Ultra-fast thermal bubble driven actuation for robotics, and associated methods

Abstract

An actuator device includes an actuator chamber having actuator fluid therein. The actuator device also includes a flexible membrane forming at least one surface of the actuator chamber and a heating device positioned in the actuator chamber. Activation of the heating device causes the actuator fluid to nucleate and form a vapor bubble that actuates the flexible membrane. The flexible membrane may mechanically couple with a mechanical beam or other component of a robot to provide mechanical movement thereto. The flexible membrane may also be used to mechanically remove debris from a surface.

Description

PATENTClient Ref. 2024-260-02Attorney Docket No. UQCO.P2100WO / 00646565ULTRA-FAST THERMAL BUBBLE DRIVEN ACTUATION FOR ROBOTICS, AND ASSOCIATED METHODSRELATED APPLICATION

[0001] The application claims priority to US Patent Application Serial Number 63 / 683,643, titled “Ultra-Fast Thermal Bubble Driven Actuation for Robotics, and Associated Methods,” filed August 15, 2024, and incorporated herein by reference in its entirety.BACKGROUND

[0002] Various microsystems require micro-scale actuation devices for precise control. For example, robotics technology is continuously shrinking in size to the micro-scale. With the size reduction, there is a need for precise mechanical movement control. Moreover, there is a need for repeatable mechanical movement control in a manner that will reduce wear and stress on the micro-mechanical components.SUMMARY

[0003] One aspect of the present embodiments includes the realization that there is a need for precise mechanical movement control and repeatable mechanical movement control in small devices such as ultra-small robots. The present embodiments solve this problem by providing an ultra-fast thermal bubble driven actuator device that provides precise, repeatable, mechanical movement. Advantageously, the ultra-fast thermal bubble driven actuator device is small and allows electronic control of precise, repeatable, mechanical movements for use in robotics and other industries. Explosive boiling of an actuator fluid creates an ultra-fast (e.g., <50us), high-pressure (e.g., on the order of 10’s of atm) vapor bubble that mechanically actuates a thin flexible membrane due to fluid- structure interactions. The mechanical actuation classifies actuator devices 100 and 500 as high force, high stroke (e.g., exceeding the stroke of Piezo actuators), and ultra-fast, which is a branch of micro-actuation that has been difficult to achieve.

[0004] Another aspect of the present embodiments includes the realization that there is a need for fast, repeatable, mechanical movement to clear a surface area. The present embodiments solve this problem by providing an ultra-fast thermal bubble driven actuator device that provides fast, repeatable, mechanical movement that clears a surface of debris andPATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565 dust. Advantageously, since the ultra-fast thermal bubble driven actuator device provides fast repeatable movement that dislodges debris and dust from a surface.

[0005] In certain embodiments, the techniques described herein relate to an actuator device, including: an actuator chamber having actuator fluid therein; a flexible membrane forming at least one surface of the actuator chamber; and a heating device in the actuator chamber; wherein activation of the heating device causes the actuator fluid to nucleate and form a vapor bubble that actuates the flexible membrane.

[0006] In certain embodiments, the techniques described herein relate to a method of manufacturing an actuator device, including: providing an actuator chamber having a heating device in the actuator chamber; providing a flexible membrane forming at least one surface of the actuator chamber, the flexible membrane actuating in response to activation of the heating device causing actuator fluid in the actuator chamber to form a vapor bubble that actuates the flexible membrane; providing a mechanical beam on an opposite side of the flexible membrane from the actuator chamber, the flexible membrane mechanically coupling with the mechanical beam.BRIEF DESCRIPTION OF FIGURES

[0007] FIG. 1 is a schematic diagram illustrating one example actuator device, in embodiments.

[0008] FIG. 2 is a schematic diagram illustrating example operation of the actuator device of FIG. 1 to actuate a mechanical beam, in embodiments.

[0009] FIGs. 3 and 4 are schematic diagrams illustrating example use of the actuator device of FIG. 1 to clear a surface, in embodiments.

[0010] FIG. 5 is a perspective exploded view of an actuator device illustrating example constructions, in embodiments.

[0011] FIG. 6 is a plan view illustrating actuator device of FIG. 5 when assembled, further illustrating alignment of the components.

[0012] FIG. 7 is a flowchart illustrating of one example method for manufacturing an actuator device, in embodiments.

[0013] FIG. 8 shows example stroboscopic high speed images of unconfined bubble dynamics.

[0014] FIG. 9 shows example stroboscopic high speed images of confined bubble dynamics within curved channel of actuator device of FIG. 5, in embodiments.2LEGAL\79425631\3PATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565

[0015] FIGs. 10A, 10B, 10C and 10D show experimental data for deflection of the flexible membrane of FIG. 1 as a function of an actuation voltage of the pulse of FIG. 2, in embodiments.

[0016] FIG. 11 shows experimental data for deflection the mechanical beam of FIG. 1, in embodiments.DESCRIPTION

[0017] Systems and methods described herein provide an ultra-fast thermal bubble driven actuator device that uses an aqueous fluid (e.g., water, or any other type of fluid that supports strong vapor bubble nucleation) to deflect a flexible membrane that provides mechanical movement to another component (e.g., a beam or a surface). In the systems and methods described herein, an actuator chamber is filled with an actuator fluid and includes a heating device such as a micro-resistor. One surface of the actuation chamber is formed of a thin, flexible membrane that may be coupled to a mechanical beam or a surface. A current through the micro-resistor generates heat that causes strong vapor bubble nucleation within the actuation chamber that deflects the thin, flexible membrane to actuate the mechanical beam or surface. The mechanical beam may be a component of any mechanical system, such as a leg of a robotic-device simulating an animalia, reptilian, or insect. The surface may be a surface of a device that collects debris and requires periodic cleaning.

[0018] FIG. 1 is a schematic diagram illustrating one example actuator device 100, in embodiments. FIG. 2 is a schematic diagram illustrating example operation of actuator device 100 of FIG. 1 to actuate a mechanical beam 116, in embodiments. FIGs. 1 and 2 are best viewed together with the following description.

[0019] Actuator device 100 includes an actuator chamber 102 (also referred to as a source chamber or source channel) having actuator fluid 104 therein and a flexible membrane 106 that forms one surface of actuator chamber 102 and actuator fluid 104. In certain embodiments, flexible membrane 106 is one of a mylar film and a Kapton film with a thickness of between 2.5pm and 5pm. Flexible membrane 106 may be made from other materials and thicknesses without departing from scope hereof.

[0020] Actuator fluid 104 is a highly vaporizable fluid, such as water or any other highly vaporizable fluid. In certain embodiments, actuator fluid 104 is water, since it is efficiently vaporized by heating device 108. Actuator device 100 includes a heating device 108 in, or thermally coupled with, the actuator chamber 102 that provides Joule heat to actuator3LEGAL\79425631\3PATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565 fluid 104 under control of a controller 128. Heating device 108 may be a micro-resistor or a resistive heater. When activated (e.g., turned on, or caused to heat at or above a specific heat threshold) by controller 128, heating device 108 causes actuator fluid 104 to nucleate and form a vapor bubble 204 that rapidly deflects 206 flexible membrane 106 as shown in FIG. 2. A deflection distance 208 of flexible membrane 106 is between 10pm and 60pm, for example. Once heating device 108 is deactivated, vapor bubble 204 reduces over time and deflection of flexible membrane 106 reduces to return to a nominal original state (e.g., flat). Controller 128 may generate a control signal as a pulse 202 that causes heating device 108 to heat briefly, where a width of pulse 202 may be controlled to define the amount of heat generated by heating device 108. Alternatively, controller 128 may control an amplitude (e.g., voltage) of pulse 202 to define the amount of heat generated by heating device 108.

[0021] Actuator device 100 may also include an actuator fluid reservoir 120 fluidically coupled to actuator chamber 102 via an inlet 122. Actuator fluid reservoir 120 may store additional actuator fluid 104 to maintain actuator fluid 104 at an operable level threshold within actuator chamber 102, should actuator fluid 104 evaporates or otherwise reduce.

[0022] In certain embodiments, multiple actuator chambers 102 may be formed on a single substrate and are controlled by a single controller 128. That is, the single controller 128 may be communicatively coupled to control a plurality of heating devices 108 located in a plurality of actuator chambers formed on a single substrate or on different substrates. Alternatively or additionally, a single controller 128 may be communicatively coupled to control a plurality of heating devices 108 located in a plurality of actuator chambers 102 formed on different substrates, whereby controller 128 mechanically actuates a plurality of different mechanical beams 116.

[0023] It should be appreciated that actuator device 100 may be used in multiple applications. For example, actuator device 100 may be used in a pump system where actuator chamber 102, actuator fluid 104, flexible membrane 106, and heating device 108 operate to generate mechanical movement to drive a pumping chamber. Actuator device 100 therefore may be used in fluid-movement applications where actuation of flexible membrane 106 operates to pump a high-particle liquid (such as blood) from an inlet to an outlet of the pumping chamber.

[0024] In embodiments where actuator device 100 is used in a system and method for thermal bubble driven actuation, the flexible membrane 106 is in mechanical contact with a mechanical beam 116. For example, mechanical beam 116 is positioned adjacent to flexible4LEGAL\79425631\3PATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565 membrane 106 such that movement of flexible membrane 106 causes mechanical beam 116 to move. In certain embodiments, mechanical beam 116 may be secured to a support 118. Support 118, in at least some embodiments, is coupled to substrate 103. In certain embodiments, support 118 may form a fulcrum such that mechanical beam 116 functions as one of a first, second, or third class lever that is actuated by actuator device 100. Mechanical beam 116 and support 118 are application specific and may be selected accordingly. Mechanical beam 116 may convey mechanical movement to other components, such as components of a robotic device.

[0025] FIGs. 3 and 4 are schematic diagrams illustrating example use of actuator device 100 of FIG. 1 to clear a surface 302, in embodiments. FIGs. 3 and 4 are best viewed together with the following description.

[0026] As shown in FIG. 3, an outer surface of flexible membrane 106 forms surface 302, on which a projectile 316 is located. The projectile 316 may be an intentional projectile or may be debris (e.g., dust particles) collected. Alternatively, actuator device 100 may be positioned beneath, and in physical contact with, a separate substrate that forms surface 302. In another alternative, actuator device 100 is formed within a substrate where flexible membrane 106 forms surface 302. In another alternative, a plurality of actuator chambers 102 are coupled with surface 302 and controlled by a single controller 128. As shown in FIG. 4, controller 128 generates pulse 402 to activate heating device 108, which cause actuator fluid 104 to nucleate and form vapor bubble 404. Vapor bubble 404 causes a rapid displacement 406 of flexible membrane 106, thereby dislodging the projectile 316 from surface 302. A deflection distance 408 of flexible membrane 106 is between 10pm and 60pm, for example. Where surface 302 is formed by a separate substrate, displacement 406 of flexible membrane 106 causes mechanical movement of the separate substrate to eject debris from its surface. There may be one or more guides extending from surface 302 or substrate 103 (such as a channel, and / or one or more rails) that guide the direction of the projectile 316 when ejected from surface.

[0027] FIG. 5 is a perspective exploded view of an actuator device 500 illustrating example constructions, in embodiments. Actuator device 500 represents one example fabrication of actuator device 100 of FIG. 1. FIG. 6 is a plan view illustrating actuator device 500 of FIG. 5 when assembled, further illustrating alignment of the components. The components of FIG. 6 are transparent for clarity of illustration.5LEGAL\79425631\3PATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565

[0028] In certain embodiments, resistor 508 and electrical connection areas 509(1) and 509(2) are formed on a surface of an actuator substrate 501 and / or embedded therein. Actuator substrate 501 is a glass substrate, in embodiments, but may be formed of other material without departing from the scope hereof. Resistor 508 may be formed on actuator substrate 501 by any suitable process including one or more of a deposition process, an etching process, and a laser cutting process. Resistor 508 is sized between 50pm x 100pm and 500pm xlOOOpm, thereby having a surface area between 5000pm2and 500,000pm2.

[0029] An actuator chamber substrate 510 forms two reservoirs 512 coupled to straight channels 514 and 516 of a “U” shaped channel 518, where opposite ends of straight channels 514 and 516 are joined together by a curved channel 520. An actuator chamber 522 is formed at curved channel 520. “U” shaped channel 518 may have other shapes without departing from the scope hereof. In certain embodiments, actuator chamber substrate 510 is an adhesive layer coupled to actuator substrate 501. For example, a 3M 467MP two-sided adhesive film is laser cut to form a 57pm “U” shaped channel 518. A flexible membrane 506 attaches to (e.g., adheres to) actuator chamber substrate 510 to form a surface of actuator chamber 522. In embodiments, actuator chamber substrate 510 is an adhesive layer coupled between actuator substrate 501 and flexible membrane 506.

[0030] A mechanical beam 540 may physically couple with flexible membrane 506 and is positioned over actuator chamber 522 (e.g., over curved channel 520 of “U” shaped channel 518). In certain embodiments, mechanical beam 540 is a milli-beam that is affixed over flexible membrane 506 such that deflection of flexible membrane 506 collides with mechanical beam 540 to create mechanical motion.

[0031] Mechanical beam 540 is an example of mechanical beam 116 of actuator device 100 and is positioned over actuator chamber 522 with its longitudinal axis (e.g., parallel to a length of mechanical beam 540) perpendicular to a longitudinal axis of straight channels 514 and 516. In certain embodiments, mechanical beam 540 is adhered to flexible membrane 506. Accordingly, when resistor 508 is activated, displacement of flexible membrane 506 moves mechanical beam 540. Mechanical beam 540 may be a cantilever mechanism that functions as one of a first, second, or third class lever based on positioning of a corresponding support structure (e.g., support 118). Positioning of support 118 is dependent on intended use and the desired characteristics of mechanical output from actuator device 100. Pulse 202 creates mechanical motion in flexible membrane 506 that may be coupled to any number of mechanical processes, including beam deflection and steel milli-sphere ejection.6LEGAL\79425631\3PATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565

[0032] As shown in FIG. 6, actuator device 500 is assembled such that curved channel 520 aligns with resistor 508 to form actuator chamber 522, and mechanical beam 540 is positioned over actuator chamber 522. As appreciated, other portions of “U” shaped channel 518 may be positioned over 508 to form actuator chamber 522 at the other portion without departing from the scope hereof.

[0033] FIG. 7 is a flowchart illustrating of one example method 700 for manufacturing an actuator device, in embodiments. Method 700 is for example used to manufacture actuator device 100 of FIG. 1 and actuator device 500 of FIG. 5.

[0034] At block 710, method 700 provides an actuator chamber having a heating device thermally coupled with the actuator chamber. In one example of block 710, actuator chamber 102 is provided with heating device 108. In another example of block 710, resistor 508 is formed on actuator substrate 501 using an etching process and combined with actuator chamber substrate 510 to form actuator chamber 522, where actuator chamber substrate 510 may be an adhesive layer and forms “U” shaped channel 518.

[0035] At block 720, method 700 provides a flexible membrane forming at least one surface of the actuator chamber, the flexible membrane actuating in response to activation of the heating device causing actuator fluid in the actuator chamber to form a vapor bubble. In one example of block 720, flexible membrane 106 is provided. In another example of block 720, flexible membrane 506 is provided and adheres to actuator chamber substrate 510 directly or via an adhesive layer.

[0036] Block 730 is option. If included, at block 730, method 700 provides a mechanical beam on an opposite side of the flexible membrane from the actuator chamber, the flexible membrane forming a surface of actuator chamber. In one example of block 730, mechanical beam 116 (or mechanical beam 540) is provided. The longitudinal axis of the mechanical beam aligning with a direction of a portion of the “U” shaped channel 518 (e.g., at curved channel 520), as discussed above with respect to FIGs. 5 and 6. Accordingly, the mechanical beam provided in block 730 is aligned with the resistor (e.g., resistor 508), such as a central portion where the resistor is a bowtie-shaped resistor. The longitudinal axis of the mechanical beam may be perpendicular to a longitudinal axis of the heating device. Alternatively, the longitudinal axis of the mechanical beam may be perpendicular to the longitudinal axis of the heating device.

[0037] Method 700 may include providing other features discussed above with respect to FIGs. 1 - 4. For example, method 700 may include providing the actuator fluid 104. As7LEGAL\79425631\3PATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565 another example, method 700 may include providing a controller, such as controller 128, and / or providing a control signal, such as pulse 202, to operate the actuator device using the controller. As another alternative or additional example, method 700 may include providing one or more reservoirs, such as actuator fluid reservoir 120. Actuator fluid reservoir 120 may be coupled to “U” shaped channel 518 via a hole within adhesive layer that is further filled with adhesive.

[0038] FIG. 8 shows example stroboscopic high speed images 800 of unconfined bubble dynamics. FIG. 9 shows example stroboscopic high speed images 900 of confined bubble dynamics within curved channel 520 of actuator device 500 of FIG. 5, in embodiments. FIGs. 8 and 9 are best viewed together with the following description. For both FIG. 8 and FIG. 9, resistor 508 was a 300 x 600 pm2 resistor with 250pm corner fillets, pulse 202 (e.g., a control signal from controller 128) had a power of 265 W, and stroboscopic imaging was performed at 2 Mfps.

[0039] For the unconfined bubble dynamics, (FIG. 8) water was placed on a surface of resistor 508 and stroboscopic high speed images 800 were imaged as pulse 202 was applied. As shown by stroboscopic high speed images 800, bubble nucleation occurs at time t = 3.5ps upon which the vapor film rapidly coalesces and expands until reaching its maximum extent at time t = 17. Ops before collapsing. The collapse of the vapor bubble creates a cavitation event, t = 44.5ps, which causes a vapor bubble rebound.

[0040] For the confined bubble dynamics, (FIG. 9), actuator chamber substrate 510 was placed over resistor 508 to form “U” shaped channel 518, which was then filled with water. “U” shaped channel 518 had a channel width of 366pm, a channel height of 329pm, a channel length of 7.191mm, and a distance of resistor 508 from reservoirs 512 of 926pm. Figure 9 shows example stroboscopic high speed images 900, bubble nucleation occurs at time t = 3.5ps upon which the vapor film expands and forms distinct regions by time t = 6. Ops. During expansion, the vapor bubble breaks up at time t = 10. Ops, and begins to collapse at time t = 17. Ops and is fully collapsed at time t = 70ps without bubble rebound.

[0041] The systems and methods herein provide distinct advantages over conventional micro-mechanical actuators (e.g., Piezo actuators). Using laser vibrometry, performance of actuator device 500 is measured and a deflection of flexible membrane 506 (e.g., 2.5 um Mylar) up to 57pm is demonstrated, which far exceeds conventional piezoelectric micro-actuators in terms of stroke. Actuator device 100 / 500 with micro-beams (e.g., mechanical beam 116 / 540) has use in micro-robotics and precision placement applications. Further, actuator device 5008LEGAL\79425631\3PATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565 effectively ejects steel milli-spheres from surface 302 and may have application in self- cleaning surfaces.

[0042] FIGs. 10A, 10B, 10C and 10D show experimental data of deflection of flexible membrane 106 as a function of an actuation voltage of pulse 202, demonstrating the ability to span a multitude of deflection distances depending on the degree of actuation required for an application. In this example, flexible membrane 106 is formed of Mylar membrane with a thickness of 2.5pm, and heating device 108 is a 500pm x 1000pm fluorine-doped tin oxide (FTO) 48.0Q resistor, actuator fluid 104 is water, and pulse 202 has an amplitude of 170V and a duration of 5ps. N = 10 averaging samples. FIGs. 10A and 10B show a series of graphs 1000( 1 )— (6) illustrating displacement and velocity of a surface of flexible membrane 106 over time as captured using Actuation 2D Dynamics. FIG. 10C is a graph 1020 illustrating velocity over time for different voltages of pulse 202. FIG. 10D is a graph 1040 illustrating displacement over time for different voltages of pulse 202.

[0043] FIG. 11 is a graph illustrating experimental data for deflection of mechanical beam 116 of FIG. 1, in embodiments. Particularly, FIG. 11 shows the cantilever beam adding mechanical advantage to actuator device 100 to amplify the stroke to approximately 430 um. Resistor 508 is a 500 x 1000 pm2 resistor and flexible membrane 506 is a 2.5pm Mylar membrane. Pulse 202 has a duration of 5ps.

[0044] Changes may be made in the above methods and systems without departing from the scope hereof. It should thus be noted that the matter contained in the above description or shown in the accompanying drawings should be interpreted as illustrative and not in a limiting sense. The following claims are intended to cover all generic and specific features described herein, as well as all statements of the scope of the present method and system, which, as a matter of language, might be said to fall therebetween.Combination of Features

[0045] Features described above as well as those claimed below may be combined in various ways without departing from the scope hereof. The following enumerated examples illustrate some possible, non-limiting combinations:

[0046] (Al) An actuator device, comprising: an actuator chamber having actuator fluid therein; a flexible membrane forming at least one surface of the actuator chamber; and a heating device in the actuator chamber; wherein activation of the heating device causes the actuator fluid to nucleate and form a vapor bubble that actuates the flexible membrane.9LEGAL\79425631\3PATENTClient Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565

[0047] (A2) Embodiments of (Al) further including a mechanical beam positioned adjacent the flexible membrane, wherein the actuation of the flexible membrane actuates the mechanical beam.

[0048] (A3) Embodiments of either (Al) or (A2) further including one or more supports coupled to a substrate of the actuator device and supporting the mechanical beam.

[0049] (A4) In any of embodiments of (A1)-(A3), the substrate forming the actuator chamber.

[0050] (A5) Any embodiments of (A1)-(A4) further including one or both of: the actuator chamber having an inlet coupled to a actuator fluid reservoir for maintaining amount of the actuator fluid within the actuator chamber.

[0051] (A6) In any of embodiments (A1)-(A5), the actuator fluid is water.

[0052] (A7) In any of embodiments of (A1)-(A6), the flexible membrane is mylar film.

[0053] (A8) In any of embodiments of (A1)-(A7), the flexible membrane is 2.5 micrometers thick.

[0054] (A9) In any of embodiments of (A1)-(A8), the actuator chamber including: a first actuator substrate, the heating device being formed thereon or embedded therein; a channel layer forming a fluid channel, the actuator fluid located in the fluid channel, the channel layer between the first actuator substrate and the flexible membrane.

[0055] (A10) In any of embodiments of (A1)-(A9), the first actuator substrate is a glass substrate.

[0056] (Al l) In any of embodiments of (Al)-(A10), the channel layer is an adhesive layer coupled to the first actuator substrate and the flexible membrane.

[0057] (A12) In any of embodiments of (Al)-(Al l), the heating device is a resistor formed during an etching process of the first actuator substrate.

[0058] (A13) In any of embodiments of (A1)-(A12), the first actuator substrate has a plurality of actuator chambers located thereon.

[0059] (A14) The embodiment (Al 3) further including a controller for controlling the heating device of each one of the plurality of actuator chambers.

[0060] (Al 5) In any of embodiments of (A1)-(A14), the heating device is a resistor.

[0061] (A16) Any embodiments of (A1)-(A13) further including a controller for controlling the heating device.10LEGAL\79425631\3PATENTClient Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565

[0062] (Bl) A method of manufacturing an actuator device, including: providing an actuator chamber having a heating device in the actuator chamber; providing a flexible membrane forming at least one surface of the actuator chamber, the flexible membrane actuating in response to activation of the heating device causing actuator fluid in the actuator chamber to form a vapor bubble that actuates the flexible membrane; providing a mechanical beam on an opposite side of the flexible membrane from the actuator chamber, the flexible membrane mechanically coupling with the mechanical beam.

[0063] (B2) In embodiments of (Bl), the actuator device having the characteristics of any of embodiments (A1)-(A16).11LEGAL\79425631\3

Claims

PATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 00646565CLAIMSWhat is claimed is:

1. An actuator device, comprising: an actuator chamber having actuator fluid therein; a flexible membrane forming at least one surface of the actuator chamber; and a heating device in the actuator chamber; wherein activation of the heating device causes the actuator fluid to nucleate and form a vapor bubble that actuates the flexible membrane.

2. The actuator device of claim 1, further comprising a mechanical beam positioned adjacent the flexible membrane, wherein the actuation of the flexible membrane actuates the mechanical beam.

3. The actuator device of claim 2, further comprising one or more supports coupled to a substrate of the actuator device and supporting the mechanical beam.

4. The actuator device of claim 3, the substrate forming the actuator chamber.

5. The actuator device of claim 1, further comprising one or both of: the actuator chamber having an inlet coupled to a actuator fluid reservoir for maintaining amount of the actuator fluid within the actuator chamber.

6. The actuator device of claim 1, the actuator fluid being water.

7. The actuator device of claim 1, the flexible membrane being mylar film.

8. The actuator device of claim 7, the flexible membrane being 2.5 micrometers thick.

9. The actuator device of claim 1, the actuator chamber comprising: a first actuator substrate, the heating device being formed thereon or embedded therein; a channel layer forming a fluid channel, the actuator fluid located in the fluid channel, the channel layer between the first actuator substrate and the flexible membrane.12LEGAL\79425631\3PATENT Client Ref. 2024-260-02 Attorney Docket No. UOCO.P2100WO / 0064656510. The actuator device of claim 9, the first actuator substrate being a glass substrate.

11. The actuator device of claim 9, the channel layer being an adhesive layer coupled to the first actuator substrate and the flexible membrane.

12. The actuator device of claim 9, the heating device being a resistor formed during an etching process of the first actuator substrate.

13. The actuator device of claim 9, the first actuator substrate having a plurality of actuator chambers located thereon.

14. The actuator device of claim 13, further comprising a controller for controlling the heating device of each one of the plurality of actuator chambers.

15. The actuator device of claim 1, the heating device being a resistor.

16. The actuator device of claim 1, further comprising a controller for controlling the heating device.

17. A method of manufacturing an actuator device, comprising: providing an actuator chamber having a heating device in the actuator chamber; providing a flexible membrane forming at least one surface of the actuator chamber, the flexible membrane actuating in response to activation of the heating device causing actuator fluid in the actuator chamber to form a vapor bubble that actuates the flexible membrane; providing a mechanical beam on an opposite side of the flexible membrane from the actuator chamber, the flexible membrane mechanically coupling with the mechanical beam.

18. The method of claim 17, the actuator device having the characteristics of any of claims 1-16.13LEGAL\79425631\3

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