Dehumidifying efem with duct circulation structure using zeolite

Abstract

The present invention relates to an Equipment Front End Module (EFEM), and more specifically, to an EFEM comprising: a Front-Opening Unified Pod (FOUP) on which a substrate is loaded; a main body having a first space formed therein that communicates with the FOUP through a door and allows the transported substrate to stay there; a dehumidifier that dehumidifies by adsorbing moisture from a gas supplied to the first space onto a zeolite; a blower disposed spaced apart from the dehumidifier within the main body and supplying the dehumidified gas to the first space; and an internal circulation duct disposed on both sides inside the first space and providing a passage so that the gas can move and circulate to a second space formed between the dehumidifier and the blower, wherein the dehumidifier is disposed on the upper part of the main body.

Description

Technology Field

[0001] This embodiment relates to a dehumidifying EFEM (EQUIPMENT FRONT END MODULE). Background Technology

[0002] With the recent acceleration of the transition to an information society, the demand for highly integrated electronic devices is surging. Representative examples of these devices include high-resolution display devices and high-density, high-performance semiconductor devices, which are manufactured by integrating multiple electronic structures onto a single surface area through high-precision surface treatment processes.

[0003] Processes used in the manufacture of highly integrated electronic devices include thin film deposition, photolithography, and etching processes, and highly integrated electronic devices are manufactured by a composite process in which these different processes are applied one or more times.

[0004] A process system may have process processing devices such as an Equipment Front End Module (EFEM), a transfer robot, and a process chamber to apply multiple processes to a highly integrated electronic device. A substrate to be processed—for example, a semiconductor wafer—waits in the EFEM among these process processing devices, is moved to an appropriate process chamber by a transfer robot, and then undergoes the necessary processes.

[0005] The EFEM may have a Load Port Module (LPM), a Front-Opening Unified Pod (FOUP), an EFEM chamber, etc.

[0006] A load port module is a device to which a semiconductor wafer storage device called a pod is combined. Multiple semiconductor wafers can be loaded in the pod, and a transfer device including a transfer robot sequentially transfers the semiconductor wafers loaded in the pod to a process chamber. Although the processing of semiconductor wafers takes place in a cleanroom with a high level of cleanliness, semiconductor wafers can be loaded in the pod to provide an even higher level of cleanliness.

[0007] Moisture can react with fumes generated from process equipment to oxidize or etch the device. Additionally, moisture can react with fine reaction particles to form foreign substances. Such oxidation, etching, and / or formation of foreign substances can be factors that reduce the device yield. Since the substrate to be processed—e.g., a semiconductor wafer—resides in the EFEM for a significant amount of time, humidity control within process equipment such as the EFEM is recognized in the industrial field as a critical factor for improving yield.

[0008] Meanwhile, since moisture inside the EFEM in semiconductor wafer production equipment can increase the semiconductor defect rate, in order to improve this, the existing invention supplies nitrogen (N2) and simultaneously uses a dry rotor method to lower the humidity inside the EFEM.

[0009] The N2 supply method has a high N2 consumption due to continuous N2 usage, and in the case of the dry rotor, the temperature inside the EFEM rises because a hot air blower is used to regenerate the rotor.

[0010] Therefore, in order to reduce N2 usage and maintain the internal temperature of the EFEM at a low temperature, there is a need for a new dehumidification method that can remove moisture without using continuous heat regeneration, such as the dry rotor method. The problem to be solved

[0011] Against this backdrop, the objective of the present embodiment is, in one aspect, to provide a technology for reducing humidity within an EFEM.

[0012] In another aspect, the objective of the present embodiment is to provide a technology that can reduce the humidity of an EFEM while minimizing costs.

[0013] In another aspect, the objective of the present embodiment is to provide a technology that reduces humidity in key areas affecting the substrate without replacing the existing EFEM chamber.

[0014] In another aspect, the objective of the present embodiment is to provide a technology that can reduce the humidity of an EFEM without taking up much space.

[0015] In another aspect, the objective of the present embodiment is to provide a technology that uses zeolite to reduce N2 usage and can reduce the humidity of the EFEM while maintaining the internal temperature of the EFEM at a low temperature. means of solving the problem

[0016] To achieve the aforementioned objective, one embodiment provides an EFEM comprising: a Front-Opening Unified Pod (FOUP) on which a substrate is loaded; a main body having a first space formed therein that communicates with the FOUP through a door and allows the transported substrate to stay there; a dehumidifier that dehumidifies by adsorbing moisture from a gas supplied to the first space onto a zeolite; a blower disposed spaced apart from the dehumidifier within the main body and supplying the dehumidified gas to the first space; and an internal duct disposed on both sides inside the first space and providing a passage so that the gas can move and circulate to a second space formed between the dehumidifier and the blower, wherein the dehumidifier is disposed on the upper part of the main body.

[0017] In an EFEM according to one embodiment, an external circulation duct may be further included to provide a circulation passage so that gas inside the first space is supplied to the dehumidifier.

[0018] In an EFEM according to one embodiment, the dehumidifier may further include a moisture purification device in which the zeolite is provided and moisture of the gas is adsorbed onto the zeolite to perform dehumidification.

[0019] In an EFEM according to one embodiment, the water purification device may include a first water purification device and a second water purification device.

[0020] In an EFEM according to one embodiment, the moisture purification device may selectively use a first moisture purification device and a second moisture purification device to adsorb moisture from the gas and perform dehumidification.

[0021] In an EFEM according to one embodiment, the dehumidifier may further include a regeneration device that removes moisture adsorbed on the zeolite to regenerate it.

[0022] In an EFEM according to one embodiment, the regeneration device may include a heater that supplies heated gas to the regeneration device.

[0023] In an EFEM according to one embodiment, the dehumidifier may further include a blower that induces the circulation of the gas flowing between the main body and the dehumidifier.

[0024] In an EFEM according to one embodiment, the dehumidifier may further include a blower that induces the circulation of the gas flowing between the main body and the dehumidifier.

[0025] In an EFEM according to one embodiment, the blower may include a ring blower.

[0026] In an EFEM according to one embodiment, the dehumidifier may further include a dehumidifier valve that can be opened and closed to control the flow of the gas flowing inside.

[0027] In an EFEM according to one embodiment, the dehumidifier may further include at least one of a regeneration container gas intake port through which nitrogen (N2) is supplied and a regeneration container gas exhaust port through which nitrogen (N2) is discharged.

[0028] In an EFEM according to one embodiment, the dehumidifier may further include a moisture detection sensor at one end of the portion where the external circulation duct and the dehumidifier are connected.

[0029] In addition, to achieve the aforementioned purpose, one embodiment provides an EFEM comprising: a Front-Opening Unified Pod (FOUP) on which a substrate is loaded; a main body having a first space formed therein that is in communication with the FOUP through a door and in which the transported substrate can stay; a dehumidifier that dehumidifies by adsorbing moisture from a gas supplied to the first space onto a zeolite; a blower disposed spaced apart from the dehumidifier within the main body and supplying the dehumidified gas to the first space; and an internal duct disposed on both sides inside the first space and providing a passage so that the gas can move and circulate to a second space formed between the dehumidifier and the blower, wherein the dehumidifier is disposed on the side outside the main body.

[0030] In an EFEM according to one embodiment, the dehumidifier may further include a moisture purification device in which the zeolite is provided and moisture of the gas is adsorbed onto the zeolite to perform dehumidification.

[0031] In an EFEM according to one embodiment, the water purification device may include a first water purification device and a second water purification device.

[0032] In an EFEM according to one embodiment, the moisture purification device may selectively use a first moisture purification device and a second moisture purification device to adsorb moisture from the gas and perform dehumidification.

[0033] In an EFEM according to one embodiment, the dehumidifier may further include a regeneration device that removes moisture adsorbed on the zeolite to regenerate it.

[0034] In an EFEM according to one embodiment, the regeneration device may include a heater that supplies heated gas to the regeneration device.

[0035] In an EFEM according to one embodiment, the dehumidifier may further include a blower that induces the circulation of the gas flowing between the main body and the dehumidifier.

[0036] In an EFEM according to one embodiment, the blower may include a ring blower.

[0037] In an EFEM according to one embodiment, the dehumidifier may further include a dehumidifier valve that can be opened and closed to control the flow of the gas flowing inside.

[0038] In an EFEM according to one embodiment, the dehumidifier may further include at least one of a regeneration container gas intake port through which nitrogen (N2) is supplied and a regeneration container gas exhaust port through which nitrogen (N2) is discharged.

[0039] In an EFEM according to one embodiment, the dehumidifier may further include a moisture detection sensor at one end of the part where the gas is collected and the part where the dehumidifier is connected. Effects of the invention

[0040] As described above, according to the present embodiment, a technology for reducing humidity within an EFEM can be provided.

[0041] In addition, according to the present embodiment, the humidity of the EFEM can be reduced while minimizing costs, and the humidity in the key areas affecting the substrate can be reduced without replacing the existing EFEM chamber.

[0042] In addition, according to the present embodiment, the humidity of the EFEM can be reduced without occupying much space, and the humidity of the EFEM can be reduced without significantly increasing power consumption.

[0043] In addition, according to the present embodiment, a technology can be provided that uses zeolite to reduce the amount of N2 used and maintains the internal temperature of the EFEM at a low temperature while reducing the humidity of the EFEM. Brief explanation of the drawing

[0044] FIG. 1 is a side view showing the configuration of a process system according to one embodiment. FIG. 2 is a top view showing the configuration of a process system according to one embodiment. FIG. 3 is a drawing illustrating a first example technique for lowering the humidity of an EFEM chamber. FIG. 4 is a front view illustrating a second example technique for lowering the humidity of an EFEM chamber. FIG. 5 is a side view illustrating a second example technique for lowering the humidity of an EFEM chamber. FIG. 6 is a diagram illustrating the operation of a second example technology for lowering the humidity of an EFEM chamber. FIG. 7 is a drawing illustrating an embodiment of a second exemplary technology for lowering the humidity of an EFEM chamber. FIG. 8 is a drawing illustrating another embodiment of the second exemplary technology for lowering the humidity of the EFEM chamber. FIG. 9 is a drawing illustrating a third exemplary technique for lowering the humidity of an EFEM chamber. FIG. 10 is a diagram illustrating the operation according to the mode of the third example technology for lowering the humidity of the EFEM chamber. FIG. 11 is a diagram illustrating the operation according to the mode of the third example technology for lowering the humidity of the EFEM chamber. FIG. 12 is a diagram illustrating the operation according to the mode of the third example technology for lowering the humidity of the EFEM chamber. FIG. 13 is a drawing illustrating an embodiment of a third exemplary technology for lowering the humidity of an EFEM chamber. FIG. 14 is a drawing illustrating another embodiment of the third exemplary technology for lowering the humidity of the EFEM chamber. FIG. 15 is a drawing illustrating a fourth example technique for lowering the humidity of an EFEM chamber. FIG. 16 is a cross-sectional view of an EFEM according to one embodiment. FIG. 17 is a cross-sectional view of a dehumidifier according to one embodiment. FIG. 18 is a cross-sectional view of an EFEM according to one embodiment. FIG. 19 is a cross-sectional view of a dehumidifier according to one embodiment. FIG. 20 is a diagram illustrating a dehumidification performance test example of an EFEM according to one embodiment. FIG. 21 is a drawing for explaining a control device that can be used in an EFEM according to one embodiment. Specific details for implementing the invention

[0045] Some embodiments are described in detail below with reference to exemplary drawings. It should be noted that in assigning reference numerals to the components of each drawing, the same components are given the same reference numeral whenever possible, even if they are shown in different drawings. Furthermore, in describing the present invention, if it is determined that a detailed description of related known components or functions could obscure the essence of the invention, such detailed description is omitted.

[0046] Additionally, terms such as first, second, A, B, (a), (b), etc., may be used when describing components. These terms are intended only to distinguish the component from other components and do not limit the nature, order, or sequence of the component. Where it is stated that a component is "connected," "combined," or "joined" to another component, it should be understood that the component may be directly connected or joined to the other component, but that another component may also be "connected," "combined," or "joined" between each component.

[0047] FIG. 1 is a side view showing the configuration of a process system according to one embodiment, and FIG. 2 is a top view showing the configuration of a process system according to one embodiment.

[0048] Referring to FIGS. 1 and 2, the process system (100) may include an EFEM (110), a load lock device (120), a return chamber (130), a process chamber (140), etc.

[0049] The EFEM (110) is an interface module for supplying a substrate (W), such as a wafer, to a process chamber (140), and the substrate (W) can be introduced into and removed from the process system (100) through the EFEM (110).

[0050] The substrate (W) to be processed can stay in the EFEM before being transferred to the process chamber (140) and then be transferred to the process chamber (140) via the return chamber (130) when necessary.

[0051] The substrates (W) staying in the EFEM can be sequentially transferred to the load lock device (120). Then, the substrates (W) transferred to the load lock device (120) are transferred to the return chamber (130), and the return robot placed in the return chamber (130) transfers the substrates (W) to the process chamber (140) so that the substrates (W) can be processed.

[0052] The process system (100) may include a plurality of process chambers (140a, 140b, 140c), and each of the process chambers (140a, 140b, 140c) may apply different processes to the substrate (W). A return robot placed in the return chamber (130) may introduce the substrate (W) into the first process chamber (140a) to allow the first process to be applied to the substrate (W), and introduce the substrate (W) removed from the first process chamber (140a) into the second process chamber (140b) to allow the second process to be applied to the substrate (W). Additionally, the return robot may introduce the substrate (W) into the third process chamber (140c) to allow the third process to be applied to the substrate.

[0053] Doors (D1, D2, D3, D4) are arranged between each device to minimize the mixing of gases between each device. For example, a second door (D2) may be arranged between the EFEM (110) and the load lock device (120), a third door (D3) may be arranged between the load lock device (120) and the return chamber (130), and a fourth door (D4) may be arranged between the return chamber (130) and the process chamber (140). Additionally, each door (D1, D2, D3, D4) may be opened only when the substrate (W) is being moved and may remain closed at other times.

[0054] The EFEM (110) may include an EFEM chamber (112), a pod (114), a load port module (116), etc.

[0055] A number of substrates (W) can be loaded into the pod (114). The number of substrates (W) can be transferred sequentially to the EFEM chamber (112).

[0056] The pod (114) can be connected to the EFEM chamber (112) through the first door (D1). A transfer device may be placed inside the EFEM chamber (112), and when the first door (D1) is opened, the transfer device can take out the substrate (W) from the pod (114) and transfer it to the load lock device (120).

[0057] The EFEM (110) may include a plurality of pods (114a, 114b, 114c). Each pod (114a, 114b, 114c) may be connected to the EFEM chamber (112) at different locations. A transfer device placed in the EFEM chamber (112) may sequentially open first doors (D1a, D1b, D1c) placed in each pod (114a, 114b, 114c) and sequentially remove substrates (W) from each pod (114a, 114b, 114c).

[0058] The internal space of the pod (114) may be relatively narrow compared to the EFEM chamber (112). Because the pod (114) has a relatively narrow space, the gas atmosphere surrounding the substrate can be well controlled. For example, when a substrate such as a semiconductor wafer is exposed to moisture, oxygen, etc., an oxide film may form on its surface, but this problem can be minimized by purging the internal space of the pod (114) with N2 (nitrogen).

[0059] A load port module (116) supporting the pod (114) can supply N2 into the internal space of the pod (114). The load port module (116) may include an N2 supply device, N2 piping, a Mass Flow Controller (MFC), a filter, etc. N2 supplied from the N2 supply device can be delivered into the internal space of the pod (114) through the N2 piping, at which time the MFC can control the flow of the N2 fluid and a filter in the N2 distribution path can remove foreign substances.

[0060] According to this structure in which the load port module (116) purges N2 into the internal space of the pod (114), the time required to lower the internal humidity of the pod (114) can be shortened, the effect of suppressing contamination of a substrate (W), such as a semiconductor wafer, can be increased, static electricity generation during transport of the substrate (W) can be suppressed, the diffusion of particles can be prevented, and the possibility of corrosion of the substrate (W) by particles can be reduced.

[0061] Meanwhile, since moisture can react with fumes generated from process processing devices to oxidize or etch the device and can react with fine reaction particles to form foreign matter, it is important to minimize moisture within the EFEM (110). Since the pod (114) has a relatively narrow space, it may be easy to reduce humidity, but since the EFEM chamber (112) has a relatively wide space, it may not be easy to reduce humidity.

[0062] Various technologies have been attempted to lower humidity in these EFEM chambers, but most had problems such as being expensive or having low effectiveness.

[0063] FIG. 3 is a drawing illustrating a first example technique for lowering the humidity of an EFEM chamber.

[0064] Referring to FIG. 3, the N2 circulating EFEM chamber (10) can control the humidity in the space by circulating N2 (50) in the space where the substrate (W) is exposed.

[0065] An N2 supply pipe (311) may be connected to the upper side of the N2 circulating EFEM chamber (10), and a differential pressure exhaust unit (312) may be connected to the lower side. Additionally, a pod (20) may be connected to one side of the EFEM chamber (10).

[0066] The EFEM chamber (10) can supply N2 (50) into the internal space through the N2 supply pipe (311). The internal space of the EFEM chamber (10) may have a certain path formed through which N2 (50) can circulate, and the N2 (50) supplied through the N2 supply pipe (311) can circulate in the internal space along the path.

[0067] The EFEM chamber (10) can regulate the air pressure in the internal space through the differential pressure exhaust section (312) and regulate the density of N2 (50) in the internal space.

[0068] The pod (20) can be purged from N2 through a load port module (not shown).

[0069] The internal space of the pod (20) can be connected to the EFEM chamber (10) when the door is opened, and since both spaces are filled with N2, the humidity of the entire EFEM can be controlled to a low state.

[0070] Meanwhile, the N2 circulating EFEM chamber (10) can be designed with a sealed structure because N2 must not leak to the outside. However, since conventional EFEM chambers are not sealed structures, the problem of having to replace the EFEM chamber to introduce the N2 circulating EFEM chamber (10) may arise. Generally, replacing process equipment in a semiconductor manufacturing process results in enormous costs and time losses. Therefore, it may be necessary to apply other technologies that can minimize these costs and time losses.

[0071] FIG. 4 is a front view illustrating a second exemplary technique for lowering the humidity of an EFEM chamber. FIG. 5 is a side view illustrating a second exemplary technique for lowering the humidity of an EFEM chamber.

[0072] Referring to FIGS. 4 and 5, an EFEM chamber (112) according to one embodiment may include a first space (410) formed within a main body (411), a dehumidifier (420), a second space (430), a blower (440), and a filter (450). Additionally, it may include an external air intake port (466).

[0073] Additionally, the EFEM chamber (112) may include a penetration pipe (461) and may include a first valve (4601) between the dehumidifier (420) and the penetration pipe (461). Here, the first valve (4601) may be called a main valve or a main control valve. Additionally, a second valve (4602) may be included between the outside air intake (466) and the dehumidifier (420). The second valve (4602) may be called an outside air valve.

[0074] Additionally, the EFEM chamber (112) may include an exhaust device (not shown), a collection unit (480), and a perforated plate (481). Here, the perforated plate (481) may be a plate with perforations formed to collect gas, and the collection unit (480) may refer to a space where gas is collected.

[0075] The first space (410) may refer to an internal space formed within the main body (411), may be connected to the pod (114) through the door (D1), and may receive a substrate (W) through the door (D1).

[0076] A gas dehumidified through a dehumidifier (420) may flow through the first space (410). Here, the gas may include air, nitrogen (N2), and other gases, but is not limited thereto and may be varied as needed. The gas flowing through the first space (410) may be discharged to the outside. Additionally, the gas flowing through the first space (410) may be discharged through the lower part of the first space (410).

[0077] As dehumidified gas flows into the first space (410), contamination by moisture on the substrate (W) supplied to the first space (410) can be prevented, and a decrease in wafer production yield can be prevented.

[0078] The dehumidifier (420) can perform the function of removing moisture from the gas. Here, the dehumidifier can receive gas from the outside, dehumidify the supplied gas, and supply the dehumidified gas to the first space (410). The dehumidifier (420) may be formed as an integral unit by being placed inside the main body (411), or it may be formed as a detachable unit by being placed outside the main body (411).

[0079] Here, the dehumidifier (420) may be a heater type, and may have one of the forms of a moisture removal filter type dehumidifier, a compressor type dehumidifier, an electronic dehumidifier, and a regenerative type dehumidifier. Additionally, the dehumidifier (420) may be a dehumidifier using a moisture catalyst, and the dehumidifier (420) may be separated from the EFEM chamber (112) and may be used in a detachable manner.

[0080] The humidity of the gas passing through the dehumidifier (420) may be 10% or less, 9% or less, 8% or less, 7% or less, 6% or less, 5% or less, 4% or less, 3% or less, 2% or less, 1% or less, 0.5% or less, or 0.1% or less. Specifically, the humidity of the gas passing through the dehumidifier (420) may have a humidity of 5% or less, 4% or less, 3% or less, 2% or less, or 1% or less in an atmosphere of 20°C to 30°C, where humidity may refer to relative humidity.

[0081] The second space (430) may refer to a space formed between the dehumidifier (420) and the blower (440). The second space (430) may be an empty space, or various configurations may be placed therein as needed. Additionally, a control box used in the EFEM may be placed in the second space (430). Here, the control box may be a configuration that controls each configuration of the EFEM, or a configuration related to power supply to each configuration.

[0082] The blower (440) may be configured to supply dehumidified gas from the dehumidifier (420) to the first space (410). The blower (440) may include a fan (442). As the fan (442) rotates, the dehumidified gas from the dehumidifier (420) can be supplied to the first space (410), and the gas, having gained power through the blower (440), can have a flow in a certain direction within the first space (410). As an example, the gas within the first space (410) can flow downward—toward the ground. That is, the gas within the first space (410) can form a vertical laminar flow flowing from the upper side to the lower side. The blower (440) may be formed integrally by being placed inside the main body (411), or it may be formed detachably by being placed outside the main body (411). The blower (440) can receive gas directly from the dehumidifier (420), and in this case, the gas can be supplied to the first space (410) without a significant change in the flow of the gas, thereby reducing the power consumption that may occur in the blower (440).

[0083] The filter (450) can filter the gas coming from the blower (440). That is, the dehumidified gas can be supplied to the first space (410) by obtaining power from the blower (440) and passing through the filter (450). The filter (450) can remove impurities such as dust and dirt contained in the dehumidified gas. The position of the filter (450) can be placed between the first space (410) and the blower (440) as shown in FIG. 5, but is not limited thereto and can be changed in various ways as needed. The filter (450) may be placed within the main body (411) and formed integrally with the blower (440), or it may be formed so as to be detachable from the blower (440).

[0084] Here, the combined form of the blower (440) and the filter (450) can be called a fan-filter unit (FFU).

[0085] The penetration pipe (461) can be positioned to penetrate the second space (430), and the dehumidified gas from the dehumidifier (420) can move to the blower (440) through the penetration pipe (461), and the gas supplied to the blower (440) can be supplied to the first space (410) through the filter (450).

[0086] The penetration tube (461) may be positioned to penetrate the second space (430), as well as to penetrate a configuration placed in the second space (430). As an example, the penetration tube (461) may be positioned to penetrate a control box used in the EFEM.

[0087] The penetration tube (461) may be formed in a curved shape or manufactured in a straight shape. Additionally, the penetration tube (461) may be arranged in a horizontal direction, a vertical direction, or an inclined direction. As an example, the penetration tube (461) may be in a straight shape and arranged in a direction perpendicular to the ground, and such a penetration tube (461) may be called a direct penetration tube.

[0088] According to one embodiment, the EFEM chamber (112) may not include a configuration that provides a passage for gas, and the first space (410) may receive dehumidified gas from the dehumidifier (420) without passing through a separate configuration, and the first space (410) may receive dehumidified gas from the dehumidifier (420) without passing through a penetration pipe (461), and the first space (410) may receive dehumidified gas directly from the dehumidifier (420) without passing through a separate configuration.

[0089] The first valve (4601) can control the flow of gas between the dehumidifier (420) and the penetration pipe (461). Specifically, when the first valve (4601) is on, gas can flow, and when the first valve (4601) is off, gas flow may not occur.

[0090] The second valve (4602) may be configured to control the flow of outside air supplied to the dehumidifier (420).

[0091] The first valve (4601) and the second valve (4602) can be controlled by a control device.

[0092] The exhaust device can perform the function of discharging gas within the first space (410) to the outside. Specifically, the exhaust device can be positioned at the bottom of the EFEM chamber (112) and can facilitate the discharge of gas passing through the first space (410) to the outside. Additionally, the exhaust device can draw gas within the first space (410) downward to ensure smooth gas flow within the first space (410). The exhaust device may be positioned within the main body (411) and formed as an integral unit, or it may be positioned outside the main body (411) and formed as a detachable unit.

[0093] The external air intake port (466) may be configured to draw in gas from the outside, and the gas drawn in through the external air intake port (466) may be supplied to the first space (410) via a dehumidifier (420).

[0094] Additionally, a collecting unit (480) for collecting airflow and a perforated plate (481) used for collecting airflow may be placed in the lower part of the first space (410).

[0095] The dehumidifier (420) can be used as a detachable type.

[0096] The main body (411) may include a first space (410) which is an internal space, and the main body (411) may include a blower (440) and a filter (450), and the dehumidifier (420) and exhaust device may be connected integrally with the main body (411), may be connected in a detachable manner, or may be placed inside the main body (411).

[0097] Additionally, the main body (411) and exhaust device, which are components of the EFEM chamber (112) including a dehumidifier (420), a penetration pipe (461), an FFU (440, 450), and a first space (410), may be placed within a housing (not shown). Here, the housing may be a component forming the outer shape of the EFEM chamber (112), and the housing (490) may be used in cases where the dehumidifier (420) and exhaust device are connected integrally with the main body (411), connected in a detachable manner, or placed inside the main body (411), and may include all piping, etc., outside the main body.

[0098] The dehumidifier (420) can be manufactured and arranged integrally as a component of the EFEM chamber (112).

[0099] Additionally, referring to FIG. 4, the EFEM chamber (112) may include one or more through tubes (461). Accordingly, one or more blowers (440), fans (442), filters (450), and first valves (4601) may also be configured.

[0100] FIG. 6 is a diagram illustrating the operation of a second example technology for lowering the humidity of an EFEM chamber.

[0101] Referring to FIG. 6, the dehumidifier (420) may include a regeneration container gas intake port (468) and a regeneration container gas exhaust port (467).

[0102] The dehumidifier (420) may be of the heater type, and may have one of the forms of a moisture removal filter type dehumidifier, a compressor type dehumidifier, an electronic dehumidifier, and a regenerative type dehumidifier. Additionally, the dehumidifier (420) may be a dehumidifier using a moisture catalyst containing zeolite. Additionally, the dehumidifier (420) may receive gas for regeneration through the regeneration container gas intake port (468), and the gas used for regeneration may be discharged through the regeneration container gas outlet (467). Additionally, the regeneration container gas intake port (468) and the regeneration container gas outlet (467) may be positioned above the outside air intake port (466) and the outside circulation duct (465). The dehumidifier (420) may be formed as an integral unit by being positioned inside the main body (411), or it may be formed as a detachable unit by being positioned outside the main body (411).

[0103] Additionally, the dehumidifier (420) may include a heater (not shown), and the heater may receive the regeneration gas, raise the temperature of the regeneration gas, and supply the high-temperature regeneration gas to the regeneration unit. For example, the temperature of the gas discharged through the regeneration gas outlet (467) may be 60°C or higher. Here, the regeneration gas may include air, nitrogen (N2), etc., but is not limited thereto and may be varied as needed.

[0104] Here, the flow of the regenerative gas can be expressed as RC.

[0105] Next, gas can be drawn in through the outside air intake (466) and supplied to the dehumidifier (420). The flow of outside air can be controlled by the second valve (4602). The dehumidified air can be supplied to the penetration pipe (461) and supplied to the first space (410) through the blower (440) and filter (450). Then, the gas passing through the first space (410) can pass through the perforated plate (481), be collected in the collection unit (480), and discharged to the outside.

[0106] The flow of gas supplied from the dehumidifier (420) to the penetration pipe (461) can be controlled by the first valve (4601).

[0107] Here, an exhaust device may be additionally used when discharged to the outside.

[0108] The flow of gas undergoing the dehumidification process can be expressed as RA.

[0109] FIG. 7 is a drawing illustrating an embodiment of a second exemplary technology for lowering the humidity of an EFEM chamber.

[0110] Referring to FIG. 7, the EFEM chamber (700) may additionally include an FFU external air intake pipe (766) and an FFU external air intake pipe valve (7601).

[0111] Additionally, the EFEM chamber (700) may have the first valve (4601) and the second valve (4602) in an off state—closed state—and gas may be supplied through the FFU external air intake pipe (766). Here, the flow of gas through the FFU external air intake pipe (766) may be controlled by the FFU external air intake pipe valve (7601).

[0112] The gas supplied through the FFU external air intake pipe (766) can be supplied directly to the blower (440) and can be supplied to the first space (410) via the filter (450).

[0113] The gas supplied through the FFU external air intake pipe (766) can be a gas with low humidity, and in this case, the operation of the dehumidifier (420) can be stopped, thereby preventing unnecessary power consumption.

[0114] Additionally, the FFU external air intake pipe (766) may be connected to the penetration pipe (461).

[0115] Here, the flow of gas that does not pass through the dehumidifier (420) can be represented as RD.

[0116] FIG. 8 is a drawing illustrating another embodiment of the second exemplary technology for lowering the humidity of the EFEM chamber.

[0117] Referring to FIG. 8, the EFEM chamber (800) may include a single penetration pipe (861). Accordingly, the first valve (4601), the blower (840), and the filter (450) may also be configured as one unit. If the EFEM chamber (112) does not include a duct for gas circulation, the total volume of the EFEM is reduced, increasing space utilization, and the effect of convenient transport of the EFEM chamber (112) can be expected.

[0118] FIG. 9 is a drawing illustrating a third exemplary technique for lowering the humidity of an EFEM chamber.

[0119] Referring to FIG. 9, in an EFEM chamber (112) according to one embodiment, the penetration tube (461) may be composed of one or more. Accordingly, the components corresponding to the penetration tube (461) may also be composed of one or more. For example, one or more of a blower (440), a fan (442), a filter (450), an internal circulation duct (462), and a fourth valve (4604) may be composed.

[0120] Additionally, the EFEM chamber (112) according to the present embodiment may include a purification section (463), an external circulation duct (465), an internal circulation duct (462), an external air intake (466), a regeneration container gas intake (468), a regeneration container gas discharge (467), a first valve (4601), a second valve (4602), a third valve (4603), and a fourth valve (4604).

[0121] Additionally, a pump (not shown) may be added for the gas flow in the external circulation duct (465).

[0122] The outside air intake port (466) may be configured to draw in gas from the outside, and the outside air intake port (466) may be connected to an external circulation duct (465).

[0123] The external circulation duct (465) may be configured to supply the gas that has passed through the first space (410) to the dehumidifier (420) to provide a circulation passage for the gas.

[0124] The internal circulation duct (462) may be configured to supply the gas passing through the first space (410) directly to the penetration pipe (461) without supplying it to the dehumidifier (420), thereby providing an internal circulation passage for the gas.

[0125] The purification unit (463) may be configured to receive gas collected in the collection unit (480) located at the bottom of the first space (410) and perform purification through a filter.

[0126] The first valve (4601) can control the gas flow between the dehumidifier (420) and the penetration pipe (461). The second valve (4602) can control the gas flow from the outside air intake (466). The third valve (4603) can control the gas flow supplied from the outside circulation duct (465) to the dehumidifier (420). The fourth valve (4604) can control the gas flow in the inside circulation duct (462). Here, the first valve (4601) may be called the main valve or the main control valve. The second valve (4602) may be called the outside air valve. The third valve (4603) may be called the outside circulation valve. The fourth valve (4604) may be called the inside circulation valve.

[0127] The first valve (4601), the second valve (4602), the third valve (4603), and the fourth valve (4604) may be valves that can be controlled to be on / off and may be controlled by a control device (not shown).

[0128] The dehumidifier (420) may be of the heater type, and may have one of the forms of a moisture removal filter type dehumidifier, a compressor type dehumidifier, an electronic dehumidifier, and a regenerative type dehumidifier. Additionally, the dehumidifier (420) may be a dehumidifier using a moisture catalyst containing zeolite. Additionally, the dehumidifier (420) may receive gas for regeneration using a moisture catalyst containing zeolite through the regeneration container gas intake port (468), and the gas used for regeneration may be discharged through the regeneration container gas outlet (467). Additionally, the regeneration container gas intake port (468) and the regeneration container gas outlet (467) may be positioned above the outside air intake port (466) and the outside circulation duct (465). The dehumidifier (420) may be formed as an integral unit by being placed inside the main body (411), or it may be formed as a detachable unit by being placed outside the main body (411).

[0129] Additionally, the dehumidifier (420) may include a heater (not shown), and the heater may receive the regeneration gas, raise the temperature of the regeneration gas, and supply the high-temperature regeneration gas to the regeneration unit. For example, the temperature of the gas discharged through the regeneration gas outlet (467) may be 60°C or higher. Here, the regeneration gas may include air, nitrogen (N2), etc., but is not limited thereto and may be varied as needed.

[0130] In this way, the EFEM chamber (112) can operate in a circulating manner, in which the gas passing through the first space (410) is dehumidified by a dehumidifier (420) and then supplied back to the first space (410). Additionally, the dehumidifier (420) can be used as a detachable type that can be separated from the EFEM chamber (112).

[0131] Additionally, the main body (411) may include a first space (410) which is an internal space, and the main body (411) may include a blower (440) and a filter (450), and the dehumidifier (420) and exhaust device may be connected integrally with the main body (411), may be connected in a detachable manner, or may be placed inside the main body (411).

[0132] FIG. 10 is a diagram illustrating the operation according to the mode of the third example technology for lowering the humidity of the EFEM chamber.

[0133] Referring to FIG. 10, in the first mode of the EFEM chamber (112), the first valve (4601), the second valve (4602), and the third valve (4603) may be in an on state, and the fourth valve (4604) may be in an off state. Here, the first mode may be called the inflow mode.

[0134] In the EFEM chamber (112) according to the present embodiment, the gas flowing through the first space (410) can be supplied back to the dehumidifier (420) via the external circulation duct (465). Then, the gas supplied back to the dehumidifier (420) can be supplied back to the first space (410) after being dehumidified, so that the gas can be distributed in a circulating manner.

[0135] Specifically, the gas passing through the first space (410) can be supplied back to the dehumidifier (420) through the external circulation duct (465), and a purification unit (463) for purifying the gas in the external circulation duct (465) may be provided. For example, the gas can flow downward after passing through the first space (410), pass through the perforated plate (481) and be collected in the collection unit (480), pass through the purification unit (463) and be purified, and then be supplied to the dehumidifier (420) through the external circulation duct (465). The external circulation duct (465) can be connected to the penetration pipe (461) through the internal circulation duct (462). Here, the perforated plate (481) may be a plate with perforations formed to collect the gas, and the collection unit (480) may refer to a space where the gas is collected.

[0136] In other words, in the first mode of the EFEM chamber (112), the gas passing through the first space (410) passes through the perforated plate (481), is collected in the collection unit (480), passes through the purification unit (463), and can be transported through the external circulation duct (465), and the gas introduced from the outside air intake port (466) can be combined with the gas passing through the external circulation duct (465) and supplied to the dehumidifier (420). Then, the dehumidified gas can be supplied back to the first space (410) through the penetration pipe (461), the blower (440), and the filter (450).

[0137] Here, since the fourth valve (4604) is in the off state, gas may not flow through the internal circulation duct (462).

[0138] The dehumidifier (420) may be of the heater type, and may have one of the forms of a moisture removal filter type dehumidifier, a compressor type dehumidifier, an electronic dehumidifier, and a regenerative type dehumidifier. Additionally, the dehumidifier (420) may be a dehumidifier using a moisture catalyst containing zeolite, and regenerative gas may be introduced through the regenerative container gas intake port (468), regenerated by the regenerative gas, and the regenerative gas may be discharged through the regenerative container gas outlet (467).

[0139] Referring to FIG. 10, RC may represent the flow of regenerative gas, RB may represent the flow of gas entering through the outside air intake (466), and RA may represent the flow of gas passing through the dehumidifier (420).

[0140] FIG. 11 is a diagram illustrating the operation according to the mode of the third example technology for lowering the humidity of the EFEM chamber.

[0141] Referring to FIG. 11, in the second mode of the EFEM chamber (112), the first valve (4601) and the third valve (4603) may be in the ON state, and the second valve (4602) and the fourth valve (4604) may be in the OFF state. Accordingly, outside air may not be introduced from the outside air intake port (466), and gas may not be circulated through the internal circulation duct (462). Additionally, the second mode of the EFEM chamber (112) may be called a dehumidification mode.

[0142] In the second mode of the EFEM chamber (112), the gas passing through the first space (410) can pass through the perforated plate (481), be collected in the collection unit (480), pass through the purification unit (463), and be supplied to the dehumidifier (420) through the external circulation duct (465), and the gas can be supplied back to the first space (410) through the penetration pipe (461), the blower (440), and the filter (450).

[0143] FIG. 12 is a diagram illustrating the operation according to the mode of the third example technology for lowering the humidity of the EFEM chamber.

[0144] Referring to FIG. 12, in the third mode of the EFEM chamber (112), the fourth valve (4604) may be in the ON state, and the first valve (4601), the second valve (4602), and the third valve (4603) may be in the OFF state. Here, the third mode may be called the circulation mode.

[0145] In the third mode of the EFEM chamber (112), the gas passing through the first space (410) passes through the perforated plate (481), is collected in the collection unit (480), passes through the purification unit (463), and is supplied to the internal circulation duct (462) through the external circulation duct (465). The gas then passes through the internal circulation duct (462), passes through the penetration pipe (461), the blower (440), and the filter (450), and can be supplied back to the first space (410). Additionally, in the third mode, since additional dehumidification is not required when the humidity of the gas circulating in the EFEM chamber (112) is sufficiently low, there is an effect of saving power by circulating the gas without passing through the dehumidifier (420).

[0146] Here, the humidity of the gas circulating in the EFEM chamber (112) in the third mode may be 10% or less, 9% or less, 8% or less, 7% or less, 6% or less, 5% or less, 4% or less, 3% or less, 2% or less, 1% or less, 0.5% or less, and 0.1% or less. Specifically, the humidity of the gas may be 5% or less, 4% or less, 3% or less, 2% or less, and 1% or less in an atmosphere of 20°C to 30°C, where humidity may refer to relative humidity. Additionally, as an example, a control device (not shown) controlling the operation of the EFEM chamber (112) may control the on / off of the first to fourth valves (4601, 4602, 4603, 4604) according to the humidity of the gas.

[0147] For example, the EFEM chamber (112) may operate in a first mode or a second mode, and then enter a third mode when the humidity of the circulating gas becomes 1% or less.

[0148] Here, RD may mean a flow of gas that does not pass through a dehumidifier (420).

[0149] FIG. 13 is a drawing illustrating an embodiment of a third exemplary technology for lowering the humidity of an EFEM chamber.

[0150] Referring to FIG. 13, an EFEM chamber (1000) in which gas circulates, including an external circulation duct (465), an internal circulation duct (462), and an external air intake (466), may be formed to include a single penetration pipe (1361). Accordingly, components corresponding to the penetration pipe (1361), such as a first valve (4601)—which may be called a main valve or main control valve—a blower (1340), a fan (1342), a filter (450), the first valve (4601), and the internal circulation duct (462), may also be formed as a single unit.

[0151] The main body (411) may include a first space (410) which is an internal space, and the main body (411) may include a blower (1340) and a filter (450), and the dehumidifier (420) and exhaust device may be connected integrally with the main body (411), may be connected in a detachable manner, or may be placed inside the main body (411).

[0152] FIG. 14 is a drawing illustrating another embodiment of the third exemplary technology for lowering the humidity of the EFEM chamber.

[0153] Referring to FIG. 14, the internal circulation duct (462) can be connected to the blower (1340). Accordingly, gas passing through the external circulation duct (465) is supplied to the internal circulation duct (462), and then the gas is supplied to the blower (1340) so that it can be supplied to the first space (410) without passing through the penetration pipe (461).

[0154] FIG. 15 is a drawing illustrating a fourth example technique for lowering the humidity of an EFEM chamber.

[0155] Referring to FIG. 15, each component of the EFEM chamber (1500) may be arranged integrally within the housing (1510). Specifically, a dehumidifier (420), a penetration pipe (461), a blower (440), a filter (450), a main body (411), and a collection unit (480) may be arranged within the housing (1410). Additionally, a purification unit (463), an external circulation duct (465), an external air intake (466), a regeneration container gas intake (468), and a regeneration container gas discharge (467) may be arranged within the housing (1410) or outside the housing (1410).

[0156] That is, the EFEM chamber (1500) can be formed as a circulating type in which gas circulates through the first space (410) and the dehumidifier (420) through the external circulation duct (465) and the internal circulation duct (462), and the dehumidifier (420) in the EFEM chamber (1500) can be formed as an integrated type by being placed inside the housing (1510).

[0157] FIGS. 16 and FIGS. 18 are cross-sectional drawings of an EFEM according to one embodiment.

[0158] Referring to FIGS. 16 and 18, the EFEM chamber (1600, 1800) according to the present embodiment may include a purification section (1663), an external circulation duct (1665), an internal circulation duct (1662, 1862), a regeneration container gas intake port (1668, 1868), and a regeneration container gas discharge port (1667, 1867).

[0159] Additionally, a pump (not shown) may be added for gas flow in the external circulation duct (1665).

[0160] The external circulation duct (1665) may be configured to supply the gas that has passed through the first space (1610) to the dehumidifier (1620) to provide a circulation passage for the gas.

[0161] The internal circulation duct (1662, 1862) may be configured to provide an internal circulation passage for gas passing through the first space (1610, 1810).

[0162] The purification unit (1663) may be configured to receive gas collected in the collection unit (1680) located at the bottom of the first space (1610) and perform purification through a filter.

[0163] The dehumidifier (1620, 1820) may be a dehumidifier using a moisture catalyst containing zeolite. Additionally, the dehumidifier (1620, 1820) may receive gas for regeneration using a moisture catalyst containing zeolite through the regeneration container gas intake port (1668, 1868), and the gas used for regeneration may be discharged through the regeneration container gas outlet (1667, 1867). Additionally, the regeneration container gas intake port (1668) and the regeneration container gas outlet (1667) may be positioned above the external circulation duct (1665). The dehumidifier (1620, 1820) may be formed as an integral unit by being positioned inside the main body (1611, 1811), or it may be formed as a detachable unit by being positioned outside the main body (1611, 1811).

[0164] Additionally, the dehumidifier (1620, 1820) may include a heater (not shown), and the heater may receive the regeneration gas, raise the temperature of the regeneration gas, and supply the high-temperature regeneration gas to the regeneration unit. For example, the temperature of the gas discharged through the regeneration gas outlet (1667) may be 60°C or higher. Here, the regeneration gas may include air, nitrogen (N2), etc., but is not limited thereto and may be varied as needed.

[0165] In this way, the EFEM chamber (112) can operate in a circulating manner, in which the gas passing through the first space (1610, 1810) is dehumidified by a dehumidifier (1620, 1820) and then supplied back to the first space (1610, 1810).

[0166] Additionally, the main body (1611, 1811) may include a first space (1610, 1810) which is an internal space, and the main body (1611, 1811) may include a blower (1640, 1840) and a filter (1650, 1850), and the dehumidifier (1620, 1820) and exhaust device may be connected integrally with the main body (1611, 1811), may be connected in a detachable manner, or may be placed inside the main body (1611, 1811).

[0167] According to one embodiment, the dehumidifier (1620, 1820) can remove moisture in the air inside the EFEM by adsorbing it using zeolite.

[0168] Zeolite utilizes its porous properties to adsorb moisture from the air, and a first moisture purification device (1621, 1821) and a second moisture purification device (1623, 1823) are used alternately in the dehumidifier to perform continuous dehumidification operations.

[0169] The moisture adsorbed by the dehumidifier is removed in a regeneration device (1622, 1822), which can be done by using heated air to evaporate the moisture captured in the zeolite.

[0170] A heater installed in the regeneration device (1622, 1822) can restore the moisture absorption capacity of the zeolite with heat generated during regeneration, thereby enabling reuse.

[0171] The blower (1640, 1840) can serve to supply dehumidified air back into the EFEM and help the low-humidity air circulate inside the EFEM in a constant flow.

[0172] The blower (1624, 1824) is a device that induces gas circulation and may include equipment such as a ring blower. The ring blower can contribute to effectively circulating the air inside the EFEM through efficient airflow.

[0173] An internal duct (not shown) may be placed between the dehumidifier (1620, 1820) and the blower (1640, 1840) to provide a passage through which air within the EFEM can circulate.

[0174] The external circulation duct (1665, 1865) allows the air inside the first space to be supplied back to the dehumidifier, thereby supporting continuous dehumidification through circulation.

[0175] The moisture detection sensor (1625, 1825) is located at the connection point between the duct and the dehumidifier and can detect the humidity level inside the EFEM. This allows the system to control the operation of the dehumidifier so that it maintains an appropriate dehumidification state.

[0176] The regeneration container gas intake port (1668, 1868) and the regeneration container gas discharge port (1667, 1867) can be responsible for the inflow and outflow of regeneration heating air, and can remove internal moisture without contact with air by using nitrogen (N2).

[0177] Referring to FIG. 16, a dehumidifier can be placed on the upper part of the main body.

[0178] According to one embodiment, placing the dehumidifier on the upper part of the main body offers efficient advantages in terms of space utilization and air circulation.

[0179] The upper arrangement can efficiently deliver dehumidified air downward through the blower (1640) to form a natural downward airflow, thereby promoting the circulation of internal air. This allows humidity to be maintained evenly throughout the space inside the EFEM.

[0180] In addition, the upper space becomes easier to utilize, creating extra space to place additional equipment or control systems on the side of the EFEM.

[0181] Since the dehumidifier and the internal gas flow are efficiently connected to ensure a smooth circulation process, the dehumidification effect can be maximized, and the simplified installation structure makes maintenance easier.

[0182] Meanwhile, referring to FIG. 18, a dehumidifier may be placed on the side of the main body.

[0183] According to one embodiment, placing the dehumidifier on the side of the main body eliminates the need for an external circulation duct, thereby providing a cost-saving effect.

[0184] Side placement allows the regeneration gas to be directly discharged to the outside, thereby increasing exhaust efficiency, and can be designed so that the heat generated during regeneration does not affect the inside of the EFEM, which can be advantageous for temperature management.

[0185] In addition, the side-mounted dehumidifier is easily accessible, making regular inspections and parts replacement easier. Since it is capable of regeneration using external air, it can maintain efficient dehumidification performance even after initial air purification.

[0186] FIGS. 17 and FIGS. 19 are cross-sectional drawings of a dehumidifier according to one embodiment.

[0187] Referring to FIGS. 17 and 19, the dehumidifier (1620, 1820) may include a plurality of moisture purification devices.

[0188] The first moisture purification device (1621, 1821) and the second moisture purification device (1623, 1823) may include a zeolite catalyst and can perform dehumidification by adsorbing moisture from the air.

[0189] The purification devices can be used alternately to enable continuous dehumidification, and since each can be operated selectively, continuous dehumidification can be maintained without process interruption.

[0190] The regeneration device (1622, 1822) can perform the function of regenerating by removing moisture adsorbed on the zeolite.

[0191] The regeneration device (1622) can regenerate the zeolite by periodically supplying heated air to continuously maintain the performance of the dehumidifier. In this process, air containing moisture is discharged, and the moisture absorption capacity of the zeolite can be restored.

[0192] The heater used in the regeneration process supplies heated air to the regeneration device, which can effectively remove moisture adsorbed on the zeolite.

[0193] The moisture in the zeolite can be evaporated through the heating function of the heater and discharged to the outside through the outlet, enabling continuous use of the dehumidifier.

[0194] The blower (1640, 1840) can supply dehumidified air back into the EFEM to maintain a constant indoor humidity.

[0195] The blower (1624, 1824) induces gas circulation and can increase dehumidification efficiency by optimizing the internal gas flow of the dehumidifier, including a ring blower.

[0196] A dehumidifier valve (1626, 1826) that can be opened and closed may be included to control the gas flow between the inside of the dehumidifier (1620, 1820) and the EFEM body (1611, 1811).

[0197] The dehumidifier valve (1826) can control the flow of gas during the dehumidification and regeneration process. This allows for efficient switching between the dehumidification mode and the regeneration mode within the dehumidifier.

[0198] The regeneration container gas intake port (1668, 1868) and the regeneration container gas discharge port (1667, 1867) are responsible for the inflow and outflow of gas required for regeneration, and regeneration gas such as nitrogen (N2) can be mainly used.

[0199] This allows moisture to be safely removed without contact with external air during the process.

[0200] A moisture sensor (1625, 1825) is installed at the connection point between the duct and the dehumidifier to monitor the humidity of the air inside the EFEM and can automatically control the operation of the dehumidifier. This allows the necessary humidity level to be maintained and the energy efficiency of the dehumidifier to be increased.

[0201] The zeolite catalyst in the dehumidifier adsorbs moisture with minimal heat generation, which can prevent the internal temperature of the EFEM from rising. Additionally, energy efficiency can be increased by minimizing usage through an initial supply of N2 gas only once, and subsequently recycling air using a circulation method.

[0202] In addition, by utilizing a zeolite catalyst to maintain the internal humidity of the EFEM at 1% or less, oxidation or the formation of foreign substances on the wafer surface can be prevented, which can contribute to reducing the defect rate and improving production yield during semiconductor production.

[0203] According to one embodiment, continuous dehumidification can be performed by alternately using the first (1621, 1821) and the second moisture purification device (1623, 1823). In addition, the lifespan of the equipment can be extended by periodically restoring the moisture absorption capacity of the zeolite through a regeneration device.

[0204] Referring to FIGS. 16 and 17, the dehumidifier can be placed on the upper part of the main body to use the space efficiently, and in particular, the dehumidifier can be stably supported by including an anti-vibration foot (1629).

[0205] The anti-vibration foot (1629) can be an important component that effectively reduces vibrations to increase the stability and accuracy of the equipment. In particular, since semiconductor or display manufacturing equipment such as EFEMs requires very precise operations, even minute vibrations can have a significant impact on the process, so the anti-vibration foot (1629) can contribute to creating a stable environment by reducing such vibrations.

[0206] Specifically, the anti-vibration foot (1629) according to one embodiment can increase the stability of the process by reducing vibrations generated from the equipment or transmitted from the outside.

[0207] In addition, the anti-vibration foot (1629) according to one embodiment can reduce wear on the equipment caused by vibration, thereby extending its lifespan and preventing damage to important parts.

[0208] In addition, the anti-vibration foot (1629) according to one embodiment can maintain the precision of the equipment by reducing vibration, thereby minimizing errors in the manufacturing process.

[0209] In addition, the anti-vibration foot (1629) according to one embodiment may comprise the following elements:

[0210] - An elastomer containing various elastic materials such as rubber, silicone, polyurethane, and springs.

[0211] - A base plate that serves to secure the anti-vibration foot to the upper part of the EFEM main body and includes a fixing device or screw to enhance stability.

[0212] Referring to Fig. 18, the dehumidifier can be placed on the outer side of the main body to utilize space efficiently, and cost savings can also be expected due to the elimination of the need for an external circulation duct.

[0213] Conventional dry rotor type dehumidifiers require high-temperature hot air for rotor regeneration, and during this process, the internal temperature of the EFEM rises, which can adversely affect the process environment and negatively impact the quality of sensitive electronic devices or semiconductor manufacturing. In contrast, the dehumidifier according to the present embodiment removes moisture by utilizing the adsorption properties of zeolite, and regenerates using a cross-type method during the regeneration process, thereby eliminating the need for continuous use of high-temperature air. Therefore, the internal temperature of the EFEM can be maintained stably, providing an environment suitable for the manufacturing of semiconductors and electronic devices.

[0214] Furthermore, conventional dry rotor systems require continuous rotor rotation and high-temperature hot air regeneration, resulting in high energy consumption. In particular, the large amount of energy required for rotor regeneration increases operating costs. In contrast, the dehumidifier according to this embodiment can reduce energy consumption by utilizing moisture adsorption and cross-regeneration methods through a zeolite catalyst. Since dehumidification is maintained through internal gas circulation without continuous external gas supply after the initial N2 purge, energy efficiency can be significantly improved.

[0215] Conventional dry rotor dehumidifiers often require the continuous use of external air or N2 gas during the regeneration process, leading to increased N2 consumption. In contrast, the dehumidifier according to this embodiment can maintain humidity through circulating purification using zeolite after an initial N2 purge. Consequently, N2 usage is reduced, enabling cost savings and environmentally friendly operation.

[0216] In conventional dry rotor systems, dehumidification performance may fluctuate depending on the rotation and regeneration cycle of the rotor. When regeneration is required, the moisture absorption performance of the rotor may temporarily deteriorate. In contrast, the dehumidifier according to the present embodiment operates a first moisture purification device and a second moisture purification device alternately, allowing the other purification device to continue performing dehumidification while one purification device is being regenerated. As a result, stable dehumidification performance can be maintained without process interruption.

[0217] Conventional dry rotor dehumidifiers may experience increased maintenance costs due to rapid component wear caused by rotor rotation and repetitive regeneration using high-temperature hot air. In contrast, the dehumidifier of the present invention utilizes a fixed zeolite filter system, resulting in less mechanical wear and eliminating the need for periodic thermal regeneration, thereby extending the equipment's lifespan. Additionally, easy access to the purification and regeneration devices simplifies maintenance.

[0218] The dehumidifier according to the present embodiment solves the problems of temperature rise, energy consumption, N2 usage, and performance fluctuation of a dry rotor type dehumidifier, and can maintain stable dehumidification performance.

[0219] FIG. 20 is a diagram illustrating a dehumidification performance test example of an EFEM according to one embodiment.

[0220] The test process and results of the dehumidification performance with reference to Fig. 20 are as follows.

[0221] Test conditions: The humidity reduction effect was tested using 20 kg of zeolite as a moisture catalyst in a 10 Nm³ chamber.

[0222] Test results: After performing N2 purge at 1600 lpm for 15 minutes, the humidity decreased from 21% to 3.8%, and it was successful to maintain the humidity at 1.0% or less using a circulation method.

[0223] According to a dehumidification performance test example according to one embodiment, it can be applied to the production environment of high-performance semiconductors and electronic devices, and can effectively solve humidity problems during the process.

[0224] FIG. 21 is a drawing for explaining a control device that can be used in an EFEM according to one embodiment.

[0225] The control device (2100) may be a configuration that performs information processing related to the EFEM, and may also be a configuration that controls the operation of the EFEM and the EFEM chamber configuration.

[0226] The control device (2100) may be placed outside the EFEM or EFEM chamber, placed inside a control box used in the EFEM chamber, or placed in a second space (430) inside the EFEM chamber. That is, the penetration tube (461) may be formed to penetrate the control device (2100).

[0227] Referring to FIG. 21, the control device (2100) may include a command processing unit (2110), a temperature acquisition unit (2121), a humidity acquisition unit (2122), a pressure acquisition unit (2123), a blower operation controller (2130), a memory unit (2141), an input unit (2141), an other operation controller (2150), a valve operation controller (2160), a dehumidifier controller (2170), a dehumidification controller (2171), a regeneration controller (2172), an air volume controller (2173), a communication module (2180), and a screen display unit (2190).

[0228] The command processing unit (2110) may be a component that processes signals received from each component—e.g., a processor, etc.

[0229] The temperature acquisition unit (2121) may be configured to acquire temperature information by measuring the temperature of the EFEM and the EFEM chamber. It may be configured to acquire the temperature of the components of the EFEM, such as an external air intake, an external circulation duct, an internal circulation duct, a dehumidifier, a regeneration unit and a dehumidification unit within the dehumidifier, a heater within the dehumidifier, a blower, a filter, a collection unit, a perforated plate, a purification unit, a penetration pipe, each valve, and a first space within the main body. To acquire the temperature, a temperature sensor may be placed in each component of the EFEM and the EFEM chamber.

[0230] The humidity acquisition unit (2122) may be configured to acquire humidity information by measuring the humidity of the EFEM and the EFEM chamber. It may be configured to acquire humidity of the components of the EFEM, such as an external air intake, an external circulation duct, an internal circulation duct, a dehumidifier, a regeneration unit and a dehumidification unit within the dehumidifier, a heater within the dehumidifier, a blower, a filter, a collection unit, a perforated plate, a purification unit, a penetration pipe, each valve, and a first space within the main body. To acquire humidity, a humidity sensor may be placed in each component of the EFEM and the EFEM chamber.

[0231] The pressure acquisition unit (2123) may be configured to acquire pressure information by measuring the pressure of the EFEM and the EFEM chamber. It may be configured to acquire pressure of the components of the EFEM, such as an external air intake, an external circulation duct, an internal circulation duct, a dehumidifier, a regeneration unit and a dehumidification unit within the dehumidifier, a heater within the dehumidifier, a blower, a filter, a collection unit, a perforated plate, a purification unit, a penetration pipe, each valve, and a first space within the main body. To acquire pressure, a pressure sensor may be placed in each component of the EFEM and the EFEM chamber.

[0232] The blower operation controller (2130) may be configured to control the operation of the blower of the EFEM chamber. That is, the blower operation controller (2130) may control the on / off of the blower or the wind speed, etc.

[0233] The memory unit (2141) may be a configuration that remembers the operation of each component of the EFEM chamber and may be a configuration that stores a process recipe.

[0234] The input unit (2142) may be configured to input commands to operate each component of the EFEM and EFEM chamber. Additionally, the input unit (2142) may be configured to transmit the received commands to the command processing unit (2110).

[0235] The other operation controller (2150) may be a component that controls the operation of additional components of the EFEM chamber. For example, the other operation controller (2150) may control the operation of an ion controller that controls an ion bar. Here, the ion bar may be placed in the upper part of the space within the main body of the EFEM chamber and may remove static electricity generated by the gas flowing within the space where the gas flows. Here, various types of ion bars may be applied.

[0236] The valve operation controller (2160) may be configured to control the on / off of the valve included in the EFEM chamber. That is, the operating mode of the EFEM chamber may be controlled by the valve operation controller (2160), and the valve operation controller (2160) may control the main valve, the outside air valve, the outside circulation valve, the inside circulation valve, etc.

[0237] The dehumidifier controller (2170) may be configured to control the operation of the dehumidifier within the EFEM chamber, and the dehumidifier controller (2170) may include a dehumidification controller (2171), a regeneration controller (2172), and an airflow controller (2173). The dehumidification controller (2171) may be configured to control the dehumidification section of the dehumidifier, the regeneration controller (2172) may be configured to control the regeneration section of the dehumidifier, and the airflow controller (2173) may be configured to control the airflow of the gas supplied to the dehumidifier. Here, the dehumidification controller (2171) may be configured to determine the degree of dehumidification of air in the dehumidifier and to control the size and location of the dehumidification section, etc., and the regeneration controller (2172) may be configured to determine the degree of regeneration of the dehumidifier and to control the size and location of the regeneration section, etc., and to control the heater and fan used in the regeneration section. The airflow controller (2173) may control the airflow by controlling a fan placed inside the dehumidifier that is used for the inflow and outflow of regeneration air.

[0238] The dehumidifier controller (2170)—regeneration controller and dehumidification controller—can also control setting values ​​such as the selection of a dehumidifier and the amount of dehumidification using a moisture catalyst containing zeolite.

[0239] The communication module (2180) may be a configuration that performs communication with the outside.

[0240] The display unit (2190) may be configured to display the conditions inside the EFEM chamber on the screen, such as the process recipe, the temperature, humidity, and pressure inside the EFEM chamber, the airflow of the dehumidifier and the blower, and the on / off of the valve.

[0241] Terms such as "include," "compose," or "have" as described above, unless specifically stated otherwise, mean that the relevant component may be inherent; therefore, they should be interpreted as allowing for the inclusion of additional components rather than excluding them. All terms, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains, unless otherwise defined. Commonly used terms, such as those defined in advance, should be interpreted in accordance with their meaning in the context of the relevant technology and should not be interpreted in an ideal or overly formal sense unless explicitly defined in the present invention.

[0242] The foregoing description is merely an illustrative explanation of the technical concept of the present invention, and those skilled in the art to which the present invention pertains will be able to make various modifications and variations within the scope of the essential characteristics of the present invention. Accordingly, the embodiments disclosed in the present invention are intended to explain, not limit, the technical concept of the present invention, and the scope of the technical concept of the present invention is not limited by these embodiments. The scope of protection of the present invention shall be interpreted by the claims below, and all technical concepts within an equivalent scope shall be interpreted as being included within the scope of rights of the present invention. Explanation of the symbols

[0243] 100: Process System 110: EFEM 112: EFEM Chamber 114: Hehe 116: Load port module 120: Load lock device 130: Return chamber 140: Process Chamber 311: N2 supply pipe 312: Differential pressure exhaust unit 1610, 1810: First space 1611, 1811: Main body 1620, 1820: Dehumidifier 1621, 1821: First water purification apparatus 1622, 1822: playback device 1623, 1823: Second water purification apparatus 1624, 1824: Blower 1625, 1825: Moisture detection sensor 1626, 1826: Dehumidifier valve 1629: Anti-vibration foot 1630, 1830: Second Space 1640, 1840: Blower 1642, 1842: Pan 1650, 1850: Filter 1662, 1862: Internal circulation duct 1663: Purification Department 1665: External circulation duct 1667, 1867: Regeneration container gas outlet 1668, 1868: Regeneration container gas intake port 1680, 1880: Collection unit 1681, 1881: Perforated board 2100: Control unit

Claims

Claim 1 EFEM comprising: a Front-Opening Unified Pod (FOUP) on which a substrate is loaded; a main body communicating with the FOUP through a door and having a first space formed inside where the transported substrate can stay; a dehumidifier that dehumidifies by adsorbing moisture from a gas supplied to the first space onto a zeolite; a blower disposed within the main body spaced apart from the dehumidifier and supplying the dehumidified gas to the first space; and an internal circulation duct disposed on both sides inside the first space and providing a passage so that the gas can move and circulate to a second space formed between the dehumidifier and the blower; wherein the dehumidifier is disposed on the upper part of the main body. Claim 2 EFEM according to claim 1, further comprising an external circulation duct that provides a circulation passage for supplying gas inside the first space to the dehumidifier. Claim 3 EFEM according to claim 1 or 2, wherein the dehumidifier further comprises a moisture purification device in which the zeolite is provided and the moisture of the gas is adsorbed onto the zeolite to perform dehumidification. Claim 4 In claim 3, the moisture purification device comprises a first moisture purification device and a second moisture purification device, EFEM. Claim 5 EFEM comprising: a Front-Opening Unified Pod (FOUP) on which a substrate is loaded; a main body communicating with the FOUP through a door and having a first space formed inside where the transported substrate can stay; a dehumidifier that dehumidifies by adsorbing moisture from a gas supplied to the first space onto a zeolite; a blower disposed within the main body spaced apart from the dehumidifier and supplying the dehumidified gas to the first space; and an internal circulation duct disposed on both sides inside the first space and providing a passage so that the gas can move and circulate into a second space formed between the dehumidifier and the blower; wherein the dehumidifier is disposed on the side outside the main body. Claim 6 In claim 5, the dehumidifier further comprises a moisture purification device in which the zeolite is provided and the moisture of the gas is adsorbed onto the zeolite to perform dehumidification, EFEM. Claim 7 In claim 6, the moisture purification device comprises a first moisture purification device and a second moisture purification device, EFEM.

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