Information processing device, information processing method, and information processing program

Abstract

To provide an Information processing apparatus, an information processing method, and an information processing program, capable of performing imaging without excess or deficiency, regardless of an imaging magnification.SOLUTION: An acquisition unit 20 sequentially acquires, from a user terminal 12, images captured by a scanning electron microscope (SEM) 18 as moving through an imaging field of view and stores the acquired images in the database 26. A processing unit 22 derives a power spectrum of each image as a feature amount of the image on the basis of the images stored in the database 26, and determines the number of images captured for which a fluctuation rate of a power spectrum shape falls within a predetermined range as the number of images required for statistical processing. When the processing unit 22 determines that the number of images captured has reached the number of images required for the statistical processing, a transmission unit 24 notifies the user terminal 12 of the number of images required for the statistical processing in the user terminal 12.SELECTED DRAWING: Figure 1

Images