Surface modification device

Abstract

To provide a ceramic square pipe that is easy to hold and does not cause problems even at high temperatures.SOLUTION: On each of a pair of opposing outer walls of a ceramic cylinder body 11a of a square shape in cross section, linear convex portions 11b, 11b extending in the axial direction of the cylinder body 11a are included. The linear convex portions 11b, 11b can be held by an electrode holder 12 having linear concave portions 12b, 12b corresponding to the linear convex portions 11b, 11b.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] This invention relates to Surface modification device .

Background Art

[0002] As a surface modification device using corona discharge, as shown in FIG. 5, a discharge electrode 1 in which a rod-shaped metal electrode 3 is inserted into a ceramic round pipe 2 is known. This discharge electrode 1 is provided so as to face a grounded processing roller R that conveys a film F to be processed. When a high voltage is applied to the metal electrode 3, discharge occurs between the round pipe 2 having a circular cross section of the discharge electrode 1 and the processing roller R.

[0003] Since the surface of the film F is modified by the energy of the above discharge, the discharge electrode 1 requires a length corresponding to the processing width of the film F. Also, the discharge state depends on the magnitude of the applied voltage and the distance between the discharge electrode 1 and the processing roller R. In order to obtain a uniform processing effect, it is necessary to maintain a uniform distance between the discharge electrode 1 and the processing roller R.

[0004] Therefore, the entire length of the round pipe 2 is held by the electrode holder 4 shown in FIG. 5, and this electrode holder 4 is fixed to a processing chamber or the like via a connecting member 5. The electrode holder 4 includes a holding recess 4a having an arc shape of a semicircle or more along the outer periphery of the round pipe 2 on the side facing the processing roller R. The round pipe 2 is inserted into the holding recess 4a and slidably held. Therefore, even if the discharge electrode 1 thermally expands and expands and contracts in the axial direction, its displacement can be absorbed by axial movement, and the discharge electrode 1 does not bend and the distance from the processing roller R does not become non-uniform.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

[0006] Although the round pipe 2 described above is cylindrical, it is also conceivable to use a ceramic square pipe 6 as the discharge electrode. Figure 6 shows an example in which a square pipe 6 is used as the discharge electrode. Note that the metal electrode inside the square pipe 6 is omitted in this example. In order to hold the square pipe 6 in a retaining recess such as the electrode holder 4, the electrode holder 7 must cover all four sides of the outer wall of the square pipe (see Figure 6). As a result, a portion of the surface of the square pipe 6 facing the processing roller R is covered by the electrode holder 7, preventing it from approaching the processing roller R and thus preventing the generation of efficient discharge.

[0007] Therefore, when using the square pipe 6, as shown in Figure 7, a long, plate-shaped support member 8 made of resin, for example, was bonded to one surface of the square pipe 6 with adhesive, and this support member 8 was attached to a retaining member 9 fixed to the main body of the device (not shown) with a set screw 10. Thus, in a discharge electrode using a square pipe 6, the entire outer surface of the square pipe 6 directly faces the processing roller R, allowing for a larger discharge area compared to a round pipe.

[0008] However, when the discharge electrode became hot due to the discharge, the square pipe 6 sometimes detached from the support member 8 due to differences in expansion rates between the square pipe 6 and the support member 8, as well as deterioration of the adhesive due to heat. The purpose of this invention , high No problems occur even when the temperature rises. Surface modification device The objective is to provide. [Means for solving the problem]

[0009] The first invention is a square pipe inside electrode housing space A surface modification apparatus comprising a discharge electrode containing a metal electrode and a holding means for holding the discharge electrode, wherein the square pipe is a ceramic cylindrical body with a square cross-section. In the above electrode housing space,A pair of opposing exterior walls surface Each of these is provided with a linear projection or linear recess extending in the axial direction of the cylindrical body, The linear protrusions or recesses are provided at the center of the short side of the outer wall surface, and the cross-section of the cylindrical body is divided into two identical sections by a line connecting a pair of the linear protrusions or a line connecting the linear recesses. The above-described retaining means comprises a retaining space having a U-shaped cross-section, and linear recesses or linear protrusions provided on each of a pair of opposing inner walls of the retaining space, corresponding to the linear protrusions or linear recesses, and the linear recesses or linear protrusions of the retaining means slidably hold the linear protrusions or linear recesses of the square pipe in the axial direction. [Effects of the Invention]

[0012] According to the first invention, a linear protrusion or linear recess formed on the outer wall can be held by a holding means having a linear recess or linear protrusion. Furthermore, the square pipe can be slidable axially relative to the holding means. Therefore, even if the square pipe undergoes thermal expansion, it moves axially within the cylinder body, preventing the square pipe from bending. Thus, It is easy to maintain linearity in the discharge electrode, By maintaining a constant distance from the counter electrode, uniform processing can be achieved.

[0013] Also, corner Since one entire surface of the outer wall of the pipe is exposed from the retaining means , release The area in which the electrical electrode directly faces the counter electrode becomes larger, allowing for a larger discharge area.

[0014] moreover Furthermore, the square pipe can be held by the same holding means even if its orientation is reversed across the linear protrusion or linear recess. Therefore, if a specific outer wall surface exposed from the holding means becomes contaminated or damaged, the exposed surface can be easily changed by reversing its orientation across the linear protrusion or linear recess. [Brief explanation of the drawing]

[0015] [Figure 1] Figure 1 is a cross-sectional view of the square pipe according to the first embodiment. [Figure 2] Figure 2 is a side view of the square pipe according to the first embodiment. [Figure 3] Figure 3 is a side view of the apparatus using square pipes according to the first embodiment. [Figure 4] FIG. 4 is a side view of the apparatus using the square pipe of the second embodiment. [Figure 5] FIG. 5 is a side view of the apparatus using a conventional discharge electrode. [Figure 6] FIG. 6 is a side view of the apparatus using a conventional square pipe. [Figure 7] FIG. 7 is a side view of another usage example of the conventional square pipe, different from FIG. 5.

BEST MODE FOR CARRYING OUT THE INVENTION

[0016] [First Embodiment] The first embodiment of this invention will be described with reference to FIGS. 1 to 3. FIG. 1 is a cross-sectional view of the square pipe, FIG. 2 is a side view of the square pipe, and FIG. 3 is a side view of the apparatus using the square pipe. As shown in FIGS. 1 and 2, the square pipe 11 of the first embodiment includes a cylindrical main body 11a made of square ceramic, and linear protrusions 11b, 11b extending in the axial direction of the cylindrical main body 11a are provided on each of a pair of opposing outer walls thereof.

[0017] The linear protrusion 11b is provided such that its cross-sectional shape is an isosceles triangle and its apex is located at the center of the short side a of the outer wall. The short side a is, as shown in FIG. 2, a side orthogonal to the long side b along the axial direction of the cylindrical main body 11a. That is, the linear protrusion 11b is provided at the center of the short side a of the outer wall where the linear protrusion 11b is formed. Therefore, the distance L1 from the apex of the linear protrusion 11b to one long side b and the distance L2 to the other long side b are equal.

[0018] The case where the square pipe 11 of this first embodiment is used as a discharge electrode of a surface modification apparatus will be described. FIG. 3 is a side view of a surface modification apparatus for modifying the surface of a film using discharge energy. A discharge electrode is installed facing a processing roller R that conveys and supports the film. This discharge electrode is composed of the square pipe 11 and a metal electrode (not shown) inserted into the cylindrical main body 11a thereof. The space inside the cylindrical main body 11a is an electrode accommodation space.

[0019] The cylindrical body 11a of the square pipe 11 of the discharge electrode is held by a resin electrode holder 12, which is a holding means, and is fixed to a device body (not shown) via a connecting member 13. The electrode holder 12 has a U-shaped retaining recess 12a, and linear recesses 12b, 12b on opposing surfaces of its inner wall.

[0020] The linear recesses 12b, 12b described above are shaped to slidably hold the linear protrusions 11b, 11b formed on the outer wall of the cylindrical body 11a. The electrode holder 12 has a length in the axial direction of the cylindrical body 11a, but its length is shorter than that of the cylindrical body 11a. Therefore, by arranging multiple electrode holders 12 along the cylindrical body 11a at predetermined intervals, the cylindrical body 11a is held at multiple points by the multiple electrode holders 12.

[0021] In this embodiment, three retaining recesses 12a are formed in one electrode holder 12 along the circumferential direction of the opposing processing roller R, and three square pipes 11 are each held by the electrode holder 12 so as to face the processing roller R. Furthermore, reference numeral 12c denotes a screw hole that penetrates from the outer wall of the electrode holder 12 to the retaining recess 12a, and a set screw (not shown) is screwed into this screw hole 12c so that its tip can press against the cylindrical body 11a.

[0022] [Effects, etc.] As described above, the cylindrical body 11a of the square pipe 11 is held in place by the linear protrusions 11b, 11b being fitted into the linear recesses 12b, 12b formed in the U-shaped holding recess 12a. This allows the outer wall on the side facing the processing roller R to be largely exposed from the electrode holder 12. As a result, the cylindrical body 11a can be positioned so that the outer wall surface on the side facing the processing roller R is closer to the processing roller R. Therefore, when a square pipe is used as the discharge electrode, the discharge area can be made larger than that of a round pipe. Furthermore, even if the discharge electrode becomes hot due to the discharge and expands due to thermal stress, the cylindrical body 11a of the square pipe 11 does not bend and the distance from the processing roller R does not change in any part, because the linear protrusions 11b, 11b slide against the linear recesses 12b, 12b. Therefore, a uniform surface modification treatment can be achieved.

[0023] Furthermore, the linear protrusions 11b, 11b are located at the center of the short side a on the outer wall surface where they are formed. Therefore, even when rotated 180°, the cylindrical body 11a can be held by the electrode holder 12 in the same manner as in Figure 3. If the surface facing the processing roller R, which is exposed from the electrode holder 12, deteriorates due to discharge, the surface facing the processing roller R can be changed to the side of the retaining recess 12a, and the new side can become the surface facing the processing roller R. In other words, the lifespan of the discharge electrode can be doubled.

[0024] [Second Embodiment] Figure 4 is a side view of a surface modification apparatus in which a square pipe 14 is used as a discharge electrode in a second embodiment of the present invention. In the second embodiment, the square pipe 14 is provided with linear recesses 14b, 14b extending in the axial direction of the cylindrical body 14a on each of a pair of opposing outer walls of the outer wall of the ceramic cylindrical body 14a.

[0025] The linear recess 14b described above has an isosceles triangle cross-section, and its vertex is positioned at the center of the shorter side of the outer wall. The shorter side is the side perpendicular to the longer side along the axial direction of the cylindrical body 14a (see Figure 2). In other words, the linear recess 14b is located at the center of the shorter side of the outer wall on which the linear recess 14b is formed. Therefore, the distance from the center of the linear recess 14b to one of the longer sides is equal to the distance from the center of the linear recess 14b to the other long side.

[0026] Figure 4 is a side view of a surface modification apparatus for modifying the surface of a film using discharge energy. A discharge electrode is installed opposite the processing roller R that transports and supports the film. This discharge electrode consists of the square pipe 14 and a metal electrode (not shown) inserted inside the cylindrical body 14a. The space inside the cylindrical body 14a is the electrode housing space.

[0027] The cylindrical body 14a of the square pipe 14 of the discharge electrode described above is held by a resin electrode holder 15, which is a holding means, and is fixed to a device body (not shown) via a connecting member 13. The electrode holder 15 has a U-shaped retaining recess 15a and linear protrusions 15b, 15b on opposing surfaces of its inner wall.

[0028] These linear protrusions 15b, 15b are shaped to slidably hold the linear recesses 14b, 14b formed on the outer wall of the cylindrical body 14a. The electrode holder 15 has a length in the axial direction of the cylindrical body 14a, but its length is shorter than that of the cylindrical body 14a. Therefore, by arranging multiple electrode holders 15 along the cylindrical body 14a at predetermined intervals, the cylindrical body 14a is held at multiple points by these electrode holders 15.

[0029] In this embodiment, three retaining recesses 15a are formed in one electrode holder 15 along the circumferential direction of the opposing processing roller R, and three square pipes 14 are each held by the electrode holder 15 so as to face the processing roller R. Furthermore, reference numeral 15c denotes a screw hole that penetrates from the outer wall of the electrode holder 15 to the retaining recess 15a, and a set screw (not shown) is screwed into this screw hole 15c so that its tip can press against the cylindrical body 14a.

[0030] [Effects, etc.] As described above, this second embodiment includes a cylindrical body 14a in which the linear protrusions 11b formed on the outer wall surface of the cylindrical body 11a of the first embodiment are replaced with linear recesses 14b, and an electrode holder 15 corresponding to it is provided. Therefore, the operation and effect are the same as in the first embodiment.

[0031] In other words, the cylindrical body 14a is held in place by the linear protrusions 15b, 15b formed in the U-shaped retaining recess 15a, which are the linear recesses 14b, 14b. This allows the outer wall on the side facing the processing roller R to be largely exposed from the electrode holder 15. As a result, the outer wall surface of the cylindrical body 14a facing the processing roller R can be brought closer to the processing roller R. Therefore, when a square pipe is used as the discharge electrode, the discharge area can be made larger than that of a round pipe. Furthermore, by allowing the linear protrusions 15b, 15b to slidably hold the linear recesses 14b, 14b on the outer wall surfaces of the cylindrical body 14a, the effects of thermal expansion of the cylindrical body 14a can be suppressed. Even if the discharge electrode undergoes thermal expansion, the linear recesses 14b, 14b slide against the linear protrusions 15b, 15b, preventing the discharge electrode from bending and causing a partial change in its distance from the processing roller R. Therefore, a uniform surface modification treatment can be achieved.

[0032] Furthermore, the linear recesses 14b, 14b are located at the center of the shorter side on the outer wall surface where they are formed. Therefore, even when rotated 180°, the cylindrical body 14a can be held by the electrode holder 15 in the same manner as in Figure 3. If the surface facing the processing roller R deteriorates due to discharge, the facing surface can be changed to the side of the retaining recess 15a, and the new side can become the facing surface of the processing roller R. In other words, the lifespan of the discharge electrode can be doubled, just as in the first embodiment.

[0033] In the first and second embodiments described above, a single electrode holder is used to hold multiple square pipes 11 and 14, but the number of cylindrical bodies held simultaneously can be any number. Furthermore, any configuration that utilizes linear protrusions or linear recesses formed on the cylindrical bodies 11a and 14a is acceptable, and the shape of the holding means is not limited to the embodiments described above.

[0034] Furthermore, the square pipes 11 and 14 can be used for purposes other than discharge electrodes. For example, when used as a cover member to cover the heating element of a heater, deflection due to thermal expansion can be prevented if the linear protrusions or recesses of the cover member are held by the linear recesses or protrusions of the holding means that holds them. If the ceramic cover member deflects, stress may concentrate in certain areas, potentially causing damage, or the heating element inside the cover member may bend, leading to partial overheating. Furthermore, when a retaining mechanism is used to surround the outer wall of the cylindrical body, the exposed area of ​​the square pipe can be increased compared to that of a round pipe. The shape of the linear protrusions or linear recesses formed on the cylindrical body is not particularly limited. [Industrial applicability]

[0035] It is particularly useful as a discharge electrode in surface modification equipment. [Explanation of Symbols]

[0036] 11,14 square pipe 11a,14a Cylinder body 11b Linear protrusion 14b Linear recess 12,15 (Holding means) Electrode holder 12b Linear recess (of the retaining means) 15b Linear protrusion (of the retaining means) a Short side

Claims

[Claim 1] A discharge electrode in which a metal electrode is housed in an electrode housing space inside a square pipe, A surface modification apparatus comprising a holding means for holding the discharge electrode, The above square pipe is, In a ceramic cylindrical body with a square cross-section, each of the pair of outer wall surfaces facing each other across the electrode housing space is provided with a linear protrusion or linear recess extending in the axial direction of the cylindrical body. The linear protrusions or recesses are provided at the center of the short side of the outer wall surface, and the cross-section of the cylindrical body is divided into two identical sections by a line connecting a pair of the linear protrusions or a line connecting the linear recesses. The above-mentioned retaining means is A holding space with a U-shaped cross-section, Provided on each of the opposing pairs of inner walls of the above-mentioned holding space, and comprising a linear recess or linear protrusion corresponding to the linear projection or linear recess, A surface modification device in which the linear recess or linear protrusion of the square pipe is held axially so as to be slidable by the linear recess or linear protrusion of the holding means.

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