Substrate handling system and processing apparatus

Abstract

To correct a deformation of a decision mechanism.SOLUTION: A work system for substrate 100 comprises: a work device for substrate 110; a processor 130 that is attached / detached to / from the work device for substrate 110; and a decision mechanism 150 for determining a physical relation of the processor 130 with respect to the work device for substrate 110. The decision mechanism 150 comprises: a pair of first members 151 that are tabular and are arranged to be opposite to each other so as to be spaced in the width direction; a pair of second members 152 that move relatively along the first members 151; and at least two engagement sets 159, each of which is a set of an insertion member 153 and a member 154 to be inserted that are engaged with each other in an attaching and detaching direction and have a width direction positional relation determined in an engaged state. The first members 151 are attached to the work device for substrate 110. The second members 152 are attached to the processor 130. The members 154 to be inserted are attached to the first members 151. The insertion members 153 are attached to the second members 152. The engagement sets 159 are arranged so as to be spaced from each other in the vertical direction.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a substrate-facing work system that performs work on a substrate, and a processing device included in the substrate-facing work system.

Background Art

[0002] Conventionally, there is a processing device that is transported on the floor surface where a substrate-facing work device that performs work on a printed circuit board or the like is installed and is attached to the substrate-facing work device. Specifically, a component supply device, which is one of the processing devices that automatically supplies components, particularly carrier tapes, to a component mounting device, which is one of the substrate-facing work devices, is transported on the floor surface and attached to the component mounting device.

[0003] Patent Document 1 describes a technique in which a positioning unit composed of a pair of rails is provided in a component supply device, and when the component supply device is attached to a component mounting device, the component supply device is guided through the positioning unit by guide means attached to the component mounting device, and the misalignment of the component supply device with respect to the component mounting device is corrected.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The conventional guide mechanism provided with a positioning unit has high rigidity, and deformation of the guide mechanism is not assumed. However, the inventor has found that a positioning unit that protrudes from the component mounting device and extends long may be deformed by gravity or the like.

[0006] The present invention has been made based on the inventor's findings, and aims to provide a substrate-facing work system that can be correctly positioned and a processing device. [Means for solving the problem]

[0007] To achieve the above objective, one of the present inventions is a substrate work system comprising: a substrate work device for performing work on a substrate; a processing device that is transported on the floor surface on which the substrate work device is installed and attached to and detached from the substrate work device; and a determination mechanism for determining the positional relationship of the processing device with respect to the substrate work device, wherein the determination mechanism is plate-shaped and extends in the attachment / detachment direction along a plane including the vertical direction, and is arranged opposite to each other with a gap in the width direction perpendicular to the attachment / detachment direction in the horizontal plane, and comprises a pair of second members that move relatively along each of the first members, and fits together and engages in the attachment / detachment direction The device comprises a fitting set which is a pair of an insertion member and an insertion member whose positional relationship in the width direction is determined when the device is in a certain state, one of a pair of first members and a pair of second members is attached to the substrate processing device and the other is attached to the processing device, one of the first member and the second member located on one side in the width direction to which the insertion member is attached and the other to which the insertion member is attached, one of the first member and the second member located on the other side in the width direction to which the insertion member is attached and the other to which the insertion member is attached, and the fitting sets on both sides in the width direction are spaced apart in the vertical direction.

[0008] Furthermore, in order to achieve the above objective, another processing apparatus of the present invention is a processing apparatus that is transported on a floor surface on which a substrate work apparatus is installed and attached to and detached from the substrate work apparatus, and comprises a pair of first members that are plate-shaped and extend in the attachment / detachment direction along a plane including the vertical direction, and are spaced apart and facing each other in a width direction perpendicular to the attachment / detachment direction in the horizontal plane, or a pair of second members that move relatively along each of the first members, and provided in the processing apparatus, the first member or the second member which is located on one side in the width direction fits into the attachment / detachment direction, and the positional relationship in the width direction is determined when fitted, and is spaced apart in the vertical direction, and comprises two insertion members or two inserted members which are spaced apart in the vertical direction, and provided in the processing apparatus, the first member or the second member which is located on the other side in the width direction, and comprises two insertion members or two inserted members which are spaced apart in the vertical direction. [Effects of the Invention]

[0009] According to the present invention, when the fitting set is fitted together, the first member and the second member restrain each other, and the deformation of the determination mechanism converges in a direction that eliminates deformation. [Brief explanation of the drawing]

[0010] [Figure 1] This is a perspective view showing a circuit board work system. [Figure 2] This is a perspective view showing a circuit board handling device. [Figure 3] This is a perspective view showing the decision mechanism along with the auxiliary work device and processing device, which are partially transparent. [Figure 4] This is a perspective view showing one side of the decision-making mechanism. [Figure 5] This is a top view showing example 1 of the operation of the circuit board handling system. [Figure 6] This is a top view showing example 2 of the operation of the circuit board work system. [Figure 7] This is a top view showing example 3 of the operation of the circuit board work system. [Figure 8]This is a perspective view showing another example of a decision-making mechanism. [Figure 9] This is a perspective view showing another example of a decision-making mechanism. [Figure 10] This is a perspective view showing another example of a decision-making mechanism (Example 3). [Figure 11] This is a perspective view showing another example of a decision-making mechanism, example 4. [Figure 12] This is a perspective view showing another example of a decision-making mechanism (Example 5). [Modes for carrying out the invention]

[0011] The following describes embodiments of the substrate processing system and processing apparatus according to the present invention with reference to the drawings. The following embodiments are provided as examples to illustrate the present invention and are not intended to limit it. For example, the shapes, structures, materials, components, relative positional relationships, connection states, numerical values, formulas, the content of each step in the method, and the order of each step shown in the following embodiments are examples and may include content not described below. Geometric expressions such as parallel and orthogonal may be used, but these expressions do not indicate mathematical rigor and include substantially acceptable errors and deviations. Similarly, expressions such as simultaneous and identical also include substantially acceptable ranges.

[0012] Furthermore, the drawings are schematic diagrams that have been appropriately emphasized, omitted, or had their proportions adjusted to illustrate the present invention, and therefore differ from the actual shape, positional relationships, and proportions. Also, the X, Y, and Z axes shown in the drawings represent orthogonal coordinates arbitrarily set for the purpose of explaining the drawings. In other words, the Z axis is not necessarily an axis along the vertical direction, and the X and Y axes are not necessarily located in the horizontal plane.

[0013] Furthermore, in the following, multiple inventions may be described comprehensively as a single embodiment. Also, some of the content described below is described as an optional component relating to the present invention.

[0014] FIG. 1 is a perspective view showing a substrate processing system 100. The substrate processing system 100 is a system for performing operations on a substrate (not shown), and includes a substrate processing apparatus 110, a processing apparatus 130, and a determination mechanism 150. In the case of this embodiment, the substrate processing system 100 includes an automated guided vehicle 200 for transporting the processing apparatus 130.

[0015] FIG. 2 is a perspective view showing the substrate processing apparatus. The substrate processing apparatus 110 is not particularly limited as long as it is an apparatus that performs operations on a substrate, such as mounting components on the substrate. For example, examples of the substrate processing apparatus 110 include a solder printing apparatus that prints solder paste on the surface of a printed circuit board or the like, a component mounting apparatus that mounts components on a substrate, a reflow furnace that melts solder paste by heating and mechanically and electrically connects components to the substrate by cooling, and other apparatuses incorporated in a circuit board manufacturing line. The substrate processing apparatus 110 also includes an inspection apparatus that performs inspections in each process of performing operations on the substrate, a transfer apparatus that connects between the apparatuses and transfers substrates and the like during manufacturing, and the like.

[0016] In the case of this embodiment, the substrate processing apparatus 110 includes a substrate processing apparatus main body 111 and a sub-processing apparatus 112.

[0017] The substrate processing apparatus main body 111 is an apparatus that mainly performs operations on the substrate. For example, when the substrate processing apparatus 110 is a component mounting apparatus, the substrate processing apparatus main body 111 mounts components on the substrate.

[0018] The auxiliary work device 112 is a device that is attached to and detached from the main board work device body 111 and performs secondary work on the board. For example, if the main board work device 110 is a component mounting device, the auxiliary work device 112 automatically supplies components to be mounted on the board to the main board work device body 111. The auxiliary work device 112 may consist of an auxiliary work device body 113, such as a component supply unit that transports a carrier tape that holds components in a row to the main board work device body 111 and supplies components to the main board work device body 111, and a trolley 114 that holds the auxiliary work device body 113.

[0019] The processing device 130 is transported on the floor surface 300 where the board-to-board work device 110 is installed, and performs processing with the board-to-board work device 110 while attached to it. After processing is completed, it is removed from the board-to-board work device 110. The type of processing device 130 is not particularly limited. For example, the processing device 130 could be a carrier tape supply device that supplies a container containing carrier tapes to a component mounting device, which is one of the board-to-board work devices 110; a tray supply device that supplies trays on which components are placed; or a solder supply device that supplies solder paste to a solder printing device. Furthermore, the processing device 130 may not supply components, but rather be a device that accesses the board-to-board work device 110 and performs adjustment processing or the like.

[0020] In this embodiment, the processing device 130 is attached to the auxiliary processing device 112 and performs processing with the substrate processing device 110. After the processing is completed, it is removed from the auxiliary processing device 112 by the automated guided vehicle 200.

[0021] Figure 3 is a perspective view showing the determination mechanism 150 together with the partially transparent auxiliary work device 112 and the processing device 130. Figure 4 is a perspective view showing one side of the determination mechanism 150. The determination mechanism 150 is a structure that determines the positional relationship of the processing device 130 with respect to the substrate work device 110, and comprises a first member 151, a second member 152, an insertion member 153, and an insertion member 154. In this embodiment, the determination mechanism 150 includes a contact member 170.

[0022] The first member 151 is a member for positioning the processing device 130 relative to the substrate handling device 110. The first member 151 is a plate-shaped member that extends in the attachment / detachment direction (Y-axis direction in the figure) along a vertical plane (YZ plane in the figure) which includes the vertical direction, and is a pair of structural members that are spaced apart and facing each other in the width direction (X-axis direction in the figure) which is perpendicular to the attachment / detachment direction in the horizontal plane. The first member 151 may be attached to either the substrate handling device 110 or the processing device 130, but in this embodiment, the first member 151 is attached to the substrate handling device body 111.

[0023] In this embodiment, the pair of first members 151 protrude outward (in the direction of Y- in the figure) along the attachment / detachment direction (in the direction of Y- in the figure) in the horizontal plane (XY plane in the figure) and are arranged parallel to each other. The pair of first members 151 have a plane symmetrical shape with the plane including the vertical direction, which includes the attachment / detachment direction, as the plane of symmetry. The first member 151 comprises a wall surface portion 155 and a support surface portion 156 that supports the auxiliary work device 112.

[0024] The pair of wall sections 155 are arranged side by side in the width direction and facing each other. When the processing device 130 is attached to the substrate handling device 110, the pair of second members 152 are guided and moved relative to the pair of wall sections 155 via the insertion member 153, thereby determining the position of the processing device 130 relative to the substrate handling device 110 in the left-right direction. The pair of second members 152 may be positioned on the outside or inside of the pair of wall sections 155, but in this embodiment, the inside case is illustrated.

[0025] Each end of the pair of wall portions 155 (on the processing device 130 side) is provided with a tapered surface 163 that gradually separates from each other towards the end. When the processing device 130 is attached to the substrate handling device 110, the insertion member 153 attached to the second member 152 first comes into contact with the tapered surface 163. As a result, even if the processing device 130 is misaligned in the left-right direction relative to the substrate handling device 110, the tapered surface 163 guides the processing device 130 to the appropriate position.

[0026] The support surface portion 156 is a portion that protrudes in the width direction from the lower edge of the wall portion 155 and has a groove portion 157 on its upper surface that opens upward. The support surface portion 156 supports the auxiliary work device 112 from below via the engaging wheel 115 of the auxiliary work device 112 which engages with the groove portion 157, thereby lifting the trolley wheels 116 of the trolley 114 of the auxiliary work device 112 off the floor surface 300, or reducing the load of the auxiliary work device body 113 applied to the trolley wheels 116. The support surface portion 156 of the first member 151 determines the height position (position in the Z-axis direction in the figure) and width position of the auxiliary work device 112 relative to the substrate work device body 111. In addition, by being supported by the pair of support surface portions 156, the inclination of the auxiliary work device 112 around the attachment / detachment direction (so-called roll angle) relative to the substrate work device body 111 is determined.

[0027] The tip of the support surface portion 156 is provided with an upward-sloping ramp 158 that extends from the tip toward the main body 111 of the substrate work device. The ramp 158 causes the auxiliary work device 112 to rise as it approaches the main body 111 of the substrate work device when the auxiliary work device 112 is attached to the main body 111 of the substrate work device.

[0028] The second member 152 is a member that moves relative to each of the first members 151. The pair of second members 152 are structures that protrude from the processing device 130 toward the substrate handling device 110 in the attachment / detachment direction (Y axis direction in the figure) in the horizontal plane (XY plane in the figure) and are arranged parallel to each other. The pair of second members 152 have a plane symmetrical shape with the plane including the vertical direction, which includes the attachment / detachment direction, as the plane of symmetry. The shape of the second members 152 is not limited, but in this embodiment a frame structure is adopted, and the pair of second members 152 are fixed to both ends of the processing device 130 in the width direction.

[0029] The insertion member 153 and the inserted member 154 are components that fit together in the insertion / removal direction, and their positional relationship in the width direction is determined when they are fitted together, forming a fitting set 159. One of the insertion member 153 and the inserted member 154 is attached to the first member 151, and the other is attached to the second member 152. The determination mechanism 150 includes two pairs of fitting sets 159 that are arranged vertically along a pair of wall surfaces 155 of the first member 151.

[0030] The insertion member 153 is attached to either the first member 151 or the second member 152, but in this embodiment, the insertion member 153 is attached to the second member 152. The shape and structure of the insertion member 153 are not limited, but in this embodiment, the insertion member 153 is a roller attached to the second member 152 so as to be rotatable around a rotation axis that extends in the vertical direction. A portion of the insertion member 153 protrudes toward the tip from the frame structure of the second member 152, and a portion of it protrudes toward both sides in the width direction. The insertion member 153 is pivotally supported on the second member 152 so as to protrude from the upper and lower end surfaces of the second member 152.

[0031] The insertable member 154 is the member into which the insertion member 153 is inserted. The insertable member 154 relatively restricts the movement of the insertion member 153, at least in the width direction, when the inserted insertion member 153 is fitted. The insertable member 154 is attached to the side of the first member 151 and the second member 152 to which the insertion member 153 is not attached. In this embodiment, the insertable member 154 is attached to the first member 151 at an intermediate position in the attachment / detachment direction. The shape and structure of the insertable member 154 are not limited, but in this embodiment, the insertable member 154 has a concave shape that opens toward the processing device 130 in a plan view, and the pair of insertable members 154 are arranged with a vertical gap between them, corresponding to the insertion members 153 which are arranged with a vertical gap between them. Arrangement with a vertical gap between them means that they may or may not be arranged on a single axis extending in the vertical direction.

[0032] In this embodiment, the pair of insertable members 154, which are spaced apart in the vertical direction, extend together in the vertical direction. The insertable member 154 also includes a stopper portion 161 that rises vertically from the wall portion 155, and an opposing surface portion 162 that protrudes from the tip of the stopper portion 161 along the wall portion 155 toward the processing device 130. The insertable member 154 is composed of the stopper portion 161, the opposing surface portion 162, and a part of the wall portion 155 that faces the opposing surface portion 162. In other words, the insertable member 154 shares a part with the wall portion 155 which is flush with the wall portion 155. The opposing surface portion 162 of the insertable member 154 and the portion of the wall portion 155 that faces the opposing surface portion 162 contact the insertion member 153 at least one point in the width direction. The stopper portion 161 of the insertion member 154 contacts the insertion member 153, thereby determining the position of the processing device 130 relative to the substrate work device 110 in the attachment / detachment direction.

[0033] The contact member 170 is attached to the second member 152 and contacts the first member 151, and is positioned at a distance from the fitting assembly 159 in the attachment / detachment direction. Positioning at a distance from the attachment / detachment direction means that it may or may not be positioned on a single axis extending in the attachment / detachment direction. In this embodiment, the contact member 170 is positioned at the same height as the fitting assembly 159, which is positioned at a distance from the vertical direction. The shape and structure of the contact member 170 are not limited, but in this embodiment, the contact member 170 is a roller attached to the second member 152 so as to be rotatable around a rotation axis extending in the vertical direction. The contact member 170 is positioned at a distance from the insertion member 153 toward the processing device 130 side, and a portion of it protrudes from the second member 152 toward both sides in the width direction. The contact member 170 is pivotally supported on the second member 152 so as to protrude from the upper end surface and the lower end surface of the second member 152. When the processing device 130 is attached to the substrate handling device 110, the contact member 170 moves while in contact with the wall portion 155 of the first member 151.

[0034] Next, the operation of the substrate handling system 100 when attaching the processing device 130 to the substrate handling device 110 will be described. Figures 5, 6, and 7 are top views showing the operation of the substrate handling system 100. In the following, the operation of one side of the determination mechanism 150 in the width direction (X-axis direction in the figures) may be described, but the same operation is performed on the other side as well. The effects achieved by the operation of both sides of the determination mechanism 150 in the width direction will also be described.

[0035] As shown in Figure 5, the automated guided vehicle (AGV) 200 transports the processing device 130 to a predetermined position so that a pair of second members 152 attached to the processing device 130 are parallel to a pair of first members 151 attached to the substrate processing device body 111. The auxiliary processing device 112 is positioned between the pair of first members 151 with its engaging ring 115 already engaged with grooves 157 provided in the support surface portion 156 of the first member 151, and is attached to the substrate processing device body 111. Subsequently, the AGV 200 moves the processing device 130 toward the auxiliary processing device 112. The insertion member 153 provided at the tip of the second member 152 contacts the tapered surface 163 provided at the tip of the first member 151, and rotates and moves along the tapered surface 163 as the processing device 130 approaches the substrate processing device 110. This corrects some of the misalignment even if the widthwise position of the processing device 130 is slightly off relative to the substrate processing device 110. Furthermore, the first member 151, which protrudes beyond the auxiliary work device 112 from the main body 111 of the substrate work device, is deformed due to its own weight and the load of the auxiliary work device 112, so this is a temporary correction of the misalignment.

[0036] Next, as shown in Figure 6, as the processing apparatus 130 moves further toward the auxiliary work apparatus 112, a pair of insertion members 153 come into contact with the inner surface of the wall portion 155, and a pair of contact members 170, which are spaced apart from the insertion members 153 in the attachment / detachment direction, come into contact with the wall portion 155, thereby provisionally determining the inclination (so-called yaw angle) of the processing apparatus 130 around the vertical direction (Z-axis direction in the figure) relative to the substrate work apparatus 110.

[0037] Next, as shown in Figure 7, the processing unit 130 moves toward the auxiliary work device 112, and the pair of insertion members 153 fit into the pair (integrated in this embodiment) insertion members 154. This restricts the movement of the insertion members 153 by the insertion members 154 in the attachment / detachment direction (Y-axis direction in the figure), and determines the position of the processing unit 130 relative to the auxiliary work device 112 in the attachment / detachment direction. Furthermore, the pair of insertion members 153 and the pair of insertion members 154, which are spaced apart in the vertical direction (Z-axis direction in the figure), fit together to form a fitting set 159, thereby restraining the insertion members 153 and insertion members 154 from each other. As a result, the processing unit 130, the second member 152, the fitting set 159, the first member 151, and the substrate work device body 111 become structurally connected, and consequently the deformation of the first member 151 is corrected, converging in a direction that eliminates the displacement of the processing unit 130 relative to the auxiliary work device 112. With the configuration and operation of the substrate work system 100 described above, the auxiliary work device 112 and the processing device 130 of the substrate work device 110 are connected in a precise positional relationship.

[0038] It should be noted that the present invention is not limited to the embodiments described above. For example, other embodiments of the present invention may be realized by arbitrarily combining the components described herein, or by excluding some of the components. Furthermore, modifications obtained by applying various modifications to the above embodiments that a person skilled in the art could conceive of without departing from the spirit of the present invention, that is, the meaning indicated by the wording in the claims, are also included in the present invention.

[0039] For example, as shown in Figure 8, the member to be inserted 154 may have a recessed portion with a hole that is recessed in the insertion / removal direction from the surface facing the insertion member 153. The insertion member 153 may be a pin-shaped, non-rotating, fixed member that fits into the hole in the member to be inserted 154. The hole and the insertion member 153 may have a tapered shape that is inclined in the same direction. The hole may be bottomed or through.

[0040] Furthermore, as shown in Figure 8, the contact member 170 may be made of a low-friction resin or the like, instead of a roller. The contact members 170 may also be spaced apart in the attachment / detachment direction.

[0041] Furthermore, as shown in Figure 9, the hole in the insertion member 154 may be an elongated hole extending in the vertical direction.

[0042] Furthermore, as shown in Figure 10, the contact member 170 may be positioned at a different height from the fitting assembly 159.

[0043] Furthermore, as shown in Figure 11, the determination mechanism 150 may be provided with three or more sets of fitting sets 159 (four sets in Figure 11), and at least one pair of fitting sets 159 may be spaced apart in the attachment / detachment direction. Also, it is not necessary to provide a contact member 170.

[0044] Furthermore, as shown in Figure 12, the concave shape of the insertion member 154 may be a V-groove. [Industrial applicability]

[0045] The present invention can be used for a processing device that travels on a floor where a substrate-to-substrate work line, which consists of substrate-to-substrate work devices, is installed, and performs work on the substrate-to-substrate work devices mounted thereon, and for a substrate-to-substrate work system equipped with said processing device. [Explanation of symbols]

[0046] 100-Player PCB Work System 110 Substrate handling device 111 Main body of circuit board handling device 112 Sub-work equipment 113 Auxiliary work device main body 114 bogies 115 Engaging Wheel 116 Bogie wheels 130 Processing Unit 150 Decision Mechanism 151 First component 152 Second component 153 Insertion Member 154 Inserted member 155 Wall section 156 Support surface section 157 Groove 158 Slope 159 Interlocking joint 161 Stopper 162 Opposing surface part 163 Tapered surface 170 Contact Member 200 Automated Guided Vehicles 300 floor surface

Claims

1. A substrate work system comprising: a substrate work device for performing work on a substrate; a processing device that is transported on the floor surface on which the substrate work device is installed and attached to and detached from the substrate work device; and a determination mechanism for determining the positional relationship of the processing device with respect to the substrate work device, The aforementioned decision mechanism is A pair of first members are plate-shaped and extend in the attachment / detachment direction along a plane including the vertical direction, and are arranged opposite each other with a gap between them in the width direction perpendicular to the attachment / detachment direction in the horizontal plane, A pair of second members that move relative to each of the first members, It comprises a fitting set which is a pair of an insertion member and an insertion member that fit together in the insertion / detachment direction and whose positional relationship in the width direction is determined when fitted together, One of the pair of first members and the pair of second members is attached to the substrate handling device, and the other is attached to the processing device. One of the first member and the second member, which are positioned on one side in the width direction, has the insertion member attached to it, and the other has the member to be inserted attached to it. One of the first member and the second member, which are positioned on the other side in the width direction, has the insertion member attached to it, and the other has the inserted member attached to it. On both sides in the width direction, the fitting sets are arranged with a gap between them in the vertical direction. Circuit board work system.

2. The second member moves along the opposing surfaces of the first member, The pair of fitting sets are positioned between the pair of first members. The substrate handling system according to claim 1.

3. Each of the inserted members has a concave shape in plan view, The insertable members, which are arranged with gaps in the vertical direction, extend together in the vertical direction. The insertion member contacts the concave-shaped insertion member at at least two points in the width direction. A substrate handling system according to claim 1 or 2.

4. The member to be inserted has a hole that is recessed in the insertion / removal direction from the surface facing the insertion member, The insertion member is pin-shaped and fits into a hole in the member to be inserted. A substrate handling system according to claim 1 or 2.

5. The hole in the member to be inserted is an elongated hole that is long in the vertical direction. The substrate handling system according to claim 4.

6. The aforementioned decision mechanism is The insertion member is attached to the second member to which the insertion member is attached, and the second member is provided with a contact member that contacts the first member, The contact member is positioned at a distance from the fitting assembly in the attachment / detachment direction. A substrate handling system according to claim 1 or 2.

7. The contact member is positioned at the same height as the fitting assembly. The substrate handling system according to claim 6.

8. The contact member is positioned at a different height from the fitting assembly. The substrate handling system according to claim 6.

9. The aforementioned determination mechanism comprises three or more sets of the aforementioned fitting sets, At least one pair of the aforementioned fitting sets are arranged with a gap between them in the attachment / detachment direction. A substrate handling system according to claim 1 or 2.

10. At least one of the insertion members is a roller having a rotating shaft that extends in the vertical direction. A substrate handling system according to claim 1 or 2.

11. The aforementioned substrate work apparatus is a component mounting apparatus for mounting components onto the substrate, The processing apparatus is a tape cassette supply device that supplies a tape cassette containing a carrier tape for the components to the component mounting device. A substrate handling system according to claim 1 or 2.

12. The aforementioned substrate work apparatus is The system comprises a main body for handling substrates and a secondary work device that can be attached to and detached from the main body for handling substrates. The pair of first members or the pair of second members attached to the main body of the substrate work apparatus restrain the auxiliary work apparatus which is positioned between the pair of first members or the pair of second members attached to the main body of the substrate work apparatus. The substrate handling system according to claim 10.

13. A processing device that is transported on the floor surface where a substrate processing device is installed to perform work on a substrate, and is attached to and detached from the substrate processing device, A pair of first members, each in the shape of a plate extending in the attachment / detachment direction along a plane including the vertical direction, and arranged opposite to each other with a gap between them in the width direction perpendicular to the attachment / detachment direction in the horizontal plane, or a pair of second members that move relative to each of the first members, The first member or the second member provided in the processing apparatus, which is positioned on one side in the width direction, fits together in the insertion / removal direction, and the positional relationship in the width direction is determined when fitted together, and two insertion members or two insertion members arranged with a gap in the vertical direction, The first member or the second member provided in the processing apparatus and positioned on the other side in the width direction comprises two insertion members or two inserted members positioned at intervals in the vertical direction, A processing device equipped with the following features.

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