Ejection device, ejection program, ejection method, liquefaction device, and liquefaction method

Abstract

The present invention discharges a liquid beam regardless of the diameter of the discharged liquid beam. A discharge device (1) discharges a liquid beam of an element that is a gas under a normal condition and has a desired diameter. The discharge device (1) comprises: a container (10) provided with a discharge port (103); a supply unit (11) that supplies the element that is a gas to the container at a desired supply pressure; a temperature adjustment unit (12) that adjusts the element temperature of the element in the container by adjusting the container temperature of the container; a pressure control unit (21) that controls the supply pressure by controlling the supply unit; and a temperature control unit (22) that controls the element temperature by controlling the temperature adjustment unit. When the pressure at the triple point of the element is defined as a triple point pressure, the pressure control unit controls the supply pressure to a first pressure lower than the triple point pressure. The temperature control unit controls the temperature adjustment unit such that at least a discharge port element, which is an element positioned at the discharge port, is in a solid state and the discharge port is clogged. After the discharge port is clogged, the temperature control unit maintains the element temperature, and the pressure control unit controls the supply pressure to a second pressure higher than the triple point pressure. After the supply pressure reaches the second pressure, the temperature control unit controls the temperature adjustment unit such that at least the discharge port element is in a liquid state.

Description

Spit-out device, spit-out program, spit-out method, liquefaction device, and liquefaction method

[0001] The present invention relates to a spit-out device, a spit-out program, a spit-out method, a liquefaction device, and a liquefaction method.

[0002] There is a known technique for storing hydrogen, which is a gas under standard conditions, in a container and supplying a liquid beam to a vacuum environment by discharging liquid hydrogen obtained by pressurizing and cooling gaseous hydrogen from a discharge port provided in the container. For example, Non-Patent Document 1 discloses a technique for discharging a liquid beam of hydrogen with a diameter of 5 micrometers into a vacuum environment. In Non-Patent Document 1, a liquid hydrogen beam is called a jet and is assumed to be used as a proton supply source for a laser-driven proton accelerator. In addition, since a liquid beam of hydrogen (hereinafter referred to as a hydrogen beam) can continuously supply the target hydrogen, it is also expected to be used as a fuel for laser fusion. When used as a fuel for laser fusion, specific examples of the elements constituting the liquid beam include hydrogen, deuterium, and tritium. Further, assuming the use of a beam of a liquid element as an ion supply source for a laser-driven ion accelerator, the elements used for the liquid beam may also include deuterium, nitrogen, oxygen, and noble gases (neon, argon, krypton, and xenon). It is also conceivable to mix multiple types of these elements.

[0003] M. Rehwald et al., "Ultra-short pulse laser acceleration of protons to 80 MeV from cryogenic hydrogen jets tailored to near-critical density", nature communications 14, 4009 (2023)

[0004] By the way, assuming the use of a liquid beam as a fuel for laser fusion, a liquid beam with a larger diameter (for example, about 50 micrometers) is required to satisfy the supply amount of hydrogen.

[0005] To obtain a larger diameter liquid beam, one might consider increasing the diameter of the outlet in the container to match the diameter of the liquid beam. However, if we assume that the diameter of the liquid beam is increased tenfold, for example from 5 micrometers to 50 micrometers, the diameter of the outlet will also increase by approximately tenfold, and the area of ​​the outlet will increase by approximately 100 times. As a result, the hydrogen pressure inside the container will decrease significantly (by about two orders of magnitude), making it impossible to liquefy the hydrogen due to insufficient pressure.

[0006] One aspect of the present invention has been made in view of the above-mentioned problems, and its object is to provide a technology that can discharge a liquid beam regardless of the size of the diameter of the discharged liquid beam.

[0007] To solve the above problems, a discharge device according to one aspect of the present invention is a discharge device for discharging a liquid beam of an element that is a gas under standard conditions and having a desired diameter, comprising: a container provided with a discharge port; a supply unit for supplying the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit for adjusting the elemental temperature of the element in the container by adjusting the container temperature of the container; a pressure control unit for controlling the supply pressure by controlling the supply unit; and a temperature control unit for controlling the elemental temperature by controlling the temperature adjustment unit, wherein the pressure at the triple point of the element is As the triple point pressure, the pressure control unit controls the supply pressure to a first pressure below the triple point pressure, and the temperature control unit controls the temperature adjustment unit so that at least the discharge port element, which is the element located at the discharge port, becomes solid and the discharge port becomes clogged. After the discharge port becomes clogged, the temperature control unit maintains the element temperature, and the pressure control unit controls the supply pressure to a second pressure above the triple point pressure. After the supply pressure reaches the second pressure, the temperature control unit controls the temperature adjustment unit so that at least the discharge port element becomes liquid.

[0008] To solve the above problems, a discharge method according to one aspect of the present invention is a discharge method for discharging a liquid beam of an element that is a gas under standard conditions and having a desired diameter from a discharge port provided in a container, comprising: a supply process for supplying the element, which is a gas, to the container while adjusting the supply pressure for supplying the element to the container to a first pressure lower than the triple point pressure, with the pressure at the triple point of the element being the triple point pressure; a cooling process for solidifying at least the discharge port element, which is the element located at the discharge port, by cooling the element in the container while maintaining the supply pressure at the first pressure; an adjustment process for adjusting the supply pressure to a second pressure higher than the triple point pressure while maintaining the temperature of the element; and a heating process for liquefying the discharge port element by heating the element so that at least the discharge port element is in a liquid state, while maintaining the supply pressure at the second pressure, and discharging the liquid beam from the discharge port.

[0009] To solve the above problems, a liquefaction apparatus according to one aspect of the present invention is a liquefaction apparatus that liquefies an element, which is a gas under standard conditions, by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, comprising: the container; a supply unit that supplies the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit that adjusts the elemental temperature of the element in the container by adjusting the container temperature of the container; and a control unit that controls the supply unit and the temperature adjustment unit, wherein the temperature and pressure of the triple point of the element are set as the triple point temperature and triple point pressure, respectively, and the control unit (1 ) Starting from a gaseous state in which the elemental temperature of at least the discharge port element, which is an element located at the discharge port, is higher than the triple point temperature and the supply pressure is lower than the triple point pressure, (2) the elemental temperature is lower than the triple point temperature and the supply pressure is lower than the triple point pressure, and then, in this order, the elemental temperature is lower than the triple point temperature and the supply pressure is higher than the triple point pressure, and (3) the supply unit and the temperature control unit are controlled to reach a liquid state in which the elemental temperature is higher than the triple point temperature and the supply pressure is higher than the triple point pressure.

[0010] To solve the above problems, a liquefaction method according to one aspect of the present invention is a liquefaction method in which an element that is a gas under standard conditions is supplied to a container provided with a discharge port and cooled under pressure higher than the standard conditions, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively, and the method includes a phase change process to change the element from a gaseous state in which (1) the element temperature of at least the discharge port element located at the discharge port is higher than the triple point temperature and the supply pressure is lower than the triple point pressure, to a first solid state in which the element temperature is lower than the triple point temperature and the supply pressure is lower than the triple point pressure, and to a second solid state in which the element temperature is lower than the triple point temperature and the supply pressure is higher than the triple point pressure, in this order, to a liquid state in which the element temperature is higher than the triple point temperature and the supply pressure is higher than the triple point pressure.

[0011] To solve the above problems, a discharge device according to one aspect of the present invention is a discharge device that discharges a liquid beam of an element that is a gas under standard conditions and has a desired diameter, comprising: a container provided with a discharge port; a supply unit that supplies the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit that adjusts the elemental temperature of the element in the container by adjusting the container temperature of the container; a pressure control unit that controls the supply pressure by controlling the supply unit; and a temperature control unit that controls the elemental temperature by controlling the temperature adjustment unit, wherein the pressure at the triple point of the element is taken as the triple point pressure, the pressure control unit controls the supply pressure to a pressure exceeding the triple point pressure, the temperature control unit controls the temperature adjustment unit so that at least the discharge port element, which is the element located at the discharge port, becomes solid and the discharge port becomes clogged, and after the discharge port becomes clogged, the temperature adjustment unit controls the temperature adjustment unit so that at least the discharge port element becomes liquid.

[0012] To solve the above problems, a discharge method according to one aspect of the present invention is a discharge method for discharging a liquid beam of an element that is a gas under standard conditions and having a desired diameter from a discharge port provided in a container, comprising: a supply process for supplying the element in gaseous form to the container while adjusting the supply pressure for supplying the element to the container to a pressure exceeding the triple point pressure, with the pressure at the triple point of the element being used as the triple point pressure; a cooling process for solidifying at least the discharge port element, which is the element located at the discharge port, by cooling the element in the container; and a heating process for liquefying the discharge port element by heating the element so that at least the discharge port element is in a liquid state, and discharging the liquid beam from the discharge port.

[0013] To solve the above problems, a liquefaction apparatus according to one aspect of the present invention is a liquefaction apparatus that liquefies an element, which is a gas under standard conditions, by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, comprising: a container; a supply unit that supplies the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit that adjusts the elemental temperature of the element in the container by adjusting the container temperature of the container; and a control unit that controls the supply unit and the temperature adjustment unit, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively, and the control unit controls the supply unit and the temperature adjustment unit under a supply pressure higher than the triple point pressure so that (1) the elemental temperature of at least the discharge port element, which is the element located at the discharge port, is from a gaseous state where the elemental temperature is higher than the triple point temperature, (2) the elemental temperature is lower than the triple point temperature, and (3) the elemental temperature is higher than the triple point temperature.

[0014] To solve the above problems, a liquefaction method according to one aspect of the present invention is a liquefaction method in which an element that is a gas under standard conditions is supplied to a container provided with a discharge port and cooled under pressure higher than the standard conditions, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively, and under a supply pressure higher than the triple point pressure, the method includes a phase change process in which the element undergoes a phase change from (1) a gaseous state in which the elemental temperature of at least the discharge port element located at the discharge port is higher than the triple point temperature, (2) a solid state in which the elemental temperature is lower than the triple point temperature, and (3) a liquid state in which the elemental temperature is higher than the triple point temperature.

[0015] To solve the above problems, a discharge device according to one aspect of the present invention is a discharge device for discharging a liquid beam of a substance that is a gas under standard conditions and having a desired diameter, comprising: a container provided with a discharge port; a supply unit that supplies the gaseous substance to the container at a desired supply pressure; a temperature adjustment unit that adjusts the temperature of the substance inside the container by adjusting the container temperature of the container; and a control unit that adjusts the supply pressure by controlling the supply unit and adjusts the temperature of the substance by controlling the temperature adjustment unit, wherein the control unit controls the supply unit to discharge the gaseous substance from the discharge port by adjusting the supply pressure to a first pressure below the critical pressure, with the critical pressure of the substance being the critical pressure, and then adjusts at least the temperature adjustment unit of the temperature adjustment unit and the supply unit so that at least the discharge port substance located at the discharge port becomes solid and the discharge port becomes clogged, and after the discharge port becomes clogged, the control unit adjusts at least the temperature adjustment unit of the temperature adjustment unit and the supply unit so that at least the discharge port substance becomes liquid.

[0016] To solve the above problems, a discharge method according to one aspect of the present invention is a discharge method for discharging a liquid beam of a substance that is a gas under standard conditions and having a desired diameter from a discharge port provided in a container, comprising: a supply process for supplying the substance in a gaseous state to the container, while adjusting the supply pressure for supplying the substance to the container to a first pressure below the critical pressure, with the pressure at the critical point of the substance being the critical pressure, so that the substance in a gaseous state is discharged from the discharge port; a cooling process for solidifying at least the discharge port substance, which is the substance located at the discharge port, by cooling at least the substance in the container; and a heating process for liquefying the discharge port substance by heating at least the substance so that at least the discharge port substance is in a liquid state, and discharging the liquid beam from the discharge port.

[0017] To solve the above problems, a liquefaction apparatus according to one aspect of the present invention is a liquefaction apparatus that liquefies a substance that is a gas under standard conditions by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, comprising: a container; a supply unit that supplies the gaseous substance to the container at a desired supply pressure; a temperature adjustment unit that adjusts the temperature of the substance in the container by adjusting the container temperature of the container; and a control unit that controls the supply unit and the temperature adjustment unit, wherein the pressure at the critical point of the substance is taken as the critical pressure, and the control unit controls the supply unit and the temperature adjustment unit to reach a state in which (1) the discharge port substance, which is at least the substance located at the discharge port, is a gaseous state under a first pressure where the supply pressure is lower than the critical pressure, (2) the discharge port substance becomes a solid, passing through a solidification blockage state in which at least the substance temperature among the substance temperature and the supply pressure of the discharge port substance is lowered, and (3) the discharge port substance becomes a liquid, passing through a state in which at least the substance temperature among the substance temperature and the supply pressure is raised.

[0018] To solve the above problems, a liquefaction method according to one aspect of the present invention is a liquefaction method in which a substance that is a gas under standard conditions is supplied to a container provided with a discharge port and the substance is cooled under pressure higher than the standard conditions, wherein the pressure at the critical point of the substance is set as the critical pressure, and the method includes a phase change process to change the phase of the substance from (1) a gaseous state in which at least the discharge port substance, which is the substance located at the discharge port, is a gas, under a first pressure where the supply pressure is lower than the critical pressure, to (2) a solidification blockage state in which at least the substance temperature among the substance temperature and the supply pressure is lowered so that the discharge port substance becomes a solid, to (3) a liquid state in which at least the substance temperature among the substance temperature and the supply pressure is raised so that the discharge port substance becomes a liquid.

[0019] According to one aspect of the present invention, a liquid beam can be discharged regardless of the size of the diameter of the discharged liquid beam.

[0020] This is a schematic diagram showing the configuration of a discharge device according to an embodiment of the present invention. This is a cross-sectional view of the flow path from the container to the discharge port according to an embodiment of the present invention. This is a temperature-pressure diagram of hydrogen according to an embodiment of the present invention. This is a schematic diagram showing the change of state in the container according to an embodiment of the present invention. This is a block diagram showing the configuration of a liquefaction device according to an embodiment of the present invention. This is a flow diagram showing the flow of the discharge method and liquefaction method according to an embodiment of the present invention. This is a schematic diagram showing an example of an element's temperature-pressure diagram. This is an argon temperature-pressure diagram. This is a nitrogen temperature-pressure diagram. This is a schematic diagram showing the change of state in the container according to an embodiment of the present invention.

[0021] [Embodiment 1] An embodiment of the present invention will be described below. In this embodiment, a discharge device 1, which is a device for discharging a liquid beam of an element that is a gas, will be described. In this embodiment, a liquefaction device, which is a device for liquefying an element that is a gas in the same way as the discharge device 1, will also be described.

[0022] (Overview of Discharge Device 1) Discharge device 1 is a device for discharging a liquid beam of an element that is a gas under standard conditions and has a desired diameter. A gas under standard conditions refers to a gas at 0°C and 1 atmosphere (i.e., 0.1 MPa). In this embodiment, as an example, we will describe the case where the "element" is hydrogen, that is, the case where the discharge device 1 discharges a liquid beam of hydrogen.

[0023] (Configuration of Discharge Device 1) The discharge device 1 according to this embodiment will be described with reference to Figure 1. Figure 1 is a schematic diagram showing the configuration of the discharge device 1. As an example, the discharge device 1 includes a container 10, a supply unit 11, a pressure gauge 111, a temperature control unit 12, a cooler 13, a control unit 20, a chamber 30, and a vacuum pump 31, as shown in Figure 1. The cooler is also called a refrigerator.

[0024] Container 10 is a container equipped with a discharge port. Container 10 also has cylindrical side walls. Within container 10, a cylindrical internal space (internal space 101, described later in Figure 2) surrounded by the side walls is provided coaxially with the cylindrical side walls and functions as a container for the supplied elements. As shown in Figure 1, container 10 includes a disc-shaped bottom 100 connected to the side walls. A circular discharge port (discharge port 103, described later in Figure 2) is provided on the bottom 100, on the centerline of container 10 (i.e., on the centerline of the internal space 101). This discharge port opens into the chamber 30, described later. In other words, the bottom 100 connects container 10 and the chamber 30 via this discharge port. That is, the bottom 100 constitutes a flow path when the liquid or gas inside container 10 is discharged into the chamber 30. For example, as shown in Figure 1, in the discharge device 1, when liquid hydrogen L is present in the container 10, the structure allows the liquid hydrogen (i.e., liquid beam) L to be discharged into the chamber 30 through a discharge port provided at the bottom 100. In this embodiment, the container 10 is attached to the cooling head of the cooler 13 via two metal stems (columnar members) and flanges (disc-shaped members) (see Figure 1).

[0025] The diameter of the discharge port provided at the bottom 100 corresponds to the diameter of the liquid beam discharged by the discharge device 1. For example, the diameter of the discharge port may be 50 micrometers or more.

[0026] (Supply Unit 11) The supply unit 11 includes a regulator that controls the total pressure of the element, which is a gas, and a flow rate control valve that adjusts the supply flow rate, in accordance with a control signal supplied from the control unit 20. That is, the supply unit 11 supplies the element, which is a gas, to the container 10 at a desired supply flow rate. As shown in Figure 1, a gas cylinder G filled with hydrogen, which is a gas, at high pressure is connected to the supply unit 11 via a valve and a regulator. The supply unit 11 supplies the hydrogen gas supplied from the gas cylinder G to the container 10 via the gas inlet pipe 110 after reducing the pressure to a desired supply pressure. The supply unit 11 may, for example, adjust the supply flow rate, which is the flow rate of the gas in the gas inlet pipe 110, via a flow rate control valve. The supply unit 11 may also include, for example, a flow meter for measuring the supply flow rate. A pressure gauge 111 is attached to the gas inlet pipe 110, as shown in Figure 1, and measures the supply pressure, which is the pressure in the gas inlet pipe 110. The supply pressure is, as an example, below the critical pressure of the element. In other words, in this embodiment, the supply pressure is, for example, below the critical pressure of hydrogen.

[0027] (Temperature adjustment unit 12) The temperature adjustment unit 12 adjusts the elemental temperature of the elements contained in the internal space 101 of the container 10 by adjusting the container temperature of the container 10 in accordance with a control signal supplied from the control unit 20. The temperature adjustment unit 12 includes, as an example, a temperature sensor 121 and a heating heater 122, as shown in Figure 1. The temperature sensor 121 and the heating heater 122 are attached to the outside of a metal or other material that conducts heat to the container 10, as shown in Figure 1. In this embodiment, the temperature sensor 121 and the heating heater 122 are attached to a flange provided at the bottom of the cooling head of the cooler 13, as shown in Figure 1. In this way, the internal space 101 of the container 10 and the temperature sensor 121 are separated, so a heat gradient is created between the elements contained in the internal space 101 and the temperature sensor 121. Therefore, a temperature difference is created between the temperature (elemental temperature) of the hydrogen contained in the internal space 101 and the temperature detected by the temperature sensor 121. For example, in the embodiment described later, when the temperature obtained by the temperature sensor 121 was 18K, the hydrogen located inside the discharge port 103 (discharge port element) solidified. In light of this result, it is considered that there is a temperature difference of about 5K between the temperature of the hydrogen contained in the internal space 101 and the temperature detected by the temperature sensor 121. Thus, it is difficult to precisely detect the temperature of the element contained in the internal space 101 (elemental temperature) using the temperature sensor 121. In other words, in this embodiment, the temperature detected by the temperature sensor 121 (i.e., the flange temperature) is different from the elemental temperature. Therefore, in this embodiment, the temperature detected by the temperature sensor 121 is used only as a guideline for the temperature of the container 10, and is not used for the purpose of detecting the elemental temperature. Even without precisely detecting the elemental temperature, the state of the element stored in the internal space 101 (gas state, solid state, or liquid state) can be determined by checking the supply pressure value, the vacuum level value in the chamber 30, and the state of the element discharged from the discharge port 103, which will be described later.When the element is in a gaseous or liquid state, the discharge port 103 (described later) is open, so the pressure indicated by the pressure gauge 111 is approximately equal to the desired supply pressure set in the supply unit 11, and the vacuum level in the chamber 30 is higher than the base vacuum level (see the embodiment described later). The gaseous and liquid states can be identified by observing the state of the element discharged from the discharge port 103. Furthermore, if the discharge port element, which is at least the element located at the discharge port 103, is in a solid state, the discharge port 103 is blocked. Therefore, the pressure indicated by the pressure gauge 111 rises above the desired supply pressure set in the supply unit 11, and the vacuum level in the chamber 30 is approximately equal to the base vacuum level. In addition, if the supply unit 11 is equipped with a flow meter, it is also possible to identify whether the element is in a gaseous or liquid state or a solid state by referring to the flow rate of the element gas supplied through the supply unit 11. The cooler 13 cools the container 10 via the two stems and flanges described above. For example, the cooler 13 may use liquid helium as a refrigerant, or it may be a GM (Gifford-McMahon) refrigerator. The temperature sensor 121 measures the temperature of the flange described above. The heating heater 122 heats the container 10 via the flange described above. For example, the heating heater 122 may be capable of adjusting the degree of heating by controlling the amount of current. Alternatively, for example, the temperature adjustment unit 12 may adjust the temperature of the container 10 by appropriately heating it via the heating heater 122.

[0028] (Control Unit 20) The control unit 20 controls the supply unit 11 and the temperature control unit 12. The control unit 20 includes a pressure control unit 21 and a temperature control unit 22. The pressure control unit 21 and the temperature control unit 22 of the control unit 20 will be described later with reference to Figures 3 and 5. As an example, the control unit 20 is connected to the supply unit 11, the pressure gauge 111, and the temperature control unit 12, as shown in Figure 1. A specific example of the control unit 20 is a processor in a computer.

[0029] The control unit 20 may also use a separate memory unit (not shown). The memory unit stores various data referenced by the control unit 20, as well as various data generated by the control unit 20. Specific examples of data stored in the memory unit include data such as the triple point, sublimation line, melting line, boiling line, and critical point included in the hydrogen temperature-pressure diagram, the supply pressure value measured by the pressure gauge 111, the temperature value measured by the temperature sensor 121, the supply pressure set value, the container temperature set value, and so on.

[0030] (Chamber 30 and vacuum pump 31) The chamber 30 houses the container 10. The vacuum pump 31 is connected to the chamber 30 and evacuates the inside of the chamber 30. When the vacuum pump 31 evacuates the inside of the chamber 30, the inside of the chamber 30 is evacuated.

[0031] (Structure of the flow path at the bottom 100) The structure of the flow path at the bottom 100, that is, the flow path from the container 10 to the discharge port, will be described below. In this embodiment, the container 10 has, as an example, a cylindrical internal space whose diameter exceeds the diameter of the discharge port. It also includes a tapered flow path between the internal space and the discharge port, which decreases in diameter as it approaches the discharge port from the internal space.

[0032] Figure 2 is a cross-sectional view of the flow path in the bottom 100 of the container 10. For example, as shown in Figure 2(a), the bottom 100 comprises an internal space 101, a reduced diameter section 102, and a discharge port 103. The internal space 101 is a space having cylindrical side walls.

[0033] Figure 2(b) is an enlarged view of the reduced diameter section 102 and the discharge port 103 (i.e., an enlarged view of the area marked A in Figure 2(a)). As shown in Figure 2(b), the reduced diameter section 102 comprises a tapered section (tapered flow path) 1021 and a straight section 1022. The tapered section 1021 is a section that reduces in diameter as it approaches the discharge port 103 from the internal space 101, and has a shape similar to a frustocone. The straight section 1022 constitutes the flow path between the tapered section 1021 and the discharge port 103. The straight section 1022 has a cylindrical side wall with a diameter similar to the diameter of the discharge port 103. Here, the internal space 101, the reduced diameter section 102, and the discharge port 103 share a common centerline with the centerline of the container 10.

[0034] Furthermore, as shown in Figure 2(b), the tapered section 1021 comprises a first section 10211 located on the side of the internal space 101 and a second section 10212 located on the side of the discharge port 103. Here, the taper angle θ2 of the second section 10212 is smaller than the taper angle θ1 of the first section 10211. The taper angle refers to the central angle formed by two generatrix lines on a cross-section containing the center line of a predetermined cone, assuming that the tapered section 1021 has a shape similar to a frustocone, which is part of a predetermined cone.

[0035] (Pressure control unit 21 and temperature control unit 22) The pressure control unit 21 adjusts the supply flow rate by controlling the supply unit 11 (and its flow rate control valve), thereby adjusting the supply pressure to a desired value. For example, the pressure control unit 21 may acquire measured values ​​of the supply pressure and supply flow rate in the gas introduction pipe 110 via the pressure gauge 111 and the supply unit 11, respectively. Alternatively, for example, the pressure control unit 21 may calculate a set value for the supply pressure based on data included in the hydrogen temperature-pressure diagram. Then, for example, the pressure control unit 21 may control the supply unit 11 so that the supply pressure becomes the set value based on the acquired measured values ​​and the calculated set value.

[0036] The temperature control unit 22 controls the elemental temperature by controlling the temperature adjustment unit 12. For example, the temperature control unit 22 may acquire the temperature measurement value from the temperature sensor 121 via the temperature adjustment unit 12. Alternatively, the temperature control unit 22 may calculate a set value for the container temperature based on the acquired temperature measurement value and data included in the hydrogen temperature-pressure diagram. In this case, the temperature control unit 22 may output the calculated set value to the temperature adjustment unit 12. Then, the temperature control unit 22 may control the heating heater 122 via the temperature adjustment unit 12 using the set value as the target value.

[0037] Figure 3 is a temperature-pressure diagram for hydrogen. In this embodiment, the temperature at the triple point pt of an element is defined as the triple point temperature Tt, and the pressure at the triple point pt of an element is defined as the triple point pressure Pt. In the case of hydrogen, the triple point temperature Tt is approximately 14 K, and the triple point pressure Pt is approximately 7 × 10⁻⁶. －３ It is in MPa.

[0038] In this embodiment, as shown in Figure 3, the discharge device 1 undergoes a phase change of hydrogen in the order of gas → solid → liquid, and discharges a liquid beam of hydrogen.

[0039] In Figure 3, the gaseous state SG represents the state of the hydrogen gas supplied by the supply unit 11 during the supply process performed by the discharge device 1 (step S21, described later in Figure 6). The gaseous state SG is a state in which the elemental temperature is higher than the triple point temperature Tt, and the supply pressure is lower than the triple point pressure Pt.

[0040] Subsequently, in the cooling process performed by the discharge device 1 (step S22, described later in Figure 6), the pressure control unit 21 controls the supply pressure to a first pressure P1 that is below the triple point pressure Pt, and the temperature control unit 22 controls the temperature adjustment unit 12 so that at least the discharge port elements located at the discharge port 103 become solid and the discharge port 103 becomes clogged. In this cooling process, the hydrogen corresponding to the discharge port elements is changed in state so that the sublimation line passes from the gas side to the solid side. That is, as shown in Figure 3, the hydrogen corresponding to the discharge port elements in the cooling process goes from a gaseous state SG to a first solid state SS1. The first solid state SS1 is a state in which the elemental temperature is lower than the triple point temperature Tt and the supply pressure is lower than the triple point pressure Pt.

[0041] After the cooling process, that is, after the discharge port 103 becomes clogged, in the adjustment process performed by the discharge device 1 (step S23, described later in Figure 6), the temperature control unit 22 maintains the elemental temperature, and the pressure control unit 21 controls the supply pressure to a second pressure P2 that exceeds the triple point pressure Pt. In this adjustment process, as will be described later with reference to Figure 4, the pressure exerted on the solid hydrogen by the gaseous hydrogen remaining inside the container 10 increases from the first pressure P1 to the second pressure P2. That is, the hydrogen corresponding to the discharge port element in the adjustment process progresses from the first solid state SS1 to the second solid state SS2, as shown in Figure 3. The second solid state SS2 is a state in which the elemental temperature is lower than the triple point temperature Tt and the supply pressure is higher than the triple point pressure Pt. The second pressure P2 is below the critical pressure of hydrogen.

[0042] After the adjustment process, that is, after the supply pressure reaches the second pressure P2, in the heating process (step S24 described later in FIG. 6) executed by the discharge device 1, the temperature control unit 22 controls the temperature adjustment unit 12 so that at least the discharge port element is in a liquid state. In this heating process, the hydrogen corresponding to the discharge port element is changed in state so that the melting line passes from the solid side to the liquid side. That is, the hydrogen corresponding to the discharge port element in the heating process changes from the second solid state SS2 to the liquid state SL as shown in FIG. 3. The liquid state SL is a state where the element temperature is higher than the triple point temperature Tt and the supply pressure is higher than the triple point pressure Pt.

[0043] In the prior art, as shown in FIG. 3, a hydrogen liquid beam is discharged by changing the phase in the order of gas → liquid, that is, by directly changing gaseous hydrogen to a liquid. Here, the gaseous state Sg in FIG. 3 represents the state of gaseous hydrogen in the prior art. In the gaseous state Sg, the temperature exceeds the triple point temperature Tt and the pressure exceeds the triple point pressure Pt. In the prior art, the gaseous hydrogen in the gaseous state Sg is cooled and liquefied while maintaining a pressure higher than the triple point pressure Pt. That is, the hydrogen in this cooling process directly changes from the gaseous state Sg to the liquid state SL as shown in FIG. 3.

[0044] (State of Hydrogen in Container 10) FIG. 4 is a schematic diagram showing the state change of hydrogen accompanying the change in pressure and temperature in the container 10.

[0045] FIG. 4(a) is a diagram showing a state where only gaseous hydrogen, that is, gaseous hydrogen G, exists in the container 10. At this time, the supply unit 11 supplies gaseous hydrogen G to the container 10. Also, gaseous hydrogen G is discharged from the container 10 into the evacuated chamber 30 through the discharge port 103. At this time, the state of gaseous hydrogen G corresponds to the gaseous state SG.

[0046] Here, in the process where gaseous hydrogen G passes through the tapered flow path shown in FIG. 2, that is, the reduced-diameter section 102, and is discharged from the discharge port 103 into the evacuated chamber 30, it is conceivable that the temperature of the gaseous hydrogen G passing through the reduced-diameter section 102 decreases due to the Venturi effect. Therefore, when the gaseous hydrogen G is cooled as described above in the cooling process of FIG. 3, solid hydrogen, that is, solid hydrogen S, is generated from the side of the container 10 near the discharge port 103 in a solid state. At this time, the solid hydrogen S is generated so as to inhibit the outflow of the gaseous hydrogen G at the discharge port 103. As a result, the solid hydrogen S closes the discharge port 103 as shown in FIG. 4(b). That is, at this time, the flow path from the container 10 into the chamber 30 is blocked.

[0047] Here, when the solid hydrogen S closes the discharge port 103, the solid hydrogen S receives the first pressure P1 from the gaseous hydrogen G remaining inside the container 10. At this time, the state of the solid hydrogen S corresponds to the first solid state SS1.

[0048] Thereafter, as described above in the adjustment process of FIG. 3, when the pressure control unit 21 controls the supply pressure, the pressure received by the solid hydrogen S rises from the first pressure P1 to the second pressure P2. At the time after the pressure increase, the solid hydrogen S receives the second pressure P2 from the gaseous hydrogen G remaining inside the container 10. At this time, the state of the solid hydrogen S corresponds to the second solid state SS2. Also, as the pressure in the container 10 rises, the gaseous hydrogen G liquefies in the container 10, and liquid hydrogen, that is, liquid hydrogen L, is generated as shown in FIG. 4(c).

[0049] After the solid hydrogen S transitions to the second solid state SS2, as described above in the heating process of FIG. 3, when the temperature control unit 22 controls the temperature adjustment unit 12, the solid hydrogen S liquefies. At this time, the state of the liquid hydrogen L corresponds to the liquid state SL. As a result, as shown in FIG. 4(d), the discharge port 103 opens again, and a liquid beam composed of liquid hydrogen L is discharged from the container 10 into the evacuated chamber 30. Also, as shown in FIG. 4(d), when the supply unit 11 continues to supply the gaseous hydrogen G to the container 10, the gaseous hydrogen G liquefies inside the container 10 and continues to generate liquid hydrogen L, and the liquid beam continues to be discharged from the discharge port 103.

[0050] (Overview of the Liquefaction Device) The liquefaction device according to this embodiment (also referred to as the "liquefaction device" in the following description of this embodiment) will be described below. The liquefaction device is a device for liquefying elements that are gaseous in the same manner as the discharge device 1. That is, the liquefaction device is a device for liquefying elements that are gaseous under standard conditions by supplying them to a container 10 provided with a discharge port 103 and cooling them under pressure higher than standard conditions. The liquefaction device comprises a container 10, a supply unit 11, a temperature adjustment unit 12, and a control unit 20. The supply unit 11 of the liquefaction device supplies the elements that are gaseous to the container 10 at a desired supply pressure. The temperature adjustment unit 12 of the liquefaction device adjusts the elemental temperature of the elements contained in the internal space 101 of the container 10 by adjusting the container temperature of the container 10.

[0051] (Configuration of the control unit 20 of the liquefaction device) The control unit 20 of the liquefaction device controls the supply unit 11 and the temperature adjustment unit 12 so that (1) from a gaseous state SG in which the elemental temperature of the discharge port element, which is at least an element located at the discharge port 103, is higher than the triple point temperature Tt and the supply pressure is lower than the triple point pressure Pt, (2) in the order of a first solid state SS1 in which the elemental temperature is lower than the triple point temperature Tt and the supply pressure is lower than the triple point pressure Pt, and a second solid state SS2 in which the elemental temperature is lower than the triple point temperature Tt and the supply pressure is higher than the triple point pressure Pt, (3) to a liquid state SL in which the elemental temperature is higher than the triple point temperature Tt and the supply pressure is higher than the triple point pressure Pt.

[0052] Figure 5 is a block diagram showing the configuration of the control unit 20 of the liquefaction device. As shown in Figure 5, the control unit 20 comprises a pressure control unit 21 and a temperature control unit 22. The pressure control unit 21 controls the supply unit 11. The temperature control unit 22 controls the temperature adjustment unit 12.

[0053] Furthermore, each of the above-mentioned components of the liquefaction device may be the same as the components of the same name that are provided in the discharge device 1.

[0054] (Flow of liquefaction method M10 and discharge method M20) The flow of liquefaction method M10 performed by the liquefaction apparatus according to this embodiment and the discharge method M20 performed by the discharge apparatus 1 will be described with reference to Figure 6. Figure 6 is a flow diagram showing the flow of liquefaction method M10 and discharge method M20.

[0055] (Liquefaction Method M10) Liquefaction method M10 is a method for liquefying an element that is a gas under standard conditions by supplying it to a container 10 equipped with a discharge port 103 and cooling it under pressure higher than the standard conditions. Liquefaction method M10 includes a phase change process (step) S11, as shown in Figure 6.

[0056] (Step S11) In step S11, the control unit 20 causes the element to undergo a phase change from (1) a gaseous state SG in which the element temperature of the discharge port element, which is at least an element located at the discharge port 103, is higher than the triple point temperature Tt and the supply pressure is lower than the triple point pressure Pt, (2) a first solid state SS1 in which the element temperature is lower than the triple point temperature Tt and the supply pressure is lower than the triple point pressure Pt, and a second solid state SS2 in which the element temperature is lower than the triple point temperature Tt and the supply pressure is higher than the triple point pressure Pt, in this order, to (3) a liquid state SL in which the element temperature is higher than the triple point temperature Tt and the supply pressure is higher than the triple point pressure Pt. As shown in Figure 6, step S11 includes steps S21 to S24 which will be described later.

[0057] (Discharge Method M20) Discharge method M20 is a method for discharging a liquid beam of an element that is a gas under standard conditions and has a desired diameter from a discharge port 103 provided in a container 10. Discharge method M20 includes a supply process (step) S21, a cooling process (step) S22, an adjustment process (step) S23, and a heating process (step) S24, as shown in Figure 6.

[0058] (Step S21) In step S21, the pressure control unit 21 supplies the element, which is a gas, to the container 10 while adjusting the supply pressure for supplying the element to the container 10 to a first pressure P1 which is below the triple point pressure Pt.

[0059] (Step S22) In step S22, the pressure control unit 21 maintains the supply pressure at the first pressure P1, while the temperature control unit 22 cools the elements contained in the internal space 101 of the container 10, thereby solidifying at least the discharge port elements located at the discharge port 103.

[0060] (Step S23) In step S23, the temperature control unit 22 maintains the temperature of the element, while the pressure control unit 21 adjusts the supply pressure to a second pressure P2 that exceeds the triple point pressure Pt.

[0061] (Step S24) In step S24, the pressure control unit 21 maintains the supply pressure at the second pressure P2, while the temperature control unit 22 liquefies the discharge port element by heating the element so that at least the discharge port element is in a liquid state, and discharges a liquid beam from the discharge port 103.

[0062] (Other Modifications of Discharge Device 1) The elements constituting the liquid beam discharged by the discharge device 1 will be described with reference to Figure 7. Figure 7 is a schematic diagram showing an example of a temperature-pressure diagram of an element. In this embodiment, as described above, an example in which the elements constituting the liquid beam discharged by the discharge device 1 are hydrogen has been described. Here, as shown in Figure 7, the element can be any of the solid, liquid, or gaseous elements at temperatures below the critical temperature and pressures below the critical pressure, and can be any element that has a triple point pt. Specific examples of the element include hydrogen, deuterium, and tritium when used as fuel for laser nuclear fusion. Hydrogen is an example when used as a proton source for a laser-driven proton accelerator. Assuming the use of a liquid element beam as an ion source for a laser-driven ion accelerator, deuterium, nitrogen, oxygen, and noble gases (neon, argon, krypton, and xenon) can also be considered as elements to be used in the liquid beam. It is also possible to mix multiple types of these elements.

[0063] Figure 8 is a temperature-pressure diagram for argon. For example, when the discharge device 1 discharges a liquid beam of argon, the temperature-pressure diagram for hydrogen exemplified in this embodiment may be replaced with the temperature-pressure diagram for argon shown in Figure 8.

[0064] Figure 9 is a temperature-pressure diagram for nitrogen. For example, when the discharge device 1 discharges a liquid beam of nitrogen, the temperature-pressure diagram for hydrogen exemplified in this embodiment may be replaced with the temperature-pressure diagram for nitrogen shown in Figure 9.

[0065] [Embodiment 2] Another embodiment of the present invention will be described below. For the sake of convenience of explanation, components having the same function as those described in the above embodiment will be denoted by the same reference numerals, and their descriptions will not be repeated.

[0066] (Overview of the Discharge Device According to This Embodiment) The discharge device according to this embodiment is a device for discharging a liquid beam of an element that is a gas under standard conditions and has a desired diameter. One difference between the discharge device according to this embodiment and the discharge device 1 according to Embodiment 1 is that, for example, when the "element" is hydrogen, the discharge device according to this embodiment maintains the hydrogen supply pressure at a pressure higher than the triple point pressure of hydrogen throughout the series of processes. That is, the discharge device according to this embodiment maintains the supply pressure of gaseous hydrogen at a pressure higher than the triple point pressure of hydrogen, cools and solidifies the hydrogen, then heats and liquefies the solid hydrogen to discharge a liquid beam of hydrogen.

[0067] (Configuration of the discharge device according to this embodiment) The discharge device according to this embodiment, like the discharge device 1, comprises a container 10, a supply unit 11, a pressure gauge 111, a temperature adjustment unit 12, a cooler 13, a control unit 20, a chamber 30, and a vacuum pump 31.

[0068] The container 10 is a container equipped with a discharge port. The supply unit 11 supplies the element, which is a gas, to the container 10 at a desired supply pressure. The temperature adjustment unit 12 adjusts the element temperature of the element contained in the internal space 101 of the container 10 by adjusting the container temperature of the container 10.

[0069] The control unit 20 controls the supply unit 11 and the temperature adjustment unit 12. The control unit 20 comprises a pressure control unit 21 and a temperature control unit 22. The pressure control unit 21 controls the supply pressure by controlling the supply unit 11. The temperature control unit 22 controls the elemental temperature by controlling the temperature adjustment unit 12. In this embodiment, the temperature at the triple point pt of an element is defined as the triple point temperature Tt, and the pressure at the triple point pt of an element is defined as the triple point pressure Pt.

[0070] The pressure control unit 21 controls the supply pressure to a pressure exceeding the triple point pressure Pt (for example, P2 as shown in Figure 3). The temperature control unit 22 controls the temperature adjustment unit 12 so that at least the discharge port elements located at the discharge port 103 become solid and the discharge port 103 becomes clogged, and after the discharge port 103 becomes clogged, it controls the temperature adjustment unit 12 so that at least the discharge port elements become liquid.

[0071] Other than the configuration described above, the other configurations in the discharge device according to this embodiment are the same as those in the discharge device 1 according to Embodiment 1, and therefore will not be described here.

[0072] (Overview of the liquefaction apparatus according to this embodiment) The liquefaction apparatus according to this embodiment will be described below. The liquefaction apparatus according to this embodiment is a device for liquefying elements that are gaseous in the same way as the discharge apparatus according to this embodiment. That is, the liquefaction apparatus according to this embodiment is a device for liquefying elements that are gaseous under standard conditions by supplying them to a container 10 provided with a discharge port 103 and cooling them under pressure higher than the standard conditions. The liquefaction apparatus according to this embodiment comprises a container 10, a supply unit 11, a temperature adjustment unit 12, and a control unit 20. The supply unit 11 of the liquefaction apparatus according to this embodiment supplies the elements that are gaseous to the container 10 at a desired supply pressure. The temperature adjustment unit 12 of the liquefaction apparatus according to this embodiment adjusts the elemental temperature of the elements contained in the internal space 101 of the container 10 by adjusting the container temperature of the container 10. The control unit 20 of the liquefaction apparatus according to this embodiment controls the supply unit 11 and the temperature adjustment unit 12.

[0073] (Configuration of the control unit 20 in the liquefaction apparatus according to this embodiment) The control unit 20 in the liquefaction apparatus according to this embodiment controls the supply unit 11 and the temperature adjustment unit 12 so that, under a supply pressure higher than the triple point pressure Pt, (1) the element temperature of the discharge port element, which is at least an element located at the discharge port 103, is higher than the triple point temperature Tt in a gaseous state (for example, Sg shown in Figure 3), (2) the element temperature is lower than the triple point temperature Tt in a solid state (for example, SS2 shown in Figure 3), and (3) the element temperature is higher than the triple point temperature Tt in a liquid state SL.

[0074] Other than the configuration described above, the configurations in the liquefaction apparatus according to this embodiment are the same as those in the liquefaction apparatus according to Embodiment 1, and therefore will not be described here.

[0075] (Flow of liquefaction method and discharge method according to this embodiment) The flow of the liquefaction method performed by the liquefaction apparatus according to this embodiment and the discharge method performed by the discharge apparatus according to this embodiment will be described below.

[0076] (Liquefaction Method According to This Embodiment) The liquefaction method according to this embodiment is a method for liquefying an element that is a gas under standard conditions by supplying it to a container 10 provided with a discharge port 103 and cooling it under pressure higher than the standard conditions. The liquefaction method according to this embodiment includes a phase change process. The phase change process according to this embodiment includes a supply process, a cooling process, and a heating process, which will be described later in the discharge method according to this embodiment.

[0077] (Phase change processing according to this embodiment) In the phase change processing according to this embodiment, the control unit 20, under a supply pressure higher than the triple point pressure Pt, (1) changes the phase of an element from a gaseous state in which the element temperature of at least the discharge port element located at the discharge port 103 is higher than the triple point temperature Tt (for example, Sg shown in Figure 3), (2) through a solid state in which the element temperature is lower than the triple point temperature Tt (for example, SS2 shown in Figure 3), to (3) a liquid state SL in which the element temperature is higher than the triple point temperature Tt.

[0078] (Discharge method according to this embodiment) The discharge method according to this embodiment is a method for discharging a liquid beam of an element that is a gas under standard conditions and has a desired diameter from a discharge port 103 provided in a container 10. The discharge method according to this embodiment includes a supply process, a cooling process, and a heating process.

[0079] (Supplying process according to this embodiment) In the supplying process according to this embodiment, the pressure control unit 21 supplies the element in gaseous form to the container 10 while adjusting the supply pressure for supplying the element to the container 10 to a pressure exceeding the triple point pressure Pt (for example, P2 as shown in Figure 3).

[0080] (Cooling process according to this embodiment) In the cooling process according to this embodiment, the temperature control unit 22 solidifies at least the discharge port elements, which are elements located at the discharge port 103, by cooling the elements contained in the internal space 101 of the container 10.

[0081] (Heating process according to this embodiment) In the heating process according to this embodiment, the temperature control unit 22 liquefies the discharge port elements by heating the elements so that at least the discharge port elements are in a liquid state, and discharges a liquid beam from the discharge port 103.

[0082] [Embodiment 3] Another embodiment of the present invention will be described below. For the sake of convenience of explanation, components having the same function as those described in the above embodiments will be denoted by the same reference numerals, and their descriptions will not be repeated.

[0083] (Overview of the Discharge Device According to This Embodiment) In this embodiment, a discharge device, which is a device for discharging a liquid beam of a gaseous substance, will be described. In addition, in this embodiment, a liquefaction device, which is a device for liquefying a gaseous substance in the same manner as the discharge device according to this embodiment, will also be described.

[0084] The substance according to this embodiment is a gas under standard conditions, and is either an elemental substance consisting of a single element, or a mixture or compound consisting of multiple elements. Here, the substance may be a substance that can exist in any state—solid, liquid, or gas—at temperatures and pressures below its critical temperature and pressure, and may have a triple point pt.

[0085] Specific examples of such substances include hydrogen, deuterium, and tritium when used as fuel for laser nuclear fusion. Hydrogen is an example when used as a proton source for a laser-driven proton accelerator. Assuming the use of a liquid beam as an ion source for a laser-driven ion accelerator, possible materials for the liquid beam include deuterium, nitrogen, oxygen, as well as noble gases (neon, argon, krypton, and xenon) and gaseous substances at room temperature and pressure (such as methane). It is also possible to mix multiple types of these substances.

[0086] For example, the substance may be a mixture containing gases of multiple elements, such as a mixture of hydrogen gas and argon gas. Alternatively, the substance may be a compound such as methane.

[0087] In other words, the discharge device according to this embodiment is a device for discharging a liquid beam of a "substance" that includes "elements" such as hydrogen, as exemplified in Embodiment 1. That is, the discharge device according to this embodiment is a device for discharging a liquid beam of a substance that is a gas under standard conditions and has a desired diameter. Furthermore, the liquefaction device according to this embodiment is a device for liquefying a gas of a "substance" that includes "elements".

[0088] Furthermore, the discharge device according to this embodiment adjusts the temperature of the discharge material, which is the substance located at the discharge port, so that it changes from a gaseous state to a solid state and then to a liquid state. Then, the discharge device discharges a liquid beam of the substance.

[0089] In this embodiment, as an example, the case in which the "substance" is hydrogen will be described. That is, in this embodiment, as an example, the case in which the discharge device according to this embodiment discharges a liquid beam of hydrogen, similar to the discharge device 1 according to Embodiment 1 will be described.

[0090] (Configuration of the discharge device according to this embodiment) The discharge device according to this embodiment is similar to the discharge device 1 according to Embodiment 1 and includes a container 10, a supply unit 11, a pressure gauge 111, a temperature adjustment unit 12, a cooler 13, a control unit 20, a chamber 30, and a vacuum pump 31.

[0091] The container 10 is a container provided with a discharge port 103. For example, the diameter of the discharge port 103 may be 50 micrometers or more.

[0092] (Supply unit 11) The supply unit 11 supplies a gaseous substance to the container 10 at a desired supply pressure.

[0093] The "supply pressure" corresponds to the total pressure inside the container 10. Here, the total pressure is the sum of the static pressure and the dynamic pressure. In this embodiment, the supply unit 11 includes a regulator that controls the total pressure and a flow controller (MFC) that adjusts the flow rate and controls the dynamic pressure. The pressure control unit 21 adjusts the regulator and the flow controller to change the flow rate, thereby adjusting the static pressure inside the container 10 to the desired supply pressure. That is, the pressure control unit 21 adjusts the supply flow rate by controlling the flow control valve (MFC), thereby indirectly adjusting the static pressure (supply pressure) by utilizing the characteristics of the open flow path. For example, the "static pressure" is the pressure exerted on a surface perpendicular to the gas flow inside the container 10. Also, for example, the "static pressure" is the pressure exerted on the surroundings by gas that is at rest inside the container 10. Here, when the gas inside the container 10 is at rest, the "dynamic pressure" of the gas is 0, and the "total pressure" of the gas is equal to the "static pressure".

[0094] Furthermore, the supply pressure according to this embodiment is below the critical pressure of the "substance".

[0095] For example, the supply unit 11 supplies hydrogen gas from the gas cylinder G to the container 10 via the gas inlet pipe 110 after adjusting it to a desired supply pressure. The supply unit 11 may adjust the supply flow rate, which is the flow rate of gas in the gas inlet pipe 110, for example via a flow control valve. The supply unit 11 may also be equipped with a flow meter for measuring the supply flow rate. A pressure gauge 111 is attached to the gas inlet pipe 110 and measures the pressure in the gas inlet pipe 110. Here, the pressure gauge 111 may measure the static pressure in the gas inlet pipe 110.

[0096] (Temperature adjustment unit 12) The temperature adjustment unit 12 adjusts the temperature of the substance contained in the internal space 101 of the container 10 by adjusting the container temperature of the container 10 in accordance with the control signal supplied from the control unit 20.

[0097] The configurations of the container 10, supply unit 11, and temperature control unit 12 in this embodiment may be the same as those of the container 10, supply unit 11, and temperature control unit 12 in Embodiment 1, provided that "elements" is replaced with "substances." Therefore, a detailed explanation is omitted here.

[0098] (Control Unit 20) The control unit 20 controls the supply unit 11 and the temperature control unit 12. In other words, the control unit 20 adjusts the supply pressure by controlling the supply unit 11 and adjusts the temperature of the substance by controlling the temperature control unit 12. The adjustment of the supply pressure in this embodiment includes not only active equipment control (e.g., flow rate adjustment by opening and closing valves) but also the use of physical phenomena inside the container after solidification blockage (e.g., natural pressure rise due to the continued supply of gas and the resulting liquefaction). In particular, pressure adjustment (pressure increase) after the discharge port is clogged with solid is achieved by maintaining the supply of gas from the supply unit, which allows the pressure inside the container to naturally rise and reach an equilibrium state. The control unit 20 comprises a pressure control unit 21 and a temperature control unit 22. The configurations that the control unit 20 according to this embodiment has in addition to the pressure control unit 21 and the temperature control unit 22 may be the same as the configurations that the control unit 20 according to Embodiment 1 has in addition to the pressure control unit 21 and the temperature control unit 22, so the explanation is omitted here.

[0099] (Chamber 30 and vacuum pump 31) The chamber 30 houses the container 10. The vacuum pump 31 is connected to the chamber 30 and evacuates the inside of the chamber 30.

[0100] (Structure of the flow path at the bottom 100) In this embodiment, the container 10 has, as an example, a cylindrical internal space whose diameter exceeds the diameter of the discharge port. It also includes a tapered flow path between the internal space and the discharge port, which decreases in diameter as it approaches the discharge port from the internal space.

[0101] For example, the bottom 100 comprises an internal space 101, a reduced diameter section 102, and a discharge port 103. The reduced diameter section 102 comprises a tapered section (tapered flow path) 1021 and a straight section 1022. The tapered section 1021 comprises a first section 10211 located on the side of the internal space 101 and a second section 10212 located on the side of the discharge port 103. Here, the taper angle θ2 of the second section 10212 is smaller than the taper angle θ1 of the first section 10211.

[0102] In this embodiment, the chamber 30, vacuum pump 31, and bottom 100 may be the same as those in Embodiment 1, so a detailed explanation is omitted here.

[0103] (Pressure control unit 21 and temperature control unit 22) The pressure control unit 21 adjusts the supply pressure by controlling the supply unit 11. For example, the pressure control unit 21 may acquire measured values ​​of the pressure and supply flow rate in the gas introduction pipe 110 via the pressure gauge 111 and the supply unit 11, respectively. Alternatively, for example, the pressure control unit 21 may calculate a set value for the supply pressure based on data included in the hydrogen temperature-pressure diagram. Then, for example, the pressure control unit 21 may control the supply unit 11 so that the supply pressure becomes the set value based on the acquired measured values ​​and the calculated set value.

[0104] The temperature control unit 22 adjusts the temperature of the substance by controlling the temperature adjustment unit 12.

[0105] In this embodiment, the pressure at the critical point of the substance is defined as the critical pressure. The pressure at the triple point pt of the substance is defined as the triple point pressure Pt.

[0106] The discharge device according to this embodiment causes a phase change in the order of gas → solid → liquid by changing at least the temperature of the substance located at least at the discharge port 103, among the supply pressure and the substance temperature, and discharges a liquid beam of the substance.

[0107] The control unit 20 controls the supply unit 11 so that the substance SG in a gaseous state is discharged from the discharge port 103 by adjusting the supply pressure to a first pressure below the critical pressure.

[0108] The gaseous state SG is the state in which hydrogen becomes a gas when the supply pressure is the first pressure.

[0109] The first pressure in this embodiment is a pressure below the critical pressure. Furthermore, the first pressure in this embodiment may be above the triple point pressure Pt, below the triple point pressure Pt, or equal to the triple point pressure Pt.

[0110] Subsequently, in the cooling process performed by the discharge device according to this embodiment, the control unit 20 adjusts at least the temperature adjustment unit 12 of the temperature adjustment unit 12 and the supply unit 11 so that the discharge material, which is the substance located at least at the discharge port 103, becomes solid and the discharge port 103 becomes clogged. In this cooling process, the pressure control unit 21 adjusts the supply pressure to a first pressure below the critical pressure, and the temperature control unit 22 controls the temperature adjustment unit 12 so that the discharge material, which is the substance located at least at the discharge port 103, becomes solid and the discharge port 103 becomes clogged.

[0111] In this cooling process, when the first pressure falls below the triple point pressure Pt, the hydrogen corresponding to the discharge substance is changed in state so that it passes the sublimation line from the gas side to the solid side. When the first pressure exceeds the triple point pressure Pt, the hydrogen corresponding to the discharge substance is changed in state so that it passes the boiling line from the gas side to the liquid side, and then the melting line from the liquid side to the solid side. In other words, the hydrogen corresponding to the discharge substance in the cooling process goes from a gaseous state SG to a solidified blockage state. The solidified blockage state is a state in which the discharge port 103 is clogged with the solidified discharge substance.

[0112] After the cooling process, that is, after the discharge port 103 becomes clogged, in the heating process performed by the discharge device according to this embodiment, the control unit 20 adjusts at least the temperature adjustment unit 12 of the temperature adjustment unit 12 and the supply unit 11 so that at least the discharge port substance becomes liquid SL.

[0113] Liquid state SL is the state in which the discharge substance is in a liquid state.

[0114] Here, the discharge device according to this embodiment may perform a heating process after a cooling process and an adjustment process. That is, in the adjustment process performed by the discharge device according to this embodiment after the discharge port 103 becomes clogged, the temperature control unit 22 maintains the material temperature, and the pressure control unit 21 adjusts the supply pressure to a second pressure P2 that is below the critical pressure and above the triple point pressure Pt.

[0115] In this embodiment, the second pressure P2 is a pressure below the critical pressure and above the triple point pressure Pt. Furthermore, for example, the second pressure P2 in this embodiment may be a pressure above the first pressure. Also, for example, the second pressure P2 in this embodiment may be equal to the first pressure, or it may be below the first pressure.

[0116] For example, in the adjustment process, as will be described later with reference to Figure 10, the pressure exerted on the solidified hydrogen by the gaseous hydrogen remaining inside the container 10 rises from the first pressure to the second pressure P2. That is, the hydrogen corresponding to the discharge material in the adjustment process moves from a solidified blockage state to an equilibrium state. The equilibrium state is a state in which the discharge material is solid, while at least a portion of the material inside the container 10 has liquefied.

[0117] After the adjustment process, that is, after the supply pressure reaches the second pressure P2, in the heating process performed by the discharge device according to this embodiment, the temperature control unit 22 controls the temperature adjustment unit 12 so that at least the discharge material is in a liquid state SL. In this heating process, the hydrogen corresponding to the discharge material is changed in state so that the melting line passes from the solid side to the liquid side. That is, the hydrogen corresponding to the discharge material in the heating process goes from an equilibrium state to a liquid state SL.

[0118] (State of hydrogen in container 10) Figure 10 is a schematic diagram showing the state change of hydrogen in container 10 in response to changes in pressure and temperature. Below, as an example, the case in which hydrogen in container 10 progresses from a gaseous state SG to a solidified and blocked state and then to an equilibrium state SL will be explained with reference to Figure 10.

[0119] Figure 10(a) shows a state in which only gaseous hydrogen, i.e., gaseous hydrogen G, is present in the container 10. In this state, the supply unit 11 supplies gaseous hydrogen G to the container 10. Also, gaseous hydrogen G is discharged from the container 10 through the discharge port 103 into the vacuum chamber 30. In this state, the state of gaseous hydrogen G corresponds to the gaseous state SG.

[0120] Here, in the process where gaseous hydrogen G passes through the tapered flow path shown in Figure 2, i.e., the narrowed diameter section 102, and is discharged into the vacuum chamber 30 from the discharge port 103, it is conceivable that the temperature of gaseous hydrogen G passing through the narrowed diameter section 102 decreases due to the Venturi effect. Therefore, when gaseous hydrogen G is cooled as described above in the cooling process according to this embodiment, solid hydrogen, i.e., solid hydrogen S, is generated from the side of the container 10 closer to the discharge port 103. At this time, solid hydrogen S is generated in such a way that it obstructs the outflow of gaseous hydrogen G at the discharge port 103. As a result, the solid hydrogen S blocks the discharge port 103, as shown in Figure 10(b). That is, at this time, the flow path from the container 10 into the chamber 30 is blocked. Also, at this time, as shown in Figure 10(b), solid hydrogen S is present near the discharge port 103 in the container 10, and gaseous hydrogen G is present inside the container 10.

[0121] At this point, when the solid hydrogen S blocks the discharge port 103, the solid hydrogen S receives a first pressure from the gaseous hydrogen G remaining inside the container 10. At this time, the state of the solid hydrogen S corresponds to a solidified and blocked state.

[0122] Subsequently, as described above in the adjustment process according to this embodiment, the pressure control unit 21 adjusts the supply pressure, causing the pressure on the solid hydrogen S to rise from the first pressure to the second pressure P2. At this point, the solid hydrogen S receives the second pressure P2 from the gaseous hydrogen G remaining inside the container 10. At this time, the state of the solid hydrogen S corresponds to an equilibrium state. Furthermore, as the pressure in the container 10 increases, the gaseous hydrogen G liquefies in the container 10, and liquid hydrogen, i.e., liquid hydrogen L, is generated, as shown in Figure 10(c).

[0123] After the solid hydrogen S reaches equilibrium, as described above in the heating process according to this embodiment, the temperature control unit 22 controls the temperature adjustment unit 12, causing the solid hydrogen S to liquefy. At this time, the state of the liquid hydrogen L corresponds to the liquid state SL. As a result, as shown in Figure 10(d), the discharge port 103 opens again, and a liquid beam consisting of liquid hydrogen L is discharged from the container 10 into the vacuum chamber 30. Also, as shown in Figure 10(d), the supply unit 11 continues to supply gaseous hydrogen G to the container 10, causing the gaseous hydrogen G to liquefy inside the container 10 to continuously generate liquid hydrogen L, and a liquid beam continues to be discharged from the discharge port 103.

[0124] Other configurations in the discharge device according to this embodiment may be the same as those in the discharge device 1 according to Embodiment 1, so their explanation is omitted here.

[0125] (Overview of the liquefaction apparatus according to this embodiment) The liquefaction apparatus according to this embodiment will be described below. The liquefaction apparatus according to this embodiment is an apparatus for liquefying a gaseous substance in the same manner as the discharge apparatus according to this embodiment. That is, the liquefaction apparatus according to this embodiment is an apparatus for liquefying a substance that is a gaseous substance under standard conditions by supplying it to a container 10 provided with a discharge port 103 and then pressurizing and cooling it above standard conditions. The liquefaction apparatus according to this embodiment comprises a container 10, a supply unit 11, a temperature adjustment unit 12, and a control unit 20. The supply unit 11 of the liquefaction apparatus according to this embodiment supplies the gaseous substance to the container 10 at a desired supply pressure. The temperature adjustment unit 12 of the liquefaction apparatus according to this embodiment adjusts the temperature of the substance contained in the internal space 101 of the container 10 by adjusting the container temperature of the container 10. The control unit 20 of the liquefaction apparatus according to this embodiment controls the supply unit 11 and the temperature adjustment unit 12.

[0126] (Configuration of the control unit 20 in the liquefaction apparatus according to this embodiment) The control unit 20 in the liquefaction apparatus according to this embodiment controls the supply unit 11 and the temperature control unit 12 to reach a liquid state SL in which the discharge substance, which is a substance located at least at the discharge port 103, becomes a gas when the supply pressure is a first pressure lower than the critical pressure, (2) the discharge substance becomes a solid when the substance temperature of the discharge substance is lowered, among the substance temperature and supply pressure, is lowered, and (3) the discharge substance becomes a liquid when the substance temperature of the substance is raised, among the substance temperature and supply pressure, is raised.

[0127] Here, as an example, the control unit 20 of the liquefaction apparatus according to this embodiment controls the supply unit 11 and the temperature control unit 12 so that (1) the discharge substance, which is at least the substance located at the discharge port 103, becomes a gas when the supply pressure is a first pressure lower than the critical pressure, starting from a gaseous state SG, (2) the discharge substance becomes a solid when the supply pressure is the first pressure, and then an equilibrium state where the supply pressure is lower than the critical pressure and higher than the triple point pressure Pt when the discharge substance is a solid, in this order, and (3) the discharge substance becomes a liquid state SL when the supply pressure is the second pressure.

[0128] Each of the above-described components of the liquefaction device according to this embodiment may be the same as the components of the same name that are provided in the discharge device according to this embodiment.

[0129] (Flow of liquefaction method and discharge method according to this embodiment) The flow of the liquefaction method performed by the liquefaction apparatus according to this embodiment and the discharge method performed by the discharge apparatus according to this embodiment will be described below.

[0130] (Liquefaction Method According to This Embodiment) The liquefaction method according to this embodiment is a method for liquefying a substance that is a gas under standard conditions by supplying it to a container 10 provided with a discharge port 103 and cooling it under pressure higher than the standard conditions. The liquefaction method according to this embodiment includes a phase change process. The phase change process according to this embodiment includes a supply process, a cooling process, and a heating process, which will be described later in the discharge method according to this embodiment. Furthermore, the phase change process according to this embodiment may include an adjustment process between the cooling process and the heating process.

[0131] (Phase change processing according to this embodiment) In the phase change processing according to this embodiment, the control unit 20 causes the substance to undergo a phase change from (1) a gaseous state SG in which the discharge substance, which is at least the substance located at the discharge port 103, is in a gaseous state, to (2) a solidified blockage state in which at least the substance temperature among the substance temperature and supply pressure of the discharge substance is lowered so that the discharge substance becomes a solid, to (3) a liquid state SL in which at least the substance temperature among the substance temperature and supply pressure is raised so that the discharge substance becomes a liquid.

[0132] Here, as an example, in the phase change process according to this embodiment, the control unit 20 causes the substance to undergo a phase change in the following order: (1) under a supply pressure of a first pressure lower than the critical pressure, the discharge substance, which is at least the substance located at the discharge port 103, is in a gaseous state SG; (2) under a supply pressure of the first pressure, the discharge substance is in a solidified and blocked state, and then under an equilibrium state where the discharge substance is in a solid state and the supply pressure is lower than the critical pressure and higher than the triple point pressure Pt; and (3) under a supply pressure of the second pressure, the discharge substance is in a liquid state SL.

[0133] (Discharge Method According to This Embodiment) The discharge method according to this embodiment is a method for discharging a liquid beam of a substance that is a gas under standard conditions and has a desired diameter from a discharge port 103 provided in a container 10. The discharge method according to this embodiment includes a supply process, a cooling process, and a heating process. Furthermore, the discharge method according to this embodiment may include an adjustment process between the cooling process and the heating process.

[0134] (Supplying process according to this embodiment) In the supplying process according to this embodiment, the control unit 20 supplies a gaseous substance to the container 10 so that the substance in a gaseous state SG is discharged from the discharge port 103, while adjusting the supply pressure for supplying the substance to the container 10 to a first pressure below the critical pressure. Here, in the supplying process, the pressure control unit 21 supplies a gaseous substance to the container 10 while adjusting the supply pressure for supplying the substance to the container 10 to a first pressure below the critical pressure.

[0135] (Cooling process according to this embodiment) In the cooling process according to this embodiment, the control unit 20 solidifies the discharge port material, which is the material located at least at the discharge port 103, by cooling at least the material inside the container 10. Here, in the cooling process, the pressure control unit 21 maintains the supply pressure at a first pressure, while the temperature control unit 22 solidifies the discharge port material, which is the material located at least at the discharge port 103, by cooling the material contained in the internal space 101 of the container 10.

[0136] (Adjustment process according to this embodiment) In the adjustment process according to this embodiment, the temperature control unit 22 maintains the temperature of the substance, while the pressure control unit 21 adjusts the supply pressure to a second pressure P2 that is below the critical pressure and above the triple point pressure Pt.

[0137] (Heating process according to this embodiment) In the heating process according to this embodiment, the control unit 20 liquefies the discharge port substance by heating at least the substance so that at least the discharge port substance is in a liquid state SL, and discharges a liquid beam from the discharge port 103. Here, in the heating process, the pressure control unit 21 maintains the supply pressure at a second pressure P2, while the temperature control unit 22 liquefies the discharge port substance by heating the substance so that at least the discharge port substance is in a liquid state SL, and discharges a liquid beam from the discharge port 103.

[0138] [Example of implementation using software] The functions of the discharge device 1 and the liquefaction device (hereinafter referred to as "device") can be realized by a program that causes a computer to function as the device, and by a program that causes a computer to function as each control block of the device (particularly the parts included in the control unit 20, pressure control unit 21, and temperature control unit 22).

[0139] In this case, the device includes a computer having at least one control device (e.g., a processor) and at least one storage device (e.g., memory) as hardware for executing the program. By executing the program using this control device and storage device, the functions described in each of the embodiments are realized.

[0140] The above program may be recorded on one or more computer-readable recording media, not temporary ones. These recording media may or may not be provided by the above device. In the latter case, the program may be supplied to the above device via any wired or wireless transmission medium.

[0141] Furthermore, some or all of the functions of each of the above control blocks can also be realized by logic circuits. For example, an integrated circuit in which logic circuits functioning as each of the above control blocks are formed is also included in the scope of the present invention. In addition, it is also possible to realize the functions of each of the above control blocks by, for example, a quantum computer.

[0142] Furthermore, each process described in the above embodiments may be performed by AI (Artificial Intelligence). In this case, the AI ​​may operate on the control device described above, or it may operate on another device (for example, an edge computer or a cloud server).

[0143] The present invention is not limited to the embodiments described above, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present invention.

[0144] [Summary] The discharge device according to embodiment 1 of the present invention is a discharge device that discharges a liquid beam of an element that is a gas under standard conditions and has a desired diameter, comprising: a container provided with a discharge port; a supply unit that supplies the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit that adjusts the elemental temperature of the element in the container by adjusting the container temperature of the container; a pressure control unit that controls the supply pressure by controlling the supply unit; and a temperature control unit that controls the elemental temperature by controlling the temperature adjustment unit, wherein the pressure at the triple point of the element is set to triple point pressure. The pressure control unit controls the supply pressure to a first pressure below the triple point pressure, and the temperature control unit controls the temperature adjustment unit so that at least the discharge port element located at the discharge port becomes solid and the discharge port becomes clogged. After the discharge port becomes clogged, the temperature control unit maintains the element temperature, and the pressure control unit controls the supply pressure to a second pressure above the triple point pressure. After the supply pressure reaches the second pressure, the temperature control unit controls the temperature adjustment unit so that at least the discharge port element becomes liquid.

[0145] With the above configuration, a liquid beam can be ejected regardless of the size of the diameter of the ejected liquid beam.

[0146] In the discharge device according to embodiment 2 of the present invention, in addition to the configuration of the discharge device according to embodiment 1, the diameter of the discharge port is 50 micrometers or more.

[0147] With the above configuration, it is possible to generate a liquid beam with a diameter of 50 micrometers or more.

[0148] In the discharge device according to embodiment 3 of the present invention, in addition to the configuration of the discharge device according to embodiment 1 or 2, the supply pressure is below the critical pressure of the element.

[0149] According to the above configuration, it is possible to prevent the discharge of a supercritical fluid of the element in question instead of a liquid of that element.

[0150] In the discharge device according to embodiment 4 of the present invention, in addition to the configuration of the discharge device according to any one of embodiments 1 to 3 above, the element is an element that can exist in any of the states of solid, liquid, and gas at temperatures below the critical temperature and pressures below the critical pressure, and is an element having a triple point.

[0151] According to the above configuration, a liquid beam of an element having a triple point can be generated at temperatures below its critical temperature and pressures below its critical pressure, and which can exist in any of the states of solid, liquid, or gas.

[0152] In the discharge device according to aspect 5 of the present invention, in addition to the configuration of the discharge device according to any one of aspects 1 to 4 above, the container has a cylindrical internal space whose diameter exceeds the diameter of the discharge port, and between the internal space and the discharge port, there is a tapered flow path which decreases in diameter as it approaches the discharge port from the internal space, and comprises a first section located on the side of the internal space and a second section located on the side of the discharge port, wherein the taper angle of the second section is smaller than the taper angle of the first section.

[0153] According to the above configuration, as the elemental gas passes through the tapered channel and is discharged from the outlet into a vacuum environment, the temperature of the elemental gas passing through the tapered channel decreases due to the Venturi effect. Therefore, solidification of the element can be promoted from the side closer to the outlet. Furthermore, after the solid of the element near the outlet has liquefied, a liquid beam of the element can be continuously discharged from the outlet.

[0154] The discharge program according to embodiment 6 of the present invention causes a computer to function as the pressure control unit and the temperature control unit of the discharge device according to embodiment 1 or 2.

[0155] The above configuration produces the same effects as in Embodiment 1.

[0156] In the discharge device according to embodiment 7 of the present invention, in addition to the configuration of the discharge device according to any one of embodiments 1 to 5 above, it further comprises a chamber for housing the container and a vacuum pump connected to the chamber for exhausting the inside of the chamber.

[0157] According to the above configuration, a liquid beam can be ejected into a vacuum environment.

[0158] A discharge method according to aspect 8 of the present invention is a discharge method for discharging a liquid beam of an element that is a gas under standard conditions and having a desired diameter from a discharge port provided in a container, comprising: a supply process for supplying the element, which is a gas, to the container while adjusting the supply pressure for supplying the element to the container to a first pressure lower than the triple point pressure, with the pressure at the triple point of the element being the triple point pressure; a cooling process for solidifying at least the discharge port element, which is the element located at the discharge port, by cooling the element in the container while maintaining the supply pressure at the first pressure; an adjustment process for adjusting the supply pressure to a second pressure higher than the triple point pressure while maintaining the temperature of the element; and a heating process for liquefying the discharge port element by heating the element so that at least the discharge port element is in a liquid state, while maintaining the supply pressure at the second pressure, and discharging the liquid beam from the discharge port.

[0159] The above configuration produces the same effects as in Embodiment 1.

[0160] A liquefaction apparatus according to aspect 9 of the present invention is a liquefaction apparatus that liquefies an element, which is a gas under standard conditions, by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, comprising: the container; a supply unit that supplies the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit that adjusts the elemental temperature of the element in the container by adjusting the container temperature of the container; and a control unit that controls the supply unit and the temperature adjustment unit, wherein the temperature and pressure of the triple point of the element are set as the triple point temperature and triple point pressure, respectively, and the control unit (1) at least before The supply unit and the temperature control unit are controlled to move the discharge element, which is an element located at the discharge port, from a gaseous state in which the elemental temperature is higher than the triple point temperature and the supply pressure is lower than the triple point pressure, through a first solid state in which the elemental temperature is lower than the triple point temperature and the supply pressure is lower than the triple point pressure, and a second solid state in which the elemental temperature is lower than the triple point temperature and the supply pressure is higher than the triple point pressure, in this order, to a liquid state in which the elemental temperature is higher than the triple point temperature and the supply pressure is higher than the triple point pressure.

[0161] The above configuration produces the same effects as in Embodiment 1.

[0162] A liquefaction method according to embodiment 10 of the present invention is a liquefaction method for which an element that is a gas under standard conditions is liquefied by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively, and the method includes a phase change process to change the element from a gaseous state in which (1) the element temperature of at least the discharge port element located at the discharge port is higher than the triple point temperature and the supply pressure is lower than the triple point pressure, to a first solid state in which the element temperature is lower than the triple point temperature and the supply pressure is lower than the triple point pressure, and to a second solid state in which the element temperature is lower than the triple point temperature and the supply pressure is higher than the triple point pressure, in this order, to a liquid state in which the element temperature is higher than the triple point temperature and the supply pressure is higher than the triple point pressure.

[0163] The above configuration produces the same effects as in Embodiment 1.

[0164] A discharge device according to embodiment 11 of the present invention is a discharge device for discharging a liquid beam of an element that is a gas under standard conditions and having a desired diameter, comprising: a container provided with a discharge port; a supply unit for supplying the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit for adjusting the elemental temperature of the element in the container by adjusting the container temperature of the container; a pressure control unit for controlling the supply pressure by controlling the supply unit; and a temperature control unit for controlling the elemental temperature by controlling the temperature adjustment unit, wherein the pressure at the triple point of the element is taken as the triple point pressure, the pressure control unit controls the supply pressure to a pressure exceeding the triple point pressure, the temperature control unit controls the temperature adjustment unit so that at least the discharge port element, which is the element located at the discharge port, becomes solid and the discharge port becomes clogged, and after the discharge port becomes clogged, the temperature adjustment unit controls the temperature adjustment unit so that at least the discharge port element becomes liquid.

[0165] With the above configuration, a liquid beam can be ejected regardless of the size of the diameter of the ejected liquid beam.

[0166] A discharge method according to embodiment 12 of the present invention is a discharge method for discharging a liquid beam of an element that is a gas under standard conditions and having a desired diameter from a discharge port provided in a container, comprising: a supply process for supplying the element, which is a gas, to the container while adjusting the supply pressure for supplying the element to the container to a pressure exceeding the triple point pressure, with the pressure at the triple point of the element being used as the triple point pressure; a cooling process for solidifying at least the discharge port element, which is the element located at the discharge port, by cooling the element in the container; and a heating process for liquefying the discharge port element by heating the element so that at least the discharge port element is in a liquid state, and discharging the liquid beam from the discharge port.

[0167] The above configuration produces the same effects as in embodiment 11.

[0168] A liquefaction apparatus according to embodiment 13 of the present invention is a liquefaction apparatus that liquefies an element, which is a gas under standard conditions, by supplying the element to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, comprising: a container; a supply unit that supplies the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit that adjusts the elemental temperature of the element in the container by adjusting the container temperature of the container; and a control unit that controls the supply unit and the temperature adjustment unit, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively, and the control unit controls the supply unit and the temperature adjustment unit under a supply pressure higher than the triple point pressure so that (1) the elemental temperature of at least the discharge port element, which is an element located at the discharge port, is from a gaseous state where the elemental temperature is higher than the triple point temperature, (2) the elemental temperature is lower than the triple point temperature, and (3) the elemental temperature is higher than the triple point temperature.

[0169] The above configuration produces the same effects as in embodiment 11.

[0170] A liquefaction method according to aspect 14 of the present invention is a liquefaction method for which an element that is a gas under standard conditions is liquefied by supplying the element to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively, and under a supply pressure higher than the triple point pressure, the method includes a phase change process in which the element undergoes a phase change from (1) a gaseous state in which the elemental temperature of at least the discharge port element located at the discharge port is higher than the triple point temperature, (2) a solid state in which the elemental temperature is lower than the triple point temperature, and (3) a liquid state in which the elemental temperature is higher than the triple point temperature.

[0171] The above configuration produces the same effects as in embodiment 11.

[0172] A discharge device according to embodiment 15 of the present invention is a discharge device for discharging a liquid beam of a substance that is a gas under standard conditions and having a desired diameter, comprising: a container provided with a discharge port; a supply unit that supplies the gaseous substance to the container at a desired supply pressure; a temperature adjustment unit that adjusts the temperature of the substance inside the container by adjusting the container temperature of the container; and a control unit that adjusts the supply pressure by controlling the supply unit and adjusts the temperature of the substance by controlling the temperature adjustment unit, wherein the control unit controls the supply unit to discharge the gaseous substance from the discharge port by adjusting the supply pressure to a first pressure below the critical pressure, with the critical pressure of the substance being the critical pressure, and then adjusts at least the temperature adjustment unit of the temperature adjustment unit and the supply unit so that at least the discharge port substance located at the discharge port becomes solid and the discharge port becomes clogged, and after the discharge port becomes clogged, the control unit adjusts at least the temperature adjustment unit of the temperature adjustment unit and the supply unit so that at least the discharge port substance becomes liquid.

[0173] With the above configuration, a liquid beam can be ejected regardless of the size of the diameter of the ejected liquid beam.

[0174] In the discharge device according to embodiment 16 of the present invention, in addition to the configuration of the discharge device according to embodiment 15, the control unit comprises a pressure control unit that adjusts the supply pressure by controlling the supply unit, and a temperature control unit that adjusts the temperature of the substance by controlling the temperature adjustment unit. The pressure control unit adjusts the supply pressure to a first pressure below the critical pressure, with the pressure at the triple point of the substance as the triple point pressure. The temperature control unit controls the temperature adjustment unit so that at least the discharge substance located at the discharge port becomes solid and the discharge port becomes clogged. After the discharge port becomes clogged, the temperature control unit maintains the temperature of the substance, and the pressure control unit adjusts the supply pressure to a second pressure below the critical pressure and above the triple point pressure. After the supply pressure reaches the second pressure, the temperature control unit controls the temperature adjustment unit so that at least the discharge substance becomes liquid.

[0175] The above configuration produces the same effects as in embodiment 15.

[0176] In the discharge device according to embodiment 17 of the present invention, in addition to the configuration of the discharge device according to embodiment 16, the second pressure is greater than the first pressure.

[0177] The above configuration produces the same effects as in embodiment 16.

[0178] In the discharge device according to embodiment 18 of the present invention, in addition to the configuration of the discharge device according to any one of embodiments 15 to 17, the diameter of the discharge port is 50 micrometers or more.

[0179] With the above configuration, it is possible to generate a liquid beam with a diameter of 50 micrometers or more.

[0180] In the discharge device according to embodiment 19 of the present invention, in addition to the configuration of the discharge device according to any one of embodiments 15 to 18, the substance is a substance that can exist in any of the states of solid, liquid, or gas at temperatures below the critical temperature and pressures below the critical pressure, and is a substance having a triple point.

[0181] According to the above configuration, a liquid beam of a substance that can exist in any of the following states—solid, liquid, or gas—at temperatures below its critical temperature and pressures below its critical pressure, and which has a triple point, can be generated.

[0182] In the discharge device according to embodiment 20 of the present invention, in addition to the configuration of the discharge device according to any one of embodiments 15 to 19, the container has a cylindrical internal space whose diameter exceeds the diameter of the discharge port, and between the internal space and the discharge port, there is a tapered flow path which decreases in diameter as it approaches the discharge port from the internal space, and comprises a first section located on the side of the internal space and a second section located on the side of the discharge port, wherein the taper angle of the second section is smaller than the taper angle of the first section.

[0183] According to the above configuration, as the gaseous substance passes through the tapered channel and is discharged from the outlet into a vacuum environment, the temperature of the gaseous substance passing through the tapered channel decreases due to the Venturi effect. Therefore, solidification of the substance can be promoted from the side closer to the outlet. Furthermore, after the solid of the substance near the outlet has liquefied, a liquid beam of the substance can be continuously discharged from the outlet.

[0184] The discharge program according to embodiment 21 of the present invention causes a computer to function as the control unit of a discharge device according to any one of embodiments 15 to 18.

[0185] The above configuration produces the same effects as in embodiment 15.

[0186] In the discharge device according to embodiment 22 of the present invention, in addition to the configuration of the discharge device according to any one of embodiments 15 to 20, it further comprises a chamber for housing the container and a vacuum pump connected to the chamber for exhausting the inside of the chamber.

[0187] According to the above configuration, a liquid beam can be ejected into a vacuum environment.

[0188] A discharge method according to aspect 23 of the present invention is a discharge method for discharging a liquid beam of a substance that is a gas under standard conditions and having a desired diameter from a discharge port provided in a container, comprising: a supply process for supplying the substance in a gaseous state to the container, while adjusting the supply pressure for supplying the substance to the container to a first pressure below the critical pressure, with the pressure at the critical point of the substance being the critical pressure, so that the substance in a gaseous state is discharged from the discharge port; a cooling process for solidifying at least the discharge port substance, which is the substance located at the discharge port, by cooling at least the substance in the container; and a heating process for liquefying the discharge port substance by heating at least the substance so that at least the discharge port substance is in a liquid state, and discharging the liquid beam from the discharge port.

[0189] The above configuration produces the same effects as in embodiment 15.

[0190] A liquefaction apparatus according to embodiment 24 of the present invention is a liquefaction apparatus that liquefies a substance that is a gas under standard conditions by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, comprising: a container; a supply unit that supplies the gaseous substance to the container at a desired supply pressure; a temperature adjustment unit that adjusts the temperature of the substance in the container by adjusting the container temperature of the container; and a control unit that controls the supply unit and the temperature adjustment unit, wherein the pressure at the critical point of the substance is the critical pressure, and the control unit controls the supply unit and the temperature adjustment unit to reach a state in which (1) the discharge port substance, which is at least the substance located at the discharge port, is a gaseous state when the supply pressure is a first pressure lower than the critical pressure, (2) the discharge port substance becomes a solid when at least the substance temperature among the substance temperature and the supply pressure is lowered, and (3) the discharge port substance becomes a liquid when at least the substance temperature among the substance temperature and the supply pressure is raised.

[0191] The above configuration produces the same effects as in embodiment 15.

[0192] A liquefaction method according to aspect 25 of the present invention is a liquefaction method for which a substance that is a gas under standard conditions is liquefied by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, wherein the pressure at the critical point of the substance is set as the critical pressure, and the method includes a phase change process to change the phase of the substance from (1) a gaseous state in which at least the discharge port substance, which is the substance located at the discharge port, is a gas, under a first pressure where the supply pressure is lower than the critical pressure, to (2) a solidification blockage state in which at least the substance temperature among the substance temperature and the supply pressure is lowered so that the discharge port substance becomes a solid, to (3) a liquid state in which at least the substance temperature among the substance temperature and the supply pressure is raised so that the discharge port substance becomes a liquid.

[0193] The above configuration produces the same effects as in embodiment 15.

[0194] One embodiment of the present invention is described below.

[0195] An orifice (bottom 100) with a discharge port 103 having a diameter of 50 micrometers was attached to the brass liquid beam generator body (hereinafter referred to as the beam generator) (container 10). Inside the vacuum chamber (chamber 30), the beam generator was attached to a liquid helium refrigerator head (cooler 13) and cooled to 50K (measured value of the temperature sensor 121). As described above in this embodiment, there is a temperature difference between the temperature of the hydrogen contained in the internal space 101 and the temperature detected by the temperature sensor 121. Therefore, the temperature detected by the temperature sensor 121 is only an estimate. The base vacuum of the vacuum chamber is 3.4 × 10⁻⁶ －５ The result was Torr. Next, the pressure control unit 21 set the supply pressure of hydrogen gas (gaseous hydrogen G) to 0.4 to 0.8 MPa (measured value of pressure gauge 111). The hydrogen gas flow rate was 25 sccm (measured value of flow meter), indicating that hydrogen gas was being ejected from the tip of the orifice (discharge port 103). The vacuum level inside the vacuum chamber was 1.7 × 10⁻⁶. －４ It was Torr.

[0196] Next, following the procedure of the present invention, the temperature control unit 22 lowered the temperature of the beam generator to 18K, freezing the hydrogen gas to generate solid hydrogen (solid hydrogen S), thereby blocking the 50-micrometer diameter orifice of the beam generator with solid hydrogen. As a result, the outflow of hydrogen gas into the vacuum chamber was stopped, and the vacuum level inside the vacuum chamber was 3.4 × 10⁻⁶, the base vacuum level. －５ The system returned to Torr. At this point, the flow meter reading remained at 25 sccm, and after approximately 10 minutes, the hydrogen gas pressure inside the beam generator balanced with the supply pressure of 0.4–0.8 MPa. At this time, the flow meter reading was 0 sccm. This indicates that during this period, the hydrogen gas pressure inside the beam generator increased, and liquid hydrogen (liquid hydrogen L) was generated. Next, the temperature control unit 22 increased the temperature of the liquid beam generator body from 18 K in 0.5 K increments. At 21.5 ± 0.5 K, the hydrogen solid blocking the orifice melted, and a liquid hydrogen beam was ejected. This continuous ejection of the liquid hydrogen beam continued for more than 60 minutes. At this time, the flow meter reading was 5 sccm.

[0197] The above experimental results demonstrate that a liquid hydrogen beam was generated from an orifice with a diameter of 50 micrometers using the technology of the present invention.

[0198] The same experiment described above was also performed with orifices of 20 micrometers and 5 micrometers in diameter, and the generation of a liquid hydrogen beam was confirmed using the method of the present invention. Furthermore, in the case of a 50 micrometer orifice, the experiment was also performed with nitrogen and argon, which have similar phase diagram structures, and the generation of a liquid nitrogen beam and a liquid argon beam was confirmed using the method of the present invention.

[0199] 1 Discharge device 10 Container 11 Supply unit 12 Temperature control unit 13 Cooler 20 Control unit 21 Pressure control unit 22 Temperature control unit 30 Chamber 31 Vacuum pump 101 Internal space 102 Reduced diameter section 103 Discharge port 110 Gas introduction pipe 111 Pressure gauge 121 Temperature sensor 122 Heating heater 1021 Tapered section 10211 First section 10212 Second section 1022 Straight section pt Triple point

Claims

1. A dispensing device for dispensing a liquid beam of an element that is a gas under standard conditions and having a desired diameter, comprising: a container provided with a discharge port; a supply unit for supplying the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit for adjusting the elemental temperature of the element in the container by adjusting the container temperature of the container; a pressure control unit for controlling the supply pressure by controlling the supply unit; and a temperature control unit for controlling the elemental temperature by controlling the temperature adjustment unit, wherein the pressure at the triple point of the element is defined as the triple point pressure, the pressure control unit controls the supply pressure to a first pressure below the triple point pressure, and the temperature control unit controls the temperature adjustment unit so that at least the discharge port element, which is the element located at the discharge port, becomes solid and the discharge port becomes clogged, and after the discharge port becomes clogged, the temperature control unit maintains the elemental temperature, and the pressure control unit controls the supply pressure to a second pressure above the triple point pressure. A discharge device wherein, after the supply pressure reaches the second pressure, the temperature control unit controls the temperature adjustment unit so that at least the discharge port element is in a liquid state.

2. The discharge device according to claim 1, wherein the diameter of the discharge port is 50 micrometers or more.

3. The discharge device according to claim 1 or 2, wherein the supply pressure is below the critical pressure of the element.

4. The discharge device according to claim 1 or 2, wherein the element is an element that can exist in any of the following states: solid, liquid, or gas, at temperatures below its critical temperature and pressures below its critical pressure, and is an element having a triple point.

5. The discharge device according to claim 1 or 2, wherein the container has a cylindrical internal space whose diameter exceeds the diameter of the discharge port, and between the internal space and the discharge port, there is a tapered flow path which decreases in diameter as it approaches the discharge port from the internal space, and comprises a first section located on the side of the internal space and a second section located on the side of the discharge port, the taper angle of the second section being smaller than the taper angle of the first section.

6. A discharge program for causing a computer to function as the pressure control unit and the temperature control unit of the discharge device according to claim 1 or 2.

7. The discharge device according to claim 1 or 2, further comprising: a chamber for housing the container; and a vacuum pump connected to the chamber for exhausting the inside of the chamber.

8. A discharge method for discharging a liquid beam of an element that is a gas under standard conditions and having a desired diameter from a discharge port provided in a container, comprising: a supply process for supplying the element in gaseous form to the container while adjusting the supply pressure for supplying the element to the container to a first pressure below the triple point pressure, with the pressure at the triple point of the element being the triple point pressure; a cooling process for solidifying at least the discharge port element, which is the element located at the discharge port, by cooling the element in the container while maintaining the supply pressure at the first pressure; an adjustment process for adjusting the supply pressure to a second pressure above the triple point pressure while maintaining the temperature of the element; and a heating process for liquefying the discharge port element by heating the element so that at least the discharge port element is in a liquid state, and discharging the liquid beam from the discharge port.

9. A liquefaction apparatus for liquefying an element that is a gas under standard conditions by supplying it to a container provided with a discharge port and cooling it under pressure above the standard conditions, comprising: the container; a supply unit for supplying the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit for adjusting the elemental temperature of the element in the container by adjusting the container temperature of the container; and a control unit for controlling the supply unit and the temperature adjustment unit, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively. Liquefaction device, wherein the control unit controls the supply unit and the temperature control unit so that (1) a gaseous state in which the element temperature of at least the discharge element located at the discharge port is higher than the triple point temperature and the supply pressure is lower than the triple point pressure, (2) a first solid state in which the element temperature is lower than the triple point temperature and the supply pressure is lower than the triple point pressure, and a second solid state in which the element temperature is lower than the triple point temperature and the supply pressure is higher than the triple point pressure, in this order, and (3) a liquid state in which the element temperature is higher than the triple point temperature and the supply pressure is higher than the triple point pressure.

10. A liquefaction method for liquefying an element that is a gas under standard conditions by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively, and the liquefaction method includes a phase change process that causes the element to undergo a phase change from (1) a gaseous state in which the element temperature of at least the discharge port element located at the discharge port is higher than the triple point temperature and the supply pressure is lower than the triple point pressure, to (2) a first solid state in which the element temperature is lower than the triple point temperature and the supply pressure is lower than the triple point pressure, and to a second solid state in which the element temperature is lower than the triple point temperature and the supply pressure is higher than the triple point pressure, in this order, to (3) a liquid state in which the element temperature is higher than the triple point temperature and the supply pressure is higher than the triple point pressure.

11. Discharge device for discharging a liquid beam of an element that is a gas under standard conditions and having a desired diameter, comprising: a container provided with a discharge port; a supply unit for supplying the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit for adjusting the elemental temperature of the element in the container by adjusting the container temperature of the container; a pressure control unit for controlling the supply pressure by controlling the supply unit; and a temperature control unit for controlling the elemental temperature by controlling the temperature adjustment unit, wherein the pressure at the triple point of the element is set as the triple point pressure, the pressure control unit controls the supply pressure to a pressure exceeding the triple point pressure, and the temperature control unit controls the temperature adjustment unit so that at least the discharge port element, which is the element located at the discharge port, becomes solid and the discharge port becomes clogged, and after the discharge port becomes clogged, the temperature adjustment unit controls the temperature adjustment unit so that at least the discharge port element becomes liquid.

12. A discharge method for discharging a liquid beam of an element that is a gas under standard conditions and having a desired diameter from a discharge port provided in a container, comprising: a supply process for supplying the element in gaseous form to the container while adjusting the supply pressure for supplying the element to the container to a pressure exceeding the triple point pressure, with the pressure at the triple point of the element being used as the triple point pressure; a cooling process for solidifying at least the discharge port element, which is the element located at the discharge port, by cooling the element in the container; and a heating process for liquefying the discharge port element by heating the element so that at least the discharge port element is in a liquid state, and discharging the liquid beam from the discharge port.

13. A liquefaction apparatus for liquefying an element that is a gas under standard conditions by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, comprising: a container; a supply unit for supplying the element, which is a gas, to the container at a desired supply pressure; a temperature adjustment unit for adjusting the elemental temperature of the element in the container by adjusting the container temperature of the container; and a control unit for controlling the supply unit and the temperature adjustment unit, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively, and the control unit controls the supply unit and the temperature adjustment unit under a supply pressure higher than the triple point pressure so that (1) the elemental temperature of at least the discharge port element located at the discharge port is higher than the triple point temperature in a gaseous state, (2) the elemental temperature is lower than the triple point temperature in a solid state, and (3) the elemental temperature is higher than the triple point temperature.

14. A liquefaction method for liquefying an element that is a gas under standard conditions by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, wherein the temperature and pressure of the triple point of the element are defined as the triple point temperature and triple point pressure, respectively, and under a supply pressure higher than the triple point pressure, the liquefaction method includes a phase change process that causes the element to undergo a phase change from (1) a gaseous state in which the elemental temperature of at least the discharge port element located at the discharge port is higher than the triple point temperature, (2) a solid state in which the elemental temperature is lower than the triple point temperature, and (3) a liquid state in which the elemental temperature is higher than the triple point temperature.

15. Discharge device for discharging a liquid beam of a substance that is a gas under standard conditions and having a desired diameter, comprising: a container provided with a discharge port; a supply unit for supplying the gaseous substance to the container at a desired supply pressure; a temperature adjustment unit for adjusting the temperature of the substance inside the container by adjusting the container temperature of the container; and a control unit for adjusting the supply pressure by controlling the supply unit and for adjusting the temperature of the substance by controlling the temperature adjustment unit, wherein the pressure at the critical point of the substance is the critical pressure, and the control unit controls the supply unit to discharge the gaseous substance from the discharge port by adjusting the supply pressure to a first pressure below the critical pressure, and then adjusts at least the temperature adjustment unit of the temperature adjustment unit and the supply unit so that at least the discharge port substance located at the discharge port becomes solid and the discharge port becomes clogged, and after the discharge port becomes clogged, the control unit adjusts at least the temperature adjustment unit of the temperature adjustment unit and the supply unit so that at least the discharge port substance becomes liquid.

16. The discharge device according to claim 15, wherein the control unit comprises a pressure control unit that adjusts the supply pressure by controlling the supply unit, and a temperature control unit that adjusts the temperature of the substance by controlling the temperature adjustment unit, wherein the pressure at the triple point of the substance is taken as the triple point pressure, the pressure control unit adjusts the supply pressure to a first pressure below the critical pressure, and the temperature control unit controls the temperature adjustment unit so that at least the discharge substance located at the discharge port becomes solid and the discharge port becomes clogged, after the discharge port becomes clogged, the temperature control unit maintains the temperature of the substance, and the pressure control unit adjusts the supply pressure to a second pressure below the critical pressure and above the triple point pressure, and after the supply pressure reaches the second pressure, the temperature control unit controls the temperature adjustment unit so that at least the discharge substance becomes liquid.

17. The discharge device according to claim 16, wherein the second pressure is greater than the first pressure.

18. The discharge device according to claim 15, wherein the diameter of the discharge port is 50 micrometers or more.

19. The discharge device according to any one of claims 15 to 18, wherein the substance is a substance that can exist in any of the following states: solid, liquid, or gas, at temperatures below its critical temperature and pressures below its critical pressure, and is a substance having a triple point.

20. The discharge device according to any one of claims 15 to 18, wherein the container has a cylindrical internal space whose diameter exceeds the diameter of the discharge port, and between the internal space and the discharge port, there is a tapered flow path which decreases in diameter as it approaches the discharge port from the internal space, and comprises a first section located on the side of the internal space and a second section located on the side of the discharge port, the taper angle of the second section being smaller than the taper angle of the first section.

21. A discharge program for causing a computer to function as the control unit of the discharge device according to any one of claims 15 to 18.

22. The discharge device according to any one of claims 15 to 18, further comprising: a chamber for housing the container; and a vacuum pump connected to the chamber for exhausting the inside of the chamber.

23. A discharge method for discharging a liquid beam of a substance that is a gas under standard conditions and having a desired diameter from a discharge port provided in a container, comprising: a supply process for supplying the substance in a gaseous state to the container, adjusting the supply pressure for supplying the substance to the container to a first pressure below the critical pressure, with the critical pressure of the substance being the critical pressure, so that the substance in a gaseous state is discharged from the discharge port; a cooling process for solidifying at least the discharge port substance, which is at least the substance located at the discharge port, by cooling at least the substance in the container; and a heating process for liquefying the discharge port substance by heating at least the substance so that at least the discharge port substance is in a liquid state, and discharging the liquid beam from the discharge port.

24. A liquefaction apparatus for liquefying a substance that is a gas under standard conditions by supplying it to a container provided with a discharge port and pressurizing and cooling it to a level higher than the standard conditions, comprising: a container; a supply unit for supplying the gaseous substance to the container at a desired supply pressure; a temperature adjustment unit for adjusting the temperature of the substance in the container by adjusting the container temperature of the container; and a control unit for controlling the supply unit and the temperature adjustment unit, wherein the pressure at the critical point of the substance is the critical pressure, and the control unit controls the supply unit and the temperature adjustment unit to reach a state where (1) the discharge port substance, which is at least the substance located at the discharge port, is a gaseous state under a first pressure where the supply pressure is lower than the critical pressure; (2) the discharge port substance becomes a solid, passing through a solidification blockage state where at least the substance temperature among the substance temperature and the supply pressure is lowered; and (3) the discharge port substance becomes a liquid, passing through a state where at least the substance temperature among the substance temperature and the supply pressure is raised.

25. A liquefaction method for liquefying a substance that is a gas under standard conditions by supplying it to a container provided with a discharge port and cooling it under pressure higher than the standard conditions, wherein the pressure at the critical point of the substance is the critical pressure, and the liquefaction method includes a phase change process that causes the substance to undergo a phase change: (1) from a gaseous state in which at least the discharge port substance, which is the substance located at the discharge port, is a gas, under a first pressure where the supply pressure is lower than the critical pressure; (2) through a solidification blockage state in which at least the substance temperature among the substance temperature and the supply pressure is lowered so that the discharge port substance becomes a solid; and (3) to a liquid state in which at least the substance temperature among the substance temperature and the supply pressure is raised so that the discharge port substance becomes a liquid.

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