is pivotably connected to the front trolley around a trolley axis that extends in the direction in which the processing device is attached to and detached from the substrate work device. 【0008】 Furthermore, in order to achieve the above objective, another processing apparatus of the present invention is a processing apparatus that is transported on a floor surface on which a substrate work apparatus is installed and attached to and detached from the substrate work apparatus, and comprises a front trolley positioned on the side closer to the substrate work apparatus when attached to the substrate work apparatus, and a rear trolley positioned on the side further away, and a guided member attached to the front trolley that engages with a guide member provided on the substrate work apparatus to determine the position of the processing apparatus relative to the substrate work apparatus, wherein the rear trolley is pivotably connected to the front trolley around a trolley axis that extends in the direction in which the processing apparatus is attached to and detached from the substrate work apparatus. [Effects of the Invention] 【0009】 According to the present invention, it is possible to ensure the stability of the wheel contact state when the processing device is guided to the substrate processing device, and to suppress the uneven distribution of support loads on multiple wheels. [Brief explanation of the drawing] 【0010】 [Figure 1] This is a perspective view showing a circuit board work system. [Figure 2] This is a perspective view showing the processing unit, with the processing unit body omitted. [Figure 3] This is a side view showing the processing unit. [Figure 4] This is a perspective view showing the guide member and the guided member before the processing device is attached to the substrate handling device. [Figure 5] This is a perspective view showing a guide member and a guided member with the processing device attached to the substrate work apparatus. [Figure 6] This is a rear view showing the rear bogie tilted relative to the front bogie. [Figure 7] This is a perspective view showing the connection between the automated guided vehicle (AGV) and the rear trailer. [Figure 8] This is a perspective view showing another example of a guide member. [Modes for carrying out the invention] 【0011】 The following describes embodiments of the substrate processing system and processing apparatus according to the present invention with reference to the drawings. The following embodiments are provided as examples to illustrate the present invention and are not intended to limit it. For example, the shapes, structures, materials, components, relative positional relationships, connection states, numerical values, formulas, the content of each step in the method, and the order of each step shown in the following embodiments are examples and may include content not described below. Geometric expressions such as parallel and orthogonal may be used, but these expressions do not indicate mathematical rigor and include substantially acceptable errors and deviations. Similarly, expressions such as simultaneous and identical also include substantially acceptable ranges. 【0012】 Furthermore, the drawings are schematic diagrams that have been appropriately emphasized, omitted, or had their proportions adjusted to illustrate the present invention, and therefore differ from the actual shape, positional relationships, and proportions. Also, the X, Y, and Z axes shown in the drawings represent orthogonal coordinates arbitrarily set for the purpose of explaining the drawings. In other words, the Z axis is not necessarily an axis along the vertical direction, and the X and Y axes are not necessarily located in the horizontal plane. 【0013】 Furthermore, in the following, multiple inventions may be described comprehensively as a single embodiment. Also, some of the content described below is described as an optional component relating to the present invention. 【0014】 Figure 1 is a perspective view showing a substrate processing system 100. The substrate processing system 100 is a system for performing work on a substrate (not shown), and comprises a substrate processing device 110 and a processing device 130. In this embodiment, the substrate processing system 100 includes an automated guided vehicle 200 for transporting the processing device 130. 【0015】 The circuit board work apparatus 110 is not particularly limited as long as it is a device that performs work on a circuit board, such as mounting components onto the board. For example, the circuit board work apparatus 110 can be a solder printing device that prints solder paste on the surface of a printed circuit board, a component mounting device that mounts components onto the board, or a reflow oven that melts solder paste by heating and mechanically and electrically connects components to the board by cooling, and other devices that are incorporated into a circuit board manufacturing line. The circuit board work apparatus 110 also includes inspection devices that perform inspections at each stage of the work performed on the board, and transport devices that connect each device and transport circuit boards in the process of being manufactured. 【0016】 The substrate handling device 110 is equipped with a guide member 111 that guides the movement of the processing device 130 when the processing device 130 is attached, and determines the positional relationship of the processing device 130 with respect to the substrate handling device 110. Details of the guide member 111 will be described later. 【0017】 The processing device 130 is a device that is transported on the floor surface 300 where the substrate processing device 110 is installed, executes processing with the substrate processing device 110 while being attached to the substrate processing device 110, and is removed from the substrate processing device 110 after the processing is completed. The type of the processing device 130 is not particularly limited. For example, as the processing device 130, a carrier tape supply device that supplies a container in which a carrier tape is stored to a component mounting device that is one of the substrate processing devices 110, a tray supply device that supplies a tray on which components are placed, a solder supply device that supplies solder paste to a solder printing device, and the like can be exemplified. Further, the processing device 130 may be a device that accesses the substrate processing device 110 to perform adjustment processing or the like instead of supplying components. 【0018】 FIG. 2 is a perspective view showing the processing device 130 with the processing device main body 131 omitted. FIG. 3 is a side view showing the processing device 130. The processing device 130 is a device that is transported on the floor surface 300 by the driving force of another device or manual force, and includes a front cart 132, a rear cart 133, and a guided member 134. 【0019】 The front cart 132 is a cart that is disposed closer to the substrate processing device 110 than the rear cart 133 when the processing device 130 is attached to the substrate processing device 110. The front cart 132 includes front wheels 135 that are wheels for traveling on the floor surface 300. The number of the front wheels 135 included in the front cart 132 is not limited, but in the case of the present embodiment, a pair of front wheels 135 are arranged side by side in the left-right direction (the X-axis direction in the figure) orthogonal to the attachment / detachment direction (the Y-axis direction in the figure), which is the direction in which the processing device 130 is attached to and detached from the substrate processing device 110 in the horizontal plane. The type of the front wheels 135 is not particularly limited, but in the case of the present embodiment, casters are employed. 【0020】 The processing unit 131 is fixed to the front bogie 132. The front bogie 132 supports most of the load of the processing unit 131. Note that the front bogie 132 does not have to be separate from the processing unit 131, but may be part of the processing unit 131. The rear bogie 133 also supports the load of the processing unit 131. 【0021】 The rear bogie 133 is positioned on the opposite side of the substrate processing device 110 from the front bogie 132 when the processing device 130 is attached to the substrate processing device 110. The rear bogie 133 is equipped with rear wheels 136, which are wheels for running on the floor surface 300. The number of rear wheels 136 on the rear bogie 133 is not limited, but in this embodiment, a pair of rear wheels 136 are arranged side by side in the left-right direction (X-axis direction in the figure). The type of rear wheels 136 is not particularly limited, but in this embodiment, the same casters as the front wheels 135 are used. The pair of front wheels 135 and the pair of rear wheels 136 are arranged at the vertices of a square or rectangle, respectively. 【0022】 The rear end surface 137 of the rear bogie 133 is provided with a first connecting section 138 that connects to the automated guided vehicle 200. Details of the first connecting section 138 will be described later. 【0023】 The rear bogie 133 is pivotably connected to the front bogie 132 around a bogie axle 140 that extends along the attachment / detachment direction. The bogie axle 140 is an axis that virtually passes through the left-right centers of the front bogie 132 and the rear bogie 133. In this embodiment, the rear bogie 133 is pivotably attached via a bearing (not shown) to a shaft 141 that protrudes rearward (in the direction of Y- in the figure) along the attachment / detachment direction at the left-right center of the front bogie 132. The rear bogie 133 supports a portion of the load of the processing unit body 131 via the shaft 141 and the bearing. A predetermined gap 142 is provided between the processing unit body 131 and the rear bogie 133 to allow the rear bogie 133 to pivot relative to the processing unit body 131. Alternatively, the shaft 141 may be fixed to the rear bogie 133, and the front bogie 132 may rotatably hold the shaft 141 via a bearing. 【0024】 Figure 4 is a perspective view showing the guide member 111 and the guided member 134 before the processing device 130 is attached to the substrate handling device 110. Figure 5 is a perspective view showing the guide member 111 and the guided member 134 with the processing device 130 attached to the substrate handling device 110. 【0025】 In this embodiment, the substrate handling device 110 includes a pair of guide members 111 that protrude outward (in the direction of Y- in the figure) along the attachment / detachment direction (in the direction of Y- in the figure) in a horizontal plane (XY plane in the figure) and are arranged parallel to each other. The pair of guide members 111 have a plane-symmetric shape with respect to the vertical plane including the attachment / detachment direction. Each guide member 111 includes a support surface portion 112 that points to the guided member 134, and a wall surface portion 113 that is provided upright on the outer edges of the pair of support surface portions 112 in the left-right direction. 【0026】 The support surface 112 supports the engaged guided member 134 from below, lifting the front wheels 135 off the floor 300 or reducing the load of the processing unit body 131 applied to the front wheels 135. The support surface 112 determines the height position (position in the Z-axis direction in the figure) of the processing unit body 131 relative to the substrate work device 110. Furthermore, being supported by the pair of support surface 112 determines the inclination (so-called roll angle) of the processing unit body 131 relative to the substrate work device 110 in the direction of attachment and detachment. 【0027】 At the tip of the support surface 112, there is a slope 114 that slopes upward from the tip toward the main body of the substrate work device 110. When the processing device 130 is attached to the substrate work device 110, the slope 114 causes at least the front side (Y+ side in the figure) of the processing device body 131 to rise along with the front bogie 132 as the processing device 130 approaches the substrate work device 110. When the processing device 130 is attached to the substrate work device 110, the guided member 134 first comes into contact with the slope 114, and as the processing device 130 approaches the substrate work device 110, the guided member 134 rises along the slope 114, and consequently the front bogie 132 and the processing device body 131 are lifted. As a result, the load applied to the front wheels 135 is gradually reduced. After passing the slope 114, the guided member 134 is supported by the support surface 112. 【0028】 Each guide member 111 is provided with a positioning section 115 that determines the position of the processing device 130 relative to the substrate work device 110 in the attachment / detachment direction. The shape of the positioning section 115 and the positioning method are not particularly limited, but in this embodiment, the positioning section 115 is a V-shaped groove provided on the support surface 112. The position of the processing device 130 relative to the substrate work device 110 in the attachment / detachment direction is determined when a part of the lower side of the horizontal axis roller 143 (described later) provided on the guided member 134 fits into the positioning section 115. 【0029】 The pair of wall portions 113 are arranged opposite each other, and the position of the processing device 130 relative to the substrate work device 110 in the left-right direction is determined by the fitting of the pair of guided members 134 between them. In addition, the inclination (so-called yaw angle) of the processing device 130 relative to the substrate work device 110 around the vertical direction (Z-axis direction in the figure) is determined by the contact between the wall portions 113 and the guided members 134 at least two points, separated in the attachment / detachment direction. 【0030】 Each of the pair of wall portions 113 is provided with a tapered surface 116 that gradually separates from each other towards the tip. When the processing device 130 is attached to the substrate handling device 110, the guided member 134 first comes into contact with the tapered surface 116, so that even if the processing device 130 is misaligned in the left-right direction relative to the substrate handling device 110, it is guided by the tapered surface 116 and the position of the processing device 130 is corrected to the appropriate position. 【0031】 In this embodiment, the processing apparatus 130 includes a pair of guided members 134 that protrude toward the substrate work device 110 along the attachment / detachment direction (Y-axis direction in the figure) in a horizontal plane (XY plane in the figure) and are arranged parallel to each other. The pair of guided members 134 have a plane-symmetric shape with respect to the vertical plane including the attachment / detachment direction. The guided member 134 includes a rectangular parallelepiped base 145 protruding from the processing apparatus body 131, horizontal axis rollers 143 that are rotatably mounted on opposing surfaces of the pair of bases 145 around a rotation axis extending in the left-right direction, and vertical axis rollers 144 that are rotatably mounted on the upper surface of the base 145 around a rotation axis extending vertically. The pair of guided members 134 includes a pair of vertical axis rollers 144 that are arranged side by side in the attachment / detachment direction. 【0032】 The vertical axis roller 144 contacts one of the tapered surfaces 116 and moves along the tapered surface 116 while rotating as the processing device 130 approaches the substrate work device 110. Finally, the vertical axis roller 144 contacts the inner surfaces of a pair of opposing wall sections 113, determining the position of the processing device 130 relative to the substrate work device 110 in the left-right direction. In addition, the contact of the pair of vertical axis rollers 144, which are positioned front to back in the attachment / detachment direction, with the wall sections 113 respectively determines the inclination (so-called yaw angle) of the processing device 130 relative to the substrate work device 110 in the vertical direction (Z-axis direction in the figure). 【0033】 The horizontal rollers 143 each contact the slope 114, and as the processing device 130 approaches the substrate work device 110, they rotate and ascend the slope 114, being supported by the support surface 112. In this embodiment, the processing device 130 is positioned relative to the substrate work device 110 by having a portion of each horizontal roller 143 fit into the positioning portion 115 provided on the support surface 112. Furthermore, the inclination (so-called roll angle) of the front trolley 132 and the processing device body 131 around the attachment / detachment direction relative to the substrate work device 110 is determined by the support of the pair of support surface 112 and the pair of horizontal rollers 143. 【0034】 Here, when the processing unit 130 is attached to the substrate work device 110, and the position and orientation of the processing unit body 131 relative to the substrate work device 110 are determined, and as shown in Figure 6, there are irregularities on the floor surface 300, the rear bogie 133 can follow the irregularities on the floor surface 300 by tilting relative to the front bogie 132. As a result, the front side of the processing unit body 131 (the side facing the substrate work device 110) is supported by the guide member 111 via the guided member 134, and the rear side of the processing unit body 131 is supported by both of the pair of rear wheels 136 that contact the floor surface 300 due to the tilt of the rear bogie 133. This suppresses the load imbalance in the left-right direction of the parts supported by the guide member 111 and the floor surface 300, making it possible for the processing unit 130 to perform work stably on the substrate work device 110. 【0035】 Figure 7 is a perspective view showing the connection between the automated guided vehicle (AGV) 200 and the rear carriage 133. The AGV 200 is a device equipped with a driving force that can autonomously travel on the floor surface 300. The AGV 200 is equipped with a pair of second connecting parts 210 that connect to a pair of first connecting parts 138 provided on the rear carriage 133 of the processing device 130. By connecting the first connecting parts 138 and the second connecting parts 210, the AGV 200 can transport the processing device 130 in any direction, including the attachment / detachment direction (Y-axis direction in the figure), the left-right direction (X-axis direction in the figure), and diagonal directions between these directions. Furthermore, even when the first connecting parts 138 and the second connecting parts 210 are connected, vertical displacement (Z-axis direction in the figure) is permitted. As a result, even if the rear carriage 133 tilts relative to the AGV 200 due to unevenness in the floor surface 300, the AGV 200 can transport the processing device 130 without the connection being released. 【0036】 Furthermore, the second connecting section 210 can be automatically attached to and detached from the first connecting section 138. After the automated guided vehicle 200 attaches the processing device 130 to the substrate processing device 110, the connection between the first connecting section 138 and the second connecting section 210 can be released, allowing only the automated guided vehicle 200 to move. Additionally, the automated guided vehicle 200 can autonomously drive to connect the first connecting section 138 and the second connecting section 210 to the processing device 130 attached to the substrate processing device 110, and then detach the processing device 130 from the substrate processing device 110 and transport it on the floor surface 300. 【0037】 It should be noted that the present invention is not limited to the embodiments described above. For example, other embodiments of the present invention may be realized by arbitrarily combining the components described herein, or by excluding some of the components. Furthermore, modifications obtained by applying various modifications to the above embodiments that a person skilled in the art could conceive of without departing from the spirit of the present invention, that is, the meaning indicated by the wording in the claims, are also included in the present invention. 【0038】 For example, although the embodiment described a case where the slope 114 is provided on the guide member 111, the slope 114 may be provided on at least one of the guide member 111 and the guided member 134. 【0039】 Furthermore, although the embodiment described the case where the roller is provided on the guided member 134, the roller may be provided on at least one of the guide member 111 and the guided member 134. For example, the vertical axis roller 144 may be provided on the guide member 111 and the horizontal axis roller 143 on the guided member 134. Or vice versa; the mounting locations of the rollers may be set arbitrarily. 【0040】 Furthermore, the positioning portion 115 is not limited to a V-groove shape; as shown in Figure 8, it may also be a wall-shaped positioning portion 115 that restricts further movement of the guided member 134 by contacting it. Also, the positioning portion 115 only needs to be provided on at least one of the guide member 111 and the guided member 134. [Industrial applicability] 【0041】 The present invention can be used for a processing device that travels on a floor where a substrate-to-substrate work line, which consists of substrate-to-substrate work devices, is installed, and performs work on the substrate-to-substrate work devices mounted thereon, and for a substrate-to-substrate work system equipped with said processing device. [Explanation of Symbols] 【0042】 100-Player PCB Work System 110 Substrate work device 111 Guide member 112 Support surface section 113 Wall section 114 Slope 115 Positioning section 116 Tapered surface 130 Processing Unit 131 Processing Unit 132 Front bogie 133 Rear truck 134 Guided member 135 Front Wheel 136 Rear wheel 137 Rear end surface 138 First connection part 140 bogie axles 141 Shaft 142 gaps 143 Horizontal axis roller 144 Vertical axis roller 145 Base 200 Automated Guided Vehicles 210 Second connection part 300 floor surface

Claims

[Claim 1] A substrate work system comprising a substrate work device for performing work on a substrate, and a processing device that is transported on the floor surface on which the substrate work device is installed and attached to and detached from the substrate work device, The aforementioned substrate work apparatus is The apparatus is equipped with a guide member that guides the movement of the apparatus when it is installed. The aforementioned processing apparatus is When attached to the aforementioned substrate handling device, the front trolley is positioned on the side closer to the substrate handling device, and the rear trolley is positioned on the side further away from the device. The system includes a guided member attached to the front trolley, which engages with the guide member to determine the position of the processing device relative to the substrate work device, The rear trolley is pivotably connected to the front trolley around a trolley axle that extends in the direction of attachment and detachment of the processing device to the substrate work device. Circuit board work system. [Claim 2] The aforementioned substrate work apparatus is It comprises a pair of parallel guide members that protrude in the attachment / detachment direction within a horizontal plane, The aforementioned processing apparatus is Each of the pair of guide members comprises a pair of guided members corresponding to each other. The substrate handling system according to claim 1. [Claim 3] The guide member and the guided member are provided with rollers that roll in contact with the other member. The substrate handling system according to claim 1. [Claim 4] At least one of the guide member and the guided member is provided with a slope that inclins in a direction that raises the front carriage as the processing device approaches the substrate work device. The substrate handling system according to claim 1. [Claim 5] The aforementioned slope reduces the load applied to the front wheels of the front bogie. The substrate handling system according to claim 4. [Claim 6] At least one of the guide member and the guided member is provided with a positioning section that determines the position of the processing device relative to the substrate work device in the attachment / detachment direction. The substrate handling system according to claim 1. [Claim 7] A processing device that is transported on the floor surface where a substrate processing device is installed to perform work on a substrate, and is attached to and detached from the substrate processing device, When attached to the aforementioned substrate handling device, the front trolley is positioned on the side closer to the substrate handling device, and the rear trolley is positioned on the side further away from the device. The apparatus comprises a guided member attached to the front trolley, which engages with a guide member provided by the substrate work apparatus to determine the position of the processing apparatus relative to the substrate work apparatus, The rear trolley is pivotably connected to the front trolley around a trolley axle that extends in the direction of attachment and detachment of the processing device to the substrate work device. Processing device.